CN110031591A - A kind of micro-nano gas sensor array dynamic testing method - Google Patents
A kind of micro-nano gas sensor array dynamic testing method Download PDFInfo
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- CN110031591A CN110031591A CN201910316924.5A CN201910316924A CN110031591A CN 110031591 A CN110031591 A CN 110031591A CN 201910316924 A CN201910316924 A CN 201910316924A CN 110031591 A CN110031591 A CN 110031591A
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- 238000012360 testing method Methods 0.000 title claims abstract description 44
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 238000010276 construction Methods 0.000 claims abstract description 5
- 239000011159 matrix material Substances 0.000 claims abstract description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 53
- 238000000034 method Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- 239000000908 ammonium hydroxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000003556 assay Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
- G01N33/0072—Arrangements to check the analyser by generating a test gas
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
A kind of micro-nano gas sensor array dynamic testing method, step are as follows: the resistance wire for installing a housing ceramic tube additional above each sensor main body to be measured, for carrying out temperature regulation to sensor region；Prepare a sensor array mounting plate, onboard delineate out several regions, each region is isolated by thermal insulative board, and overlying regions are unenclosed construction, for being kept in contact under test gas environment；The equal sensor of installation number in each region, sensor are in matrix arrangement, and the sensor type in the same area is identical；The sensor array mounting plate for being equipped with sensor is sent under test gas environment, independent regulation is carried out to temperature in each region, changes the temperature dynamic in each region, the sensor responding ability obtained in each region varies with temperature curve；Gas concentration in gaseous environment is surveyed in adjustment, and repeated temperature regulates and controls step；The under test gas type under test gas environment is adjusted, repeated temperature regulates and controls step and gas concentration regulates and controls step.
Description
Technical field
The invention belongs to micro-nano gas sensor array the field of test technology, more particularly to a kind of micro-nano gas sensor array
Dynamic testing method.
Background technique
Gas sensor is a kind of device that the information such as the ingredient of gas, concentration can be converted into electric signal, is substantially wrapped
Include semiconductor gas sensor, electrochemical gas sensor, catalytic combustion method gas sensor, thermal conductivity gas sensor, red
The types such as outside line gas sensor, solid-state electrolyte gas sensor, and the main indicator of gas sensor includes sensitivity, choosing
Selecting property and stability.Unstable state is presented in detection performance when due to being detected using single gas sensor, and
And the information content detected is also extremely limited, in view of the above-mentioned problems, current preferred solution is exactly to construct sensor array, leads to
The mode of increase sensor and quantity is crossed to increase information content.
Although micro-nano gas sensor array has very big application potential in terms of gas detection identification, in practical application mistake
The effective sample quantity of Cheng Zhong, gas response are still extremely limited, can not realize under the complex background that multiple gases mix quantitative
Detection.Meanwhile traditional sensor array construction method is there is also problems, whether simple increase number of sensors, or
It is to carry out hybrid integrated for one or more different type gas sensors as unit, also all there are problems that.Due to gas
The type of sensor is different and working principle is different, causes sensor array there are complex manufacturing technology, matching is poor, to the item that works
Part requires harshness, needs the problem of calibrating to dissimilar sensor before the assay.
Currently, requiring the valid data information of large capacity, but tradition in the test process of micro-nano gas sensor array
Constant temperature operating mode information amount is few, if every time only measuring same sample under the conditions of same, can not only spend
Take the plenty of time, testing process can also become very complicated.At the same time, traditional test method can only once correspond to a kind of spy
Pledge love condition, the responding ability variation with temperature situation of all gas sensor is obtained if necessary, then subsequent experiment number
Also the time can be extremely expended according to processing.
Therefore, need to find a kind of completely new micro-nano gas sensor array test method, should have can quick obtaining it is big
Capacity sample information, the ability simplify testing process, shorten the testing time, improving detection accuracy and efficiency.
Summary of the invention
In view of the problems of the existing technology, the present invention provides a kind of micro-nano gas sensor array dynamic testing method, tool
It is standby can quick obtaining large capacity sample information, the energy that simplifies testing process, shorten the testing time, improving measuring accuracy and efficiency
Power.
To achieve the goals above, the present invention adopts the following technical scheme: a kind of micro-nano gas sensor array dynamic is tested
Method includes the following steps:
Step 1: being transformed sensor to be measured, installs a resistance additional in the top of each sensor main body to be measured
Silk loads onto ceramic tube in resistance wire outer sheath, and resistance wire is used to carry out temperature regulation to sensor region to be measured；
Step 2: preparing a sensor array mounting plate, several regions delineated out on sensor array mounting plate, each
Region carries out the isolation of horizontal direction by thermal insulative board, and the top in each region is unenclosed construction, is used for and under test gas
Environment is kept in contact；
Step 3: the equal sensor to be measured of quantity is installed in each region, sensor to be measured is according to rectangular
Formula is arranged, and the type of the sensor to be measured in the same region is identical；
Step 4: the sensor array mounting plate for being equipped with sensor to be measured is sent under test gas environment, to each area
Temperature in domain carries out independent regulation, and so that the temperature in each region is generated dynamic and change, and then obtain in each region
Sensor to be measured responding ability variation with temperature curve；
Step 5: the gas concentration in adjustment under test gas environment repeats step 4, to obtain under gas with various concentration
Each region in sensor to be measured responding ability variation with temperature curve；
Step 6: the under test gas type in adjustment under test gas environment repeats step 4 and step 5.
It, only need to be all to be measured in the same region in order to keep the type of the sensor to be measured in the same region identical
The ceramic pipe surface of sensor smears upper identical gas sensitive.
Beneficial effects of the present invention:
Micro-nano gas sensor array dynamic testing method of the invention, have can quick obtaining large capacity sample information,
The ability for simplifying testing process, shortening the testing time, improving measuring accuracy and efficiency.
Detailed description of the invention
Fig. 1 be it is engineered after sensor to be measured front view；
Fig. 2 be it is engineered after sensor to be measured top view；
Fig. 3 is the top view for being equipped with the sensor array mounting plate of sensor to be measured；
Fig. 4 is the responding ability curve synoptic diagram of the different gas sensitives in embodiment；
In figure, 1-sensor main body, 2-resistance wires, 3-ceramic tubes, 4-upper pins, 5-lower pins, 6-leads,
7-thermal insulative boards, 8-sensors to be measured.
Specific embodiment
The present invention is described in further detail in the following with reference to the drawings and specific embodiments.
A kind of micro-nano gas sensor array dynamic testing method, includes the following steps:
Step 1: being transformed sensor to be measured as shown in Fig. 1,2, in the top of each sensor main body 1 to be measured
Install a resistance wire 2 additional, load onto ceramic tube 3 in 2 outer sheath of resistance wire, resistance wire 2 be used for sensor region to be measured into
Trip temperature regulation；
Step 2: preparing a sensor array mounting plate, several regions delineated out on sensor array mounting plate, each
Region carries out the isolation of horizontal direction by thermal insulative board 7, and the top in each region is unenclosed construction, is used for and under test gas
Environment is kept in contact；
Step 3: as shown in figure 3, installing the equal sensor to be measured 8 of quantity, sensor to be measured in each region
8 are arranged according to matrix form, and the type of the sensor to be measured 8 in the same region is identical；
Step 4: the sensor array mounting plate for being equipped with sensor 8 to be measured is sent under test gas environment, to each area
Temperature in domain carries out independent regulation, and so that the temperature in each region is generated dynamic and change, and then obtain in each region
Sensor to be measured 8 responding ability variation with temperature curve；
Step 5: the gas concentration in adjustment under test gas environment repeats step 4, to obtain under gas with various concentration
Each region in sensor to be measured 8 responding ability variation with temperature curve；
Step 6: the under test gas type in adjustment under test gas environment repeats step 4 and step 5.
Want to carry out temperature regulation to 8 region of sensor to be measured, it is big especially by the voltage for changing 2 both ends of resistance wire
It is small, so that 2 power of resistance wire changes, and then 2 heating temperature of resistance wire is made to change.
In order to keep the type of the sensor to be measured 8 in the same region identical, need to only be needed in the same region
3 surface of ceramic tube for surveying sensor 8, which applies, spreads identical gas sensitive.
For the sensor to be measured 8 in different zones, when the gas sensitive that 3 surface of ceramic tube of sensor 8 to be measured is smeared
When different, even if the respective capabilities of two kinds of sensor 8 to be measured can not yet under identical under test gas environment
Together, and therefore best operating condition also difference when the under test gas to a certain type is tested, can have been wanted not only
Sensor 8 to be measured is observed for the response of the under test gas of this type, also to observe the selectivity of sensor 8 to be measured.
Dynamic change is carried out to the temperature in each region, is since the variation of temperature also will affect sensor 8 to be measured
Responding ability, while the optimum working temperature for searching out sensor 8 to be measured can be changed by the dynamic of temperature.In addition, passing through
Dynamic adjusts operating temperature locating for sensor 8 to be measured, and environment temperature is made to carry out periodically-varied in different forms, for increasing
Add the data volume in the test process in a cycle.
While dynamic changes temperature, the gas that can increase under test gas environment according to the form of arithmetic progression is dense
Degree.
Responding ability variation with temperature curve for the sensor to be measured 8 obtained under all different conditions, curve
Peak value just represents the peak value of response of sensor 8 to be measured.
It, can since a test process can obtain the experimental data of the different types of sensor 8 to be measured of a batch
It is compared with the more intuitive responding ability (directly being embodied by current value) to different type sensor to be measured 8,
Be conducive to find the best gas sensitive of responding ability.
During Data Processing in Experiment, the experimental data to all sensors 8 to be measured in the same region is needed to ask
It is averaged, to improve the accuracy of experimental result.
As shown in figure 4, being the responding ability curve synoptic diagram of different gas sensitives；Wherein, gas sensitive is divided into ammonium hydroxide, wine
Essence, methanol, toluene, benzene and acetone, six kinds of gas sensitives are applied to 3 surface of ceramic tube in the form of 100ppm strength solution, and
And obtained in the case where test condition is identical, it can be seen from the figure that the responding ability of ammonium hydroxide is in six kinds of air-sensitives
It is best in material.
The scope of patent protection that scheme in embodiment is not intended to limit the invention, it is all without departing from carried out by the present invention etc.
Effect implements or change, is both contained in the scope of the patents of this case.
Claims (2)
1. a kind of micro-nano gas sensor array dynamic testing method, it is characterised in that include the following steps:
Step 1: being transformed sensor to be measured, installs a resistance wire additional in the top of each sensor main body to be measured,
Resistance wire outer sheath loads onto ceramic tube, and resistance wire is used to carry out temperature regulation to sensor region to be measured；
Step 2: prepare a sensor array mounting plate, several regions are delineated out on sensor array mounting plate, each region
The isolation of horizontal direction is carried out by thermal insulative board, the top in each region is unenclosed construction, is used for and under test gas environment
It is kept in contact；
Step 3: installing the equal sensor to be measured of quantity in each region, sensor to be measured according to matrix form into
Row arrangement, and the type of the sensor to be measured in the same region is identical；
Step 4: the sensor array mounting plate for being equipped with sensor to be measured is sent under test gas environment, in each region
Temperature carry out independent regulation, and so that the temperature in each region is generated dynamic and change, so obtain in each region to
Survey the responding ability variation with temperature curve of sensor；
Step 5: the gas concentration in adjustment under test gas environment repeats step 4, every under gas with various concentration to obtain
The responding ability variation with temperature curve of sensor to be measured in one region；
Step 6: the under test gas type in adjustment under test gas environment repeats step 4 and step 5.
2. a kind of micro-nano gas sensor array dynamic testing method according to claim 1, it is characterised in that: same in order to make
The type of sensor to be measured in one region is identical, only need to be in the ceramic tube table of all sensors to be measured in the same region
Face applies and spreads identical gas sensitive.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910316924.5A CN110031591A (en) | 2019-04-19 | 2019-04-19 | A kind of micro-nano gas sensor array dynamic testing method |
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| CN201910316924.5A CN110031591A (en) | 2019-04-19 | 2019-04-19 | A kind of micro-nano gas sensor array dynamic testing method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110664250A (en) * | 2019-11-15 | 2020-01-10 | 上海秒针网络科技有限公司 | Method and device for brewing coffee based on electronic nose |
| CN113358711A (en) * | 2020-07-21 | 2021-09-07 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by regulating light and temperature |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100568022C (en) * | 2007-03-28 | 2009-12-09 | 哈尔滨理工大学 | Array type multi-parameter wind sensor chip substrate |
| CN101889201A (en) * | 2007-10-09 | 2010-11-17 | 佛罗里达大学研究基金公司 | Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors |
| CN102323303A (en) * | 2011-08-26 | 2012-01-18 | 重庆大学 | Experimental apparatus and method for testing gas-sensitive temperature characteristic of carbon nanotube sensor |
| CN102590450A (en) * | 2012-01-20 | 2012-07-18 | 中北大学 | Array type smell detecting element based on MEMS (Micro Electro Mechanical System) technology |
| CN103217460A (en) * | 2013-03-21 | 2013-07-24 | 浙江大学 | Cobaltosic oxide nanowire array based alcohol gas sensor and preparation method thereof |
| CN104792829A (en) * | 2014-04-07 | 2015-07-22 | 英诺晶片科技股份有限公司 | Sensor device |
| US20170153193A1 (en) * | 2012-09-13 | 2017-06-01 | Nevada Nanotech Systems Inc. | Molecular analysis using micro electro-mechanical sensor devices |
| CN107478687A (en) * | 2017-06-23 | 2017-12-15 | 杭州麦乐克科技股份有限公司 | Multi-component gas sensor and gas detection method thereof |
| CN206906303U (en) * | 2017-06-23 | 2018-01-19 | 杭州麦乐克科技股份有限公司 | Multi-component gas sensor |
| CN108152337A (en) * | 2017-12-19 | 2018-06-12 | 太原理工大学 | A kind of LaFeO of high air-sensitive property energy3Base alcohol gas sensor and preparation method thereof |
| CN108680702A (en) * | 2018-03-20 | 2018-10-19 | 东南大学 | A kind of device and its test method of test sensor response speed |
-
2019
- 2019-04-19 CN CN201910316924.5A patent/CN110031591A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100568022C (en) * | 2007-03-28 | 2009-12-09 | 哈尔滨理工大学 | Array type multi-parameter wind sensor chip substrate |
| CN101889201A (en) * | 2007-10-09 | 2010-11-17 | 佛罗里达大学研究基金公司 | Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors |
| CN102323303A (en) * | 2011-08-26 | 2012-01-18 | 重庆大学 | Experimental apparatus and method for testing gas-sensitive temperature characteristic of carbon nanotube sensor |
| CN102590450A (en) * | 2012-01-20 | 2012-07-18 | 中北大学 | Array type smell detecting element based on MEMS (Micro Electro Mechanical System) technology |
| US20170153193A1 (en) * | 2012-09-13 | 2017-06-01 | Nevada Nanotech Systems Inc. | Molecular analysis using micro electro-mechanical sensor devices |
| CN103217460A (en) * | 2013-03-21 | 2013-07-24 | 浙江大学 | Cobaltosic oxide nanowire array based alcohol gas sensor and preparation method thereof |
| CN104792829A (en) * | 2014-04-07 | 2015-07-22 | 英诺晶片科技股份有限公司 | Sensor device |
| CN107478687A (en) * | 2017-06-23 | 2017-12-15 | 杭州麦乐克科技股份有限公司 | Multi-component gas sensor and gas detection method thereof |
| CN206906303U (en) * | 2017-06-23 | 2018-01-19 | 杭州麦乐克科技股份有限公司 | Multi-component gas sensor |
| CN108152337A (en) * | 2017-12-19 | 2018-06-12 | 太原理工大学 | A kind of LaFeO of high air-sensitive property energy3Base alcohol gas sensor and preparation method thereof |
| CN108680702A (en) * | 2018-03-20 | 2018-10-19 | 东南大学 | A kind of device and its test method of test sensor response speed |
Non-Patent Citations (1)
| Title |
|---|
| 刘传玺 等: "《自动检测技术》", 31 August 2008 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110664250A (en) * | 2019-11-15 | 2020-01-10 | 上海秒针网络科技有限公司 | Method and device for brewing coffee based on electronic nose |
| CN113358711A (en) * | 2020-07-21 | 2021-09-07 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by regulating light and temperature |
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Application publication date: 20190719 |