CN110108208A - The error compensating method of five axis non-contact measurement machines - Google Patents
The error compensating method of five axis non-contact measurement machines Download PDFInfo
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- CN110108208A CN110108208A CN201910405381.4A CN201910405381A CN110108208A CN 110108208 A CN110108208 A CN 110108208A CN 201910405381 A CN201910405381 A CN 201910405381A CN 110108208 A CN110108208 A CN 110108208A
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- 238000005259 measurement Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000011159 matrix material Substances 0.000 claims description 31
- 230000009466 transformation Effects 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000012937 correction Methods 0.000 abstract description 2
- 238000013480 data collection Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
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Abstract
A kind of error compensating method of five axis non-contact measurement machine, belongs to Error Compensation Technology field.The error compensating method of the five axis non-contact measurement machine includes: data collection steps: gauge head measurement standard workpiece obtains the three-dimensional coordinate (x, y, z) of workpiece arbitrary point and the spatial pose (x, y, z, a, c) of gauge head；Individual error identification step: building individual error identification model carries out individual error identification to standard workpiece, obtains individual error data；Composition error identification step: ideal measurement motion model of the building from workpiece chain to gauge head chain, then on the basis of rigid body kinematics, composition error identification model and composition error data are obtained using individual error data correction；Error compensation step: error compensation is carried out according to three-dimensional coordinate data of the composition error data of standard workpiece to workpiece for measurement, obtains revised workpiece for measurement XYZ three-dimensional coordinate data.The present invention can be improved measurement accuracy and measurement efficiency.
Description
Technical Field
The invention relates to the technology in the field of error compensation, in particular to an error compensation method of a five-axis non-contact measuring machine.
Background
The five-axis non-contact measuring machine integrates five-axis linkage and non-contact measurement, provides a complete measuring solution for the non-contact measurement requirement of a complex curved surface/an opposite curved surface, is mainly used in the fields of automobile parts, aircraft engine parts, mobile phone 3D glass, precision molds and the like, and can provide measurement requirements such as dimension measurement, 3D dimension cloud picture construction and the like.
The measurement accuracy is an important performance index concerned by a five-axis non-contact measuring machine, and the geometric error of the measuring machine accounts for more than 50% of the total error of the whole machine, so the geometric error compensation is the most concerned engineering problem in improving the measurement accuracy. The engineering equipment which is in certain association with the five-axis non-contact measuring machine comprises a five-axis numerical control machine tool and a contact type coordinate measuring machine, wherein geometric error compensation of the five-axis numerical control machine tool is mainly realized through pitch error compensation and reverse clearance compensation, part of numerical control systems are also provided with XYZ three-dimensional error compensation, and geometric error compensation of the contact type coordinate measuring machine is mainly realized through XYZ three-dimensional 21-item geometric error compensation. However, the geometric error compensation method for the two types of engineering equipment only compensates the geometric error of the linear motion axis, and the five-axis non-contact measuring machine still has the problem that the geometric error exists in two rotating axes.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides an error compensation method of a five-axis non-contact measuring machine, which can improve the measurement precision and the measurement efficiency.
The invention is realized by the following technical scheme:
the invention comprises the following steps:
a data acquisition step: measuring a standard workpiece by a measuring head with a laser displacement sensor to obtain initial coordinate data of the standard workpiece, wherein the initial coordinate data of the standard workpiece comprises initial three-dimensional coordinates (x, y, z) of any point of the workpiece and corresponding spatial positions (x, y, z, a and c) of the measuring head;
single error identification: calibrating geometric errors among a linear motion pair, a rotary motion pair and a motion pair of a five-axis non-contact measuring machine to obtain 21 errors of a linear axis and 24 errors of a rotary axis, constructing a single error identification model, and then performing single error identification on initial coordinate data of a standard workpiece to obtain single error data;
and (3) comprehensive error identification: constructing an ideal measurement motion model from a workpiece chain to a measuring head chain by homogeneous transformation with a five-axis non-contact measuring machine tool coordinate system as a base coordinate system, and correcting by utilizing single error data on the basis of rigid body kinematics to obtain a comprehensive error identification model and comprehensive error data;
and error compensation step: and carrying out error compensation on the initial three-dimensional coordinate data of the workpiece to be detected according to the comprehensive error data to obtain corrected coordinate data of the workpiece to be detected.
And the single error identification is obtained by calculating a 1-dimensional difference value, and a single error value corresponding to any point coordinate on the standard workpiece is obtained.
The ideal measured motion model isWherein i represents the matrix theoryIn the matrix of the wanted movement,
is an ideal motion matrix from the workpiece coordinate system to the C turntable coordinate system,
is an ideal motion matrix from a C turntable coordinate system to a Y-axis coordinate system,d is the distance between the origin of the A-axis coordinate system and the origin of the C-axis coordinate system in the Z direction,
is an ideal motion matrix from a Y-axis coordinate system to a base coordinate system,
is an ideal motion matrix from a base coordinate system to an X-axis coordinate system,
is an ideal motion matrix from an X-axis coordinate system to a Z-axis coordinate system,
is an ideal motion matrix from a Z-axis coordinate system to an A-axis coordinate system,
is an ideal motion matrix from an A-axis coordinate system to a measuring head coordinate system,and L is the distance between the origin of the measuring head coordinate system and the origin of the A-axis coordinate system in the Z direction.
The comprehensive error identification model isWherein e denotes that the matrix is a motion matrix with errors, t (X) is X-axis translational and rotational error, T (Y) is Y-axis translational and rotational error, T (Z) is Z-axis translational and rotational error, T (A) is A-axis translational and rotational error, and T (C) is C-axis translational and rotational error.
The composite error data is
Technical effects
Compared with the prior art, the invention has the following technical effects:
1) the method has the advantages that the single error is firstly obtained, then the comprehensive error caused by the measurement motion is obtained, the comprehensive geometric error of the five-axis non-contact measuring machine in any working space pose can be rapidly determined, and the measurement precision and the measurement efficiency are improved through post-compensation post-processing;
2) under the condition of determining the measuring head pose (x, y, z, a, c), errors can be corrected quickly, and real data of a workpiece to be measured are obtained;
3) the method is beneficial to a user to quickly select the mounting position of the piece to be measured, reduces the measurement error and reduces the uncertainty of the measurement precision.
Drawings
FIG. 1 is a flowchart of the method of example 1;
FIG. 2 is a five-axis noncontact measuring machine of embodiment 1;
FIG. 3a is a cloud of measurement errors of the measuring machine in the x direction;
FIG. 3b is a cloud of measurement errors of the measuring machine in the y-direction;
fig. 3c is a cloud of measurement errors of the measuring machine in the z-direction.
Detailed Description
The invention is described in detail below with reference to the drawings and the detailed description.
Example 1
As shown in fig. 1, the present embodiment includes the following steps:
a data acquisition step: measuring a standard workpiece by a measuring head with a laser displacement sensor to obtain initial coordinate data of the standard workpiece, wherein the initial coordinate data of the standard workpiece comprises initial three-dimensional coordinates (x, y, z) of any point of the workpiece and corresponding spatial positions (x, y, z, a and c) of the measuring head;
single error identification: calibrating geometric errors among a linear motion pair, a rotary motion pair and a motion pair of a five-axis non-contact measuring machine to obtain 21 errors of a linear axis and 24 errors of a rotary axis, constructing a single error identification model, and then performing single error identification on initial coordinate data of a standard workpiece to obtain single error data;
and (3) comprehensive error identification: constructing an ideal measurement motion model from a workpiece chain to a measuring head chain by homogeneous transformation with a five-axis non-contact measuring machine tool coordinate system as a base coordinate system, and correcting by utilizing single error data on the basis of rigid body kinematics to obtain a comprehensive error identification model and comprehensive error data;
and error compensation step: and carrying out error compensation on the initial three-dimensional coordinate data of the workpiece to be detected according to the comprehensive error data to obtain corrected coordinate data of the workpiece to be detected.
The ideal measuring movement comprises two parts, a workpiece chain part and a measuring head chain part; the workpiece chain part is expressed as RCS → YCS → CCS → WCS, and the stylus chain part is expressed as RCS → XCS → ZCS → ACS → TCS, where WCS is a workpiece coordinate system, CCS is a C-turret coordinate system, YCS is a Y-coordinate system, RCS is a base coordinate system, XCS is an X-coordinate system, ZCS is a Z-coordinate system, ACS is an a-turret coordinate system, and TCS is a stylus coordinate system, as shown in fig. 2;
in this embodiment, the comprehensive error identification model is established on the basis of the ideal measurement motion model, and the ideal measurement motion model is obtained by performing homogeneous coordinate transformation on the path of the workpiece coordinate system → the base coordinate system → the probe coordinate system, which can be specifically expressed as
The ideal measured motion model can be expressed asWherein,
is an ideal motion matrix from the workpiece coordinate system to the C turntable coordinate system,
is an ideal motion matrix from a C turntable coordinate system to a Y-axis coordinate system,d is the distance between the origin of the A-axis coordinate system and the origin of the C-axis coordinate system in the Z direction,
is an ideal motion matrix from a Y-axis coordinate system to a base coordinate system,
is an ideal motion matrix from a base coordinate system to an X-axis coordinate system,
is an ideal motion matrix from an X-axis coordinate system to a Z-axis coordinate system,
is an ideal motion matrix from a Z-axis coordinate system to an A-axis coordinate system,
is an ideal motion matrix from an A-axis coordinate system to a measuring head coordinate system,and L is the distance between the origin of the measuring head coordinate system and the origin of the A-axis coordinate system in the Z direction.
According to ISO 230-1: 2012 the error terms defined by the international standard are shown in tables 1 and 2.
TABLE 1 three axes of geometric error terms
TABLE 2 geometric error terms for the rotation axis
In the embodiment of the invention:
x-axis translational rotational error is expressed as
The Y-axis translational rotational error is expressed as
Z-axis translational rotational error is expressed as
The translational and rotational error of the A axis is expressed as
Wherein,a matrix of errors relating to the position is represented,
a position-independent error matrix is represented,
the C-axis translational rotational error is expressed as
Wherein,
an error associated with the C-axis position is indicated,
representing an error independent of the C-axis position.
On the basis of the ideal measurement motion model, correction is carried out based on a single error:
i, workpiece chain
1) Base coordinate system RCS → X coordinate system XCS,
2) x coordinate system XCS → Z coordinate systemZCS，
3) Z coordinate system ZCS → A turntable coordinate system ACS,
4) a turntable coordinate system ACS → a stylus/workpiece coordinate system TCS,
measuring head chain
1) Base coordinate system RCS → Y coordinate system YCS,
2) y-axis coordinate system YCS → C turntable coordinate system CCS,
3) c turntable coordinate system CCS → workpiece coordinate system WCS,
III, establishing a comprehensive error identification model based on I and II
The composite error data of the workpiece is
The error cloud charts in fig. 3a, 3b and 3c show the error values of the device at different spatial positions, which is helpful for the user to quickly select the installation position of the to-be-tested piece. According to the embodiment of the invention, the (x, y, z, a, c) five-dimensional parameters are input under any spatial pose, the actual error value can be rapidly obtained, and the actual error value can be added into the measured value to obtain the actual value of the to-be-measured piece. By adopting the post-compensation post-processing technology, high measurement precision and extremely high measurement efficiency can be realized.
It is to be emphasized that: the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any way, and all simple modifications, equivalent changes and modifications made to the above embodiments according to the technical spirit of the present invention are within the scope of the technical solution of the present invention.
Claims (5)
1. An error compensation method of a five-axis non-contact measuring machine is characterized by comprising the following steps:
a data acquisition step: measuring a standard workpiece by a measuring head with a laser displacement sensor to obtain initial coordinate data of the standard workpiece, wherein the initial coordinate data of the standard workpiece comprises initial three-dimensional coordinates (x, y, z) of any point of the standard workpiece and corresponding spatial positions (x, y, z, a and c) of the measuring head;
single error identification: calibrating geometric errors among a linear motion pair, a rotary motion pair and a motion pair of a five-axis non-contact measuring machine to obtain 21 errors of a linear axis and 24 errors of a rotary axis, constructing a single error identification model, and then performing single error identification on initial coordinate data of a standard workpiece to obtain single error data;
and (3) comprehensive error identification: constructing an ideal measurement motion model from a workpiece chain to a measuring head chain by homogeneous transformation with a five-axis non-contact measuring machine tool coordinate system as a base coordinate system, and correcting by utilizing single error data on the basis of rigid body kinematics to obtain a comprehensive error identification model and comprehensive error data;
and error compensation step: and carrying out error compensation on the initial three-dimensional coordinate data of the workpiece to be detected according to the comprehensive error data to obtain corrected coordinate data of the workpiece to be detected.
2. The error compensation method of the five-axis non-contact measuring machine according to claim 1, wherein the single error identification is obtained by 1-dimensional difference calculation, and a single error value corresponding to any point coordinate on the standard workpiece is obtained.
3. The error compensation method for five-axis non-contact measuring machine according to claim 1, wherein the ideal measurement motion model isWhere i denotes that the matrix is an ideal motion matrix,is an ideal motion matrix from the workpiece coordinate system to the C turntable coordinate system,is an ideal motion matrix from a C turntable coordinate system to a Y-axis coordinate system,is an ideal motion matrix from a Y-axis coordinate system to a base coordinate system,is an ideal motion matrix from a base coordinate system to an X-axis coordinate system,is an ideal motion matrix from an X-axis coordinate system to a Z-axis coordinate system,is an ideal motion matrix from a Z-axis coordinate system to an A-axis coordinate system,and the ideal motion matrix from the A-axis coordinate system to the measuring head coordinate system.
4. The error compensation method for five-axis non-contact measuring machine according to claim 3, wherein the comprehensive error identification model isWherein e denotes that the matrix is a motion matrix with errors, t (X) is X-axis translational and rotational error, T (Y) is Y-axis translational and rotational error, T (Z) is Z-axis translational and rotational error, T (A) is A-axis translational and rotational error, and T (C) is C-axis translational and rotational error.
5. The error compensation method for a five-axis noncontact measuring machine as claimed in claim 1, wherein said composite error data isWherein x, y,z represents XYZ three-dimensional coordinate values of the workpiece.
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| CN110736407A (en) * | 2019-09-27 | 2020-01-31 | 西安爱德华测量设备股份有限公司 | machine tool external working condition simulator based on automatic precision machining and alignment method |
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| CN110989494A (en) * | 2019-11-29 | 2020-04-10 | 上海交通大学 | Thin-wall part machining error measuring and compensating method based on trigger type measuring head |
| CN111060025A (en) * | 2019-12-23 | 2020-04-24 | 上海交通大学 | Pose calibration method and system for in-situ mounting line laser sensor of five-axis machine tool |
| CN111983900A (en) * | 2020-08-28 | 2020-11-24 | 合肥众群光电科技有限公司 | LDI platform error compensation method |
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| CN113108738A (en) * | 2021-03-25 | 2021-07-13 | 中国航发南方工业有限公司 | Rotary table of turbine disc mortise three-coordinate measuring machine and fifth axis calibration method |
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| CN110794765A (en) * | 2019-11-20 | 2020-02-14 | 重庆大学 | Machine tool geometric error coupling decoupling measurement method |
| CN110989494A (en) * | 2019-11-29 | 2020-04-10 | 上海交通大学 | Thin-wall part machining error measuring and compensating method based on trigger type measuring head |
| CN111060025A (en) * | 2019-12-23 | 2020-04-24 | 上海交通大学 | Pose calibration method and system for in-situ mounting line laser sensor of five-axis machine tool |
| CN112307573A (en) * | 2020-08-03 | 2021-02-02 | 中国计量大学 | Contact type measuring head geometric error modeling method for three-dimensional thread comprehensive measuring machine |
| CN114076581A (en) * | 2020-08-14 | 2022-02-22 | 赫克斯冈技术中心 | Rotary table compensation |
| CN111983900A (en) * | 2020-08-28 | 2020-11-24 | 合肥众群光电科技有限公司 | LDI platform error compensation method |
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| CN113108738A (en) * | 2021-03-25 | 2021-07-13 | 中国航发南方工业有限公司 | Rotary table of turbine disc mortise three-coordinate measuring machine and fifth axis calibration method |
| CN112966450A (en) * | 2021-04-12 | 2021-06-15 | 重庆大学 | Worm gear female machine key error identification method and key error iterative compensation method |
| CN113359609A (en) * | 2021-07-06 | 2021-09-07 | 宁波大学 | Key geometric error optimization proportioning compensation method for five-axis numerical control machine tool |
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| CN113670243A (en) * | 2021-09-10 | 2021-11-19 | 北京理工大学 | Three-coordinate measuring machine special for detecting parts of revolving body and modeling errors |
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