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CN118060982A - Large-size spindle machining method - Google Patents

Large-size spindle machining method Download PDF

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Publication number
CN118060982A
CN118060982A CN202410476055.3A CN202410476055A CN118060982A CN 118060982 A CN118060982 A CN 118060982A CN 202410476055 A CN202410476055 A CN 202410476055A CN 118060982 A CN118060982 A CN 118060982A
Authority
CN
China
Prior art keywords
spindle
grinding
main shaft
center
machining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202410476055.3A
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Chinese (zh)
Other versions
CN118060982B (en
Inventor
庞小龙
周惠言
蒋继乐
寇明虎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Tesidi Semiconductor Equipment Co ltd
Original Assignee
Beijing Tsd Equipment Co ltd
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Publication date
Application filed by Beijing Tsd Equipment Co ltd filed Critical Beijing Tsd Equipment Co ltd
Priority to CN202410476055.3A priority Critical patent/CN118060982B/en
Publication of CN118060982A publication Critical patent/CN118060982A/en
Application granted granted Critical
Publication of CN118060982B publication Critical patent/CN118060982B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/061Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B24B41/062Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically between centres; Dogs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/36Single-purpose machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

The application discloses a large-size main shaft processing method, which comprises the following steps: installing an auxiliary tool at the second end of the main shaft, downwards installing the first end of the main shaft on a central hole grinding machine, enabling the central hole of the first end to be jointed with a grinding machine center, grinding an auxiliary central hole on the auxiliary tool through the central hole grinding machine, and tightly jointing the auxiliary central hole with the grinding machine center; and performing N times of grinding processing on the main shaft, wherein the sum of the processing amounts of the N times of grinding processing is equal to the target processing amount of the main shaft, and each grinding processing comprises: setting the second end of the main shaft provided with the auxiliary tool downwards, enabling the auxiliary center hole to be jointed with the center of the grinding machine, and grinding the center hole through the center hole grinding machine on the basis of the center hole of the first end; and (3) taking the main shaft off the center hole grinding machine, removing the auxiliary tool, installing a center frame between a headstock and a tailstock of the lathe, installing the main shaft on the lathe, supporting the main shaft by the center frame, and grinding two ends of the main shaft by the lathe. The processing method enables the spindle with a larger center hole at one end to be processed on the center hole grinding machine, reduces the deformation of the spindle caused by longer spindle length and larger mass distribution difference at two ends in the lathe processing process, and simultaneously can reduce the influence of thermal expansion of the spindle on processing precision.

Description

Large-size spindle machining method
Technical Field
The application relates to the technical field of spindle grinding, in particular to a large-size spindle machining method.
Background
As the required size of the third generation semiconductor wafer is becoming larger, the size requirement of the wafer polisher is also becoming larger, so that the size of the parts on the polisher is also required to be enlarged. Therefore, for large-size wafer polishing machines, a larger spindle is required to drive corresponding components to move, and at the same time, the precision of wafer processing is also increasingly precise, and the precision of the spindle is also required to be higher, so that the spindle applied to the wafer polishing machines of this type needs to have both large size and high precision.
However, the prior art has the following problems when grinding large-sized spindles: the large-size spindle has the characteristics of large size and large mass, so that the size of a center hole of the large-size spindle is larger than that of a center of a conventional center hole grinding machine in grinding processing, the center cannot normally play a role in supporting and fixing the spindle, and because the mass of the large-size spindle is large and the axis is longer than that of the spindle of the normal size, when the spindle is transversely ground on a lathe, bending deformation can be formed on the spindle due to the gravity factor, the axis of the spindle deviates from the rotating shaft of the lathe, so that the spindle cannot stably rotate along the axis, and the processing precision of the spindle is affected. Meanwhile, because the main shaft is large in size, the size required to be ground is correspondingly increased, the length required by grinding is prolonged, a large amount of heat generated during grinding can cause the main shaft to be heated and expanded, the main shaft is cooled after grinding is finished, the actual grinding amount of the main shaft is possibly smaller than the target amount, and the precision is reduced.
Disclosure of Invention
The application mainly aims to provide a large-size spindle machining method for solving the problems that in the grinding machining of a large-size spindle in the related art, the size of a center hole at one end of the spindle is larger than that of a center of a conventional center hole grinding machine, so that the center cannot normally support and fix the spindle, the spindle possibly forms bending deformation due to the gravity factor when the spindle is transversely ground on a lathe because the spindle is large in mass and the axis is larger than that of the spindle with the normal size, meanwhile, the required grinding size is correspondingly increased because the spindle is large in size, the grinding required length is prolonged, the spindle is heated and expanded because a large amount of heat is generated during grinding, the spindle is cooled after grinding is finished, and the actual grinding amount of the spindle is possibly smaller than the target amount, so that the precision is reduced.
In order to achieve the above object, the present application provides a large-sized spindle machining method, the spindle including a spindle first end and a spindle second end, the spindle first end having a first end center hole capable of being tightly engaged with a grinding machine center of a center hole grinding machine, the method comprising:
installing an auxiliary tool at the second end of the main shaft, downwards installing the first end of the main shaft to a center hole grinding machine, enabling the center hole of the first end to be connected with the center of the grinding machine, and grinding the auxiliary center hole on the auxiliary tool through the center hole grinding machine, wherein the auxiliary center hole is used for being tightly connected with the center of the grinding machine;
performing grinding on a main shaft for N times, wherein the sum of the processing amounts of the grinding for N times is equal to the target processing amount of the main shaft, and N is an integer greater than 1;
Each of the grinding processes includes:
Setting the second end of the main shaft provided with the auxiliary tool downwards, enabling the auxiliary center hole to be jointed with the center of the grinding machine, and grinding a center hole through the center hole grinding machine on the basis of the center hole of the first end;
and taking down the main shaft from the central hole grinding machine, removing the auxiliary tool, installing a center frame between a headstock and a tailstock of a lathe, supporting the main shaft by the center frame, and grinding two ends of the main shaft by the lathe.
Further, the mass of the second end of the spindle is greater than the mass of the first end of the spindle;
Prior to installing the center frame, securing the spindle first end to the headstock, and tightening a tailstock tip of the tailstock against the second end center hole;
And forming an annular supporting groove for assembling with the center frame by grinding on the second end of the main shaft through the lathe.
Further, grinding processing is performed on both ends of the main shaft by the lathe, including:
Securing the first end of the spindle to the head frame, supporting the second end of the spindle with the central frame;
grinding the second end of the main shaft and the center hole of the second end;
turning the spindle, fixing the second end of the spindle to the headstock, and propping the tailstock tip against the first end center hole;
grinding the first end of the main shaft;
And withdrawing the tailstock center, and grinding the first end center hole.
Further, cooling the spindle during the grinding process includes:
and (3) introducing a cooling medium into the grinding position of the main shaft in the grinding process, so that the temperature of the main shaft is 20-26 ℃.
Further, the cooling medium comprises a cooling liquid and/or a cooling gas.
Further, after finishing the grinding process once, placing the main shaft into a constant temperature chamber for standing, so that the whole temperature of the main shaft is in a set range, and the thermal expansion of the main shaft formed by grinding is reduced.
Further, a plurality of connecting holes are formed in the auxiliary tool along the circumferential direction, connecting bolts are arranged in the connecting holes, and the auxiliary tool is connected with the second end of the main shaft through the connecting bolts.
Further, the steady rest comprises at least three circumferentially distributed support arms, the ends of which extend into the annular support groove.
Further, before each of the foregoing, the method further includes:
determining machining precision errors of the spindle Based on the machining precision error/>And determining the installation position of the center frame and the machining amount of single grinding machining.
Further, determining a machining precision error of the spindleComprising:
Acquiring the supporting displacement of the main shaft when each diameter part of the main shaft is supported by the center frame ,/>,/>For the total length of the main shaft,/>Is the diameter part length supported by the center frame on the main shaft,/>Is the maximum deviation of coaxiality;
Acquiring deflection components of the spindle due to flexural deformation of the spindle when the diameter portions of the spindle are supported by the center frame ,/>,/>Is the length of the diameter part of the main shaft supported by the center frame, F is the average axial force exerted on the main shaft,/>Young's modulus of principal axis,/>Is the cross-sectional area of the spindle;
Acquiring thermal expansion of the spindle during processing ,/>,/>Is the linear expansion coefficient of the main shaft material,/>D is the diameter of the machining position on the main shaft for the temperature deviation in the grinding process;
based on the support displacement Deviation component/>Thermal expansion/>Determining the machining precision error/>
Further, determining a machining precision error of the spindleFurther comprising:
obtaining the eccentricity of the spindle after installation ,/>,/>Mounting an eccentric error for the spindle;
Obtaining tool feed and wear deviations ,/>,/>For the minimum resolution of the tool feed,Dimensional deviation of the cutter before and after machining;
acquiring a deviation component of the spindle caused by vibration ,/>,/>The maximum amplitude of the spindle vibration;
In the embodiment of the application, firstly, the grinding process of the main shaft is divided into N times, a margin is reserved compared with the target processing amount after the primary grinding process is carried out, after the primary grinding process is finished, the center hole is trimmed, and the secondary grinding process is carried out, so that the single grinding time is reduced, the influence of the thermal expansion of the main shaft is effectively reduced, the processing precision is higher, the problems that the size of the main shaft which is required to be ground is correspondingly increased, the grinding required length is prolonged, a large amount of heat generated during grinding can cause the thermal expansion of the main shaft, the actual grinding amount of the main shaft is possibly smaller than the target amount after the grinding is finished, and the precision is reduced are solved;
Secondly, installing an auxiliary tool at the second end of the main shaft, downwards installing the first end of the main shaft to a center hole grinding machine, enabling the first end center hole to be jointed with the center of the grinding machine, grinding an auxiliary center hole on the auxiliary tool through the center hole grinding machine, and tightly jointing the auxiliary center hole with the center of the grinding machine, so that the auxiliary center hole on the auxiliary tool can be jointed with the center of the center hole grinding machine to support the main shaft when the first end of the main shaft is processed, and the problem that in the related art, the size of the center hole at one end of the main shaft is larger than that of the center of a conventional center hole grinding machine when the main shaft is processed is solved, and the center cannot normally play a role in supporting and fixing the main shaft;
In addition, when the main shaft is mounted on a lathe for transverse grinding, a center frame is mounted between a headstock and a tailstock of the lathe, the main shaft is supported by the center frame, so that the problem that the main shaft possibly forms bending deformation due to gravity factors and the machining precision is reduced due to the fact that the main shaft is bent and deviated from a rotating shaft due to the fact that the main shaft length is long and the mass of an extended shaft is large, and even the damage to the main shaft and the lathe is caused, the machining precision of the main shaft is improved, and the problems that in the related art, the main shaft is large in mass and the axis is larger than the main shaft length of a normal size are solved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application, are incorporated in and constitute a part of this specification. The drawings and their description are illustrative of the application and are not to be construed as unduly limiting the application. In the drawings:
FIG. 1 is a schematic flow diagram of a processing method according to an embodiment of the application;
FIG. 2 is a schematic view of a spindle structure according to an embodiment of the present application;
The auxiliary tool comprises a main shaft 1, a main shaft 101, a main shaft 102 and a main shaft 2.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "right," and the like in the description and claims of the present application and in the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the application herein.
In the present application, the azimuth or positional relationship indicated by the terms "upper", "lower", "inner", and the like are based on the azimuth or positional relationship shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present application will be understood by those of ordinary skill in the art according to the specific circumstances.
Furthermore, the terms "disposed," "configured," "connected," "secured," and the like are to be construed broadly. For example, "connected" may be in a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
To solve the related technical problems, an embodiment of the present application provides a large-size spindle machining method, as shown in fig. 2, where a spindle 1 includes a first spindle end 101 and a second spindle end 102, the first spindle end 101 has a first end center hole, and the first end center hole can be tightly engaged with a grinding machine center of a center hole grinding machine, and the method includes:
S10, installing an auxiliary tool 2 at a second end 102 of a main shaft, downwards installing a first end 101 of the main shaft to a center hole grinding machine, enabling the center hole of the first end to be connected with a grinding machine center, grinding an auxiliary center hole on the auxiliary tool 2 through the center hole grinding machine, and enabling the auxiliary center hole to be tightly connected with the grinding machine center;
s20, carrying out grinding processing on the main shaft 1 for N times, wherein the sum of the processing amounts of the N times of grinding processing is equal to the target processing amount of the main shaft 1, and N is an integer greater than 1;
Each grinding process includes:
The second end of the main shaft 1 provided with the auxiliary tool 2 is arranged downwards, an auxiliary center hole is jointed with a center of a grinding machine, and the center hole is ground and processed on the basis of the center hole of the first end through a center hole grinding machine;
And taking down the main shaft 1 from the central hole grinding machine, removing the auxiliary tool 2, installing a central frame between a headstock and a tailstock of a lathe, supporting the main shaft 1 by the central frame, and grinding two ends of the main shaft 1 by the lathe.
In this embodiment, the grinding portion of the spindle 1 includes a central hole at two ends of the spindle 1 and two ends of the spindle 1, in order to avoid that the grinding time is long due to the oversized spindle 1, and finally, a large amount of heat generated by long-time grinding causes thermal expansion of the spindle 1 to affect the machining precision of the spindle 1, in this embodiment, the grinding process of the spindle 1 is performed N times, each grinding process includes machining the central hole at two ends of the spindle 1 and two ends of the spindle 1, the sum of the machining amounts of N grinding processes of each part of the spindle 1 is equal to the target machining amount of the part, and the machining amounts of each grinding process may be the same or different, which is not limited herein.
For the first grinding of the spindle 1, since the spindle 1 to be machined includes the spindle first end 101 and the spindle second end 102, the spindle first end 101 has a first end center hole located on an end face of the spindle first end 101, the first end center hole can be tightly engaged with the grinding machine center of the center hole grinding machine, that is, a diameter of the first end center hole is equal to or smaller than a maximum diameter of the grinding machine center. The second end 102 of the spindle has a second end center hole, the diameter of which is larger than the maximum diameter of the center of the grinding machine, so that when the second end 102 of the spindle is mounted down to the center hole grinding machine, the center of the grinding machine cannot support the second end center hole, and in order to solve this problem, the auxiliary tool 2 is mounted on the second end 102 of the spindle. The auxiliary tool 2 is mounted on the end surface of the second end 102 of the spindle, and specifically may be connected to the second end 102 of the spindle by a bolt, or may be connected to the second end 102 of the spindle by a specific fixture, and the specific connection manner is not limited herein. The grinding of the central hole in the auxiliary tool 2, which can be brought into close engagement with the grinding machine tip, enables the grinding machine tip to support the spindle 1 by means of the central hole in the auxiliary tool 2 when machining the first end 101 of the spindle.
Specifically, in actual operation, the auxiliary tool 2 is firstly installed at the second end 102 of the main shaft, then the center hole at the first end of the main shaft 1 is aligned and fixed with the center of the grinding machine, the center hole grinding machine is started, the auxiliary center hole is ground on the auxiliary tool 2 at the second end 102 of the main shaft, and the diameter of the auxiliary center hole is smaller than or equal to the maximum diameter of the center of the grinding machine. After finishing grinding, the main shaft 1 is taken down, an auxiliary center hole on the auxiliary tool 2 is aligned and fixed with the center of the grinding machine, the center hole grinding machine is started, and the center hole of the first end of the main shaft 1 is ground. The purpose of grinding the first end center hole is that: firstly, in the subsequent use of the spindle 1, there is a certain dimensional requirement for the first end center hole of the spindle 1, and secondly, when the spindle 1 is subsequently mounted laterally on a lathe, it is also necessary to enable the first end center hole of the spindle 1 to be mounted in correspondence with the tailstock center of the lathe.
After the first end center hole is ground, the spindle 1 is removed from the center hole grinder, and the auxiliary tool 2 is removed from the spindle second end 102, ready for the next grinding process by loading the spindle 1 laterally onto a lathe. The spindle 1 has a large size and a long axial length, and the axial line of the spindle 1 is bent and deviated from the rotating shaft due to the large mass of the protruding shaft, so that the machining vibration not only reduces the machining precision of the spindle, but also damages the spindle 1 and a lathe.
For this purpose, in this embodiment, the lathe is provided with a center frame, which is located between the headstock and tailstock of the lathe, and the spindle 1 is supported by the center frame through which the spindle 1 passes when mounted on the lathe. The specific axial position of the center frame can be determined according to the specific structure and processing requirements of the spindle 1, the center frame is not limited in this embodiment, and the spindle 1 can be supported in an auxiliary manner through the arrangement of the center frame, so that the deformation of the spindle 1 caused by gravity factors can be reduced, the axis of the spindle 1 is prevented from deviating from the rotating shaft of a lathe, the spindle 1 rotates to vibrate, and the processing precision of the spindle 1 is affected.
The machining contents of the spindle 1 on the lathe comprise grinding machining of the second end 102, the second end center hole, the first end 101 and the first end center hole of the spindle. Specifically, in actual operation, the first end 101 of the spindle can be clamped and fixed in a headstock of a lathe, the tailstock tip of the lathe is tightly propped in a center hole of the second end of the spindle 1, then the spindle 1 is driven to rotate by the lathe, the spindle 1 is supported by the center frame, and the second end 102 of the spindle is ground by a cutter. After the grinding is finished, the tailstock center is retracted, the lathe drives the spindle 1 to rotate again, and the cutter grinds the center hole at the second end of the spindle 1. And turning the main shaft 1, and finishing grinding processing on the first end 101 of the main shaft and the central hole of the first end in the same way. In addition, when the mass of the second end 102 of the spindle is large, the spindle 1 needs to be supported by the center rest when the second end 102 of the spindle and the center hole of the second end are ground, so as to avoid deformation of the spindle 1 due to the fact that the second end 102 of the spindle is far from the headstock of the lathe. In grinding the first end 101 and the central hole of the first end of the spindle, since the second end of the spindle 1 having a larger mass is clamped and fixed by the headstock and is closer to the headstock, it is considered that no additional center frame is arranged to support the spindle 1, and the center frame may be arranged to support the spindle 1.
When the spindle 1 completes the first grinding process of the second end 102, the second end center hole, the first end 101 and the first end center hole of the spindle on the lathe, the process of the second grinding process can be performed. In this embodiment, the second grinding still requires that the spindle 1 be mounted on the center hole grinder for grinding, and then mounted on the lathe for grinding. It is still necessary to first mount the auxiliary tool 2 to the second end 102 of the spindle, which differs from the primary grinding in that an auxiliary center hole has been formed in the auxiliary tool 2 during the secondary grinding, so that the auxiliary center hole can be directly used to align and fix the center of the grinding machine and grind the center hole at the first end of the spindle 1. The first grinding process is then repeated to grind the spindle second end 102, the second end center hole, the spindle first end 101, and the first end center hole on the lathe. According to the actual machining requirement, the steps can be repeated for the third, fourth to Nth grinding after the second grinding is finished.
Therefore, in the application, the grinding process of the main shaft 1 is firstly divided into N times, a margin is reserved for the target processing amount after the first grinding process is carried out, the grinding process of the subsequent times is carried out after the first grinding process is finished, the single grinding time is reduced, the influence caused by the thermal expansion of the main shaft 1 is effectively reduced, and the processing precision is higher, so that the problems that the required grinding size is correspondingly increased, the grinding required length is prolonged, the main shaft 1 is heated and expanded due to a large amount of heat generated during grinding, the actual grinding amount of the main shaft 1 is possibly smaller than the target amount after the grinding is finished, and the precision is reduced are solved.
Secondly, by installing the auxiliary tool 2 at the second end 102 of the spindle, installing the first end 101 of the spindle downwards onto a central hole grinding machine, and enabling the first end central hole to be jointed with a grinding machine center, grinding the auxiliary central hole on the auxiliary tool 2 through the central hole grinding machine, the auxiliary central hole can be tightly jointed with the grinding machine center, so that the auxiliary central hole machined on the auxiliary tool 2 can be jointed with the center of the central hole grinding machine center to support the spindle 1 when the first end 101 of the spindle is machined, and the problem that in the related art, the large-size spindle 1 is machined, the size of the central hole at one end of the spindle 1 is larger than that of the center of a conventional central hole grinding machine is solved, and the center cannot normally play a role in supporting and fixing the spindle 1;
In addition, when the spindle 1 is mounted on a lathe for transverse processing, the spindle 1 is supported by the center frame by mounting the center frame between the headstock and the tailstock of the lathe, so that the problem that the spindle 1 possibly forms bending deformation due to gravity factors and the processing precision is reduced because the spindle 1 is large in mass and long in axis compared with the normal-size spindle 1 in the related art because the spindle 1 is prevented from bending and deviating from a rotating shaft due to the fact that the spindle 1 is long in axis length and large in mass of an extending shaft and the processing vibration is even caused to damage to the spindle 1 and the lathe is solved.
In one embodiment of the spindle 1, the spindle 1 is sized to be of a large mass and bulk, wherein the diameter of the first end 101 of the spindle is smaller than the second end but the length of the first end is longer, the diameter of the second end 102 of the spindle is larger than the first end and the length is slightly shorter, and the mass is concentrated in the second end 102 of the spindle. Therefore, when the second end 102 of the spindle and the center hole of the second end are ground, the second end 102 of the spindle needs to be supported to reduce the deformation of the spindle 1, and at the same time, the damage of the spindle 1 to the lathe is avoided. To this end, in this embodiment, prior to installation of the center frame, spindle first end 101 is secured to the headstock, with the tailstock tip of the tailstock being abutted against the second end center hole;
An annular support groove is formed by machining on the spindle second end 102 by a lathe for assembly with a steady rest. In this embodiment, the annular support groove can cooperate with a center rest disposed at the second end 102 of the spindle such that the center rest is in a supported position on the spindle 1 while preventing the center rest from sliding in the axial direction of the spindle 1.
In one embodiment, grinding both ends of the spindle 1 by a lathe includes:
securing the first spindle end 101 to the headstock, supporting the second spindle end 102 with a center rest while the second end center hole may be tightened by a tailstock tip;
Grinding the second end 102 of the main shaft through a cutter, then withdrawing the center of the tailstock, and grinding a central hole of the second end through the cutter;
Turning the spindle 1, fixing the second end 102 of the spindle to the headstock, and tightly propping the tip of the tailstock against the central hole of the first end;
Grinding the first end 101 of the spindle;
And (5) withdrawing the tailstock center, and grinding the center hole of the first end.
Since the portion of the main shaft 1 that is ground by the lathe is relatively large and the processing time is relatively long, in order to reduce the expansion of the main shaft 1 caused by grinding, in this embodiment, the main shaft 1 is cooled during the grinding of the main shaft 1 by the lathe, that is, the main shaft 1 is cooled during the grinding of the main shaft 1 by the lathe, so that the temperature of the main shaft 1 is within a set range to reduce the thermal expansion of the main shaft 1 caused by grinding.
Specifically, the process of cooling the spindle 1 includes:
During the grinding process, a cooling medium is introduced into the grinding position of the spindle 1, so that the temperature of the spindle 1 is between 20 and 26 ℃, in one embodiment, the temperature of the spindle 1 can be stabilized between 22 and 24 ℃ by the cooling medium, and the temperature of the spindle 1, in particular the temperature of the grinding position of the spindle 1, can be acquired in real time by a corresponding temperature sensor. The cooling medium used for realizing the temperature control is a cooling liquid or a cooling gas, or a combination of the cooling liquid and the cooling gas is used.
In the present embodiment, after finishing one grinding process, the spindle 1 is placed in a constant temperature chamber for standing, so that the overall temperature of the spindle 1 is within a set range, and the thermal expansion of the spindle 1 due to grinding is reduced, so as to avoid the influence of the expansion of the spindle 1 caused by the temperature rise of the spindle 1 due to the last grinding process when the spindle 1 is repeatedly subjected to the grinding process. In this embodiment, the overall temperature of the spindle 1 after standing needs to be stabilized at 22-24 ℃, so that the expansion of the spindle 1 during the last grinding process can be retracted, thereby improving the processing precision of the next grinding process. In addition, if the temperature of the spindle 1 is high before one grinding process, the spindle 1 must be placed in a constant temperature chamber for standing so that the temperature of the spindle 1 is stabilized at 22-24 ℃ and then the process is performed.
In one connection mode of the auxiliary tool 2 and the second end 102 of the main shaft, a plurality of connection holes are formed in the auxiliary tool 2 along the circumferential direction, connection bolts are arranged in the connection holes, and the auxiliary tool 2 is connected with the second end 102 of the main shaft through the connection bolts.
In one embodiment of the steady rest, the steady rest comprises at least three circumferentially distributed support arms, the ends of which extend into the annular support groove.
Further, the machining accuracy error of the spindle 1 is mainly affected by several parameters: eccentricity of the spindle 1 after installation, thermal expansion of the spindle 1, tool feed and wear deviation, support displacement of the spindle 1 at the support position of the steady rest, deviation component due to deflection deformation of the spindle 1, deviation component due to vibration of the spindle 1. Therefore, in the machining process of the spindle 1, it is necessary to determine the machining accuracy error of the spindle 1.
In the above parameters, the supporting displacement of the spindle 1 at the supporting position of the center frame and the deviation component caused by the deflection deformation of the spindle 1 will affect the supporting position of the center frame to the spindle 1, i.e., the mounting position of the center frame on the lathe. The thermal expansion of the spindle 1 will affect the number of times the spindle is subjected to grinding, the more the number of times the spindle is subjected to the grinding, the smaller the thermal expansion of the spindle during the single grinding, and the fewer the number of times the spindle is subjected to the grinding, the larger the thermal expansion of the spindle during the single grinding.
Therefore, the machining accuracy error of the spindle 1 can be determined before the spindle 1 is subjected to multiple grinding operationsBased on the machining precision error/>And determining the installation position of the center frame and the machining amount of single grinding machining.
Further, determining the machining precision error of the spindle 1Comprising:
Acquiring the supporting displacement of the spindle 1 when each diameter part of the spindle 1 is supported by the center frame
Acquisition of deflection component of the spindle 1 due to flexural deformation of each diameter portion of the spindle 1 while being supported by the center frame
Acquiring thermal expansion of the spindle 1 during processing
Based on the support displacementDeviation component/>Thermal expansion/>Determining the machining precision error/>
In the machining method of the present application, the deformation amount of the spindle 1 during machining on the lathe is reduced by the arrangement of the center frame. Since the mass difference between the first end 101 and the second end 102 of the spindle is large, the placement position of the center frame affects the actual supporting effect, i.e. the final machining accuracy error of the spindle. Can be according to the support displacement of the main shaft 1 at the support position of the center frameAnd a deflection component/>, caused by deflection deformation of the spindle 1And determining the position on the main shaft, which is provided with the center frame and has the minimum machining precision error. Based on the determined position with the smallest machining accuracy error, the machining process of the spindle 1 is adjusted to the arrangement position of the center frame in combination with the actual machining process (i.e. whether machining is required for the determined position). For example, when the position where the determined machining accuracy error is smallest is a position on the spindle 1 where machining is not required, the center frame may be directly disposed at the position. When the position with the minimum machining precision error is determined to be the position on the spindle 1 to be machined, the center frame can be moved left and right to avoid the position.
Further, the machining accuracy error is also subject to eccentricity after the spindle 1 is mounted, thermal expansion of the spindle 1, tool feed and wear deviation, and deviation component of the spindle 1 due to vibration. Thus to determine the complete machining accuracy errorThe embodiment further comprises:
obtaining the eccentricity of the spindle after installation
Obtaining tool feed and wear deviations
Acquiring a deviation component of the spindle caused by vibration
According to the above parameters affecting the machining accuracy error of the spindle 1, the machining accuracy error is determined according to the following formula:
wherein, For processing precision error,/>For eccentricity after installation of spindle 1,/>For main shaft thermal expansion,/>For tool feed and wear bias,/>For the support displacement of the spindle 1 in the support position of the steady rest,/>As a deflection component due to deflection deformation of the spindle 1,/>Is a deviation component of the spindle 1 due to vibration;
wherein,
Eccentricity of spindle 1 after installationRefers to the deviation caused by the alignment of the center position of the spindle 1. Ideally, the headstock and tailstock of the lathe are exactly fixed with the center position of the spindle 1. In the actual machining process, the position of the tailstock center and the position of the chuck of the headstock are not necessarily completely fixed with the center of the spindle 1, so that deviation exists in the machining process, and the installation eccentric error is set as/>In the machining process of the spindle 1, the machining deviation due to the installation eccentricity error is/>
During the measurement process, the surface of the spindle 1 is subjected to temperature deformation due to the influence of the ambient temperature and the heat generated by the cutting friction of the cutter, so that the machining precision of the spindle 1 is influenced. The linear expansion coefficient of the main shaft material isTemperature deviation in grinding process is/>The diameter of the machining position on the spindle 1 is d, the deviation component/>, due to temperature deformation during machiningCan be expressed as/>
Machining of the spindle 1 is achieved by feeding of the cutting tool. In the machining process, the cutter is worn, so that a certain deviation exists between the actual machining size and the ideal machining size. Let the minimum resolution of the cutter feed amount beThe dimensional deviation of the tool before and after machining is/>Tool feed and wear deviation/>Can be expressed as/>
Ideally, the headstock and tailstock are exactly fixed and coaxial with the central position of spindle 1. When coaxiality deviation occurs between the headstock and tailstock, support displacement occurs during machining, and the total length of the spindle 1 is set asThe length of the diameter portion of the spindle 1 supported by the center frame is/>The coaxiality deviation of the position with the largest center offset of the spindle 1 is/>Support displacement/>, generated by the main shaft 1 at the center frame support positionCan be expressed as/>
,/>Is the length of the diameter part of the main shaft supported by the center frame, F is the average axial force exerted on the main shaft,/>Young's modulus of principal axis,/>For the cross-sectional area of the spindle, the cross-sectional area of the spindle 1 can be calculated by selecting a section of the spindle with the smallest diameter and the largest length. The main reason is that, since the flexural deformation is mainly caused by this section of the spindle 1, the smaller the diameter of the spindle 1, the larger the deformation amount. In order to further improve the calculation accuracy, all the diameter portions of the spindle 1 may be calculated by differential-first-integral method.
During machining, the spindle 1 is rotated by a motor of a lathe, after which a tool cuts the spindle 1 by feeding. During rotation of the spindle 1, the rotation of the position of any point on the spindle 1 can be regarded as a sinusoidal regular change. In the machining process, due to noise influence caused by vibration, small-amplitude swing of the spindle 1 occurs in the rotating process, that is, the actual rotating position at a certain point can be regarded as the superposition of the amplitude of sinusoidal rotation and noise vibration, so that deviation of cutting machining is generated. Wherein, the noise brought by the vibration can be obtained by the vibration sensor. The maximum amplitude of vibration is known asThe vibration-induced deviation component/>, of the spindle 1Can be expressed as/>
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A method of machining a large spindle, wherein a first end of the spindle has a first end center bore for close engagement with a grinding machine center of a center bore grinding machine, the method comprising:
Installing an auxiliary tool at the second end of the main shaft, downwards installing the first end of the main shaft to a center hole grinding machine, enabling the center hole of the first end to be connected with the center of the grinding machine, and grinding an auxiliary center hole on the auxiliary tool through the center hole grinding machine, wherein the auxiliary center hole is used for being tightly connected with the center of the grinding machine;
Performing grinding processing on the main shaft for N times, wherein the sum of the processing amounts of the grinding processing for N times is equal to the target processing amount of the main shaft, and N is an integer greater than 1;
Each of the grinding processes includes:
Setting the second end of the main shaft provided with the auxiliary tool downwards, enabling the auxiliary center hole to be jointed with the center of the grinding machine, and grinding a center hole through the center hole grinding machine on the basis of the center hole of the first end;
and removing the main shaft from the central hole grinding machine, removing the auxiliary tool, installing a central frame between a headstock and a tailstock of a lathe, installing the main shaft on the lathe, supporting the main shaft by the central frame, and grinding two ends of the main shaft by the lathe.
2. The method of claim 1, wherein the mass of the second end of the spindle is greater than the mass of the first end of the spindle; the method comprises the following steps:
Prior to installing the center frame, securing the spindle first end to the headstock, and tightening a tailstock tip of the tailstock against the second end center hole;
And forming an annular supporting groove for assembling with the center frame by grinding on the second end of the main shaft through the lathe.
3. The large-sized spindle machining method according to claim 2, wherein grinding machining is performed on both ends of the spindle by the lathe, comprising:
Securing the first end of the spindle to the head frame, supporting the second end of the spindle with the central frame;
grinding the second end of the main shaft and the center hole of the second end;
turning the spindle, fixing the second end of the spindle to the headstock, and propping the tailstock tip against the first end center hole;
grinding the first end of the main shaft;
And withdrawing the tailstock center, and grinding the first end center hole.
4. The large-sized spindle machining method according to claim 1, wherein the spindle is cooled during the grinding process so that the temperature of the spindle is within a set range.
5. The large-sized spindle machining method according to claim 4, wherein the cooling of the spindle during the grinding process includes:
and (3) introducing a cooling medium into the grinding position of the main shaft in the grinding process, so that the temperature of the main shaft is 20-26 ℃.
6. The method for machining a large-sized spindle according to claim 1, wherein a plurality of connecting holes are formed in the auxiliary tool in the circumferential direction, connecting bolts are arranged in the connecting holes, and the auxiliary tool is connected with the second end of the spindle through the connecting bolts.
7. The method of claim 2, wherein the central frame includes at least three circumferentially distributed support arms, the ends of the support arms extending into the annular support groove.
8. The large-sized spindle process method according to claim 1, further comprising, before each of the grinding processes:
determining machining precision errors of the spindle Based on the machining precision error/>And determining the installation position of the center frame and the machining amount of single grinding machining.
9. The large-sized spindle machining method according to claim 8, wherein a machining accuracy error of the spindle is determinedComprising:
Acquiring the supporting displacement of the main shaft when each diameter part of the main shaft is supported by the center frame ,/>,/>For the total length of the main shaft,/>Is the diameter part length supported by the center frame on the main shaft,/>Is the maximum deviation of coaxiality;
Acquiring deflection components of the spindle due to flexural deformation of the spindle when the diameter portions of the spindle are supported by the center frame ,/>,/>Is the length of the diameter part of the main shaft supported by the center frame, F is the average axial force exerted on the main shaft,/>Young's modulus of principal axis,/>Is the cross-sectional area of the spindle;
Acquiring thermal expansion of the spindle during processing ,/>,/>Is the linear expansion coefficient of the main shaft material,/>D is the diameter of the machining position on the main shaft for the temperature deviation in the grinding process;
based on the support displacement Deviation component/>Thermal expansion/>Determining the machining precision error/>
10. The large-sized spindle machining method according to claim 9, wherein a machining accuracy error of the spindle is determinedFurther comprising:
obtaining the eccentricity of the spindle after installation ,/>,/>Mounting an eccentric error for the spindle;
Obtaining tool feed and wear deviations ,/>,/>For minimum resolution of tool feed,/>Dimensional deviation of the cutter before and after machining;
acquiring a deviation component of the spindle caused by vibration ,/>,/>The maximum amplitude of the spindle vibration;
CN202410476055.3A 2024-04-19 2024-04-19 Large-size spindle machining method Active CN118060982B (en)

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JPH07246559A (en) * 1994-01-24 1995-09-26 Nippondenso Co Ltd Machining device
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JP2010158757A (en) * 2009-01-09 2010-07-22 Ntn Corp Grinding machine
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