CN118357776A - Five-degree-of-freedom motion error measuring device and method for linear workbench of numerical control machine tool - Google Patents
Five-degree-of-freedom motion error measuring device and method for linear workbench of numerical control machine tool Download PDFInfo
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Abstract
The measuring device comprises a measuring unit and a target lens unit, wherein the measuring unit comprises a laser module, a polarization beam splitter prism, a right angle prism and an angle adjusting platform; the target lens unit comprises a photoelectric detector module, a displacement adjustment platform and a signal processing module; the measuring method is applied to the measuring device, based on a laser collimation principle, two-dimensional straightness errors can be quickly obtained, based on a triangle deformation coordinate relation before and after movement, three angle errors can be effectively and quickly obtained, based on the method, distribution of two linear errors and three angle errors at all positions of a workbench of a numerical control machine can be obtained by sampling all positions, simultaneous measurement of five-degree-of-freedom movement errors of the linear workbench of the numerical control machine is realized, and measuring efficiency is greatly improved.
Description
Technical Field
The invention relates to the technical field of numerical control machine tool error detection, in particular to a five-degree-of-freedom motion error measuring device and method for a linear workbench of a numerical control machine tool.
Background
Along with the development of the manufacturing industry to intellectualization and precision, higher requirements are put forward on the machining precision of the numerical control machine tool, and the geometric motion error of the linear guide rail serving as one of important functional components of the numerical control machine tool directly influences the machining precision of the components. The pose of any object in space can be represented by six degrees of freedom parameters, namely the degrees of freedom of linear motion in X, Y, Z directions and the degrees of freedom of three-axis rotation motion around X, Y, Z, so that six motion errors exist when a numerical control machine tool workbench moves unidirectionally along a direction axis, and referring to fig. 1, namely a linear error and an angle error, wherein the linear error comprises a positioning error, a horizontal straightness error and a vertical straightness error, and the angle error comprises a yaw angle error, a pitch angle error and a roll angle error.
Currently, there are two types of error measurement methods for geometric movement of a workbench of a numerical control machine tool, namely a single geometric error measurement method (202111026242.4, a machine tool geometric error separation method based on a double-club instrument) and a comprehensive geometric error measurement method (201721045299.8, a numerical control machine tool comprehensive error measurement system based on-machine detection). The single geometrical measurement method is to measure each of six-dimensional geometrical errors separately, each geometrical error needs different measuring instruments, such as measurement based on positioning errors of a laser interferometer, measurement based on straightness of a flat ruler and an autocollimator, measurement based on angle errors of the autocollimator and the like, and the measurement method is simple, but takes time, only one error of the six-dimensional errors can be obtained at a time, and the measurement efficiency is low. The comprehensive geometric error method is to perform integral error measurement on six-dimensional errors of a machine tool workbench, and then to perform error separation, analysis and solution on integral error measurement data to obtain the six-dimensional errors.
In summary, the single geometrical error measurement method uses a measuring instrument to measure each error of the workbench of the numerical control machine tool independently, so that the defects of low measurement efficiency, abbe error introduction and the like generally exist, and obviously the industrial modern measurement requirements cannot be met; the comprehensive geometrical error measurement method is used for simultaneously measuring a plurality of errors of a workbench of the numerical control machine tool, and the defects of complex measurement structure, more optical elements, larger volume and the like are commonly caused, so that in practical application, the problems of difficult installation and debugging, insufficient measurement precision and the like are caused. Aiming at the technical problems, a novel device and a method for measuring the motion error of the linear workbench of the numerical control machine tool are needed to be designed, and the design requirements of simultaneously measuring a plurality of errors of the workbench of the numerical control machine tool, along with low cost, simple structure and good precision are met.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a five-degree-of-freedom motion error measuring device and method for a linear workbench of a numerical control machine tool, which can effectively and rapidly obtain three angle errors and two straight errors.
In order to achieve the above object, the present invention adopts the following technical scheme.
According to one aspect of the invention, a five-degree-of-freedom motion error measuring device of a linear workbench of a numerical control machine tool is provided, and is characterized by comprising a measuring unit and a target lens unit, wherein the measuring unit comprises a laser module, a polarization beam splitting prism BS, a right angle prism M and an angle adjusting platform; the target lens unit comprises a photoelectric detector module, a displacement adjustment platform and a signal processing module SC.
The laser module of the measuring unit comprises a semiconductor laser LD1 and a semiconductor laser LD2, which respectively emit a collimated light beam L1 and a collimated light beam L2.
The polarization beam splitter prism BS of the measuring unit is used for: ① beam splitting: the collimated light beam L1 is divided into a light beam L11 and a light beam L12, the light beam L11 is projected on the photoelectric detector QPD1, and the light beam L12 is reflected by the right-angle prism M and is projected on the photoelectric detector QPD 3. ② orthogonal: the collimated light beam L1 is divided into a light beam L11 and a light beam L12 such that the light beam L11 and the light beam L12 are in an orthogonal relationship.
The right-angle prism M of the measuring unit is used for reflecting light beams, the light beams L12 are reflected to form light beams L13, and the light beams are projected on the photoelectric detector QPD 3.
The angle adjustment platform of the measuring unit is used for adjusting the light of the measuring unit, so that the collimated light beams L1, L2 and L13 are projected in the linear range of the photodetectors QPD1, QPD2 and QPD 3.
The photoelectric detector module of the target mirror unit comprises a photoelectric detector QPD1, a photoelectric detector QPD2 and a photoelectric detector QPD3, wherein the photoelectric detector QPD2 is used for measuring two-dimensional straightness errors; the photo detector QPD1 and the photo detector QPD3 are used for measuring a roll angle error; triangle formed by the centers of photosensitive surfaces of the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3 is used for measuring yaw angle error and pitch angle error based on the triangle deformation relation before and after movement.
The displacement adjustment platform of the target lens unit is used for: ① Adjusting light: the target mirror unit adjusts the light so that the collimated light beam L1, the collimated light beam L2, and the light beam L13 are projected in the linear ranges of the photodetectors QPD1, QPD2, and QPD 3. ② Calibrating the device: calibrating the displacement conversion scaling factor of the photoelectric detector module.
The signal processing module SC of the target lens unit is used for processing the photocurrent signal generated by the photoelectric detector module, amplifying the signal, performing analog-to-digital conversion processing and the like, and transmitting the signal to the upper computer.
According to another aspect of the present invention, there is provided a five-degree-of-freedom motion error measuring method for a linear table of a numerical control machine, which is applied to the above measuring and measuring apparatus, the method comprising the steps of:
1) Before measurement, the angle adjustment platform and the displacement adjustment platform are used for adjusting the light treatment of the measuring device, so that imaging light spots projected by the collimated light beams L1, L2 and L13 are positioned at the center of the photosensitive surface of the photoelectric detector module, and the initial positions of the light spots are recorded as measurement references.
2) During measurement, along with the movement of the machine tool workbench, the semiconductor laser LD2 in the laser module emits a collimated light beam L2, the position of an imaging light spot formed on the photoelectric detector QPD2 is changed in real time, the laser collimation principle-based measurement is compared with the initial light spot position in the step 1), and the horizontal straightness error of the numerical control machine tool workbench along the X axis and the vertical straightness error of the numerical control machine tool workbench along the Y axis are calculated according to the change of the light spot position.
3) Solving three angle errors of a rolling angle, a pitch angle and a yaw angle;
3.1 The laser LD1 in the laser module emits a collimated light beam L1, the collimated light beam L1 is split by the polarization splitting prism BS to form a light beam L11 and a light beam L12, the light beam L11 is projected onto the photoelectric detector QPD1 to form an imaging light spot 1, the light beam L12 is emitted by the right-angle prism M to form a light beam L13, the light beam L13 is projected onto the photoelectric detector QPD3 to form an imaging light spot 3, the light spot 1 and the light spot 3 are compared with the initial light spot position in the step 1), and the rolling angle error of the machine tool workbench rotating around the Z axis is calculated according to the variation of the light spot position;
3.2 The semiconductor laser LD1 and the semiconductor laser LD2 in the laser module respectively emit a collimated light beam L1 and a collimated light beam L2, the collimated light beam L1 forms an imaging light spot 1 and a light spot 3 on the photoelectric detector QPD1 and the photoelectric detector QPD3 through the step 3.1), the collimated light beam L2 is directly projected on the photoelectric detector QPD2 to form the imaging light spot 2, the light spot 1, the light spot 2 and the light spot 3 are sequentially connected to form a triangle, the light spot position on the photoelectric detector module changes in real time along with the movement of the workbench, and correspondingly, the formed triangle deforms along with the triangle, compared with the triangle formed by the initial light spot position in the step 1), and the pitch angle error and the deflection angle error of the rotation of the workbench of the machine tool around the X axis are calculated according to the change quantity of the light spot position;
4) Repeating the steps 2) to 3) for all sampling positions to obtain the distribution of the two-dimensional straightness errors and the angle errors of all positions of the whole numerical control machine tool workbench.
The initial position of the light spot before the movement of the numerical control machine tool workbench in the step 1) is obtained by adopting the following mode:
Based on the measurement device, the photoelectric detectors QPD1, QPD2 and QPD3 are correspondingly arranged, before the numerical control machine table moves, the laser module projects three positions, light spots appear on the photoelectric detectors QPD1, QPD2 and QPD3 at corresponding positions, and the light spot initial position before the movement of the numerical control machine table is obtained by adjusting and carrying out light treatment; after the workbench of the numerical control machine moves, the light spots can generate position offset delta X and delta Y on the photosensitive surface of the photoelectric detector module, and the offset of the light spot center relative to the photoelectric detector center is obtained by combining the photoelectric conversion principle of the photoelectric detector, so that the position of the light spot after the movement of the numerical control machine is obtained.
Compared with the prior art, the invention has the beneficial effects that: the invention provides a five-degree-of-freedom motion error measuring device and method for a linear workbench of a numerical control machine tool. By adopting a principle of combining laser projection and photoelectric conversion of a photoelectric sensor, a triangle is formed by measuring two-dimensional coordinates of three fixed points of a workbench of the numerical control machine tool, three angle errors of the workbench of the numerical control machine tool are solved based on a triangle deformation coordinate relation before and after movement, and two-dimensional straightness errors of the workbench of the numerical control machine tool are solved based on a laser collimation principle; the whole solving process only needs simple analytic geometry knowledge, the method is simple and reliable, and compared with single geometrical error measurement, the method greatly improves the measurement efficiency; compared with the comprehensive geometric error measurement, the method simplifies the operation algorithm.
Drawings
Fig. 1 is a six-dimensional error diagram of a workbench of a numerical control machine tool.
Fig. 2 is a schematic diagram of five-degree-of-freedom motion error measurement of a workbench of the numerical control machine tool.
Fig. 3 is a schematic diagram of the error measurement process of the workbench of the numerical control machine tool.
Fig. 4 is a schematic diagram of two-dimensional straightness error measurement of a workbench of the numerical control machine tool.
Fig. 5 is a schematic diagram of the rolling angle error measurement of the workbench of the numerical control machine tool.
Fig. 6 is a schematic diagram of the pitch angle error measurement of the workbench of the numerical control machine tool.
Fig. 7 is a schematic diagram of the measurement of the photodetector of the present invention.
Detailed Description
The invention is described in further detail below with reference to examples and figures.
According to one aspect of the invention, a five-degree-of-freedom motion error measuring device for a linear workbench of a numerical control machine tool is provided, and the five-degree-of-freedom motion error measuring device comprises a measuring unit and a target lens unit.
Referring to fig. 2 and 3, the measuring unit includes a laser module, a polarization beam splitter BS, a right angle prism M, and an angle adjustment platform;
The laser module of the measuring unit comprises a semiconductor laser LD1 and a semiconductor laser LD2, which respectively emit a collimated light beam L1 and a collimated light beam L2. The semiconductor laser LD1 and the semiconductor laser LD2 are placed in parallel, and the collimated light beam L1 and the collimated light beam L2 emitted by the semiconductor laser LD1 and the semiconductor laser LD2 are ensured to be parallel to each other.
The polarization beam splitter prism BS of the measuring unit is used for: ① beam splitting: the collimated light beam L1 is divided into a light beam L11 and a light beam L12, the light beam L11 is projected on the photoelectric detector QPD1, and the light beam L12 is reflected by the right-angle prism M and is projected on the photoelectric detector QPD 3. ② orthogonal: the collimated light beam L1 is divided into a light beam L11 and a light beam L12, so that the light beam L11 and the light beam L12 are in an orthogonal relationship, the incidence angle relationship between the semiconductor laser LD1 and the polarization beam splitter prism BS is adjusted, and the collimated light beam L1 emitted by the semiconductor laser LD1 can be enabled to be incident perpendicular to the surface of the polarization beam splitter prism BS.
The right-angle prism M of the measuring unit is used for reflecting a light beam, the light beam L12 is reflected to form a light beam L13, and the light beam L13 is projected on the photoelectric detector QPD 3. The relative position between the right angle prism M and the polarization beam splitter prism BS is adjusted so that the light beam L12 forms an angle of 90 ° with the light beam L13.
The angle adjustment platform of the measuring unit is used for adjusting the light of the measuring unit, so that the collimated light beams L1, L2 and L13 are projected in the linear range of the photodetectors QPD1, QPD2 and QPD 3. And the pitching and the deflection of the angle adjustment platform ensure that the collimated light beam emitted by the laser module is projected at the center of the photosensitive surface of the photoelectric detector module.
Referring to fig. 2 and 3, the target mirror unit includes a photodetector module, a displacement adjustment platform, and a signal processing module SC.
The photoelectric detector module of the target mirror unit comprises a photoelectric detector QPD1, a photoelectric detector QPD2 and a photoelectric detector QPD3, wherein the photoelectric detector QPD2 is used for measuring two-dimensional straightness errors; the photo detector QPD1 and the photo detector QPD3 are used for measuring a roll angle error; triangle formed by the centers of photosensitive surfaces of the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3 is used for measuring yaw angle error and pitch angle error based on the triangle deformation relation before and after movement. The relative positions of the photo-detector QPD1, the photo-detector QPD2 and the photo-detector QPD3 determine the measurement accuracy of the angle error, and the installation accuracy of the photo-detector module is guaranteed.
The displacement adjustment platform of the target lens unit is used for: ① Adjusting light: the target mirror unit adjusts the light so that the collimated light beam L1, the collimated light beam L2, and the light beam L13 are projected in the linear ranges of the photodetectors QPD1, QPD2, and QPD 3. ② Calibrating the device: calibrating the displacement conversion scaling factor of the photoelectric detector module. And the horizontal and vertical offset of the platform is adjusted, so that the collimated light beam emitted by the laser module is ensured to be projected at the center of the photosensitive surface of the photoelectric detector module.
The signal processing module SC of the target lens unit is used for processing the photocurrent signal generated by the photoelectric detector module, amplifying the signal, performing analog-to-digital conversion processing and transmitting the signal to the upper computer.
According to another aspect of the present invention, there is provided a five-degree-of-freedom motion error measurement method for a linear table of a numerical control machine, applied to the above measurement apparatus, the method comprising the steps of:
1) Referring to fig. 2 and 3, before measurement, the angle adjustment platform and the displacement adjustment platform are used for adjusting the light treatment of the measuring device, so that imaging light spots projected by the collimated light beams L1, L2 and L13 are positioned at the center of the photosensitive surface of the photoelectric detector module, and the initial position of the light spots is recorded as a measurement reference.
2) Referring to fig. 3 and fig. 4, during measurement, along with the movement of the machine tool workbench, the semiconductor laser LD2 in the laser module emits a collimated light beam L2, the position of an imaging light spot formed on the photodetector QPD2 is changed in real time, and based on the measurement of the laser collimation principle, compared with the initial light spot position in the step 1), the horizontal straightness error of the numerical control machine tool workbench along the X axis and the vertical straightness error along the Y axis are calculated according to the change amount of the light spot position. The horizontal straightness error δ x can be expressed as:
δx＝Δx
the vertical straightness error δ y can be expressed as:
δy＝Δy
Δx, Δy are the horizontal and vertical offsets of the spot relative to the center of photodetector QPD2, respectively.
3) Solving three angle errors of a rolling angle, a pitch angle and a yaw angle;
3.1 Referring to fig. 2 and 5, a semiconductor laser LD1 in the laser module emits a collimated light beam L1, the collimated light beam L1 is split by a polarization splitting prism BS to form a light beam L11 and a light beam L12, the light beam L11 is projected onto a photoelectric detector QPD1 to form an imaging light spot 1, the light beam L12 is emitted by a right angle prism M to form a light beam L13, the light beam L13 is projected onto a photoelectric detector QPD3 to form an imaging light spot 3, the light spot 1 and the light spot 3 are compared with the initial light spot position in the step 1), and a roll angle error of the machine tool workbench rotating around a Z axis is calculated according to the variation of the light spot position; defining the X-projection distance between photodetectors QPD1 and QPD3 as d, the roll angle error can be expressed as:
3.2 Referring to fig. 2 and 6, the semiconductor laser LD1 and the semiconductor laser LD2 in the laser module respectively emit a collimated light beam L1 and a collimated light beam L2, the collimated light beam L1 forms an imaging light spot 1 and a light spot 3 on the photodetectors QPD1 and QPD3 through the step 3.1), the collimated light beam L2 is directly projected on the photodetectors QPD2 to form the imaging light spot 2, the light spot 1, the light spot 2 and the light spot 3 are sequentially connected to form a triangle, the light spot position on the photodetector module changes in real time along with the movement of the workbench, correspondingly, the formed triangle deforms along with the change of the triangle, and compared with the triangle formed by the initial light spot position in the step 1), and the pitch angle error and the yaw angle error of the rotation of the workbench of the machine tool around the X axis are calculated according to the change quantity of the light spot position. Taking pitch angle error as an example, the solving process comprises the following steps:
Defining the Z-direction projection distance between the photoelectric detector QPD2 and the photoelectric detector QPD1 as ao; line segment ab is the offset of the light spot when the photoelectric detector rotates angularly; θ is an included angle between the vertical direction of the photoelectric detector QPD2 at the initial position and a straight line ao; referring to fig. 6, the triangles are solved in Δoab and Δ ocb, respectively, to obtain:
The pitch angle error α can be expressed as:
α＝∠1+∠2
the yaw angle error beta solving method is the same as the above-mentioned deduction process.
4) Repeating the steps 2) to 3) for all sampling positions to obtain the distribution of two-dimensional straightness errors and angle errors of all positions of the whole numerical control machine tool workbench;
The initial position of the light spot before the movement of the numerical control machine tool workbench in the step 1) is obtained by adopting the following mode:
Referring to fig. 2 and 7, based on the measurement device, the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3 are correspondingly arranged, before the numerical control machine tool workbench moves, the laser module projects three positions, light spots appear on the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3 at corresponding positions, and light adjustment and light treatment are carried out to obtain the initial position of the light spots before the movement of the numerical control machine tool workbench; after the numerical control machine tool workbench moves, the light spots can generate position offset delta X and delta Y on the photosensitive surface of the photoelectric detector module, and the offset of the light spot center relative to the photoelectric detector center is obtained by combining the photoelectric conversion principle of the photoelectric detector, so that the position of the light spots after the movement of the numerical control machine tool workbench is obtained.
The beneficial effects of this embodiment are: the laser projection is combined with the photoelectric conversion principle of the photoelectric detectors, so that the five degree-of-freedom errors of the linear workbench of the numerical control machine are measured, the light spots formed on the three photoelectric detectors are sequentially connected end to form a triangle, three angle errors can be effectively and rapidly obtained based on the triangle deformation coordinate relation before and after movement, and two linear errors can be rapidly obtained based on the laser collimation principle. Comparing with single-phase geometric error measurement, such as measurement based on positioning error of a laser interferometer, measurement based on straightness of a flat ruler and an autocollimator, measurement based on angular errors of the autocollimator and the level, etc., the measurement mode of single-phase error by adopting a measuring instrument is time-consuming and labor-consuming, and the measurement is incomplete, the invention has higher measurement efficiency, and realizes simultaneous measurement of multiple errors; comparing the comprehensive geometric error measurement, such as measuring six degrees of freedom errors of a machine tool workbench by a laser tracker and a six degrees of freedom attitude laser target unit (202211010946.7, a six degrees of freedom laser target measuring system and a dynamic performance improving method thereof); based on laser parallel light paths, two parallel light beams are adopted, optical lens groups such as pyramid prisms and convex lenses are matched, photoelectric detectors are used as signal receiving units, a measuring machine tool workbench comprises five degrees of freedom errors (202210434378.7, a multi-degree-of-freedom detecting device based on the parallel light paths) of rolling angles, and the like.
Claims (3)
1. The five-degree-of-freedom motion error measuring device of the linear workbench of the numerical control machine tool is characterized by comprising a measuring unit and a target lens unit;
The measuring unit comprises a laser module, a polarization beam splitting prism BS, a right angle prism M and an angle adjusting platform, wherein the laser module comprises a semiconductor laser LD1 and a semiconductor laser LD2;
The target mirror unit comprises a photoelectric detector module, a displacement adjustment platform and a signal processing module SC, wherein the photoelectric detector module comprises a photoelectric detector QPD1, a photoelectric detector QPD2 and a photoelectric detector QPD3;
The semiconductor laser LD1 and the semiconductor laser LD2 are used for emitting a collimated light beam L1 and a collimated light beam L2, the semiconductor laser LD1 and the semiconductor laser LD2 are arranged in parallel, and the collimated light beam L1 and the collimated light beam L2 emitted by the semiconductor laser LD1 and the semiconductor laser LD2 are adjusted to be parallel to each other;
The polarization beam splitter prism BS of the measuring unit is used for: ① beam splitting: the collimated light beam L1 is divided into a light beam L11 and a light beam L12, the light beam L11 is projected on the photoelectric detector QPD1, the light beam L12 is reflected by the right-angle prism M and is projected on the photoelectric detector QPD3, and ② are orthogonal: dividing the collimated light beam L1 into a light beam L11 and a light beam L12, so that the light beam L11 and the light beam L12 are in an orthogonal relationship, adjusting the incidence angle relationship between the semiconductor laser LD1 and the polarization beam splitter prism BS, and ensuring that the collimated light beam L1 emitted by the semiconductor laser LD1 can be incident perpendicularly to the surface of the polarization beam splitter prism BS;
The right-angle prism M of the measuring unit is used for reflecting light beams, the light beams L12 are reflected to form light beams L13, the light beams L13 are projected on the photoelectric detector QPD3, and the relative positions between the right-angle prism M and the polarization beam splitter prism BS are adjusted so that the light beams L12 and the light beams L13 form an included angle of 90 degrees;
The angle adjustment platform of the measuring unit is used for adjusting the light of the measuring unit, so that the collimated light beams L1, L2 and L13 are projected in the linear range of the photoelectric detectors QPD1, QPD2 and QPD3, and the pitching and the deflection of the angle adjustment platform ensure that the collimated light beams emitted by the laser module are projected in the centers of the photosensitive surfaces of the photoelectric detectors QPD1, QPD2 and QPD 3;
The photoelectric detector QPD2 is used for measuring two-dimensional straightness errors; the photo detector QPD1 and the photo detector QPD3 are used for measuring a roll angle error; triangle formed by the centers of photosensitive surfaces of the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3 measures deflection angle error and pitch angle error based on the triangle deformation relation before and after movement;
The displacement adjustment platform is used for: ① Adjusting light: the adjustment of the target mirror unit is to the light, so that the collimated light beam L1, the collimated light beam L2 and the light beam L13 are projected in the linear range of the photoelectric detector QPD1, the photoelectric detector QPD2 and the photoelectric detector QPD3, and ② devices are calibrated: calibrating a displacement conversion scaling factor of the photoelectric detector module;
The signal processing module is used for processing the photocurrent signals generated by the photoelectric detector module, amplifying the signals, performing analog-to-digital conversion processing and transmitting the signals to the upper computer.
2. A method for measuring five-degree-of-freedom motion error of a linear table of a numerically-controlled machine tool, which is applied to the apparatus of claim 1, the method comprising:
1) Before measurement, the angle adjustment platform and the displacement adjustment platform are used for adjusting the light treatment of the measuring device, so that imaging light spots projected by the collimated light beams L1, L2 and L13 are positioned at the centers of photosensitive surfaces of the photoelectric detectors QPD1, QPD2 and QPD3, and the initial positions of the light spots are recorded as measurement references;
2) During measurement, along with the movement of a machine tool workbench, a semiconductor laser LD2 in the laser module emits a collimated light beam L2, the position of an imaging light spot formed on a photoelectric detector QPD2 is changed in real time, the laser-based collimation principle is used for measurement, the initial light spot position is compared with the initial light spot position in the step 1), and the horizontal straightness error of the numerical control machine tool workbench along the X axis and the vertical straightness error of the numerical control machine tool workbench along the Y axis are calculated according to the change amount of the light spot position;
3) Solving three angle errors of a rolling angle, a pitch angle and a yaw angle;
3.1 The semiconductor laser LD1 in the laser module emits a collimated light beam L1, the collimated light beam L1 is split by the polarization beam splitting prism BS to form a light beam L11 and a light beam L12, the light beam L11 is projected onto the photoelectric detector QPD1 to form an imaging light spot 1, the light beam L12 is emitted by the right angle prism M to form a light beam L13, the light beam L13 is projected onto the photoelectric detector QPD3 to form an imaging light spot 3, the light spot 1 and the light spot 3 are compared with the initial light spot position in the step 1), and the rolling angle error of the workbench of the numerical control machine tool rotating around the Z axis is calculated according to the variable quantity of the light spot position;
3.2 In the laser module, a semiconductor laser LD1 and a semiconductor laser LD2 respectively emit a collimated light beam L1 and a collimated light beam L2, the collimated light beam L1 forms an imaging light spot 1 and a light spot 3 on a photoelectric detector QPD1 and a photoelectric detector QPD3 through the step 3.1), the collimated light beam L2 is directly projected on the photoelectric detector QPD2 to form the imaging light spot 2, the light spot 1, the light spot 2 and the light spot 3 are sequentially connected to form a triangle, the light spot position on the photoelectric detector changes in real time along with the movement of a workbench, correspondingly, the formed triangle deforms along with the triangle, the triangle is compared with the triangle formed by the initial light spot position in the step 1), and the pitch angle error and the yaw angle error of the rotation of the workbench of the numerical control machine tool around the X axis are calculated according to the change quantity of the light spot position;
4) Repeating the steps 2) to 3) for all sampling positions to obtain the distribution of the two-dimensional straightness errors and the angle errors of all positions of the whole numerical control machine tool workbench.
3. The method according to claim 2, characterized in that: the initial position of the light spot before the movement of the numerical control machine tool workbench in the step 1) is obtained by adopting the following mode:
based on the measurement device, the photoelectric detectors QPD1, QPD2 and QPD3 are correspondingly arranged, the semiconductor laser LD1 and the semiconductor laser LD2 project three positions before the numerical control machine table moves, light spots appear on the photoelectric detectors QPD1, QPD2 and QPD3 at corresponding positions, and light spot initial positions before the numerical control machine table moves are obtained by adjusting and carrying out light treatment; after the workbench of the numerical control machine moves, the light spots can generate position offset delta X and delta Y on the photosensitive surface of the photoelectric detector module, and the offset of the light spot center relative to the photoelectric detector center is obtained by combining the photoelectric conversion principle of the photoelectric detector, so that the position of the light spot after the movement of the numerical control machine is obtained.
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