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CN116032238A - Interdigital transducer and honeycomb structure surface acoustic wave filter - Google Patents

Interdigital transducer and honeycomb structure surface acoustic wave filter Download PDF

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CN116032238A
CN116032238A CN202310104822.3A CN202310104822A CN116032238A CN 116032238 A CN116032238 A CN 116032238A CN 202310104822 A CN202310104822 A CN 202310104822A CN 116032238 A CN116032238 A CN 116032238A
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bus bar
resonator unit
series
acoustic wave
surface acoustic
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安虹瑾
安建光
许夏茜
董元旦
杨涛
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Chengdu Pinnacle Microwave Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
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Abstract

本发明涉及声表面波滤波器技术领域,尤其涉及一种叉指换能器及蜂窝状结构声表面波滤波器;所述叉指换能器包括第一汇流条、第二汇流条、反射栅以及设置在第一汇流条和第二汇流条之间的叉指电极;通过第一汇流条、第二汇流条以及反射栅将第一叉指电极和第二叉指电极合围在内,形成正六边形结构的叉指换能器。使得可以在六边形的任意一条边上的汇流条上做电流连接,从而减少了金属绕线结构,有利于缩小声表面波版图的面积,降低产品成本。并且由于叉指换能器为正六边形,因此将会形成一个相对主要部分的夹角,可以反射声波,减少汇流条漏波,提高声表面波滤波器的性能指标。

Figure 202310104822

The present invention relates to the technical field of surface acoustic wave filters, in particular to an interdigital transducer and a honeycomb structure surface acoustic wave filter; the interdigital transducer includes a first bus bar, a second bus bar, and a reflection grid And the interdigitated electrodes arranged between the first bus bar and the second bus bar; the first interdigitated electrodes and the second interdigitated electrodes are surrounded by the first bus bar, the second bus bar and the reflective grid to form a positive six Interdigital transducer with polygonal structure. The current connection can be made on the bus bar on any side of the hexagon, thereby reducing the metal winding structure, which is beneficial to reducing the area of the surface acoustic wave layout and reducing the product cost. And because the interdigital transducer is a regular hexagon, it will form an included angle relative to the main part, which can reflect sound waves, reduce bus bar leakage waves, and improve the performance index of the surface acoustic wave filter.

Figure 202310104822

Description

一种叉指换能器及蜂窝状结构声表面波滤波器An interdigital transducer and a honeycomb structure surface acoustic wave filter

技术领域technical field

本发明涉及声表面波滤波器技术领域,尤其涉及一种叉指换能器及蜂窝状结构声表面波滤波器。The invention relates to the technical field of surface acoustic wave filters, in particular to an interdigital transducer and a honeycomb structure surface acoustic wave filter.

背景技术Background technique

随着通信技术的不断发展,移动通讯设备对器件小型化的需求越来越迫切,尤其在声表面波滤波器方面;声表面波滤波器的使用场景多为终端设备;为了减小声表面波滤波器的体积,减小声表面波滤波器的平面面积就至关重要,而如何保证功率容量和电气性能的情况下,做到声表面波滤波器的平面面积最小,一直是重要的研究方向。With the continuous development of communication technology, the demand for miniaturization of devices in mobile communication equipment is becoming more and more urgent, especially in the aspect of SAW filters; SAW filters are mostly used in terminal equipment; in order to reduce SAW The volume of the filter, reducing the plane area of the surface acoustic wave filter is very important, and how to ensure the power capacity and electrical performance, to minimize the plane area of the surface acoustic wave filter has always been an important research direction .

声表面波滤波器是通过压电材料逆压电效应,使叉指换能器(IDT:Interdigitaltransducer)上的电信号转化成机械能,在叉指换能器的另一面利用压电效应,将机械能转换为电信号,从而实现选频;常规声表面波滤波器的叉指换能器一般由矩形结构构成(参见图1),由于结构限制,在布局上有很多特殊限制,造成电路面积过大;如果减小叉指换能器的面积,又会来带功率耐受程度降低,电气性能下降等问题。The surface acoustic wave filter converts the electrical signal on the interdigital transducer (IDT: Interdigitaltransducer) into mechanical energy through the inverse piezoelectric effect of the piezoelectric material, and uses the piezoelectric effect on the other side of the interdigital transducer to convert the mechanical energy It is converted into an electrical signal to achieve frequency selection; the interdigital transducer of a conventional surface acoustic wave filter is generally composed of a rectangular structure (see Figure 1). Due to structural limitations, there are many special restrictions on the layout, resulting in an excessively large circuit area ; If the area of the interdigital transducer is reduced, problems such as reduced power tolerance and reduced electrical performance will occur.

发明内容Contents of the invention

为解决上述现有技术问题,本发明提供了一种叉指换能器及蜂窝状结构声表面波滤波器,至少实现不影响功率耐受程度以及电气性能的前提下,减小电路面积。In order to solve the above-mentioned problems in the prior art, the present invention provides an interdigital transducer and a surface acoustic wave filter with a honeycomb structure, which can at least reduce the circuit area without affecting the power tolerance and electrical performance.

一种叉指换能器,包括:An interdigital transducer comprising:

压电基板;Piezoelectric substrate;

两个反射栅;Two reflective grids;

在压电基板上相对间隔设置的第一汇流条和第二汇流条;a first bus bar and a second bus bar arranged at intervals on the piezoelectric substrate;

第一汇流条和第二汇流条之间交替设置有多个第一叉指电极和多个第二叉指电极;A plurality of first interdigitated electrodes and a plurality of second interdigitated electrodes are alternately arranged between the first bus bar and the second bus bar;

所述第一叉指电极自第一汇流条引出,并向第二汇流条延伸,且第一叉指电极的延伸端与第二汇流条保留间隙;The first interdigitated electrode is led out from the first bus bar and extends toward the second bus bar, and the extension end of the first interdigitated electrode leaves a gap with the second bus bar;

所述第二叉指电极自第二汇流条引出,并向第一汇流条延伸,且第二叉指电极的延伸端与第一汇流条保留间隙;The second interdigitated electrode is led out from the second bus bar and extends toward the first bus bar, and the extension end of the second interdigitated electrode has a gap with the first bus bar;

第一汇流条、第二汇流条以及反射栅将第一叉指电极和第二叉指电极合围在内,形成正n边形结构的叉指换能器,其中n≥6,且为2的整数倍。The first bus bar, the second bus bar and the reflective grid enclose the first interdigital electrode and the second interdigital electrode to form an interdigital transducer with a regular n-gon structure, where n≥6 and is 2 Integer multiples.

本发明通过设置正n边形结构的叉指换能器,且n≥6,为2的整数倍,使得可以在n边形的任意一条边上的汇流条上做电流连接,从而减少了金属绕线结构,有利于缩小声表面波版图的面积,降低产品成本。The present invention arranges the interdigital transducer with regular n-gon structure, and n≥6, which is an integer multiple of 2, so that current connection can be made on the bus bar on any side of the n-gon, thereby reducing the metal The wire-wound structure is conducive to reducing the area of the surface acoustic wave layout and reducing product costs.

并且由于叉指换能器为正n边形,因此将会形成一个相对主要部分的夹角,可以反射声波,减少汇流条漏波,提高声表面波滤波器的性能指标。And because the interdigital transducer is a regular n-gon, it will form an included angle relative to the main part, which can reflect sound waves, reduce bus bar leakage waves, and improve the performance index of the surface acoustic wave filter.

优选的,所述n等于6。即本发明优选采用正六边形结构的叉指换能器,可在任意一条边上的汇流条上做电流连接,减小金属绕线结构,有利于缩小声表面波版图的面积,降低产品成本;并且由于叉指换能器为正六边形,因此正六边形相邻边之间形成的夹角,可以反射声波,减少汇流条漏波,提高声表面波滤波器的性能指标。Preferably, said n is equal to 6. That is, the present invention preferably adopts an interdigital transducer with a regular hexagonal structure, which can be used for current connection on the bus bar on any side, reducing the metal winding structure, which is beneficial to reducing the area of the surface acoustic wave layout and reducing product costs. and because the interdigital transducer is a regular hexagon, the angle formed between adjacent sides of the regular hexagon can reflect sound waves, reduce bus bar leakage waves, and improve the performance index of the surface acoustic wave filter.

优选的,任意一个所述汇流条与一个反射栅连接,另一个汇流条与另外一个反射栅之间保留间隙.Preferably, any one of the bus bars is connected to a reflection grid, and a gap is reserved between another bus bar and another reflection grid.

优选的,两个所述汇流条分别连接一个所述反射栅。Preferably, the two bus bars are respectively connected to one of the reflective grids.

优选的,两个所述汇流条均与所述反射栅之间保留间隙。Preferably, there is a gap between the two bus bars and the reflective grid.

一种蜂窝状结构声表面波滤波器,包括:A surface acoustic wave filter with a honeycomb structure, comprising:

连接在所述声表面波滤波器的输入和输出端之间的串联谐振器组和并联谐振器组;a set of series resonators and a set of parallel resonators connected between the input and output of the SAW filter;

所述谐振器采用本发明所述的叉指换能器的结构。The resonator adopts the structure of the interdigital transducer described in the present invention.

优选的,所述串联谐振器组和所述并联谐振器组中的谐振器在基板上呈蜂窝状布置。Preferably, the resonators in the series resonator group and the parallel resonator group are arranged in a honeycomb shape on the substrate.

优选的,所述串联谐振器组包括依次串联的第一串联谐振器单元、第二串联谐振器单元、第三串联谐振器单元以及第四串联谐振器单元;Preferably, the series resonator group includes a first series resonator unit, a second series resonator unit, a third series resonator unit and a fourth series resonator unit connected in series in sequence;

所述并联谐振器单元包括:The parallel resonator unit includes:

输入端连接在第一串联谐振器单元和第二串联谐振器单元之间的第一并联谐振器单元,第一并联谐振器单元的输出端信号接地;The input end is connected to the first parallel resonator unit between the first series resonator unit and the second series resonator unit, and the output terminal signal of the first parallel resonator unit is grounded;

输入端连接在第二串联谐振器单元和第三串联谐振器单元之间的第二并联谐振器单元,第二并联谐振器单元的输出端信号接地;The input end is connected to the second parallel resonator unit between the second series resonator unit and the third series resonator unit, and the output terminal signal of the second parallel resonator unit is grounded;

输入端连接在第三串联谐振器单元和第四串联谐振器单元之间的第三并联谐振器单元,第三并联谐振器单元的输出端信号接地。The input terminal is connected to the third parallel resonator unit between the third series resonator unit and the fourth series resonator unit, and the signal output terminal of the third parallel resonator unit is grounded.

优选的,所述第一串联谐振器单元、第二串联谐振器单元以及第三串联谐振器单元均包括两个相互串联的谐振器。Preferably, each of the first series resonator unit, the second series resonator unit and the third series resonator unit includes two resonators connected in series.

优选的,所述第四串联谐振器单元包括一个谐振器。Preferably, the fourth series resonator unit includes one resonator.

优选的,所述第一并联谐振器单元和第三并联谐振器单元均包括一个谐振器。Preferably, each of the first parallel resonator unit and the third parallel resonator unit includes one resonator.

优选的,所述第二并联谐振器单元包括两个串联的谐振器。Preferably, the second parallel resonator unit includes two series resonators.

本发明的有益效果至少包括:The beneficial effects of the present invention at least include:

本发明通过设置正n边形结构的叉指换能器,且n≥6,为2的整数倍,使得可以在n边形的任意一条边上的汇流条上做电流连接,从而减少了金属绕线结构,有利于缩小声表面波版图的面积,降低产品成本。The present invention arranges the interdigital transducer with regular n-gon structure, and n≥6, which is an integer multiple of 2, so that current connection can be made on the bus bar on any side of the n-gon, thereby reducing the metal The wire-wound structure is conducive to reducing the area of the surface acoustic wave layout and reducing product costs.

并且由于叉指换能器为正n边形,因此将会形成一个相对主要部分的夹角,可以反射声波,减少汇流条漏波,提高声表面波滤波器的性能指标。And because the interdigital transducer is a regular n-gon, it will form an included angle relative to the main part, which can reflect sound waves, reduce bus bar leakage waves, and improve the performance index of the surface acoustic wave filter.

附图说明Description of drawings

图1为本发明所提供的现有叉指换能器的整体组成示意图。FIG. 1 is a schematic diagram of the overall composition of a conventional interdigital transducer provided by the present invention.

图2为本发明所提供的叉指换能器整体组成示意图。Fig. 2 is a schematic diagram of the overall composition of the interdigital transducer provided by the present invention.

图3为本发明所提供的声表面波滤波器的实施例电路结构示意图。Fig. 3 is a schematic diagram of the circuit structure of an embodiment of the surface acoustic wave filter provided by the present invention.

图4为本发明所提供的现有叉指换能器的版图布局示意图。FIG. 4 is a schematic layout diagram of a conventional IDT provided by the present invention.

图5为本发明所提供的叉指换能器的版图布局示意图。FIG. 5 is a schematic diagram of the layout of the interdigital transducer provided by the present invention.

图6为本发明所提供的叉指换能器的各种汇流条结构示意图。FIG. 6 is a schematic structural diagram of various bus bars of the interdigital transducer provided by the present invention.

图7为本发明所提供的性能测试对比图。Fig. 7 is a performance test comparison chart provided by the present invention.

附图标记:Reference signs:

1.第一汇流条;2.第二汇流条;3.叉指换能器;4.反射栅;5.夹角。1. First bus bar; 2. Second bus bar; 3. Interdigital transducer; 4. Reflective grating; 5. Angle.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

参见附图2所示,一种叉指换能器,其整体呈正六边形,包括:Referring to shown in accompanying drawing 2, a kind of interdigital transducer, its overall shape is a regular hexagon, comprising:

压电基板;Piezoelectric substrate;

在压电基板上相对间隔设置的第一汇流条1和第二汇流条2;A first bus bar 1 and a second bus bar 2 arranged at intervals on the piezoelectric substrate;

第一汇流条1和第二汇流条2之间交替设置有多个第一叉指电极和多个第二叉指电极;A plurality of first interdigitated electrodes and a plurality of second interdigitated electrodes are alternately arranged between the first bus bar 1 and the second bus bar 2;

所述第一叉指电极自第一汇流条1引出,并向第二汇流条2延伸,且第一叉指电极的延伸端与第二汇流条3保留间隙;The first interdigitated electrode is led out from the first bus bar 1 and extends toward the second bus bar 2, and a gap is reserved between the extension end of the first interdigitated electrode and the second bus bar 3;

所述第二叉指电极自第二汇流条2引出,并向第一汇流条1延伸,且第二叉指电极的延伸端与第一汇流条1保留间隙;The second interdigitated electrode is drawn from the second bus bar 2 and extends toward the first bus bar 1, and the extension end of the second interdigitated electrode has a gap with the first bus bar 1;

所述第一汇流条1和第二汇流条2分别连接有一个反射栅;The first bus bar 1 and the second bus bar 2 are respectively connected with a reflective grid;

第一汇流条1、第二汇流条2以及反射栅4将第一叉指电极和第二叉指电极合围在内,形成正六边形结构的叉指换能器3。The first bus bar 1 , the second bus bar 2 and the reflective grid 4 surround the first interdigital electrode and the second interdigital electrode to form an interdigital transducer 3 with a regular hexagonal structure.

参见附图2可知,由于叉指换能器3为六边形状,因此在六边形的夹角5处的叉指电极将会作出部分缩减,使得该部分夹角5能够反射声波,减少汇流条漏波,进而提高声表面波滤波器的性能指标。Referring to Figure 2, it can be seen that since the IDT 3 is in the shape of a hexagon, the interdigital electrodes at the angle 5 of the hexagon will be partially reduced, so that the angle 5 of this part can reflect sound waves and reduce confluence Leaky waves, thereby improving the performance index of the surface acoustic wave filter.

参见附图3和附图5所示,一种蜂窝状结构声表面波滤波器,包括:Referring to accompanying drawing 3 and shown in accompanying drawing 5, a kind of surface acoustic wave filter of honeycomb structure comprises:

连接在所述声表面波滤波器的输入和输出端之间的串联谐振器组和并联谐振器组;a set of series resonators and a set of parallel resonators connected between the input and output of the SAW filter;

所述谐振器采用本实施例所述的叉指换能器3的结构。The resonator adopts the structure of the interdigital transducer 3 described in this embodiment.

作为本实施例中进一步的实施方式,所述串联谐振器组和所述并联谐振器组中的谐振器在基板上呈蜂窝状布置。As a further implementation manner in this embodiment, the resonators in the series resonator group and the parallel resonator group are arranged in a honeycomb shape on the substrate.

作为本实施例中的一种可能的实施方式,所述串联谐振器组包括依次串联的第一串联谐振器单元、第二串联谐振器单元、第三串联谐振器单元以及第四串联谐振器单元;As a possible implementation manner in this embodiment, the series resonator group includes a first series resonator unit, a second series resonator unit, a third series resonator unit and a fourth series resonator unit connected in series in sequence ;

所述并联谐振器单元包括:The parallel resonator unit includes:

输入端连接在第一串联谐振器单元和第二串联谐振器单元之间的第一并联谐振器单元,第一并联谐振器单元的输出端信号接地;The input end is connected to the first parallel resonator unit between the first series resonator unit and the second series resonator unit, and the output terminal signal of the first parallel resonator unit is grounded;

输入端连接在第二串联谐振器单元和第三串联谐振器单元之间的第二并联谐振器单元,第二并联谐振器单元的输出端信号接地;The input end is connected to the second parallel resonator unit between the second series resonator unit and the third series resonator unit, and the output terminal signal of the second parallel resonator unit is grounded;

输入端连接在第三串联谐振器单元和第四串联谐振器单元之间的第三并联谐振器单元,第三并联谐振器单元的输出端信号接地。The input terminal is connected to the third parallel resonator unit between the third series resonator unit and the fourth series resonator unit, and the signal output terminal of the third parallel resonator unit is grounded.

具体的,参见附图3所示,所述第一串联谐振器单元包括两个相互串联的谐振器S1;Specifically, as shown in FIG. 3, the first series resonator unit includes two resonators S1 connected in series;

第二串联谐振器单元包括两个相互串联的谐振器S2;The second series resonator unit comprises two resonators S2 connected in series with each other;

第三串联谐振器单元包括两个相互串联的谐振器S3;The third series resonator unit comprises two resonators S3 connected in series with each other;

第四串联谐振器单元包括一个谐振器S4;The fourth series resonator unit includes a resonator S4;

从声表面波滤波器的输入端到输出端依次串联第一谐振器单元、第二谐振器单元、第三谐振器单元以及第四谐振器单元。The first resonator unit, the second resonator unit, the third resonator unit and the fourth resonator unit are connected in series from the input end to the output end of the surface acoustic wave filter.

所述第一并联谐振器单元包括一个谐振器P1;The first parallel resonator unit includes a resonator P1;

所述第二并联谐振器单元包括两个相互串联的谐振器P2;The second parallel resonator unit includes two resonators P2 connected in series;

所述第三并联谐振器单元包括一个谐振器P3。The third parallel resonator unit includes a resonator P3.

作为本实施例中一种可能的实施方式,图6为本发明所提供的叉指换能器的各种汇流条结构示意图,图6a中的叉指换能器,其整体呈正六边形,其中谐振器两端的反射栅呈三角形结构,谐振器本身呈八边形。第一汇流条1和第二汇流条2之间交替设置有多个第一叉指电极和多个第二叉指电极,且两个汇流条与反射栅之间均存在间隙。As a possible implementation in this embodiment, Fig. 6 is a schematic structural diagram of various bus bars of the interdigital transducer provided by the present invention. The interdigital transducer in Fig. 6a is in the shape of a regular hexagon as a whole. The reflective grids at both ends of the resonator have a triangular structure, and the resonator itself has an octagonal shape. A plurality of first interdigitated electrodes and a plurality of second interdigitated electrodes are arranged alternately between the first bus bar 1 and the second bus bar 2 , and there is a gap between the two bus bars and the reflective grid.

作为本实施例中一种可能的实施方式,图6b中的叉指换能器,其整体呈正六边形,其中谐振器两端的反射栅呈三角形结构,谐振器本身呈八边形。第一汇流条1与左边的反射栅相连,第二汇流条2与右边的反射栅相连。As a possible implementation in this embodiment, the interdigital transducer in FIG. 6 b is in the shape of a regular hexagon as a whole, wherein the reflective grids at both ends of the resonator are in a triangular structure, and the resonator itself is in an octagonal shape. The first bus bar 1 is connected to the reflection grid on the left, and the second bus bar 2 is connected to the reflection grid on the right.

作为本实施例中一种可能的实施方式,图6c中的叉指换能器,其整体呈正六边形,其中谐振器两端的反射栅呈三角形结构,谐振器本身呈八边形。第一汇流条1与两端反射栅都存在间隙,并未相连。第二汇流条2与右边的反射栅相连,左端的反射栅并未与任何汇流条相连。As a possible implementation in this embodiment, the interdigital transducer in FIG. 6 c is in the shape of a regular hexagon as a whole, wherein the reflective grids at both ends of the resonator are in a triangular structure, and the resonator itself is in an octagonal shape. There are gaps between the first bus bar 1 and the reflective grids at both ends, and they are not connected. The second bus bar 2 is connected to the reflection grid on the right, and the reflection grid at the left end is not connected to any bus bar.

作为本实施例中的一种可能的实施方式,图6d中的叉指换能器,其整体呈正六边形,其中谐振器两端的反射栅呈三角形结构,谐振器本身呈八边形。第一汇流条1与两端反射栅都存在间隙,并未相连。第二汇流条2与左边的反射栅相连,右端的反射栅并未与任何汇流条相连。As a possible implementation in this embodiment, the interdigital transducer in Fig. 6d is in the shape of a regular hexagon as a whole, wherein the reflective grids at both ends of the resonator are in a triangular structure, and the resonator itself is in an octagonal shape. There are gaps between the first bus bar 1 and the reflective grids at both ends, and they are not connected. The second bus bar 2 is connected to the reflective grid on the left, and the reflective grid at the right end is not connected to any bus bar.

为了进一步的证明本发明的所取得的有益效果,下面通过对现有声表面波滤波器和本发明所提出的声表面波滤波器进行测试;In order to further prove the beneficial effects obtained by the present invention, the existing surface acoustic wave filter and the surface acoustic wave filter proposed by the present invention are tested below;

参见附图1所示为现有声表面波滤波器的结构示意图,其也包括:Referring to accompanying drawing 1 shown is the structural representation of existing surface acoustic wave filter, and it also comprises:

在压电基板上相对间隔设置的第一汇流条1和第二汇流条2;A first bus bar 1 and a second bus bar 2 arranged at intervals on the piezoelectric substrate;

反射栅4;reflective grid 4;

第一汇流1和第二汇流条2之间设置多个叉指电极,相邻的两个叉指电极分别自第一汇流条1和第二汇流条2上引出;A plurality of interdigitated electrodes are arranged between the first bus bar 1 and the second bus bar 2, and two adjacent interdigitated electrodes are led out from the first bus bar 1 and the second bus bar 2 respectively;

第一汇流条1上引出的叉指电极向第二汇流条2延伸,延伸端与第二汇流条2保留间隙;The interdigitated electrodes drawn from the first bus bar 1 extend toward the second bus bar 2, and a gap is reserved between the extension end and the second bus bar 2;

第二汇流条2上引出的叉指电极向第一汇流条1延伸,延伸端与第一汇流条1保留间隙。The interdigitated electrodes drawn from the second bus bar 2 extend toward the first bus bar 1 , and a gap is left between the extension end and the first bus bar 1 .

再参见附3和附图4,附图4为采用现有叉指换能器3进行版图排布的声表面波滤波器结构;图3为对应的电路连接示意图。Referring again to appendix 3 and accompanying drawing 4, accompanying drawing 4 is a surface acoustic wave filter structure using an existing interdigital transducer 3 for layout arrangement; FIG. 3 is a schematic diagram of the corresponding circuit connection.

参见附图7所示,S(16,17)为采用现有叉指换能器3进行版图排布的声表面波滤波器的测试结果;S(24,25)为本发明的正六边形蜂窝状叉指换能器构成的声表面波滤波器的测试结果;基于此可知通带性能基本不变;并且本发明的通过六边形状的叉指换能器进行蜂窝状的排布,减小了叉指换能器之间的连接绕线,大大提高了叉指换能器在版图上放置的灵活性。Referring to Figure 7, S(16,17) is the test result of the surface acoustic wave filter using the existing interdigital transducer 3 for layout arrangement; S(24,25) is the regular hexagon of the present invention The test result of the surface acoustic wave filter that honeycomb interdigital transducer constitutes; Based on this, it can be known that the passband performance is basically unchanged; The connecting wires between the interdigital transducers are reduced, and the flexibility of placement of the interdigital transducers on the layout is greatly improved.

综上可知,本发明实现了不影响功率耐受程度以及电气性能的前提下,减小电路面积;并且大大提高了叉指换能器在版图上放置的灵活性。It can be seen from the above that the present invention reduces the circuit area without affecting the power tolerance and electrical performance; and greatly improves the flexibility of placing the IDT on the layout.

在本发明的实施例的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“坚直”、“水平”、“中心”、“顶”、“底”、“顶部”、“底部”、“内”、“外”、“内侧”、“外侧”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了使于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。其中,“里侧”是指内部或围起来的区域或空间。“外围”是指某特定部件或特定区域的周围的区域。In describing the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "straight", "horizontal", " Orientations or positional relationships indicated by "center", "top", "bottom", "top", "bottom", "inner", "outer", "inner", "outer", etc. are based on the orientation or position shown in the drawings The positional relationship is only for the purpose of describing the present invention and simplifying the description, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Wherein, "inside" refers to an internal or enclosed area or space. "Periphery" refers to the area around a particular component or a particular area.

在本发明的实施例的描述中,术语“第一”、“第二”、“第三”、“第四”仅用以描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”、“第三”、“第四”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。In the description of the embodiments of the present invention, the terms "first", "second", "third", and "fourth" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implying The number of technical characteristics indicated. Thus, a feature defined as "first", "second", "third" and "fourth" may expressly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

在本发明的实施例的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“组装”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the embodiments of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", "connection", and "assembly" should be understood in a broad sense, for example, it may be fixed The connection can also be a detachable connection or an integral connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

在本发明的实施例的描述中,具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of the embodiments of the present invention, specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in an appropriate manner.

在本发明的实施例的描述中,需要理解的是,“-”和“~”表示的是两个数值之同的范围,并且该范围包括端点。例如:“A-B”表示大于或等于A,且小于或等于B的范围。“A~B''表示大于或等于A,且小于或等于B的范围。In the description of the embodiments of the present invention, it should be understood that "-" and "~" represent the same range of two numerical values, and the range includes the endpoint. For example: "A-B" means greater than or equal to A, and less than or equal to the range of B. "A~B'' indicates the range greater than or equal to A and less than or equal to B.

在本发明的实施例的描述中,本文中术语“和/或”,仅仅是一种描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B这三种情况。另外,本文中字符“/”,一般表示前后关联对象是一种“或”的关系。In the description of the embodiments of the present invention, the term "and/or" herein is only an association relationship describing associated objects, which means that there may be three relationships, for example, A and/or B, which can mean: exist alone A, A and B exist at the same time, and B exists alone. In addition, the character "/" in this article generally indicates that the contextual objects are an "or" relationship.

尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.

Claims (10)

1. An interdigital transducer comprising:
a piezoelectric substrate;
two reflective gratings;
a first bus bar and a second bus bar arranged on the piezoelectric substrate at an opposite interval;
a plurality of first interdigital electrodes and a plurality of second interdigital electrodes are alternately arranged between the first bus bar and the second bus bar;
the first interdigital electrode is led out from the first bus bar and extends towards the second bus bar, and a gap is reserved between the extending end of the first interdigital electrode and the second bus bar;
the second interdigital electrode is led out from the second bus bar and extends towards the first bus bar, and a gap is reserved between the extending end of the second interdigital electrode and the first bus bar;
the first bus bar, the second bus bar and the reflecting grating encircle the first interdigital electrode and the second interdigital electrode to form an interdigital transducer with a positive n-shaped structure, wherein n is more than or equal to 6 and is an integer multiple of 2.
2. An interdigital transducer according to claim 1, wherein n is equal to 6.
3. An interdigital transducer according to claim 1, wherein any one of the bus bars is connected to one of the reflective gratings, and a gap is left between the other bus bar and the other reflective grating.
4. An interdigital transducer according to claim 1, wherein two of the bus bars are each connected to one of the reflective gratings.
5. An interdigital transducer according to claim 1, wherein a gap is maintained between both of the bus bars and the reflective grating.
6. A surface acoustic wave filter of a honeycomb structure, comprising:
a series resonator group and a parallel resonator group connected between input and output ends of the surface acoustic wave filter;
the resonator adopts the structure of the interdigital transducer as claimed in any one of claims 1 to 5.
7. The surface acoustic wave filter of a honeycomb structure according to claim 6, wherein the resonators in the series resonator group and the parallel resonator group are arranged in a honeycomb shape on the substrate.
8. The surface acoustic wave filter of claim 7, wherein the series resonator group includes a first series resonator unit, a second series resonator unit, a third series resonator unit, and a fourth series resonator unit, which are sequentially connected in series.
9. The surface acoustic wave filter of a honeycomb structure according to claim 6, wherein the parallel resonator group comprises:
the input end of the first parallel resonator unit is connected between the first series resonator unit and the second series resonator unit, and the output end of the first parallel resonator unit is grounded;
the input end of the second parallel resonator unit is connected between the second series resonator unit and the third series resonator unit, and the output end of the second parallel resonator unit is grounded;
and a third parallel resonator unit having an input terminal connected between the third series resonator unit and the fourth series resonator unit, and an output terminal of the third parallel resonator unit being signal-grounded.
10. The surface acoustic wave filter of a honeycomb structure according to claim 9, wherein the first series resonator unit, the second series resonator unit, and the third series resonator unit each include two resonators connected in series with each other;
the fourth series resonator unit includes one resonator;
the first parallel resonator unit and the third parallel resonator unit each include one resonator;
the second parallel resonator unit includes two resonators connected in series.
CN202310104822.3A 2023-02-13 2023-02-13 Interdigital transducer and honeycomb structure surface acoustic wave filter Pending CN116032238A (en)

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