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CN115957949B - High-frequency micro-spraying method and system - Google Patents

High-frequency micro-spraying method and system Download PDF

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Publication number
CN115957949B
CN115957949B CN202211675688.4A CN202211675688A CN115957949B CN 115957949 B CN115957949 B CN 115957949B CN 202211675688 A CN202211675688 A CN 202211675688A CN 115957949 B CN115957949 B CN 115957949B
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glue
spray head
frequency
spraying
vibrator
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CN115957949A (en
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刘景全
杜致远
奚野
徐庆达
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The invention provides a high-frequency micro-spraying method and a system, wherein the method comprises the following steps: preparing a spray head with a required inner diameter; applying high-pressure air to the glue in the glue storage cylinder to form stable jet flow at the outlet end of the spray head; high-frequency vibration is applied to the spray head through the vibrator, so that the spray head resonates, and the glue jet sprayed by the spray head is disturbed; the glue jet is broken under high frequency under the resonance effect, and uniform glue points are formed on the surface of the target substrate, so that high-frequency micro-spraying glue is realized. The invention solves the problem that the spraying frequency of the glue dispensing spraying valve in the prior art is limited when the glue is sprayed, and can greatly improve the glue spraying frequency and the glue dispensing precision.

Description

High-frequency micro-spraying method and system
Technical Field
The invention relates to the technical field of advanced manufacturing, in particular to a high-frequency micro-spraying method and a high-frequency micro-spraying system.
Background
Dispensing packaging is an essential process in the microelectronics, medical and automotive industries, among others. The precise dispensing can seal, bond and strengthen the PCB of the semiconductor component, prevent water and electricity, ensure the performance of the chip, prolong the service life of the chip, and also realize the bonding and sealing of the inside of electronic products such as mobile phones, cameras, notebook computers and the like, such as mobile phone screen sealing, camera module bracket bonding, motor lens fixing, CMOS image sensor sealing and the like.
In the mass dispensing process of various adhesives, a dispensing system with strong driving force and high dispensing frequency, such as a high-speed piezoelectric injection valve, is required to realize rapid dispensing and high profit and productivity. However, the maximum glue spraying frequency of the piezoelectric injection valve commonly used in the current glue dispensing industry is 1000Hz-2000 Hz, and the maximum glue spraying frequency per second is 1000-2000 times, so that the packaging efficiency and the packaging capacity of electronic products are limited; meanwhile, the diameter of the glue spot is generally larger than 50 μm, and the glue spot precision required in the packaging of the semiconductor component is far more than that along with the smaller chip.
The search finds that:
the invention discloses a spraying type adhesive dispensing device based on piezoelectric driving, which is disclosed in Chinese patent application publication No. CN103157577A, wherein the piezoelectric driving mechanism comprises a diamond amplifying module, a piezoelectric actuator and a firing pin, the upper end of the diamond amplifying module is fixedly connected with a supporting connecting frame, the lower end of the diamond amplifying module is fixedly connected with the upper end face of the firing pin, the piezoelectric actuator is fixedly arranged between the left end face and the right end face in the diamond amplifying module, the spraying mechanism is provided with a valve body and a nozzle, the nozzle is arranged in a mounting hole at the lower part of the valve body and is fixedly matched with the mounting hole through threads by a fixing nut, the upper end of the valve body is provided with an end cover, a linear bearing is arranged in the end cover, an O-shaped sealing ring is arranged between the end cover and the valve body, and the lower part of the firing pin sequentially penetrates through the linear bearing, the O-shaped sealing ring and the inner cavity of the valve body and then is positioned in the inner cavity of the nozzle; the glue storage barrel of the glue solution conveying mechanism is clamped in the clamping hole of the glue storage barrel support, the upper part of the glue storage barrel is connected with a high-pressure air source, the lower part of the glue storage barrel is communicated with the inner cavity of the valve body through an adapter, and glue solution in the glue storage barrel is extruded into gaps between the firing pin and the inner cavity of the valve body and between the glue storage barrel and the inner cavity of the nozzle under the drive of high-pressure air. But this patent still has the following problems: (1) The piezoelectric injection valve is in on-demand injection, the maximum glue injection frequency is 1000Hz-2000 Hz, and the glue injection efficiency is limited; (2) The diameter of the glue point formed by the piezoelectric injection valve is completely dependent on the inner diameter of the spray head, when the air pressure is large, the glue outlet amount at the outlet end of the spray head is too large, the diameter of the liquid drop is too large, and when the inner diameter of the spray head is too small, the air pressure is insufficient to spray the glue, and the spray head is extremely easy to block, so that the inner diameter of the spray head is generally larger than 50 mu m when the piezoelectric injection valve is used for dispensing, and the diameter of the glue point is also generally larger than 50 mu m.
Therefore, a new glue spraying method is needed to break through the limitation of the existing glue spraying technology on the glue spraying frequency, widen the size range of glue points, improve the glue spraying efficiency and the glue spraying precision, save the glue spraying time and reduce the glue spraying cost.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a high-frequency micro-spraying method and a high-frequency micro-spraying system.
According to one aspect of the present invention, there is provided a high frequency micro-spray method comprising:
preparing a spray head with a required inner diameter;
applying high-pressure air to the glue in the glue storage cylinder to form stable jet flow at the outlet end of the spray head;
high-frequency vibration is applied to the spray head through the vibrator, so that the spray head resonates, and the glue jet sprayed by the spray head is disturbed;
the glue jet is broken under high frequency under the resonance effect, and uniform glue points are formed on the surface of the target substrate, so that high-frequency micro-spraying glue is realized.
Further, the high-frequency vibration is applied to the shower head through the vibrator, wherein:
the vibrator converts high-frequency electric energy into mechanical vibration and extrudes the outer wall of the spray head; the frequency of the mechanical vibration is consistent with the natural frequency of the spray head, so that the spray head forms high-frequency resonance.
Further, the frequency of the mechanical vibration is 1-1000kHz.
Further, the glue jet is broken under high frequency under the resonance effect, and uniform glue points are formed on the surface of the target substrate, including:
the glue jet is uniformly disturbed by resonance of the outlet end of the spray head, and uniformly broken to form glue points with regular shapes and consistent glue quantity;
the glue jet flow generates Rayleigh breaking in the breaking process, and the vibrator ensures the diameter, shape and position of the glue point by controlling the pressure in the spray head.
Further, the spraying frequency of the glue dots is 1-1000kHz, and the diameter of the glue dots is 1-500 mu m.
According to another aspect of the present invention, there is provided a high-frequency micro-spray system for implementing the above-mentioned high-frequency micro-spray method, including:
the air compressor is used for outputting high-pressure air;
the liquid storage cylinder is used for storing glue;
the breather pipe is used for connecting the air compressor and the liquid storage cylinder, and high-pressure air output by the air compressor enters the liquid storage cylinder so as to ensure the flow supply of glue;
the spray head is connected to the liquid storage cylinder, and glue is sprayed out from the spray head;
the vibrator is arranged on the outer wall of the spray head, the frequency of mechanical vibration of the vibrator is the same as the natural frequency of the spray head to form resonance, so that glue jet ejected by the spray head is broken by resonance disturbance to form glue points;
and the six-axis displacement table is used for placing a target substrate and driving the target substrate to realize six-axis movement, so that glue spraying on different positions and tracks on the target substrate is realized as required.
Further, the vibrator is a piezoelectric vibrator formed of piezoelectric ceramics or a magnetostrictive vibrator formed of a magnetostrictive material.
Further, the inner diameter of the spray head is 100nm-500 mu m, the length is 3-10cm, and the outer diameter is 1-3mm.
Further, a pressure regulating valve is arranged on the vent pipe and is used for regulating the pressure of high-pressure air output by the air compressor, so that the stability of air flow and glue flow is controlled; the liquid storage barrel and be equipped with the connecting piece between the shower nozzle, the connecting piece is used for guaranteeing axiality and air tightness between liquid storage barrel and the shower nozzle.
Further, the method further comprises the following steps:
the positioning camera is fixed on the liquid storage cylinder and is used for positioning the target position of the glue spraying at the outlet end of the spray head;
and the observation camera is fixed on the six-axis displacement table and is used for monitoring the size and the shape of jet flow and glue points in real time.
Compared with the prior art, the invention has at least one of the following beneficial effects:
according to the high-frequency micro-spraying method and system provided by the invention, the mechanical vibration frequency output by the vibrator is matched with the natural frequency of the spray head to form high-frequency resonance, so that the glue jet is uniformly broken due to uniform disturbance formed by vibration of the outlet end of the spray head, and glue points with regular shapes and consistent glue quantity are formed.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a flow chart of a method for high frequency micro-spraying glue according to an embodiment of the invention;
fig. 2 is a schematic structural diagram of a high-frequency micro-spray system according to an embodiment of the invention.
In the figure: the device comprises a 1-air compressor, a 2-oil-water filter, a 3-vent pipe, a 4-pressure regulating valve, a 5-liquid storage cylinder, a 6-connecting piece, a 7-positioning camera, an 8-vibrator, a 9-spray head, a 10-six-axis displacement table and an 11-observation camera.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Referring to fig. 1, a flow chart of a high-frequency micro-spray method according to an embodiment of the present invention is shown, and the method is implemented by using the high-frequency micro-spray system shown in fig. 2, and includes:
s1, preparing a spray nozzle 9 with a required inner diameter;
s2, applying high-pressure air to the glue in the glue storage cylinder to enable the outlet end of the spray head 9 to form stable jet flow;
s3, high-frequency vibration is applied to the spray head 9 through the vibrator 8, so that the spray head 9 resonates, and the glue jet sprayed by the spray head 9 is disturbed;
s4, the glue jet is broken under high frequency under the resonance effect, uniform glue points are formed on the surface of the target substrate, and high-frequency micro-spraying glue is achieved.
In some embodiments, in step S1, the more precise the electronic component is, the higher the requirement on dispensing precision is, so that the smaller the diameter of the required dispensing point is, the smaller the inner diameter of the nozzle 9 needs to be prepared, i.e. the inner diameter of the nozzle 9 is determined according to the application scene of actual dispensing, preferably, the inner diameter of the nozzle 9 is 100nm-500 μm, the length is 3-10cm, the outer diameter is 1-3mm, and the nozzle 9 with the required inner diameter and length is prepared by adopting methods such as laser fusion drawing, micro electric spark, laser processing and the like; selecting a material with a lower softening temperature, softening the material at a high temperature, uniformly attaching the softened material to the outer wall of the outlet end of the nozzle 9 after drawing, wherein the attached material is preferably glass, including quartz glass, borosilicate glass, lead glass and the like, so as to prevent the nozzle 9 from being damaged by high pressure; cooling and solidifying the adhesion material, reinforcing the outlet end of the spray head 9, improving the strength of the spray head 9, and preventing the spray head 9 from being damaged by high pressure; and (3) rotationally polishing the outlet end of the spray head 9 to be conical, and flattening, polishing, cleaning and drying the port.
In some embodiments, in step S2, high-pressure air is output by using the air compressor 1, the high-pressure air is filtered and regulated by the oil-water filter 2 and the pressure regulating valve 4, respectively, the high-pressure air output by the air compressor 1 has a pressure of 200MPa, and the high-pressure air is regulated to 1kPa-200 MPa by the pressure regulating valve 4. The glue in the reservoir 5 is rapidly squeezed to the outlet end of the spray head 9, forming a stable jet. The viscosity of the glue in the glue reservoir 5 cannot be too high, otherwise the disturbing fracture of the glue jet is affected, preferably the viscosity of the glue in the glue reservoir 5 ranges from 1 to 3000cps, more preferably the viscosity of the glue in the glue reservoir 5 ranges from 200cps. It will be appreciated by those skilled in the art that when using glues above this viscosity range, the glue viscosity may be reduced by increasing the temperature, thereby achieving the purpose of high frequency micro-spraying.
In some embodiments, in step S3, high frequency vibration is applied to the head 9 by the vibrator 8, wherein: the vibrator 8 converts high-frequency electric energy into mechanical vibration and extrudes the outer wall of the spray head 9; the frequency of the mechanical vibration coincides with the natural frequency of the head 9, and the head 9 is made to resonate at a high frequency.
Specifically, the outer wall of the nozzle 9 is provided with a vibrator 8 formed by piezoelectric ceramics or magnetostriction; the natural frequency of the spray head 9 is determined by the wall thickness, length, inner diameter, outer diameter and the like of the spray head 9, the longer the spray head 9, the smaller the wall thickness and the smaller the inner diameter, the higher the natural frequency, preferably, the inner diameter of the spray head 9 is 100nm-500 μm, the length is 3-10cm, the outer diameter is 1-3mm, the natural frequency of the spray head 9 is 1-1000kHz, correspondingly, the vibrator 8 such as a piezoelectric ultrasonic transducer vibrator converts high-frequency electric energy into mechanical vibration with the frequency of 1-1000kHz, and the outer wall of the spray head 9 is extruded; the mechanical vibration frequency is consistent with the natural frequency of the spray head 9, and high-frequency resonance is formed, so that the glue jet is disturbed. It will be understood by those skilled in the art that the higher the natural frequency of the nozzle 9, the higher the resonance frequency generated after the vibrator 8 applies the matched mechanical vibration, the higher the disturbance frequency of the glue jet, and the higher the breaking frequency of the glue jet, so that the high-frequency micro-spraying of the glue can be realized.
In some embodiments, in step S4, the glue jet breaks at high frequency under resonance to form uniform glue spots on the surface of the target substrate, including: the glue jet is uniformly disturbed by resonance of the outlet end of the spray head 9, and uniformly broken to form glue points with regular shapes and consistent glue quantity; the glue jet flow generates Rayleigh breaking in the breaking process, and the vibrator 8 ensures the diameter, shape and position of the glue point by controlling the pressure in the spray head 9. Preferably, the spraying frequency of the glue dots is 1-1000kHz, and the diameter of the glue dots is 1-500 mu m, so that high-frequency glue spraying and micro-dispensing are realized.
In the above embodiment, the diameter of the glue sites is mainly controlled by the inner diameter of the nozzle 9, and in addition, the air pressure and the resonance frequency can also affect the glue sites, and in a certain range, the smaller the air pressure is, the larger the resonance frequency is, and the smaller the diameter of the glue sites is. The control of the glue point shape can be realized by controlling the stability of the glue jet and the uniformity of disturbance fracture caused by resonance to the glue jet, so that the glue point is in a regular round shape. The positions of the glue points are controlled through the six-axis displacement table, the positioning camera, the observation camera and the like, so that the diameters, the shapes and the positions of the glue points all meet the glue spraying requirements.
According to the embodiment of the invention, the continuous glue jet is used, the pressure of the glue MPa level is given, the sub-micron inner diameter nozzle can generate the glue jet, the glue jet is uniformly disturbed and uniformly broken under the resonance action of the vibrator on the nozzle, and the glue drops are generated at high frequency, so that the occurrence of glue points with diameters as small as 1 mu m can be easily realized.
Based on the same inventive concept, referring to fig. 2, a structural schematic diagram of a high-frequency micro-spraying system according to another embodiment of the present invention is provided, where the system is used to implement the above-mentioned high-frequency micro-spraying method, and the system includes an air compressor 1, a liquid storage cylinder 5, a vent pipe 3, a spray head 9, a vibrator 8, and a six-axis displacement table 10, where: the air compressor 1 is used for outputting high-pressure air; the liquid storage cylinder 5 is used for storing glue to be sprayed; the breather pipe 3 is used for connecting the air compressor 1 and the liquid storage cylinder 5, and high-pressure air output by the air compressor 1 enters the liquid storage cylinder 5 so as to ensure the flow supply of glue; the spray head 9 is connected to the liquid storage cylinder 5, and glue is sprayed out from the spray head 9; the vibrator 8 is arranged on the outer wall of the spray head 9, the frequency of mechanical vibration of the vibrator 8 is the same as the natural frequency of the spray head 9 to form resonance, so that glue jet ejected by the spray head 9 is broken by resonance disturbance to form a glue point; the six-axis displacement table 10 is used for placing a target substrate and driving the target substrate to realize six-axis movement, so that glue spraying on different positions and tracks on the target substrate is realized as required.
In the above embodiment, the spray nozzle 9 forms a glue jet at the outlet end under the action of high-pressure air, the vibrator 8 outputs high-frequency vibration, and continuously extrudes the outer wall of the spray nozzle 9 to cause the jet to be disturbed and broken, and the size and the shape of the glue point can be controlled under the combined action of the air compressor 1, the spray nozzle 9, the vibrator 8 and the like, so that the continuity and the consistency of the glue point are ensured; the six-axis displacement table 10 controls the displacement, the speed and the acceleration of six-axis motion of the target substrate on the table top, and realizes the on-demand glue spraying of different positions and tracks on the target substrate.
In some embodiments, the vibrator 8 is a piezoelectric vibrator formed of piezoelectric ceramics or a magnetostrictive vibrator formed of magnetostrictive materials, so that the energy conversion process is more stable and mechanical vibration of higher frequency can be output. Preferably, the vibrator 8 is a piezoelectric vibrator made of piezoelectric ceramics. In other embodiments, other kinds of vibrators may be used as long as the same function as described above can be achieved. The mechanical vibration modes can be various, including radial vibration, axial vibration, torsional vibration, shearing vibration in the thickness direction and the like in the length direction, the vibrator 8 transmits vibration generated by self deformation to the spray head 9, the outlet end of the spray head 9 is correspondingly subjected to radial vibration, axial vibration, circular vibration or circumferential swing due to the influence of resonance, and the radial and axial high-frequency reciprocating motion or the high-frequency rotary motion in the circumferential direction of the spray head correspondingly causes high-frequency fracture of glue jet flow to generate uniform glue points. Wherein the frequency of the mechanical vibration is the same as the natural frequency of the spray head 9, thereby forming resonance. Preferably, the inner diameter of the spray head 9 is 100nm-500 μm, the length is 3-10cm, the outer diameter is 1-3mm, the natural frequency of the spray head 9 is 1-1000kHz, correspondingly, the mechanical vibration frequency output by the vibrator 8 is 1-1000kHz, and the two are matched to form resonance, so that high-frequency micro-spraying glue can be realized.
In some preferred embodiments, the natural frequency of the spray head 9 and the mechanical vibration frequency output by the vibrator 8 are 80kHz, the mode of the mechanical vibration is radial vibration in the length direction, compared with other forms of vibration, the radial vibration can enable the breaking process of the glue jet to be more stable, the vibrator 8 transmits vibration generated by self deformation to the spray head 9, and the outlet end of the spray head 9 is affected by resonance and reciprocates in the radial high frequency to enable the glue jet to break at high frequency, so that uniform glue points are generated.
In some embodiments, the main body of the nozzle 9 is made of glass, metal, ceramic, etc., and the outer wall of the outlet end of the nozzle 9 is adhered and reinforced by a material with lower softening temperature, preferably glass, including quartz glass, borosilicate glass, lead glass, etc., so as to prevent the nozzle 9 from being damaged by high pressure; the outer wall of the outlet end of the spray head 9 is attached with borosilicate glass. The diameter of the injected glue jet and the diameter of the formed glue spot can be controlled by changing the inner diameter of the nozzle 9, the natural frequency of the nozzle 9 can be controlled by changing the outer diameter and the length of the nozzle 8, and the final glue spraying frequency can be controlled, preferably, the inner diameter of the nozzle 9 is 100nm-500 mu m, the length is 3-10cm, and the outer diameter is 1-3mm. If the outer diameter of the nozzle 9 is too large, the wall thickness is too large, and the natural frequency of the nozzle 9 is low, so that the resonance frequency is affected; if the outer diameter of the nozzle 9 is too small, the wall thickness is too small, the strength of the nozzle 9 can be affected, and the nozzle is damaged after high-pressure gas is introduced. If the length of the spray head 9 is too large, the glue is easy to block in the spray head 9, so that the stability of the glue jet flow is affected; if the length of the nozzle 9 is too small, the natural frequency of the nozzle 9 is low, which affects the resonance frequency, and the space reserved for fixing the vibrator 8 is too small, which is not beneficial to the fixation of the vibrator.
Preferably, the main body of the nozzle 9 is made of glass, and has an inner diameter of 5 μm, a length of 5cm, an outer diameter of 1mm, and a natural frequency of 80kHz.
In some embodiments, the system further comprises an oil-water filter 2 and a pressure regulating valve 4 arranged on the breather pipe 3, redundant liquid such as oil-water in the air output by the air compressor 1 is filtered by the oil-water filter 2, and the pressure regulating valve 4 is used for regulating the pressure of the high-pressure air output by the air compressor 1, so that the stability of air flow and glue flow can be controlled. Preferably, the air compressor 1 outputs high-pressure air of 200MPa, so that the flow supply of glue in the spray nozzle 9 is ensured; the pressure regulating valve 4 is used for regulating the pressure of the air output by the air compressor 1 to 1kPa-200 MPa and controlling the stability of air flow and glue flow, so that the spraying frequency of glue points is 1-1000kHz, and the diameter of the glue points is 1-500 mu m. More preferably, the pressure of the air output by the air compressor 1 after being regulated by the pressure regulating valve 4 is 40Mpa, the spraying frequency of the glue points is 100kHz, the diameter of the glue points is 10 μm, and the high-frequency glue spraying and micro-glue dispensing are realized.
In some embodiments, a connecting piece 6 is arranged between the liquid storage barrel 5 and the spray head 9, and the connecting piece 6 is used for ensuring coaxiality and airtightness between the liquid storage barrel 5 and the spray head 9. The viscosity of the glue stored in the reservoir 5 is in the range of 1-3000cps, preferably the viscosity of the glue stored in the reservoir 5 is 200cps. The system also comprises a positioning camera 7 and an observation camera 11, wherein the positioning camera 7 is fixed on the liquid storage cylinder 5 and is used for positioning the target position of glue spraying at the outlet end of the spray nozzle 9; the observation camera 11 is fixed on the six-axis displacement table 10 and is used for monitoring the size and the shape of jet flow and glue points in real time.
According to the high-frequency micro-spraying method and system provided by the embodiment of the invention, the mechanical vibration frequency output by the vibrator is matched with the natural frequency of the spray head to form high-frequency resonance, so that the glue jet is uniformly broken due to uniform disturbance formed by the vibration of the outlet end of the spray head to form glue points with regular shapes and consistent glue quantity.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the claims without affecting the spirit of the invention. The above-described preferred features may be used in any combination without collision.

Claims (3)

1. A high frequency micro-spray method, comprising:
preparing a spray head with a required inner diameter; the inner diameter of the spray head is determined according to the application scene of the adhesive, the inner diameter of the spray head is 100nm-5 mu m, the length of the spray head is 3-10cm, and the outer diameter of the spray head is 1-3 mm;
applying high-pressure air to the glue in the liquid storage cylinder to form stable jet flow at the outlet end of the spray head, wherein the viscosity range of the glue stored in the liquid storage cylinder is 200-3000 cps, and the pressure intensity of the high-pressure air is 40-200 MPa;
high-frequency vibration is applied to the spray head through the vibrator, so that the spray head resonates, and the glue jet sprayed by the spray head is disturbed;
the glue jet is broken under high frequency under the resonance effect, and uniform glue points are formed on the surface of the target substrate, so that high-frequency micro-spraying glue is realized; wherein, the glue jet is uniformly disturbed by resonance of the outlet end of the spray head, and uniformly broken to form glue points with regular shape and consistent glue quantity; the glue jet flow generates Rayleigh breaking in the breaking process, and the vibrator ensures the diameter, shape and position of the glue point by controlling the pressure in the spray head; the spraying frequency of the glue points is 1-1000kHz, the diameter of the glue points is controlled by the inner diameter of the spray head, and the diameter of the glue points is 1-500 mu m.
2. The high-frequency micro-spray method according to claim 1, wherein the high-frequency vibration is applied to the spray head by a vibrator, wherein:
the vibrator converts high-frequency electric energy into mechanical vibration and extrudes the outer wall of the spray head; the frequency of the mechanical vibration is consistent with the natural frequency of the spray head, so that the spray head forms high-frequency resonance.
3. The high-frequency micro-spray method according to claim 2, wherein the frequency of the mechanical vibration is 1-1000kHz.
CN202211675688.4A 2022-12-26 2022-12-26 High-frequency micro-spraying method and system Active CN115957949B (en)

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