CN116469985B - Micro LED structure and preparation method thereof - Google Patents

Abstract

The disclosure relates to a Micro LED structure and a preparation method thereof, which belong to the field of Micro LED display technology. The Micro LED structure includes a first light-emitting pixel, a second light-emitting pixel, and a third light-emitting pixel arranged along the light emitting direction; the second light-emitting pixel and the third light-emitting pixel The vertical projections of one luminous pixel on the preset plane overlap, and the vertical projections of the third luminous pixel and the first luminous pixel overlap on the preset plane; the preset plane is a plane perpendicular to the light emitting direction; the polarizing component, It is arranged on the light-emitting surface of each light-emitting pixel; for the first light-emitting pixel, the polarizing component includes two polarizing components located in different overlapping areas; for the second light-emitting pixel and the third light-emitting pixel, the polarizing component includes one polarizing component located in the overlapping area A polarizing component and another polarizing component located in a non-overlapping region; the two polarizing components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding region based on polarization. This increases the overall pixel density and expands the display options.

Description

Micro LED structure and its preparation method

technical field

The present disclosure relates to the technical field of Micro LED display, in particular to a Micro LED structure and a preparation method thereof.

Background technique

At present, most of the existing Micro LED display technologies use mass transfer technology to transfer red (Red, R), green (Green, G) and blue (Blue, B) RGB three-color pixels to the same plane on the drive substrate. Arranged on the top, three single-color pixels of RGB are used to emit light separately to display all colors in combination. Due to the limitations of the transfer method and mechanical precision, for example, only a single LED pixel with a large pixel size can be transferred, and the corresponding pixel needs to be placed when placing the pixel Adequate space is reserved for adjacent pixels, resulting in a single display mode and low pixel density of the Micro LED panel produced by mass transfer technology.

Contents of the invention

In order to solve the above technical problems or at least partly solve the above technical problems, the present disclosure provides a Micro LED structure and a manufacturing method thereof.

The present disclosure provides a Micro LED structure, including:

The first light-emitting pixel, the second light-emitting pixel and the third light-emitting pixel arranged along the light-emitting direction; the vertical projection of the second light-emitting pixel and the first light-emitting pixel on the preset plane overlaps, and the third light-emitting pixel There is an overlap between the pixel and the vertical projection of the first luminous pixel on a preset plane; the preset plane is a plane perpendicular to the light emitting direction;

A polarizing component is arranged on the light-emitting surface of each light-emitting pixel; for the first light-emitting pixel, the polarizing component includes two polarizing components located in different overlapping regions; for the second light-emitting pixel and the third light-emitting pixel a pixel, wherein the polarizing components include a polarizing component located in an overlapping region and another polarizing component located in a non-overlapping region;

The two polarization components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding area based on polarization.

Optionally, the overlapping area on one side of the first light-emitting pixels is less than 1/2 of the total area of the first light-emitting pixels, and equal to or greater than 1/4 of the total area of the first light-emitting pixels.

Optionally, the polarization component includes a liquid crystal polarization module and a metal polarization grating, and the metal polarization grating is located on a side of the liquid crystal polarization module away from the light-emitting pixel;

The liquid crystal polarization module is used to control the polarization direction of the light emitted by each light-emitting pixel;

The metal polarization grating is used to control the light output state based on the polarization direction of the light emitted by the liquid crystal polarization module; the light output state includes light that completely passes through the liquid crystal polarization module and partially passes through the liquid crystal polarization module. One of the light emitted by the group and the light emitted by the liquid crystal polarizing module.

Optionally, the liquid crystal polarization module includes a first electrode, a liquid crystal alignment layer, a liquid crystal layer, and a second electrode stacked along the light emitting direction;

The liquid crystal alignment layer is used to set the initial arrangement direction of the liquid crystal in the liquid crystal layer; the first electrode and the second electrode are used to control the voltage of the liquid crystal layer; the liquid crystal layer is used to control the voltage based on the liquid crystal layer. The voltage control is used to deflect at a preset angle;

The metal polarization grating includes rectangular structures arranged at intervals;

The rectangular structures arranged at intervals are used to not transmit the light emitted from the liquid crystal layer when the liquid crystal is perpendicular to the rectangular structure, or to completely transmit the light emitted from the liquid crystal layer when the liquid crystal is parallel to the rectangular structure. through.

Optionally, the Micro LED structure further includes a first light-emitting substrate, a second light-emitting substrate, a third light-emitting substrate, an anode layer, and a driving substrate;

The first light-emitting pixel and the corresponding liquid crystal polarization module are arranged in the first light-emitting substrate, the second light-emitting pixel and the corresponding liquid crystal polarization module are arranged in the second light-emitting substrate, and the third The light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the third light-emitting substrate; the anode layer is arranged on the backlight surface of each light-emitting pixel; the driving substrate is arranged on the first light-emitting substrate away from the second side of the light-emitting substrate.

Optionally, the Micro LED structure also includes an insulating layer;

The insulating layer is disposed between the first light-emitting substrate and the second light-emitting substrate, and between the second light-emitting substrate and the third light-emitting substrate, and the insulating layer covers the polarizing component , the metal polarization grating is separated from the liquid crystal polarization module by the insulating layer.

The present disclosure also provides a method for preparing a Micro LED structure, which is used to prepare any one of the Micro LED structures described above; the method includes:

Prepare the first light-emitting pixel, the second light-emitting pixel and the third light-emitting pixel along the light-emitting direction; the vertical projection of the second light-emitting pixel and the first light-emitting pixel on the preset plane overlaps, and the third light-emitting pixel There is an overlap with the vertical projection of the first luminous pixel on a preset plane; the preset plane is a plane perpendicular to the light emitting direction;

A polarizing component is prepared on the light-emitting surface of each light-emitting pixel; for the first light-emitting pixel, the polarizing component includes two polarizing components located in different overlapping regions; for the second light-emitting pixel and the third light-emitting pixel , the polarizing component includes a polarizing component located in an overlapping area and another polarizing component located in a non-overlapping area; the two polarizing components for the same light-emitting pixel are independently controlled, and are used to regulate the light output color of the corresponding area based on polarization .

Optionally, the preparation of the first light-emitting pixel, the second light-emitting pixel and the third light-emitting pixel includes:

providing a first light emitting substrate, a second light emitting substrate and a third light emitting substrate;

preparing a first light-emitting pixel in the first light-emitting substrate;

Based on the first light-emitting substrate, preparing a second light-emitting pixel in the second light-emitting substrate;

Based on the second light emitting substrate, a third light emitting pixel is prepared in the third light emitting substrate.

Optionally, the preparation of polarizing components includes:

In the first light-emitting substrate, the second light-emitting substrate and the third light-emitting substrate, respectively prepare liquid crystal polarizers corresponding to the first light-emitting pixel, corresponding to the second light-emitting pixel and corresponding to the third light-emitting pixel module;

A metal polarization grating is prepared on the side of the liquid crystal polarization module away from the light-emitting pixels.

Optionally, the method also includes:

An insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate, and between the second light-emitting substrate and the third light-emitting substrate, and the insulating layer covers the polarizing component, so The metal polarization grating is separated from the liquid crystal polarization module by the insulating layer.

Compared with the prior art, the technical solutions provided by the embodiments of the present disclosure have the following advantages:

The Micro LED structure provided by the embodiments of the present disclosure includes a first light-emitting pixel, a second light-emitting pixel, and a third light-emitting pixel arranged along the light-emitting direction; there is an intersection between the second light-emitting pixel and the vertical projection of the first light-emitting pixel on a preset plane. overlapping, the vertical projections of the third luminous pixel and the first luminous pixel overlap on the preset plane; the preset plane is a plane perpendicular to the light-emitting direction; the polarizing component is arranged on the light-emitting surface of each luminous pixel; for the first For the light-emitting pixel, the polarizing components include two polarizing components located in different overlapping areas; for the second light-emitting pixel and the third light-emitting pixel, the polarizing components include one polarizing component located in the overlapping area and another polarizing component located in the non-overlapping area ; The two polarization components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding area based on polarization. In this way, the pixel density of the Micro LED structure is increased and the display mode is expanded.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the disclosure and together with the description serve to explain the principles of the disclosure.

In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, In other words, other drawings can also be obtained from these drawings on the premise of not paying creative work.

FIG. 1 is a schematic structural diagram of a Micro LED structure provided by an embodiment of the present disclosure;

FIG. 2 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure;

FIG. 3 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure;

FIG. 4 is a schematic flowchart of a method for fabricating a Micro LED structure provided by an embodiment of the present disclosure.

Wherein, 110, the first light-emitting pixel; 120, the second light-emitting pixel; 130, the third light-emitting pixel; 140, the polarizing component; 1411, the first electrode; 1412, the liquid crystal alignment layer; 1413, the liquid crystal layer; 1414, the second electrode 150, the first light-emitting substrate; 160, the second light-emitting substrate; 170, the third light-emitting substrate; 100, the anode layer; 180, the insulating layer; 190, the driving substrate;

Detailed ways

In order to more clearly understand the above objects, features and advantages of the present disclosure, the solutions of the present disclosure will be further described below. It should be noted that, in the case of no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other.

In the following description, many specific details are set forth in order to fully understand the present disclosure, but the present disclosure can also be implemented in other ways than described here; obviously, the embodiments in the description are only some of the embodiments of the present disclosure, and Not all examples.

The structure of the Micro LED provided by the embodiments of the present disclosure and the manufacturing method thereof are exemplarily described below with reference to the accompanying drawings.

Exemplarily, in some embodiments, FIG. 1 is a schematic structural diagram of a Micro LED structure provided by an embodiment of the present disclosure. Referring to FIG. 1 , it includes: a first light-emitting pixel 110, a second light-emitting pixel 120, and a third light-emitting pixel 130 arranged along the light-emitting direction; there is an intersection between the vertical projection of the second light-emitting pixel 120 and the first light-emitting pixel 110 on a preset plane. overlapping, the vertical projections of the third luminous pixel 130 and the first luminous pixel 110 on the preset plane overlap; the preset plane is a plane perpendicular to the light-emitting direction; the polarizing component 140 is arranged on the light-emitting surface of each luminous pixel; For the first luminous pixel 110, the polarizing component 140 includes two polarizing components located in different overlapping areas; for the second luminous pixel 120 and the third luminous pixel 130, the polarizing component 140 includes a polarizing component located in the overlapping area and a polarizing component located in a non- Another polarization component in the overlapping area; the two polarization components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding area based on polarization.

Wherein, the first light-emitting pixel 110 , the second light-emitting pixel 120 and the third light-emitting pixel 130 are respectively light-emitting elements that emit light of different colors. It should be noted that along the light emitting direction, the arrangement sequence of the light emitting pixels can be set according to the length of the wavelength of the light emitted. Exemplarily, the light-emitting pixels can be arranged sequentially in order of wavelength from long to short. For example, along the light-emitting direction, the first light-emitting pixel 110 can be an LED (red LED) that emits red light, and the second light-emitting pixel 120 can be an LED that emits green light. LED (green LED), the third light-emitting pixel 130 can be an LED (blue LED) that emits blue light; taking the orientation and structure shown in FIG. 1 as an example, by setting the LED with the shortest Above, it is possible to prevent blue light from irradiating red-emitting LEDs and green-emitting LEDs to generate photoluminescence.

Wherein, taking the orientation and structure shown in FIG. 1 as an example, the vertical projections of the left side of the second light-emitting pixel 120 and the right side of the first light-emitting pixel 110 on a plane perpendicular to the light-emitting direction overlap, and the right side of the third light-emitting pixel 130 overlaps. side and the vertical projection of the left side of the first light-emitting pixel 110 on the plane perpendicular to the light-emitting direction overlap, so that the vertical projections of the above three light-emitting pixels on the plane perpendicular to the light-emitting direction overlap to increase The pixel density of the Micro LED structure realizes the high-density integration of the above three light-emitting pixels.

Taking the orientation and structure shown in FIG. 1 as an example, there is overlap in the vertical projections of the above three light-emitting pixels near the side positions. Correspondingly, the polarization component 140 can be arranged The upper right of the pixel, so that the upper part of the first light-emitting pixel 110 includes two polarizing components located in different overlapping areas, and the upper part of the second light-emitting pixel 120 and the third light-emitting pixel 130 includes a polarizing component located in the overlapping area and Another polarizing component located in the non-overlapping region. It is not difficult to understand that the different overlapping regions are the overlapping regions corresponding to the second luminescent pixels 120 and the first luminescent pixels 110 , and the overlapping regions corresponding to the third luminescent pixels 130 and the first luminescent pixels 110 .

It should be noted that by independently controlling the two polarization components above each light-emitting pixel, the transmission of light emitted at the corresponding position of the light-emitting pixel can be controlled. For example, since the polarization component 140 is arranged at the The upper left and the upper right of each light-emitting pixel, so the polarization component 140 can control whether the light emitted by the left and right sides of the light-emitting pixel is transmitted based on polarization, and further adjust the color of the light emitted from the corresponding area.

For example, when the light emitted from the left side of the first light-emitting pixel 110 (such as a red LED) cannot pass through the corresponding polarization component, the light emitted from the right side of the third light-emitting pixel 130 (such as a blue LED) can pass through the corresponding polarization component. When assembled, the overlapping area corresponding to the third light-emitting pixel 130 and the first light-emitting pixel 110 emits monochromatic light, and the light color is blue light; or, when the light emitted from the left side of the first light-emitting pixel 110 and the light emitted by the third light-emitting pixel 130 When the light emitted from the right side can pass through the corresponding polarizing component, the overlapping area corresponding to the third light-emitting pixel 130 and the first light-emitting pixel 110 is mixed light. The working principle of the polarizing component 140 will be exemplified later.

The Micro LED structure provided by the embodiment of the present disclosure includes: a first light-emitting pixel 110, a second light-emitting pixel 120, and a third light-emitting pixel 130 arranged along the light-emitting direction; the second light-emitting pixel 120 and the first light-emitting pixel 110 are on a preset plane There is an overlap in the vertical projections on the third light-emitting pixel 130 and the vertical projection of the first light-emitting pixel 110 on the preset plane; the preset plane is a plane perpendicular to the light-emitting direction; the polarizing component 140 is arranged on each The light emitting surface of the light-emitting pixel; for the first light-emitting pixel 110, the polarizing component 140 includes two polarizing components located in different overlapping areas; for the second light-emitting pixel 120 and the third light-emitting pixel 130, the polarizing component 140 includes two polarizing components located in the overlapping area A polarizing component and another polarizing component located in a non-overlapping area; the two polarizing components for the same light-emitting pixel are independently controlled, and are used to control the color of light emitted from the corresponding area based on polarization. In this way, the pixel density of the Micro LED structure is increased and the display mode is expanded.

In some embodiments, continuing to refer to FIG. 1 , the overlapping area on one side of the first luminescent pixel 110 is less than 1/2 of the total area of the first luminescent pixel 110 and equal to or greater than 1 of the total area of the first luminescent pixel 110 /4.

Wherein, the overlapping area of one side of the first light-emitting pixel 110 is related to its manufacturing process. Exemplarily, the size of the overlapping area on one side of the first light-emitting pixel 110 can be set according to different manufacturing processes, for example: the overlapping area on one side of the first light-emitting pixel 110 can be 1/3 of the total area of the third light emitting pixel 130, and the overlapping area of the left side of the second light emitting pixel 120 is also 1/3 of the total area of the third light emitting pixel 120. 1/3 of the total area of the pixel 120 , there is no specific limitation on the size of the overlapping area on one side of the first light-emitting pixel 110 .

In some embodiments, FIG. 2 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure. On the basis of Fig. 1, referring to Fig. 2, the polarizing assembly 140 includes a liquid crystal polarizing module 141 and a metal polarizing grating 142, and the metal polarizing grating 142 is located on the side of the liquid crystal polarizing module 141 away from the light-emitting pixels; the liquid crystal polarizing module 141 is used for Control the polarization direction of the light emitted by each light-emitting pixel; the metal polarization grating 142 is used to control the light output state based on the polarization direction of the light emitted by the liquid crystal polarization module 141; the light output state includes the light emitted by the liquid crystal polarization module 141 completely, part One of the light emitted through the liquid crystal polarization module 141 and the light emitted without passing through the liquid crystal polarization module 141 .

Wherein, taking the orientation and structure shown in FIG. 2 as an example, the metal polarization grating 142 is located above the liquid crystal polarization module 141 . Exemplarily, there may be a predetermined distance between the metal polarization grating 142 and the liquid crystal polarization module 141, so that a corresponding insulating layer is provided at the predetermined distance to prevent the metal polarization grating 142 and the liquid crystal polarization module 141 from contacting to cause a short circuit, The specific arrangement position of the insulating layer will be exemplified later.

Specifically, first use the liquid crystal polarization module 141 to control the polarization direction of the light emitted from the corresponding position of the light-emitting pixel, so as to form light with a preset polarization direction, and then the metal polarization grating 142 has a preset value for the light emitted by the liquid crystal polarization module 141. The light in the polarization direction is analyzed to control whether the light with the preset polarization direction emitted by the liquid crystal polarization module 141 can pass through, that is, it can control whether the light emitted by the liquid crystal polarization module 141 is completely transmitted, partially transmitted or not. Through this, the control of the light output brightness at the metal polarization grating 142 is realized. The specific working principle of the control of the light output state by the metal polarization grating 142 will be described later.

For the scene of mixed light, when the light emitted from the right side of the first light-emitting pixel 110 (such as a red LED) and the light emitted from the left side of the second light-emitting pixel 120 (such as a green LED) can pass through the corresponding metal polarization grating, the second The overlapping area corresponding to the second light-emitting pixel 120 and the first light-emitting pixel 110 forms mixed light and the color of the light is yellow.

It should be noted that the embodiment of the present disclosure can also achieve monochromatic light output in various scenarios, for example, the polarizing component 140 can be used to realize monochromatic light output in the overlapping area of the luminous pixels, or the polarizing component 140 can be used to realize the non-overlapping area of the luminous pixels monochromatic light output, or directly use the light-emitting pixels for monochromatic light output. It is not difficult to understand that since each light-emitting pixel is equipped with polarization components on the upper left and upper right, the light-emitting pixel can use the middle position that does not correspond to the polarization component to perform monochromatic light output to achieve normalized monochromatic light output.

In some embodiments, referring to FIG. 2, the liquid crystal polarizing module 141 includes a first electrode 1411, a liquid crystal alignment layer 1412, a liquid crystal layer 1413, and a second electrode 1414 stacked along the light emitting direction; the liquid crystal alignment layer 1412 is used to set the liquid crystal The initial arrangement direction of the liquid crystal in the layer 1413; the first electrode 1411 and the second electrode 1414 are used for voltage control of the liquid crystal layer 1413; the liquid crystal layer 1413 is used for deflection of a preset angle based on the voltage control; the metal polarization grating 142 includes spacers Arranged rectangular structure; the rectangular structure arranged at intervals is used to not transmit the light emitted from the liquid crystal layer 1413 when the liquid crystal is perpendicular to the rectangular structure, or to transmit all the emitted light from the liquid crystal layer 1413 when the liquid crystal is parallel to the rectangular structure .

Wherein, the liquid crystal alignment layer 1412 is a structure for making the initial arrangement direction of the liquid crystals the same as the inner arrangement direction of the liquid crystal alignment layer 1412 . Exemplarily, the liquid crystal alignment layer 1412 may include rectangular structures arranged at intervals, or grooves arranged at intervals, and in other implementation manners, may also be other structures known to those skilled in the art. Specifically, before a voltage is applied to the first electrode 1411 and the second electrode 1414, the arrangement of the liquid crystals in the liquid crystal layer 1413 is disordered and the overall arrangement direction is not consistent. The liquid crystals enable the liquid crystals in the liquid crystal layer 1413 to be evenly arranged along the grooves arranged at intervals, and realize the setting of the initial arrangement direction of the liquid crystals.

Wherein, the first electrode 1411 and the second electrode 1414 are electrodes for supplying voltage to the corresponding liquid crystal layer 1413, so that the two polarization components of the same light-emitting pixel can be independently controlled. Exemplarily, both the first electrode 1411 and the second electrode 1414 may be transparent electrodes, such as electrodes made of tin-doped indium oxide (Indium Tin Oxide, ITO) material, and in other embodiments, may also be electrodes skilled in the art Electrodes made of other materials known to personnel are not limited here.

Exemplarily, when the first electrode 1411 and the second electrode 1414 provide the voltage required for deflection to the liquid crystal layer 1413, the liquid crystal in the liquid crystal layer 1413 will be deflected at a preset angle, so that the arrangement direction of the liquid crystal will change, for example The liquid crystals in the liquid crystal layer 1413 can all be deflected to be perpendicular to the rectangular structure in the metal polarization grating 142. At this time, the metal polarization grating 142 does not transmit the light emitted by the liquid crystal layer 1413; or, the liquid crystals in the liquid crystal layer 1413 can be homogeneous. Deflection to parallel to the rectangular structure in the metal polarization grating 142, at this time, the metal polarization grating 142 passes through all the light emitted by the liquid crystal layer 1413, and the light output brightness at the metal polarization grating 142 is the largest; or, the liquid crystal in the liquid crystal layer 1413 and the The included angle between the rectangular structures in the metal polarization grating 142 is an acute angle. At this time, the metal polarization grating 142 can partially transmit the light emitted from the liquid crystal layer 1413 .

In combination with the liquid crystal deflection process described above, it should be noted that when the liquid crystals in the liquid crystal layer 1413 are all deflected to be perpendicular to the rectangular structure in the metal polarization grating 142, the polarization direction of the light emitted by the liquid crystal layer 1413 is parallel to that in the metal polarization grating 142. Since the polarization direction of light is the vibration direction of the electric field, when the vibration direction of the electric field is parallel to the rectangular structure in the metal polarization grating 142, the free electrons on the metal polarization grating 142 will be driven to move along the rectangular structure, thereby The electric field energy is consumed, and at the same time, the metal polarization grating 142 will reflect light at this time, and the above factors cause the light emitted by the liquid crystal layer 1413 to fail to pass through the metal polarization grating 142; accordingly, the liquid crystals in the liquid crystal layer 1413 are all deflected to parallel In the case of the rectangular structure in the metal polarization grating 142 , the polarization direction of the light emitted from the liquid crystal layer 1413 is perpendicular to the rectangular structure in the metal polarization grating 142 , so the metal polarization grating 142 transmits all the light emitted from the liquid crystal layer 1413 .

In some embodiments, FIG. 3 is a schematic structural diagram of another Micro LED structure provided by an embodiment of the present disclosure. On the basis of FIG. 2 , referring to FIG. 3 , the Micro LED structure further includes a first light emitting substrate 150 , a second light emitting substrate 160 , a third light emitting substrate 170 , an anode layer 100 and a driving substrate 190 ; the first light emitting pixels 110 and corresponding The liquid crystal polarizing module is arranged in the first light-emitting substrate 150, the second light-emitting pixel 120 and the corresponding liquid crystal polarizing module are arranged in the second light-emitting substrate 160, the third light-emitting pixel 130 and the corresponding liquid crystal polarizing module are arranged in the second Among the three light emitting substrates 170 ; the anode layer 100 is disposed on the backlight surface of each light emitting pixel; the driving substrate 190 is disposed on the side of the first light emitting substrate 150 away from the second light emitting substrate 160 .

Wherein, the driving substrate 190 is a substrate for providing a logic circuit connected to an external control chip. Exemplarily, taking the orientation and structure shown in FIG. Embedded in the corresponding light-emitting substrate, at the same time, the liquid crystal polarization module corresponding to each light-emitting pixel is also embedded in the corresponding light-emitting substrate and located above the corresponding light-emitting pixel, and the anode layer 100 is connected under each light-emitting pixel to pass The anode layer 100 is connected to the driving substrate 190 under the first light-emitting substrate 150, so that the driving substrate 190 can use the corresponding driving circuit (not shown in the figure) and internal wiring 191 to control whether each light-emitting pixel is turned on, and whether to turn on intensity and duration.

It should be noted that FIG. 3 also shows the through hole (Through Silicon Via, TSV) 01 of the electrode (corresponding to the second electrode 1414) used for wiring in the first light-emitting substrate 150, and the filling of the through hole The material may be the same as that of the second electrode 1414 to achieve connection with the internal wiring 191 of the driving substrate 190 , which will not be repeated here.

In some embodiments, referring to FIG. 3 , the Micro LED structure further includes an insulating layer 180; the insulating layer 180 is disposed between the first light emitting substrate 150 and the second light emitting substrate 160, and the second light emitting substrate 160 and the third light emitting substrate Between the substrates 170 , the insulating layer 180 covers the polarizing component 140 , and the metal polarization grating 142 and the liquid crystal polarizing module 141 are separated by the insulating layer 180 .

Wherein, the insulating layer 180 is a structure for electrical insulation. Specifically, by disposing the insulating layer 180 between adjacent light-emitting substrates, a short circuit between adjacent light-emitting substrates is prevented. The second electrodes 1414 in the module 141 are in contact with each other and are short-circuited, and the metal polarization grating 142 and the liquid crystal polarization module 141 are separated by an insulating layer 180 .

On the basis of the above embodiments, the embodiments of the present disclosure also provide a method for preparing a Micro LED structure, which is used to prepare any one of the Micro LED structures provided in the above embodiments, and has corresponding beneficial effects.

Exemplarily, FIG. 4 is a schematic flowchart of a method for fabricating a Micro LED structure provided by an embodiment of the present disclosure. Referring to Figure 4, the method includes:

S210, preparing a first light-emitting pixel, a second light-emitting pixel, and a third light-emitting pixel along the light emitting direction.

Wherein, the vertical projection of the second luminescent pixel and the first luminescent pixel on the preset plane overlaps, and the vertical projection of the third luminescent pixel and the first luminescent pixel on the preset plane overlaps; the preset plane is perpendicular to The plane of the light emitting direction.

Exemplarily, the first light-emitting pixel, the second light-emitting pixel, and the third light-emitting pixel can be light-emitting elements made of quantum dot materials, for example: when the first light-emitting pixel is used to emit red light, it can be a multiple Quantum well (Multiple Quantum Well, MQW) structure; when the second light-emitting pixel is used to emit green light, it can be a multi-quantum well structure for green light; when the third light-emitting pixel is used to emit blue light, it can be for blue light The multiple quantum well structure of the multi-quantum well structure, the specific composition structure and preparation materials of the multiple quantum well structure are not limited.

S220. Prepare a polarizing component on the light-emitting surface of each light-emitting pixel.

Wherein, for the first luminous pixel, the polarizing component includes two polarizing components located in different overlapping areas; for the second luminous pixel and the third luminous pixel, the polarizing component includes a polarizing component located in the overlapping area and a polarizing component located in the non-overlapping area Another polarization component for the same light-emitting pixel; the two polarization components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding area based on polarization.

Exemplarily, when the light-emitting surface corresponds to the top of each light-emitting pixel, on the basis of the first light-emitting pixel that has been formed, the liquid crystal polarization module can be formed on the upper left and upper right of the first light-emitting pixel, and then respectively A metal polarization grating is formed on the top of the two liquid crystal polarization modules to form a polarization component for the first light-emitting pixel; similarly, a polarization component for the second light-emitting pixel and a polarization component for the third light-emitting pixel can be sequentially formed later. The specific preparation process of the components is exemplified in the following text.

The preparation method of the Micro LED structure provided by the embodiment of the present disclosure is to prepare overlapping first luminous pixels, second luminous pixels, and third luminous pixels in the vertical projection on the preset plane, and the light output of each luminous pixel Polarizing components are prepared on the surface to control the transmission of light emitted by the corresponding positions of the light-emitting pixels by using the polarizing components, thereby adjusting the light color of the corresponding area, increasing the pixel density of the Micro LED structure and expanding the display mode.

In addition, the mass transfer technology used in the relevant Micro LED display technology is not mature enough. For example, when using elastic stamp micro transfer technology and laser transfer technology to prepare Micro LED structures, the yield rate and transfer efficiency cannot reach the level of Micro LED mass production. , and at the same time push up the manufacturing cost, making the price of the current Micro LED products high. However, the Micro LED structure prepared based on the hybrid bonding method in the disclosed embodiment greatly improves the yield rate and transfer efficiency of the Micro LED structure, reduces the manufacturing cost of the Micro LED structure, and facilitates mass production of products.

In some embodiments, referring to FIG. 4 , preparing the first light-emitting pixel, the second light-emitting pixel, and the third light-emitting pixel in S210 includes the following steps:

Step 1: providing a first light emitting substrate, a second light emitting substrate and a third light emitting substrate.

Specifically, since the second light-emitting substrate is located between the first light-emitting substrate and the third light-emitting substrate, the first light-emitting pixels and the corresponding liquid crystal polarization modules can be prepared inside the first light-emitting substrate, and then inside the second light-emitting substrate The second light-emitting pixel and the corresponding liquid crystal polarization module are prepared, and finally the third light-emitting pixel and the corresponding liquid crystal polarization module are prepared inside the third light-emitting substrate.

Step 2: preparing a first light-emitting pixel in the first light-emitting substrate.

Exemplarily, the first light-emitting substrate can be ground and thinned first, and then a semiconductor manufacturing process is used to form a multi-quantum well structure for red light inside the first light-emitting substrate, and the manufacturing process of the first light-emitting pixel is not limited.

Step 3: Based on the first light-emitting substrate, prepare second light-emitting pixels in the second light-emitting substrate.

Exemplarily, on the basis of the formed first light-emitting substrate, the second light-emitting substrate is ground and thinned, and then a semiconductor manufacturing process is used to form a multi-quantum well structure for green light inside the second light-emitting substrate. The manufacturing process of the light-emitting pixel is not limited.

Step 4: Based on the second light-emitting substrate, a third light-emitting pixel is prepared in the third light-emitting substrate.

Exemplarily, on the basis of the second light-emitting substrate that has been formed, the third light-emitting substrate is ground and thinned, and then a multi-quantum well structure for blue light is formed inside the third light-emitting substrate using a semiconductor manufacturing process. Regarding the third light-emitting substrate The manufacturing process of the pixel is not limited.

In some embodiments, referring to FIG. 4 , preparing the polarizing component in S220 includes the following steps:

Step 1: Prepare liquid crystal polarization modules corresponding to the first light emitting pixel, corresponding to the second light emitting pixel and corresponding to the third light emitting pixel in the first light emitting substrate, the second light emitting substrate and the third light emitting substrate respectively.

Specifically, for the first light-emitting pixel in the first light-emitting substrate, a liquid crystal polarization module can be prepared on the upper left and upper right of the first light-emitting pixel, for example, when preparing the liquid crystal polarization module on the upper left of the first light-emitting pixel During the process, the first electrode, the liquid crystal alignment layer, the liquid crystal layer and the second electrode are stacked along the light emitting direction.

Exemplarily, the spatial position of the liquid crystal polarization module can be reserved above the first light-emitting pixel by photolithography and etching, and then an insulating layer is deposited by chemical vapor deposition (Chemical Vapor Deposition, CVD) Engraving and etching to reserve the spatial position of the liquid crystal polarization module, forming the first electrode on the formed insulating layer by physical vapor deposition (Physical Vapor Deposition, PVD), photolithography and etching, and then coating the liquid crystal The alignment layer is aligned with ultraviolet polarized light, baked and cured in a nitrogen atmosphere, and then coated with a liquid crystal layer, which is also baked and cured in a nitrogen atmosphere. Finally, physical vapor deposition, photolithography, and etching are used to process to form the second electrode, and above the formed second electrode, the insulating layer is deposited again by physical vapor deposition process, and the insulating layer is smoothed by chemical mechanical polishing (CMP), thus forming the insulating layer covered LCD polarizer module.

It should be noted that before preparing light-emitting pixels inside the light-emitting substrate, the driving substrate can be fabricated first, and then the corresponding light-emitting substrate is placed on the driving substrate, and an anode layer for electrical connection is formed at the corresponding position of the driving substrate and the light-emitting substrate, and The driving substrate and the light emitting substrate are connected by hybrid bonding. For example, the preparation material of the anode layer can be a combination of tantalum nitride (TaN), tantalum (Ta) and copper (Cu). Ta) and copper (Cu) to form the anode layer, and the preparation material of the anode layer is not limited here.

Exemplarily, in combination with the above-mentioned preparation process of the liquid crystal polarizer module, after the liquid crystal polarizer module is formed, photolithography and etching processes can be used to form the lead-out position of the electrode (such as the second electrode), and the corresponding Through-holes are filled with corresponding materials in the through-holes by using a physical vapor deposition process. On this basis, internal wiring in the drive substrate is formed by photolithography and etching processes.

Step 2: Prepare a metal polarization grating on the side of the liquid crystal polarization module away from the light-emitting pixels.

Wherein, after the liquid crystal polarizing module covered by the insulating layer is formed, the metal polarization grating also covered by the insulating layer is formed. Exemplarily, the metal polarization grating can be a metal wire grid of aluminum material, and in other embodiments, it can also be a grating of other metal materials known to those skilled in the art, and the type and material of the metal polarization grating are not limited herein .

In some embodiments, referring to Fig. 4, the preparation method further includes:

An insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate, and between the second light-emitting substrate and the third light-emitting substrate, and the insulating layer covers the polarization component, and the metal polarization grating and the liquid crystal polarization module are separated by insulating Layers are separated.

Exemplarily, in combination with the above preparation process of the liquid crystal polarizing module, on the formed second electrode, when the insulating layer is deposited again by physical vapor deposition process, the second light-emitting substrate for and subsequent light-emitting can be formed on the first light-emitting substrate. The substrate is separated by an insulating layer, and a metal polarization grating is formed above the liquid crystal polarization module, and the metal polarization grating is separated from the liquid crystal polarization module by the insulating layer. Thus, on the basis of forming the driving substrate, the first light-emitting substrate, the first light-emitting pixels and the corresponding polarizing components, continue to form the second light-emitting substrate, the second light-emitting pixels and the corresponding polarizing components, as well as the third light-emitting substrate, The third light-emitting pixel and the corresponding polarizing component can be understood in conjunction with the above-mentioned related manufacturing process, and will not be described in detail here.

It should be noted that in this article, relative terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these No such actual relationship or order exists between entities or operations. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements of or also include elements inherent in such a process, method, article, or device. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.

The above descriptions are only specific implementation manners of the present disclosure, so that those skilled in the art can understand or implement the present disclosure. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present disclosure. Therefore, the present disclosure will not be limited to the embodiments described herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A Micro LED structure, characterized in that, comprising: The first light-emitting pixel, the second light-emitting pixel and the third light-emitting pixel arranged along the light-emitting direction; the vertical projection of the second light-emitting pixel and the first light-emitting pixel on the preset plane overlaps, and the third light-emitting pixel There is an overlap between the pixel and the vertical projection of the first luminous pixel on a preset plane; the preset plane is a plane perpendicular to the light emitting direction; A polarizing component is arranged on the light-emitting surface of each light-emitting pixel; for the first light-emitting pixel, the polarizing component includes two polarizing components located in different overlapping regions; for the second light-emitting pixel and the third light-emitting pixel a pixel, wherein the polarizing components include a polarizing component located in an overlapping region and another polarizing component located in a non-overlapping region; The two polarization components for the same light-emitting pixel are independently controlled, and are used to adjust the light color of the corresponding area based on polarization. 2. The Micro LED structure according to claim 1, wherein the overlapping area on one side of the first light-emitting pixel is less than 1/2 of the total area of the first light-emitting pixel, and is equal to or greater than the 1/4 of the total area of the first light-emitting pixels. 3. The Micro LED structure according to claim 1 or 2, wherein the polarizing component comprises a liquid crystal polarizing module and a metal polarization grating, and the metal polarizing grating is located away from the light emitting pixels of the liquid crystal polarizing module side of The liquid crystal polarization module is used to control the polarization direction of the light emitted by each light-emitting pixel; The metal polarization grating is used to control the light output state based on the polarization direction of the light emitted by the liquid crystal polarization module; the light output state includes light that completely passes through the liquid crystal polarization module and partially passes through the liquid crystal polarization module. One of the light emitted by the group and the light emitted by the liquid crystal polarizing module. 4. The Micro LED structure according to claim 3, wherein the liquid crystal polarization module comprises a first electrode, a liquid crystal alignment layer, a liquid crystal layer, and a second electrode stacked along the light emitting direction; The liquid crystal alignment layer is used to set the initial arrangement direction of the liquid crystal in the liquid crystal layer; the first electrode and the second electrode are used to control the voltage of the liquid crystal layer; the liquid crystal layer is used to control the voltage based on the liquid crystal layer. The voltage control is used to deflect at a preset angle; The metal polarization grating includes rectangular structures arranged at intervals; The rectangular structures arranged at intervals are used to not transmit the light emitted from the liquid crystal layer when the liquid crystal is perpendicular to the rectangular structure, or to completely transmit the light emitted from the liquid crystal layer when the liquid crystal is parallel to the rectangular structure. through. 5. The Micro LED structure according to claim 3, further comprising a first light-emitting substrate, a second light-emitting substrate, a third light-emitting substrate, an anode layer, and a driving substrate; The first light-emitting pixel and the corresponding liquid crystal polarization module are arranged in the first light-emitting substrate, the second light-emitting pixel and the corresponding liquid crystal polarization module are arranged in the second light-emitting substrate, and the third The light-emitting pixels and the corresponding liquid crystal polarization modules are arranged in the third light-emitting substrate; the anode layer is arranged on the backlight surface of each light-emitting pixel; the driving substrate is arranged on the first light-emitting substrate away from the second side of the light-emitting substrate. 6. The Micro LED structure according to claim 5, further comprising an insulating layer; The insulating layer is disposed between the first light-emitting substrate and the second light-emitting substrate, and between the second light-emitting substrate and the third light-emitting substrate, and the insulating layer covers the polarizing component , the metal polarization grating is separated from the liquid crystal polarization module by the insulating layer. 7. A method for preparing a Micro LED structure, characterized in that it is used to prepare the Micro LED structure according to any one of claims 1-6; the method comprises: Prepare the first light-emitting pixel, the second light-emitting pixel and the third light-emitting pixel along the light-emitting direction; the vertical projection of the second light-emitting pixel and the first light-emitting pixel on the preset plane overlaps, and the third light-emitting pixel There is an overlap with the vertical projection of the first luminous pixel on a preset plane; the preset plane is a plane perpendicular to the light emitting direction; A polarizing component is prepared on the light-emitting surface of each light-emitting pixel; for the first light-emitting pixel, the polarizing component includes two polarizing components located in different overlapping regions; for the second light-emitting pixel and the third light-emitting pixel , the polarizing component includes a polarizing component located in an overlapping area and another polarizing component located in a non-overlapping area; the two polarizing components for the same light-emitting pixel are independently controlled, and are used to regulate the light output color of the corresponding area based on polarization . 8. The method according to claim 7, wherein the preparing the first luminous pixel, the second luminous pixel and the third luminous pixel comprises: providing a first light emitting substrate, a second light emitting substrate and a third light emitting substrate; preparing a first light-emitting pixel in the first light-emitting substrate; Based on the first light-emitting substrate, preparing a second light-emitting pixel in the second light-emitting substrate; Based on the second light emitting substrate, a third light emitting pixel is prepared in the third light emitting substrate. 9. The method according to claim 8, wherein the preparation of the polarizing assembly comprises: In the first light-emitting substrate, the second light-emitting substrate and the third light-emitting substrate, respectively prepare liquid crystal polarizers corresponding to the first light-emitting pixel, corresponding to the second light-emitting pixel and corresponding to the third light-emitting pixel module; A metal polarization grating is prepared on the side of the liquid crystal polarization module away from the light-emitting pixels. 10. The method according to claim 9, further comprising: An insulating layer is formed between the first light-emitting substrate and the second light-emitting substrate, and between the second light-emitting substrate and the third light-emitting substrate, and the insulating layer covers the polarizing component, so The metal polarization grating is separated from the liquid crystal polarization module by the insulating layer.