CN1160174C - Internal active axial-shift compensating method and device for rotary main-shaft cutter - Google Patents
Internal active axial-shift compensating method and device for rotary main-shaft cutter Download PDFInfo
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- CN1160174C CN1160174C CNB011346477A CN01134647A CN1160174C CN 1160174 C CN1160174 C CN 1160174C CN B011346477 A CNB011346477 A CN B011346477A CN 01134647 A CN01134647 A CN 01134647A CN 1160174 C CN1160174 C CN 1160174C
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Abstract
The present invention relates to an internal active compensating method and for the axial deflection of a main-shaft cutter and a device of the method, which is applied to air flotation main shafts by utilizing active deflection controlling techniques. A sensor on the outer part of the main shaft is used for directly measuring the axial deflection of the cutter, and obtained measuring data is used as a feedback signal which is used for controlling and maintaining a cutting point of the cutter in preset axial positioning precision. The present invention achieves the active compensating function of dynamically and axially positioning the cutting point of the cutter by additionally arranging an electromagnetic control module on the tail end of a core shaft in the main shaft and fine tuning the axial position of the core shaft by non-contact type magnetic force.
Description
Technical field
The present invention relates to a kind of inside Active Compensation method and device of main axle cutter axial-shift, particularly a kind of being applicable on the air-floating main shaft device, directly measure cutter axial-shift amount as feedback signal by sensor, drive the compensate for displacement of cutter on axially by air-floating main shaft device inside, and then reach a kind of method and the device of Tool in Cutting point control in suitable axial location precision.
Background technology
Because when traditional hard brittle material cutting machine carried out the cutting of the crisp material workpiece of stiffened, for example wafer (Wafer), glass or ceramic material (Ceramic) etc. were easy to generate the damaged situation of incisor path crack and back of work.When inquiring into its origin cause of formation and be main shaft and cutting off processing procedure, cutting tool is because of the assembling accumulated error of main shaft axial-shift, cutter and clamp tool part, and the bulk deformation under rotating at a high speed, cause down cutter position, cutter path instability and cutting force quantitative changeization big, and cutting point cutter outer peripheral edges side is clashed into the incisor path edge because of axial-shift with high frequency, makes the workpiece that is cut produce brittle break.
The cutting tool that is produced when cutting off processing procedure for the main shaft that solves rotation at a high speed vibrates the beat problem, so a kind of air-flotation type main shaft device of locating than stabilize spindle that can provide under the high speed rotating environment is developed, the correlation technique of air-flotation type main shaft device can be with reference to please refer to U.S. Patent number US 5997223.Though this kind air-flotation type main shaft device can provide higher relatively main shaft stability when rotating at a high speed.Yet, even the stability of main shaft itself is high again, because cutting tool generally is straight through being about the discoid cutting tool about 50～100mm, it is in the broaching load process of at a high speed rotation (rotating speed can surpass 10000rpm even up to 60000rpm more than), outer peripheral edges at cutting tool itself still can produce up to the reciprocal beat phenomenon about 10～25 μ m, and this will cause the axial-shift bump of cutter with respect to work piece itself.So the traditional rotary main shaft device of this kind still can't be avoided in the axial-shift displacement of cutting tool outer rim generation with respect to main shaft, and the damaged situation of aforesaid incisor path crack and back of work still continues to take place.
Therefore, global wafer surpasses 60% day DISCO company of factory with hard brittle material cutting machine occupation rate of market, once develops two main shaft cutting machines (please refer to U.S. Pat 6102023) at this problem.Utilize ladder cutting or the two main shaft cutting modes of chamfering cutting to improve the cutting quality, its first main shaft cuts the action of shallow slot, purpose is in order to guide second main shaft to follow the fixing cutter position down and the cutter path processing of shallow slot, when reducing by second main shaft and cutting off processing procedure, incisor path edge crack and chip back surface breakage that cutting tool causes because of the main shaft axial-shift.Its shortcoming is that workpiece need be through twice cuttings processing procedure, and cutting equipment need dispose two groups of air-floating main shaft systems, and equipment cost is controlled all relative multiplication of degree of difficulty with system, is not good solution.
Other reference can be consulted U.S. Pat 4309925 and US6062778 in addition.These two patents all relate to " radial location (the RadialPosition) " technology and the device of " borer (Boring Tool) ", the cutting tool axial direction positioning device and the technology of itself and institute of the present invention demand have notable difference, and these two patents all are to carry out the main shaft radial location by the skew of sensing " main shaft " itself.
Summary of the invention
Main purpose of the present invention is to provide a kind of inside Active Compensation method and device of main axle cutter axial-shift, can use single group of axis system to carry out the cutting processing procedure one, but reduce the degree of incisor path crack and back of work breakage simultaneously, provide more traditional hard brittle material cutting machine better processing quality.
According to an aspect of the present invention, a kind of inside Active Compensation device of main axle cutter axial-shift is provided, this main shaft comprises that cutting tool, that an axle, is incorporated into a front end of axle is incorporated into axle and is supported in the main shaft body in the axle outside with the motor rotor and that drives its rotation, and this axle can be along the linear displacement by a small margin of axially carrying out with respect to body; This inside Active Compensation device comprises: a sensor, but the sensing cutter is with respect to the axial-shift displacement of body; One magnet assembly is installed on the terminal and rotation synchronous with it of axle; And, one electromagnetic assembly, be arranged at body interior corresponding to this magnet assembly locate and with magnet assembly at a distance of an appropriate gap, this electromagnetic assembly can a corresponding electric power input and produce magnetic force, and then can produce axial force and make axle carry out axial displacement by a small margin magnet assembly with respect to body.
According to another aspect of the present invention, provide a kind of inside Active Compensation device of main axle cutter axial-shift, comprising: a main shaft device comprises: an axle; One bite tool is incorporated on the end of axle; And a motor rotor, be incorporated into axle to drive the rotation of axle and cutting tool; And, one Active Compensation device is incorporated into main shaft device so that the bit shift compensation of cutting tool on axially to be provided, and this Active Compensation device comprises: a sensor, it is to keep an appropriate gap corresponding to this cutter and with cutter, but this cutter of sensing is with respect to the axial-shift displacement of sensor; Consistent dynamic model piece, but center roller provides an axial force, so that axle is carried out axial displacement by a small margin; And an Electromagnetic Control module, being connected in this actuating module, this Electromagnetic Control module can be accepted the axial-shift displacement that this sensor transmits and control actuating module according to this.
According to another aspect of the present invention, a kind of inside Active Compensation method of main axle cutter axial-shift, include the following step: (A) provide an Active Compensation device to be installed on the main shaft device, this main shaft device includes: an axle, one bite is signed an undertaking and is closed on the front end of axle, and one motor rotor be incorporated into axle to drive the rotation of axle and cutting tool, this Active Compensation device includes: but the axial-shift displacement of its this cutter of sensing of a sensor, but consistent dynamic model piece drive spindle carries out axial displacement by a small margin, and one the Electromagnetic Control module can accept the axial-shift displacement that this sensor transmits and control actuating module according to this; (B) detect the axial-shift displacement of this cutter and send this beat displacement to the Electromagnetic Control module by sensor; (C) calculate corresponding nose balance displacement by the Electromagnetic Control module according to this beat displacement; (D) come drive spindle to carry out the axial displacement of this compensate for displacement amount by Electromagnetic Control module controls actuating module.
Because the present invention need not change the contour structures of air-floating main shaft,, have more two lower advantages of main shaft diced system relative cost, and can reach better cutting quality except that significantly reducing the main axle structure complexity and making the difficulty.
Because the present invention directly measures the axial-shift amount at the nearly outer peripheral edges of cutting tool place by a noncontacting proximity sensor, and the axial-shift amount that measurement is obtained is as feedbacking signal to carry out the compensate for displacement control of main shaft, produce the influence of the axial-shift phenomenon that distortion caused in the time of can offsetting because of the cutter periphery because of the high speed rotary cutting, and then obtain better cutting quality.
Description of drawings
Figure 1A is inside Active Compensation device preferable of main axle cutter axial-shift of the present invention
The embodiment generalized section.
Figure 1B is the axle thrust bearing part enlarged drawing partly of Figure 1A.
Fig. 2 is the block schematic diagram of the inside Active Compensation device of main axle cutter axial-shift of the present invention.
Fig. 3 is inside Active Compensation method one preferable of main axle cutter axial-shift of the present invention
The embodiment flow chart.
Fig. 4 is another preferred embodiment flow chart of the inside Active Compensation method of main axle cutter axial-shift of the present invention.
Drawing reference numeral explanation: 10 main shaft devices; 11 axles; 111 locating rings; 112 gaps; 12 cutting tools; 13 thrust bearings; 14 motors; 15 bodies; 17 connecting supports, 18 valves; 19 control joints; 21 main control units; 22 power supplys; 23 operation-interfaces; 231 screens; 232 input units; 30 Active Compensation devices; 31 sensors; 32 magnet assemblies; 33 electromagnetic assemblies; 34 Electromagnetic Control modules; 341 electromagnetic actuators; 342 control unit; The 41-47 execution in step.
The specific embodiment
The inside Active Compensation method and the device of main axle cutter axial-shift of the present invention, mainly be to utilize initiatively beat control technology, be applied to air-floating main shaft inside, directly measure the axial-shift of cutter with the main shaft sensor external, the gained metrology data is as feedback signal, in order to the Tool in Cutting point control is remained on predetermined axial location precision, the present invention is by setting up an Electromagnetic Control module at the axle tail end of main shaft inside, finely tune the axial location of axle with contactless actuating module (that is electromagnetic force), reach the Active Compensation function that Tool in Cutting is put dynamic axial location.Below only with concrete device of the present invention, method, manner of execution and the attainable effect of describing in detail of a preferred embodiment.
Ask for an interview Figure 1A, Figure 1B and Fig. 2, be a preferred embodiment of the inside Active Compensation device of main axle cutter axial-shift of the present invention.Wherein, Figure 1A is the preferred embodiment generalized section for the inside Active Compensation device of main axle cutter axial-shift of the present invention.Figure 1B is the axle thrust bearing part enlarged drawing partly for Figure 1A.Fig. 2 is the block schematic diagram for the inside Active Compensation device of main axle cutter axial-shift of the present invention.
Shown in Figure 1A and Figure 1B, the inside Active Compensation device of main axle cutter axial-shift of the present invention mainly is to be constituted by main shaft device 10 and 30 liang of parts of Active Compensation device.In this preferred embodiment, this main shaft device 10 is to be an air-flotation type main shaft device, however the main shaft device 10 of its also may to be a fluid pressure type main shaft device or other be applicable to high speed rotation cutting of carrying out hard crisp material (for example silicon wafer, glass, pottery etc.).This main shaft device 10 can be assemblied on the cutting board (not shown) and can carry out cutwork.Because this described cutting board is conventional art and non-for demand feature of the present invention, thus below will repeat no more.
This main shaft device 10 has and comprises: thrust bearing 13 mechanisms, that an axle 11, is incorporated into cutting tool 12 on the front end of axle 11, be used to carry out the axial location of axle 11 be incorporated into axle 11 with the motor 14 (motor rotor), that drives its rotation be coated on axle 11 outsides with main shaft body 15 that structural rigidity is provided, be fixedly arranged on body 15 ends for a connecting support 17 that is bonded to cutting board (not shown) and some valves 18 and control joint 19.Because these thrust bearing 13 mechanisms are when the locating ring 111 of ccontaining axle 11, have the extremely end play 112 about tens of μ m of approximate number μ m, therefore this axle 11 is the linear displacements that can carry out on the axial direction with respect to (be about several μ m to about tens of μ m) by a small margin of body 15, and the present invention utilizes this gap 112 to carry out the required actuating travel of axial-shift compensation of cutter 12.
This inside Active Compensation device 30 includes: a sensor 31, a magnet assembly 32, an electromagnetic assembly 33 and an Electromagnetic Control module 34.
In present embodiment, this sensor 31 is to be a noncontacting proximity sensor, for example optical pickocff or condenser type, electromagnetic type or eddy current type sensor etc., it is to be incorporated into this body 15 1 front ends outside and is corresponding to a near outer peripheral edges position of these cutter 12 side surfaces and is and cutter 12 a suitable measurement gap apart, but these sensor 31 sensing cutters 12 are with respect to the axial-shift displacement of body 15 (that is with respect to sensor itself 31).
Be fixed with this magnet assembly 32 in axle 11 with respect to another end equipment of cutter 12.This magnet assembly 32 can be a permanent magnet (permanent magnet), because magnet assembly 32 is to be fixed into one with axle 11, and therefore can rotation synchronous with it.
This Electromagnetic Control module 34 is to be connected in this electromagnetic assembly 33, in this preferred embodiment, this Electromagnetic Control module 34 can be accepted the axial-shift displacement that this sensor 31 transmitted and control electric power input to electromagnetic assembly 33 according to this, and then to an amount of axial thrust or the pulling force of magnet assembly 32 generations, impel axle 11 to carry out the nose balance displacement of trace together with cutter 12, the cutting point that can guarantee cutter 12 remains on predefined paths and the position, significantly subdue cutter 11 axial-shifts the incisor path crack that may cause and the degree of back of work breakage, only need one group of main shaft to carry out cutting at one time and just can reach preferable cutting quality, the defective of the outer technology that overcomes fully.
As shown in Figure 2, in this preferred embodiment, this Electromagnetic Control module 34 more includes: an electromagnetic actuators 341 (Actuator) and is positioned at time control unit 342 (Sub-Controller) of main shaft outside, this electromagnetic actuators 341 is to be used for output power to give electromagnetic assembly 33 to produce magnetic force, this time control unit 342 is to be connected between sensor 31 and the electromagnetic actuators 341 and is to be positioned at the main shaft outside, can control the electric power output of electromagnetic actuators 341 according to the axial-shift displacement of 31 sensings of sensor.And, this main shaft device 10 more includes a main control unit 21, it is connected in power supply 22 and the rotation of motor 14 with control axle 11, this time control unit 342 is to be connected in main control unit 21, main control unit 21 can send the rotary speed data of axle 11 rotations to time control unit 342, detection frequency (the Detecting Frequency when making time control unit 342 decide sensor 31 sensing cutters according to the rotating speed data that is received; Or take by weighing the sample frequency).Simultaneously, main control unit 21 also can be shown in the rotating speed data of axle 11 rotations and the message data such as cutter axial-shift amount that sensor 31 sensed on one screen 231 through an operation-interface 23 with time control unit 342.Operating personnel also can control this main shaft device 10 or inner Active Compensation device 30 by an input unit 232.For example, in the operation process when supposing for axle 11 rotating speeds (that is cutter rotating speed) 15000rpm, but setting sensor 31 detects frequency to be consistent with axle 11 rotating speeds, that is sensor 31 is when detecting frequencies (sampling frequency) and being 250Hz, so, this sensor 31 can sense the axial-shift amount of this cutter 12 on same phase place.If it is the integral multiple of axle 11 rotating speeds that setting sensor 31 detects frequency, for example heighten is ten times when being 2.5kHz, can divide into ten phase places and take a sample on cutter 12, each one that can grasp cutter 11 really is positioned at the axial-shift situation when running up.Otherwise if set when making axle 11 rotating speeds detect frequency greater than sensor 31, the sensing quantity of sampling quantity that then can reduce the unit interval is to reduce time load of control unit 342.
Ask for an interview and read Fig. 3 and Fig. 4, several preferred embodiment flow charts of the inside Active Compensation method of main axle cutter axial-shift of the present invention.
In Fig. 3, the inside Active Compensation method of this main axle cutter axial-shift can include the following step:
Step 41: main shaft device 10 and Active Compensation device 30 as the aforementioned are provided, and after controlling the initializing set of parameter, entry into service.
Step 42: detect the rotating speed of cutters 12 (that is axle 11) by the main control unit 21 of main shaft device 10, and with the Electromagnetic Control module 34 of rotating speed data transmission to Active Compensation device 30.
Step 43: by the detection sampling frequency (Detecting Frequency) of Electromagnetic Control module 34 according to this cutter 12 rotating speed data decision sensor 31.
Step 44: detect the axial-shift displacement of this cutter 12 and send this beat displacement to Electromagnetic Control module 34 by sensor 31.
Step 45: calculate corresponding nose balance displacement according to this beat displacement by Electromagnetic Control module 34.
Step 46: the electromagnetic assembly 33 by Electromagnetic Control module 34 control actuating modules comes drive spindle 11 to carry out the axial displacement of this compensate for displacement amount.
Above-mentioned step 44 to step 46 will repeat, and accept one up to Electromagnetic Control module 34 and end just can stop behind the signal 47.Certainly, in another embodiment, the present invention also may be applicable to that cutter 12 rotating speeds are the states for dynamic change, and at this moment, this loop that repeats also can be selected to be adjusted into repeated execution of steps 42 to step 46, so that can the corresponding detection frequency that changes sensor 31.
See also Fig. 4, be another preferred embodiment of the inside Active Compensation method of main axle cutter axial-shift of the present invention.It mainly is between the step 44 and step 45 in flow chart shown in Figure 3, the also extra the following step that increases:
Step 44: sensor 31 detects the axial-shift amount of cutter 12.
Step 441: this a beat displacement and a predefined permissible range value are compared, when this beat displacement exceeds the permissible range value, Electromagnetic Control module 34 is meeting execution in step 45, if the beat displacement is when permissible range value interior, 34 of Electromagnetic Control modules wouldn't change the electric power output control to electromagnetic assembly 33, and get back to step 44.
Step 442: this a beat displacement and a predefined caution value range are compared, and when this beat displacement exceeded the caution value range, Electromagnetic Control module 34 can enter step 443 to send alerting and to enter next step.If the beat displacement be the caution value range interior the time, then do not send alerting and directly enter step 45.
Step 45: calculate corresponding nose balance displacement according to this beat displacement by Electromagnetic Control module 34.
Step 46: come drive spindle 11 to carry out the axial displacement of this compensate for displacement amount by Electromagnetic Control module 34 control actuating modules.
In the preferred embodiment as shown in Figure 4, by the permissible range value that preestablishes a cutter 12 axial-shift displacements earlier, for example can select to be set at ± 3 μ m about or other value, this permissible range value should be on practical operation workpiece material, tool specification, decide with situation such as operating environment.Generally speaking, the cutter beat amount of degree should still be unlikely to cause the incisor path crack and the damaged situation of back of work of workpiece within this permissible range value, so, can reduce inner Active Compensation device of the present invention and go to adjust the axle position excessively continually.And the setting of caution value range, then be according to when cutter abrasion too much or other reason is when causing cutter beat excessive (about for example greater than ± 15 μ m or other value), might cause more serious workpiece damage state based, the present invention's this moment just can initiatively send alerting notifying operation personnel and further check.
In sum, the inside Active Compensation method and the device of main axle cutter axial-shift of the present invention, only need a main shaft once to cut, just can obtain preferable relatively hard brittle material cutting quality, surmountable outer technology is used the defective of two groups of expensive and control system complexity that main shaft caused.And the present invention can design the simple relatively and low cost of manufacture of structure not needing significantly to change under the situation of air-flotation type main shaft framework.In addition, the present invention finely tunes to carry out Active Compensation by the axial-shift displacement of direct sensing " cutter ", can obtain more direct and more accurate cut point positioning control, significantly reduces the cracked situation of back of work, effectively improves the many disadvantages of conventional art.
Certainly; the above only is preferred embodiment of the present invention; be not in order to limit practical range of the present invention; any those skilled in the art are in the modification of being made under spirit of the present invention; all should belong to scope of the present invention, so protection scope of the present invention is worked as with following claim as foundation.
Claims (10)
1, a kind of inside Active Compensation device of main axle cutter axial-shift, this main shaft comprises that cutting tool, that an axle, is incorporated into a front end of axle is incorporated into axle and is supported in the main shaft body in the axle outside with the motor rotor and that drives its rotation, and this axle can be along the linear displacement by a small margin of axially carrying out with respect to body; This inside Active Compensation device comprises:
One sensor, but the sensing cutter is with respect to the axial-shift displacement of body;
One magnet assembly is installed on the terminal and rotation synchronous with it of axle; And,
One electromagnetic assembly, be arranged at body interior corresponding to this magnet assembly part and with magnet assembly at a distance of an appropriate gap, this electromagnetic assembly can a corresponding electric power input and produce magnetic force, and then can produce axial force and make axle carry out axial displacement by a small margin magnet assembly with respect to body.
2, as the inside Active Compensation device of claim the 1 described a kind of main axle cutter axial-shift, wherein, this sensor is for a noncontacting proximity sensor and is suitably to measure the gap with cutter at a distance of one.
3, as the inside Active Compensation device of claim the 1 described a kind of main axle cutter axial-shift, wherein, also include an Electromagnetic Control module, be connected in this electromagnetic assembly, this Electromagnetic Control module can be accepted the axial-shift displacement that this sensor transmits and control electric power input to electromagnetic assembly according to this.
4, the inside Active Compensation device of a kind of main axle cutter axial-shift as claimed in claim 3, wherein, this Electromagnetic Control module also comprises: an electromagnetic actuators and a control module, this electromagnetic actuators is to be used for output power to give electromagnetic assembly to produce magnetic force, this time control unit is connected between sensor and the electromagnetic actuators, can be according to the electric power output of the axial-shift displacement control electromagnetic actuators of the sensing of sensor; Wherein, this main shaft also comprises a main control unit, it is connected in the rotation of motor with the control axle, this time control unit is to be connected in main control unit, main control unit can send the rotary speed data of axle rotation to time control unit, the detection frequency when inferior control unit can decide sensor sensing cutter according to the rotating speed data that is received.
5, the inside Active Compensation device of a kind of main axle cutter axial-shift as claimed in claim 3, wherein, this Electromagnetic Control module is after receiving the axial-shift displacement that this sensor transmits, this displacement and a predefined permissible range value can be compared, when this displacement exceeded the permissible range value, the Electromagnetic Control module just can be controlled the electric power input of electromagnetic assembly; And this Electromagnetic Control module also can be with this displacement and a predefined caution value range relatively after receiving the axial-shift displacement that this sensor transmits, and when this displacement exceeded the caution value range, the Electromagnetic Control module can be sent alerting.
6, a kind of inside Active Compensation device of main axle cutter axial-shift comprises:
One main shaft device comprises:
One axle;
One bite tool is incorporated on the end of axle; And
One motor rotor is incorporated into axle to drive the rotation of axle and cutting tool; And,
One Active Compensation device is incorporated into main shaft device so that the bit shift compensation of cutting tool on axially to be provided, and this Active Compensation device comprises:
One sensor, it is to keep an appropriate gap corresponding to this cutter and with cutter, but this cutter of sensing is with respect to the axial-shift displacement of sensor;
Consistent dynamic model piece, but center roller provides an axial force, so that axle is carried out axial displacement by a small margin; And
One Electromagnetic Control module is connected in this actuating module, and this Electromagnetic Control module can be accepted the axial-shift displacement that this sensor transmits and control actuating module according to this.
7, a kind of inside Active Compensation method of main axle cutter axial-shift includes the following step:
(A) provide an Active Compensation device to be installed on the main shaft device, this main shaft device includes: an axle, a bite are signed an undertaking and are closed on the front end of axle and a motor rotor is incorporated into axle to drive the rotation of axle and cutting tool, and this Active Compensation device includes: but but the axial-shift displacement of its this cutter of sensing of a sensor, consistent dynamic model piece drive spindle carry out axial displacement by a small margin and an Electromagnetic Control module can accept the axial-shift displacement that this sensor transmits and control actuating module according to this;
(B) detect the axial-shift displacement of this cutter and send this beat displacement to the Electromagnetic Control module by sensor;
(C) calculate corresponding nose balance displacement by the Electromagnetic Control module according to this beat displacement;
(D) come drive spindle to carry out the axial displacement of this compensate for displacement amount by Electromagnetic Control module controls actuating module.
8, as the inside Active Compensation method of claim the 7 described a kind of main axle cutter axial-shifts, wherein, between step (A) and step (B), also include the following step:
(A1) rotating speed of detection cutter;
Detection frequency when (A2) deciding sensor sensing cutter according to the rotating speed of this cutter by the Electromagnetic Control module.
9, as the inside Active Compensation method of claim the 7 described a kind of main axle cutter axial-shifts, wherein, between step (B) and step (C), also include the following step:
(B1) this a beat displacement and a predefined permissible range value are compared, when this beat displacement exceeded the permissible range value, the Electromagnetic Control module was just understood execution in step (C);
(B2) this a beat displacement and a predefined caution value range are compared, when this beat displacement exceeded the caution value range, the Electromagnetic Control module can be sent alerting.
10, as the inside Active Compensation method of claim the 7 described a kind of main axle cutter axial-shifts, wherein, this inside Active Compensation method can repeated execution of steps (B) to step (D) be ended signal up to accepting one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011346477A CN1160174C (en) | 2001-11-08 | 2001-11-08 | Internal active axial-shift compensating method and device for rotary main-shaft cutter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011346477A CN1160174C (en) | 2001-11-08 | 2001-11-08 | Internal active axial-shift compensating method and device for rotary main-shaft cutter |
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| CN1347787A CN1347787A (en) | 2002-05-08 |
| CN1160174C true CN1160174C (en) | 2004-08-04 |
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| CNB011346477A Expired - Fee Related CN1160174C (en) | 2001-11-08 | 2001-11-08 | Internal active axial-shift compensating method and device for rotary main-shaft cutter |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102189272B (en) * | 2011-04-21 | 2012-10-24 | 宁波大学 | High-frequency-response non-circular cutting device and control method thereof |
| US8212640B1 (en) | 2011-07-26 | 2012-07-03 | Lockheed Martin Corporation | Tool having buffered electromagnet drive for depth control |
| WO2013015426A1 (en) * | 2011-07-28 | 2013-01-31 | 東芝機械株式会社 | Boring device |
| CN104972343A (en) * | 2014-04-08 | 2015-10-14 | 协鸿工业股份有限公司 | Engaging and disengaginglocking mechanism for engaging and disengaging type horizontal shaft with vertical crossing-angle shaft head |
| TWI640752B (en) * | 2016-11-30 | 2018-11-11 | 財團法人工業技術研究院 | Rotating sensing device and rotating sensing method |
| CN106826392A (en) * | 2017-04-20 | 2017-06-13 | 嘉泰数控科技股份公司 | One kind is based on workpiece on-line checking automatic compensating method |
| TWI716880B (en) * | 2019-05-22 | 2021-01-21 | 施耐德電機股份有限公司 | Classification models of cutting tool wear as well as training methods and evaluation methods of cutting tool wear and computer program product based thereon |
| CN110103245B (en) * | 2019-06-06 | 2022-02-18 | 哈尔滨工业大学 | Automatic chamfering tool for robot |
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