CN118696221A - Force detection device and robot - Google Patents
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- CN118696221A CN118696221A CN202280091890.4A CN202280091890A CN118696221A CN 118696221 A CN118696221 A CN 118696221A CN 202280091890 A CN202280091890 A CN 202280091890A CN 118696221 A CN118696221 A CN 118696221A
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- 238000009434 installation Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 description 2
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- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
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Abstract
Description
技术领域Technical Field
本公开涉及力检测装置以及机器人。The present disclosure relates to a force detection device and a robot.
背景技术Background Art
以往，作为难以受到安装场所变形的影响的力检测器，已知有在力传感器主体与安装部之间设置间隙的力检测器(例如，参照专利文献1。)。即使安装力传感器的表面发生变形，应力作用于安装在该表面的安装部，力的传递路径也会因间隙而变长，能够减小因安装面的变形、起伏等产生的应力对力传感器主体的影响。Conventionally, as a force detector that is less susceptible to deformation at the installation site, there is a known force detector that has a gap between the force sensor body and the mounting portion (for example, see Patent Document 1). Even if the surface on which the force sensor is mounted is deformed and stress acts on the mounting portion mounted on the surface, the force transmission path is lengthened due to the gap, and the influence of stress generated by deformation, undulation, etc. of the mounting surface on the force sensor body can be reduced.
现有技术文献Prior art literature
专利文献Patent Literature
专利文献1：日本特开2021-41482号公报Patent Document 1: Japanese Patent Application Publication No. 2021-41482
发明内容Summary of the invention
发明要解决的问题Problem that the invention aims to solve
然而，在力传感器主体与安装部之间设置间隙的情况下，用于设置间隙的缩颈会导致该部分的刚性降低，因此，在作用了大的负载时，力传感器主体会向预想外的方向变形，从而导致检测精度降低。因此，希望防止因安装的装置的负载的大变动导致的检测精度的降低。However, when a gap is provided between the force sensor body and the mounting portion, the necking for providing the gap reduces the rigidity of the portion, so when a large load is applied, the force sensor body deforms in an unexpected direction, resulting in reduced detection accuracy. Therefore, it is desirable to prevent a reduction in detection accuracy due to a large change in the load of the mounted device.
用于解决问题的方案Solutions for solving problems
一种力检测装置，具备：第一安装部，其固定于第一被安装面；第二安装部，其固定于负载变动比所述第一被安装面大的第二被安装面；以及力传感器主体，其固定于所述第一安装部与所述第二安装部之间，所述第一安装部具备：平板状或者凸缘状的第一部分，其固定于所述力传感器主体的一个端面；柱状的第二部分，其一端与该第一部分的与所述力传感器主体相反的一侧连接；以及第三部分，其设置于该第二部分的另一端，并且固定于所述第一被安装面，在所述第一部分和所述第三部分之间形成有所述第二部分的轴向的间隙，所述第二安装部形成为固定于所述力传感器主体的另一个端面且刚性比所述第三部分高的平板状。A force detection device comprises: a first mounting portion, which is fixed to a first mounted surface; a second mounting portion, which is fixed to a second mounted surface with a larger load variation than that of the first mounted surface; and a force sensor body, which is fixed between the first mounting portion and the second mounting portion, wherein the first mounting portion comprises: a first portion in a flat plate or flange shape, which is fixed to one end surface of the force sensor body; a columnar second portion, one end of which is connected to a side of the first portion opposite to the force sensor body; and a third portion, which is arranged at the other end of the second portion and fixed to the first mounted surface, an axial gap of the second portion is formed between the first portion and the third portion, and the second mounting portion is formed in a flat plate shape that is fixed to the other end surface of the force sensor body and has higher rigidity than the third portion.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是示出具备本公开的一实施方式的力检测装置的机器人的侧视图。FIG. 1 is a side view showing a robot including a force detection device according to an embodiment of the present disclosure.
图2是示出图1的机器人的基座和力检测装置的局部侧视图。FIG. 2 is a partial side view showing a base and a force detection device of the robot of FIG. 1 .
图3是示出图1的机器人所具备的适配器的平面图。FIG. 3 is a plan view showing an adapter included in the robot of FIG. 1 .
图4是示出适配器的厚度与力检测装置的误差量之间的关系的曲线图。FIG. 4 is a graph showing the relationship between the thickness of the adapter and the amount of error of the force detection device.
图5是示出各种机器人、比率α以及适配器的厚度t1之间的关系的表。FIG. 5 is a table showing the relationship between various robots, the ratio α, and the thickness t1 of the adapter.
具体实施方式DETAILED DESCRIPTION
以下，参照附图对本公开的一个实施方式的力检测装置1以及机器人100进行说明。Hereinafter, a force detection device 1 and a robot 100 according to an embodiment of the present disclosure will be described with reference to the drawings.
如图1所示，本实施方式的机器人100具备：垂直六轴多关节型的机器人主体110、以及固定于地面(第一被安装面)F的力检测装置1。As shown in FIG. 1 , the robot 100 of the present embodiment includes a vertical six-axis multi-articulated robot body 110 and a force detection device 1 fixed to a floor surface (first mounting surface) F. As shown in FIG.
力检测装置1具备：第一安装部2，其固定于地面F；第二安装部，其固定设置凸缘130的底面(第二被安装面)B，设置凸缘130设置于机器人主体110的基座120；以及力传感器主体4，其固定于第一安装部2与第二安装部之间。力传感器主体4具备检测由外力引起的力传感器主体的变形的变形检测器，例如电阻式应变仪(省略图示)。力传感器主体4是检测施加于力传感器主体的力的大小以及方向的六轴传感器。The force detection device 1 includes: a first mounting portion 2 fixed to the ground F; a second mounting portion fixed to the bottom surface (second mounting surface) B of the flange 130, the flange 130 being provided on the base 120 of the robot body 110; and a force sensor body 4 fixed between the first mounting portion 2 and the second mounting portion. The force sensor body 4 includes a deformation detector for detecting deformation of the force sensor body caused by an external force, such as a resistance strain gauge (not shown). The force sensor body 4 is a six-axis sensor for detecting the magnitude and direction of the force applied to the force sensor body.
第一安装部2通过加工铸件而形成。第一安装部2可以通过切削金属块形成，也可以通过其他方法形成。第一安装部2可以被制作为一个部件以控制制造成本。如图2所示，第一安装部2，按照从上到下的顺序，具备：第一部分5、第二部分6以及第三部分7。The first mounting portion 2 is formed by machining a casting. The first mounting portion 2 can be formed by cutting a metal block or by other methods. The first mounting portion 2 can be made as one component to control manufacturing costs. As shown in FIG2 , the first mounting portion 2 includes, from top to bottom, a first portion 5, a second portion 6, and a third portion 7.
第一部分5具有固定有力传感器主体4的上表面，并且形成为至少沿水平方向延伸的平板状。The first portion 5 has an upper surface to which the force sensor body 4 is fixed, and is formed in a flat plate shape extending at least in the horizontal direction.
第二部分6形成为从第一部分5的下表面至少向下方延伸的柱状。The second portion 6 is formed in a columnar shape extending at least downward from the lower surface of the first portion 5 .
第三部分7在第二部分6的下部形成为至少沿水平方向延伸的平板状，并且固定于地面F。The third portion 7 is formed in a flat plate shape extending at least in the horizontal direction at the lower portion of the second portion 6 , and is fixed to the ground F.
如图2所示，在第一部分5与第三部分7之间形成有上下方向的间隙X。换言之，第二部分6与第一部分5以及第三部分7相比，形成有直径沿水平方向变小的颈缩。在本实施方式中，由颈缩形成的第一部分5与第三部分7之间的间隙X围绕中心轴O在全周范围内形成。As shown in Fig. 2, a gap X in the vertical direction is formed between the first portion 5 and the third portion 7. In other words, the second portion 6 is formed with a constriction whose diameter becomes smaller in the horizontal direction compared with the first portion 5 and the third portion 7. In the present embodiment, the gap X between the first portion 5 and the third portion 7 formed by the constriction is formed in the entire circumference around the central axis O.
第一安装部2的第三部分7在围绕中心轴的周向预定位置设置有用于插入螺栓8的四个贯穿孔。各贯穿孔9在以中心轴Ο为中心的同一圆周上，配置于比第一部分5更靠近水平方向外侧。The third portion 7 of the first mounting portion 2 is provided with four through holes for inserting bolts 8 at predetermined positions in the circumferential direction around the central axis. Each through hole 9 is arranged on the same circumference centered on the central axis O and is arranged on the outside of the first portion 5 in the horizontal direction.
各贯穿孔9设置于第三部分7的外形轮廓附近。外形轮廓附近是指比连接中心軸Ο与第三部分7的外形的端部的直线的中点更靠近外侧。如图2所示，通过将插入贯穿孔9的螺栓8紧固于形成于地面F的螺纹孔10，能够将包括第三部分7的第一安装部2固定于地面F。Each through hole 9 is provided near the outer contour of the third portion 7. Near the outer contour means being closer to the outside than the midpoint of the straight line connecting the center axis O and the end of the outer contour of the third portion 7. As shown in FIG. 2 , by fastening the bolt 8 inserted into the through hole 9 to the threaded hole 10 formed in the ground F, the first mounting portion 2 including the third portion 7 can be fixed to the ground F.
在第一安装部2的第一部分5设置有贯穿孔12，该贯穿孔12用于在第一部分5的靠近外周的外形轮廓附近，利用多个螺栓11固定第一安装部2和力传感器主体4。A through hole 12 is provided in the first portion 5 of the first mounting part 2 . The through hole 12 is used to fix the first mounting part 2 and the force sensor body 4 with a plurality of bolts 11 near the outer contour of the first portion 5 close to the periphery.
第二安装部为固定于力传感器主体4的上表面且刚性比第三部分7高的平板状的适配器(adapter)3。如图3所示，适配器3形成为俯视图中大致正方形的平板状，具有与基座120的底面B的轮廓形状相同的外形，并且在围绕中心轴的同一圆周上在适配器3的外形轮廓附近具备四个部位的螺纹孔13。另外，适配器3在中心轴与螺纹孔13之间的位置，具备在周向上隔开间隔形成的多个贯穿孔14，并利用贯穿于各贯穿孔14的螺栓15固定于力传感器主体4的上表面。The second mounting portion is a flat plate-shaped adapter 3 fixed to the upper surface of the force sensor body 4 and having higher rigidity than the third portion 7. As shown in FIG3 , the adapter 3 is formed in a substantially square flat plate shape in a top view, has an outer shape identical to the outer shape of the bottom surface B of the base 120, and has four screw holes 13 near the outer contour of the adapter 3 on the same circumference around the central axis. In addition, the adapter 3 has a plurality of through holes 14 formed at intervals in the circumferential direction at positions between the central axis and the screw holes 13, and is fixed to the upper surface of the force sensor body 4 by bolts 15 inserted through each of the through holes 14.
在本实施方式的机器人中，机器人主体110的基座120具有内部为中空且底面B敞开的杯子倒扣的状态，在其四个角处设置有用于固定于适配器3的设置凸缘130。在设置凸缘130设置有四个贯穿孔16，在使设置于基座120的设置凸缘130的底面B紧贴于适配器3的上表面的状态下，该四个贯穿孔16配置在与作为第二安装部的适配器3的四个螺纹孔13相对应的位置。In the robot of this embodiment, the base 120 of the robot body 110 has a state of an inverted cup with a hollow interior and an open bottom surface B, and is provided with a setting flange 130 at its four corners for fixing to the adapter 3. The setting flange 130 is provided with four through holes 16, and in a state where the bottom surface B of the setting flange 130 provided on the base 120 is closely attached to the upper surface of the adapter 3, the four through holes 16 are arranged at positions corresponding to the four threaded holes 13 of the adapter 3 as the second mounting portion.
通过将贯穿于各贯穿孔16的螺栓17紧固于适配器3的螺纹孔13，从而将机器人主体110固定于力检测装置1。The robot body 110 is fixed to the force detection device 1 by fastening the bolts 17 inserted through the through holes 16 to the threaded holes 13 of the adapter 3 .
在该情况下，本实施方式的机器人100形成为如下形状：作为第二安装部的适配器3的厚度尺寸t1与设置凸缘130的厚度尺寸t2之和相对于设置凸缘130的大小A的比率α成为预定的阈值Th以上，In this case, the robot 100 of the present embodiment is formed into a shape in which a ratio α of the sum of the thickness dimension t1 of the adapter 3 as the second mounting portion and the thickness dimension t2 of the setting flange 130 to the size A of the setting flange 130 becomes equal to or larger than a predetermined threshold value Th.
α＝(t1+t2)/A≧Th。α＝(t1+t2)/A≧Th.
另外，适配器3的厚度尺寸t1为大于设置凸缘130的厚度尺寸t2的厚度尺寸。In addition, the thickness dimension t1 of the adapter 3 is larger than the thickness dimension t2 of the flange 130 .
图4中示出了通过分析计算出使适配器3的厚度尺寸t1变化时力检测装置1的误差量的曲线图。根据该图可知，如果适配器3的厚度尺寸t1超过预定的大小，则力检测装置1的误差量会大幅下降。Fig. 4 shows a graph of the error amount of the force detection device 1 when the thickness dimension t1 of the adapter 3 is changed by analysis and calculation. As can be seen from the graph, if the thickness dimension t1 of the adapter 3 exceeds a predetermined value, the error amount of the force detection device 1 will be greatly reduced.
另外，即使适配器3的厚度薄，如果固定于适配器3的机器人主体110的设置凸缘130的厚度尺寸t2大，则认为也能获得同样的效果。Even if the thickness of the adapter 3 is thin, it is considered that the same effect can be obtained if the thickness dimension t2 of the installation flange 130 of the robot main body 110 fixed to the adapter 3 is large.
因此，通过形成为适配器3的厚度尺寸t1与设置凸缘130的厚度尺寸t2之和相对于设置凸缘130的大小A的比率α成为预定的阈值Th以上的形状，能够大幅降低力检测装置1的误差量。即，机器人主体110的设置凸缘130的厚度尺寸t2越大，则将适配器3的厚度尺寸t1设定得越大，或者，将设置凸缘130的大小A设置得越小，误差量的降低效果越高。Therefore, by forming a shape in which the ratio α of the sum of the thickness dimension t1 of the adapter 3 and the thickness dimension t2 of the setting flange 130 to the size A of the setting flange 130 is greater than a predetermined threshold value Th, the error amount of the force detection device 1 can be greatly reduced. That is, the larger the thickness dimension t2 of the setting flange 130 of the robot body 110 is, the larger the thickness dimension t1 of the adapter 3 is set, or the smaller the size A of the setting flange 130 is set, the higher the effect of reducing the error amount is.
这里，作为设置凸缘130的大小A，例如，采用将固定设置凸缘130和适配器3的四个螺栓17的中心连接形成的四边形(图3中用虚线表示)的周长的情况下，上述预定的阈值Th为4％。图5示出了各种机器人R1～R8、比率α以及适配器3的厚度尺寸t1之间的关系。Here, when the size A of the setting flange 130 is, for example, the perimeter of a quadrilateral (indicated by a dotted line in FIG. 3 ) formed by connecting the centers of four bolts 17 for fixing the setting flange 130 and the adapter 3, the predetermined threshold value Th is 4%. FIG. 5 shows the relationship between various robots R1 to R8, the ratio α, and the thickness dimension t1 of the adapter 3.
由此可知，在多数机器人100中，通过构成为满足上述关系，能够降低力检测装置1的误差量。另外，即使是比率α为4％以下的机器人100，也能够通过调整适配器3的厚度尺寸t1使得比率成为4％以上来降低力检测装置1的误差量。As can be seen from this, in most robots 100, by being configured to satisfy the above relationship, the error amount of the force detection device 1 can be reduced. In addition, even in a robot 100 in which the ratio α is 4% or less, the error amount of the force detection device 1 can be reduced by adjusting the thickness dimension t1 of the adapter 3 so that the ratio becomes 4% or more.
根据这样构成的本实施方式的力检测装置1以及机器人100，在固定于地面F的第三部分7与固定于力传感器主体4的第一部分5之间，形成有上下方向的间隙(第二部分6的轴向的间隙)X。由此，从第三部分7的外周到第一部分5的力的传递路径延长间隙X的量。According to the force detection device 1 and the robot 100 of the present embodiment configured in this way, a gap X in the vertical direction (a gap in the axial direction of the second portion 6) is formed between the third portion 7 fixed to the floor F and the first portion 5 fixed to the force sensor body 4. Thus, the force transmission path from the outer periphery of the third portion 7 to the first portion 5 is extended by the gap X.
即，根据本实施方式，在将螺栓8贯穿于设置于第三部分7的贯穿孔9并且紧固于设置于地面F的螺纹孔10时，能够降低因地面F的变形、表面的起伏而产生于第三部分7的应力对力传感器主体4的影响。由此，即使地面F存在变形、起伏，也能够提高作用于机器人主体110的力的检测精度。That is, according to the present embodiment, when the bolt 8 is passed through the through hole 9 provided in the third portion 7 and fastened to the threaded hole 10 provided in the floor F, the influence of the stress generated in the third portion 7 due to the deformation and the undulation of the surface of the floor F on the force sensor body 4 can be reduced. Thus, even if the floor F is deformed and undulated, the detection accuracy of the force acting on the robot body 110 can be improved.
另外，根据本实施方式的机器人100，将固定机器人主体110的基座120的设置凸缘130的适配器3形成为厚度尺寸足够大的平板状。由此，与利用间隙X降低地面F的变形的影响的第一安装部2相比，能够充分增大适配器3的刚性。In addition, according to the robot 100 of this embodiment, the adapter 3 for setting the flange 130 of the base 120 fixing the robot body 110 is formed into a flat plate with a sufficiently large thickness. Thus, compared with the first mounting portion 2 that reduces the influence of deformation of the floor F by using the gap X, the rigidity of the adapter 3 can be sufficiently increased.
其结果是，即使由于机器人主体110进行工作而将大的负载变动作用于作为第二安装部的适配器3，也能够防止力传感器主体4向预想外的方向变形。即，即使机器人主体110的基座120具有在设置凸缘130的底面B具备开口的杯状的刚性低的结构，也能够通过将设置凸缘130固定于厚度尺寸大的适配器3，来抑制大的负载变动所引起的基座120的变形。由此，具有能够防止力传感器主体4所引起的力的检测精度下降的优点。As a result, even if a large load change is applied to the adapter 3 as the second mounting portion due to the operation of the robot body 110, the force sensor body 4 can be prevented from deforming in an unexpected direction. That is, even if the base 120 of the robot body 110 has a low rigidity cup-shaped structure with an opening on the bottom surface B where the flange 130 is provided, the flange 130 can be fixed to the adapter 3 with a large thickness dimension to suppress the deformation of the base 120 caused by a large load change. As a result, there is an advantage that the force detection accuracy caused by the force sensor body 4 can be prevented from being reduced.
此外，在本实施方式中，利用四个螺栓实现机器人主体110的基座120的设置凸缘130与适配器3的连接，作为设置凸缘130的大小，采用了连接四个螺栓17的中心形成的四边形的周长。取而代之，也可以采用四边形的对角线长度作为设置凸缘130的大小A。In addition, in the present embodiment, the connection between the setting flange 130 of the base 120 of the robot body 110 and the adapter 3 is realized by four bolts, and the perimeter of the quadrilateral formed by connecting the centers of the four bolts 17 is used as the size of the setting flange 130. Alternatively, the diagonal length of the quadrilateral may be used as the size A of the setting flange 130.
另外，在利用三个螺栓17进行固定的情况下，作为设置凸缘130的大小A也可以采用连接三个螺栓17的中心形成的三角形的周长。另外，也可以将穿过三个螺栓17的中心的圆的周长或直径尺寸设定为设置凸缘130的大小A。In addition, when fixing with three bolts 17, the perimeter of a triangle formed by connecting the centers of the three bolts 17 may be used as the size A for setting the flange 130. In addition, the perimeter or diameter of a circle passing through the centers of the three bolts 17 may be set as the size A for setting the flange 130.
附图标记说明：Description of reference numerals:
1力检测装置1. Force detection device
2第一安装部2First installation part
3适配器(第二安装部)3 Adapter (second mounting part)
4力传感器主体4Force sensor body
5第一部分5 Part 1
6第二部分6 Part 2
7第三部分7 Part 3
100机器人100 robots
110机器人主体110 robot body
120基座120 base
130设置凸缘130 Setting flange
B底面(第二被安装面)B bottom surface (second mounting surface)
F地面(第一被安装面)F Ground (first mounting surface)
X间隙X-Gap
Claims (8)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2022/007835 WO2023162122A1 (en) | 2022-02-25 | 2022-02-25 | Force detection device and robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118696221A true CN118696221A (en) | 2024-09-24 |
Family
ID=87765010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280091890.4A Pending CN118696221A (en) | 2022-02-25 | 2022-02-25 | Force detection device and robot |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPWO2023162122A1 (en) |
| CN (1) | CN118696221A (en) |
| DE (1) | DE112022005566T5 (en) |
| TW (1) | TW202333925A (en) |
| WO (1) | WO2023162122A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015200355B3 (en) * | 2015-01-02 | 2016-01-28 | Siemens Aktiengesellschaft | A medical robotic device with collision detection and method for collision detection of a medical robotic device |
| JP3204177U (en) * | 2016-03-01 | 2016-05-19 | 株式会社レプトリノ | Force detection system |
| JP6342971B2 (en) * | 2016-11-14 | 2018-06-13 | ファナック株式会社 | Force detection device and robot |
| JP6553700B2 (en) * | 2017-11-24 | 2019-07-31 | ファナック株式会社 | Force detection device and robot |
| JP7277319B2 (en) | 2019-09-10 | 2023-05-18 | ファナック株式会社 | robot |
-
2022
- 2022-02-25 DE DE112022005566.9T patent/DE112022005566T5/en active Pending
- 2022-02-25 JP JP2024502357A patent/JPWO2023162122A1/ja active Pending
- 2022-02-25 CN CN202280091890.4A patent/CN118696221A/en active Pending
- 2022-02-25 WO PCT/JP2022/007835 patent/WO2023162122A1/en active Application Filing
-
2023
- 2023-02-10 TW TW112104871A patent/TW202333925A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2023162122A1 (en) | 2023-08-31 |
| WO2023162122A1 (en) | 2023-08-31 |
| DE112022005566T5 (en) | 2024-10-02 |
| TW202333925A (en) | 2023-09-01 |
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