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CN118307123A - Wastewater treatment method of tetramethyl ammonium hydroxide - Google Patents

Wastewater treatment method of tetramethyl ammonium hydroxide Download PDF

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Publication number
CN118307123A
CN118307123A CN202410741753.1A CN202410741753A CN118307123A CN 118307123 A CN118307123 A CN 118307123A CN 202410741753 A CN202410741753 A CN 202410741753A CN 118307123 A CN118307123 A CN 118307123A
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CN
China
Prior art keywords
ammonium hydroxide
tetramethyl ammonium
mesoporous silica
wastewater
lanthanum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202410741753.1A
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Chinese (zh)
Inventor
冯亚楠
贾成林
郭金
赵鹏
于文达
胡学建
何江汇
王宝兴
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Xinlian Electronic Materials Technology Co ltd
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Xinlian Electronic Materials Technology Co ltd
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Publication date
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Priority to CN202410741753.1A priority Critical patent/CN118307123A/en
Publication of CN118307123A publication Critical patent/CN118307123A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/72Treatment of water, waste water, or sewage by oxidation
    • C02F1/76Treatment of water, waste water, or sewage by oxidation with halogens or compounds of halogens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J27/00Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
    • B01J27/06Halogens; Compounds thereof
    • B01J27/08Halides
    • B01J27/10Chlorides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J27/00Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
    • B01J27/24Nitrogen compounds
    • B01J27/25Nitrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/60Catalysts, in general, characterised by their form or physical properties characterised by their surface properties or porosity
    • B01J35/64Pore diameter
    • B01J35/6472-50 nm
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/66Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/72Treatment of water, waste water, or sewage by oxidation
    • C02F1/725Treatment of water, waste water, or sewage by oxidation by catalytic oxidation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00Nature of the contaminant
    • C02F2101/30Organic compounds
    • C02F2101/38Organic compounds containing nitrogen

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Materials Engineering (AREA)
  • Removal Of Specific Substances (AREA)

Abstract

The invention relates to the technical field of wastewater treatment, and provides a wastewater treatment method of tetramethyl ammonium hydroxide, which comprises the following steps: and (3) regulating the pH value of the wastewater containing the tetramethylammonium hydroxide to 7-7.5, adding hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica, mixing, reacting, settling and yielding water. Through the technical scheme, the problem of low decomposition rate of tetramethyl ammonium hydroxide in the prior art is solved.

Description

Wastewater treatment method of tetramethyl ammonium hydroxide
Technical Field
The invention relates to the technical field of wastewater treatment, in particular to a wastewater treatment method of tetramethyl ammonium hydroxide.
Background
Tetramethyl ammonium hydroxide, a strongly basic substance, is widely used as a developer in the electronics industry. But it produces toxic wastewater containing tetramethylammonium hydroxide during use. Such waste water, if discharged directly, may cause environmental pollution. Thus, there is a need for an efficient wastewater treatment process to remove tetramethyl ammonium hydroxide from wastewater.
At present, a common method is to decompose and discharge tetramethyl ammonium hydroxide in wastewater by using microorganisms or bleaching agents. The rate of microbial decomposition of tetramethyl ammonium hydroxide is slow, and large areas of sites are required to be used, which cannot meet the current requirements of the semiconductor industry. The method of decomposing tetramethyl ammonium hydroxide by adding the bleaching agent has the defect of low decomposition rate. Therefore, the development of a novel wastewater treatment method of tetramethyl ammonium hydroxide has important significance.
Disclosure of Invention
The invention provides a wastewater treatment method of tetramethyl ammonium hydroxide, which solves the problem of lower tetramethyl ammonium hydroxide decomposition rate in the related technology.
The technical scheme of the invention is as follows:
The invention provides a wastewater treatment method of tetramethyl ammonium hydroxide, which comprises the following steps: and (3) regulating the pH value of the wastewater containing the tetramethylammonium hydroxide to 7-7.5, adding hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica, mixing, reacting, settling and yielding water.
As a further technical scheme, the mass ratio of the hypochlorite to the tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide is 40-50:50, the mass ratio of the sodium bicarbonate to the tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide is 5-25:50, the mass ratio of the sodium acetate to the tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide is 4-8:50, and the mass ratio of the mesoporous silica to the tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide is 5-10:50.
In the invention, the decomposition rate of the tetramethyl ammonium hydroxide is further improved by optimizing the addition amount of hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica.
As a further technical scheme, the mass ratio of the sodium bicarbonate to the sodium acetate is 2-2.5:1.
In the invention, when the mass ratio of sodium bicarbonate to sodium acetate is 2-2.5:1, the decomposition rate of tetramethyl ammonium hydroxide is further improved.
As a further technical scheme, the mesoporous silica is lanthanum ion-loaded mesoporous silica.
In the invention, the mesoporous silica is loaded with lanthanum ions, so that the decomposition reaction can be further promoted, and the decomposition rate of the tetramethyl ammonium hydroxide can be further improved.
As a further technical scheme, the preparation method of the lanthanum ion-loaded mesoporous silica comprises the following steps: dissolving lanthanum salt in water, adding mesoporous silica, uniformly dispersing, concentrating, and calcining to obtain the lanthanum ion-loaded mesoporous silica.
As a further technical scheme, the lanthanum salt comprises one or two of lanthanum nitrate and lanthanum chloride.
As a further technical scheme, the mass ratio of the lanthanum salt to the mesoporous silica is 1-5:20.
According to the invention, when the mass ratio of lanthanum salt to mesoporous silica is 1-5:20, the decomposition rate of tetramethyl ammonium hydroxide is further improved.
As a further technical scheme, the temperature is 200-300 ℃ and the time is 1-2 h during calcination.
As a further technical scheme, the hypochlorite comprises one or more of sodium hypochlorite, calcium hypochlorite and potassium hypochlorite.
As a further technical scheme, the pore diameter of the mesoporous silica is 2-20 nm.
As a further technical scheme, the temperature is 20-25 ℃ and the time is 6-8 hours during the reaction.
The working principle and the beneficial effects of the invention are as follows:
In the invention, the wastewater treatment method of the tetramethyl ammonium hydroxide has the advantage of high decomposition rate. Wherein, sodium bicarbonate and sodium acetate are added in the wastewater treatment process, and the sodium bicarbonate and the sodium acetate are synergistic, so that the decomposition rate of the tetramethylammonium hydroxide is obviously improved. In addition, the mesoporous silica can promote the decomposition reaction, thereby improving the decomposition rate of the tetramethyl ammonium hydroxide.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the following examples and comparative examples, the mesoporous silica was obtained from Nanj-based biosciences Co., ltd, and had a model number of JK-04-007-100 and a pore diameter of 9nm, unless otherwise specified.
Example 1
A method for treating wastewater by tetramethyl ammonium hydroxide comprises the following steps: adjusting the pH value of wastewater containing tetramethyl ammonium hydroxide to 7, adding sodium hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica, mixing, reacting at 25 ℃ for 6 hours, settling, and discharging water;
wherein the concentration of tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 50mg/L, the adding amount of sodium hypochlorite is 35mg/L, the adding amount of sodium bicarbonate is 3mg/L, the adding amount of sodium acetate is 1mg/L, and the adding amount of mesoporous silica is 3mg/L.
Example 2
A method for treating wastewater by tetramethyl ammonium hydroxide comprises the following steps: adjusting the pH value of wastewater containing tetramethyl ammonium hydroxide to 7.5, adding sodium hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica, mixing, reacting at 20 ℃ for 8 hours, settling, and discharging water;
Wherein the concentration of tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 50mg/L, the adding amount of sodium hypochlorite is 55mg/L, the adding amount of sodium bicarbonate is 30mg/L, the adding amount of sodium acetate is 10mg/L, and the adding amount of mesoporous silica is 15mg/L.
Example 3
The difference between this example and example 2 is that in this example, the amount of sodium hypochlorite added was 35mg/L, the amount of sodium bicarbonate added was 3mg/L, the amount of sodium acetate added was 1mg/L, and the amount of mesoporous silica added was 3mg/L.
Example 4
The difference between this example and example 2 is that in this example, the amount of sodium hypochlorite added was 40mg/L, the amount of sodium bicarbonate added was 5mg/L, the amount of sodium acetate added was 4mg/L, and the amount of mesoporous silica added was 5mg/L.
Example 5
The difference between this example and example 2 is that in this example, the amount of sodium hypochlorite added was 50mg/L, the amount of sodium bicarbonate added was 25mg/L, the amount of sodium acetate added was 8mg/L, and the amount of mesoporous silica added was 10mg/L.
Example 6
This example differs from example 5 only in that in this example, the amount of sodium bicarbonate added was 13mg/L.
Example 7
The difference between this example and example 5 is that in this example, the amount of sodium bicarbonate added was 17mg/L and the amount of sodium acetate added was 4mg/L.
Example 8
The difference between this example and example 5 is that in this example, the amount of sodium bicarbonate added was 14mg/L and the amount of sodium acetate added was 7mg/L.
Example 9
The difference between this example and example 5 is that in this example, the amount of sodium bicarbonate added was 15mg/L and the amount of sodium acetate added was 6mg/L.
Example 10
The difference between this embodiment and embodiment 9 is that in this embodiment, the mesoporous silica is mesoporous silica loaded with lanthanum ions, and the preparation method of the mesoporous silica loaded with lanthanum ions is as follows: dissolving lanthanum chloride in water, adding mesoporous silica, dispersing uniformly, concentrating under reduced pressure, calcining at 250 ℃ for 1.5h to obtain mesoporous silica loaded with lanthanum ions;
wherein the mass ratio of lanthanum chloride to mesoporous silica is 1:30.
Example 11
This example differs from example 10 only in that in this example lanthanum chloride was replaced by an equivalent amount of lanthanum nitrate.
Example 12
The only difference between this example and example 10 is that in this example, the mass ratio of lanthanum chloride to mesoporous silica is 2:5.
Example 13
The only difference between this example and example 10 is that in this example, the mass ratio of lanthanum chloride to mesoporous silica is 1:20.
Example 14
The only difference between this example and example 10 is that in this example, the mass ratio of lanthanum chloride to mesoporous silica is 1:4.
Comparative example 1
The comparative example differs from example 1 only in that sodium bicarbonate was not added and sodium acetate was added in an amount of 4mg/L.
Comparative example 2
The comparative example differs from example 1 only in that sodium acetate was not added and sodium bicarbonate was added in an amount of 4mg/L.
Comparative example 3
The comparative example differs from example 1 only in that sodium bicarbonate and sodium acetate were not added in the comparative example.
Comparative example 4
The comparative example differs from example 1 only in that in this comparative example, no mesoporous silica was added.
The concentrations of tetramethylammonium hydroxide after water discharge of examples 1 to 14 and comparative examples 1 to 4 were measured, and the decomposition rate of tetramethylammonium hydroxide was calculated according to the following formula, and the decomposition rate=tetramethylammonium hydroxide concentration after water discharge/tetramethylammonium hydroxide concentration before treatment×100%. The calculation results are shown in table 1 below.
TABLE 1 decomposition rate of tetramethyl ammonium hydroxide
The decomposition rate of tetramethylammonium hydroxide in example 1 is significantly higher than that of comparative examples 1 to 3, which shows that the decomposition rate of tetramethylammonium hydroxide can be greatly improved by adding sodium bicarbonate and sodium acetate to the wastewater treatment process and synergistically. The decomposition rate of tetramethylammonium hydroxide in example 1 was significantly higher than that of comparative example 4, indicating that the addition of mesoporous silica significantly improved the decomposition rate of tetramethylammonium hydroxide.
The decomposition rate of tetramethylammonium hydroxide in examples 4 to 5 was higher than that in examples 2 to 3, which indicates that when the mass ratio of hypochlorite to tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide was 40 to 50:50, the mass ratio of sodium bicarbonate to tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide was 5 to 25:50, the mass ratio of sodium acetate to tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide was 4 to 8:50, and the mass ratio of mesoporous silica to tetramethylammonium hydroxide in the wastewater containing tetramethylammonium hydroxide was 5 to 10:50, it was helpful to further increase the decomposition rate of tetramethylammonium hydroxide. The decomposition rate of tetramethylammonium hydroxide in examples 8-9 was higher than that in examples 6-7, indicating that it was helpful to further increase the decomposition rate of tetramethylammonium hydroxide when the mass ratio of sodium bicarbonate to sodium acetate was 2-2.5:1.
The decomposition rate of tetramethylammonium hydroxide in examples 10 to 14 was higher than that in example 9, which indicates that the mesoporous silica was supported with lanthanum ions, which was conducive to further increasing the decomposition rate of tetramethylammonium hydroxide. The decomposition rate of tetramethylammonium hydroxide in examples 13-14 was higher than examples 10, 12, indicating that it was helpful to further increase the decomposition rate of tetramethylammonium hydroxide when the mass ratio of lanthanum salt to mesoporous silica was 1-5:20.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (10)

1. The method for treating the wastewater by using the tetramethyl ammonium hydroxide is characterized by comprising the following steps of: and (3) regulating the pH value of the wastewater containing the tetramethylammonium hydroxide to 7-7.5, adding hypochlorite, sodium bicarbonate, sodium acetate and mesoporous silica, mixing, reacting, settling and yielding water.
2. The method for treating wastewater containing tetramethyl ammonium hydroxide according to claim 1, wherein the mass ratio of hypochlorite to tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 40-50:50, the mass ratio of sodium bicarbonate to tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 5-25:50, the mass ratio of sodium acetate to tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 4-8:50, and the mass ratio of mesoporous silica to tetramethyl ammonium hydroxide in the wastewater containing tetramethyl ammonium hydroxide is 5-10:50.
3. The method for treating wastewater by using tetramethyl ammonium hydroxide according to claim 2, wherein the mass ratio of sodium bicarbonate to sodium acetate is 2-2.5:1.
4. The method for wastewater treatment with tetramethylammonium hydroxide according to claim 1, wherein said mesoporous silica is lanthanum ion-loaded mesoporous silica.
5. The method for treating wastewater containing tetramethyl ammonium hydroxide according to claim 4, wherein the method for preparing mesoporous silica loaded with lanthanum ions comprises the following steps: dissolving lanthanum salt in water, adding mesoporous silica, uniformly dispersing, concentrating, and calcining to obtain the lanthanum ion-loaded mesoporous silica.
6. The method for wastewater treatment with tetramethylammonium hydroxide according to claim 5, wherein said lanthanum salt comprises one or both of lanthanum nitrate and lanthanum chloride.
7. The method for treating wastewater by tetramethyl ammonium hydroxide according to claim 5, wherein the mass ratio of lanthanum salt to mesoporous silica is 1-5:20.
8. The method for wastewater treatment with tetramethyl ammonium hydroxide according to claim 1, wherein the hypochlorite comprises one or more of sodium hypochlorite, calcium hypochlorite, and potassium hypochlorite.
9. The method for treating wastewater by tetramethyl ammonium hydroxide according to claim 1, wherein the mesoporous silica has a pore diameter of 5-20 nm.
10. The method for treating wastewater by using tetramethyl ammonium hydroxide according to claim 1, wherein the reaction is carried out at a temperature of 20-25 ℃ for 6-8 hours.
CN202410741753.1A 2024-06-11 2024-06-11 Wastewater treatment method of tetramethyl ammonium hydroxide Pending CN118307123A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1318526A (en) * 2000-04-14 2001-10-24 日本电气株式会社 Method for treatment of waste water and device for treatment of waste water using the method
JP2003236531A (en) * 2002-02-14 2003-08-26 Babcock Hitachi Kk Method for treating waste liquid containing quaternary ammonium salt
CN1468807A (en) * 2002-07-03 2004-01-21 株式会社日本触媒 Sewage treatment method and apparatus
CN106311251A (en) * 2016-08-30 2017-01-11 上海大学 Preparation method of mesoporous silica supported high-dispersion nickel-lanthanum oxide catalyst
CN106431830A (en) * 2016-08-11 2017-02-22 刘定忠 Decomposition method of tetramethyl ammonium hydroxide solution and decomposition device thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1318526A (en) * 2000-04-14 2001-10-24 日本电气株式会社 Method for treatment of waste water and device for treatment of waste water using the method
JP2003236531A (en) * 2002-02-14 2003-08-26 Babcock Hitachi Kk Method for treating waste liquid containing quaternary ammonium salt
CN1468807A (en) * 2002-07-03 2004-01-21 株式会社日本触媒 Sewage treatment method and apparatus
CN106431830A (en) * 2016-08-11 2017-02-22 刘定忠 Decomposition method of tetramethyl ammonium hydroxide solution and decomposition device thereof
CN106311251A (en) * 2016-08-30 2017-01-11 上海大学 Preparation method of mesoporous silica supported high-dispersion nickel-lanthanum oxide catalyst

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
冯俊小等主编: "能源与环境", 30 June 2011, 冶金工业出版社, pages: 135 *

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