CN110658207A - Detection method and device for distinguishing foreign matters inside and outside non-polarizing film - Google Patents
Detection method and device for distinguishing foreign matters inside and outside non-polarizing film Download PDFInfo
- Publication number
- CN110658207A CN110658207A CN201910939575.2A CN201910939575A CN110658207A CN 110658207 A CN110658207 A CN 110658207A CN 201910939575 A CN201910939575 A CN 201910939575A CN 110658207 A CN110658207 A CN 110658207A
- Authority
- CN
- China
- Prior art keywords
- light source
- side light
- panel
- polarizing film
- distinguishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention belongs to the technical field of panel detection, and discloses a detection method and a device for distinguishing foreign matters inside and outside a non-polarizing film. The invention can distinguish whether the foreign matter is in the film or out of the film, and can well distinguish the OK screen from the NG screen.
Description
Technical Field
The invention relates to the technical field of panel detection, in particular to a detection method and a device for distinguishing foreign matters inside and outside a non-polarizing film.
Background
In the development of the current panel industry, it is necessary to detect not only a dot line and the like, scratches and the like, but also foreign matter. When the LCD screen is produced, a protective film is stuck on the screen, and the protective film is a common plastic non-polarizing film. When the appearance of the screen is to be inspected, it is necessary to inspect foreign matter in the screen. Because the environment cannot be completely dust-free, dust can fall on the surface of the film, at the moment, foreign matters are found on the screen during detection, and if the foreign matters are in the film or out of the film, the screen is NG or OK.
Disclosure of Invention
The embodiment of the application solves the problem that the foreign matters cannot be distinguished in or out of the film in the prior art by providing the detection method and the detection device for distinguishing the foreign matters in and out of the non-polarizing film.
The embodiment of the application provides a distinguish detection device of foreign matter in non-polarizing film and outside membrane, includes:
the image acquisition unit is used for acquiring an image of the panel to be detected from the normal direction of the panel to be detected;
the side light source unit comprises a plurality of side light source assemblies which obliquely irradiate the surface of the panel to be measured at the same brightness and different angles respectively;
the side light source assemblies are sequentially turned on and off, and when each side light source assembly is turned on, the image acquisition unit acquires images of the panel to be detected to obtain a plurality of acquisition information.
Preferably, the detection device for distinguishing foreign matter inside and outside the non-polarizing film further includes:
and the detection and judgment unit is used for analyzing according to the plurality of pieces of acquired information and judging the position of the foreign matter.
Preferably, the detection device for distinguishing foreign matter inside and outside the non-polarizing film further includes: and a fixing unit for placing the panel to be tested.
Preferably, the side light source assemblies are all located on one side of the normal line of the panel to be measured.
Preferably, a plurality of the side light source assemblies are equally angularly spaced.
Preferably, each side light source assembly comprises two side light source sub-elements which are symmetrically arranged based on the normal line of the panel to be measured.
Preferably, the side light source elements on the same side of the normal of the panel to be measured are equally angularly spaced.
By adopting the device, the embodiment of the application provides a detection method for distinguishing foreign matters inside and outside a non-polarizing film, a plurality of side light source assemblies are controlled to be sequentially turned on and off, and when each side light source assembly is turned on, an image acquisition unit is used for acquiring images of a panel to be detected to obtain a plurality of acquisition information; and judging the position of the foreign matter according to a plurality of pieces of acquired information.
Preferably, before the plurality of side light source assemblies are controlled to be sequentially turned on and off, the working distance of the image acquisition unit is adjusted, so that the image acquisition unit can cover all detection areas of the panel to be detected.
Preferably, the position of the foreign object is determined according to the plurality of pieces of collected information as follows: and the collected picture is observed by naked eyes for judgment, or the collected picture is analyzed and judged by a detection judgment unit.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
in the embodiment of the application, the plurality of side light source assemblies are controlled to be sequentially turned on and off, when each side light source assembly is turned on, the image acquisition unit is used for acquiring the image of the panel to be detected to obtain a plurality of acquisition information, and the position of the foreign matter is judged according to the plurality of acquisition information. The invention utilizes the side light source to polish in multiple angles, and analyzes whether the foreign matter is the foreign matter in the film or the foreign matter outside the film according to the brightness change of the foreign matter, thereby being capable of well distinguishing the OK screen from the NG screen.
Drawings
In order to more clearly illustrate the technical solution in the present embodiment, the drawings needed to be used in the description of the embodiment will be briefly introduced below, and it is obvious that the drawings in the following description are one embodiment of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
FIG. 1 is a schematic diagram of a prior art appearance inspection of a panel;
FIG. 2 is a schematic diagram of a detection apparatus for distinguishing between foreign objects inside and outside a non-polarizing film according to embodiment 1 of the present invention;
fig. 3 is a schematic diagram of a detection apparatus for distinguishing between foreign matters inside and outside a non-polarizing film according to embodiment 2 of the present invention.
Detailed Description
In the prior art, two side light sources are generally used for illumination, as shown in fig. 1, since foreign matters in and outside the film reflect light, when a camera is used for detection, the foreign matters in and outside the film can be detected. As a result, defects such as dust, dirt, and the like outside the film, for example, P _ a, are considered as foreign matter inside the screen, and the screen is considered to be defective due to the presence of the foreign matter. However, the foreign matter is actually foreign matter outside the film, and is removed by wiping or the like, and cannot be considered as a foreign matter of the screen. Thus, it is impossible to distinguish between membrane-in-membrane foreign matter and the OK screen is confused with the NG screen. That is, the conventional detection method can only detect foreign matters in and out of the film, but cannot distinguish the foreign matters, so that the OK panel and the NG panel cannot be recognized.
In order to solve the problems, the invention provides a detection device for distinguishing foreign matters inside and outside a non-polarizing film, which mainly comprises an image acquisition unit and a side light source unit. The image acquisition unit is used for acquiring an image of the panel to be detected from the normal direction of the panel to be detected. The side light source unit comprises a plurality of side light source assemblies, and the side light source assemblies obliquely irradiate the surface of the panel to be measured at the same brightness and different angles respectively. The plurality of side light source assemblies are sequentially lightened and extinguished, and when each side light source assembly is lightened, the image acquisition unit acquires images of the panel to be detected to obtain a plurality of acquisition information.
The invention adopts a multi-angle polishing mode for detection, and distinguishes whether the foreign matter is an intramembrane foreign matter or an extramembrane foreign matter through the change of the brightness of the foreign matter.
In order to better understand the technical solution, the technical solution will be described in detail with reference to the drawings and the specific embodiments.
Example 1:
embodiment 1 provides a detection apparatus for distinguishing foreign matter inside and outside a non-polarizing film, as shown in fig. 2, including: image acquisition unit, sidelight source unit.
The image acquisition unit is used for acquiring an image of the panel to be detected from the normal direction of the panel to be detected. The side light source unit comprises a plurality of side light source assemblies, and the side light source assemblies obliquely irradiate the surface of the panel to be measured at the same brightness and different angles respectively.
Specifically, the image acquisition unit comprises a camera and a lens. The side light source assemblies (respectively, the first side light source assembly L1, the second side light source assembly L2, and the third side light source assembly L3) are all located at one side of the normal line of the panel to be measured.
The side light source assemblies are sequentially turned on and off, and when each side light source assembly is turned on, the image acquisition unit acquires images of the panel to be detected to obtain a plurality of acquisition information.
The brightness of a plurality of the side light source assemblies is the same to realize variable control. The side light source assemblies in the detection can be irradiated by a plurality of any different angles, namely, the side light source assemblies can adopt any different angles instead of being equally spaced.
Preferably, a plurality of the side light assemblies (L1, L2, L3) are equally angularly spaced, which facilitates analysis of experimental results. For example, the angles of the first, second and third side light source assemblies L1, L2 and L3, which are the included angles between the light sources and the normal line, are adjusted to 30 °, 60 ° and 75 °, respectively.
The operation steps will be described with reference to the above-mentioned specific apparatus.
(1) The working distance of the camera is determined. Working distance WD = of cameraf(1+L/l)。fFor the focal length of the selected lens,Lis the length (width) of the panel,lis the length (width) of the camera chip. The actual working distance is adjusted on the basis of the actual working distance, so that the camera can shoot the whole visual field.
(2) Three side light source assemblies (the angles of L1, L2 and L3 are respectively adjusted to be 30 degrees, 60 degrees and 75 degrees) are erected on one side of the long side of the panel to be detected.
(3) And adjusting a focusing ring of the lens to focus.
(4) The first side light source assembly L1 is turned on, and the light sources at the other two angles (L2, L3) are both in an off state, and image acquisition is performed by the image acquisition unit to obtain a first picture.
(5) The second side light source assembly L2 is turned on, and the light sources at the other two angles (L1, L3) are both in an off state, and image acquisition is performed by the image acquisition unit to obtain a second picture.
(6) The third side light source assembly L3 is turned on, and the light sources at the other two angles (L1, L2) are both in the off state, and image acquisition is performed by the image acquisition unit to obtain a third picture.
(7) And observing the brightness change of the particles in the first picture, the second picture and the third picture. If the brightness of the particles has brightness variation, the particles are foreign matters in the film (such as P _ B in FIG. 2); if the brightness of the particles does not change significantly, the particles are foreign matter outside the film (for example, P _ a in fig. 2).
The principle of distinguishing foreign matters inside and outside the non-polarizing film is as follows:
the angle of the light source is changed to carry out lighting, and the drawing is carried out, when the brightness of the particles has brightness change, the particles are foreign matters in the film; foreign matter is an extramembranous foreign matter when there is no significant change in the brightness of the foreign matter. This is because the foreign substance outside the film is mie-scattered, and light at various angles does not greatly affect the foreign substance, and the reflection characteristics of the particles do not change, and thus the luminance of the particles does not greatly change. However, when the incident angle of the light source changes, the brightness of the light entering the film changes, and the brightness of the foreign matter in the film also changes with the incident angle. That is, the incident angle changes due to the law of refraction, and the refraction angle also changes, so that the intensity of the refracted light changes, and the intensity of the light reflected inside the camera changes. Therefore, the light can be emitted by a light source with a plurality of angles, and the change of the brightness of the particles is observed, so that the foreign matters inside and outside the film are distinguished.
Example 2:
embodiment 2 differs from embodiment 1 in that each of the side light assemblies includes two side light sub-elements symmetrically disposed based on a normal to the panel under test.
Preferably, the side light source components on the same side of the normal of the panel to be tested are spaced at equal angles, so that the experimental result can be analyzed more conveniently.
As shown in fig. 3, the first side light source assembly includes a first one-side light source sub-assembly L1-1 and a first two-side light source sub-assembly L1-2, the second side light source assembly includes a second one-side light source sub-assembly L2-1 and a second one-side light source sub-assembly L2-2, and the third side light source assembly includes a third one-side light source sub-assembly L3-1 and a third one-side light source sub-assembly L3-2.
The first primary side light source sub-element L1-1 and the first secondary side light source sub-element L1-2 are symmetrically arranged based on the normal of the panel to be measured, and the incident angles are both 30 degrees; the second side light source sub-piece L2-1 and the second side light source sub-piece L2-2 are symmetrically arranged based on the normal of the panel to be measured, and the incident angles are both 60 degrees; the third side light source sub-piece L3-1 and the third side light source sub-piece L3-2 are symmetrically arranged based on the normal of the panel to be measured, and the incidence angles are both 75 degrees.
The operation steps will be described with reference to the above-mentioned specific apparatus.
(1) And determining the working distance of the camera to ensure that the camera can shoot the whole visual field.
(2) Three side light source elements are respectively arranged on two sides of the long side of the measured panel.
(3) And adjusting a focusing ring of the lens to focus.
(4) And (4) lightening the L1-1 and the L1-2, enabling other light sources to be in a closed state, and acquiring an image through an image acquisition unit to obtain a first picture.
(5) And (5) lightening the L2-1 and the L2-2, enabling other light sources to be in a closed state, and acquiring an image through an image acquisition unit to obtain a second picture.
(6) And (5) lightening the L3-1 and the L3-2, enabling other light sources to be in a closed state, and acquiring an image through an image acquisition unit to obtain a third picture.
(7) And observing the brightness change of the particles in the first picture, the second picture and the third picture. If the brightness of the particles has brightness variation, the particles are foreign matters in the film (such as P _ B in FIG. 3); if the brightness of the particles does not change significantly, the particles are foreign matter outside the film (for example, P _ a in fig. 3).
Compared with the embodiment 1, the embodiment 2 can provide more uniform illumination and obtain more effective collected pictures.
The embodiment 1 and the embodiment 2 can directly judge the position of the foreign matter by observing the collected picture by naked eyes, and the detection device is simple and convenient to operate.
It should be noted that the specific arrangement of the side light sources is not limited to embodiment 1 and embodiment 2, and other arrangement may be adopted according to the detection principle of the present invention.
Example 3:
in addition to embodiment 1 or embodiment 2, a detection determination unit and a fixing unit may be provided.
The detection and judgment unit is used for analyzing according to the plurality of collected information and judging the position of the foreign matter. The fixing unit is used for carrying the panel to be tested.
Embodiment 3 can be used in application scenarios with higher requirements on accuracy. The detection determination unit may be a PC or other image processing apparatus.
In summary, the present invention provides a detection method for detecting a panel by changing the angle of a side light source and distinguishing between in-film and out-film foreign objects by observing the brightness change of the foreign objects. The detection method can effectively detect the foreign matters in the panel film, thereby greatly improving the product yield.
The detection method and the device for distinguishing the foreign matters inside and outside the non-polarizing film provided by the embodiment of the invention at least have the following technical effects:
(1) the detection device is simple, and the camera with single visual angle can distinguish the foreign matters in and out of the film.
(2) The operation is simple and convenient, and the foreign matters in the membrane and the foreign matters outside the membrane can be distinguished by observing the picture by naked eyes.
Finally, it should be noted that the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to examples, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, which should be covered by the claims of the present invention.
Claims (10)
1. A detection device for distinguishing foreign matter inside and outside a non-polarizing film, comprising:
the image acquisition unit is used for acquiring an image of the panel to be detected from the normal direction of the panel to be detected;
the side light source unit comprises a plurality of side light source assemblies which obliquely irradiate the surface of the panel to be measured at the same brightness and different angles respectively;
the side light source assemblies are sequentially turned on and off, and when each side light source assembly is turned on, the image acquisition unit acquires images of the panel to be detected to obtain a plurality of acquisition information.
2. The detection device for distinguishing between foreign objects inside and outside a non-polarizing film according to claim 1, further comprising:
and the detection and judgment unit is used for analyzing according to the plurality of pieces of acquired information and judging the position of the foreign matter.
3. The detection device for distinguishing between foreign objects inside and outside a non-polarizing film according to claim 1, further comprising:
and a fixing unit for placing the panel to be tested.
4. The device according to claim 1, wherein the side light source units are disposed on a side of a normal line of the panel to be inspected.
5. The device according to claim 4, wherein the side light source units are equally angularly spaced.
6. The device according to claim 1, wherein each of the side light units includes two side light elements symmetrically disposed with respect to a normal line of the panel under test.
7. The device according to claim 6, wherein the side-light source elements on the same side of the normal line of the panel under test are equally angularly spaced.
8. A detection method for distinguishing between foreign matters inside and outside a non-polarizing film, using the detection device for distinguishing between foreign matters inside and outside a non-polarizing film according to any one of claims 1 to 7, by: controlling a plurality of side light source assemblies to be sequentially turned on and off, and acquiring images of a panel to be detected through an image acquisition unit when each side light source assembly is turned on to obtain a plurality of acquisition information; and judging the position of the foreign matter according to a plurality of pieces of acquired information.
9. The method according to claim 8, wherein the working distance of the image capturing unit is adjusted before the plurality of side light assemblies are controlled to be sequentially turned on and off, so as to ensure that the image capturing unit covers the whole detection area of the panel to be detected.
10. The detection method for distinguishing foreign matter inside and outside a non-polarizing film according to claim 8, wherein the position of the foreign matter determined from the plurality of pieces of collected information is: and the collected picture is observed by naked eyes for judgment, or the collected picture is analyzed and judged by a detection judgment unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910939575.2A CN110658207A (en) | 2019-09-30 | 2019-09-30 | Detection method and device for distinguishing foreign matters inside and outside non-polarizing film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910939575.2A CN110658207A (en) | 2019-09-30 | 2019-09-30 | Detection method and device for distinguishing foreign matters inside and outside non-polarizing film |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110658207A true CN110658207A (en) | 2020-01-07 |
Family
ID=69039949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910939575.2A Pending CN110658207A (en) | 2019-09-30 | 2019-09-30 | Detection method and device for distinguishing foreign matters inside and outside non-polarizing film |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110658207A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113008898A (en) * | 2021-02-25 | 2021-06-22 | 四川兆纪光电科技有限公司 | Detection device and detection method for backlight source module |
CN117147586A (en) * | 2023-10-26 | 2023-12-01 | 江苏纳沛斯半导体有限公司 | COF resin region foreign matter detection method |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63186132A (en) * | 1987-01-29 | 1988-08-01 | Nikon Corp | Foreign matter inspection device |
TW200829909A (en) * | 2007-01-15 | 2008-07-16 | Snu Precision Co Ltd | Device for detecting foreign object on flat panel display |
CN102128838A (en) * | 2010-01-15 | 2011-07-20 | 台达电子工业股份有限公司 | Internal defect inspection device and method for substrate |
CN103412421A (en) * | 2013-07-31 | 2013-11-27 | 京东方科技集团股份有限公司 | Detecting system |
CN105738380A (en) * | 2014-12-29 | 2016-07-06 | 三星显示有限公司 | Detecting device of display device and detecting method of display device |
CN106814084A (en) * | 2016-06-08 | 2017-06-09 | 北京壹格科技有限公司 | A kind of new panel surface defect detecting system |
CN107727661A (en) * | 2017-11-02 | 2018-02-23 | 中国科学院光电研究院 | The apparatus and method for determining transparent material surface flaw/spot position |
CN107764834A (en) * | 2017-12-07 | 2018-03-06 | 南京波长光电科技股份有限公司 | A kind of device and its detection method of automatic detection transparent parts surface defect |
CN108982520A (en) * | 2018-08-03 | 2018-12-11 | 汕头超声显示器(二厂)有限公司 | A kind of detection method and device of film bottom visible defects |
CN109387527A (en) * | 2017-08-09 | 2019-02-26 | 苏州精濑光电有限公司 | On a kind of film in film defect detection method |
-
2019
- 2019-09-30 CN CN201910939575.2A patent/CN110658207A/en active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63186132A (en) * | 1987-01-29 | 1988-08-01 | Nikon Corp | Foreign matter inspection device |
TW200829909A (en) * | 2007-01-15 | 2008-07-16 | Snu Precision Co Ltd | Device for detecting foreign object on flat panel display |
CN102128838A (en) * | 2010-01-15 | 2011-07-20 | 台达电子工业股份有限公司 | Internal defect inspection device and method for substrate |
CN103412421A (en) * | 2013-07-31 | 2013-11-27 | 京东方科技集团股份有限公司 | Detecting system |
CN105738380A (en) * | 2014-12-29 | 2016-07-06 | 三星显示有限公司 | Detecting device of display device and detecting method of display device |
CN106814084A (en) * | 2016-06-08 | 2017-06-09 | 北京壹格科技有限公司 | A kind of new panel surface defect detecting system |
CN109387527A (en) * | 2017-08-09 | 2019-02-26 | 苏州精濑光电有限公司 | On a kind of film in film defect detection method |
CN107727661A (en) * | 2017-11-02 | 2018-02-23 | 中国科学院光电研究院 | The apparatus and method for determining transparent material surface flaw/spot position |
CN107764834A (en) * | 2017-12-07 | 2018-03-06 | 南京波长光电科技股份有限公司 | A kind of device and its detection method of automatic detection transparent parts surface defect |
CN108982520A (en) * | 2018-08-03 | 2018-12-11 | 汕头超声显示器(二厂)有限公司 | A kind of detection method and device of film bottom visible defects |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113008898A (en) * | 2021-02-25 | 2021-06-22 | 四川兆纪光电科技有限公司 | Detection device and detection method for backlight source module |
CN117147586A (en) * | 2023-10-26 | 2023-12-01 | 江苏纳沛斯半导体有限公司 | COF resin region foreign matter detection method |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101263973B1 (en) | Oblique transmission illumination inspection system and method for inspecting a glass sheet | |
JP3892906B2 (en) | Techniques for detecting three-dimensional defect locations in transparent structures. | |
KR101326455B1 (en) | Apparatus and method for characterizing defects in a transparent substrate | |
KR101733197B1 (en) | Multi optic vision device | |
TW201310023A (en) | Apparatus and method for detecting the surface defect of the glass substrate | |
JP2000009591A (en) | Inspection equipment | |
CN110658207A (en) | Detection method and device for distinguishing foreign matters inside and outside non-polarizing film | |
WO2008100703A1 (en) | Method and apparatus for illuminating film for automated inspection | |
JP4748133B2 (en) | Inspection device | |
JP2017166903A (en) | Defect inspection device and defect inspection method | |
TW201341785A (en) | A system and method for inspecting an article for defects | |
CN110261387B (en) | Optical system, illumination module and automatic optical inspection system | |
KR101006983B1 (en) | detecting apparatus for panel | |
JPH11281584A (en) | Method and apparatus for inspection | |
JPH10176995A (en) | Method and apparatus for inspection for transparent object | |
KR20130143226A (en) | Apparatus for inspecting light guide plate | |
KR101860733B1 (en) | Film inspection device and film inspection method | |
JPS63165738A (en) | Flaw inspection apparatus for transparent substrate | |
KR20110125906A (en) | Reticle inspection method and the apparatus | |
KR101555542B1 (en) | inspecting machine for flat panel | |
KR102246219B1 (en) | An apparatus for infrared inspection of an electronic component and method thereof | |
CN208672536U (en) | A kind of dark field defect detecting device of heavy caliber ultra-precision surface | |
KR20160032576A (en) | System and Method for Analyzing Image Using High-Speed Camera and Infrared Optical System | |
JPH0868767A (en) | Apparatus for inspecting flaw of body part of bottle | |
EP1126273A1 (en) | Method and arrangement for inspecting a transparent object for flaws |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200107 |