CN116339238B - Beam motion control method for independent beam scanning five-axis laser processing equipment - Google Patents
Beam motion control method for independent beam scanning five-axis laser processing equipment Download PDFInfo
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Abstract
The invention belongs to a beam motion control method, which aims to solve the technical problem that parts are scrapped due to dislocation processing if a motion pattern of a laser beam is not circular when multi-axis laser processing equipment is processed.
Description
Technical Field
The invention belongs to a beam motion control method, and particularly relates to a beam motion control method of independent beam scanning five-axis laser processing equipment.
Background
The multi-axis machine tool equipment is widely applied to the high-tech fields of aerospace and the like due to a more flexible processing position control method, and is used for processing complex parts such as blades, cases, rib plates and the like. In order to improve the applicability of the multi-axis machine tool and reduce the programming difficulty of machine tool control codes, a numerical control code programming mode with a cutter point following (RTCP) function is generally adopted, namely, a craftsman only needs to pay attention to how to control the relative motion of a cutter and a workpiece, and does not need to pay attention to a control method of each axis of the machine tool.
With the development of laser processing technology, a great deal of multi-axis laser processing equipment also appears in the laser processing field. These devices typically include multiple mechanical axes and multiple beam axes. In order to alleviate the difficulty of writing codes, RTCP functions are also employed in laser machining equipment. However, the function comes from machining equipment, is only suitable for a control code of a mechanical shaft, and cannot control a beam shaft, so that a certain angle deviation exists between a mechanical shaft coordinate system and a beam shaft coordinate system all the time in the machining process. Once the moving pattern of the laser beam is not circular, the angle of the pattern to be processed is likely to deflect, resulting in misplacement processing, resulting in part rejection.
Disclosure of Invention
The invention provides a beam motion control method of independent beam scanning five-axis laser processing equipment, which aims to solve the technical problem that when multi-axis laser processing equipment is used for processing, if a motion pattern of a laser beam is not circular, misplacement processing is caused and parts are scrapped.
In order to achieve the purpose, the invention is realized by adopting the following technical scheme:
the method for controlling the beam motion of the independent beam scanning five-axis laser processing equipment is characterized by comprising the following steps of:
s1, enabling a machine tool A axis to rotate positively to obtain a machine tool C axis motion component; the machine tool is a five-axis machine tool, and the five axes are an X axis, a Y axis, a Z axis, an A axis and a C axis respectively;
s2, according to the normal T of the vibrating mirror processing plane M To the working coordinate system-Y M O M Z M Planar rotation transformation matrix R -C1 Normal T of processing plane of vibration mirror M Transforming to obtain transformed vector T C，M1 The method comprises the steps of carrying out a first treatment on the surface of the Wherein the machining coordinate system is O M -X M Y M Z M ；
S3, combining the transformed vectors T C，M1 Acquiring a motion component of an axis A of a machine tool;
s4, combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis and the Z axis;
s5, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any one of the axes exceeds the travel limit of the machine tool, executing the step S6, otherwise, executing the step S8;
s6, enabling the machine tool A to rotate in the axial direction and the negative direction to obtain a motion component of the machine tool C axis; according to the normal T of the processing plane of the vibrating mirror M To +Y of the working coordinate system M O M Z M Planar rotation transformation matrix R -C2 Normal T of processing plane of vibration mirror M Transforming to obtain transformed vector T C，M2 The method comprises the steps of carrying out a first treatment on the surface of the Combining transformed vectors T C，M2 Acquiring a motion component of an axis A of a machine tool; combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis, the Z axis and the A axis;
s7, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any axis exceeds the travel limit of the machine tool, replacing the part clamping position or replacing the machine tool, otherwise, executing the step S8;
s8, calculating X by taking the rotation of the machine tool A axis and taking the pose of the machine tool A axis after the translation components of the X axis, the Y axis, the Z axis and the A axis of the machine tool A axis are moved as a reference G Axis, Y G The axial direction of the shaft under a machining coordinate system; wherein O is G -X G Y G A scanning plane coordinate system of the 2D galvanometer;
s9, according to X G Axis, Y G And (3) establishing a galvanometer scanning coordinate system in the axial direction of the shaft under the machining coordinate system, generating a galvanometer scanning track in the coordinate system, and combining the motion components of each shaft of the machine tool to obtain the complete parameters of the beam motion.
Further, the step S1 specifically includes:
s1.1, normal T of a vibrating mirror processing plane M Z around the machining coordinate system M Axis rotation to machining coordinate system-Y M O M Z M On the plane;
s1.2, obtaining a motion component C of a machine tool C axis when the machine tool A axially rotates positively through the following steps S1 ：
When the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M When=0, the motion component C of the machine tool C axis S1 The method comprises the following steps:
wherein i is M Normal T of plane for vibrating mirror processing M At X M A component on the axis;
when the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M Not equal to 0, the motion component C of the machine tool C axis S1 The method comprises the following steps:
wherein,
further, in step S2, the rotation transformation matrix R -C1 Obtained by the following formula:
transformed vector T C，M1 Obtained by the following formula:
T C，M1 ＝T M ·R -C1 。
further, step S3 is specifically to obtain a motion component of the machine tool a axis by:
when k is C，M1 When=0, machine tool a axis motion component a S1 =pi/2; wherein k is C，M1 For transformed vector T C，M1 At Z M A component on the axis;
when k is C，M1 Not equal to 0, the motion component A of the axis A of the machine tool S1 The method comprises the following steps:
wherein,j C，M1 for transformed vector T C，M1 In Y M Components on the axis.
Further, step S4 is specifically to calculate the translational components X of the machine tool in the X-axis, Y-axis and Z-axis thereof by S1 、Y S1 And Z S1 ：
Wherein P is M For the plane origin of the galvanometer machining (Deltax) 1 ，Δy 1 ，Δz 1 ) Offset from center of rotation of axis A to center of rotation of axis C of machine tool (Deltax) 2 ，Δy 2 ，Δz 2 ) R is the offset from the origin of the machine tool to the rotation center of the A axis -A1 For transformed vector T C，M1 To +Z M Rotation transformation matrix of shaft:
further, in step S5, the machine tool travel limit is determined by:
wherein [ x ] - ，x + ]For the X-axis movement range of the machine tool, [ y ] - ，y + ]Is the Y-axis movement range of the machine tool, [ z ] - ，z + ]Is the Z-axis movement range of the machine tool, [ alpha ] - ，α + ]Is the A axis movement range of the machine tool, (x) 0 ，y 0 ，z 0 ，α 0 ，γ 0 ) The position of the origin after tool setting is performed for the machine tool.
Further, the step S6 specifically includes:
s6.1, normal T of a vibrating mirror processing plane M Z around the machining coordinate system M Rotation of the shaft to +Y of the machining coordinate system M O M Z M Plane surfaceApplying;
s6.2, obtaining a motion component C of a machine tool C axis when the machine tool A rotates in the negative direction in the axial direction through the following steps S2 ：
When the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M When=0, the motion component C of the machine tool C axis S2 The method comprises the following steps:
when the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M Not equal to 0, the motion component C of the machine tool C axis S2 The method comprises the following steps:
s6.3, obtaining a transformed vector T by the following formula C，M2 ：
T C，M2 ＝T M ·R -C2
Wherein:
s6.4, acquiring a motion component of the axis A of the machine tool by the following formula:
when k is C，M2 When=0, machine tool a axis motion component a S2 ＝-π/2；
When k is C，M2 Not equal to 0, the motion component A of the axis A of the machine tool S2 The method comprises the following steps:
wherein,k C，M2 for transformed vector T C，M2 At Z M Component on axis，j C，M2 For transformed vector T C，M2 In Y M A component on the axis;
s6.5, calculating the translation components X of the machine tool in the X axis, the Y axis and the Z axis by the following method S2 、Y S2 And Z S2 ：
Wherein R is -A2 For transformed vector T C，M2 To +Z M Rotation transformation matrix of shaft:
further, in step S7, the machine tool travel limit is determined by:
further, in step S8, X is obtained by G Axis, Y G Axial direction of the shaft under the machining coordinate system:
wherein X is G，M Is X G Axial direction of shaft under machining coordinate system, Y G，M Is Y G The axial direction of the shaft under a machining coordinate system, R -A For transformed vector T C,M1 To +Z M Rotation transformation matrix R of shaft -A1 Or transformed vector T C,M2 To +Z M Rotation transformation matrix R of shaft -A2 ，R -C For rotating the transformation matrix R -C1 Or rotating the transformation matrix R -C2 。
Further, in step S9, the galvanometer scanning coordinate system is the origin of the galvanometer processing plane corresponding to the current processing featureP M As the origin, X G，M The axes are corresponding to the X axis and Y axis G，M The axis is a coordinate system established corresponding to the Y axis.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a beam motion control method of a five-axis laser processing device with independent beam scanning, which ensures that the composite motion track of a beam follows a preset path by controlling the motion components of each axis of the five-axis laser processing device with an independent beam scanning device, thereby realizing the correct processing of the appointed shape feature on any part. And decomposing the motion trail of the light beam scanning device onto each motion axis by analyzing the motion structure and the connection relation of the five-axis machine tool, acquiring the pose of the light beam scanning device relative to the workpiece under the combined action of each axis, and then establishing a local scanning coordinate system under the current pose to realize the motion control of the five-axis laser processing equipment with the independent light beam scanning device.
Drawings
FIG. 1 is a schematic diagram of an XYZAC mechanical structure+2D galvanometer form five-axis laser processing apparatus;
FIG. 2 is a schematic diagram of the processing pose of a workpiece and a galvanometer in an embodiment of a beam motion control method of a five-axis laser processing device with independent beam scanning according to the present invention;
FIG. 3 is a vector T in an embodiment of a method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus according to the present invention M from-Y of the working coordinate system M O M X M Plane rotation to-Y M O M Z M Schematic diagram of transformation relation of plane;
FIG. 4 shows an embodiment of a method for controlling the beam motion of an independent beam scanning five-axis laser processing apparatus according to the present invention C,M1 Vector T at a time of less than or equal to 0 C,M1 Rotate to Z M Schematic diagram of the transformation relation of the shaft;
FIG. 5 is a vector T in an embodiment of a method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus according to the present invention M Rotated to the coordinate system +Y M O M Z M Schematic diagram of transformation relation of plane;
FIG. 6 shows the present inventionIn the embodiment of the method for controlling the beam motion of the five-axis laser processing equipment by independent beam scanning, j is as follows C，M2 Vector T when not less than 0 C，M2 Rotate to Z M Schematic diagram of the transformation relation of the shaft;
FIG. 7 is a schematic diagram of the pose of each axis of the machine tool after movement and the vibrating mirror processing result under the original graph in an embodiment of a beam movement control method of a five-axis laser processing device with independent beam scanning;
FIG. 8 is a schematic diagram of a scanning coordinate system of a galvanometer in a machine tool according to an embodiment of a beam motion control method of a five-axis laser processing apparatus with independent beam scanning according to the present invention;
FIG. 9 is a schematic diagram showing the processing coordinate O in an embodiment of a method for controlling the beam motion of an independent beam scanning five-axis laser processing apparatus according to the present invention M -X M Y M Z M In galvanometer coordinate system P M -X G，M Y G，M Schematic diagram.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
The invention provides a beam motion control method of a five-axis laser processing device for independent beam scanning, which aims to solve the problems that when multi-axis laser processing equipment is processed, if a motion pattern of a laser beam is not circular, misplacement processing is caused and parts are scrapped, and the method comprises the following steps:
as shown in fig. 1, a five-axis laser processing apparatus constituted by an XYZAC mechanical motion structure and a 2D galvanometer is exemplified, in which the offset amount from the a-axis rotation center to the C-axis rotation center is (Δx 1 ，Δy 1 ，Δz 1 ) The offset from the origin of the machine tool to the center of rotation of the a-axis is (Δx 2 ，Δy 2 ，Δz 2 ) Scanning plane coordinate system O of 2D galvanometer G -X G Y G Middle X G 、Y G The axes are parallel to the X axis and the Y axis of the machine tool respectively. X-axis motion range [ X ] of machine tool - ，x + ]Range of motion of Y-axis [ Y - ，y + ]Z-axis motion Range [ Z - ，z + ]A range of motion [ alpha ] - ，α + ]C-axis movement range [0 DEG, 360 DEG ]](support continuous rotation), the origin position after tool setting of the machine tool is (x) 0 ，y 0 ，z 0 ，α 0 ，γ 0 ) The specific motion control implementation steps are as follows:
step 1: as shown in FIG. 2, a processing coordinate system O is provided M -X M Y M Z M Next, the vibrating mirror processing pose S corresponding to the current processing characteristic M ＝(P M ，T M ) Wherein P is M ＝(x M ，y M ，z M ) For processing plane origin of vibrating mirror, T M ＝(i M ，j M ，k M ) Is normal to the plane of the vibrating mirror processing.
Step 2: as shown in FIG. 3, in order to rotate machine tool A in the axial direction, A should be equal to or greater than 0, so vector T should be taken M from-Y of the working coordinate system M O M X M Plane around Z M Axis rotation to machining coordinate system-Y M O M Z M On the plane, thereby obtaining the C-axis motion component of the machine tool. Wherein when T M In Y M Component j on axis M When=0, the motion component C of the machine tool C axis S1 Can be calculated by the following formula:
wherein i is M Is T M At X M A component on the axis;
when j is M Not equal to 0, the motion component C of the machine tool C axis S1 Can be calculated by the following formula:
wherein,
step 3: vector T M to-Y M O M Z M Planar rotation transformation matrix R -C1 Can be expressed as:
then use R -C1 Vector T can be calculated M Transform into a vector T C，M1 ＝(i C，M1 ，j C，M1 ，k C，M1 ) The method comprises the following steps:
T C，M1 ＝T M ·R -C1
wherein j is necessarily present C，M1 ≤0。
Step 4: as shown in FIG. 4, at Y M O M Z M On-plane vector T C，M1 Around X M The axis rotates to +Z M And obtaining the A-axis motion component of the machine tool on the shaft. Wherein when k is C，M1 When=0, machine tool a axis motion component a S1 =pi/2; when k is C，M1 Not equal to 0, the motion component A of the axis A of the machine tool S1 Can be calculated by the following formula:
wherein->
Step 5: vector T C，M1 To +Z M Rotation transformation matrix R of shaft -A1 Can be expressed as:
step 6: at the position ofObtaining the motion components C of two rotating shafts of the machine tool S1 And A S1 Then, three translational components X of the machine tool in the X axis, the Y axis and the Z axis can be calculated by the following formula S1 、Y S1 And Z S1 ：
Step 7: since the machine tool C-axis can rotate continuously, the C-axis does not go beyond the machine tool stroke. The machine X, Y, Z, A axes are travel limited and it is necessary to determine whether the current axes exceed the machine travel limit using the following conditions:
when each axis motion component meets the machine tool travel condition, turning to step 11; otherwise, go to step 8.
Step 8: as shown in FIG. 5, the machine tool A is rotated in the negative direction, namely A is taken<0, so that the vector T is needed M Around Z M Axis rotation to +Y of the coordinate system M O M Z M On the plane, thereby obtaining the C-axis motion component of the machine tool.
Wherein, when j M When=0, the motion component C of the machine tool C axis S2 Can be calculated by
When j is M Not equal to 0, the motion component C of the machine tool C axis S2 Can be calculated by
Wherein->
Vector T M To +Y M O M Z M Planar rotation transformation matrix
Vector T M Through R -C2 Transformed to obtain T C，M2 (i C，M2 ，j C，M2 ，k C，M2 )＝T M ·R -C2 Then there is a need of j C，M2 ≥0。
Step 9: as shown in FIG. 6, at Y M O M Z M On-plane vector T C，M2 Around X M The axis rotates to +Z M And obtaining the A-axis motion component of the machine tool on the shaft. Wherein when k is C，M2 When=0, machine tool a axis motion component a S2 -pi/2; when k is C，M2 Not equal to 0, the motion component A of the axis A of the machine tool S2 Can be calculated by the following formula:
wherein->
Vector T C，M2 To +Z M Rotation transformation matrix R of shaft -A2 Can be expressed as:
three translational components X of the machine tool S2 、Y S2 And Z S2 Can be calculated by the following formula:
step 10: determining whether the machine X, Y, Z, A axis motion component meets the following limitations
When satisfied, go to step 11; otherwise, it can be determined that the current apparatus cannot be used to machine the part, and the part clamping position needs to be replaced or the machine tool needs to be replaced.
Step 11: as shown in fig. 7, after the above-mentioned rotation and translation movements of each axis of the machine tool, if the original pattern is scanned directly by using the galvanometer, the machined feature is rotated to obtain an erroneous shape. To deal with this problem, let (R -A ，R -C ) Is a transformation matrix (R -A1 ，R -C1 ) Or a transformation matrix (R) during negative rotation of the a-axis -A2 ，R -C2 )，(X S ，Y S ，Z S ，A S ，C S ) Taking the current motion component (X) of each axis for machine tool axis A S1 ，Y S1 ，Z S1 ，A S1 ，C S1 ) Or the current motion component (X) of each axis when the A axis takes negative S2 ，Y S2 ，Z S2 ，A S2 ，C S2 ) And proceeds to step 12.
Step 12: as shown in FIG. 8, the X-axis movement direction (1, 0) in the current pose is used as the X of the galvanometer scanning pattern by taking the pose of each axis of the machine tool after movement as a reference G The current Y-axis motion direction (0, 1, 0) is taken as Y of the galvanometer scanning pattern in the axial direction G The axis direction, X, was calculated using the following formula G Axis, Y G Shaft in machining coordinate system O M -X M Y M Z M Lower axial direction X G，M 、Y G，M ：
Step 13: by X G，M The direction is X axis and Y axis of the scanning plane of the galvanometer G，M The direction is the Y axis of the galvanometer scanning plane, and the origin P of the galvanometer processing plane corresponding to the current processing characteristics M For the origin, establish the scanning coordinates of the galvanometer as shown in FIG. 9Line P M -X G，M Y G，M And generating a galvanometer scanning track in the coordinate system, combining the motion components (X S ，Y S ，Z S ，A S ，C S ) The complete motion parameters of the five-axis laser processing equipment with the independent beam scanning device can be obtained, so that the accurate processing of the part characteristics is realized.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The method for controlling the beam motion of the independent beam scanning five-axis laser processing equipment is characterized by comprising the following steps of:
s1, enabling a machine tool A axis to rotate positively to obtain a machine tool C axis motion component; the machine tool is a five-axis machine tool, and the five axes are an X axis, a Y axis, a Z axis, an A axis and a C axis respectively; setting a machining coordinate system O M -X M Y M Z M Next, the vibrating mirror processing pose S corresponding to the current processing characteristic M ＝(P M ，T M ) Wherein P is M ＝(x M ，y M ，z M ) For processing plane origin of vibrating mirror, T M ＝(i M ，j M ，k M ) The normal direction of a vibrating mirror machining plane is adopted; the method comprises the following steps:
s1.1, normal T of a vibrating mirror processing plane M Z around the machining coordinate system M Axis rotation to machining coordinate system-Y M O M Z M On the plane;
s1.2, obtaining a motion component C of a machine tool C axis when the machine tool A axially rotates positively through the following steps S1 ：
When the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M When=0, the motion component C of the machine tool C axis S1 The method comprises the following steps:
wherein i is M Normal T of plane for vibrating mirror processing M At X M A component on the axis;
when the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M Not equal to 0, the motion component C of the machine tool C axis S1 The method comprises the following steps:
wherein,
s2, according to the normal T of the vibrating mirror processing plane M To the working coordinate system-Y M O M Z M Planar rotation transformation matrix R -C1 Normal T of processing plane of vibration mirror M Transforming to obtain transformed vector T C，M1 The method comprises the steps of carrying out a first treatment on the surface of the Wherein the machining coordinate system is O M -X M Y M Z M ；
S3, combining the transformed vectors T C，M1 Acquiring a motion component of an axis A of a machine tool;
s4, combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis and the Z axis;
s5, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any one of the axes exceeds the travel limit of the machine tool, executing the step S6, otherwise, executing the step S8;
s6, enabling the machine tool A to rotate in the axial direction and the negative direction to obtain a motion component of the machine tool C axis; according to the normal T of the processing plane of the vibrating mirror M To +Y of the working coordinate system M O M Z M Planar rotation transformation matrix R -C2 Normal T of processing plane of vibration mirror M Transforming to obtain transformed vector T C，M2 The method comprises the steps of carrying out a first treatment on the surface of the Combining transformed vectors T C，M2 Acquiring a motion component of an axis A of a machine tool; combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis, the Z axis and the A axis;
s7, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any axis exceeds the travel limit of the machine tool, replacing the part clamping position or replacing the machine tool, otherwise, executing the step S8;
s8, calculating X by taking the rotation of the machine tool A axis and taking the pose of the machine tool A axis after the translation components of the X axis, the Y axis, the Z axis and the A axis of the machine tool A axis are moved as a reference G Axis, Y G The axial direction of the shaft under a machining coordinate system; wherein O is G -X G Y G A scanning plane coordinate system of the 2D galvanometer;
s9, according to X G Axis, Y G And (3) establishing a galvanometer scanning coordinate system in the axial direction of the shaft under the machining coordinate system, generating a galvanometer scanning track in the coordinate system, and combining the motion components of each shaft of the machine tool to obtain the complete parameters of the beam motion.
2. The method according to claim 1, wherein in step S2, the rotation transformation matrix R is -C1 Obtained by the following formula:
transformed vector T C，M1 Obtained by the following formula:
T C，M1 ＝T M ·R -C1 。
3. the method for controlling beam motion of a five-axis laser processing apparatus according to claim 2, wherein step S3 is specifically to obtain the motion component of the machine tool a axis by the following formula:
when k is C，M1 When=0, machine tool a axis motion component a S1 =pi/2; wherein k is C，M1 For transformed vector T C，M1 At Z M A component on the axis;
when k is C，M1 Not equal to 0, the motion component A of the axis A of the machine tool S1 The method comprises the following steps:
wherein,j C，M1 for transformed vector T C，M1 In Y M Components on the axis.
4. The method of claim 3, wherein step S4 is specifically to calculate the translational components X of the machine tool in the X-axis, Y-axis and Z-axis by the following formula S1 、Y S1 And Z S1 ：
Wherein P is M For the plane origin of the galvanometer machining (Deltax) 1 ，Δy 1 ，Δz 1 ) Offset from center of rotation of axis A to center of rotation of axis C of machine tool (Deltax) 2 ，Δy 2 ，Δz 2 ) R is the offset from the origin of the machine tool to the rotation center of the A axis -A1 For transformed vector T C，M1 To +Z M Rotation transformation matrix of shaft:
5. the method of beam motion control for an independent beam scanning five-axis laser machining apparatus of claim 4, wherein in step S5, the machine tool travel limit is determined by:
wherein [ x ] - ，x + ]For the X-axis movement range of the machine tool, [ y ] - ，y + ]Is the Y-axis movement range of the machine tool, [ z ] - ，z + ]Is the Z-axis movement range of the machine tool, [ alpha ] - ，α + ]Is the A axis movement range of the machine tool, (x) 0 ，y 0 ，z 0 ，α 0 ，γ 0 ) The position of the origin after tool setting is performed for the machine tool.
6. The method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus according to claim 5, wherein step S6 specifically comprises:
s6.1, normal T of a vibrating mirror processing plane M Z around the machining coordinate system M Rotation of the shaft to +Y of the machining coordinate system M O M Z M On the plane;
s6.2, obtaining a motion component C of a machine tool C axis when the machine tool A rotates in the negative direction in the axial direction through the following steps S2 ：
When the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M When=0, the motion component C of the machine tool C axis S2 The method comprises the following steps:
when the vibrating mirror is processed to be normal to the plane T M In Y M Component j on axis M Not equal to 0, the motion component C of the machine tool C axis S2 The method comprises the following steps:
s6.3, obtaining a transformed vector by the following formulaT C，M2 ：
T C，M2 ＝T M ·R -C2
Wherein:
s6.4, acquiring a motion component of the axis A of the machine tool by the following formula:
when k is C，M2 When=0, machine tool a axis motion component a S2 ＝-π/2；
When k is C，M2 Not equal to 0, the motion component A of the axis A of the machine tool S2 The method comprises the following steps:
wherein,k C，M2 for transformed vector T C，M2 At Z M Components on axis j C，M2 For transformed vector T C，M2 In Y M A component on the axis;
s6.5, calculating the translation components X of the machine tool in the X axis, the Y axis and the Z axis by the following method S2 、Y S2 And Z S2 ：
Wherein R is -A2 For transformed vector T C，M2 To +Z M Rotation transformation matrix of shaft:
7. the method of beam motion control for an independent beam scanning five-axis laser machining apparatus according to claim 6, wherein in step S7, the machine tool travel limit is determined by:
8. the method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus as claimed in claim 7, wherein step S8 is specifically to obtain X by the following formula G Axis, Y G Axial direction of the shaft under the machining coordinate system:
wherein X is G，M Is X G Axial direction of shaft under machining coordinate system, Y G，M Is Y G The axial direction of the shaft under a machining coordinate system, R -A For transformed vector T C，M1 To +Z M Rotation transformation matrix R of shaft -A1 Or transformed vector T C，M2 To +Z M Rotation transformation matrix R of shaft -A2 ，R -C For rotating the transformation matrix R -C1 Or rotating the transformation matrix R -C2 。
9. The method for controlling the beam motion of the independent beam scanning five-axis laser processing device according to claim 8, wherein the method comprises the following steps: in step S9, the galvanometer scanning coordinate system is the origin P of the galvanometer processing plane corresponding to the current processing feature M As the origin, X G，M The axes are corresponding to the X axis and Y axis G，M The axis is a coordinate system established corresponding to the Y axis.
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