CN110262195A - A kind of energy detection circuit for excimer laser in 193nm litho machine - Google Patents
A kind of energy detection circuit for excimer laser in 193nm litho machine Download PDFInfo
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- CN110262195A CN110262195A CN201910623282.3A CN201910623282A CN110262195A CN 110262195 A CN110262195 A CN 110262195A CN 201910623282 A CN201910623282 A CN 201910623282A CN 110262195 A CN110262195 A CN 110262195A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/4446—Type of detector
- G01J2001/446—Photodiode
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Abstract
The present invention relates to energy detection fields, and in particular to a kind of energy detection circuit for excimer laser in 193nm litho machine.The energy detection circuit photodiode first is detected to obtain current signal to the optical signal of excimer laser in 193nm litho machine, and the voltage signal of single pulse is obtained by active filter circuit, eliminate influence of the hangover signal to test result in photodiode current voltage conversion process.Secondly, the voltage signal of single pulse triggers trigger by comparator after filtering, the failing edge time of trigger is adjustable, trigger triggers control switch circuit, switching circuit control is by the integrating circuit after active filter circuit, while integrating circuit changes final output voltage values by changing variable condenser capacitance.Compared with prior art, circuit of the present invention is simple, it is easy to accomplish, the precision and accuracy of energy measurement can be effectively improved.
Description
Technical field
The present invention relates to energy detection field more particularly to a kind of energy for excimer laser in 193nm litho machine
Measure detection circuit.
Background technique
193nm excimer laser is a kind of pulsed gas laser towards the application of deep ultraviolet feature, has Gao Chong
Frequently, greatly energy, narrow linewidth the features such as, be outstanding microelectronics lithography system laser light source.Exposure energy is the one of litho machine
A important parameter, in order to realize accurate exposure energy stability control, it is necessary first to which an energy detection circuit comes accurate
Measure the size of laser single pulse energy.Light source of the excimer laser as litho machine, wherein 95% energy exports
As photoetching, only 5% energy is used as energy detection circuit probe, and in this 5% energy, it is also necessary to by light splitting
Mirror, beam expanding lens, homogenizes microscope group and reflecting mirror and just reaches photodetection diode attenuator, and in this section in energy, due to warp
It crosses these eyeglasses and has light source and be absorbed, while being limited by the photosensitive area of photodiode, photodetection diode absorption
Light it is considerably less, therefore photodiode detection electric current it is very faint.The laser pulse width of excimer laser output simultaneously
Degree only had for tens nanoseconds, and the burst length is short, it has not been convenient to measure；On the other hand energy requirement is exported for the laser of different range,
Need the amplification factor of energy measurement circuit must be adjustable.Therefore designing one kind has low noise amplification, and times magnification
Number is adjustable, while the circuit that can broaden pulse is extremely important.
The signal processing circuit of energy detection device disclosed in the patent of invention of Publication No. CN 104316172A uses
Pre-amplification circuit, integration holding circuit and logic control circuit be used to integral and holding are amplified to narrow pulse signal,
But for critical switching device, concrete implementation method circuit is not provided, and its final output waveform is not yet
It is and needs as the waveform that exports, while its amplification factor is unadjustable, the laser probe single arteries and veins different for power
It needs to make different circuits when rushing energy to measure.The circuit adjustable for traditional amplification factor, usually in circuit
Middle increase level-one scaling circuit, changes input current or feedback resistance by variable resistance, reaching amplification factor can
The effect of tune increases additional circuit in realization, wastes the limited space of laser detector.
Summary of the invention
The embodiment of the invention provides a kind of energy detection circuit for excimer laser in 193nm litho machine, with
The adjustable technical problem of waveform amplification factor can not be carried out by least solving existing energy detection circuit.
According to an embodiment of the invention, providing a kind of energy detection for excimer laser in 193nm litho machine
Circuit, comprising:
Photodiode, for being detected to obtain current signal to the laser that excimer laser is launched；
Active filter circuit, for reversely being amplified to current signal and filtering obtains voltage signal；
Comparator exports rising edge signal when for input voltage signal and having pulse signal to occur in voltage signal；
Trigger is triggered for inputting rising edge signal and exports failing edge signal；
Switching circuit, for inputting failing edge signal and being carried out according to failing edge signal open close；
Integrating circuit carries out Integral Processing to voltage signal for the disconnection or connection situation according to switching circuit；
Power supply circuit, for being powered to energy detection circuit；
Wherein the integrating capacitor in the integrating circuit is variable capacitance.
Further, the time of integration of the integrating circuit is determined by the pulse width of trigger.
Further, laser pulse signal in voltage signal is broadened and is held in Integral Processing by the integrating circuit
It is flat.
Further, when switching circuit disconnects, integrating circuit integral；When switching circuit conducting, integrating circuit stops
Integral.
Further, power supply circuit uses the integrated circuit U7 of TL1054CS8 power supply chip, is symmetrical defeated by power conversion
Negative voltage out；Wherein 1 foot of integrated circuit U7 is hanging, and 2 feet, which connect, connects 4 feet after capacitor C26,3 feet ground connection, 5 feet connect-VOUT,
Be grounded after meeting capacitor C28,6,7 feet are hanging, 8 feet meet Vin, meet capacitor C25 after be grounded；Capacitor C26, capacitor C28 and capacitor C25 are equal
For polar capacitor.
Further, power supply is converted into+5V using LM7805 power supply chip by power supply circuit；Wherein LM7805 power supply chip
1 foot connect Vin, meet transformer T8, meet capacitor C24 after be grounded, 2 feet ground connection, 3 feet are grounded after meeting capacitor C27, meet inductance L2 is followed by
VCC and transformer T9.
Further, active filter circuit include resistance R21, capacitor C36, integrated circuit U10, resistance R20, capacitor C35,
Capacitor C30, capacitor C34, transformer T11；
Wherein photodiode D1 cathode ground connection, positive connecting resistance R21；1 foot of integrated circuit U10 is hanging, 2 foot connecting resistances
Ground connection, resistance R20, capacitor C35 after R21, capacitor C36,3 feet ground connection, 4 feet are grounded after meeting capacitor C30, and 5 feet are hanging, and 6 feet connect change
Depressor T11, comparator, connecting resistance R20 and capacitor C35 are met, connects integrating circuit, 7 feet meet Vin, meet capacitor C34 after be grounded, 8 feet are outstanding
It is empty.
Further, comparator includes resistance R9, resistance R22, capacitor C39, resistance R23, capacitor C38, capacitor C37, electricity
Hinder R7, integrated circuit U11, capacitor C33；Wherein 1 foot of integrated circuit U11 connects trigger, and 2 feet, which meet VCC, meet capacitor C37 is followed by
Ground, 3 feet meet Vin, meet capacitor C38 after be grounded, be grounded after 4 foot connecting resistance R7,5 foot connecting resistance R9 are followed by the 6 of integrated circuit U10
Foot, connecting resistance R22 are followed by VCC and are grounded after meeting capacitor C39, and 6 feet are grounded after meeting capacitor C33, and 7 foot connecting resistance R23 are followed by VCC, and 8
Foot ground connection.
Further, trigger includes resistance R1, integrated circuit U9, capacitor C29, resistance R2, capacitor C32；Wherein integrate
1 foot of circuit U 9 is grounded, and 2 feet connect 1 foot of integrated circuit U11, and 3 foot connecting resistance R1 are followed by VCC, and 4 feet connect switching circuit, 5-13 foot
Vacantly, 14 feet ground connection, meet capacitor C29,15 feet meet capacitor C29, connecting resistance R2 is followed by VCC, and 16 feet, which meet VCC, meet capacitor C32 is followed by
Ground.
Further, switching circuit includes triode Q2, resistance R28, resistance R27, transformer T14；Wherein resistance R28 mono-
Termination triode Q2, transformer T14 is met, 4 feet of another termination integrated circuit U9, another termination integrating circuit of triode Q2, again
One end ground connection, connecting resistance R27, resistance R27 connect integrating circuit；
Integrating circuit includes capacitor C40, capacitor C41, capacitor C42, capacitor C43, integrated circuit U12, resistance R24, resistance
R25, transformer T13；Wherein capacitor C43 is variable capacitance；1 foot of integrated circuit U12 is hanging, and 2 foot connecting resistance R25 are followed by integrating
6 feet of circuit U 10, connecting resistance R27, capacitor C42 and capacitor C43,3 feet ground connection are met, 4 feet meet-VOUT, meet capacitor C40 after be grounded,
5 feet are hanging, and 6 foot connecting resistance R24 are followed by transformer T13, meet capacitor C42 and capacitor C43, and 7 feet, which meet Vin, meet capacitor C41 is followed by
Ground, 8 feet are hanging.
The energy detection circuit for excimer laser in 193nm litho machine in the embodiment of the present invention, using change
Feedback capacity changes amplification factor, does not need spatially to increase additional circuit, saves the space of circuit board, reduces circuit
Feedback capacity only need to be changed to adjustable capacitor by the complexity of plate, and there is also directly pass through knob on the market
The capacitor that can change capacitance is adjusted, is easy to implement.Compared with prior art, circuit of the present invention is simple, it is easy to accomplish, energy
Effectively improve the precision and accuracy of energy measurement.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the energy detection circuit signal flow graph of excimer laser in the present invention；
Fig. 2 is power supply circuit schematic diagram in the energy detection circuit of excimer laser in the present invention；
Fig. 3 is signal processing circuit schematic diagram in the energy detection circuit of excimer laser in the present invention；
Fig. 4 is the waveform diagram of signal processing circuit conversion process in the present invention.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
It should be noted that description and claims of this specification and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so as to the embodiment of the present invention described herein can in addition to illustrating herein or
Sequence other than those of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that cover
Cover it is non-exclusive include, for example, the process, method, system, product or equipment for containing a series of steps or units are not necessarily limited to
Step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, product
Or other step or units that equipment is intrinsic.
According to an embodiment of the invention, providing a kind of energy detection for excimer laser in 193nm litho machine
Circuit, comprising:
Photodiode, for being detected to obtain current signal to the laser that excimer laser is launched；
Active filter circuit, for reversely being amplified to current signal and filtering obtains voltage signal；
Comparator exports rising edge signal when for input voltage signal and having pulse signal to occur in voltage signal；
Trigger is triggered for inputting rising edge signal and exports failing edge signal；
Switching circuit, for inputting failing edge signal and being carried out according to failing edge signal open close；
Integrating circuit, for carrying out Integral Processing to voltage signal according to the disconnection or connection situation of switching circuit；
Power supply circuit, for being powered to energy detection circuit；
Wherein the integrating capacitor in the integrating circuit is variable capacitance.
The energy detection circuit for excimer laser in 193nm litho machine in the embodiment of the present invention, using change
Feedback capacity changes amplification factor, does not need spatially to increase additional circuit, saves the space of circuit board, reduces circuit
Feedback capacity only need to be changed to adjustable capacitor by the complexity of plate, and there is also directly pass through knob on the market
The capacitor that can change capacitance is adjusted, is easy to implement.Compared with prior art, circuit of the present invention is simple, it is easy to accomplish, energy
Effectively improve the precision and accuracy of energy measurement.
A kind of energy detection circuit for excimer laser in 193nm litho machine provided by the invention, can will make an uproar
Acoustical signal is inhibited, and useful signal is amplified, while measuring for convenience, using integrating circuit by the laser pulse of measurement
Signal broadening simultaneously maintains an equal level, and makes when generating laser pulse signal, and the measurement voltage at any point can represent the energy of the pulse
Amount is strong and weak, reduces the difficulty of subsequent AD acquisition process circuit design.While in order to be adapted to different lasers, amplification factor
It is adjustable.The adjusting method of amplification factor is that integrating capacitor is variable condenser in adjusting integrating circuit.
Specifically, the present invention is the energy detection circuit for excimer laser, photodiode is to 193nm light first
The optical signal of excimer laser is detected to obtain current signal in quarter machine, and obtains single pulse by active filter circuit
Signal, eliminate influence of the hangover signal of photodiode to test result.Secondly, the signal of single pulse passes through after filtering
Comparator is crossed to trigger trigger, the failing edge time of trigger is adjustable, and trigger triggers control switch circuit, switch electricity
Road control is by the integrating circuit after active filter circuit, and the time of integration of integrating circuit is by the pulse width of trigger Lai really
It is fixed, while integrating circuit changes final output voltage values by changing variable condenser capacitance.
In as a preferred technical scheme, the time of integration of the integrating circuit is determined by the pulse width of trigger.
In as a preferred technical scheme, the integrating circuit is in Integral Processing by laser pulse signal in voltage signal
It is broadened and is maintained an equal level.
In as a preferred technical scheme, when switching circuit disconnects, integrating circuit integral；When switching circuit conducting,
Integrating circuit stops integral.
In as a preferred technical scheme, power supply circuit uses the integrated circuit U7 of TL1054CS8 power supply chip, by power supply
It is converted into the negative voltage symmetrically exported；Wherein 1 foot of integrated circuit U7 is hanging, and 2 feet connect 4 feet after meeting capacitor C26, and 3 feet are grounded,
5 feet meet-VOUT, meet capacitor C28 after be grounded, 6,7 feet are hanging, 8 feet meet Vin, meet capacitor C25 after be grounded；Capacitor C26, capacitor C28
And capacitor C25 is polar capacitor.
In as a preferred technical scheme, power supply is converted into+5V using LM7805 power supply chip by power supply circuit；Wherein
1 foot of LM7805 power supply chip connect Vin, meet transformer T8, meet capacitor C24 after be grounded, 2 feet ground connection, 3 feet meet capacitor C27 and are followed by
Ground meets inductance L2 and is followed by VCC and transformer T9.
In as a preferred technical scheme, active filter circuit includes resistance R21, capacitor C36, integrated circuit U10, resistance
R20, capacitor C35, capacitor C30, capacitor C34, transformer T11；
Wherein photodiode D1 cathode ground connection, positive connecting resistance R21；1 foot of integrated circuit U10 is hanging, 2 foot connecting resistances
Ground connection, resistance R20, capacitor C35 after R21, capacitor C36,3 feet ground connection, 4 feet are grounded after meeting capacitor C30, and 5 feet are hanging, and 6 feet connect change
Depressor T11, comparator, connecting resistance R20 and capacitor C35 are met, connects integrating circuit, 7 feet meet Vin, meet capacitor C34 after be grounded, 8 feet are outstanding
It is empty.
In as a preferred technical scheme, comparator includes resistance R9, resistance R22, capacitor C39, resistance R23, capacitor
C38, capacitor C37, resistance R7, integrated circuit U11, capacitor C33；Wherein 1 foot of integrated circuit U11 connects trigger, 2 feet connect VCC,
Be grounded after meeting capacitor C37,3 feet meet Vin, meet capacitor C38 after be grounded, be grounded after 4 foot connecting resistance R7,5 foot connecting resistance R9 are followed by collecting
VCC is followed by 6 feet of circuit U 10, connecting resistance R22 and is grounded after meeting capacitor C39, and 6 feet are grounded after meeting capacitor C33,7 foot connecting resistances
R23 is followed by VCC, 8 feet ground connection.
In as a preferred technical scheme, trigger includes resistance R1, integrated circuit U9, capacitor C29, resistance R2, capacitor
C32；Wherein the 1 foot ground connection of integrated circuit U9,2 feet connect 1 foot of integrated circuit U11, and 3 foot connecting resistance R1 are followed by VCC, and 4 feet connect out
Powered-down road, 5-13 foot is hanging, 14 feet ground connection, meet capacitor C29,15 feet meet capacitor C29, connecting resistance R2 is followed by VCC, 16 feet connect VCC,
It is grounded after meeting capacitor C32.
In as a preferred technical scheme, switching circuit includes triode Q2, resistance R28, resistance R27, transformer T14；
Wherein resistance R28 mono- terminates triode Q2, meets transformer T14,4 feet of another termination integrated circuit U9, the triode Q2 other end
Integrating circuit, another end ground connection, connecting resistance R27 are connect, resistance R27 connects integrating circuit；
Integrating circuit includes capacitor C40, capacitor C41, capacitor C42, capacitor C43, integrated circuit U12, resistance R24, resistance
R25, transformer T13；Wherein capacitor C43 is variable capacitance；1 foot of integrated circuit U12 is hanging, and 2 foot connecting resistance R25 are followed by integrating
6 feet of circuit U 10, connecting resistance R27, capacitor C42 and capacitor C43,3 feet ground connection are met, 4 feet meet-VOUT, meet capacitor C40 after be grounded,
5 feet are hanging, and 6 foot connecting resistance R24 are followed by transformer T13, meet capacitor C42 and capacitor C43, and 7 feet, which meet Vin, meet capacitor C41 is followed by
Ground, 8 feet are hanging.
With specific embodiment, the present invention is described in detail below.One kind is for excimer laser in 193nm litho machine
The energy detection circuit of device include power supply circuit, photodiode, active filter circuit, comparator, trigger, switching circuit,
Integrating circuit, includes adjustable integrating capacitor in integrating circuit, and signal flow figure is as shown in Figure 1.Power supply circuit is used to
It is powered to entire circuit, photodiode is used to detect 193nm excimer laser, and active filter circuit is used to photoelectricity two
Current signal that pole pipe detects obtains voltage signal by reversed amplification and filtering, when there is pulse signal appearance in voltage signal
When comparator be used to export a rising edge signal, this rising edge signal is used to trigger trigger, and trigger exports under one
It drops and is used to the open close of control switch circuit along signal, the open close of switching circuit is used to control time of integration of integrating circuit, when opening
When powered-down road disconnects, integrating circuit integral, when switching circuit is connected, integrating circuit stops integral, and adjustable change integrates
Capacitor's capacity, finally by integrating circuit output voltage values.
Fig. 2 is power supply circuit schematic diagram in the energy detection circuit of excimer laser in the present invention.Energy detection circuit
It is needed during signal processing using negative voltage, according to the demand power and current needs of power supply, using TL1054CS8 electricity
Power conversion is the negative voltage symmetrically exported by source chip integrated circuit U7.1 foot of integrated circuit U7 is hanging, and 2 feet connect capacitor
Connect 4 feet after C26,3 feet ground connection, 5 feet meet-VOUT, meet capacitor C28 after be grounded, 6,7 feet are hanging, and 8 feet meet Vin, meet capacitor C25
After be grounded, wherein capacitor C26, capacitor C28 and capacitor C25 are polar capacitor；Energy detection circuit is in signal processing simultaneously
It is needed in the process using+5V voltage, therefore power supply is converted by+5V using LM7805 power supply chip.The 1 of LM7805 power supply chip
Foot connect Vin, meet transformer T8, meet capacitor C24 after be grounded, 2 feet ground connection, 3 feet are grounded after meeting capacitor C27, meet inductance L2 is followed by VCC
And transformer T9.
If Fig. 3 is signal processing circuit schematic diagram, first light in the energy detection circuit of excimer laser in the present invention
The irradiation of electric diode D1 stimulated light generates current signal, by including resistance R21, capacitor C36, integrated circuit U10, resistance
R20, capacitor C35, capacitor C30, capacitor C34, transformer T11 active filter circuit by the dark current of laser, and due to
The non-uniform hangover target signal filter of pulse caused by laser nature, wherein photodiode D1 cathode ground connection, anode connect
Resistance R21；1 foot of integrated circuit U10 is hanging, and ground connection, resistance R20, capacitor C35,3 feet connect after 2 foot connecting resistance R21, capacitor C36
Ground, 4 feet are grounded after meeting capacitor C30, and 5 feet are hanging, and 6 feet meet transformer T11, meet comparator, connecting resistance R20 and capacitor C35, connect product
Parallel circuit, 7 feet meet Vin, meet capacitor C34 after be grounded, 8 feet are hanging.
Secondly, the output voltage of the active filter circuit, on the one hand passes through comparator, on the other hand most by integrating circuit
After export.Comparator includes resistance R9, resistance R22, capacitor C39, resistance R23, capacitor C38, capacitor C37, resistance R7, integrated electricity
Road U11, capacitor C33；Wherein 1 foot of integrated circuit U11 connects trigger, 2 feet meet VCC, meet capacitor C37 after be grounded, 3 feet connect Vin,
It is grounded after meeting capacitor C38, is grounded after 4 foot connecting resistance R7, after 5 foot connecting resistance R9 are followed by 6 feet of integrated circuit U10, connecting resistance R22
It meets VCC and is grounded after meeting capacitor C39,6 feet are grounded after meeting capacitor C33, and 7 foot connecting resistance R23 are followed by VCC, 8 feet ground connection.Trigger
Including resistance R1, integrated circuit U9, capacitor C29, resistance R2, capacitor C32；Wherein the 1 foot ground connection of integrated circuit U9,2 feet connect collection
At 1 foot of circuit U 11,3 foot connecting resistance R1 are followed by VCC, and 4 feet connect switching circuit, and 5-13 foot is hanging, and 14 feet ground connection connects capacitor
C29,15 feet meet capacitor C29, connecting resistance R2 is followed by VCC, 16 feet meet VCC, meet capacitor C32 after be grounded.
Switching circuit includes triode Q2, resistance R28, resistance R27, transformer T14.Wherein resistance R28 mono- terminates three poles
Pipe Q2, transformer T14 is met, 4 feet of another termination integrated circuit U9, another termination integrating circuit of triode Q2, another end be grounded,
Connecting resistance R27, resistance R27 connect integrating circuit.
Integrating circuit includes capacitor C40, capacitor C41, capacitor C42, capacitor C43, integrated circuit U12, resistance R24, resistance
R25, transformer T13, wherein capacitor C43 is variable capacitance, for changing amplification factor.1 foot of integrated circuit U12 is hanging, 2 feet
Connecting resistance R25 is followed by 6 feet of integrated circuit U10, connecting resistance R27, meets capacitor C42 and capacitor C43,3 feet ground connection, and 4 feet connect-
VOUT, it is grounded after meeting capacitor C40,5 feet are hanging, and 6 foot connecting resistance R24 are followed by transformer T13, meet capacitor C42 and capacitor C43,7 feet
Meet Vin, meet capacitor C41 after be grounded, 8 feet are hanging.
Such as the waveform diagram of Fig. 4 signal processing circuit conversion process, the waveform of photodiode D1 is first passed around as shown in Vi,
There is longer trailing phenomenon, later by the waveform of active filter circuit as shown in Vo1, trailing phenomenon is reduced, by comparator
Waveform later is as shown in Vo2, and by the waveform of trigger as shown in Vo3, final output waveform is as shown in Vo4, the width of Vo4
Degree is by the control of variable capacitance C43, and when capacitor becomes larger, output becomes smaller, and when capacitor becomes smaller, output voltage becomes larger.It can from Fig. 4
To find out, Vi is input signal, although its pulsewidth is larger, most of is the hangover as caused by the property of sensor, and
Hangover signal is not belonging to the signal of single pulse, it is therefore desirable to it is filtered to obtain the Vo1 that can represent single pulse signal energy,
It can be seen that Vo1 pulse width is narrow, and signal is a curve, it has not been convenient to measure, be arranged by last waveform, most
Output waveform is Vo4 afterwards, it can be seen that very much, and the voltage of last signal maintains by the waveform widths ratio Vo1 wide of Vo4
One steady state value, is convenient for measuring.
The serial number of the above embodiments of the invention is only for description, does not represent the advantages or disadvantages of the embodiments.
In the above embodiment of the invention, it all emphasizes particularly on different fields to the description of each embodiment, does not have in some embodiment
The part of detailed description, reference can be made to the related descriptions of other embodiments.
In several embodiments provided herein, it should be understood that disclosed technology contents can pass through others
Mode is realized.Wherein, system embodiment described above is only schematical, such as the division of unit, can be one kind
Logical function partition, there may be another division manner in actual implementation, such as multiple units or components can combine or can
To be integrated into another system, or some features can be ignored or not executed.Another point, shown or discussed is mutual
Coupling, direct-coupling or communication connection can be through some interfaces, the indirect coupling or communication connection of unit or module,
It can be electrical or other forms.
Unit may or may not be physically separated as illustrated by the separation member, shown as a unit
Component may or may not be physical unit, it can and it is in one place, or may be distributed over multiple units
On.It can some or all of the units may be selected to achieve the purpose of the solution of this embodiment according to the actual needs.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.Above-mentioned integrated list
Member both can take the form of hardware realization, can also realize in the form of software functional units.
It, can if integrated unit is realized in the form of SFU software functional unit and when sold or used as an independent product
To be stored in a computer readable storage medium.Based on this understanding, technical solution of the present invention substantially or
Say that all or part of the part that contributes to existing technology or the technical solution can embody in the form of software products
Out, which is stored in a storage medium, including some instructions are used so that a computer equipment
(can be personal computer, server or network equipment etc.) executes all or part of step of each embodiment method of the present invention
Suddenly.And storage medium above-mentioned includes: USB flash disk, read-only memory (ROM, Read-Only Memory), random access memory
The various media that can store program code such as (RAM, Random Access Memory), mobile hard disk, magnetic or disk.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of energy detection circuit for excimer laser in 193nm litho machine characterized by comprising
Photodiode, for being detected to obtain current signal to the laser that excimer laser is launched；
Active filter circuit, for reversely being amplified to current signal and filtering obtains voltage signal；
Comparator exports rising edge signal when for input voltage signal and having pulse signal to occur in voltage signal；
Trigger is triggered for inputting rising edge signal and exports failing edge signal；
Switching circuit, for inputting failing edge signal and being carried out according to failing edge signal open close；
Integrating circuit carries out Integral Processing to voltage signal for the disconnection or connection situation according to switching circuit；
Power supply circuit, for being powered to energy detection circuit；
Wherein the integrating capacitor in the integrating circuit is variable capacitance.
2. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In the time of integration of the integrating circuit is determined by the pulse width of trigger.
3. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In laser pulse signal in voltage signal is broadened and maintained an equal level in Integral Processing by the integrating circuit.
4. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In, when switching circuit disconnects, integrating circuit integral；When switching circuit conducting, integrating circuit stops integral.
5. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In it is the negative voltage symmetrically exported by power conversion that power supply circuit, which uses the integrated circuit U7 of TL1054CS8 power supply chip,；Its
1 foot of middle integrated circuit U7 is hanging, and 2 feet, which connect, connects 4 feet after capacitor C26,3 feet ground connection, and 5 feet, which meet-VOUT, meet capacitor C28 is followed by
Ground, 6 feet and 7 feet are hanging, 8 feet meet Vin, meet capacitor C25 after be grounded；Capacitor C26, capacitor C28 and capacitor C25 are polarity electricity
Hold.
6. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In power supply is converted into+5V using LM7805 power supply chip by power supply circuit；Wherein 1 foot of LM7805 power supply chip meets Vin, connects
Transformer T8, it is grounded after meeting capacitor C24,2 feet ground connection, 3 feet are grounded after meeting capacitor C27, meet inductance L2 is followed by VCC and transformer
T9。
7. the energy detection circuit according to claim 1 for excimer laser in 193nm litho machine, feature exist
In active filter circuit includes resistance R21, capacitor C36, integrated circuit U10, resistance R20, capacitor C35, capacitor C30, capacitor
C34, transformer T11；
Wherein, photodiode D1 cathode ground connection, positive connecting resistance R21；1 foot of integrated circuit U10 is hanging, 2 foot connecting resistances
Ground connection, resistance R20, capacitor C35 after R21, capacitor C36,3 feet ground connection, 4 feet are grounded after meeting capacitor C30, and 5 feet are hanging, and 6 feet connect change
Depressor T11, comparator, connecting resistance R20 and capacitor C35 are met, connects integrating circuit, 7 feet meet Vin, meet capacitor C34 after be grounded, 8 feet are outstanding
It is empty.
8. the energy detection circuit according to claim 7 for excimer laser in 193nm litho machine, feature exist
In comparator includes resistance R9, resistance R22, capacitor C39, resistance R23, capacitor C38, capacitor C37, resistance R7, integrated circuit
U11, capacitor C33；Wherein 1 foot of integrated circuit U11 connects trigger, 2 feet meet VCC, meet capacitor C37 after be grounded, 3 feet meet Vin, connect
It is grounded after capacitor C38, is grounded after 4 foot connecting resistance R7,5 foot connecting resistance R9 are followed by 6 feet of integrated circuit U10, connecting resistance R22 is followed by
It VCC and is grounded after meeting capacitor C39,6 feet are grounded after meeting capacitor C33, and 7 foot connecting resistance R23 are followed by VCC, 8 feet ground connection.
9. the energy detection circuit according to claim 8 for excimer laser in 193nm litho machine, feature exist
In trigger includes resistance R1, integrated circuit U9, capacitor C29, resistance R2, capacitor C32；Wherein 1 foot of integrated circuit U9 connects
Ground, 2 feet connect 1 foot of integrated circuit U11, and 3 foot connecting resistance R1 are followed by VCC, and 4 feet connect switching circuit, and 5-13 foot is hanging, and 14 feet connect
Ground meets capacitor C29, and 15 feet meet capacitor C29, connecting resistance R2 is followed by VCC, 16 feet meet VCC, meet capacitor C32 after be grounded.
10. the energy detection circuit according to claim 9 for excimer laser in 193nm litho machine, feature
It is, switching circuit includes triode Q2, resistance R28, resistance R27, transformer T14；Wherein resistance R28 mono- terminates triode
Q2, transformer T14,4 feet of another termination integrated circuit U9 are met, another termination integrating circuit of triode Q2, connects another end ground connection
Resistance R27, resistance R27 connect integrating circuit；
Integrating circuit include capacitor C40, capacitor C41, capacitor C42, capacitor C43, integrated circuit U12, resistance R24, resistance R25,
Transformer T13；Wherein capacitor C43 is variable capacitance；1 foot of integrated circuit U12 is hanging, and 2 foot connecting resistance R25 are followed by integrated circuit
6 feet of U10, connecting resistance R27, capacitor C42 and capacitor C43,3 feet ground connection are met, 4 feet meet-VOUT, meet capacitor C40 after be grounded, 5 feet
Vacantly, 6 foot connecting resistance R24 are followed by transformer T13, meet capacitor C42 and capacitor C43,7 feet meet Vin, meet capacitor C41 after be grounded, 8
Foot is hanging.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910623282.3A CN110262195B (en) | 2019-07-11 | 2019-07-11 | Energy detection circuit for excimer laser in 193nm lithography machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910623282.3A CN110262195B (en) | 2019-07-11 | 2019-07-11 | Energy detection circuit for excimer laser in 193nm lithography machine |
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| CN110262195A true CN110262195A (en) | 2019-09-20 |
| CN110262195B CN110262195B (en) | 2024-06-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113176556A (en) * | 2021-04-20 | 2021-07-27 | 安徽汉先智能科技有限公司 | Laser energy detection circuit for laser radar equipment |
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| CN202092776U (en) * | 2011-06-01 | 2011-12-28 | 北京光电技术研究所 | Pulse laser energy measuring device |
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| CN210072319U (en) * | 2019-07-11 | 2020-02-14 | 北京科益虹源光电技术有限公司 | Energy detection circuit for excimer laser in 193nm photoetching machine |
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| CN202092776U (en) * | 2011-06-01 | 2011-12-28 | 北京光电技术研究所 | Pulse laser energy measuring device |
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| CN113176556A (en) * | 2021-04-20 | 2021-07-27 | 安徽汉先智能科技有限公司 | Laser energy detection circuit for laser radar equipment |
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| CN110262195B (en) | 2024-06-18 |
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