CN116339238B - A beam motion control method for five-axis laser processing equipment with independent beam scanning - Google Patents

Abstract

The present invention relates to a method for controlling the motion of a light beam. In order to solve the technical problem that, when a multi-axis laser processing equipment is processed, if the motion pattern of the laser beam is not circular, misaligned processing will occur, resulting in the scrapping of parts, a method for controlling the motion of a light beam of a five-axis laser processing equipment with independent light beam scanning is provided. By analyzing the motion structure and connection relationship of a five-axis machine tool, the motion trajectory of a light beam scanning device is decomposed into each motion axis, the position of the light beam scanning device relative to a workpiece under the composite action of each axis is obtained, and then a local scanning coordinate system under the current position is established to realize the motion control of a five-axis laser processing equipment with an independent light beam scanning device.

Description

A beam motion control method for five-axis laser processing equipment with independent beam scanning

Technical Field

The invention relates to a light beam motion control method, and in particular to a light beam motion control method for five-axis laser processing equipment with independent light beam scanning.

Background technique

Multi-axis machine tools are widely used in high-tech fields such as aerospace due to their more flexible processing position control methods, to achieve the processing of complex parts such as blades, casings, ribs, etc. In order to improve the applicability of multi-axis machine tools and reduce the difficulty of writing machine tool control codes, the CNC code writing method with tool tip following (RTCP) function is generally adopted, that is, the process personnel only need to focus on how to control the relative movement of the tool and the workpiece, and do not need to pay attention to the control method of each axis of the machine tool.

With the development of laser processing technology, a large number of multi-axis laser processing equipment have also appeared in the field of laser processing. These equipment usually contain multiple mechanical axes and multiple beam axes. In order to reduce the difficulty of code writing, the RTCP function is also used in laser processing equipment. However, this function comes from mechanical processing equipment and is only applicable to the control code of the mechanical axis. It cannot control the beam axis, so that there is always a certain angle deviation between the mechanical axis coordinate system and the beam axis coordinate system during the processing. Once the motion pattern of the laser beam is not circular, the angle of the pattern to be processed is likely to deflect, resulting in misaligned processing and scrapped parts.

Summary of the invention

The present invention provides a beam motion control method for five-axis laser processing equipment with independent beam scanning to solve the technical problem that if the motion pattern of the laser beam is not circular during multi-axis laser processing, it will cause misaligned processing and scrapped parts.

In order to achieve the above object, the present invention adopts the following technical solutions:

A beam motion control method for a five-axis laser processing device with independent beam scanning is characterized in that it includes the following steps:

S1, making the A axis of the machine tool rotate in the positive direction to obtain the motion component of the C axis of the machine tool; the machine tool is a five-axis machine tool, and the five axes are respectively X-axis, Y-axis, Z-axis, A-axis and C-axis;

S2, transform the galvanometer processing plane normal TM according to the rotation transformation matrix R _-C1 from the galvanometer processing plane normal _TM to the -Y _M O _M Z _M plane of the processing coordinate system, and obtain the transformed vector TC _{, M1 ;} wherein the processing coordinate system is O _M -X _M Y _M Z _M ;

S3, combining the transformed vector TC _{, M1} , to obtain the motion component of the machine tool A axis;

S4, combining the C-axis motion component of the machine tool and the A-axis motion component of the machine tool, calculates the translation component of the machine tool on its X-axis, Y-axis, and Z-axis;

S5, determining whether the X-axis, Y-axis, Z-axis, and A-axis of the machine tool exceed the machine tool travel limit when the machine tool A axis rotates in the forward direction. If any of the axes exceeds the machine tool travel limit, execute step S6; otherwise, execute step S8;

S6, rotate the A axis of the machine tool in the negative direction to obtain the motion component _of the C axis of the machine tool; transform the normal direction _TM of the galvanometer processing plane to the + _{YMOMZM plane} of the processing coordinate system according to the rotation transformation matrix R _{-C2 ,} to obtain the transformed vector TC _,M2 ; obtain the motion component of the A axis of the machine tool by combining the transformed vector TC _,M2 ; calculate the translation components of the machine tool on its X axis, Y axis, Z axis and A axis by combining the motion component of the C axis of the machine tool and the motion component of the A axis of the machine tool;

S7, determining whether the X-axis, Y-axis, Z-axis, and A-axis of the machine tool exceed the machine tool travel limit when the machine tool A axis rotates forward. If any of the axes exceeds the machine tool travel limit, change the part clamping position or replace the machine tool. Otherwise, execute step S8;

S8, with the A axis of the machine tool rotating, and taking the position after the translational components of the X axis, Y axis, Z axis, and A axis move as a reference, calculate the axial directions of the _XG axis and the _YG axis in the machining coordinate system; wherein _OG - _XGYG is _the scanning plane coordinate system of the 2D galvanometer;

S9, according to the axial directions of the _XG axis and the _YG axis in the machining coordinate system, a galvanometer scanning coordinate system is established, and a galvanometer scanning trajectory is generated in the coordinate system, and the complete parameters of the beam motion are obtained by combining the motion components of each axis of the machine tool.

Furthermore, step S1 is specifically as follows:

S1.1, rotate the normal T _M of the galvanometer processing plane around the Z _M axis of the processing coordinate system to the -Y _M O _M Z _M plane of the processing coordinate system;

S1.2, the motion component C _S1 of the C axis of the machine tool when the A axis of the machine tool rotates in the positive direction is obtained by the following formula:

When the component j _M of the normal direction _TM of the galvanometer processing plane on the Y _M axis = 0, the motion component _CS1 of the C axis of the machine tool is:

Wherein, i _M is the component of the normal T _M of the galvanometer processing plane on the X _M axis;

When the component j _M of the normal direction _TM of the galvanometer processing plane on the Y _M axis ≠ 0, the motion component _CS1 of the C axis of the machine tool is:

in,

Further, in step S2, the rotation transformation matrix R _-C1 is obtained by the following formula:

The transformed vector T _C,M1 is obtained by the following formula:

_TC,M1 = _TM ·R _-C1 .

Furthermore, step S3 is specifically to obtain the motion component of the machine tool A axis by the following formula:

When k _{C, M1} = 0, the motion component of the machine tool A axis A _S1 = π/2; where k _{C, M1} is the component of the transformed vector T _{C, M1} on the Z _M axis;

When k _C,M1 ≠ 0, the motion component _AS1 of the machine tool A axis is:

in, j _C,M1 is the component of the transformed vector T _C,M1 on the Y _M axis.

Furthermore, step S4 is specifically to calculate the translation components X _S1 , Y _S1 and Z _S1 of the tool machine in the X-axis, Y-axis and Z-axis by the following formula:

Among them, _PM is the origin of the galvanometer processing plane, ( _Δx1 , _Δy1 , _Δz1 ) is the offset from the A-axis rotation center of the machine tool to the C-axis rotation center, ( _Δx2 , _Δy2 , _Δz2 ) is the offset from the machine tool origin to the A-axis rotation center, R _-A1 is the transformed vector _{TC, and the rotation transformation matrix from M1} to the + _ZM axis is:

Further, in step S5, the machine tool travel limit is determined by the following formula:

Among them, [x ^- , x ⁺ ] is the X-axis motion range of the machine tool, [y ^- , y ⁺ ] is the Y-axis motion range of the machine tool, [z ^- , z ⁺ ] is the Z-axis motion range of the machine tool, [α ^- , α ⁺ ] is the A-axis motion range of the machine tool, and (x ₀ , y ₀ , z ₀ , α ₀ , γ ₀ ) is the origin position of the machine tool after tool setting.

Further, step S6 is specifically as follows:

S6.1, rotate the normal T _M of the galvanometer processing plane around the Z _M axis of the processing coordinate system to the +Y _M O _M Z _M plane of the processing coordinate system;

S6.2, the motion component _CS2 of the C-axis of the machine tool when the A-axis of the machine tool rotates in the negative direction is obtained by the following formula:

When the component j _M of the normal direction _TM of the galvanometer processing plane on the Y _M axis = 0, the motion component _CS2 of the C axis of the machine tool is:

When the component j _M of the normal direction _TM of the galvanometer processing plane on the Y _M axis ≠ 0, the motion component _CS2 of the C axis of the machine tool is:

S6.3, the transformed vector T _C,M2 is obtained by the following formula:

_TC,M2 = _TM ·R _-C2

in:

S6.4, obtain the motion component of the machine tool A axis through the following formula:

When k _C,M2 = 0, the motion component of the machine tool A axis _AS2 = -π/2;

When k _C,M2 ≠0, the motion component _AS2 of the machine tool A axis is:

in, k _C,M2 is the component of the transformed vector T _C,M2 on the Z _M axis, j _C,M2 is the component of the transformed vector T _C,M2 on the Y _M axis;

S6.5, calculate the translation components X _S2 , Y _S2 and Z _S2 of the tool in its X-axis, Y-axis and Z-axis by the following formula:

Among them, R _-A2 is the rotation transformation matrix of the transformed vector T _C,M2 to the +Z _M axis:

Further, in step S7, the machine tool travel limit is determined by the following formula:

Furthermore, step S8 is specifically to obtain the axial directions of the _XG axis and the _YG axis in the machining coordinate system by the following formula:

Among them, XG _,M is the axial direction of the _XG axis in the machining coordinate system, YG _,M is the axial direction of the _YG axis in the machining coordinate system, R _-A is the rotation transformation matrix R _-A1 of the transformed vector TC _,M1 to the + _ZM axis or the rotation transformation matrix R _-A2 of the transformed vector TC _,M2 to the + _ZM axis, and R _-C is the rotation transformation matrix R _-C1 or the rotation transformation matrix R _-C2 .

Furthermore, in step S9, the galvanometer scanning coordinate system is a coordinate system established with the origin _PM of the galvanometer processing plane corresponding to the current processing feature as the origin, the XG _,M axis as the corresponding X axis, and the YG _,M axis as the corresponding Y axis.

Compared with the prior art, the present invention has the following beneficial effects:

The present invention proposes a beam motion control method for a five-axis laser processing equipment with independent beam scanning, which ensures that the composite motion trajectory of the beam follows a preset path by controlling the motion components of each axis of the five-axis laser processing equipment with an independent beam scanning device, thereby realizing the correct processing of specified shape features on any part. By analyzing the motion structure and connection relationship of the five-axis machine tool, the motion trajectory of the beam scanning device is decomposed into each motion axis, the position and posture of the beam scanning device relative to the workpiece under the composite action of each axis is obtained, and then a local scanning coordinate system under the current position and posture is established to realize the motion control of the five-axis laser processing equipment with an independent beam scanning device.

BRIEF DESCRIPTION OF THE DRAWINGS

Figure 1 is a schematic diagram of a five-axis laser processing equipment in the form of an XYZAC mechanical structure + 2D galvanometer;

FIG2 is a schematic diagram of the processing postures of a workpiece and a galvanometer mirror in an embodiment of a beam motion control method for a five-axis laser processing device with independent beam scanning according to the present invention;

3 is a schematic diagram of the transformation relationship of the vector _TM from the -Y _M O _M X _M plane of the processing coordinate system to the -Y _M O _M Z _M plane in an embodiment of a beam motion control method for a five-axis laser processing equipment with independent beam scanning of the present invention;

4 is a schematic diagram of the transformation relationship of the vector T _C,M1 rotating to the Z _M axis when j _C,M1 ≤0 in an embodiment of a beam motion control method for a five-axis laser processing device with independent beam scanning according to the present invention;

5 is a schematic diagram of the transformation relationship of the vector _TM rotating to the +Y _M O _M Z _M plane of the coordinate system in an embodiment of a beam motion control method for a five-axis laser processing device with independent beam scanning according to the present invention;

6 is a schematic diagram of the transformation relationship of the vector T _{C, M2} rotating to the Z _M axis when j _{C, M2} ≥ 0 in an embodiment of a beam motion control method for a five-axis laser processing device with independent beam scanning according to the present invention;

7 is a schematic diagram of the position and posture of each axis of the machine tool after movement and the galvanometer processing result under the original graphics in an embodiment of a beam motion control method for a five-axis laser processing equipment with independent beam scanning of the present invention;

FIG8 is a schematic diagram of a galvanometer scanning coordinate system in a machine tool in an embodiment of a beam motion control method for a five-axis laser processing device with independent beam scanning according to the present invention;

Fig. 9 is a schematic diagram of a galvanometer coordinate system _PM - _{XG , MYG, M in} a processing coordinate system OM- _XMYMZM in an embodiment of a beam motion control method for _a five-axis laser processing equipment with independent beam scanning of the present invention.

Detailed ways

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

In order to solve the problem that when a multi-axis laser processing equipment is processing, if the motion pattern of the laser beam is not circular, it will cause misaligned processing and cause the parts to be scrapped, the present invention proposes a beam motion control method for a five-axis laser processing equipment with independent beam scanning. The following is a specific embodiment of the present invention, which includes the following steps:

As shown in Figure 1, taking the five-axis laser processing equipment composed of XYZAC mechanical motion structure + 2D galvanometer as an example, the offset from the A-axis rotation center to the C-axis rotation center is ( _Δx1 , _Δy1 , _Δz1 ), the offset from the machine tool origin to the A-axis rotation center is ( _Δx2 , _Δy2 , _Δz2 ), and the _XG and _YG axes in the scanning plane coordinate system _OG - _XGYG of the 2D galvanometer are parallel to the X-axis and Y-axis of the machine tool _, respectively. The machine tool X-axis motion range is [x ^- , x ⁺ ], the Y-axis motion range is [y ^- , y ⁺ ], the Z-axis motion range is [z ^- , z ⁺ ], the A-axis motion range is [α ^- , α ⁺ ], and the C-axis motion range is [0°, 360°] (supports continuous rotation). The origin position of the machine tool after tool setting is (x ₀ , y ₀ , z ₀ , α ₀ , γ ₀ ). The specific motion control implementation steps are as follows:

Step 1: As shown in Figure 2, assume that in the processing coordinate system O _M -X _M Y _M Z _M , the galvanometer processing posture S _M = (P _M , T _M ) corresponding to the current processing feature, where P _M = (x _M , y _M , z _M ) is the origin of the galvanometer processing plane, and T _M = (i _M , j _M , k _M ) is the normal of the galvanometer processing plane.

Step 2: As shown in Figure 3, in order to make the machine tool A axis rotate in the positive direction, A ≥ 0 should be taken, so the vector _TM needs to be rotated from the -Y _M O _M X _M plane of the machining coordinate system around the Z _M axis to the -Y _M O _M Z _M plane of the machining coordinate system, so as to obtain the machine tool C axis motion component. Among them, when the component j _M of _TM on the Y _M axis = 0, the machine tool C axis motion component _CS1 can be calculated by the following formula:

Where i _M is the component of T _M on the X _M axis;

When j _M ≠ 0, the C-axis motion component of the machine tool, C _S1 , can be calculated by the following formula:

in,

Step 3: The rotation transformation matrix R _-C1 of the vector _TM to _{the -YMOMZM plane} can be expressed as:

Then, using R _-C1, the vector _TM can be transformed into a vector TC _,M1 = (i _C,M1 , j _C,M1 , k _C,M1 ), that is:

_TC,M1 = _TM ·R _-C1

Among them, there must exist j _C,M1 ≤0.

Step 4: As shown in Figure 4, rotate the vector T _{C, M1} around the X _M axis to the + Z _M axis on the Y _M O _M Z _M plane to obtain the A-axis motion component of the machine tool. When k _{C, M1} = 0, the A-axis motion component of the machine tool _AS1 = π/2; when k _{C, M1} ≠ 0, the A-axis motion component of the machine tool _AS1 can be calculated by the following formula:

Where/>

Step 5: The rotation transformation matrix R _-A1 of the vector _TC,M1 to the + _ZM axis can be expressed as:

Step 6: After obtaining the motion components _CS1 and _AS1 of the two rotation axes of the machine tool, the three translation components _XS1 , _YS1 and _ZS1 of the machine tool in the X-axis, Y-axis and Z-axis can be calculated by the following formula:

Step 7: Since the C axis of the machine tool can rotate continuously, the C axis will not exceed the machine tool travel. The X, Y, Z, and A axes of the machine tool are limited by travel. The following conditions need to be used to determine whether the current axes exceed the machine tool travel limit, namely:

When the motion components of each axis meet the machine tool travel conditions, go to step 11; otherwise, go to step 8.

Step 8: As shown in Figure 5, make the machine tool A-axis rotate in the negative direction, that is, take A<0, so it is necessary to rotate the vector _TM around the _ZM axis to the + _YMOMZM plane of the _coordinate system to obtain _the C-axis motion component of the machine tool.

When j _M = 0, the C-axis motion component _CS2 of the machine tool can be calculated by the following formula:

When j _M ≠ 0, the C-axis motion component _CS2 of the machine tool can be calculated by the following formula:

Where/>

Then the rotation transformation matrix of vector _TM to + _{YMOMZM plane is}

After R _-C2 transformation, the vector _TM obtains _TC,M2 (iC _,M2 ,jC _,M2 ,kC _,M2 )= _TM ·R _-C2 , then jC _, M2≥0.

Step 9: As shown in Figure 6, rotate the vector T _{C, M2} around the X _M axis to the + Z _M axis on the Y _M O _M Z _M plane to obtain the A-axis motion component of the machine tool. Among them, when k _{C, M2} = 0, the A-axis motion component of the machine tool _AS2 = -π/2; when k _{C, M2} ≠ 0, the A-axis motion component of the machine tool _AS2 can be calculated by the following formula:

Where/>

Then the rotation transformation matrix R _-A2 of the vector T _C,M2 to the +Z _M axis can be expressed as:

Therefore, the three translation components of the machine tool X _S2 , Y _S2 and Z _S2 can be calculated by the following formula:

Step 10: Determine whether the motion components of the machine tool X, Y, Z, and A axes meet the following restrictions

If the conditions are met, go to step 11; otherwise, it can be determined that the current equipment cannot be used to process the part, and the part clamping position needs to be changed or the machine tool needs to be replaced.

Step 11: As shown in FIG7 , after the axes of the machine tool undergo the above rotation and translation motion, if the galvanometer is directly used to scan the original graphics, the processed features will rotate and the wrong shape will be obtained. To deal with this problem, let (R _-A , R _-C ) be the transformation matrix (R _-A1 , R _-C1 ) during the positive rotation of the A axis of the machine tool or the transformation matrix (R _-A2 , R _-C2 ) during the negative rotation of the A axis, ( _XS , _YS , _ZS , _AS , _CS ) be the current motion components of each axis when the A axis of the machine tool takes the positive direction ( _XS1 , _YS1 , _ZS1 , _AS1 , _CS1 ) or the current motion components of each axis when the A axis takes the negative direction ( _XS2 , _YS2 , _ZS2 , _AS2 , _CS2 ), and go to step 12.

Step 12: As shown in Figure 8, taking the position and posture of each axis of the machine tool after movement as a reference, the X-axis movement direction (1, 0, 0) in the current position and posture is used as the _XG- axis direction of the galvanometer scanning pattern, and the current Y-axis movement direction (0, 1, 0) is used as the _YG- axis direction of the galvanometer scanning pattern. The axial directions _XG , _M and _YG , _M of the _{XG and YG} axes in the machining coordinate system _OM - _XMYMZM are calculated using the following formula:

Step 13: With the XG _,M direction as the X-axis of the galvanometer scanning plane, the YG _,M direction as the Y-axis of the galvanometer scanning plane, and the origin _PM of the galvanometer processing plane corresponding to the current processing feature as the origin, establish the galvanometer scanning coordinate system _PM - _{XG,MYG ,M} as shown in Figure 9, and generate the galvanometer scanning trajectory in the coordinate system. Combined with the motion components of each axis of the machine tool ( _XS , _YS , _ZS , _AS , _CS ), the complete motion parameters of the five-axis laser processing equipment with an independent beam scanning device can be obtained, thereby realizing accurate processing of part features.

The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims (9)

1. The method for controlling the beam motion of the independent beam scanning five-axis laser processing equipment is characterized by comprising the following steps of:

s1, enabling a machine tool A axis to rotate positively to obtain a machine tool C axis motion component; the machine tool is a five-axis machine tool, and the five axes are an X axis, a Y axis, a Z axis, an A axis and a C axis respectively; setting a machining coordinate system O _M -X _M Y _M Z _M Next, the vibrating mirror processing pose S corresponding to the current processing characteristic _M ＝(P _M ，T _M ) Wherein P is _M ＝(x _M ，y _M ，z _M ) For processing plane origin of vibrating mirror, T _M ＝(i _M ，j _M ，k _M ) The normal direction of a vibrating mirror machining plane is adopted; the method comprises the following steps:

s1.1, normal T of a vibrating mirror processing plane _M Z around the machining coordinate system _M Axis rotation to machining coordinate system-Y _M O _M Z _M On the plane;

s1.2, obtaining a motion component C of a machine tool C axis when the machine tool A axially rotates positively through the following steps _S1 ：

When the vibrating mirror is processed to be normal to the plane T _M In Y _M Component j on axis _M When=0, the motion component C of the machine tool C axis _S1 The method comprises the following steps:

wherein i is _M Normal T of plane for vibrating mirror processing _M At X _M A component on the axis;

when the vibrating mirror is processed to be normal to the plane T _M In Y _M Component j on axis _M Not equal to 0, the motion component C of the machine tool C axis _S1 The method comprises the following steps:

wherein,

s2, according to the normal T of the vibrating mirror processing plane _M To the working coordinate system-Y _M O _M Z _M Planar rotation transformation matrix R _-C1 Normal T of processing plane of vibration mirror _M Transforming to obtain transformed vector T _C，M1 The method comprises the steps of carrying out a first treatment on the surface of the Wherein the machining coordinate system is O _M -X _M Y _M Z _M ；

S3, combining the transformed vectors T _C，M1 Acquiring a motion component of an axis A of a machine tool;

s4, combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis and the Z axis;

s5, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any one of the axes exceeds the travel limit of the machine tool, executing the step S6, otherwise, executing the step S8;

s6, enabling the machine tool A to rotate in the axial direction and the negative direction to obtain a motion component of the machine tool C axis; according to the normal T of the processing plane of the vibrating mirror _M To +Y of the working coordinate system _M O _M Z _M Planar rotation transformation matrix R _-C2 Normal T of processing plane of vibration mirror _M Transforming to obtain transformed vector T _C，M2 The method comprises the steps of carrying out a first treatment on the surface of the Combining transformed vectors T _C，M2 Acquiring a motion component of an axis A of a machine tool; combining the motion component of the machine tool C axis and the motion component of the machine tool A axis, and calculating translation components of the machine tool in the X axis, the Y axis, the Z axis and the A axis;

s7, judging whether the X axis, the Y axis, the Z axis and the A axis of the machine tool exceed the travel limit of the machine tool under the forward rotation of the A axis of the machine tool, if any axis exceeds the travel limit of the machine tool, replacing the part clamping position or replacing the machine tool, otherwise, executing the step S8;

s8, calculating X by taking the rotation of the machine tool A axis and taking the pose of the machine tool A axis after the translation components of the X axis, the Y axis, the Z axis and the A axis of the machine tool A axis are moved as a reference _G Axis, Y _G The axial direction of the shaft under a machining coordinate system; wherein O is _G -X _G Y _G A scanning plane coordinate system of the 2D galvanometer;

s9, according to X _G Axis, Y _G And (3) establishing a galvanometer scanning coordinate system in the axial direction of the shaft under the machining coordinate system, generating a galvanometer scanning track in the coordinate system, and combining the motion components of each shaft of the machine tool to obtain the complete parameters of the beam motion.

2. The method according to claim 1, wherein in step S2, the rotation transformation matrix R is _-C1 Obtained by the following formula:

transformed vector T _C，M1 Obtained by the following formula:

T _C，M1 ＝T _M ·R _-C1 。

3. the method for controlling beam motion of a five-axis laser processing apparatus according to claim 2, wherein step S3 is specifically to obtain the motion component of the machine tool a axis by the following formula:

when k is _C，M1 When=0, machine tool a axis motion component a _S1 =pi/2; wherein k is _C，M1 For transformed vector T _C，M1 At Z _M A component on the axis;

when k is _C，M1 Not equal to 0, the motion component A of the axis A of the machine tool _S1 The method comprises the following steps:

wherein,j _C，M1 for transformed vector T _C，M1 In Y _M Components on the axis.

4. The method of claim 3, wherein step S4 is specifically to calculate the translational components X of the machine tool in the X-axis, Y-axis and Z-axis by the following formula _S1 、Y _S1 And Z _S1 ：

Wherein P is _M For the plane origin of the galvanometer machining (Deltax) ₁ ，Δy ₁ ，Δz ₁ ) Offset from center of rotation of axis A to center of rotation of axis C of machine tool (Deltax) ₂ ，Δy ₂ ，Δz ₂ ) R is the offset from the origin of the machine tool to the rotation center of the A axis _-A1 For transformed vector T _C，M1 To +Z _M Rotation transformation matrix of shaft:

5. the method of beam motion control for an independent beam scanning five-axis laser machining apparatus of claim 4, wherein in step S5, the machine tool travel limit is determined by:

wherein [ x ] ^- ，x ⁺ ]For the X-axis movement range of the machine tool, [ y ] ^- ，y ⁺ ]Is the Y-axis movement range of the machine tool, [ z ] ^- ，z ⁺ ]Is the Z-axis movement range of the machine tool, [ alpha ] ^- ，α ⁺ ]Is the A axis movement range of the machine tool, (x) ₀ ，y ₀ ，z ₀ ，α ₀ ，γ ₀ ) The position of the origin after tool setting is performed for the machine tool.

6. The method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus according to claim 5, wherein step S6 specifically comprises:

s6.1, normal T of a vibrating mirror processing plane _M Z around the machining coordinate system _M Rotation of the shaft to +Y of the machining coordinate system _M O _M Z _M On the plane;

s6.2, obtaining a motion component C of a machine tool C axis when the machine tool A rotates in the negative direction in the axial direction through the following steps _S2 ：

When the vibrating mirror is processed to be normal to the plane T _M In Y _M Component j on axis _M When=0, the motion component C of the machine tool C axis _S2 The method comprises the following steps:

when the vibrating mirror is processed to be normal to the plane T _M In Y _M Component j on axis _M Not equal to 0, the motion component C of the machine tool C axis _S2 The method comprises the following steps:

s6.3, obtaining a transformed vector by the following formulaT _C，M2 ：

T _C，M2 ＝T _M ·R _-C2

Wherein:

s6.4, acquiring a motion component of the axis A of the machine tool by the following formula:

when k is _C，M2 When=0, machine tool a axis motion component a _S2 ＝-π/2；

When k is _C，M2 Not equal to 0, the motion component A of the axis A of the machine tool _S2 The method comprises the following steps:

wherein,k _C，M2 for transformed vector T _C，M2 At Z _M Components on axis j _C，M2 For transformed vector T _C，M2 In Y _M A component on the axis;

s6.5, calculating the translation components X of the machine tool in the X axis, the Y axis and the Z axis by the following method _S2 、Y _S2 And Z _S2 ：

Wherein R is _-A2 For transformed vector T _C，M2 To +Z _M Rotation transformation matrix of shaft:

7. the method of beam motion control for an independent beam scanning five-axis laser machining apparatus according to claim 6, wherein in step S7, the machine tool travel limit is determined by:

8. the method for controlling beam motion of an independent beam scanning five-axis laser processing apparatus as claimed in claim 7, wherein step S8 is specifically to obtain X by the following formula _G Axis, Y _G Axial direction of the shaft under the machining coordinate system:

wherein X is _G，M Is X _G Axial direction of shaft under machining coordinate system, Y _G，M Is Y _G The axial direction of the shaft under a machining coordinate system, R _-A For transformed vector T _C，M1 To +Z _M Rotation transformation matrix R of shaft _-A1 Or transformed vector T _C，M2 To +Z _M Rotation transformation matrix R of shaft _-A2 ，R _-C For rotating the transformation matrix R _-C1 Or rotating the transformation matrix R _-C2 。

9. The method for controlling the beam motion of the independent beam scanning five-axis laser processing device according to claim 8, wherein the method comprises the following steps: in step S9, the galvanometer scanning coordinate system is the origin P of the galvanometer processing plane corresponding to the current processing feature _M As the origin, X _G，M The axes are corresponding to the X axis and Y axis _G，M The axis is a coordinate system established corresponding to the Y axis.