CN110581670B - Precise linear driving device with clamping type stator - Google Patents
Precise linear driving device with clamping type stator Download PDFInfo
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- CN110581670B CN110581670B CN201910922755.XA CN201910922755A CN110581670B CN 110581670 B CN110581670 B CN 110581670B CN 201910922755 A CN201910922755 A CN 201910922755A CN 110581670 B CN110581670 B CN 110581670B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
A precise linear driving device with a clamping stator is used for solving the problems that the conventional piezoelectric stick-slip linear driving device is small in stroke, free of self-centering function, obvious in displacement rollback and the like. The invention comprises a base unit, a fixed guide rail assembly, a sliding guide rail unit, a driving unit, an upper cover assembly and an adjusting rod assembly, wherein the fixed guide rail assembly is connected with the base unit through screws, the sliding guide rail unit is installed in a matching way with the fixed guide rail assembly, and the driving unit is installed and fixed on the upper cover assembly and is connected with the base unit through the adjusting rod assembly. According to the invention, the comprehensive regulation and control of the friction force in the driving stage and the self-centering function of the friction force are realized through the structural design of the driving device, the positioning precision of the linear driving device is obviously improved, and the displacement backspacing is reduced; the micro-nano precise driving and positioning device can be widely applied to the technical field of micro-nano precise driving and positioning in semiconductor processing and the like.
Description
Technical Field
The invention relates to a precise linear driving device with a clamping stator, and belongs to the technical field of micro-nano precise driving and positioning.
Background
With the rapid development of the ultra-precision machining and manufacturing industry, the traditional driving device has larger size and limited positioning precision, and the requirements of modern advanced manufacturing fields such as worm and gear, gear transmission, lead screw and nut are difficult to meet. The piezoelectric stick-slip driving device has the advantages of compact structure, high positioning precision, less heat generation, large output force, high response speed, no electromagnetic interference and the like, has wide application prospects in the fields of ultra-precision machining, biomedical treatment, aerospace, life science and the like, and is one of the hot spots of research in the technical field of precise special driving in recent years.
The precision driving device is widely applied to the high-end technical fields of life science, optical precision instruments, ultra-precision machining, aerospace and the like. The current precision platform based on piezoelectric driving mainly comprises a direct-drive piezoelectric driving device, an inchworm piezoelectric driving device, a stick-slip piezoelectric driving device and the like, and the direct-drive piezoelectric driving platform has a small motion stroke, so that the application of the direct-drive piezoelectric driving platform in the technical field of micro-nano precision driving is seriously influenced; the inchworm type piezoelectric driving device has a very complex control system and high cost; the piezoelectric stick-slip driving platform has the advantages of simple and compact structure, high positioning precision, large stroke, convenience in control and the like, and is widely applied to the technical field of precision driving and positioning. The current driving device also has the problems of small stroke, no self-centering function, obvious displacement backspacing phenomenon and the like, and in addition, the output efficiency is low, so that a large lifting space is provided.
Disclosure of Invention
The piezoelectric stick-slip linear driving device aims at solving the problems that the conventional piezoelectric stick-slip linear driving device is small in stroke, free of self-centering function, obvious in displacement rollback phenomenon and the like. The invention discloses a precise linear driving device with a clamping stator.
The technical scheme adopted by the invention is as follows:
a precise linear driving device with a clamping stator comprises a base unit, a fixed guide rail assembly, a sliding guide rail unit, a driving unit, an upper cover assembly and an adjusting rod assembly; the fixed guide rail assembly is connected with the base unit through a screw; the sliding guide rail unit is matched with the fixed guide rail assembly; the drive unit is mounted and fixed on an upper cover assembly, and the upper cover assembly is connected with the base unit.
The base unit comprises a base, a locking adjusting plate and a locking adjusting plate fixing screw; the locking adjusting plate is fixed on the base through locking adjusting plate fixing screws, and when the locking force is adjusted to a target value, the upper cover assembly and the base unit are fixed; the base comprises a base counter bore, a fixed guide rail bracket positioning threaded hole, a rectangular groove, an adjusting hole, a base upper surface, a rectangular positioning protruding block, a locking adjusting plate limiting hole and a lower end spring hook; the base positioning counter sink is used for fixing the base; the fixed guide rail bracket positioning threaded hole is fixedly connected with the fixed guide rail assembly through a screw; the rectangular groove is matched with the end wall of the upper cover in an installing mode, and the adjusting hole is in clearance fit with the adjusting rod assembly; the upper surface of the base is contacted with the bottom surface of the fixed guide rail bracket; the rectangular positioning protruding block is matched with the rectangular groove of the upper cover in an installing way; the locking adjusting plate limiting hole is used for installing a locking adjusting plate fixing screw; the lower end spring hook is connected with one end of the spring; the locking adjusting plate comprises a locking adjusting plate mounting through hole and a locking adjusting screw guide groove; the locking adjusting plate mounting through hole is assembled with a locking adjusting plate fixing screw to fix the locking adjusting plate on the base; the locking adjusting screw guide groove is installed in clearance fit with the locking adjusting screw.
The fixed guide rail assembly comprises a fixed guide rail bracket, fixed guide rail bracket positioning screws, a fixed guide rail, fixed guide rail positioning screws and a cross roller guide rail bracket; the fixed guide rail bracket is fixed on the base through a fixed guide rail bracket positioning screw; the fixed guide rail is fixed on the fixed guide rail bracket through a fixed guide rail positioning screw; the cross roller guide rail bracket is arranged on the fixed guide rail; the fixed guide rail bracket comprises a fixed guide rail bracket positioning countersunk hole, a fixed guide rail bracket positioning surface I, a fixed guide rail bracket positioning plane II, a fixed guide rail positioning threaded hole and a fixed guide rail bracket bottom surface; the fixed guide rail bracket positioning countersunk hole is used for installing a fixed guide rail bracket positioning screw to fix the fixed guide rail bracket on the base; the fixed guide rail bracket positioning surface I is contacted with the fixed guide rail positioning surface I; the fixed guide rail bracket positioning surface II is contacted with the fixed guide rail positioning surface II; the fixed guide rail positioning threaded hole is assembled with the fixed guide rail positioning screw to fix the fixed guide rail on the fixed guide rail bracket; the bottom surface of the fixed guide rail bracket is in contact with the upper surface of the base; the fixed guide rail comprises a fixed guide rail positioning surface II, a fixed guide rail threaded hole, a fixed guide rail positioning surface I and a fixed guide rail cross roller guide rail bracket mounting groove; the fixed guide rail positioning surface II is contacted with the fixed guide rail bracket positioning surface II; the fixed guide rail threaded hole is assembled with a fixed guide rail positioning screw; the fixed guide rail positioning surface I is contacted with the fixed guide rail bracket positioning surface I; the fixed guide rail cross roller guide rail bracket mounting groove is used for mounting a cross roller guide rail bracket.
The sliding guide rail unit comprises a positioning screw of a sliding guide rail connecting block, a sliding guide rail connecting block and a sliding guide rail; the sliding guide rail connecting block positioning screws connect the sliding guide rails together through the sliding guide rail connecting blocks; the sliding guide rail connecting block comprises a sliding guide rail connecting block mounting hole and a sliding guide rail connecting block side surface; a positioning screw of the sliding guide rail connecting block is arranged in the sliding guide rail connecting block mounting hole; the side surface of the sliding guide rail connecting block is in contact with the end surface of the sliding guide rail; the sliding guide rail comprises a sliding guide rail end face, a sliding guide rail end face threaded hole and a sliding guide rail cross roller guide rail bracket mounting groove; the end surface of the sliding guide rail is contacted with the side surface of the sliding guide rail connecting block; the threaded hole on the end face of the sliding guide rail is connected with the positioning screw of the connecting block of the sliding guide rail in a threaded fit manner; the cross roller guide rail bracket mounting groove of the sliding guide rail is assembled with the cross roller guide rail bracket.
The driving unit comprises a wedge-shaped clamping stator, a piezoelectric stack, a gasket and a pretightening force adjusting screw; the piezoelectric stack and the gasket are fixed in the wedge-shaped clamping stator through a pretightening force adjusting base screw; the wedge-shaped clamping type stator comprises a stator positioning end face I, a base meter screw threaded hole, a stator threaded hole I, a stator positioning end face II, a stator threaded hole II, a piezoelectric stacking power-assisted flexible hinge, a stator flexible front beam, a straight circular flexible hinge, a flexible beam groove, a diamond-shaped cross beam, a clamp wedge face, a wedge-shaped clamp arm and a stator fixing end; the stator positioning end face I is in contact with the stator positioning face; the base meter screw threaded hole is connected with the pretightening force adjusting base meter screw in a threaded fit manner; the stator threaded hole I is matched with the wedge-shaped stator positioning screw through threads to fix the driving unit on the self-adjusting upper cover; the stator positioning end face II is contacted with the stator positioning face; the stator threaded hole II is matched with the wedge-shaped stator positioning screw through threads to fix the driving unit on the self-adjusting upper cover; the piezoelectric stacking power-assisted flexible hinge is connected with the stator flexible front beam and the stator fixed end; the straight round flexible hinge is arranged at the joint of the diamond-shaped cross beam; the flexible beam groove is formed in the piezoelectric stacking power-assisted flexible hinge; the clamp is arranged at the tail end of the wedge-shaped clamp arm; the clamp wedge surface is contacted with the sliding guide rail; the wedge-shaped clamp arms are arranged at two ends of the rhombic beam.
The upper cover assembly comprises a self-adjusting upper cover, wedge-shaped stator positioning screws, an upper precise adjusting nut, locking adjusting screws and springs; the wedge-shaped clamping type stator is fixed on the self-adjusting type upper cover by the wedge-shaped stator positioning screw; the upper precise adjusting nut is arranged on the self-adjusting upper cover in an interference fit manner; the locking adjusting screw penetrates through the locking adjusting plate mounting through hole to fix the locking adjusting plate on the upper cover through threaded connection; one end of the spring is connected with the upper end spring hook, and the other end of the spring is connected with the lower end spring hook; the self-adjusting upper cover comprises an upper precise adjusting nut counter bore, a stator positioning counter bore I, an upper cover positioning end wall, a stator positioning counter bore II, a locking adjusting screw threaded hole, an upper end spring hook, an upper cover rectangular groove and a stator positioning plane; the upper precise adjusting nut counter sink is used for installing an upper precise adjusting nut; the stator positioning countersunk hole I is used for fixing the wedge-shaped clamping type stator on the self-adjusting type upper cover by using a wedge-shaped stator positioning screw; the upper cover positioning end wall is matched with the rectangular groove in an installing mode; the stator positioning counter sink II is used for fixing the wedge-shaped clamping type stator on the self-adjusting type upper cover by using a wedge-shaped stator positioning screw; the locking adjusting screw threaded hole is used for installing a locking adjusting screw; the upper end spring hook is connected with the spring; the rectangular groove of the upper cover is matched with the rectangular positioning protruding block in an installing way; the stator positioning plane is in contact with the stator positioning end face I and the stator positioning end face II.
The adjusting rod assembly comprises a precise thread pair adjusting screw rod and a precise thread pair adjusting handle; the precise thread pair adjusting screw is in threaded connection with the upper precise adjusting nut and is in clearance fit with the adjusting hole; and the precise thread pair adjusting handle is in adhesive connection with the precise thread pair adjusting screw rod.
Has the advantages that:
the invention provides a precise linear driving device with a clamping stator, which aims to solve the problems of small stroke, no self-centering function and the like of the conventional piezoelectric stick-slip linear driving device. When the piezoelectric stack stretches, the wedge-shaped clamping stator adopts a diamond-shaped motion conversion mechanism, so that the clamp of the wedge-shaped clamping stator generates longitudinal extension and transverse contraction, the positive pressure of contact between the wedge-shaped clamping stator and the sliding guide rail is adjusted, the comprehensive regulation and control of friction force in the driving process of the linear driving device are realized, and the displacement backspacing is reduced; and because the clamp is a wedge-shaped surface, the self-centering function of the linear driving device can be realized, and the positioning precision is improved. The invention has the advantages of compact structure, convenient control, high positioning precision, unlimited stroke and the like, and can be widely applied to the technical field of micro-nano precision driving and positioning in semiconductor processing and the like.
Drawings
FIG. 1 is a schematic structural diagram of a precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 2 is a schematic structural diagram of a base unit of the precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 3 is a schematic view of a base structure of a precision linear driving apparatus having a clamping stator according to the present invention;
fig. 4 is a schematic structural view of a locking adjustment plate of a precision linear driving apparatus having a clamping stator according to the present invention;
FIG. 5 is a schematic view of a fixed rail assembly of the precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 6 is a schematic structural diagram of a fixed rail bracket of the precise linear driving device with a clamping stator according to the present invention;
FIG. 7 is a schematic structural diagram II of a fixed rail bracket of the precision linear driving apparatus with a clamped stator according to the present invention;
FIG. 8 is a schematic structural diagram I of a fixed guide rail of a precision linear driving device with a clamping stator according to the present invention;
FIG. 9 is a schematic view of a fixed guide rail structure II of the precise linear driving device with a clamping stator according to the present invention;
FIG. 10 is a schematic view of a cross roller guide support structure of a precision linear drive with a clamped stator according to the present invention;
FIG. 11 is a schematic structural view of a sliding guide unit of the precision linear driving apparatus having a clamping stator according to the present invention;
FIG. 12 is a schematic view showing a structure of a sliding guide connecting block of a precision linear driving apparatus having a clamping stator according to the present invention;
FIG. 13 is a schematic view of a sliding guide of the precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 14 is a schematic view of a driving unit of the precise linear driving apparatus with a clamping stator according to the present invention;
fig. 15 is a schematic structural diagram i of a wedge-type clamping stator of a precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 16 is a schematic structural diagram II of a wedge-type clamped stator of the precise linear driving device with a clamped stator according to the present invention;
fig. 17 is a schematic structural diagram iii of a wedge-type clamping stator of a precision linear driving apparatus with a clamping stator according to the present invention;
FIG. 18 is a schematic structural view of an upper cover assembly of a precision linear driving apparatus having a clamping stator according to the present invention;
FIG. 19 is a schematic view of the upper fine adjustment nut of the fine linear driving device with clamping stator according to the present invention;
FIG. 20 is a schematic structural view of a self-adjusting upper cover of a precision linear driving device with a clamping stator according to the present invention;
FIG. 21 is a schematic view of a self-adjusting top cover of the precision linear actuator with a clamped stator according to the present invention;
fig. 22 is a schematic structural view of an adjusting rod assembly of the precision linear driving apparatus with a clamping stator according to the present invention.
Detailed Description
The first embodiment is as follows: the present embodiment is described with reference to fig. 1 to 22, and provides an embodiment of a precision linear driving apparatus having a clamp-type stator, which is described as follows:
the precise linear driving device with the clamping stator comprises a base unit 1, a fixed guide rail assembly 2, a sliding guide rail unit 3, a driving unit 4, an upper cover assembly 5 and an adjusting rod assembly 6; the fixed guide rail assembly 2 is connected with the base unit 1 through screws; the sliding guide rail unit 3 is matched with the fixed guide rail assembly 2; the drive unit 4 is mounted and fixed on an upper cover assembly 5, and the upper cover assembly 5 is connected with the base unit 1.
The base unit 1 comprises a base 1-1, a locking adjusting plate 1-2 and a locking adjusting plate fixing screw 1-3; the locking adjusting plate 1-2 is fixed on the base 1-1 through locking adjusting plate fixing screws 1-3, and when the locking force is adjusted to a target value, the upper cover assembly 5 and the base unit 1 are fixed; the base 1-1 comprises a base counter bore 1-1-1, a fixed guide rail bracket positioning threaded hole 1-1-2, a rectangular groove 1-1-3, an adjusting hole 1-1-4, a base upper surface 1-1-5, a rectangular positioning protruding block 1-1-6, a locking adjusting plate limiting hole 1-1-7 and a lower end spring hook 1-1-8; the base positioning counter sink 1-1-1 is used for fixing the base; the fixed guide rail bracket positioning threaded hole 1-1-2 is fixedly connected with the fixed guide rail assembly 2 through a screw; the rectangular groove 1-1-3 is matched with the end wall 5-1-3 of the upper cover in an installing way to position the upper cover assembly 5; the adjusting holes 1-1-4 are in clearance fit with the adjusting rod assembly 6; the upper surface 1-1-5 of the base is contacted with the bottom surface 2-1-5 of the fixed guide rail bracket; the rectangular positioning protruding blocks 1-1-6 are matched with the rectangular grooves 5-1-7 of the upper cover in an installing manner; the locking adjusting plate limiting holes 1-1-7 are used for installing locking adjusting plate fixing screws 1-3; the lower end spring hook 1-1-8 is connected with one end of a spring 5-5; the locking adjusting plate 1-2 comprises a locking adjusting plate mounting through hole 1-2-1 and a locking adjusting screw guide groove 1-2-2; the locking adjusting plate mounting through hole 1-2-1 is assembled with a locking adjusting plate fixing screw 1-3 to fix the locking adjusting plate 1-2 on the base 1-1; the locking adjusting screw guide groove 1-2-2 and the locking adjusting screw 5-4 are installed in a clearance fit mode.
The fixed guide rail assembly 2 comprises a fixed guide rail bracket 2-1, fixed guide rail bracket positioning screws 2-2, a fixed guide rail 2-3, fixed guide rail positioning screws 2-4 and a cross roller guide rail bracket 2-5; the fixed guide rail bracket 2-1 is fixed on the base 1-1 through a fixed guide rail bracket positioning screw 2-2; the fixed guide rail 2-3 is fixed on the fixed guide rail bracket 2-1 through a fixed guide rail positioning screw 2-4; the cross roller guide rail bracket 2-5 is arranged on the fixed guide rail 2-3; the fixed guide rail bracket 2-1 comprises a fixed guide rail bracket positioning countersunk hole 2-1-1, a fixed guide rail bracket positioning surface I2-1-2, a fixed guide rail bracket positioning plane II 2-1-3, a fixed guide rail positioning threaded hole 2-1-4 and a fixed guide rail bracket bottom surface 2-1-5; the fixed guide rail bracket positioning countersunk hole 2-1-1 is used for installing a fixed guide rail bracket positioning screw 2-2 and fixing the fixed guide rail bracket 2-1 on the base 1-1; the fixed guide rail bracket positioning surface I2-1-2 is in contact with the fixed guide rail positioning surface I2-3-3; the fixed guide rail bracket positioning surface II 2-1-3 is contacted with the fixed guide rail positioning surface II 2-3-1; the fixed guide rail positioning threaded holes 2-1-4 are assembled with the fixed guide rail positioning screws 2-4 to fix the fixed guide rail 2-3 on the fixed guide rail bracket 2-1; the bottom surface 2-1-5 of the fixed guide rail bracket is contacted with the upper surface 1-1-5 of the base; the fixed guide rail 2-3 comprises a fixed guide rail positioning surface II 2-3-1, a fixed guide rail threaded hole 2-3-2, a fixed guide rail positioning surface I2-3-3 and a fixed guide rail cross roller guide rail bracket mounting groove 2-3-4; the fixed guide rail positioning surface II 2-3-1 is contacted with the fixed guide rail bracket positioning surface II 2-1-3; the fixed guide rail threaded hole 2-3-2 is assembled with a fixed guide rail positioning screw 2-4; the fixed guide rail positioning surface I2-3-3 is in contact with the fixed guide rail bracket positioning surface I2-1-2; the fixed guide rail crossed roller guide rail bracket mounting grooves 2-3-4 are used for mounting crossed roller guide rail brackets 2-5.
The sliding guide rail unit 3 comprises a sliding guide rail connecting block positioning screw 3-1, a sliding guide rail connecting block 3-2 and a sliding guide rail 3-3; the sliding guide rail connecting block positioning screws 3-1 connect the sliding guide rails 3-3 together through the sliding guide rail connecting blocks 3-2; the sliding guide rail connecting block 3-2 comprises a sliding guide rail connecting block mounting hole 3-2-1 and a sliding guide rail connecting block side surface 3-2-2; a positioning screw 3-1 of the connecting block of the sliding guide rail is arranged in the mounting hole 3-2-1 of the connecting block of the sliding guide rail; the side face 3-2-2 of the sliding guide rail connecting block is in contact with the end face 3-3-1 of the sliding guide rail; the sliding guide rail 3-3 comprises a sliding guide rail end face 3-3-1, a sliding guide rail end face threaded hole 3-3-2 and a sliding guide rail cross roller guide rail bracket mounting groove 3-3-3; the end face 3-3-1 of the sliding guide rail is in contact with the side face 3-2-2 of the connecting block of the sliding guide rail; the threaded hole 3-3-2 in the end face of the sliding guide rail is connected with a positioning screw 3-1 of a connecting block of the sliding guide rail in a threaded fit manner; the cross roller guide rail bracket mounting groove 3-3-3 of the sliding guide rail is assembled with the cross roller guide rail bracket 2-5.
The driving unit 4 comprises a wedge-shaped clamping stator 4-1, a piezoelectric stack 4-2, a gasket 4-3 and a pretightening force adjusting screw 4-4; the wedge-shaped clamping type stator 4-1 has a self-centering function; the piezoelectric stack 4-2 and the gasket 4-3 are fixed in the wedge-shaped clamping stator 4-1 through a pretightening force adjusting base meter screw 4-4; the wedge-shaped clamping type stator 4-1 comprises a stator positioning end face I4-1-1, a base meter screw threaded hole 4-1-2, a stator threaded hole I4-1-3, a stator positioning end face II 4-1-4, a stator threaded hole II 4-1-5, a piezoelectric stack power-assisted flexible hinge 4-1-6, a stator flexible front beam 4-1-7, a straight circular flexible hinge 4-1-8, a flexible beam groove 4-1-9, a diamond-shaped beam 4-1-10, a clamp 4-1-11, a clamp wedge face 4-1-12, a wedge-shaped clamp arm 4-1-13 and a stator fixing end 4-1-14; the stator positioning end face I4-1-1 is in contact with the stator positioning face 5-1-6; the base meter screw threaded hole 4-1-2 is connected with the pretightening force adjusting base meter screw 4-4 in a threaded fit manner; the stator threaded hole I4-1-3 is matched with the wedge-shaped stator positioning screw 5-2 through threads to fix the driving unit 4 on the self-adjusting upper cover 5-1; the stator positioning end face II 4-1-4 is in contact with the stator positioning face 5-1-6; the stator threaded hole II 4-1-5 is matched with the wedge-shaped stator positioning screw 5-2 through threads to fix the driving unit 4 on the self-adjusting upper cover 5-1; the piezoelectric stack power-assisted flexible hinge 4-1-6 is connected with the stator flexible front beam 4-1-7 and the stator fixed end 4-1-14, when the piezoelectric stack 4-2 is contracted due to loss of electricity, the elastic force generated when the material per se recovers deformation is relied on, when the input frequency is too high, the piezoelectric stack 4-2 needs large enough elastic force for recovering deformation to ensure that the piezoelectric stack 4-2 reaches the whole-course expansion amount each time because the piezoelectric stack 4-2 has high expansion frequency, and the piezoelectric stack power-assisted flexible hinge 4-1-6 can ensure that the single step distance of the piezoelectric stick-slip motor under the same frequency is larger, so that the higher driving speed is obtained; the straight round flexible hinge 4-1-8 is arranged at the joint of the diamond-shaped beam 4-1-10, the radius of each round flexible hinge 4-1-8 is R, the value range of R is 0.3 mm-0.8 mm, and R =0.5mm in the embodiment; the flexible beam groove 4-1-9 is formed in the piezoelectric stacking power-assisted flexible hinge 4-1-6; the clamps 4-1-11 are arranged at the tail ends of the wedge-shaped clamp arms 4-1-13; the clamp wedge surfaces 4-1-12 are in contact with the sliding guide rail 3-3, and the sliding guide rail 3-3 is driven by friction force; the wedge-shaped clamp arms 4-1-13 are arranged at two ends of the diamond-shaped cross beam 4-1-10.
The upper cover assembly 5 comprises a self-adjusting upper cover 5-1, wedge-shaped stator positioning screws 5-2, upper precise adjusting nuts 5-3, locking adjusting screws 5-4 and springs 5-5; the wedge-shaped clamping type stator 4-1 is fixed on the self-adjusting type upper cover 5-1 by the wedge-shaped stator positioning screw 5-2; the upper precise adjusting nut 5-3 is arranged on the self-adjusting upper cover 5-1 in an interference fit manner; the locking adjusting screw 5-4 penetrates through the locking adjusting plate mounting through hole 1-2-1 to fix the locking adjusting plate 1-2 on the upper cover 5-1 through threaded connection, and when the locking force is adjusted to a target value, the upper cover assembly 5 and the position screw 3-1 are locked and fixed through the threaded matching element 1 by tightening the locking adjusting screw 5-4; one end of the spring 5-5 is connected with the upper end spring hook 5-1-6, and the other end is connected with the lower end spring hook 1-1-8; the self-adjusting upper cover 5-1 comprises an upper precise adjusting nut counter sink 5-1-1, a stator positioning counter sink I5-1-2, an upper cover positioning end wall 5-1-3, a stator positioning counter sink II 5-1-4, a locking adjusting screw threaded hole 5-1-5, an upper end spring hook 5-1-6, an upper cover rectangular groove 5-1-7 and a stator positioning plane 5-1-8; the upper precise adjusting nut counter sink 5-1-1 is used for installing an upper precise adjusting nut 5-3; the stator positioning counter sink I5-1-2 is used for fixing the wedge-shaped clamping stator 4-1 on the self-adjusting upper cover 5-1 by the wedge-shaped stator positioning screw 5-2; the upper cover positioning end wall 5-1-3 is matched with the rectangular groove 1-1-3 in an installing way; the stator positioning counter sink II 5-1-4 is used for fixing the wedge-shaped clamping stator 4-1 on the self-adjusting upper cover 5-1 by the wedge-shaped stator positioning screw 5-2; the locking adjusting screw threaded hole 5-1-5 is used for installing a locking adjusting screw 5-4; the upper end spring hook 5-1-6 is connected with the spring 5-5; the rectangular groove 5-1-7 of the upper cover is matched with the rectangular positioning bulge block 1-1-6 in an installing way; the stator positioning plane 5-1-8 is in contact with the stator positioning end face I4-1-1 and the stator positioning end face II 4-1-4.
The adjusting rod assembly 6 comprises a precise thread pair adjusting screw rod 6-1 and a precise thread pair adjusting handle 6-2; the precise thread pair adjusting screw 6-1 is in threaded connection with an upper precise adjusting nut 5-3 and is in clearance fit with the adjusting hole 1-1-4; the precise thread pair adjusting handle 6-2 is in adhesive connection with the precise thread pair adjusting screw 6-1, and the pretightening force of the precise linear driving device with the clamping stator can be adjusted by adjusting the precise thread pair adjusting handle 6-2.
The working principle is as follows: the precise linear driving device with the clamping type stator adopts a stator structure that a diamond hinge is coupled with a wedge-shaped clamp, utilizes the octagonal shrinkage deformation principle, when the rising edge waveform of a sawtooth wave electric signal is introduced into a piezoelectric stack, the piezoelectric stack slowly extends to drive a diamond flexible hinge to generate transverse shrinkage and longitudinal feeding motion, further drives a clamp coupled with the diamond hinge to generate the same action, generates 'sticking' motion between a clamp wedge surface and a sliding guide rail, generates static friction force, and drives the sliding guide rail to move forwards together by the clamp of the wedge-shaped clamping type stator; when the falling edge waveform of the sawtooth wave electric signal is introduced into the piezoelectric stack, the diamond-shaped flexible hinge is restored to the original state due to the elasticity of the diamond-shaped flexible hinge, the clamp generates rapid transverse extension and longitudinal contraction, sliding motion is generated between the wedge surface of the clamp and the sliding guide rail, the generated friction force is dynamic friction force, and the clamp of the wedge-shaped clamping stator drives the sliding guide rail to move backwards together for a small step; the steps are repeated to achieve the purpose that the asymmetric transformation hinge drives the rotary table to continuously rotate and move step by step.
In summary, the present invention provides a precision linear driving device with a clamping stator to solve the problems of small stroke, no self-centering function, etc. of the current piezoelectric stick-slip linear driving device. When the piezoelectric stack stretches, the wedge-shaped clamping stator adopts a diamond-shaped motion conversion mechanism, so that the clamp of the wedge-shaped clamping stator generates longitudinal extension and transverse contraction, the positive pressure of contact between the wedge-shaped clamping stator and the sliding guide rail is adjusted, the comprehensive regulation and control of friction force in the driving process of the linear driving device are realized, and the displacement backspacing is reduced; and because the clamp is a wedge-shaped surface, the self-centering function of the linear driving device can be realized, and the positioning precision is improved. The invention has the advantages of compact structure, convenient control, high positioning precision, unlimited stroke and the like, and can be widely applied to the technical field of micro-nano precision driving and positioning in semiconductor processing and the like.
Claims (5)
1. A precision linear driving device with a clamping type stator is characterized in that: the precise linear driving device comprises a base unit (1), a fixed guide rail assembly (2), a sliding guide rail unit (3), a driving unit (4), an upper cover assembly (5) and an adjusting rod assembly (6); the fixed guide rail assembly (2) is connected with the base unit (1) through a screw; the sliding guide rail unit (3) is matched with the fixed guide rail component (2) for installation; the driving unit (4) is fixedly arranged on the upper cover assembly (5), and the upper cover assembly (5) is connected with the base unit (1); the base unit (1) comprises a base (1-1), a locking adjusting plate (1-2) and a locking adjusting plate fixing screw (1-3); the locking adjusting plate (1-2) is fixed on the base (1-1) through locking adjusting plate fixing screws (1-3), and when the locking force is adjusted to a target value, the upper cover assembly (5) and the base unit (1) are fixed; the base (1-1) comprises a base counter bore (1-1-1), a fixed guide rail bracket positioning threaded hole (1-1-2), a rectangular groove (1-1-3), an adjusting hole (1-1-4), a base upper surface (1-1-5), a rectangular positioning protruding block (1-1-6), a locking adjusting plate limiting hole (1-1-7) and a lower end spring hook (1-1-8); the base positioning counter sink (1-1-1) is used for fixing the base; the fixed guide rail bracket positioning threaded hole (1-1-2) is fixedly connected with the fixed guide rail assembly (2) through a screw; the rectangular groove (1-1-3) is matched with the end wall (5-1-3) of the upper cover in an installing way, and the adjusting hole (1-1-4) is in clearance fit with the adjusting rod component (6); the upper surface (1-1-5) of the base is contacted with the bottom surface (2-1-5) of the fixed guide rail bracket; the rectangular positioning protruding blocks (1-1-6) are matched with the rectangular grooves (5-1-7) of the upper cover in an installing way; the locking adjusting plate limiting hole (1-1-7) is used for installing a locking adjusting plate fixing screw (1-3); the lower end spring hook (1-1-8) is connected with one end of a spring (5-5); the locking adjusting plate (1-2) comprises a locking adjusting plate mounting through hole (1-2-1) and a locking adjusting screw guide groove (1-2-2); the locking adjusting plate mounting through hole (1-2-1) is assembled with a locking adjusting plate fixing screw (1-3) to fix the locking adjusting plate (1-2) on the base (1-1); the locking adjusting screw guide groove (1-2-2) and the locking adjusting screw (5-4) are installed in a clearance fit mode.
2. A precision linear drive apparatus having a clamped stator according to claim 1, wherein: the fixed guide rail assembly (2) comprises a fixed guide rail bracket (2-1), fixed guide rail bracket positioning screws (2-2), a fixed guide rail (2-3), fixed guide rail positioning screws (2-4) and a cross roller guide rail bracket (2-5); the fixed guide rail bracket (2-1) is fixed on the base (1-1) through a fixed guide rail bracket positioning screw (2-2); the fixed guide rail (2-3) is fixed on the fixed guide rail bracket (2-1) through a fixed guide rail positioning screw (2-4); the cross roller guide rail bracket (2-5) is arranged on the fixed guide rail (2-3); the fixed guide rail bracket (2-1) comprises a fixed guide rail bracket positioning countersunk hole (2-1-1), a fixed guide rail bracket positioning surface I (2-1-2), a fixed guide rail bracket positioning plane II (2-1-3), a fixed guide rail positioning threaded hole (2-1-4) and a fixed guide rail bracket bottom surface (2-1-5); the fixed guide rail bracket positioning countersunk hole (2-1-1) is used for installing a fixed guide rail bracket positioning screw (2-2) and fixing the fixed guide rail bracket (2-1) on the base (1-1); the fixed guide rail bracket positioning surface I (2-1-2) is contacted with the fixed guide rail positioning surface I (2-3-3); the fixed guide rail bracket positioning surface II (2-1-3) is contacted with the fixed guide rail positioning surface II (2-3-1); the fixed guide rail positioning threaded holes (2-1-4) are assembled with the fixed guide rail positioning screws (2-4) to fix the fixed guide rail (2-3) on the fixed guide rail bracket (2-1); the bottom surface (2-1-5) of the fixed guide rail bracket is contacted with the upper surface (1-1-5) of the base; the fixed guide rail (2-3) comprises a fixed guide rail positioning surface II (2-3-1), a fixed guide rail threaded hole (2-3-2), a fixed guide rail positioning surface I (2-3-3) and a fixed guide rail cross roller guide rail bracket mounting groove (2-3-4); the fixed guide rail positioning surface II (2-3-1) is contacted with the fixed guide rail bracket positioning surface II (2-1-3); the fixed guide rail threaded hole (2-3-2) is assembled with a fixed guide rail positioning screw (2-4); the fixed guide rail positioning surface I (2-3-3) is contacted with the fixed guide rail bracket positioning surface I (2-1-2); the fixed guide rail crossed roller guide rail bracket mounting groove (2-3-4) is used for mounting a crossed roller guide rail bracket (2-5).
3. A precision linear drive apparatus having a clamped stator according to claim 1, wherein: the sliding guide rail unit (3) comprises a sliding guide rail connecting block positioning screw (3-1), a sliding guide rail connecting block (3-2) and a sliding guide rail (3-3); the sliding guide rail connecting block positioning screws (3-1) connect the sliding guide rails (3-3) together through the sliding guide rail connecting blocks (3-2); the sliding guide rail connecting block (3-2) comprises a sliding guide rail connecting block mounting hole (3-2-1) and a sliding guide rail connecting block side surface (3-2-2); a positioning screw (3-1) of the sliding guide rail connecting block is arranged in the sliding guide rail connecting block mounting hole (3-2-1); the side surface (3-2-2) of the sliding guide rail connecting block is contacted with the end surface (3-3-1) of the sliding guide rail; the sliding guide rail (3-3) comprises a sliding guide rail end face (3-3-1), a sliding guide rail end face threaded hole (3-3-2) and a sliding guide rail cross roller guide rail bracket mounting groove (3-3-3); the end face (3-3-1) of the sliding guide rail is contacted with the side face (3-2-2) of the connecting block of the sliding guide rail; the threaded hole (3-3-2) on the end face of the sliding guide rail is connected with a positioning screw (3-1) of the connecting block of the sliding guide rail in a threaded fit manner; the cross roller guide rail bracket mounting groove (3-3-3) of the sliding guide rail is assembled with the cross roller guide rail bracket (2-5).
4. A precision linear drive apparatus having a clamped stator according to claim 1, wherein: the driving unit (4) comprises a wedge-shaped clamping stator (4-1), a piezoelectric stack (4-2), a gasket (4-3) and a pretightening force adjusting screw (4-4); the piezoelectric stack (4-2) and the gasket (4-3) are fixed in the wedge-shaped clamping stator (4-1) through a pretightening force adjusting base meter screw (4-4); the wedge-shaped clamping type stator (4-1) comprises a stator positioning end face I (4-1-1), a base meter screw threaded hole (4-1-2), a stator threaded hole I (4-1-3), a stator positioning end face II (4-1-4), a stator threaded hole II (4-1-5), a piezoelectric stacking power-assisted flexible hinge (4-1-6) and a stator flexible front beam (4-1-7), the device comprises straight round flexible hinges (4-1-8), flexible beam grooves (4-1-9), diamond-shaped cross beams (4-1-10), clamps (4-1-11), clamp wedge surfaces (4-1-12), wedge-shaped clamp arms (4-1-13) and stator fixing ends (4-1-14); the stator positioning end face I (4-1-1) is in contact with the stator positioning face (5-1-6); the base meter screw threaded hole (4-1-2) is connected with the pretightening force adjusting base meter screw (4-4) in a threaded fit manner; the stator threaded hole I (4-1-3) is matched with the wedge-shaped stator positioning screw (5-2) through threads to fix the driving unit (4) on the self-adjusting upper cover (5-1); the stator positioning end face II (4-1-4) is in contact with the stator positioning face (5-1-6); the stator threaded hole II (4-1-5) is matched with the wedge-shaped stator positioning screw (5-2) through threads to fix the driving unit (4) on the self-adjusting upper cover (5-1); the piezoelectric stacking power-assisted flexible hinge (4-1-6) is connected with the stator flexible front beam (4-1-7) and the stator fixed end (4-1-14); the straight round flexible hinge (4-1-8) is arranged at the joint of the diamond-shaped beam (4-1-10); the flexible beam groove (4-1-9) is formed in the piezoelectric stacking power-assisted flexible hinge (4-1-6); the clamps (4-1-11) are arranged at the tail ends of the wedge-shaped clamp arms (4-1-13); the clamp wedge surfaces (4-1-12) are contacted with the sliding guide rails (3-3); the wedge-shaped clamp arms (4-1-13) are arranged at two ends of the rhombic beam (4-1-10).
5. A precision linear drive apparatus having a clamped stator according to claim 1, wherein: the upper cover assembly (5) comprises a self-adjusting upper cover (5-1), wedge-shaped stator positioning screws (5-2), an upper precise adjusting nut (5-3), locking adjusting screws (5-4) and springs (5-5); the wedge-shaped clamping stator (4-1) is fixed on the self-adjusting upper cover (5-1) by the wedge-shaped stator positioning screw (5-2); the upper precise adjusting nut (5-3) is arranged on the self-adjusting upper cover (5-1) in an interference fit manner; the locking adjusting screw (5-4) penetrates through the locking adjusting plate mounting through hole (1-2-1) to fix the locking adjusting plate (1-2) on the upper cover (5-1) through threaded connection; one end of the spring (5-5) is connected with the upper end spring hook (5-1-6), and the other end is connected with the lower end spring hook (1-1-8); the self-adjusting upper cover (5-1) comprises an upper precise adjusting nut counter sink (5-1-1), a stator positioning counter sink I (5-1-2), an upper cover positioning end wall (5-1-3), a stator positioning counter sink II (5-1-4), a locking adjusting screw threaded hole (5-1-5), an upper end spring hook (5-1-6), an upper cover rectangular groove (5-1-7) and a stator positioning plane (5-1-8); the upper precise adjusting nut counter sink (5-1-1) is used for mounting the upper precise adjusting nut (5-3); the stator positioning counter sink I (5-1-2) is used for fixing the wedge-shaped clamping stator (4-1) on the self-adjusting upper cover (5-1) by the wedge-shaped stator positioning screw (5-2); the upper cover positioning end wall (5-1-3) is matched with the rectangular groove (1-1-3) in an installing way; the stator positioning counter sink II (5-1-4) is used for fixing the wedge-shaped clamping stator (4-1) on the self-adjusting upper cover (5-1) by the wedge-shaped stator positioning screw (5-2); the locking adjusting screw threaded hole (5-1-5) is used for installing a locking adjusting screw (5-4); the upper end spring hook (5-1-6) is connected with the spring (5-5); the upper cover rectangular groove (5-1-7) is matched with the rectangular positioning convex block (1-1-6) in an installing way; the stator positioning plane (5-1-8) is in contact with the stator positioning end face I (4-1-1) and the stator positioning end face II (4-1-4); the adjusting rod assembly (6) comprises a precise thread pair adjusting screw rod (6-1) and a precise thread pair adjusting handle (6-2); the precise thread pair adjusting screw (6-1) is in threaded connection with the upper precise adjusting nut (5-3) and is in clearance fit with the adjusting hole (1-1-4); the precise thread pair adjusting handle (6-2) is in adhesive connection with the precise thread pair adjusting screw rod (6-1).
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| CN201910922755.XA CN110581670B (en) | 2019-09-27 | 2019-09-27 | Precise linear driving device with clamping type stator |
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| CN201910922755.XA CN110581670B (en) | 2019-09-27 | 2019-09-27 | Precise linear driving device with clamping type stator |
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| JPH0255582A (en) * | 1988-08-19 | 1990-02-23 | Ricoh Co Ltd | Piezoelectric driver |
| CN102324867B (en) * | 2011-09-22 | 2013-10-09 | 哈尔滨工业大学 | Linear platform using compound bending vibration type biped linear ultrasonic vibrator |
| CN205596034U (en) * | 2016-04-18 | 2016-09-21 | 南京理工大学 | Electric drive device is pressed to accurate adjustable impacted style of frictional force |
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