CN110097994B - System and method for repeatedly capturing microspheres based on pulse laser - Google Patents
System and method for repeatedly capturing microspheres based on pulse laser Download PDFInfo
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- CN110097994B CN110097994B CN201910391742.4A CN201910391742A CN110097994B CN 110097994 B CN110097994 B CN 110097994B CN 201910391742 A CN201910391742 A CN 201910391742A CN 110097994 B CN110097994 B CN 110097994B
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- 239000004005 microsphere Substances 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000013307 optical fiber Substances 0.000 claims abstract description 97
- 230000003287 optical effect Effects 0.000 claims abstract description 84
- 230000004927 fusion Effects 0.000 claims abstract description 47
- 239000011148 porous material Substances 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 230000003252 repetitive effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 18
- 239000000725 suspension Substances 0.000 description 11
- 239000011859 microparticle Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007526 fusion splicing Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000013212 metal-organic material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/006—Manipulation of neutral particles by using radiation pressure, e.g. optical levitation
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Abstract
The invention discloses a system and a method for repeatedly capturing microspheres based on pulse laser. The left optical fiber is connected to the input side of the left optical coupler, the output side of the left optical coupler is connected with the left fusion spliced optical fiber, the left fusion spliced optical fiber is fusion spliced with the capillary tube, the capillary tube is fusion spliced with the right fusion spliced optical fiber, the right fusion spliced optical fiber is connected with the output side of the right optical coupler, and the input side of the right optical coupler is connected with the right optical fiber; the left continuous laser and the right continuous laser are simultaneously emitted to the inside of the capillary oppositely to form a light trap capturing area; the left pulse laser and the right pulse laser act on the microspheres, the power of the right pulse laser is adjusted, the left pulse laser and the right pulse laser act on the microspheres simultaneously, the microspheres bounce off the original positions and move to the inside of an optical trap capturing area, and then stable capturing of the microspheres is achieved. The invention adopts pulse laser to separate the microspheres from the surface of the microcavity and enter the light trap capturing area, realizes the support and capture of the microspheres and the repeated capture of single particles, does not need to repeatedly load the particles, and can be applied to the environments of air, vacuum and the like.
Description
Technical Field
The invention belongs to a system and a method for capturing microspheres in the fields of optical engineering and microparticle suspension, and particularly relates to a system and a method for repeatedly capturing microspheres based on pulse laser.
Background
The optical suspension measurement technology is continuously improved in recent years, the measurement requirement is higher and higher, and the precise control and repeated lifting and throwing of the microspheres are always the difficulties of the optical suspension measurement technology. The traditional micro-particle lifting and throwing method adopts piezoelectric ceramics to separate the micro-sphere from the surface of the carrier in a mechanical high-frequency vibration mode or uses ultrasonic atomization to lift and throw the micro-sphere. Both of these approaches require throwing a large number of microspheres in free space, do not allow precise control of the number of microspheres that fall into the optical trap, and require the continuous addition of new microspheres. Because the microspheres enter the optical trap at a certain probability, the capture efficiency is low, a large amount of microspheres are wasted, and redundant microspheres can pollute the inside of the vacuum cavity. Therefore, a rapid, repeatable and high-precision supporting method is urgently needed in the field of optical suspension measurement.
The adhesion force between the microsphere and the surface of the object includes van der waals force, capillary force, electrostatic force and the like. Surface adhesion when the diameter of the microspheres is largeNegligible, that is, when the diameter of the microsphere is less than 100 μm, the adhesion is 10 of its own weight due to the influence of environmental humidity, substrate surface morphology, microsphere and substrate material and geometric characteristics4More than twice. To lift the microspheres off the base surface, a large acceleration must be generated to overcome the adhesion force and to lift the microspheres off the base surface into the trap trapping region.
In the field of cleaning, a method of removing foreign particles adhering to the surface of a base material such as a silicon wafer using a pulsed laser has been widely used. The cleaning principle is that laser pulse acts on the base surface to expand the base surface. Although the expansion amount is small, the action time is very short, generally tens of nanoseconds, and huge acceleration can be generated to overcome the adhesion force to push the microspheres. The diameter of the impurity particles is between tens of microns and tens of nanometers, and the materials include metal materials, organic materials and dielectric materials. The absorption rate and the thermal expansion coefficient of the excitation light of the oscillation starting pulse laser at an ultraviolet band and the basal plane or the microsphere are larger, and the clearing efficiency can reach one hundred percent on the premise of not damaging the substrate. The speed and position of the particles after impurity removal depend on the energy of the single pulse laser and the surface characteristics of the substrate: above the cleaning threshold, the microsphere rise height is linear with pulse energy. When the cleaning threshold is exceeded, the particle lifting height and the laser pulse energy rise linearly, so that the speed and the lifting position of the microspheres can be accurately controlled. Meanwhile, the diameter of the particles can not be too small, and when the diameter of the particles is less than 1 micron, the lifting and throwing efficiency is lower and lower along with the reduction of the size of the microspheres until the microspheres can not be separated from the base surface. The diameter of the impurity particles is basically the same as that used in the small ball suspension field, so that the method can be applied to particle oscillation in the optical suspension field.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides a system and a method for repeatedly capturing microspheres based on pulse laser, which can realize quick, repeatable, high-precision and constant-parameter particle suspension.
The invention adopts pulse laser to make the microspheres break away from the surface of the microcavity and enter the optical trap capturing area, thereby realizing the support of the microspheres. After the microspheres are separated from the optical trap, the support of the microspheres can be realized again through the pulse laser, so that the aim of repeated capture is fulfilled.
The technical scheme adopted by the invention is as follows:
a system for repeatedly capturing microspheres based on pulsed laser comprises:
the optical fiber splicing device comprises a left first optical fiber, a left second optical fiber, a left optical coupler, a left fusion optical fiber, a capillary tube, microspheres, a right fusion optical fiber, a right optical coupler, a right first optical fiber and a right second optical fiber; the left first optical fiber and the left second optical fiber are connected to two ends of the input side of the left optical coupler respectively, one end of the output side of the left optical coupler is connected with one end of the left fusion spliced optical fiber, the other end of the left fusion spliced optical fiber is in fusion splicing with one end of the capillary tube, the microsphere is located inside the capillary tube, the other end of the capillary tube is in fusion splicing with one end of the right fusion spliced optical fiber, the other end of the right fusion spliced optical fiber is connected with one end of the output side of the right optical coupler, and two ends of the input side of the right optical coupler are connected.
The capillary is a silicon dioxide capillary, and the pore size is larger than the diameter of the microsphere. The larger the pore size, the difficulty in restricting the microsphere range is greater, the smaller the pore size, the greater the difficulty in assembling, generally, if the microsphere size is 10 microns, the pore size is 20 to 30 microns.
And the left fusion spliced optical fiber, the capillary tube and the right fusion spliced optical fiber are fusion spliced to form a closed microcavity structure.
The inner surface of the capillary tube is completely clean and can be vacuum or filled with gas or liquid.
Secondly, a method for repeatedly capturing microspheres based on pulse laser comprises the following steps:
step 1, inputting left continuous laser into a left optical coupler through a left first optical fiber, and coupling the left continuous laser into a left fusion optical fiber by the left optical coupler to be emitted into a capillary; meanwhile, the right continuous laser is input into a right optical coupler through a right first optical fiber, and the right optical coupler couples the right continuous laser into a right fusion spliced optical fiber to be emitted into the capillary; the left continuous laser and the right continuous laser are simultaneously emitted to the inside of the capillary oppositely to form a light trap capturing area;
and 3, repeating the steps after the microspheres are separated from the interior of the optical trap capturing area, and realizing the repeated capturing of the microspheres under the condition of not replacing the microspheres.
The invention takes the inner cavity of the capillary as the micro-cavity structure, and utilizes the micro-cavity structure as the storage carrier of the microsphere to limit the movement range of the particles.
The invention adopts the pulse laser which is coupled by the optical fiber to push the microsphere, and realizes the accurate control of the position and the movement direction of the microsphere and the height of the separation cavity by respectively controlling the spot size, the pulse energy and the pulse time of the bidirectional pulse laser, so that the microsphere moves into the optical trap capturing area to realize the capturing.
The invention specifically adopts continuous laser of optical fiber coupling capture microspheres, and realizes the suspension of particles in a microcavity structure by generating a light trap capture area through the continuous laser emitted oppositely. If the microspheres are separated from the optical trap capturing area, the microspheres can be controlled to enter the optical trap capturing area again by adjusting the opposite pulse laser, so that the repeated capturing of the microsphere single spheres is realized.
Compared with the traditional microsphere optical suspension method, the method has the advantages that:
the invention utilizes the closed microcavity structure to limit the number of the microspheres, can accurately control the microspheres and realizes the accurate and repeated capture of the same particle. The position of the particles and the speed and position of the particles separated from the capillary wall can be accurately controlled by bidirectional laser pulses respectively.
The success rate of light suspension can reach hundreds, and the closed micro-cavity structure is suitable for vacuum environment, and can realize accurate and repeated suspension of particles in a short time under the conditions of no pollution to the vacuum environment and no replacement of the particles.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention;
when the left continuous laser beam (S11) and the right continuous laser beam (S13) are simultaneously incident in opposite directions in fig. 2, a light trap trapping region is formed (S12).
FIG. 3 is a schematic diagram showing the movement of the microsphere (S9) from the A position to the B position when the left pulse laser (S14) is incident.
FIG. 4 is a schematic diagram showing the movement of the microsphere (S9) from the D position to the E position when the left pulsed laser (S15) is incident.
Fig. 5 is a schematic structural diagram of microspheres (S9) stably suspended after entering the optical trap trapping region (S12).
In the figure: the optical fiber laser device comprises a left first optical fiber S1, a left optical coupler S2, a left fusion spliced optical fiber S3, a capillary tube S4, a right fusion spliced optical fiber S5, a right optical coupler S6, a right first optical fiber S7, a right second optical fiber S8, a microsphere S9, a left second optical fiber S10, a left continuous laser S11, a light trap capture area S12, a right continuous laser S13, a left pulse laser S14 and a right pulse laser S15.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The system comprises a capillary micro-cavity for storing one or more microspheres, wherein two ends of the micro-cavity are welded with two sections of optical fibers to form a closed environment. One end of each of the two optical fibers is welded with the capillary, and the other end of each of the two optical fibers is coupled with two paths of laser, wherein one path is continuous laser and the other path is pulse laser. Two beams of continuous laser transmitted in opposite directions form an optical trap inside the capillary micro-cavity. Two beams of pulsed light are used for exciting the microspheres to realize support.
As shown in fig. 1, the specific implementation includes a left first optical fiber S1, a left second optical fiber S10, a left optical coupler S2, a left fusion spliced optical fiber S3, a capillary S4, a microsphere S9, a right fusion spliced optical fiber S5, a right optical coupler S6, a right first optical fiber S7, and a right second optical fiber S8; the left first optical fiber S1 and the left second optical fiber S10 are respectively connected to two ends of the input side of the left optical coupler S2, one end of the output side of the left optical coupler S2 is connected through one end of the left fusion optical fiber S3, the other end of the left fusion optical fiber S3 is fused with one end of the capillary S4, the microsphere S9 is positioned inside the capillary S4, the other end of the capillary S4 is fused with one end of the right fusion optical fiber S5, the other end of the right fusion optical fiber S5 is connected with one end of the output side of the right optical coupler S6, and two ends of the input side of the right optical coupler S6 are respectively connected with the right first optical fiber S7 and the right second optical fiber.
The left fusion spliced optical fiber S3, the capillary S4 and the right fusion spliced optical fiber S5 are fusion spliced to form a closed microcavity structure without gaps, and the microsphere S9 is arranged inside the capillary S4.
The capillary S4 is made of silicon dioxide, and is larger than the diameter of the microsphere, the microsphere is difficult to be restricted if the pore size is larger, the assembly difficulty is increased if the pore size is smaller, and generally, if the microsphere is 10 micrometers, the pore size is 20-30 micrometers. The diameter of the microsphere is 10-20 microns.
The capillary S4 is made of silicon materials, the absorption rate and the thermal expansion coefficient of the pulsed light can be greatly influenced, the inner surface of the capillary S4 is completely clean, and the capillary S4 can be in a vacuum environment or a gas-filled environment or a liquid-filled environment without impurities except the target microsphere S9.
In the case of the known initial position of the microsphere S9, the process of repeatedly capturing the microsphere is as follows:
step 1, inputting left continuous laser S11 to a left optical coupler S2 through a left first optical fiber S1, and coupling left continuous laser S11 into a left fusion spliced optical fiber S3 by the left optical coupler S2 to be emitted into a capillary tube S4; meanwhile, the right continuous laser light S13 is input to the right optical coupler S6 through the right first optical fiber S7, and the right optical coupler S6 couples the right continuous laser light S13 into the right fusion spliced optical fiber S5 to be emitted into the capillary tube S4; the left continuous laser light S11 and the right continuous laser light S13 are simultaneously emitted to the inside of the capillary tube S4 in opposition to form a light trap trapping region S12.
And 3, after the microspheres S9 are separated from the optical trap capturing region S12, repeating the steps, and realizing the repeated capturing of the microspheres S9 under the condition of not replacing the microspheres S9.
The invention is implemented in the condition that the initial position of the microsphere S9 is unknown, and the process of repeatedly capturing the microsphere is as follows:
step 1, as shown in fig. 2, the left continuous laser light S11 is input to the left optical coupler S2 through the left first optical fiber S1, and the left optical coupler S2 couples the left continuous laser light S11 into the left fusion spliced optical fiber S3 and emits the laser light into the capillary tube S4; meanwhile, the right continuous laser light S13 is input to the right optical coupler S6 through the right first optical fiber S7, and the right optical coupler S6 couples the right continuous laser light S13 into the right fusion spliced optical fiber S5 to be emitted inside the capillary tube S4. The left continuous laser beam S11 and the right continuous laser beam S13 were simultaneously emitted into the capillary tube S4 in opposition to each other, forming a light trap trapping region S12.
If microsphere S9 is initially at position A, the bottom of the interior of capillary S4 is located radially adjacent to left optical coupler S2. After the left pulse laser S14 is incident, the left pulse laser S14 acts on the microsphere S9, so that the microsphere S9 is separated from the inner wall of the capillary S4 and is emitted to the position B from the position A to the direction away from the left optical coupler S2. After the position B, the microspheres S9 naturally fall to the position D, i.e., the position at the bottom of the capillary S4 radially adjacent to the right optical coupler S6, because the left pulsed laser S14 has not been continuously applied.
Step 3, as shown in fig. 4, the right pulse laser light S15 is input to the right optical coupler S6 through the right first optical fiber S8, and the right optical coupler S6 couples the right pulse laser light S15 into the right fusion spliced optical fiber S5 and emits the right pulse laser light into the capillary tube S4. After the right pulse laser S15 is incident, the laser acts on the microsphere S9, so that the microsphere S9 is separated from the inner wall of the capillary S4, and is emitted from the position D to the direction away from the left optical coupler S2 and upwards to the position E to be closer.
And 4, as shown in fig. 5, repeating the step 2 and the step 3, respectively turning on the left pulse laser S14 and the right pulse laser S15, adjusting the power, and emitting the microsphere S9 into the optical trap capturing region S12 to realize stable capturing of the microsphere S9.
And 5, after the microspheres S9 are separated from the interior of the optical trap capturing region S12, repeating the steps 1, 2, 3 and 4, and realizing repeated capturing of the microspheres S9 under the condition of not replacing the microspheres S9.
The implementation shows that the micro-cavity micro-particle trap has the advantages that the micro-cavity micro-particle trap can be used for repeatedly trapping micro-particles without repeatedly loading the micro-particles, and the micro-cavity micro-particle trap can be applied to the environments of air, vacuum and the like.
The foregoing detailed description is intended to illustrate and not limit the invention, which is intended to be within the spirit and scope of the appended claims, and any changes and modifications that fall within the true spirit and scope of the invention are intended to be covered by the following claims.
Claims (3)
1. A system for repeatedly capturing microspheres based on pulsed laser is characterized in that: comprises a left first optical fiber (S1), a left second optical fiber (S10), a left optical coupler (S2), a left fusion-spliced optical fiber (S3), a capillary tube (S4), a microsphere (S9), a right fusion-spliced optical fiber (S5), a right optical coupler (S6), a right first optical fiber (S7) and a right second optical fiber (S8); the left first optical fiber (S1) and the left second optical fiber (S10) are respectively connected to two ends of the input side of a left optical coupler (S2), one end of the output side of the left optical coupler (S2) is connected with one end of a left fusion optical fiber (S3), the other end of the left fusion optical fiber (S3) is fused with one end of a capillary tube (S4), a microsphere (S9) is positioned in the capillary tube (S4), the other end of the capillary tube (S4) is fused with one end of a right fusion optical fiber (S5), the other end of the right fusion optical fiber (S5) is connected with one end of the output side of the right optical coupler (S6), and two ends of the input side of the right optical coupler (S6) are respectively connected with the right first optical fiber (S7) and the right second optical fiber (S8);
the capillary (S4) is a silica capillary, and the pore size is larger than the diameter of the microsphere;
the left fusion spliced optical fiber (S3), the capillary tube (S4) and the right fusion spliced optical fiber (S5) are fused and spliced to form a closed microcavity structure.
2. The system for the repetitive capture of microspheres based on pulsed laser light of claim 1, wherein:
the inner surface of the capillary (S4) is completely clean, and the capillary can be vacuum or filled with gas or liquid.
3. A method for repeatedly capturing microspheres based on pulse laser is characterized by comprising the following steps:
step 1, inputting left continuous laser (S11) to a left optical coupler (S2) through a left first optical fiber (S1), and coupling the left continuous laser (S11) into a left fusion spliced optical fiber (S3) by the left optical coupler (S2) to be emitted into a capillary (S4); meanwhile, the right continuous laser (S13) is input to a right optical coupler (S6) through a right first optical fiber (S7), and the right optical coupler (S6) couples the right continuous laser (S13) into a right fusion spliced optical fiber (S5) and emits the right continuous laser into the capillary (S4); emitting the left continuous laser (S11) and the right continuous laser (S13) to the inside of the capillary (S4) simultaneously in an opposite way to form a light trap capture region (S12);
step 2, inputting left pulse laser (S14) to a left optical coupler (S2) through a left first optical fiber (S1), coupling the left pulse laser (S14) into a left fusion-spliced optical fiber (S3) by the left optical coupler (S2), emitting the laser into a capillary (S4) and irradiating the laser onto a microsphere (S9), and enabling the left pulse laser (S14) to act on the microsphere (S9); meanwhile, right pulse laser (S15) is input into a right optical coupler (S6) through a right first optical fiber (S8), the right optical coupler (S6) couples the right pulse laser (S15) into a right fusion spliced optical fiber (S5), emits the right pulse laser (S4) into a capillary (S9) and irradiates the capillary (S9), and the right pulse laser (S15) acts on microspheres (S9); adjusting the power of the right pulse laser (S15) to enable the left pulse laser (S14) and the right pulse laser (S15) to act on the microsphere (S9) simultaneously, enabling the microsphere (S9) to bounce off the original position and move to the inside of the optical trap trapping region (S12), and further achieving stable trapping of the microsphere (S9);
and 3, after the microspheres (S9) are separated from the optical trap trapping region (S12), repeating the steps, and realizing the repeated trapping of the microspheres (S9) under the condition of not replacing the microspheres (S9).
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| CN111855505B (en) * | 2020-07-07 | 2021-12-28 | 浙江大学 | Microsphere cluster state detection device and detection method applied to vacuum optical trap system |
| CN111999295B (en) * | 2020-08-07 | 2021-06-04 | 浙江大学 | Method and device for repeatedly capturing microspheres in double-beam optical trap |
| CN111986831B (en) * | 2020-08-17 | 2022-06-24 | 浙江大学 | Totally enclosed wafer type optical trap device for repeatedly capturing microspheres by evanescent waves |
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