CN110146898A - It is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method - Google Patents
It is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method Download PDFInfo
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- CN110146898A CN110146898A CN201910585803.0A CN201910585803A CN110146898A CN 110146898 A CN110146898 A CN 110146898A CN 201910585803 A CN201910585803 A CN 201910585803A CN 110146898 A CN110146898 A CN 110146898A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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Abstract
The present invention relates to a kind of based on image taking and the monitoring of the probe trajectory of image analysis and control method, belongs to information technology field.This method realizes that the range unit includes laser, it is seen that light source, microscope, probe, sample, sample displacement platform, kinetic control system and analysis process system based on probe range unit.The method specifically includes: S1: sample is placed on sample displacement platform；S2: radiation of visible light obtains the scene near needle point on probe tip, through microscope combination detector in real time, and is transferred to analysis process system and carries out image procossing and feature extraction, obtains interval S of the probe-sample on graphical rule；S3: by the relational expression of interval S and practical spacing on graphical rule, the actual range d of probe-sample is calculated.The present invention accurately obtains probe and sample interval and adjusts its spacing by control system by shooting image and analysis image, final to realize probe motion track monitoring and control.
Description
Technical field
The invention belongs to information technology field, be related to it is a kind of based on image taking and the monitoring of the probe trajectory of image analysis and
Control method.
Background technique
According to Rayleigh criterion, traditional far field imaging system is limited by diffraction limit, and the highest spatial resolution of imaging is only
Half of wavelength or so can be reached.Using near-field scan imaging technique, imaging space resolution ratio can break through diffraction limit, can
To reach sub-wavelength dimensions.Nowadays, optical microscope for scanning near field be widely used to function element detection, biological tissue at
The key areas such as picture, surface chemist reaction, material molecule detection, nano-device analysis.For optical microscope for scanning near field
Speech, probe is a core component, to its monitoring and control relative to the position of sample, can not only guarantee the effect of imaging
Fruit, probe or specimen breakdown caused by probe and sample can also be avoided to hit.Although currently, having using based on atomic force microscopy
The probe-sample Force feedback mechanism of mirror or feedback mechanism based on tuning fork exploratory probe Yu sample shear power, but these
The scanning system that method is not suitable for the non-vibrating surface sweeping system of probe or probe cannot be contacted with sample；It is flat using three-D displacement
Although platform can be monitored and controlled x of the probe relative to sample well, y location, can not in real time and monitor with
It controls probe (z location) at a distance from sample surfaces, causes great difficulty for scanning imagery；It is then desired to develop other inspections
The method surveyed and control probe motion.
Summary of the invention
In view of this, being monitored the purpose of the present invention is to provide a kind of based on image taking and the probe trajectory of image analysis
And control method, for accurately measuring probe and sample interval (direction z), in conjunction with the probe automatically derived by scanning control system
Relative to the x of sample, y-coordinate, can be realized by image analysis system and scanning control system to probe motion track (x, y,
Z location) real-time monitoring and control.
In order to achieve the above objectives, the invention provides the following technical scheme:
It is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method, specifically includes the following steps:
S1: sample (7) is placed on sample displacement platform (8)；
S2: visible light source (4) illuminator probe (5) and sample (7) are opened；
S3: laser (6) are opened by laser irradiation to probe (5) end and sample (7) surface；
S4: detector (2) are combined to obtain the scene image near probe (5) end in real time by microscope (3)；
S5: image transmitting to analysis process system (1) is subjected to image procossing and feature extraction, probe-sample is obtained and exists
Interval S on graphical rule；
S6: by the relational expression of interval S on graphical rule and practical spacing, be calculated probe-sample actually away from
From d, and it is set to position of the probe relative to sample on the direction z；
S7: being moved by kinetic control system (9) control sample displacement platform (8) or probe (5), obtains probe relative to sample
Location parameter a and b of the product in the direction x and y；
S8: it by analysis process system (1) and kinetic control system (9), realizes according to obtaining a, b, d or adjust a, b, d
Monitoring and control to probe motion track.
Further, in the step S3, probe end and sample surfaces are irradiated using beam of laser, laser spot a part is shone
It penetrates in probe end, a part is radiated at sample surfaces below probe.Utilize the method, compared with ambient enviroment, probe end
Below the probe sample surfaces can compared with it is bright, convenient for the analysis probe from the image of shooting and sample surfaces distance.
Further, in the step S5, image procossing includes: to carry out Pseudo Col ored Image, threshold value two to all shooting images
Value, corrosion and expansion.
Further, in the step S5, feature extraction include: extract image border and calculate the boundary of fringe region away from
From.
Further, the step S6 is specifically included: accurately controlling three-dimensional sample platform (8) along z by kinetic control system (9)
When direction is displaced L, photoconductive probe-sample spacing changes delta S on the image is measured；The practical spacing d of known probe-sample with
The relationship that interval S is measured on image is d=Ssin α, and wherein α is microscope (3) and sample displacement platform (8) horizontal direction is pressed from both sides
Angle, 0 360 ° of < α <；
(1) for the sample of smooth surface, image and actual scale bar k1=Δ Ssin α/L, is calculated probe-
The practical spacing d=k of sample1·S；
(2) for the sample of rough surface, image and actual scale bar k2=Δ S/L, is calculated probe-sample
Practical spacing d=k2·S。
Further, the device suitable for probe trajectory monitoring and control method includes laser (6), visible light source
(4), microscope (3), detector (2), probe (5), sample displacement platform (8), kinetic control system (9) and analysis process system
(1)；
The laser (6) is for giving off exploring laser light；The sample displacement platform (8) is horizontal positioned, for holding sample
Product (7), and sample is controlled in the movement of all directions；The kinetic control system (9) for accurately control sample displacement platform (8) or
Person's probe (5) is in x, y, the movement in the direction z, or is used to control probe or sample displacement platform respectively in a certain or certain dimensional orientations
Movement.
The beneficial effects of the present invention are: the present invention can obtain in real time during carrying out Sample Scan and adjust probe
With the spacing of sample, probe and sample interval can be accurately measured, and its spacing can be automatically adjusted by kinetic control system；Knot
X of the probe as known to kinetic control system relative to sample is closed, y location can be controlled by analysis process system and movement
System processed realizes the monitoring and control to probe motion track.
Detailed description of the invention
In order to keep the purpose of the present invention, technical scheme and beneficial effects clearer, the present invention provides following attached drawing and carries out
Illustrate:
Fig. 1 is probe range unit schematic diagram；
Fig. 2 is the range measurement principle schematic diagram of smooth surface sample；
Fig. 3 is the range measurement principle schematic diagram of rough surface sample；
Appended drawing reference are as follows: 1- analysis process system, 2- detector, 3- microscope, 4- visible light source, 5- probe, 6- laser
Device, 7- sample, 8- sample displacement platform, 9- kinetic control system, the sample of 10- smooth surface, the sample of 11- rough surface, 12-
The mirror image of probe.
Specific embodiment
Below in conjunction with attached drawing, a preferred embodiment of the present invention will be described in detail.This preferred embodiment is a kind of base
In photoconductive microprobe, Sample Scan mode Terahertz near field imaging system.
As shown in Figures 1 to 3, it is of the present invention it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control
Method processed, realization device includes laser 6, visible light source 4, visible light microscope 3, (the present embodiment is using photoconduction for probe 5
It is micro-), sample 7, sample displacement platform 8, kinetic control system 9 and analysis process system 1 (the present embodiment selection computer).Laser
For giving off exploring laser light；Sample displacement platform is horizontal positioned, for holding sample and controlling sample in the movement of all directions；Fortune
Autocontrol system can accurately control sample displacement platform in the movement stepping of Z-direction；
The present embodiment microscope uses visible light microscope, to be in the angle α (0 90 ° of < α <) with sample displacement platform horizontal direction
Degree is placed, and is furnished with colored CCD camera on microscope, and work sends figure in real time under RGB mode, to analysis process system
Picture.
In sample test experiment, it is irradiated near needle point by the exploring laser light that laser radiation goes out, passes through CCD camera
The scene near needle point is obtained, the image that then will acquire carries out image procossing (Pseudo Col ored Image, threshold by analysis process system
Value binaryzation, corrosion and expansion etc.) and the modes such as feature extraction (Edge extraction and the shortest distance for calculating borderline region),
Interval S of the available photoconduction microprobe-sample on graphical rule, and there is certain change with practical spacing in image spacing
Calculation relationship can indirectly obtain the practical spacing d of photoconductive microprobe-sample that is, by the scale bar between them.
Photoconductive probe-is measured firstly, accurately controlling when sample displacement platform is displaced L along Z-direction by kinetic control system
Sample spacing changes delta S on the image；
(1) sample smooth for surface, probe can by sample surfaces generate mirror image, laser irradiation at needle point,
It can also be observed that LASER SPECKLE on mirror image；Therefore, it can be observed that LASER SPECKLE is simultaneously in needle in CCD acquired image
On point and mirror image；According to optical imaging concept, interval S is measured on the practical spacing d and image of photoconductive microprobe-sample
Relationship is d=Ssin α, so that it is determined that image and actual scale bar k1=Δ Ssin α/L, obtains photoconductive microprobe-
The practical spacing d=k of sample1·S。
(2) for shaggy sample, mirror image can not be formed, but due to the detection of Terahertz near field imaging system use
Laser beam spot sizes are about 30 μm, wherein about 10 μm are irradiated on photoconductive microprobe, when sample apart from needle point near 10 μm
When, the laser for not being radiated at photoconductive microprobe can be irradiated on sample and be diffusely reflected other directions, to be shown by optics
CCD detection on micro mirror arrives.Therefore, LASER SPECKLE is observed in acquired image on needle point and sample, thus really
Determine image and actual scale bar k2=Δ S/L obtains the practical spacing d=k of photoconductive microprobe-sample2·S。
(1) photoconductive microprobe and sample interval are measured
Step 1: Image Acquisition and processing
After instrument and equipment is adjusted, Terahertz near-field scan system is run, control kinetic control system is past by sample
Mobile (this system all samples moving operation, it is necessary to sample not contact probe of photoconductive microprobe end direction (direction z)
For principle), CCD feedback image on see needle point mirror image or sample on LASER SPECKLE after, select micron-sized step
Into mobile a small amount of, the color image of CCD transmission is then acquired on analysis process system, to the image of acquisition do image procossing and
The modes such as feature extraction obtain the interval S of probe-sample on the image1。
Step 2: image and actual scale bar k are measured
Kinetic control system is controlled by the mobile determining displacement L of sample, image is acquired and does image procossing and feature extraction,
Obtain interval S2, calculate image spacing twice and change △ S=| S2-S1|；Whether generate mirror image according to original image, calculate image with
Actual scale bar k；The sample smooth with surface is observed in acquired image due to the effect of mirror-reflection
To LASER SPECKLE on needle point and mirror image, therefore, scale bar k1=Δ Ssin α/L；For the sample with rough surface
Product, due to the irreflexive effect of sample, observed in acquired image LASER SPECKLE on needle point and sample, therefore,
Its scale bar k2=Δ S/L.
Step 3: ranging localization
In sample near-field test, sample is moved to the position of test by control Electronic control box, then acquires image simultaneously
It does the modes such as image procossing and feature extraction and obtains the interval S of photoconductive microprobe-sample on the image；Then photoconductive micro- spy
The practical spacing of needle-sample is d=kS.
Embodiment 2: automatic adjustment measures photoconductive microprobe and sample interval
Step 1: Image Acquisition and scale bar measure
With Step 1: two, measured in embodiment 1 scale bar k (wherein, for the sample with smooth surface, image with
Actual ratio ruler is k1, for the sample with rough surface, image and actual ratio ruler are k2)。
Step 2: adjust automatically spacing system
Default probe-sample spacing safety value d0, in Sample Scan test process, mentioned in real time by analysis process system
Interval S on image is taken, its practical spacing d is calculated according to corresponding proportion ruler, compares d and d0Size relation, and pass to and be
Unite control centre, then passes through movement of the communication adjustment sample in Z-direction between control centre and sample displacement platform.Therefore, in terahertz
Hereby in near-field scan test process, is adjusted by the Real-time Feedback of analysis process system and sample displacement platform, probe can be made to arrive
The spacing of sample is maintained in a fixed range, to achieve the purpose that safety, automatically scanning sample.
Step 3: probe motion track monitoring and control
Due in operation, being by displacement platform kinetic control system it is known that x and y of the probe relative to sample
Position；In addition, by Step 1: z location of the two available probes relative to sample surfaces.Thus, it is imaged in probe scanning
In the process, x of the available probe relative to sample surfaces, y, z location, so as to utilize image analysis processing system to it
Motion profile is monitored；Correspondingly, the fortune of probe can be controlled by carrying out parameter setting to displacement platform kinetic control system
Dynamic rail mark.
Preferably, the motion control of scanning can be realized by individually controlling sample displacement platform, can also be by individually controlling
Manufacturing probe module is realized, can also be realized by controlling sample displacement platform and probe module simultaneously；Illumination light and microscope are not
Be it is required, in the case where guaranteeing to take probe end and sample surfaces image, have to not necessarily need it is above-mentioned certain
One component or whole components；Laser can be substituted by other light beams with certain brightness, as long as can assist showing in the picture
Show specimen surface positions below probe end and probe；The equipment of image capture is varied, belongs to defined by the present invention
Range；The mode of image procossing is not limited to the proposed step of the present invention, as long as probe end and sample surfaces spacing can be extracted
Image analysis processing method belong to the framework of the present definition.
Finally, it is stated that preferred embodiment above is only used to illustrate the technical scheme of the present invention and not to limit it, although logical
It crosses above preferred embodiment the present invention is described in detail, however, those skilled in the art should understand that, can be
Various changes are made to it in form and in details, without departing from claims of the present invention limited range.
Claims (6)
1. a kind of based on image taking and the monitoring of the probe trajectory of image analysis and control method, which is characterized in that this method tool
Body the following steps are included:
S1: sample (7) is placed on sample displacement platform (8)；
S2: visible light source (4) illuminator probe (5) and sample (7) are opened；
S3: laser (6) are opened by laser irradiation to probe (5) end and sample (7) surface；
S4: detector (2) are combined to obtain the scene image near probe (5) end in real time by microscope (3)；
S5: image transmitting to analysis process system (1) is subjected to image procossing and feature extraction, obtains probe-sample in image
Interval S on scale；
S6: by the relational expression of interval S and practical spacing on graphical rule, being calculated the actual range d of probe-sample,
And it is set to position of the probe relative to sample on the direction z；
S7: being moved by kinetic control system (9) control sample displacement platform (8) or probe (5), is obtained probe and is existed relative to sample
The location parameter a and b in the direction x and y；
S8: it by analysis process system (1) and kinetic control system (9), realizes to spy according to obtaining a, b, d or adjust a, b, d
The monitoring and control of needle movement track.
2. it is according to claim 1 it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method,
It is characterized in that, irradiating probe end in step S3 using beam of laser and sample surfaces, laser spot a part being radiated at probe
End, a part are radiated at sample surfaces below probe.
3. it is according to claim 1 it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method,
It is characterized in that, in the step S5, image procossing include: to all shooting images carry out Pseudo Col ored Image, threshold binarization,
Corrosion and expansion.
4. it is according to claim 1 it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method,
It is characterized in that, feature extraction includes: the frontier distance for extracting image border and calculating fringe region in the step S5.
5. it is according to claim 1 it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method,
It is characterized in that, the step S6 is specifically included: accurately controlling three-dimensional sample platform (8) in the z-direction by kinetic control system (9)
When being displaced L, photoconductive probe-sample spacing changes delta S on the image is measured；The practical spacing d of known probe-sample and image
On to measure the relationship of interval S be d=Ssin α, wherein α is microscope (3) and sample displacement platform (8) horizontal direction angle, 0 <
360 ° of α <；
(1) for the sample of smooth surface, image and actual scale bar k1=Δ Ssin α/L, is calculated probe-sample
Practical spacing d=k1·S；
(2) for the sample of rough surface, image and actual scale bar k2=Δ S/L, is calculated the reality of probe-sample
Spacing d=k2·S。
6. it is according to claim 1 it is a kind of based on image taking and the probe trajectory of image analysis monitoring and control method,
It is characterized in that, the device for being suitable for probe trajectory monitoring and control method includes laser (6), visible light source (4), shows
Micro mirror (3), detector (2), probe (5), sample displacement platform (8), kinetic control system (9) and analysis process system (1)；
The laser (6) is for giving off exploring laser light；The sample displacement platform (8) is horizontal positioned, for holding sample
(7), and sample is controlled in the movement of all directions；The kinetic control system (9) for accurately control sample displacement platform (8) or
Probe (5) is in x, y, the movement in the direction z, or for controlling probe or sample displacement platform respectively in a certain or certain dimensional orientations
Movement.
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| CN201910224214X | 2019-03-22 | ||
| CN201910224214.XA CN109917407A (en) | 2019-03-22 | 2019-03-22 | A kind of near field probe distance measuring method and device based on laser reflection |
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| CN201910585803.0A Active CN110146898B (en) | 2019-03-22 | 2019-07-01 | Probe track monitoring and controlling method based on image shooting and image analysis |
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| WO2021066911A1 (en) | 2019-09-30 | 2021-04-08 | Formfactor Beaverton, Inc. | Maintaining gap spacing between an optical probe and an optical device of a device under test |
| CN114926451A (en) * | 2022-06-10 | 2022-08-19 | 中国科学院重庆绿色智能技术研究院 | Probe and sample accurate control method and control system based on machine vision |
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| CN110736715B (en) * | 2019-10-25 | 2022-05-24 | 深圳市太赫兹科技创新研究院有限公司 | Method, device and system for preventing false touch of probe |
| CN117572028B (en) * | 2024-01-19 | 2024-04-30 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Adjustment method of terahertz near-field system laser light path |
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