CN117906913A - Automatic screening device and method for laser load capacity of high-power optical element - Google Patents
Automatic screening device and method for laser load capacity of high-power optical element Download PDFInfo
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Abstract
The invention discloses an automatic screening device and method for the laser load capacity of a high-power optical element, which are used for screening the reliability of the high-power optical element; the device comprises a high-power laser emission system, a multidimensional electric displacement platform, a high-power laser cut-off system, an online damage detection system, a real-time beam quality detection system and the like. The device utilizes high-power laser beams to automatically and continuously scan, irradiate and screen the large-caliber optical element, characterizes the surface morphology change of the optical element to be tested through a real-time beam quality detection system and acquires the temperature change information of the surface of the optical element to be tested under laser irradiation through an online damage detection system, thereby solving the problems that the thermal imaging method can not detect flaws on the surface of the optical element to be tested, the microscopic imaging method, the scattering method and the like can not measure the thermal deformation of the micro level, and obtaining the laser load capacity of the optical element to be tested through the real-time beam quality detection system and the online damage detection system.
Description
Technical Field
The invention belongs to the technical field of optical element detection, and particularly relates to an automatic screening device and method for laser load capacity of a high-power optical element.
Background
In the high-power laser device, the optical lens (comprising the optical substrate and the coating film) can realize the functions of light transmission, reflection, polarization, beam splitting, focusing, beam expanding, synthesis and the like under specific wavelength, effectively improves various performance indexes output by the laser device, controls the directivity and the stability of laser, and is a core device of the high-power laser device.
In recent years, with the increasing laser power level, optical elements are subjected to higher fluxes and operating times, which place higher performance demands on the optical elements. The unscreened optical element is easy to generate damage, abnormal temperature rise and deformation under the action of high-power laser, and causes performance degradation, so that the output index of the laser device is affected. Even under the irradiation of high-power strong laser, melting or cracking and other conditions occur, which causes unwanted strong stray light scattering or strong light transmission, and causes catastrophic failure of the system inside the whole laser device. Meanwhile, defects or impurities are inevitably introduced into the optical lens in various links such as processing, preparation, storage and use. Therefore, it is particularly important to perform high-power laser load capacity detection screening on the optical element used by the high-power laser device.
Chinese invention CN201110365740.1 discloses an optical element surface defect detecting system based on active scanning of laser beam, the invention actively scans the optical surface by means of two-dimensional rotating guiding mirror, and multiple photoelectric probes are distributed around the optical element to detect the scattering caused by optical surface defect. The invention CN201911259313.8 discloses a multichannel in-situ detection device and a detection method for subsurface defects of an optical element, wherein the device comprises three channels of a fluorescence confocal imaging system, a fluorescence lifetime imaging system and a photothermal absorption imaging system, the method is used for calculating fluorescence lifetime emitted by fluorescence of a target defect point as contrast of an image, and quantitatively measuring physical parameters in a microenvironment where the target defect point is positioned, so that a fluorescence radiation/non-radiation transition process after the defect absorbs laser energy can be reflected. Meanwhile, the photo-thermal absorption detection technology obtains weak absorption of the surface by detecting thermal deformation generated after the surface of the optical material is heated by the pumping light.
However, since the optical element inevitably has laser absorption under laser irradiation, heat accumulation and temperature gradient occur, thermal deformation occurs to cause surface shape parameter change of the element, the optical element is a precise instrument, 10 nm-level deformation of the optical element caused by temperature accumulation also affects the performance of the optical element, the surface shape parameter change caused by thermal deformation is difficult to detect by a scattering method, the surface shape parameter change caused by thermal deformation can be detected by a thermal imaging method, but the surface defect problem caused by uneven processing of the optical element is difficult to detect, the surface deformation of the optical element is difficult to detect by a microscopic imaging method for the surface deformation of the optical element at the level of 10nm or less, and the microscopic imaging method is suitable for specific optical element surface deformation types, such as scratches, pits and the like, and the tiny swelling of the thermal deformation of the surface of the optical element is difficult to detect.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides an automatic screening device and method for the laser load capacity of a high-power optical element, wherein the device comprises a real-time beam quality detection system and an online damage detection system, the real-time beam quality detection system is used for representing the surface morphology change of the optical element to be tested, and the online damage detection system is used for acquiring the temperature change information of the surface of the optical element to be tested under the irradiation of laser, so that the problems that the thermal imaging method cannot detect flaws on the surface of the optical element to be tested, the microscopic imaging method, the scattering method and the like cannot measure the micro-level thermal deformation are solved, and the laser load capacity of the optical element to be tested is obtained through the real-time beam quality detection system and the online damage detection system.
In order to achieve the above object, the present invention provides the following technical solutions:
In one aspect, the present invention provides an automatic screening device for laser loading capacity of a high-power optical element, the device comprises a high-power laser emission system, a multi-dimensional electric displacement platform, a real-time beam quality detection system, an online damage detection system and a high-power laser cut-off system, wherein the high-power laser emission system is used for detecting the damage of the laser;
The real-time beam quality detection system comprises a high beam quality laser, a focusing lens and a CCD; the high-beam quality laser emits high-beam quality laser radiation on the tested optical element, the high-beam quality laser radiation is reflected to the focusing lens through the tested optical element, the CCD detection surface is positioned on the focal plane of the focusing lens, and the CCD records and measures the position and the size of a light spot of the high-beam quality laser reflected by the tested optical element on the focusing lens, so that the surface topography change of the tested optical element is represented;
The online damage detection system comprises an infrared camera and a matched computer; acquiring temperature change information of the surface of the optical element to be measured under laser irradiation through the infrared camera measurement, and storing, analyzing and generating a temperature and time curve through the temperature change information acquired through the infrared camera measurement by the matched computer;
The surface morphology change of the optical element to be measured is represented by the spot position change information of the high-beam quality laser recorded by the CCD, and the laser load capacity of the optical element to be measured is obtained by combining the spot position change information of the high-beam quality laser recorded by the CCD with the temperature change information obtained by the measurement of the infrared camera, so that the matched computer is realized;
further, the online damage detection system further comprises a visible light microscope camera, the visible light microscope camera is connected with a matched computer, a light supplementing lamp for improving photographing and video imaging quality is arranged on the visible light microscope camera, and morphology change information of the surface of the optical element to be detected is recorded through the visible light microscope camera;
Further, the multidimensional electric displacement platform comprises a carrying platform for carrying the optical element to be tested, and a tool for fixedly connecting the optical element to be tested is arranged on the carrying platform;
Further, the multidimensional electric displacement platform further comprises a multidimensional movement unit, wherein the multidimensional movement unit is connected with the carrying platform and comprises a plurality of dimensional movement/rotation shafts, and the carrying platform is driven to move through the movement/rotation shafts;
Further, the multidimensional electric displacement platform also comprises a control box body, wherein the control box body is provided with a matched computer, and the control box body controls the movement/rotation shafts of the multidimensional movement unit to move at the speed and the movement track set on the matched computer;
Further, the high-power laser emission system comprises a Wash-level fiber laser, and high-power laser is generated by the Wash-level fiber laser;
furthermore, the Wanware-level fiber laser is provided with a laser collimation head for keeping the direction of high-power laser generated by the Wanware-level fiber laser when the size of a light spot is adjusted;
Further, the high-power laser emission system further comprises a laser beam adjusting device, wherein the laser beam adjusting device comprises a plurality of adjustable lens groups, and the laser spot size of high-power laser generated by the Van-type fiber laser is adjusted through the plurality of adjustable lens groups;
Furthermore, the high-power laser emission system also comprises a matched water cooler of the optical fiber laser, and the matched water cooler of the optical fiber laser is connected with the Wanwatt-level optical fiber laser and the laser beam adjusting device;
Further, the high-power laser cut-off system comprises a turning mirror which is arranged on a high-power laser path reflected or transmitted by the tested optical element;
Further, the high-power laser cut-off system also comprises a cylindrical laser collector, wherein the cylindrical laser collector is arranged on the direction of a path of a high-power laser beam changed by a turning mirror, the bottom of the cylindrical laser collector is a reflecting cone with polished surface, the side wall of the cylinder is subjected to blackening and roughening process, a water channel is dug in the cylinder, and the high-power laser is cut off by the cylindrical laser collector;
Further, the high-power laser cut-off system further comprises a beam expander, wherein the beam expander is arranged on the front end of the cylindrical laser collector in the direction of changing the path of the high-power laser beam through the turning mirror;
further, the high-power laser cut-off system further comprises a matched laser water cooler, the matched laser water cooler is connected with the cylindrical laser collector, and the temperature of the cylindrical laser collector raised due to the high-power laser absorption is reduced through the matched laser water cooler;
On the other hand, the invention provides an automatic screening method for the laser load capacity of a high-power optical element, which comprises the following steps:
S1, placing a cleaned tested optical element on a carrying platform and fixedly connecting the tested optical element with a tool, starting a Wanwave-level optical fiber laser to generate high-power laser, adjusting peak power density, output wavelength and the like of the high-power laser, starting a high-beam quality laser to generate high-beam quality laser, enabling the high-beam quality laser and the high-power laser to act on the same point of the tested optical element together, and further adjusting the spot size of the high-power laser through a laser beam adjusting device;
S2, determining a scanning range, a central coordinate of laser action and a speed for scanning the optical element to be detected according to an actual working range and a power load of the optical element to be detected, and inputting the parameters and the curvature of the optical element to be detected into a computer motion control program matched with a control box body to obtain a motion scanning track of the co-sphere center of the optical element to be detected;
S3, checking whether the reflection positions of the high-power laser and the high-beam quality laser meet the requirements, and adjusting an infrared camera and a visible light microscopic camera, wherein the multi-dimensional electric displacement platform drives the optical element to be tested to move back and forth in an S shape, so that scanning in a test area is completed;
S4, storing and monitoring time coordinate relation, visible light microscopic camera video recording, infrared camera measurement temperature data and CCD measurement recorded high-beam quality laser spot size and position data in real time through a matched computer in the scanning test process, and comprehensively giving out high-power load capacity of the screened lens through the data;
14. Further, in step S2, the speed of scanning the optical element to be measured is:
;
Wherein v is the speed of scanning the optical element to be tested; omega eff is the effective spot radius of the high-power laser, namely the maximum spot radius of which the high-power laser power density exceeds the actual load laser peak power density in the target plane test of the optical element to be tested, and the size of the spot radius is measured by a visible light microscope camera; t is single-point irradiation time, namely the time for a certain point of the optical element to be detected to receive laser exceeding the actual load;
Further, in step S2, the method for obtaining the central coordinate of the laser action includes: after the optical element to be measured is fixed on the object carrying platform, laser guide light acts on the edge of the optical element to be measured, the edge coordinate at the moment is recorded, and the center coordinate of the lens is obtained by subtracting half of the size of the optical element to be measured from the edge coordinate.
In general, the above technical solutions conceived by the present invention, compared with the prior art, enable the following beneficial effects to be obtained:
1. According to the real-time beam quality detection system, the surface morphology change of the optical element to be detected is represented through the spot position change information of the high-beam quality laser recorded by the CCD, the defect problem that the surface of the optical element to be detected cannot be detected by a thermal imaging method and the thermal deformation problem that micro-level cannot be measured by a microscopic imaging method, a scattering method and the like are solved, and the spot position change information of the high-beam quality laser recorded by the CCD is combined with the temperature change information obtained by measuring an infrared camera of the online damage detection system, so that the laser load capacity of the optical element to be detected is obtained by the matched computer.
2. The multidimensional electric displacement platform comprises a multidimensional movement unit, wherein the multidimensional movement unit is provided with a plurality of dimensional movement/rotation shafts, the detected optical element is driven to move through the plurality of dimensional movement/rotation shafts, so that the working range of the detected optical element is fully covered by laser, the detection screening of the detected optical element is optimized from point detection to surface detection, the missing detection and the wrong detection during the detection screening of the laser load capacity of the detected optical element are avoided, the detection screening accuracy is greatly improved, and the movement/rotation shafts of the plurality of dimensions can finish different detection screening experimental schemes designed for different types of detected optical elements, and the detection screening accuracy and the applicability of the device are improved.
3. The online damage detection system comprises an infrared camera, a visible light microscope and a matched computer, the temperature information and the morphology information of the surface of the optical element to be detected, such as the temperature information, the high-temperature area size and the like, are accurately obtained through the high-precision infrared camera and the visible light microscope of the online damage detection system, and the spot position change information of the high-quality light beam recorded by the real-time light beam quality detection system, such as the spot position deviation size, the deviation speed and the like of the high-quality light beam, is matched, and the relationship between the micro change of the surface morphology of the optical element to be detected and the surface temperature of the optical element 6 to be detected due to the thermal deformation of the level of 10nm and the similar micro level is obtained, so that the laser load capacity of the optical element to be detected can be obtained, and the research and the detection of the optical element to be detected are more comprehensive.
4. The high-power laser cut-off system comprises a cylindrical laser collector, a beam expander and a matched laser water cooler, wherein diffracted or transmitted laser is collected through the cylindrical laser collector, and the beam expander expands the beam spot of the diffracted or transmitted laser collected by the cylindrical laser collector, so that the diameter of the laser beam is enlarged, the power density of the laser is reduced, the damage risk of the cylindrical laser collector is reduced, and the safety of the device in the use process is improved; and the matched laser water cooler is matched with the internal water channel of the cylindrical laser collector, so that the damage of the cylindrical laser collector caused by overhigh temperature due to laser absorption is prevented, and the safety and stability of the device in the use process are improved.
Drawings
FIG. 1 is a schematic diagram of a device for automatically screening laser loading capacity of a high-power optical element according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a high-power laser emission system of an automatic screening device for laser loading capacity of a high-power optical element according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a real-time beam quality detection system of an automatic screening device for laser loading capacity of a high-power optical element according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an on-line damage detection system of an automatic screening device for laser loading capacity of a high-power optical element according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a high-power laser cut-off system of an automatic screening device for laser loading capacity of a high-power optical element according to an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating a laser transmission direction of an automatic screening device for laser loading capacity of a high-power optical element according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a motion trajectory of an optical element to be tested of an apparatus for automatically screening laser loading capacity of a high-power optical element according to an embodiment of the present invention;
Like reference numerals denote like technical features throughout the drawings, in particular: the laser device comprises a 1-high-power laser emission system, a 2-multi-dimensional electric displacement platform, a 3-real-time light beam quality detection system, a 4-online damage detection system, a 5-high-power laser cut-off system, a 6-measured optical element, a 101-Wanwave level fiber laser, a 102-fiber laser matched water cooler, a 103-laser beam adjusting device, a 104-laser collimation head, a 105-high-power laser, a 201-multi-dimensional motion unit, a 202-control box, a 203-carrying platform, a 301-high-beam quality laser, a 302-high-beam quality laser, a 303-focusing lens, a 304-CCD, a 401-visible light microscope camera, a 402-infrared camera, a 403-matched computer, a 501-folding mirror, a 502-beam expanding mirror, a 503-cylindrical laser collector, a 504-matched laser water cooler and a 601-scanning line spacing.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1-5, an embodiment of the present invention provides an automatic screening device for laser loading capacity of a high-power optical element, which comprises a high-power laser emission system 1, a multi-dimensional electric displacement platform 2, a real-time beam quality detection system 3, an online damage detection system 4 and a high-power laser cut-off system 5; the high-power laser emission system 1 is used for generating laser to irradiate the optical element 6 to be tested, the high-beam quality laser 301 of the real-time beam quality detection system 3 is used for emitting a parallel reference laser, the multi-dimensional electric displacement platform 2 is used for driving the optical element 6 to be tested to perform planar motion, scanning of a test area of the optical element 6 to be tested is completed, the real-time beam quality detection system 3 and the online damage detection system 4 are used for detecting whether the surface of the optical element 6 to be tested is deformed or not, wherein the online damage detection system 4 comprises an infrared camera 402 and a matched computer 403, the infrared camera 402 and the matched computer 403 can be used for measuring and recording temperature and time curves of a detection area of the optical element 6 to be tested, the real-time beam quality detection system 3 comprises a focusing lens 303 and a CCD304, the CCD304 is arranged on a focal plane of the focusing lens 303, the parallel reference laser emitted by the CCD304 is reflected by the optical element 303 to be focused on the focal plane of the focusing lens, the light spot size and the position change condition of the parallel reference laser, the surface of the optical element 6 to be tested is characterized, the surface of the optical element 6 to be tested is irradiated with high-power 105, therefore, the deformation of the optical element 6 to be tested can be directly deformed or not is directly deformed due to the deformation of the optical element 6 in a deformation detection method, compared with the thermal deformation of the optical element 6 in the surface of the invention, the surface is directly deformed, compared with the surface of the optical element is deformed, and the surface is deformed by the surface of the optical element 6 to be tested by the method, and the temperature load capacity of the optical element 6 to be measured can be obtained by matching the recorded spot position data on the CCD304 with the temperature and time curves recorded by the infrared camera 402 and the matched computer 403.
Referring to fig. 2, the high-power laser emission system 1 comprises a vanwatt-level fiber laser 101, a fiber laser matched water cooler 102 and a laser beam adjusting device 103; the optical fiber laser 101 comprises a laser collimation head 104, the laser with high power and high peak power density is generated by the optical fiber laser 101 and irradiated on the surface of the optical element 6 to be tested, the maximum output laser power is more than or equal to 10kW, the continuous use time is not less than 3 h/time, the peak power density is required to reach the actual load power density level of the optical element 6 to be tested, and the output wavelength of the optical fiber laser 101 is required to be within the applicable wavelength range of the optical element 6 to be tested; the laser beam adjusting device 103 mainly comprises a plurality of adjustable lens groups, which are connected with the laser collimating head 104 of the vanaw-level fiber laser 101, and the laser spot size output by the vanaw-level fiber laser 101 is adjusted by adjusting the relative positions of the adjustable lens groups; the optical fiber laser matching water cooler 102 provides cooling for the Wanwave-level optical fiber laser 101, the laser alignment head 104 and the laser beam adjusting device 103.
Referring to fig. 3, when detecting the optical element 6 to be detected, the mastering level fiber laser 101 generates high-power laser light 105 to irradiate the surface of the optical element 6 to be detected, and the working range of the optical element 6 to be detected is subjected to indiscriminate irradiation test, so as to equivalent the laser load working condition of the optical element 6 to be detected in actual use, the generated laser light can meet the parameter requirements of the optical element 6 to be detected in the aspects of peak power density, output wavelength and the like, the output laser power can be adjusted, the optical element 6 to be detected suitable for different parameter requirements is realized, the applicability of the device of the invention is improved, meanwhile, the size of the light spot of the laser generated by the Wanware-level optical fiber laser 101 is selectable through a plurality of adjustable lens groups included by the laser beam adjusting device 103, so that the laser provided by the high-power laser emitting system 1 can meet various testing requirements, the applicability of the device is improved, the generated laser keeps collimated in the direction while the size of the light spot is adjusted through the laser collimating head 104, the stability of the high-power laser emitting system 1 in the use process is ensured, and the cooling provided by the water cooling machine 102 matched with the optical fiber laser is realized for the Wanware-level optical fiber laser 101, the laser collimating head 104 and the laser beam adjusting device 103, so that the stability in the use process of the high-power laser emitting system 1 is ensured.
Referring to fig. 1, the multidimensional electric displacement platform 2 comprises a multidimensional movement unit 201, a control box 202 and an object carrying platform 203, wherein the multidimensional movement axes comprise an X-axis movement axis, a Y-axis movement axis, a Z-axis movement axis, a horizontal rotation axis and a vertical rotation axis, which are respectively an X-axis movement axis, a Y-axis movement axis, a Z-axis movement axis, a horizontal rotation axis and a vertical rotation axis from bottom to top in sequence, the movement/rotation axes of the multiple dimensions can independently move at the same time, specifically, the X-axis movement range is 0-1.5m, the Y-axis movement range is 0-0.3m, the Z-axis movement range is 0-0.3m, and the rotation axis rotation range is-15 ° to 15 °; the carrying platform 203 is similar to an optical bread board and is arranged on a vertical rotating shaft of the multi-dimensional motion unit 201, and a tool for fixing the optical element 6 to be tested is arranged on the carrying platform 203; the control box 202 is connected to a plurality of dimensional motion/rotation axes, including a matched computer, and controls the plurality of dimensional motion/rotation axes to move at a speed and a motion track set on the matched computer.
Preferably, when the optical element 6 to be tested is subjected to laser load capacity screening, the optical element 6 to be tested is mainly moved by an X-axis movement axis and a Z-axis movement axis in the scanning process; for the curved-surface type optical element 6 to be tested, besides the motion of the X-axis motion axis and the Z-axis motion axis, the horizontal rotation axis, the Y-axis motion axis and the vertical rotation axis also move at the same time, and the motion/rotation axes with multiple dimensions drive the carrying platform 203 and the optical element 6 to be tested fixed on the carrying platform 203 through the fixture to perform the "S" type back and forth motion, the relative motion track of the high-power laser 105 on the optical element 6 to be tested is shown in fig. 7, and the lens moves back and forth until the whole test area is covered. The scan line spacing 601 is equal to the effective spot radius omega eff of the high-power laser 105. And the scanning speed v is:
;
Wherein v is the speed of scanning the optical element 6 to be tested; omega eff is the effective spot radius of the high-power laser 105, namely the maximum spot radius of the high-power laser 105 with the power density exceeding the peak power density of the actual load laser, which is tested on the target plane of the tested optical element 6, and the size of the maximum spot radius is measured by the visible light microscope camera 401; t is single-point irradiation time, namely the time for a certain point of the optical element to be detected to receive laser exceeding the actual load.
When the tested optical element 6 is subjected to laser load capacity screening, the multi-dimensional electric displacement platform 2 drives the tested optical element 6 to move, wherein the tested optical element 6 is fixedly connected through a tool arranged on the loading platform 203, so that the stability of the tested optical element 6 during detection and screening is ensured; the object carrying platform 203 and the tested optical element 6 fixedly connected with the tool on the object carrying platform 203 are driven to carry out S-shaped reciprocating motion through the motion/rotation shafts with multiple dimensions, so that the whole coverage type detection of the working range of the tested optical element 6 is realized, the missing detection and the wrong detection during the detection and screening of the laser load capacity of the tested optical element 6 are avoided, the detection and screening accuracy is greatly improved, the detection and screening accuracy of the laser load capacity of the tested optical element 6 is improved from point detection to surface test, the detection and screening accuracy of different experimental schemes can be carried out for the tested optical element 6 with multiple dimensions through the motion/rotation shafts, and the detection and screening accuracy and the applicability of the device are improved; the control box 202 sets the movement speed and the movement track of the movement/rotation shaft with multiple dimensions, so that multiple screening detection test schemes can be adapted when the tested optical element 6 is screened for the laser load capacity, and the applicability of the device is improved.
Referring to fig. 3, the real-time beam quality detection system 3 includes a high beam quality laser 301, a focusing lens 303, and a CCD304; the laser radiation with high beam quality generated by the high beam quality laser 301 is on the tested optical element 6, preferably, the high beam quality laser 301 is a helium-neon laser or an optical fiber laser, the power of the high beam quality laser is milliwatt level, the divergence angle of the high beam quality laser 302 generated by the high beam quality laser 301 is not more than 1mrad, and the spot diameter is 6mm; the focusing lens 303 is disposed on a beam path of the laser light generated by the high beam quality laser 301 to the optical element 6 to be measured, so that the laser light is reflected by the optical element 6 to be measured, and the focal length of the focusing lens 303 is 1m; the detection surface of the CCD304 is located on the focal plane of the focusing lens 303, and the position and the size of the light spot of the high-beam quality laser 302 reflected by the measured optical element 6 on the focusing lens 303 are recorded and measured by the CCD 304.
When the optical element 6 to be tested is tested, laser is generated by a Wanware-level optical fiber laser 101 and irradiated on the surface of the optical element 6 to be tested, high-beam quality laser 302 is generated by a high-beam quality laser 301 and irradiated on the optical element 6 to be tested, meanwhile, the high-beam quality laser 301 is adjusted to enable the high-power laser 105 and the high-beam quality laser 302 to act on the same point on the surface of the optical element 6 to be tested, when the defect defects such as bulges exist on the surface of the optical element 6 to be tested or the surface thermal deformation of the optical element 6 to be tested, which is generated by radiation absorption of the high-power laser 105, occur, the position of a light spot on a focal plane of a focusing lens 303 of the high-beam quality laser 302 reflected by the surface of the optical element 6 to be tested is changed, and is measured and recorded by CCD 304. Compared with a thermal imaging method, the method can detect the defect problem of the surface of the optical element 6 to be detected caused by uneven processing, and has more comprehensiveness compared with the thermal imaging method and the microscopic imaging method.
Referring to fig. 4, the online damage detection system 4 includes a visible light microscope camera 401, an infrared camera 402 and a mating computer 403; the surface morphology change information of the optical element 6 to be measured under the irradiation of the high-power laser 105 is obtained through measurement of the visible light micro camera 401, a light supplementing lamp is arranged on the visible light micro camera 401, and the visible light micro camera 401 can adjust the functions of magnification, photographing, video recording and the like; the infrared camera 402 is used for measuring and acquiring the temperature change information of the surface of the optical element 6 to be measured under the irradiation of the high-power laser 105, and particularly, when the infrared camera 402 is used for measuring the temperature change of the surface of the optical element 6 to be measured, the temperature precision is less than or equal to 0.1 ℃ and the time precision is less than or equal to 0.1s; the visible light microscope camera 401 and the infrared camera 402 are connected with a matched computer 403, the shot and acquired surface related information of the measured optical element 6 is transmitted to the matched computer 403 for storage and analysis, the visible light microscope camera 401 is used for measuring the acquired surface morphology change information of the measured optical element 6, the matched computer 403 is used for measuring defects, recording damage sizes and other works, the infrared camera 402 is used for measuring the acquired surface temperature change information of the measured optical element 6, and the matched computer 403 is used for recording and generating a temperature and time curve.
When the laser load capacity detection screening is carried out on the optical element 6 to be detected, the temperature information and the morphology information of the surface of the optical element 6 to be detected are accurately obtained through the high-precision infrared camera 402 and the visible light microscope camera 401 of the online damage detection system 4, and the light supplementing lamp is arranged on the visible light microscope camera 401, so that the accuracy of obtaining the morphology information of the surface of the optical element 6 to be detected by the online damage detection system 4 is improved; the relationship between the micro change of the surface morphology of the optical element 6 to be measured and the surface temperature of the optical element 6 to be measured caused by the thermal deformation of 10nm level and similar micro level is obtained by analyzing and storing the morphology information and the temperature information, such as the temperature information, the high temperature area size and the like, acquired by the visible light micro camera 401 and the infrared camera 402, and the information of the spot position change of the high beam quality laser 302, such as the spot position deviation size, the deviation speed and the like, which are recorded by the CCD304 of the real-time beam quality detection system 3, is obtained, so that the laser load capacity of the optical element 6 to be measured can be obtained, and the research and detection of the optical element 6 to be measured are more comprehensive.
Referring to fig. 5, the high-power laser cut-off system 5 includes a turning mirror 501, a beam expander 502, a cylindrical laser collector 503 and a matched laser water cooler 504; the turning mirror 501 is arranged on the path of the high-power laser 105 reflected or transmitted by the optical element 6 to be tested, and the direction of the path of the laser beam passing through the surface of the turning mirror 501 is changed; the beam expander 502 is disposed in a direction of changing the path direction of the laser beam by the beam expander 501, and expands the spot of the laser beam passing through the beam expander 502 without changing the path direction of the laser beam; the cylindrical laser collector 503 is arranged behind the beam expander 502 along the direction of changing the path of the laser beam by the deflector 501, specifically, the cylindrical laser collector 503 is made of pure copper material, the bottom of the cylindrical laser collector is a reflecting cone with polished surface, the side wall of the cylinder is subjected to blackening and roughening process, and a water channel is dug in the cylindrical laser collector; the matched laser water cooler 504 is connected with the cylindrical laser collector 503, so that the cylindrical laser collector 503 is prevented from being too high in temperature.
In the high-power laser cut-off system 5, laser reflected, diffracted or transmitted by the tested optical element 6 sequentially passes through the turning mirror 501 and the beam expander 502 and then enters the laser collector, wherein the direction of a laser beam path passing through the surface of the turning mirror 501 is changed by the turning mirror 501, so that the diffraction and transmission high-power laser 105 in different laser path directions is integrated, the required volume of the high-power laser cut-off system 5 is reduced, the position of the turning mirror 501 is adjusted according to the requirement, and the direction of the laser beam path passing through the surface of the turning mirror is adjusted, so that the position of the high-power laser cut-off system 5 in the device is changed, and the device structure is more ingenious and compact or is more suitable for experimental requirements; the beam expander 502 expands the laser beam spot passing through the laser beam expander, so that the diameter of the laser beam is increased, the power density of laser is reduced, the damage risk of the cylindrical laser collector 503 is reduced, and the safety of the device in the use process is improved; the matched laser water cooler 504 is matched with an internal water channel of the cylindrical laser collector 503, so that the damage of the cylindrical laser collector 503 caused by overhigh temperature due to laser absorption is prevented, and the safety and stability of the device in the use process are improved.
As shown in fig. 6, an embodiment of the present invention provides a laser transmission direction of an automatic screening device for laser loading capacity of a high-power optical element, first, a vanwatt-level fiber laser 101 starts to work to generate high-power laser 105, and a high-beam quality laser 301 generates high-beam quality laser 302, where the high-power laser 105 is subjected to adjustment of its spot size by a laser beam adjusting device 102, and then the high-beam quality laser 302 acts on the surface of the optical element 6 to be tested together; the tested optical element 6 is driven by the carrying platform 203 to reciprocate along an S-shaped track, and laser continuously scans the surface of the tested optical element. The on-line damage detection system 4 is used for measuring the surface change of the lens when the lens is irradiated by laser; further, the high beam quality laser 302 is reflected to the focusing lens 303 through the optical element 6 to be measured, and the high power laser 105 reflected or transmitted through the optical element 6 to be measured is cut off by the high power laser cut-off system 5.
The embodiment of the invention provides a high-power optical element laser load capacity automatic screening method, which is realized by applying the high-power optical element laser load capacity automatic screening device and comprises the following specific steps:
S1, placing the cleaned tested optical element 6 on an object carrying platform 203, fixing the tested optical element 6 through a tool on the object carrying platform 203, enabling the surface of the tested optical element 6 to be parallel to an X-axis motion axis and a Z-axis motion axis plane, starting a Wanware-level fiber laser 101 to generate high-power laser 105, selectively adjusting the peak power density, the output wavelength and the like of the high-power laser 105 according to parameters of the tested optical element 6, starting a high-beam quality laser 301 to generate high-beam quality laser 302, enabling the high-beam quality laser 302 and the high-power laser 105 to act on the same point of the tested optical element 6 together, and adjusting the spot size of the high-power laser 105 through a laser beam adjusting device 103 to require the spot diameter of the high-power laser to be smaller than that of the high-beam quality laser 302.
S2, after the optical element 6 to be measured is fixed on the carrying platform 203, the central coordinate of the laser action is determined, the laser guiding light is easy to observe when acting on the edge of the optical element 6 to be measured, and the central coordinate of the lens is obtained by subtracting half of the size of the optical element 6 to be measured from the edge coordinate; the scanning range is determined according to the actual working condition, and the requirement is larger than the actual load area; the velocity v of the scanning measured optical element 6 is expressed as follows:
;
Wherein v is the speed of scanning the optical element 6 to be tested; omega eff is the effective spot radius of the high-power laser 105, namely the maximum spot radius of the high-power laser 105 with the power density exceeding the peak power density of the actual load laser, which is tested on the target plane of the tested optical element 6, and the size of the maximum spot radius is measured by the visible light microscope camera 401; t is single-point irradiation time, namely the time for a certain point of the optical element to be detected to receive laser exceeding the actual load.
The three parameters of the central coordinate, the scanning range and the speed v of scanning the optical element 6 to be tested, which are acted by the laser, are input into a computer motion control program matched with the control box 202 together with the curvature of the optical element 6 to be tested, and the control program outputs the motion scanning track of the common sphere center of the optical element 6 to be tested.
S3, checking whether the high-power laser 105 is reflected to a turning mirror 501 of the high-power laser cut-off system 5 and whether a focus of the high-beam quality laser 302 focused by a focusing lens 303 is on a CCD304 detection surface; the focal length and the measuring range of the infrared camera 402 and the visible light microscope camera 401 are adjusted, and a small area where the laser is located is selected by the measuring range; after the high-power laser 105 outputs according to the set spot size and power, the optical element 6 to be tested performs scanning motion in an S-shaped track according to the set program, and when the optical element 6 to be tested performs translational scanning in the X-axis direction, the vertical rotation axis, the horizontal rotation axis and the Y-axis motion axis simultaneously move to ensure that each test point of the optical element 6 to be tested moves to the same position of a laser beam, so that two laser beams on the optical element 6 to be tested always act simultaneously, and the reflected light beam is always fixed.
S4, storing and monitoring a time coordinate relation, video recording of a visible light microscopic camera 401, temperature data measured by an infrared camera 402 and spot size and position data measured and recorded by a CCD304 in real time through a matched computer 403 in the scanning test process; recording position coordinates, temperature rise data and pointing offset and size change data of the high-beam quality laser 302 of the abnormal measured optical element 6 and surface morphology change of the measured optical element 6 by a matched computer 403; the high-power loading capacity of the screened lens is given through the data synthesis.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (16)
1. The automatic screening device for the laser load capacity of the high-power optical element is characterized by comprising a high-power laser emission system (1), a multi-dimensional electric displacement platform (2), a real-time beam quality detection system (3), an online damage detection system (4) and a high-power laser cut-off system (5), wherein the high-power laser emission system is used for detecting the laser load capacity of the high-power optical element;
the real-time beam quality detection system (3) comprises a high beam quality laser (301), a focusing lens (303) and a CCD (304); the high-beam quality laser (301) emits high-beam quality laser (302) to radiate on the tested optical element and reflects the high-beam quality laser to the focusing lens (303) through the tested optical element, the detection surface of the CCD (304) is positioned on the focal plane of the focusing lens (303), and the position and the size of a light spot of the high-beam quality laser (302) reflected by the tested optical element on the focusing lens (303) are recorded and measured through the CCD (304), so that the surface morphology change of the tested optical element is represented;
The online damage detection system (4) comprises an infrared camera (402) and a matched computer (403); measuring and acquiring temperature change information of the surface of the optical element to be measured under laser irradiation by the infrared camera (402), and storing and analyzing the temperature change information by the matched computer (403) to generate a temperature and time curve;
the surface morphology change of the optical element to be measured is represented by the spot position change information of the high-beam quality laser (302) recorded by the CCD (304), and the laser load capacity of the optical element to be measured is obtained by combining the spot position change information of the high-beam quality laser (302) recorded by the CCD (304) with the temperature change information obtained by measurement of the infrared camera (402).
2. The high-power optical element laser load capacity automatic screening device according to claim 1, wherein the on-line damage detection system (4) further comprises a visible light microscope camera (401),
The visible light microscope camera (401) is connected with the matched computer (403), a light supplementing lamp for improving photographing and video imaging quality is arranged on the visible light microscope camera (401), and the appearance change information of the surface of the optical element to be measured is recorded through the visible light microscope camera (401).
3. The automatic screening device for the laser load capacity of the high-power optical element according to claim 1, wherein the multi-dimensional electric displacement platform (2) comprises a carrying platform (203) for carrying the optical element to be tested, and a tool for fixedly connecting the optical element to be tested is arranged on the carrying platform (203).
4. A high-power optical element laser load capacity automatic screening device according to claim 3, wherein the multi-dimensional electric displacement platform (2) further comprises a multi-dimensional motion unit (201), the multi-dimensional motion unit (201) is connected with the carrying platform (203) and comprises a motion/rotation shaft with multiple dimensions, and the carrying platform (203) is driven to move through the motion/rotation shaft.
5. The automatic screening device for laser load capacity of high-power optical element according to claim 4, wherein the multi-dimensional electric displacement platform (2) further comprises a control box (202), the control box (202) is provided with a matched computer, and the multi-dimensional movement/rotation shaft of the multi-dimensional movement unit (201) is controlled to move at a speed and a movement track set on the matched computer.
6. A high power optical element laser load capacity autofilter device according to any one of claims 1-5, characterized in that the high power laser emitting system (1) comprises a vanwatt level fiber laser (101), by which vanwatt level fiber laser (101) high power laser light (105) is generated.
7. The automatic screening device for laser loading capacity of high-power optical element according to claim 6, wherein the valance level fiber laser (101) is provided with a laser alignment head (104) for maintaining a direction of high-power laser (105) generated by the valance level fiber laser (101) when adjusting a spot size.
8. The high-power optical element laser load capacity automatic screening device according to claim 7, wherein the high-power laser emission system (1) further comprises a laser beam adjusting device (103), the laser beam adjusting device (103) comprises a plurality of adjustable lens groups, and laser spot size adjustment is performed on high-power laser light (105) generated by the Van-type fiber laser (101) through the plurality of adjustable lens groups.
9. The high-power optical element laser load capacity automatic screening device according to claim 8, wherein the high-power laser emission system (1) further comprises a fiber laser matched water cooler (102), and the fiber laser matched water cooler (102) is connected with a Wanwatt-level fiber laser (101) and a laser beam adjusting device (103).
10. A high power optical element laser load capacity autofilter device according to any one of claims 1-5, characterized in that the high power laser cut-off system (5) comprises a turning mirror (501), said turning mirror (501) being arranged on the path of the high power laser (105) reflected or transmitted by the optical element under test.
11. The automatic screening device for laser loading capacity of high-power optical element according to claim 10, wherein the high-power laser cut-off system (5) further comprises a cylindrical laser collector (503), the cylindrical laser collector (503) is arranged on the path direction of the high-power laser (105) beam changed by the turning mirror (501), the bottom of the cylindrical laser collector (503) is a reflecting cone with polished surface, the side wall of the cylinder is blackened and roughened, and a water channel is dug inside, and the high-power laser (105) is cut off by the cylindrical laser collector (503).
12. The high-power optical element laser load capacity automatic screening device according to claim 11, wherein the high-power laser cut-off system (5) further comprises a beam expander (502), and the beam expander (502) is arranged at the front end of the cylindrical laser collector (503) and used for changing the path direction of the high-power laser (105) beam through the deflector (501).
13. The high power optical element laser loadability automatic screening apparatus according to claim 11, wherein the high power laser cutoff system (5) further comprises a mating laser water cooler (504), the mating laser water cooler (504) is connected to the barrel laser collector (503), and the temperature of the barrel laser collector (503) raised by the absorption of the high power laser (105) is reduced by the mating laser water cooler (504).
14. An automatic screening method for laser load capacity of a high-power optical element, implemented by using the automatic screening device for laser load capacity of a high-power optical element according to any one of claims 1 to 13, comprising the following steps:
S1, placing a cleaned tested optical element on a carrying platform (203) and fixedly connecting the tested optical element with a tool, starting a Wanwave-level optical fiber laser (101) to generate high-power laser (105), adjusting peak power density and the like, starting a high-beam quality laser (301) to generate high-beam quality laser (302), enabling the high-beam quality laser (302) and the high-power laser (105) to act on the same point of the tested optical element together, and further adjusting the spot size of the high-power laser (105) through a laser beam adjusting device (103);
S2, determining a scanning range, a central coordinate of laser action and a speed for scanning the optical element to be detected according to an actual working range and a power load of the optical element to be detected, and inputting the parameters and the curvature of the optical element to be detected into a computer motion control program matched with a control box (202) to obtain a motion scanning track of the co-sphere center of the optical element to be detected;
S3, checking whether the reflection positions of the high-power laser (105) and the high-beam quality laser (302) meet the requirements, adjusting an infrared camera (402) and a visible light microscopic camera (401), and driving a tested optical element to move back and forth in an S mode by the multi-dimensional electric displacement platform (2) to finish scanning in a test area;
S4, storing and monitoring time coordinate relation, video recording of a visible light microscopic camera (401), measurement temperature data of an infrared camera (402) and measurement recorded spot size and position data of high-beam quality laser (302) of a CCD (304) in real time through a matched computer (403) in the scanning test process, and comprehensively giving high-power load capacity of the screened lens through the data.
15. The method for automatically screening laser load capacity of a high-power optical element according to claim 14, wherein in step S2, the speed of scanning the optical element to be tested is:
;
Wherein v is the speed of scanning the optical element to be tested; omega eff is the effective spot radius of the high-power laser (105), namely the maximum spot radius of the high-power laser (105) with the power density exceeding the actual load laser peak power density, which is tested on the target plane of the optical element to be tested, and the size of the maximum spot radius is measured by a visible light microscopic camera (401); t is single-point irradiation time, namely the time for a certain point of the optical element to be detected to receive laser exceeding the actual load.
16. The method for automatically screening laser loading capacity of a high-power optical element according to claim 14, wherein in step S2, the method for obtaining the central coordinate of the laser action comprises the following steps: after the optical element to be measured is fixed on the object carrying platform (203), laser guide light acts on the edge of the optical element to be measured, the edge coordinate at the moment is recorded, and the center coordinate of the lens is obtained by subtracting half of the size of the optical element to be measured from the edge coordinate.
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