CN110274545A - Shaven head, measurer for thickness and the measurement method of luminous point differential type contactless element thickness measure - Google Patents
Shaven head, measurer for thickness and the measurement method of luminous point differential type contactless element thickness measure Download PDFInfo
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- CN110274545A CN110274545A CN201910571149.8A CN201910571149A CN110274545A CN 110274545 A CN110274545 A CN 110274545A CN 201910571149 A CN201910571149 A CN 201910571149A CN 110274545 A CN110274545 A CN 110274545A
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- 238000000691 measurement method Methods 0.000 title abstract description 5
- 238000005259 measurement Methods 0.000 claims abstract description 51
- 230000003287 optical effect Effects 0.000 claims abstract description 30
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 24
- 238000005286 illumination Methods 0.000 claims description 13
- 239000005338 frosted glass Substances 0.000 claims description 9
- 239000000571 coke Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 12
- 238000009434 installation Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010504 bond cleavage reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
The invention discloses shaven head, measurer for thickness and the measurement methods of a kind of luminous point differential type contactless element thickness measure.The optical system of shaven head includes light source, spectroscope, the first condenser, cylindrical mirror and camera；After spectroscope, a part of light is polymerized to measurement luminous point by the first condenser, falls in detected element surface the light beam that light source issues；Luminous point is measured in detected element surface reflection, it is returned along original optical path, successively after the first condenser, spectroscope and cylindrical mirror, it is focused the focal line of the focal line and Y-direction to form orthogonal X-direction, and between the focal line of X-direction and the focal line of Y-direction, the picture point being centrosymmetric is formed, camera is located at picture point.The non-contact measurement of various types element under test thickness can be achieved in the present invention, and accuracy is high, and structure is simple；The center that conveniently can accurately find measured lens, to measure center thickness；It can also identify whether measured lens tilt simultaneously；Further, installation is facilitated, measurement is simplified, prevents pollution.
Description
Technical field
The shaven head for the luminous point differential type contactless element thickness measure based on machine vision that the present invention relates to a kind of includes
Its measurer for thickness and measurement method, belongs to non-contact thickness measuring field.
Background technique
For a long time, the measuring tool that the measurement of optical element size directly borrows machine components carries out contact type measurement,
And ignore the particularity of " optics " two word.Optical element has the particularity of its own compared to machine components: firstly, optics
It is the optical material for being different from machine components used in part, shows as that hardness is relatively soft, the hardness of some optical materials is special
Not soft, any direct contact touching all may cause the damage to machined surface, become surface defect, therefore, after processing is completed
It can absolutely not touch；Secondly, most optical materials are the stronger pole of polarity in addition to the elements class optical material such as silicon, germanium
Property material, such as oxide, the surface after polishing is the dangling bonds that the scission of link of chemical bond is formed, and chemical property is very active, is appointed
What touching may all bring contamination, and be difficult to wash, and spot is in terms of optical angle, actually and a kind of defect；Again,
In actual operation, the precision of contact type measurement, the size of pressure when depending on measurement, because pressure will lead to the shape of material
Become, leads to measurement error.Therefore, contact type measurement will lead to optical element surface damage, surface contamination, and measurement error compares
Greatly, and contact type measurement is it is, in principle, that be actually difficult to find that the center of optical element, constantly can only infinitely approach,
The maximum value of measurement is only taken to carry out approximate representation in real work.
Summary of the invention
In order to solve drawbacks described above existing for contact type measurement in the prior art, the present invention provides a kind of based on machine vision
Luminous point differential type contactless element thickness measure shaven head, measurer for thickness and measurement method comprising it.
In order to solve the above technical problems, the technical solution adopted in the present invention is as follows:
A kind of shaven head of the luminous point differential type contactless element thickness measure based on machine vision, optical system include
Light source, spectroscope, the first condenser, cylindrical mirror and camera；
Light source issue light beam after spectroscope, a part of light by the first condenser be polymerized to measurement luminous point, fall in it is tested
Element surface；
Luminous point is measured in detected element surface reflection, is returned along original optical path, successively passes through the first condenser, spectroscope and column
After the mirror of face, it is focused the focal line of the focal line and Y-direction to form orthogonal X-direction, and in the focal line of X-direction and Y-direction
Between focal line, the picture point being centrosymmetric is formed, camera is located at picture point.
When measuring thickness, judge whether putting for element under test standardizes by the symmetry of picture point, picture point becomes height
Changing very sensitive, slight height change is that can lead to the variation of picture point symmetry, when occurring when picture point non-centrosymmetry, card
The central point of bright element under test deviate from the first condenser be polymerized to measurement luminous point or member to be measured there is the problems such as axially inclined, need
Element under test position is adjusted, until obtaining centrosymmetric picture point.
The application is not specially limited bare headed shell shape, as long as can ensure that the measurement luminous point energy that the first condenser is polymerized to
The focal line and picture point for falling in the detected element surface outside shell, while observation camera being facilitated to capture, referring to existing optics
System is realized.
In order to be monitored to equipment working state, the luminous point differential type contactless element thickness based on machine vision is surveyed
The shaven head of amount, further includes second condenser lens and frosted glass, and the light beam that light source issues is after spectroscope, some light is by the
Two condenser optically focused form instruction luminous point and fall on frosted glass.It in this way can be by instruction luminous point come the shape of observation optical path system
State.
Spectroscope is also possible to other spectroscopes except half-reflecting half mirror, as long as the light beam that light source issues can be divided into two
Beam, light beam focuses through the first condenser and to form measurement luminous point, another Shu Guangjing second condenser lens focus and to form instruction luminous point.
It is preferred that spectroscope is half-reflecting half mirror；The reflecting surface of half-reflecting half mirror and the direction of illumination angle of light source be 0~90 ° and 0 ° and
Except 90 °；The light beam that light source issues is by half-reflecting half mirror a part is reflected to form reflected light, another part is projected and to be formed
The reflected light of projection light, half-reflecting half mirror is polymerized to measurement luminous point through the first condenser, falls in detected element surface；Half-reflecting half mirror
Transmitted light form instruction through second condenser lens optically focused and luminous point and fall on frosted glass.
Arrangement between each component, convenient to use simultaneously for convenience, as a kind of implementation, based on machine vision
The shaven head of luminous point differential type contactless element thickness measure, the direction of illumination of light source are consistent with horizontal direction；Half-reflecting half mirror
It is located on the direction of illumination of light source, the reflecting surface of half-reflecting half mirror and the direction of illumination angle of light source are 45 °；First condenser is set
In the underface of half-reflecting half mirror；Cylindrical mirror is cylinder condenser lens, cylindrical mirror spherical surface be located at upward half-reflecting half mirror just on
Side；Camera is located at picture point.
The reflecting surface of half-reflecting half mirror and the direction of illumination angle of light source may be alternatively provided as 15 °, 30 °, 45 °, 60 ° etc.,
As long as reflected light and transmitted light can be formed, but the angle other than 45 °, orthogonal optical path can not be formed,
Each component can not be installed according to horizontal vertical optical path；Cylindrical mirror is that can also be cylindrical divergence mirror, as long as by adjusting cylinder
The installation direction of mirror can obtain centrosymmetric picture point.
If further including second condenser lens, second condenser lens are located at the right opposite of light source vertically, and half-reflecting half mirror is located at
Between light source and second condenser lens.
It is preferred that light source is point light source；Camera is focal plane camera.
The thickness measure of shaven head comprising the above-mentioned luminous point differential type contactless element thickness measure based on machine vision
Device further includes pedestal and the first column；First uprights vertical is located at the upper surface of pedestal, and the first column is equipped with scale value；
Shaven head is connected on the first column by connecting rod, and the measurement luminous point that the first condenser is polymerized to can be fallen on the upper surface of pedestal；
Height of the connecting rod on the first column is adjustable.
Swim over to the direction in downstream on first condenser and the first condenser to be polymerized to the measurement optically focused direction of luminous point consistent.
As a preferred embodiment, the first column is equipped with Z axis guide rail, connecting rod one end is slidably connected in Z axis guide rail,
Other end connection shaven head.Z axis guide rail namely the guide rail being arranged along the first stem height direction.Certain connecting rod is on the first column
Height-adjustable scheme, it is also possible to which existing others scheme is realized.
Detected element can be transparent element, be also possible to opaque element.
It is following to be illustrated by taking the test of lens center thickness as an example: tested biconvex lens is placed on to the upper table of pedestal
On face, and the first condenser of face makes the focus on light beam of the first condenser focus on tested lenticular by moving up and down shaven head
The central location of mirror upper surface, when focal plane camera captures between the focal line of orthogonal X-direction and the focal line of Y-direction
When centrosymmetric picture point, height h1 where reading connecting rod；Tested biconvex lens is removed, by moving up and down shaven head, is made
The measurement luminous point that first condenser is polymerized to is fallen on the upper surface of pedestal, height h2 where reading connecting rod；Tested biconvex lens
Thickness be equal to h1-h2 value.It should be noted that: it is directed to same shaven head, h2 is a fixed value, the quarter on the first column
Degree can be directly using h2 as the scale of starting point, and height where directly reading connecting rod in this way is that the center of tested biconvex lens is thick
Degree can also can also be led to by existing software programming mode using h2 as altitude datum by h2 Direct Mark in measuring device
Cross the center thickness that the equipment such as display directly display lens.
Picture point is very sensitive to height change, and slight height change is that can lead to the variation of picture point symmetry, passes through picture
The symmetry of point can be with the measurement accuracy of weighing device, when occurring when picture point non-centrosymmetry, it was demonstrated that the center of element under test
Point deviate from the first condenser be polymerized to measurement luminous point or member to be measured there is the problems such as axially inclined, need to adjust element under test position
It sets, until obtaining centrosymmetric picture point.
If the focus on light beam of the first condenser does not focus on the central location of tested biconvex lens upper surface, due to anti-
The angle of divergence for penetrating light is biased to, and will be unable to obtain centrosymmetric picture point, picture point is inclined toward the direction always；In order to true
The bias for recognizing measurement luminous point, can move up and down shaven head, find the focal line of X-direction, then adjust tested biconvex lens in the side X
To position, due to be tested biconvex lens symmetry, on some point of X-axis, it has also been found that the coke of an X-direction
Then line is transferred to tested biconvex lens the middle position of the focal line of this two X-directions；It the case where Y-direction, can be by tested
The focal line of two Y-directions is found in the displacement of biconvex lens in the Y direction, and tested biconvex lens is then transferred to this two Y-directions
The middle position of focal line；At this point, measurement luminous point just focuses on the central symmetry point of tested biconvex lens namely above-mentioned measurement
Device can accurately look for the center of tested biconvex lens, to measure center thickness.
If inclination occurs in tested biconvex lens, moved up and down through shaven head, measurement luminous point still can be with inswept tested
The surface of biconvex lens obtains the focal line of X-direction, the focal line of picture point and Y-direction, but since the angle of divergence of reflected light has occurred
Whole to be biased to, the picture point being found does not have central symmetry, can generally tilt toward the direction.At this point, equipment is first transferred to X
Focal line, the position for then adjusting tested biconvex lens X-direction makes to measure the inswept entire lens surface of luminous point, due to being tested lenticular
Mirror loses central symmetry relative to reflected light path, will be unable to find second X focal line；The adjusting of Y-direction focal line, it is similar.When
It was found that asymmetrical shape is presented in measurement hot spot, and adjust the tested direction biconvex lens XY position that can not all search out two anyway
The focal line of the focal line of root X-direction and two Y-directions proves that inclination namely tested biconvex integrally occurs in tested biconvex lens
The optical axis of lens and the upper surface out of plumb of pedestal.Equipment can be found that tested biconvex lens with the presence or absence of inclination.
Using above-mentioned single optical head measurer for thickness, multiple survey calculation is needed for biconcave lens, in order to once survey
Amount obtains the thickness of all determinands, and applicant has also developed the measurer for thickness of double shaven heads, in the thickness measure of single optical head
It further include the second column on device basic, the second uprights vertical is located at the upper surface of pedestal, passes through two connections on the first column
Bar is connected separately with two shaven heads being oppositely arranged up and down, and two bare headed light-emitting windows are opposite, and two connecting rods are in the first column
On height it is adjustable；Second column is equipped with specimen holder.The corresponding light of light-emitting window namely the first condenser of process are polymerized to measure
The light of luminous point.
By adjusting so that upper and lower two bare headed measurement luminous points are overlapped, at this time position of two shaven heads on scale it
Difference is X0, is exactly the zero point of equipment.When needing to measure the center thickness of lens, measured lens are put on specimen holder, are adjusted
Shaven head is until respectively obtain the centrosymmetric picture point of measured lens upper and lower surface up and down, write down at this time two shaven heads on scale
The value of the difference Yt-X0 of the difference Yt, Yt and X0 of position are exactly that the center of lens is thick.That is, double end measuring device is suitable for all types
The thickness measure of lens is also suitable for the thickness measure of various other objects under test.
The unmentioned technology of the present invention is referring to the prior art.
The present invention is based on the luminous point differential type contactless element measurer for thickness of machine vision, pass through optical system
The non-contact measurement, it can be achieved that various types element under test thickness is designed, accuracy is high, and structure is simple, will not damage or dirty
Contaminate element under test；The center that conveniently can accurately find measured lens, to measure center thickness；Measured lens can also be identified simultaneously
Whether tilt；Further, by the light path design of " cross " shape, the arrangement and installation of each building block are facilitated；Pass through double light
The design of head measurer for thickness structure, the center thickness for solving biconcave lens need the cumbersome of multiple survey calculation, while
Avoid contact of the detected element with base upper surface.
Detailed description of the invention
Fig. 1 is the bare headed structural schematic diagram of the present invention；
Fig. 2 is single optical head measurer for thickness schematic diagram of the present invention；
When Fig. 3 is that focus on light beam focuses on the central location of tested biconvex lens upper surface, focal plane camera is captured
Picture point and focal line schematic diagram；
When Fig. 4 is that focus on light beam does not focus on the central location of tested biconvex lens upper surface, the capture of focal plane camera
The picture point and focal line schematic diagram arrived；
When Fig. 5 is tested biconvex lens slant setting, picture point and focal line schematic diagram that focal plane camera captures；
Fig. 6 is the structural schematic diagram one when measuring tested biconcave lens using single optical head measurer for thickness；
Fig. 7 is the structural schematic diagram two when measuring tested biconcave lens using single optical head measurer for thickness；
Fig. 8 is the double bare headed measurer for thickness schematic diagrames of the present invention；
Fig. 9 is the double bare headed measurer for thickness instrumentation plans of the present invention；
In figure, 101: light source；102: half-reflecting half mirror；103: the first condensers；104: detected element；The direction 105:X
Focus；106: cylindrical mirror；The focus in the direction 107:Y；108: focal plane camera；109: second condenser lens；110: instruction luminous point；
111: pedestal；112: the first columns；113: scale value；114: the upper surface of pedestal；115: tested biconvex lens；116: shaven head；
117: measuring beam (focus on light beam)；118: connecting rod；119:Z axis rail；120: picture point；The focal line in the direction 121:X；122:Y
The focal line in direction；123: tested biconcave lens；124: normal glass piece；125: the second columns；126: specimen holder.
Specific embodiment
For a better understanding of the present invention, below with reference to the embodiment content that the present invention is furture elucidated, but it is of the invention
Content is not limited solely to the following examples.
As shown in Figure 1, a kind of shaven head of the luminous point differential type contactless element thickness measure based on machine vision, light
System includes point light source, spectroscope, the first condenser, second condenser lens, frosted glass, cylindrical mirror and focal plane camera；
The direction of illumination of point light source is consistent with horizontal direction；Half-reflecting half mirror is located on the direction of illumination of light source, and half anti-half
The reflecting surface of lens and the direction of illumination angle of light source are 45 °；First condenser is horizontally located at the underface of half-reflecting half mirror；
Cylindrical mirror is cylinder condenser lens, and cylindrical mirror spherical surface is located at the surface of half-reflecting half mirror upward；Second condenser lens are located at vertically
The right opposite of light source, and half-reflecting half mirror is between light source and second condenser lens；
The light issued from point light source projects on half-reflecting half mirror at certain angle of divergence, and a light point is reflected to form perpendicular
Straight downward reflected light, another part light are projected to form projection light, and the reflected light of half-reflecting half mirror is polymerized to through the first condenser
One measurement luminous point falls in detected element surface, and measurement luminous point is returned along original optical path, successively passed through in detected element surface reflection
After crossing the first condenser, spectroscope and cylindrical mirror, it is focused the focal line of the focal line and Y-direction to form orthogonal X-direction, and
Between the focal line of X-direction and the focal line of Y-direction, the picture point being centrosymmetric is formed, focal plane camera is located at picture point, captures
Picture point；The transmitted light of half-reflecting half mirror is formed through second condenser lens optically focused and an instruction luminous point and is fallen on frosted glass, as setting
The indication signal of standby working condition and plant maintenance；Wherein, along the transmission direction of point light source, spectroscopical two sides is followed successively by first
Side S1 and second side S2, the two sides of the first condenser are followed successively by third side S3 and the 4th side S4, second condenser lens
Two sides is followed successively by the 5th side S5 and the 6th side S6, and along the reflection direction of measurement luminous point, the two sides of cylindrical mirror is followed successively by the 7th
Side S7 and the 8th side S8；The distance at point light source to the center first side S1 is 100mm, and spectroscope is half-reflecting half mirror, in
For the heart with a thickness of 1mm, material is high borosilicate；The distance at the center first side S1 to the third side center S3 is 50mm；Third side
The radius of curvature of S3 is 24.32mm, and the radius of curvature of the 4th side S4 is -24.23, and material used in the first condenser is quartzy glass
Glass；The center second side S2 to the 5th side center S5 distance be 50mm, the 6th side center S6 to frosted glass center away from
It is 34.11mm from the radius of curvature for 50mm, the 5th side S5, the radius of curvature of the 6th side S6 is -33.21mm, and second is poly-
Material used in light microscopic is quartz glass；The distance at the center second side S2 to the heptalateral face center S7 is 10mm, heptalateral face S7
For planar structure, the radius of curvature of the 8th side S8 is -22.31mm, and material used in cylindrical mirror is quartz glass, and center thickness is
4.5mm, the distance of spectroscope to focal plane camera are 40mm.
It should be understood that spectroscope is also possible to other spectroscopes except half-reflecting half mirror, as long as can send out light source
Light beam out is divided into two bundles, and light beam focuses through the first condenser and to form measurement luminous point, another Shu Guangjing second condenser lens gather
Coke forms instruction luminous point, and certain second condenser lens can be according to circumstances arranged, can be directly by falling when being provided with second condenser lens
Instruction luminous point on frosted glass assesses the working condition of shaven head；The reflecting surface of half-reflecting half mirror and the direction of illumination of light source press from both sides
Angle may be alternatively provided as 15 °, 30 °, 45 °, 60 ° etc., as long as reflected light and transmitted light can be formed, but other than 45 °
Angle, it is difficult to form orthogonal " cross " shape optical path, each component can not be installed according to horizontal vertical optical path；Cylinder
Mirror is to be also possible to cylindrical divergence mirror, as long as can obtain the coke of orthogonal X-direction by adjusting the installation direction of cylindrical mirror
The focal line and centrosymmetric picture point of line and Y-direction.
As shown in Fig. 2, the shaven head comprising the above-mentioned luminous point differential type contactless element thickness measure based on machine vision
Single optical head measuring device, further include pedestal, the first column and connecting rod；First uprights vertical is located at the upper surface of pedestal, the
One column is equipped with scale value；Shaven head is connected on the first column by connecting rod, and height of the connecting rod on the first column can
It adjusts, such as: the first column is equipped with Z axis guide rail, and connecting rod one end is slidably connected in Z axis guide rail, other end connection is bare headed, even
Extension bar can be moved up and down along Z axis guide rail, and then shaven head is driven to move up and down, and the positioning of connecting rod is using existing conventional positioning side
Formula, for example the limiting device of C-shaped ring or circular rings etc. can be set in the bottom of connecting rod Yu Z axis guide rail joint, pass through
Limiting device is fixed across the bolt of limiting device, to realize the positioning to connecting rod, when unclamping bolt, limiting device
It can adjust up and down, and then connecting rod can also adjust up and down, when screwing release bolt, limiting device position is fixed, and then is connected
Bar position is also fixed, other existing modes can also be used certainly；The downstream of upper first condenser of shaven head is equipped with light-emitting window, out light
Mouth is opposite with the upper surface of pedestal, and the measurement luminous point that the first condenser is polymerized to can be fallen on the upper surface of pedestal.
Detected element can be transparent element, be also possible to opaque element, following to be with the test of lens center thickness
Example is illustrated:
As shown in Fig. 2, tested biconvex lens is placed on the upper surface of pedestal, and the light-emitting window of face shaven head, pass through
Shaven head is moved up and down, the focus on light beam of the first condenser is made to focus on the central location of tested biconvex lens upper surface, when coke is flat
When face camera captures centrosymmetric picture point between the focal line of orthogonal X-direction and the focal line of Y-direction, connection is read
Height h1 where bar；Tested biconvex lens is removed, by moving up and down shaven head, the measurement luminous point for being polymerized to the first condenser is fallen
On the upper surface of pedestal, height h2 where reading connecting rod；The thickness of tested biconvex lens is equal to the value of h1-h2.It needs herein
It is noted that being directed to same shaven head, h2 is a fixed value, and the scale on the first column can be directly using h2 as the quarter of starting point
Degree, height where directly reading connecting rod in this way are the center thickness of tested biconvex lens, can also survey h2 Direct Mark
It measures on device, can also be directly displayed using h2 as altitude datum by equipment such as displays by existing software programming mode
The center thickness of mirror.
As shown in figure 3, picture point is very sensitive to height change, slight height change is that can lead to the change of picture point symmetry
Change, it can be with the measurement accuracy of weighing device by the symmetry of picture point.
As shown in figure 4, if the focus on light beam of the first condenser does not focus on the center of tested biconvex lens upper surface
Position will be unable to obtain centrosymmetric picture point, picture point is always towards a side since the angle of divergence of reflected light is biased to
To inclined；In order to confirm the bias of measurement luminous point, shaven head can be moved up and down, find the focal line of X-direction, then adjusted tested double
Convex lens is in the position of X-direction, due to being tested the symmetry of biconvex lens, on some point of X-axis, it has also been found that one
Then the focal line of X-direction is transferred to tested biconvex lens the middle position of the focal line of this two X-directions；It the case where Y-direction, can
To find the focal lines of two Y-directions by being tested the displacement of biconvex lens in the Y direction, then tested biconvex lens be transferred to this two
The middle position of the focal line of root Y-direction；At this point, measurement luminous point just focuses on the central symmetry point of tested biconvex lens,
I.e. above-mentioned measuring device can accurately look for the center of tested biconvex lens, to measure center thickness.
As shown in figure 5, moving up and down if inclination occurs in tested biconvex lens through shaven head, measurement luminous point still may be used
With the surface of inswept tested biconvex lens, the focal line of X-direction, the focal line of picture point and Y-direction are obtained, but due to the hair of reflected light
Whole deviation has occurred in scattered angle, and the picture point being found does not have central symmetry, can generally tilt toward the direction.At this point, first
Equipment is transferred to X focal line, the position for then adjusting tested biconvex lens X-direction makes to measure the inswept entire lens surface of luminous point, by
Central symmetry is lost relative to reflected light path in tested biconvex lens, will be unable to find second X focal line；Y-direction focal line
It adjusts, it is similar.When discovery measurement hot spot presentation asymmetrical shape, and the tested direction biconvex lens XY position is adjusted anyway all
The focal line of two X-directions and the focal line of two Y-directions can not be searched out, that is, proves that inclination integrally occurs in tested biconvex lens,
Namely tested biconvex lens optical axis and pedestal upper surface out of plumb.Equipment can be found that tested biconvex lens whether there is and inclines
Tiltedly.
For biconvex lens, plano-convex lens, plano-concave lens, the measuring device in Fig. 2 can once measure the center of lens
It is thick.
But for biconcave lens, as shown in fig. 6-7, the center that one-shot measurement can not obtain lens is thick.It is saturating to tested concave-concave
Mirror, it is assumed that the center thickness of lens is x, and the distance of the upper plane of eyeglass to upper surface is a, the lower plane of eyeglass to lower surface away from
It, then can be measured directly from for b are as follows:
A+x=m (1)
B+x=n (2)
Because a, b, x are unknown quantity, center thickness x can not be calculated by both the above equation.For this purpose, by a piece of thickness
Degree is known as the normal glass piece of h, this normal glass piece is placed on the upper surface of biconcave lens, tries again and measures: a+b+h=
q (3)
It can thus be concluded that biconcave lens obtains center thickness are as follows: X=m+m+h-q (4)
Namely the center thickness of biconcave lens can be calculated by measuring three times.
The cumbersome of multiple survey calculation acquisition is needed in order to solve the center thickness of biconcave lens, and for solving double
Convex lens, plano-convex lens, the plano-concave lens lower surface in measurement process still need the problem of with datum plane contact, realize true
Non-cpntact measurement in positive meaning, as shown in figure 8, a kind of measuring devices of double shaven heads, including it is pedestal, the first column, second vertical
Column, two shaven heads and two connecting rods；First column and the second column are vertically set on the upper surface of pedestal, on the first column
Equipped with scale value；Be oppositely arranged up and down two shaven heads, two shaven heads are connected with by two connecting rods respectively on first column
Light-emitting window it is opposite, height of two connecting rods on the first column is adjustable；Second column is equipped with specimen holder.By adjusting,
So that upper and lower two bare headed measurement luminous points are overlapped, the difference of position of two shaven heads on scale is X0, exactly equipment at this time
Zero point.As shown in figure 9, measured lens are put on specimen holder when needing to measure the center thickness of lens, it is straight to adjust shaven head up and down
To the centrosymmetric picture point of measured lens upper and lower surface is obtained, the difference Yt, Yt of position of two shaven heads on scale at this time are write down
And the value of the difference Yt-X0 of X0 is exactly that the center of lens is thick.That is, the thickness that double end measuring device is suitable for all types lens is surveyed
Amount, is also suitable for the thickness measure of various other objects under test.
Claims (10)
1. a kind of shaven head of luminous point differential type contactless element thickness measure, it is characterised in that: its optical system include light source,
Spectroscope, the first condenser, cylindrical mirror and camera；
After spectroscope, a part of light is polymerized to measurement luminous point by the first condenser, falls in detected element the light beam that light source issues
Surface；
Luminous point is measured in detected element surface reflection, is returned along original optical path, successively passes through the first condenser, spectroscope and cylindrical mirror
Afterwards, it is focused the focal line of the focal line and Y-direction to form orthogonal X-direction, and in the focal line of the focal line of X-direction and Y-direction
Between, the picture point being centrosymmetric is formed, camera is located at picture point.
2. the shaven head of luminous point differential type contactless element thickness measure as described in claim 1, it is characterised in that: further include
Second condenser lens and frosted glass, for the light beam that light source issues after spectroscope, some light passes through second condenser lens optically focused shape
At instruction luminous point and fall on frosted glass.
3. the shaven head of luminous point differential type contactless element thickness measure as claimed in claim 1 or 2, it is characterised in that: point
Light microscopic is half-reflecting half mirror；The reflecting surface of half-reflecting half mirror and the direction of illumination angle of light source are that 0~90 ° and 0 ° and 90 ° remove
Outside；The light beam that light source issues is by half-reflecting half mirror a part is reflected to form reflected light, another part is projected to form projection
The reflected light of light, half-reflecting half mirror is polymerized to measurement luminous point through the first condenser, falls in detected element surface.
4. the shaven head of luminous point differential type contactless element thickness measure as claimed in claim 3, it is characterised in that: half anti-half
The transmitted light of lens forms instruction luminous point through second condenser lens optically focused and falls on frosted glass.
5. the shaven head of luminous point differential type contactless element thickness measure as claimed in claim 4, it is characterised in that: light source
Direction of illumination is consistent with horizontal direction；Light source, half-reflecting half mirror and second condenser lens are set gradually along the direction of illumination of light source, and half
The reflecting surface of anti-pellicle mirror and the direction of illumination angle of light source are 45 °；First condenser is located at the underface of half-reflecting half mirror；Column
Face mirror is cylinder condenser lens, and cylindrical mirror spherical surface is located at the surface of half-reflecting half mirror upward；Camera is located at picture point.
6. the shaven head of luminous point differential type contactless element thickness measure as claimed in claim 1 or 2, it is characterised in that: light
Source is point light source；Camera is focal plane camera.
7. the thickness of the shaven head comprising luminous point differential type contactless element thickness measure as claimed in any one of claims 1 to 6
Measuring device, it is characterised in that: further include pedestal and the first column；First uprights vertical is located at the upper surface of pedestal, and first is vertical
Column is equipped with scale value；Shaven head is connected on the first column by connecting rod, and the measurement luminous point that the first condenser is polymerized to can be fallen in
On the upper surface of pedestal；Height of the connecting rod on the first column is adjustable.
8. measurer for thickness as claimed in claim 7, it is characterised in that: the first column is equipped with Z axis guide rail, connecting rod one
End is slidably connected in Z axis guide rail, other end connection is bare headed.
9. measurer for thickness as claimed in claim 7 or 8, it is characterised in that: further include the second column, the second uprights vertical
It is located at the upper surface of pedestal, is connected separately be oppositely arranged up and down two shaven heads by two connecting rods on the first column, two
The light-emitting window of a shaven head is opposite, and height of two connecting rods on the first column is adjustable；Second column is equipped with specimen holder.
10. utilizing the method for the measurement thickness of measurer for thickness described in claim 7-9 any one, it is characterised in that: when
When having a shaven head, detected element is placed on the upper surface of pedestal, and the first condenser of face, by moving up and down light
Head makes the focus on light beam of the first condenser focus on the central location of detected element, when camera is in the coke of orthogonal X-direction
When capturing centrosymmetric picture point between line and the focal line of Y-direction, height h1 where reading connecting rod；Detected element is moved
It walks, by moving up and down shaven head, the measurement luminous point for being polymerized to the first condenser is fallen on the upper surface of pedestal, reads connecting rod institute
In height h2；The thickness of detected element is equal to h1-h2；
When there are two shaven head, by adjusting, so that upper and lower two bare headed measurement luminous points are overlapped, two shaven heads are in scale at this time
On position difference be X0, be exactly the zero point of equipment；It will be adjusted bare headed until respectively obtaining up and down in detected element to specimen holder
The centrosymmetric picture point of detected element upper and lower surface, write down position of two shaven heads on scale at this time difference Yt, Yt and X0 it
The value of poor Yt-X0 is exactly that the center of lens is thick.
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| CN201910571149.8A CN110274545B (en) | 2019-06-28 | 2019-06-28 | Optical head for measuring thickness of light spot differential type non-contact element, thickness measuring device and measuring method |
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| CN201910571149.8A CN110274545B (en) | 2019-06-28 | 2019-06-28 | Optical head for measuring thickness of light spot differential type non-contact element, thickness measuring device and measuring method |
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| CN110274545B (en) | 2024-07-16 |
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