CN116162997A

CN116162997A - Electroplating device capable of recycling electroplating solution

Info

Publication number: CN116162997A
Application number: CN202310449879.7A
Authority: CN
Inventors: 肖锦成; 陈云利; 赵细海
Original assignee: Suzhou Zunheng Semiconductor Technology Co ltd
Current assignee: Suzhou Zunheng Semiconductor Technology Co ltd
Priority date: 2023-04-25
Filing date: 2023-04-25
Publication date: 2023-05-26
Anticipated expiration: 2043-04-25
Also published as: CN116162997B

Abstract

The invention discloses an electroplating device capable of recycling electroplating liquid, which relates to the technical field of electroplating and comprises a base, wherein an annular electroplating pool is fixedly arranged on the base, a main support frame is fixedly arranged on the base at a position close to the annular electroplating pool, the electroplating device further comprises a C-shaped slope end, a double-layer lower rail groove, an upper rail groove, an upright post and a pushing assembly, the C-shaped slope end is fixedly arranged in the annular electroplating pool, an electroplating sinking groove is formed between one end of the C-shaped slope end and the annular electroplating pool, and the double-layer lower rail groove and the upper rail groove are both arranged above the annular electroplating pool; according to the invention, after the electroplating of the parts is completed, redundant electroplating liquid can drop on the C-shaped slope surface end right below, and meanwhile, as the surface of the C-shaped slope surface end is of an inclined structure, the contained electroplating liquid can flow back into the electroplating sink tank again, so that the recycling of the electroplating liquid is realized, and meanwhile, the pollution of the dropped electroplating liquid to a production site is avoided.

Description

Electroplating device capable of recycling electroplating solution

Technical Field

The invention relates to the technical field of electroplating, in particular to an electroplating device capable of recycling electroplating liquid.

Background

Electroplating is a process of plating a thin layer of other metals or alloys on the surface of some metals by utilizing the electrolysis principle, and is a process of adhering a metal film on the surface of the metal or other material parts by utilizing the electrolysis so as to prevent the oxidation of the metal, thereby achieving the effects of improving the wear resistance, the conductivity, the reflectivity, the corrosion resistance, the beautiful appearance and the like. The wafer is a silicon chip used for manufacturing a silicon semiconductor integrated circuit, copper plating is required to be carried out on the surface of the wafer in the production and processing process, but more electroplating liquid is adhered to the surface of the wafer after electroplating, so that the direct cleaning can cause great waste of the electroplating liquid, and the rinsing pressure is increased.

Through retrieving, chinese patent with publication number CN213835593U discloses a plating bath of recoverable plating solution, which comprises a tank body, the cell body middle part is equipped with the baffle, the baffle divide into electroplating zone and recovery district with the cell body, recovery district bottom is the slope setting, be equipped with a plurality of inlet openings on the baffle, electromagnetic valve is connected towards electroplating zone one side to the inlet opening, the inlet opening is located the recovery district bottom minimum, be equipped with the filter screen on the inlet opening inner wall, electromagnetic valve passes through electric connection controlling means.

This patent sets up the recovery district and sets up the recovery district into the slope setting to be equipped with the filter screen on the inlet opening inner wall, can retrieve electroplating solution that flows down to the electroplating district, improve utilization efficiency, and be equipped with the buffer between the electroplating district in the recovery district, steerable electroplating solution concentration after retrieving.

However, the above invention has the following disadvantages: the patent can recycle the flowing electroplating solution to the electroplating area, thereby improving the utilization efficiency; however, since more plating solution adheres to the surface of the electroplated part, the plating solution drops only by gravity, and the overall efficiency is low, so that more plating solution adheres to the surface of the electroplated part, and the recycling rate of the plating solution is affected, and the limitation exists.

Disclosure of Invention

The present invention is directed to an electroplating apparatus capable of recycling electroplating solution, and aims to solve the above-mentioned problems.

The technical scheme of the invention is as follows: the electroplating device capable of recycling the electroplating liquid comprises a base, wherein an annular electroplating pool is fixedly arranged on the base, a main support frame is fixedly arranged at a position, close to the annular electroplating pool, on the base, and the electroplating device further comprises;

the C-shaped slope surface end is fixedly arranged in the annular electroplating pool, and an electroplating sink groove is formed between one end of the C-shaped slope surface end and the annular electroplating pool;

the double-layer lower rail groove and the upper rail groove are both arranged above the annular electroplating pool, a plurality of hanger components are movably arranged on the double-layer lower rail groove and the upper rail groove together, and one end of the double-layer lower rail groove and one end of the upper rail groove, which are close to the electroplating sinking groove, are lower than the other end;

the stand column is arranged with the annular electroplating Chi Tongzhou, the bottom end of the stand column is fixedly connected with the surface of the base, and the top end of the stand column is fixedly connected with the main support;

the pushing assembly comprises a worm wheel sleeve which is rotatably arranged on the upright post, a mounting plate is fixed on one side of the top end of the main supporting frame, a stepping motor is fixedly arranged on the bottom side wall of the mounting plate, an output shaft of the stepping motor is connected with a worm meshed with the worm wheel sleeve through a coupling, the other end of the worm is rotatably connected with the mounting plate, a plurality of driving frames which are equidistantly distributed are fixedly connected with the circumferential outer wall of the worm wheel sleeve, and a strip-shaped groove is formed in the end part of each driving frame.

Preferably, each hanger component comprises a sliding block, the sliding blocks are slidably mounted between the double-layer lower rail groove and the upper rail groove, upper supporting blocks which are slidably matched with the upper rail groove are fixedly mounted at the top ends of the sliding blocks, and lower supporting plates which are slidably matched with the outer side walls of the double-layer lower rail groove are fixedly mounted at the bottoms of the sliding blocks.

Preferably, the bottom of bottom layer board all fixedly connected with extension board, the bottom of extension board is provided with the box, has seted up movable mouth on the box, the thickness of movable mouth and the thickness assorted of extension board, the width of movable mouth is greater than the width of extension board, the bottom fixed mounting of extension board has the diamond, fixedly connected with reset spring between diamond bottom and the box bottom, fixedly connected with vibration spring one between extension board and the box top.

Preferably, the end rods are fixedly arranged on the inner walls of the two sides of the frame box, the supporting wheels are rotatably arranged at the end parts of the end rods, the supporting wheels are in contact with the inclined surfaces of the two sides of the diamond-shaped blocks, the connecting plate is fixedly arranged at the bottom of the frame box, the second vibrating springs are fixedly arranged at the bottom of the connecting plate, and a pair of connecting clamping blocks are fixedly arranged at the end parts of each pair of vibrating springs.

Preferably, each pair of connecting clamping blocks is fixedly clamped with an extending frame plate, the bottom of the extending frame plate is fixedly provided with a clamping plate, and the clamping plate is used for clamping and fixing parts to be processed.

Preferably, each sliding block is provided with a roller shaft in a rotating mode, the roller shafts are in rolling connection with the double-layer lower rail grooves, one end of each roller shaft is fixedly provided with an extending limiting shaft which is coaxially arranged, and one end of each extending limiting shaft extends into each strip-shaped groove.

Preferably, the outer wall of one side of each frame box is fixedly connected with a folded ball rod, and a plurality of inclined plane butting blocks distributed at equal intervals are fixedly connected to the side wall of one end bottom of the double-layer lower rail groove.

Preferably, the inner side wall at the bottom end of each strip-shaped groove is fixedly connected with trapezoid sheets which are symmetrically distributed.

Preferably, a plurality of pairs of inner support rods are fixedly connected between the outer peripheral wall of the upright post and the inner side walls of the double-layer lower rail groove and the upper rail groove, a plurality of outer support rods are fixedly mounted between the outer peripheral wall of the annular electroplating pool and the outer side walls of the double-layer lower rail groove, and a plurality of stiffening ribs are fixedly connected between the outer peripheral wall of the upright post close to the bottom end and the base.

Preferably, a PLC controller is fixedly arranged at the top of the mounting plate, and the PLC controller is electrically connected with the stepping motor.

The invention provides a plating device capable of recycling plating solution by improving the plating device, which has the following improvements and advantages compared with the prior art:

the method comprises the following steps: according to the invention, after the electroplating of the parts is completed, redundant electroplating liquid can drop on the C-shaped slope surface end right below, and meanwhile, as the surface of the C-shaped slope surface end is of an inclined structure, the contained electroplating liquid can flow back into the electroplating sink tank again, so that the recycling of the electroplating liquid is realized, and meanwhile, the pollution of the dropped electroplating liquid to a production site is avoided.

And two,: when the frame box is acted by external force, the frame box can relatively move with the extension plate in the vertical direction, and the diamond-shaped blocks are fixedly connected with the extension plate, so that the frame box can relatively move with the diamond-shaped blocks, and under the action of the supporting wheels, the frame box can move in the horizontal direction relative to the diamond-shaped blocks; meanwhile, under the action of the vibration spring I and the reset spring, the frame box and the connecting plate can reciprocate in the vertical and horizontal directions, at the moment, the connecting clamping blocks connected through the vibration spring II can generate irregular vibration, so that the electroplating liquid on the surface of the electroplated part can be shaken off, and the electroplating liquid can be efficiently recovered;

and thirdly,: when the hanger component moves continuously along the double-layer lower rail groove and the upper rail groove and the height of the hanger component rises, the extension limiting shaft is separated from the trapezoid sheet, the inner diameter of the strip-shaped groove is larger than the diameter of the extension limiting shaft, and when the extension limiting shaft is pushed by the strip-shaped groove and stops at fixed frequency, the extension limiting shaft moves continuously due to inertia and collides with the other side of the strip-shaped groove, and the process can also cause shaking of the clamping plate, so that recovery of electroplating liquid is further promoted.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of an overall first perspective view of the present invention;

FIG. 2 is a schematic view of the overall second perspective of the present invention;

FIG. 3 is a schematic diagram of a front view of the present invention;

FIG. 4 is a schematic perspective view of a driving frame according to the present invention;

FIG. 5 is a schematic view of the structure of the upper rail groove and the double-layer lower rail groove of the present invention;

FIG. 6 is a perspective view of a hanger assembly according to the present invention at a first perspective;

FIG. 7 is a schematic view of a second perspective view of the hanger assembly of the present invention;

FIG. 8 is an enlarged schematic view of the structure of FIG. 6A according to the present invention;

FIG. 9 is a schematic diagram of a double-layer lower rail groove in a three-dimensional structure according to the present invention;

fig. 10 is a schematic view of a partial plan structure of a driving frame according to the present invention.

Reference numerals:

1. a base; 11. an annular electroplating pool; 12. a C-shaped slope end; 13. electroplating a sink tank; 2. a main support; 21. a mounting plate; 22. a PLC controller; 23. a stepping motor; 24. a worm; 3. a column; 31. stiffening ribs; 32. an inner support bar; 33. an outer support rod; 4. a worm wheel sleeve; 41. a drive rack; 42. a bar-shaped groove; 43. a trapezoid sheet; 5. a double-layer lower rail groove; 51. an upper rail groove; 52. the inclined plane is abutted against the block; 6. a hanger assembly; 61. a slide block; 62. a supporting block is arranged; 63. a roller shaft; 64. extending a limit shaft; 65. a lower support plate; 651. a vibration spring I; 652. diamond-shaped blocks; 653. a return spring; 654. an extension plate; 66. a clamping plate; 661. an extension frame plate; 67. a frame box; 671. a folded cue; 672. an end rod; 673. a supporting wheel; 68. a connecting plate; 69. connecting the clamping blocks; 691. and a vibration spring II.

Detailed Description

The following detailed description of the present invention clearly and fully describes the technical solutions of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The invention provides an electroplating device capable of recycling electroplating liquid by improving the electroplating device, which adopts the technical scheme that:

as shown in fig. 1 to 10, an embodiment of the present invention provides an electroplating device capable of recycling electroplating solution, which comprises a base 1, wherein an annular electroplating pool 11 is fixedly installed on the base 1, and a main support 2 is fixed on the base 1 at a position close to the annular electroplating pool 11, and further comprises;

the C-shaped slope surface end 12 is fixedly arranged in the annular electroplating pool 11, and an electroplating sink 13 is formed between one end of the C-shaped slope surface end 12 and the annular electroplating pool 11; the electroplating solution is arranged in the electroplating sedimentation tank 13 and is used for electroplating the parts;

the C-shaped slope end 12 is arranged, when the electroplating of the parts is completed, redundant electroplating liquid can drop on the C-shaped slope end 12 right below, meanwhile, as the surface of the C-shaped slope end 12 is of an inclined structure, the contained electroplating liquid can flow back into the electroplating sink 13 again, thereby realizing recycling of the electroplating liquid, and simultaneously, avoiding pollution of the dropped electroplating liquid to a production site.

The double-layer lower rail groove 5 and the upper rail groove 51 are arranged at the upper position of the annular electroplating pool 11, a plurality of hanger components 6 are movably arranged on the double-layer lower rail groove 5 and the upper rail groove 51 together, and one end, close to the electroplating sinking groove 13, of the double-layer lower rail groove 5 and the upper rail groove 51 is lower than the other end; the hanger assembly 6 can move along the double-layer lower rail groove 5 and the upper rail groove 51, and the hanger assembly 6 is used for hanging and fixing parts.

The upright post 3 is coaxially arranged with the annular electroplating pool 11, the bottom end of the upright post 3 is fixedly connected with the surface of the base 1, and the top end of the upright post 3 is fixedly connected with the main support 2; the upright 3 and main support 2 provide the mounting base for the subsequent pushing assembly.

The pushing assembly comprises a worm wheel sleeve 4 rotatably mounted on the upright post 3, a mounting plate 21 is fixed on one side of the top end of the main support 2, a stepping motor 23 is fixedly mounted on the bottom side wall of the mounting plate 21, an output shaft of the stepping motor 23 is connected with a worm 24 meshed with the worm wheel sleeve 4 through a coupler, the other end of the worm 24 is rotatably connected with the mounting plate 21, a plurality of driving frames 41 distributed at equal distance are fixedly connected with the circumferential outer wall of the worm wheel sleeve 4, and strip-shaped grooves 42 are formed in the end parts of the driving frames 41; through the structure, when electroplating operation is performed, the stepping motor 23 can be controlled to be started, the worm 24 is driven to rotate by utilizing the fixed frequency of the stepping motor 23, the worm wheel sleeve 4 is enabled to rotate by a fixed angle at fixed frequency, meanwhile, the driving frame 41 and the worm wheel sleeve 4 synchronously rotate, and the pushing of the hanger assembly 6 is realized by utilizing the strip-shaped groove 42.

Further, each hanger assembly 6 comprises a sliding block 61, the sliding blocks 61 are slidably mounted between the double-layer lower rail groove 5 and the upper rail groove 51, the top ends of the sliding blocks 61 are fixedly provided with upper supporting blocks 62 which are slidably matched with the upper rail groove 51, and the bottoms of the sliding blocks 61 are fixedly provided with lower supporting plates 65 which are slidably matched with the outer side walls of the double-layer lower rail groove 5; through the arrangement, the upper supporting block 62 and the lower supporting plate 65 are respectively matched with the upper rail groove 51 and the double-layer lower rail groove 5, so that the stability of the sliding block 61 during movement is effectively improved.

As a further scheme of the invention, the bottom ends of the lower supporting plates 65 are fixedly connected with an extension plate 654, the bottom ends of the extension plate 654 are provided with a frame box 67, the frame box 67 is provided with a movable opening, the thickness of the movable opening is matched with that of the extension plate 654, the width of the movable opening is larger than that of the extension plate 654, the bottom ends of the extension plate 654 are fixedly provided with diamond blocks 652, a reset spring 653 is fixedly connected between the bottoms of the diamond blocks 652 and the inner bottoms of the frame box 67, and a vibration spring 651 is fixedly connected between the extension plate 654 and the top of the frame box 67; with this arrangement, the extension plate 654 can move in the vertical direction and the width direction of the movable port through the movable port and the frame case 67.

Further, end rods 672 are fixedly mounted on the inner walls of two sides of the frame box 67, abutting wheels 673 are rotatably mounted at the end parts of the end rods 672, the abutting wheels 673 are in contact with inclined surfaces of two sides of the diamond 652, a connecting plate 68 is fixedly mounted at the bottom of the frame box 67, a pair of vibration springs II 691 are fixedly mounted at the bottom of the connecting plate 68, and a pair of connecting clamping blocks 69 are fixedly mounted at the end parts of each pair of vibration springs II 691.

Further, each pair of connecting clamping blocks 69 is fixedly provided with an extending frame plate 661, the bottom of the extending frame plate 661 is fixedly provided with a clamping plate 66, the clamping plate 66 is used for clamping and fixing a wafer to be processed, and meanwhile, the clamping plate 66 is a special wafer clamp, so that the clamping force is ensured, and meanwhile, the wafer is not damaged.

Through the above structure, when the frame box 67 receives an external force, the frame box 67 and the extension plate 654 can move relatively in the vertical direction, and as the diamond blocks 652 and the extension plate 654 are fixedly connected, the frame box 67 and the diamond blocks 652 can move relatively, and under the action of the abutting wheels 673, the frame box 67 can move horizontally relative to the diamond blocks 652; meanwhile, under the action of the first vibration spring 651 and the return spring 653, the frame box 67 and the connecting plate 68 can reciprocate in the vertical and horizontal directions, at this time, the connecting clamping block 69 connected through the second vibration spring 691 can generate irregular vibration, so that electroplating liquid on the surface of the electroplated part can be shaken off, and efficient recovery of the electroplating liquid is realized.

As a further scheme of the invention, each sliding block 61 is rotatably provided with a roller shaft 63, the roller shafts 63 are in rolling connection with the double-layer lower rail groove 5, one end of each roller shaft 63 is fixedly provided with an extending limiting shaft 64 coaxially arranged, and one end of each extending limiting shaft 64 extends into the strip-shaped groove 42.

With this arrangement, when the driving frame 41 rotates at a fixed frequency, the extending limiting shaft 64 is pushed by the bar-shaped groove 42, so that the sliding block 61 is pulled, so that the sliding block 61 moves along the double-layer lower rail groove 5 and the upper rail groove 51, when moving to the upper side of the electroplating sink groove 13, the height of the double-layer lower rail groove 5 and the upper rail groove 51 at the position is obviously lowered, at this time, the parts can be immersed in the electroplating solution for electroplating, and then, when the sliding block 61 continues to be pulled and moved, the parts are separated from the electroplating sink groove 13 and move to the upper side of the C-shaped slope end 12.

As a further scheme of the invention, a folded ball rod 671 is fixedly connected to the outer wall of one side of each frame box 67, and a plurality of inclined plane supporting blocks 52 distributed equidistantly are fixedly connected to the side wall of one end bottom of the double-layer lower rail groove 5; through the above structure, when the hanger assembly 6 moves to the position where the inclined plane supporting block 52 is mounted on the double-layer lower rail groove 5, each time the sliding block 61 passes through one inclined plane supporting block 52, the inclined plane supporting block 52 will collide with the frame box 67 through the folded ball rod 671, thereby finally causing the clamping plate 66 to vibrate and further promoting shaking off the plating solution attached to the surface of the component.

As a further scheme of the invention, the inner side wall of the bottom end of each bar-shaped groove 42 is fixedly connected with symmetrically distributed trapezoidal sheets 43; with this arrangement, when the hanger assembly 6 is moved to the plating bath 13 position, the height of the extension limiting shaft 64 is lowered and contacts the trapezoidal piece 43, and the bar-shaped groove 42 can stably pull the extension limiting shaft 64; when the hanger assembly 6 continues to move along the double-layer lower rail groove 5 and the upper rail groove 51 and the height is increased, the extension limiting shaft 64 is separated from the trapezoid sheet 43, and at this time, as shown in fig. 10, the inner diameter of the bar groove 42 is larger than the diameter of the extension limiting shaft 64, and when the bar groove 42 pushes the extension limiting shaft 64 and stops at fixed frequency, the extension limiting shaft 64 continues to move due to inertia and collides with the other side of the bar groove 42, and the process can also cause the shaking of the clamping plate 66, thereby further promoting the recovery of the electroplating solution.

As a further scheme of the invention, a plurality of pairs of inner support rods 32 are fixedly connected between the outer peripheral wall of the upright post 3 and the inner side walls of the double-layer lower rail groove 5 and the upper rail groove 51, a plurality of outer support rods 33 are fixedly arranged between the outer peripheral wall of the annular electroplating pool 11 and the outer side wall of the double-layer lower rail groove 5, and a plurality of stiffening ribs 31 are fixedly connected between the outer peripheral wall of the upright post 3 close to the bottom end and the base 1; the double-layer lower rail groove 5 and the upper rail groove 51 can be connected and fixed by the aid of the plurality of pairs of inner supporting rods 32 and the plurality of pairs of outer supporting rods 33; meanwhile, the plurality of stiffening ribs 31 are used, so that the structural stability of the upright post 3 is improved.

Further, a PLC controller 22 is fixedly installed on the top of the mounting plate 21, and the PLC controller 22 is electrically connected with a stepper motor 23; the PLC 22 can control the stepping motor 23 to start at fixed frequency, so that the smooth electroplating operation is ensured, and the starting interval time of the stepping motor 23 can be reasonably designed according to the electroplating time of parts.

The specific working method is as follows: when in use, electroplating solution is put into the electroplating sinking tank 13, and on one side of the device, a part to be electroplated is fixed on the clamping plate 66 by personnel, and the stepping motor 23 can be controlled to be started at fixed frequency by the aid of the PLC 22; the worm 24 is driven to rotate by a fixed frequency through the stepping motor 23, so that the worm wheel sleeve 4 rotates by a fixed angle at fixed frequency, meanwhile, the driving frame 41 and the worm wheel sleeve 4 synchronously rotate, the driving frame 42 is utilized to push the hanging tool assembly 6, specifically, when the driving frame 41 rotates by fixed frequency, the extending limiting shaft 64 can be pushed through the driving frame 42, so that the sliding block 61 is pulled, the sliding block 61 moves along the double-layer lower rail groove 5 and the upper rail groove 51, when the sliding block moves to the upper side of the electroplating sinking groove 13, the height of the double-layer lower rail groove 5 and the upper rail groove 51 at the position is obviously reduced, at the moment, parts can be immersed into electroplating liquid for electroplating, and then, when the sliding block 61 continues to be pulled to move, the parts are separated from the electroplating sinking groove 13 and move to the upper side of the C-shaped slope surface end 12;

when the electroplating of the parts is completed, the redundant electroplating liquid can drop on the C-shaped slope surface end 12 right below, meanwhile, as the surface of the C-shaped slope surface end 12 is of an inclined structure, the contained electroplating liquid flows back into the electroplating sedimentation tank 13 again, thereby realizing recycling of the electroplating liquid, and meanwhile, the pollution of the dropped electroplating liquid to a production site is avoided;

when the hanger assembly 6 moves to the plating bath 13 position, the height of the extension limiting shaft 64 is lowered and contacts the trapezoid sheet 43, and the bar-shaped groove 42 stably pulls the extension limiting shaft 64; when the hanger assembly 6 continues to move along the double-layer lower rail groove 5 and the upper rail groove 51 and the height is increased, the extension limiting shaft 64 is separated from the trapezoid sheet 43, and at this time, as shown in fig. 10, the inner diameter of the bar-shaped groove 42 is larger than the diameter of the extension limiting shaft 64, and when the bar-shaped groove 42 pushes the extension limiting shaft 64 and stops at fixed frequency, the extension limiting shaft 64 continues to move due to inertia and collides with the other side of the bar-shaped groove 42, and the process also causes shaking of the clamping plate 66, thereby further promoting recovery of the electroplating solution;

when the hanger assembly 6 moves to the position where the inclined plane supporting block 52 is arranged on the double-layer lower rail groove 5, each time the sliding block 61 passes through one inclined plane supporting block 52, the inclined plane supporting block 52 can collide with the frame box 67 through the folded ball rod 671; when the frame box 67 receives an external force, the frame box 67 and the extension plate 654 generate relative motion in the vertical direction, and as the diamond blocks 652 and the extension plate 654 are fixedly connected, the frame box 67 and the diamond blocks 652 generate relative motion, and under the action of the abutting wheels 673, the frame box 67 generates horizontal motion relative to the diamond blocks 652; meanwhile, under the action of the first vibration spring 651 and the return spring 653, the frame box 67 and the connecting plate 68 reciprocate in the vertical and horizontal directions, at this time, the connecting clamping blocks 69 connected through the second vibration spring 691 generate irregular vibration, so that the electroplating liquid on the surface of the electroplated part is shaken off, and the electroplating liquid is efficiently recovered.

The previous description is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The utility model provides a recoverable electroplating device of plating solution, includes base (1), fixed mounting has annular electroplating cell (11) on base (1), the position department that is close to annular electroplating cell (11) on base (1) is fixed with main strut (2), its characterized in that: also comprises;

the C-shaped slope surface end (12), the C-shaped slope surface end (12) is fixedly arranged in the annular electroplating pool (11), and an electroplating sink (13) is formed between one end of the C-shaped slope surface end (12) and the annular electroplating pool (11);

the double-layer lower rail groove (5) and the upper rail groove (51) are arranged above the annular electroplating pool (11), a plurality of hanger components (6) are movably arranged on the double-layer lower rail groove (5) and the upper rail groove (51) together, and one end, close to the electroplating sinking groove (13), of the double-layer lower rail groove (5) and the upper rail groove (51) is lower than the other end;

the upright post (3) is coaxially arranged with the annular electroplating pool (11), the bottom end of the upright post (3) is fixedly connected with the surface of the base (1), and the top end of the upright post (3) is fixedly connected with the main support (2);

the pushing assembly comprises a worm wheel sleeve (4) rotatably mounted on a stand column (3), a mounting plate (21) is fixed on one side of the top end of a main support frame (2), a stepping motor (23) is fixedly mounted on the bottom side wall of the mounting plate (21), an output shaft of the stepping motor (23) is connected with a worm (24) meshed with the worm wheel sleeve (4) through a coupling, the other end of the worm (24) is rotatably connected with the mounting plate (21), a plurality of driving frames (41) distributed at equal distances are fixedly connected to the circumferential outer wall of the worm wheel sleeve (4), and strip-shaped grooves (42) are formed in the end portions of the driving frames (41).

2. The electroplating apparatus capable of recycling electroplating solution according to claim 1, wherein: every hanger subassembly (6) all includes slider (61), and slider (61) slidable mounting is in between double-deck lower rail groove (5) and upper rail groove (51), the top of slider (61) all fixed mounting have with upper rail groove (51) sliding fit's upper bracket piece (62), and the bottom of slider (61) all fixed mounting have with double-deck lower rail groove (5) lateral wall sliding fit's bottom board (65).

3. The electroplating apparatus of claim 2, wherein the electroplating solution is recyclable, and further comprising: the bottom of bed plate (65) is equal fixedly connected with extension board (654), the bottom of extension board (654) is provided with box (67), has seted up movable mouth on box (67), the thickness phase-match of movable mouth and extension board (654), the width of movable mouth is greater than the width of extension board (654), the bottom fixed mounting of extension board (654) has diamond (652), fixedly connected with reset spring (653) between diamond (652) bottom and box (67) in bottom, fixedly connected with vibration spring (651) between extension board (654) and box (67) top.

4. A plating apparatus according to claim 3, wherein said plating solution is recycled, and wherein: the two-side inner walls of the frame box (67) are fixedly provided with end rods (672), the end parts of the end rods (672) are rotatably provided with supporting wheels (673), the supporting wheels (673) are contacted with the inclined planes on the two sides of the diamond-shaped blocks (652), the bottom of the frame box (67) is fixedly provided with a connecting plate (68), the bottom of the connecting plate (68) is fixedly provided with a pair of vibration springs II (691), and a pair of connecting clamping blocks (69) are fixedly arranged at the end parts of each pair of vibration springs II (691).

5. The electroplating apparatus according to claim 4, wherein the electroplating solution is recycled, and further comprising: and each pair of connecting clamping blocks (69) is fixedly clamped with an extending frame plate (661), the bottom of the extending frame plate (661) is fixedly provided with a clamping plate (66), and the clamping plate (66) is used for clamping and fixing parts to be processed.

6. The electroplating apparatus according to claim 5, wherein the electroplating solution is recyclable, comprising: every roller shaft (63) is installed in the rotation on slider (61), and roller shaft (63) and double-deck rail groove (5) roll connection, every roller shaft (63)'s one end all is fixed with the spacing axle (64) that extends of coaxial setting, and extends in spacing axle (64) one end extends to bar groove (42).

7. A plating apparatus according to claim 3, wherein said plating solution is recycled, and wherein: the outer wall of one side of each frame box (67) is fixedly connected with a folded ball rod (671), and a plurality of inclined plane supporting blocks (52) which are distributed at equal intervals are fixedly connected to the side wall of one end of the double-layer lower rail groove (5).

8. The electroplating apparatus capable of recycling electroplating solution according to claim 1, wherein: and trapezoid sheets (43) which are symmetrically distributed are fixedly connected to the inner side wall of the bottom end of each strip-shaped groove (42).

9. The electroplating apparatus capable of recycling electroplating solution according to claim 1, wherein: a plurality of pairs of inner support rods (32) are fixedly connected between the outer peripheral wall of the upright post (3) and the inner side walls of the double-layer lower rail groove (5) and the upper rail groove (51), a plurality of outer support rods (33) are fixedly installed between the outer peripheral wall of the annular electroplating pool (11) and the outer side walls of the double-layer lower rail groove (5), and a plurality of stiffening ribs (31) are fixedly connected between the outer peripheral wall, close to the bottom end, of the upright post (3) and the base (1).

10. The electroplating apparatus capable of recycling electroplating solution according to claim 1, wherein: the top of mounting panel (21) fixed mounting has PLC controller (22), and PLC controller (22) and step motor (23) electric connection.