CN110164744B - Scanning electron microscope refrigerating system and method based on low-temperature solid cooling - Google Patents
Scanning electron microscope refrigerating system and method based on low-temperature solid cooling Download PDFInfo
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- CN110164744B CN110164744B CN201910411555.8A CN201910411555A CN110164744B CN 110164744 B CN110164744 B CN 110164744B CN 201910411555 A CN201910411555 A CN 201910411555A CN 110164744 B CN110164744 B CN 110164744B
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- 239000007787 solid Substances 0.000 title claims abstract description 44
- 238000001816 cooling Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 105
- 238000005057 refrigeration Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 239000012774 insulation material Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 28
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- 238000013016 damping Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
- F25D3/02—Devices using other cold materials; Devices using cold-storage bodies using ice, e.g. ice-boxes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
- F25D3/10—Devices using other cold materials; Devices using cold-storage bodies using liquefied gases, e.g. liquid air
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The invention relates to the technical field of scanning electron microscope sample stage cooling, and provides a scanning electron microscope refrigerating system and a method based on low-temperature solid cooling, wherein the scanning electron microscope refrigerating system based on low-temperature solid cooling comprises the following components: the device comprises a container, a first vacuum cavity, a second vacuum cavity, a sample table, a cryogenic cold head and a liquid source; the sample platform is arranged above the container, the low-temperature cold head is used for providing cold energy for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is positioned in the first vacuum cavity, and the container and the sample platform are positioned in the second vacuum cavity. According to the scanning electron microscope refrigerating system based on low-temperature solid cooling, the temperature of the sample stage is regulated and controlled by the latent heat refrigeration of the low-temperature solid converted by liquid, after the cold energy transmission between the low-temperature cold head and the container is cut off, the system is in a zero vibration state, the sample stage can be maintained at a set temperature for a long time, and the temperature fluctuation range is small.
Description
Technical Field
The invention relates to the technical field of scanning electron microscope sample stage cooling, in particular to a scanning electron microscope refrigerating system and a scanning electron microscope refrigerating method based on low-temperature solid cooling.
Background
Currently, scanning electron microscopes are typically only capable of testing the temperature of a sample in a room temperature environment. In recent years, a part of cold heads of scanning electron microscopes using liquid nitrogen as a cold source are also developed, and a specific cooling mode is to introduce the liquid nitrogen into the scanning electron microscope to directly cool a sample stage. There are several problems with this cooling approach: firstly, the cooling temperature interval is narrow, liquid nitrogen is used, and the temperature can only be around 77K; secondly, the temperature control precision is not high, the temperature is difficult to achieve high-precision temperature control by controlling the flow of liquid nitrogen, and the temperature fluctuation is usually as high as 1-2K or even higher; thirdly, liquid nitrogen is introduced into the scanning electron microscope, and vibration is inevitably introduced, so that the observation of microscopic morphology under high magnification is obviously affected.
Disclosure of Invention
The invention aims to provide a scanning electron microscope refrigerating system based on low-temperature solid cooling with a small temperature fluctuation range, so as to solve the problems that the existing sample stage cooling mode is easy to cause vibration and has large temperature fluctuation.
Another object of the present invention is to provide a scanning electron microscope refrigeration method based on low-temperature solid cooling, so as to realize wide temperature area coverage and high-precision temperature control of the sample stage.
In a first aspect, a scanning electron microscope refrigeration system based on low-temperature solid cooling provided by an embodiment of the present invention includes: the device comprises a container, a first vacuum cavity, a second vacuum cavity, a sample stage, a low-temperature cold head and a liquid source, wherein the first vacuum cavity is connected with the sample stage; the sample stage is arranged above the container, the low-temperature cold head is used for providing cold for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is positioned inside the first vacuum cavity, and the container and the sample stage are positioned inside the second vacuum cavity.
The liquid source comprises a liquid storage tank, the liquid storage tank is communicated with the container through a liquid conveying channel, a valve is arranged on the liquid conveying channel, and the liquid storage tank and the valve are both positioned outside the second vacuum cavity.
Wherein, the liquid storage tank and the liquid transportation channel outside the second vacuum cavity are both coated with heat insulation materials.
The liquid conveying channel is further provided with a second thermal switch, and the second thermal switch is located in the second vacuum cavity.
The low-temperature cold head is communicated with the container through a cold quantity conveying channel, and a first thermal switch is arranged on the cold quantity conveying channel.
The cold source of the low-temperature cold head is a low-temperature refrigerator, and the low-temperature refrigerator is arranged on the first base; the cryocooler is located inside the first vacuum cavity, and the first base is located outside the first vacuum cavity.
The first base and the second vacuum cavity are positioned on the second base, and the second base is also connected with a vibration reduction unit.
Wherein, first vacuum cavity and second vacuum cavity intercommunication each other.
In a second aspect, a scanning electron microscope refrigeration method based on low-temperature solid cooling provided by an embodiment of the invention includes: when the sample stage is in an unobserved state, the cryocooler delivers cold to the container, and the liquid source fills liquid into the container;
when the sample stage is in an observed state, the cold energy transmission between the cryogenic cold head and the container is cut off, and the liquid source stops filling liquid into the container.
Wherein, still include: and restarting cold energy transmission between the cryogenic cold head and the container when the sample stage is in an observed state for a preset time.
According to the scanning electron microscope refrigerating system based on low-temperature solid cooling, when a sample on a sample table is in an unobserved state, a low-temperature cold head conveys cold energy to a container, a liquid source fills liquid into the container, and the liquid is solidified through the cold energy to form low-temperature solid; when the sample on the sample table is in an observed state, the cold energy transmission between the low-temperature cold head and the container is cut off, the liquid source stops filling the liquid into the container, and the sample table is cooled by the cold energy of the low-temperature solid in the container; when the sample on the sample table is in an observed state for a preset time, namely after the low-temperature solid absorbs heat and liquefies, restarting cold energy transmission between the low-temperature cold head and the container to solidify the liquid, and preventing the liquid in the container from being discharged. The scanning electron microscope refrigerating system based on low-temperature solid cooling provided by the embodiment is in a zero vibration state after the cold energy transmission between the low-temperature cold head and the container is cut off based on the low-temperature solid latent heat refrigeration, and the sample stage can be maintained at a set temperature for a long time, and the temperature fluctuation range is also small.
The embodiment of the invention also provides a scanning electron microscope refrigerating method based on low-temperature solid cooling, which is based on low-temperature solid latent heat refrigeration, and is in a zero vibration state after the cold energy transmission between the low-temperature cold head and the container is cut off, and the sample stage can be maintained at a set temperature for a long time, and the temperature fluctuation range is also small.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of a refrigeration system for a scanning electron microscope based on low-temperature solid cooling.
Reference numerals illustrate:
1-a vibration damping unit; 2-a second base; 3-a second vacuum chamber; 3 a-the interior of the second vacuum chamber; 4-scanning electron microscope electron gun; 5-sample stage; 6-a container; 6 a-low temperature solids; 7-a second thermal switch; 7 a-a low temperature side liquid transport channel; 7 b-room temperature side liquid transport channel; 7 c-valve; 7 d-a thermal insulation material; 7 e-a liquid reservoir; 8-a first thermal switch; 8 a-container side thermal bridge; 8 b-low temperature refrigerator side heat bridge; 12-a first vacuum chamber; 12 a-the interior of the first vacuum chamber; 13-cryorefrigerator; 13 a-a first base; 13 b-cryo-coldhead.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Fig. 1 is a schematic structural diagram of a refrigeration system for a scanning electron microscope based on low-temperature solid cooling according to the present invention, as shown in fig. 1, where the refrigeration system for a scanning electron microscope based on low-temperature solid cooling provided by the embodiment of the present invention includes: a container 6, a first vacuum chamber 12, a second vacuum chamber 3, a sample stage 5, a cryohead 13b, and a liquid source; the sample stage 5 is arranged on the container 6, the cryogenic cold head 13b is used for providing cold for the container 6, the liquid source is used for providing liquid for the container 6, the cryogenic cold head 13b is positioned inside the first vacuum cavity 12, and the container 6 and the sample stage 5 are positioned inside the second vacuum cavity 3.
The electron gun 4 of the scanning electron microscope extends into the second vacuum cavity 3 to observe the sample on the sample stage 5, and a station for placing the sample is arranged on the sample stage 5. The sample stage 5 is a new component, is independent of the sample stage of the microscope, and can be made of copper blocks or other block materials. The material of the container 6 is selected according to the type of the stored low-temperature solid 6a, and is not particularly limited herein. The size and shape of the container 6 may be selected according to the actual situation.
In the embodiment of the invention, when the sample on the sample stage 5 is in an unobserved state, the cryogenic cold head 13b transmits cold to the container 6, the liquid source fills the liquid into the container 6, and the liquid is solidified through the cold to form a cryogenic solid 6a;
when the sample on the sample table 5 is in an observed state, the cold energy transmission between the low-temperature cold head 13b and the container 6 is cut off, the liquid source stops filling the liquid into the container 6, and the sample table 5 is cooled by the cold energy of the low-temperature solid 6a in the container 6;
when the sample on the sample stage 5 is in the observed state for a preset time, namely after the cryogenic solid 6a absorbs heat and liquefies, the cold energy transmission between the cryogenic cold head 13b and the container 6 is restarted, the liquid is solidified, and the liquid in the container 6 is not discharged all the time.
The scanning electron microscope refrigerating system based on low-temperature solid cooling provided by the embodiment is in a zero vibration state after the cold energy transmission between the low-temperature cold head 13b and the container 6 is cut off based on the latent heat refrigeration of the low-temperature solid 6a, and the sample stage can be maintained at a set temperature for a long time, and the temperature fluctuation range is also small.
It will be appreciated that the liquid provided by the liquid source may be liquid helium, liquid neon, liquid nitrogen or other cryogenic liquids. In this example, liquid is exemplified by liquid nitrogen.
On the basis of the above embodiment, the liquid source includes the liquid reservoir 7e, the liquid reservoir 7e is communicated with the container 6 through the liquid transport passage, the valve 7c is provided on the liquid transport passage, and the liquid reservoir 7e and the valve 7c are both located outside the second vacuum chamber 3.
In the embodiment of the invention, the liquid conveying channel comprises a low-temperature side liquid conveying channel 7a and a room-temperature side liquid conveying channel 7b, the low-temperature side liquid conveying channel 7a is communicated with the room-temperature side liquid conveying channel 7b through a second thermal switch 7, the second thermal switch 7 is positioned in the inner part 3a of the second vacuum cavity, the room-temperature side liquid conveying channel 7b is provided with a valve 7c, and the liquid storage tank 7e and the valve 7c are positioned outside the second vacuum cavity 3. By providing the second thermal switch 7, the loss of cold can be prevented.
On the basis of the above embodiment, the liquid reservoir 7e and the liquid transport passage located outside the second vacuum chamber 3 are both covered with the heat insulating material 7d.
In the embodiment of the present invention, the portion of the room temperature side liquid transport channel 7b, which is located outside the second vacuum chamber 3, is covered with the heat insulation material 7d, the periphery of the liquid storage tank 7e is covered with the heat insulation material 7d, and the material or thickness of the heat insulation material 7d can be selected according to actual requirements, which is not limited herein specifically. The temperature of the liquid can be prevented from being influenced by the outside by arranging the heat insulating material 7d, thereby improving the efficiency of converting the liquid into low-temperature solids.
On the basis of the above embodiment, the cryogenic cold head 13b is communicated with the container 6 through a cold volume transport passage on which the first thermal switch 8 is provided.
In the embodiment of the invention, the cold transport channel comprises a container side thermal bridge 8a and a low temperature refrigerator side thermal bridge 8b, the container side thermal bridge 8a and the low temperature refrigerator side thermal bridge 8b are connected through a first thermal switch 8, a low temperature cold head 13b is connected with one end of the low temperature refrigerator side thermal bridge 8b, and the first thermal switch 8 is arranged in the inner part 3a of the second vacuum cavity.
On the basis of the embodiment, the cold source of the cryocooler 13b is the cryocooler 13, and the cryocooler 13 is mounted on the first base 13 a; the cryocooler 13 is located inside the first vacuum chamber 12a and the first base 13a is located outside the first vacuum chamber.
In the embodiment of the invention, the cryocooler 13 is in a working state, the first thermal switch 8 is in a closed state, and the cold energy of the cryocooler 13b sequentially passes through the cryocooler side thermal bridge 8b, the first thermal switch 8 and the container side thermal bridge 8a to solidify the liquid in the container 6.
On the basis of the above embodiment, the first base 13a and the second vacuum chamber 3 are located on the second base 2, and the second base 2 is also connected with a vibration damping unit.
In the embodiment of the invention, the first base 13a is located at one side above the second base 2, the second vacuum cavity 3 is located at the other side above the second base 2, and the vibration reduction unit 1 is further connected below the second base 2. The first base 13a is disposed at one side above the second base 2, and by damping the cryogenically cooled device by means of the existing damping unit 1 of the scanning electron microscope, the additional introduction of damping means is avoided, which leads to high complexity of the system.
On the basis of the above-described embodiments, the introduction of additional vacuum devices is avoided for example, the first vacuum chamber 12 and the second vacuum chamber 3 being in communication with each other.
In the embodiment of the invention, the vacuum degree of the first vacuum cavity 12 and the second vacuum cavity 3 is 0 Pa-10 5 Pa。
The scanning electron microscope refrigerating method based on low-temperature solid cooling provided by the embodiment of the invention comprises the following steps: when the sample stage 5 is in an unobserved state, the cryogenic cold head 13b delivers cold to the container 6, and the liquid source fills the container 6 with liquid;
when the sample stage 5 is in the observed state, the cold feed between the cryogenic head 13b and the container 6 is cut off, and the liquid source stops filling the container 6 with liquid.
In the embodiment of the invention, when a sample on the sample stage 5 is in an unobserved state, the control device sends a first starting instruction to the cryocooler 13, the cryocooler 13 is started, the control device sends a second starting instruction to the first thermal switch 8 and the second thermal switch 7, the first thermal switch 8 and the second thermal switch 7 are in a closed state, and the cold energy of the low-temperature cold head 13b sequentially passes through the low-temperature refrigerator side thermal bridge 8b, the first thermal switch 8 and the container side thermal bridge 8a to convey the cold energy into the container 6; the control device sends a third starting instruction to the valve 7c to open the valve 7c, liquid nitrogen in the liquid storage tank 7e sequentially passes through the room temperature side liquid conveying channel 7b, the second thermal switch 7 and the low temperature side liquid conveying channel 7a and then is filled into the container 6, and the liquid nitrogen is solidified through cold energy to form a low temperature solid 6a;
when the sample on the sample stage 5 is in an observed state, the control device sends a first closing instruction to the cryocooler 13, the cryocooler 13 is closed, the control device sends a second closing instruction to the first thermal switch 8 and the second thermal switch 7, the first thermal switch 8 and the second thermal switch 7 are disconnected, the control device sends a third closing instruction to the valve 7c, the valve 7c is closed, the liquid source stops filling liquid nitrogen into the container 6, and at the moment, the temperature of the sample stage 5 is reduced through the cold energy of the low-temperature solid 6a in the container 6;
when the sample on the sample stage 5 is in an observed state for a preset time, namely, after all or part of nitrogen fixation in the container 6 is converted into liquid nitrogen along with continuous heat absorption and liquefaction of the low-temperature solid 6a, the liquid level value detected by the liquid level detection device is larger than a preset threshold value, the liquid level detection device sends an early warning instruction to the control device, the control device sends a fourth starting instruction to the low-temperature refrigerator 13, the low-temperature refrigerator 13 is started, the control device sends a fifth starting instruction to the first thermal switch 8, the first thermal switch 8 is closed, the cold energy of the low-temperature cold head 13b sequentially passes through the low-temperature refrigerator side thermal bridge 8b, the first thermal switch 8 and the container side thermal bridge 8a, the cold energy is conveyed into the container 6, the liquid nitrogen is solidified, and the liquid nitrogen in the container 6 cannot be discharged all the time. According to the scanning electron microscope refrigerating method based on low-temperature solid cooling, provided by the embodiment, the low-temperature solid 6a is used for refrigerating by latent heat, when the low-temperature refrigerator 13 is in a stop working state, the vibration problem in the running process of the low-temperature refrigerator 13 can be avoided, the sample stage 5 can be maintained at the set temperature for a long time, and the temperature fluctuation range is small.
Before the cryocooler 13 is turned on for the first time, it is necessary to ensure that the vacuum degree of the first vacuum chamber 12 and the second vacuum chamber 3 is 0Pa to 10 5 Pa。
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. A scanning electron microscope refrigeration system based on cryogenic solid cooling, comprising: the device comprises a container, a first vacuum cavity and a second vacuum cavity, and is characterized by further comprising a sample table, a low-temperature cold head and a liquid source; the sample stage is arranged above the container, the low-temperature cold head is used for providing cold for the container, the liquid source is used for providing liquid for the container, the low-temperature cold head is positioned in the first vacuum cavity, and the container and the sample stage are positioned in the second vacuum cavity;
the low-temperature cold head is communicated with the container through a cold quantity conveying channel, and a first thermal switch is arranged on the cold quantity conveying channel;
the first vacuum cavity and the second vacuum cavity are communicated with each other.
2. The cryogenic solid cooling based scanning electron microscope refrigeration system of claim 1, wherein the liquid source comprises a liquid reservoir in communication with the container through a liquid transport channel, a valve is disposed on the liquid transport channel, and both the liquid reservoir and the valve are located outside the second vacuum chamber.
3. The cryogenic solid cooling based scanning electron microscope refrigeration system of claim 2, wherein the liquid reservoir and the liquid transport channel located outside of the second vacuum chamber are both coated with a thermal insulation material.
4. The scanning electron microscope refrigeration system based on low-temperature solid cooling according to claim 2, wherein a second thermal switch is further arranged on the liquid conveying channel, and the second thermal switch is located inside the second vacuum cavity.
5. The scanning electron microscope refrigeration system based on low-temperature solid cooling according to claim 1, wherein the cold source of the low-temperature cold head is a low-temperature refrigerator, and the low-temperature refrigerator is installed on the first base; the cryocooler is located inside the first vacuum cavity, and the first base is located outside the first vacuum cavity.
6. The cryogenically-based solid-cooled scanning electron microscope refrigeration system of claim 5 wherein the first base and the second vacuum chamber are located on a second base, the second base further having a vibration reduction unit connected thereto.
7. A cryogenic solid cooling-based scanning electron microscope refrigeration method using the cryogenic solid cooling-based scanning electron microscope refrigeration system of any one of claims 1 to 6, characterized by comprising:
when the sample stage is in an unobserved state, the cryocooler delivers cold to the container, and the liquid source fills liquid into the container;
when the sample stage is in an observed state, the cold energy transmission between the cryogenic cold head and the container is cut off, and the liquid source stops filling liquid into the container.
8. The method for cooling a scanning electron microscope based on low-temperature solid cooling according to claim 7, further comprising:
and restarting cold energy transmission between the cryogenic cold head and the container when the sample stage is in an observed state for a preset time.
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NL2024445B1 (en) * | 2019-12-12 | 2021-09-01 | Delmic Ip B V | Method and manipulation device for handling samples |
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CA1185106A (en) * | 1983-05-13 | 1985-04-09 | Wing C. Fong | Scanning electron microscope sample cooling device |
JP2000277045A (en) * | 1999-03-24 | 2000-10-06 | Hitachi Ltd | Scanning electron microscope |
KR20180130049A (en) * | 2017-05-26 | 2018-12-06 | (주)코셈 | Scanning electron microscope system for integrated sample processing apparatus and method for sample three-dimensional image using the same |
CN109632450A (en) * | 2018-11-19 | 2019-04-16 | 浙江大学 | A kind of mechanism for seal chamber vivo sample cooling and transmission |
CN209804586U (en) * | 2019-05-17 | 2019-12-17 | 中国科学院理化技术研究所 | Scanning electron microscope refrigerating system based on low-temperature solid cooling |
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EP3175279B1 (en) * | 2014-07-29 | 2023-02-15 | Leica Mikrosysteme GmbH | Light microscope having a sample stage for cryomicroscopy |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1185106A (en) * | 1983-05-13 | 1985-04-09 | Wing C. Fong | Scanning electron microscope sample cooling device |
JP2000277045A (en) * | 1999-03-24 | 2000-10-06 | Hitachi Ltd | Scanning electron microscope |
KR20180130049A (en) * | 2017-05-26 | 2018-12-06 | (주)코셈 | Scanning electron microscope system for integrated sample processing apparatus and method for sample three-dimensional image using the same |
CN109632450A (en) * | 2018-11-19 | 2019-04-16 | 浙江大学 | A kind of mechanism for seal chamber vivo sample cooling and transmission |
CN209804586U (en) * | 2019-05-17 | 2019-12-17 | 中国科学院理化技术研究所 | Scanning electron microscope refrigerating system based on low-temperature solid cooling |
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