CN115900590B - High signal-to-noise ratio spectrum confocal three-dimensional detection system and method - Google Patents
High signal-to-noise ratio spectrum confocal three-dimensional detection system and method Download PDFInfo
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Abstract
The application relates to a high signal-to-noise ratio spectrum confocal three-dimensional detection system and a high signal-to-noise ratio spectrum confocal three-dimensional detection method, and belongs to the technical field of three-dimensional detection. Comprising the following steps: a multi-color light source unit including a plurality of light channels arranged in an array, a multi-color light source inputting multi-color light beams to the plurality of light channels, and a spatial light modulator controlling the simultaneous or partial input of the multi-color light beams to the respective light channels; the multi-color light source unit and the measured object are coaxial and sequentially provided with a first lens group, a spectroscope and a second lens group, and a third lens group, a slit, an imaging spectrometer and a camera are sequentially arranged on the right side of the spectroscope. According to the method, the spatial light modulator can control each light channel to emit complex-color light beams simultaneously or partially, so that the point scanning mode and the line scanning mode are organically fused, the SNR of the system can be improved, and the application requirements on different SNR and detection time can be met through different working modes.
Description
Technical Field
The application relates to the technical field of three-dimensional detection, in particular to a high signal-to-noise ratio spectrum confocal three-dimensional detection system and method.
Background
The three-dimensional detection technology based on spectrum confocal is a common technical means in the field of optical detection of three-dimensional microstructures such as wafers, LED panels, PCBs and the like, and has the advantages of high detection precision, high detection speed and the like. A schematic diagram of a three-dimensional microstructure detection system based on spectrum confocal is shown in fig. 1, and the basic principle of detection is as follows:
the polychromatic light beam emitted by the polychromatic light source 1 is dispersed along the z-axis after passing through the first lens group 2 and the second lens group 4, that is, the light beams with different wavelengths are focused at different positions along the z-axis, and as shown in fig. 1, focal planes with wavelengths λ1, λ2 and λ3 are sequentially from top to bottom along the z-axis.
It is assumed that the surface of a certain area of the object 5 is located on the focal plane of the light beam with wavelength λ2, i.e. the light beam with wavelength λ2 is focused into a focal spot on the surface of the area of the object, and the light beams with wavelengths λ1 and λ3 are dispersed light spots in the area.
The third lens group 7 is the same as the first lens group 2, and the position of the slit 8 is conjugate with the position of the light source 1, so that after the light beam reflected by the object 5 passes through the second lens group 4, the spectroscope 3 and the third lens group 7, part of the light beam with the wavelength lambda 2 still converges into a focal spot on the slit plane, and part of the light beam with the wavelengths lambda 1 and lambda 3 also forms a scattered light spot on the slit 8 plane.
After spatial filtering through the slit 8, the imaging spectrometer 9 will obtain a spectral line with a wavelength of 2. When the stage 6 moves to focus the light beam on another area of the object, the imaging spectrometer 9 will also acquire the spectral line corresponding to that area. Thus, the object 5 can be detected three-dimensionally by scanning.
In the related art, the existing spectrum confocal detection system can be divided into a point scanning type and a line scanning type according to two light source types of point light sources and line light sources. In the spot scanning type spectrum confocal detection system shown in fig. 1, in the light beams of multiple colors emitted by the spot multiple color light source, the light beams of each wavelength part are converged into a spot on the corresponding focal plane, and the camera 10 obtains the spectrum information corresponding to the height of the measured object 5 area irradiated by the spot in a single exposure. Therefore, the stage 6 needs to perform a moving scan in two dimensions of the x-direction and the y-direction to perform a three-dimensional measurement on the object to be measured.
In the line scanning type spectrum confocal detection system shown in fig. 1, a line polychromatic light source is arranged along the x-axis direction, and in the polychromatic light beams emitted by the line polychromatic light source, light beams of each wavelength part are converged into a line along the x-axis direction on a corresponding focal plane. Therefore, the camera 10 can acquire all the corresponding spectrum information of different heights in the whole linear region of the measured object 5 irradiated by the line by a single exposure. Thus, the object to be measured can be measured three-dimensionally by only moving and scanning the stage 6 along the y-axis direction.
In an on-line scanning spectrum confocal detection system, fig. 2 (a) is a cross section of a detected object, and fig. 2 (b) is a spectrum schematic image of a surface structure of the detected object 5, which is obtained by the system through single exposure; the fatness p of the convex spectral line and the wavelength difference lambda between the fatness p and the base spectral line in fig. 2 (b) are calculated to obtain the fatness d and the height h of the rectangular convex surface of the measured object 5 shown in fig. 2 (a), respectively. The convex spectral line and the base spectral line have corresponding intensity distribution along the direction of the spectrum wavelength, the algorithm firstly determines the wavelength lambda 2 corresponding to the intensity peak value of the convex spectral line and the wavelength lambda 1 corresponding to the intensity peak value of the base spectral line, and then performs subtraction to obtain the wavelength difference lambda between the convex spectral line and the base spectral line, namely lambda=lambda 2-lambda 1.
However, when the surface of the measured object 5 is rough or the reflectivity is low, and the difference between the intensity peak values of the convex spectral line and the base spectral line and the surrounding background is small, the error of wavelengths λ1 and λ2 corresponding to the searched peak values may be large, and the error of the corresponding calculated wavelength difference λ is large. Therefore, the error of the height (h) of the convex surface of the finally obtained measured object 5 is larger, and the measurement accuracy of the system is affected. Therefore, it is desirable to increase the ratio of the intensity peak to the background noise, i.e., the signal-to-noise ratio (SNR), to increase the accuracy of the system's detection of such objects 5.
The existing spectrum confocal system is only a point type spectrum confocal system or a line scanning type spectrum confocal system, the point type spectrum confocal system has high detection precision, but has low detection speed, and the line scanning type spectrum confocal system has high scanning speed but has high signal to noise ratio, so that no spectrum confocal system in the prior art can provide multiple working modes, thereby meeting the requirements of different occasions.
Disclosure of Invention
The embodiment of the application provides a high signal-to-noise ratio spectrum confocal three-dimensional detection system and a high signal-to-noise ratio spectrum confocal three-dimensional detection method, which are used for solving the problem that a spectrum confocal system is not available in the related technology, and a plurality of working modes can be provided, so that the requirements of different occasions are met.
An embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system, including:
the multi-color light source unit comprises a plurality of light channels arranged in an array, a multi-color light source for introducing multi-color light beams into the light channels, and a spatial light modulator for controlling the simultaneous or partial input of the multi-color light beams to each light channel;
a first lens group, a spectroscope and a second lens group are sequentially arranged between the multi-color light source unit and the measured object, the multi-color light source unit, the first lens group and the second lens group are coaxial, and the first lens group, the spectroscope and the second lens group jointly enable light with different wavelengths modulated by the spatial light modulator to be focused at different heights of the measured object;
the right side of the spectroscope is sequentially provided with a third lens group, a slit, an imaging spectrometer and a camera, wherein the third lens group focuses the light reflected by the measured object after being reflected by the spectroscope and then enters the slit for spatial filtering.
In some embodiments: the optical channels are formed by a plurality of array optical fibers which are arrayed in sequence, each optical fiber of the array optical fibers forms an optical channel for transmitting the multi-color light beam, and the spatial light modulator controls the optical fibers to emit the multi-color light beam simultaneously or partially;
or the plurality of optical channels are array optical waveguides, the array optical waveguides are provided with a plurality of optical channels for transmitting the complex-color light beams, and the spatial light modulator controls the plurality of optical channels of the array optical waveguides to emit the complex-color light beams simultaneously or partially.
In some embodiments: the spatial light modulator controls each light channel to sequentially emit light beams with multiple colors one by one, and the detected object is detected in a point-by-point scanning mode.
In some embodiments: the spatial light modulator controls each optical channel to emit complex-color light beams at intervals of one or more optical channels at the same time, and the object to be detected is detected in a multi-point scanning mode.
In some embodiments: the spatial light modulator divides all the light channels into a plurality of areas, so that some of the areas detect the detected object in a multi-point scanning mode, and other areas detect the detected object in a line scanning mode.
In some embodiments: the slit at the entrance of the imaging spectrometer is an array optical fiber or an array optical waveguide, and each light channel of the array optical fiber or the array optical waveguide is conjugated with each light emitting channel in the light complex-color light source one by one.
In some embodiments: the light channels are array micro lenses, the array micro lenses are provided with a plurality of light channels for transmitting the multi-color light beams, and the spatial light modulator controls the light channels of the array micro lenses to emit the multi-color light beams simultaneously or partially.
A second aspect of the embodiments of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection method, where the method uses the high signal-to-noise ratio spectral confocal three-dimensional detection system described in any one of the foregoing embodiments, and the method includes:
the light source emits light beam with multiple colors, and the spatial light modulator controls the simultaneous or partial input of the light beam with multiple colors to each light channel to form a line scanning light beam or a point scanning light beam;
the light waves with different wavelengths are converged at different positions on the optical axis after passing through the second lens group, so that axial dispersion is generated;
the light beam reflected by the measured object is reflected by the second lens group, the spectroscope and the third lens group and focused by the third lens group, finally enters the imaging spectrometer after the slit and is recorded by the camera, and the height difference of the measured object detection area can be obtained by resolving the difference of the wavelength corresponding to the recorded spectrum intensity peak value.
In some embodiments: the spatial light modulator controls each light channel to sequentially emit light beams with multiple colors one by one, and the detected object is detected in a point-by-point scanning mode.
In some embodiments: the spatial light modulator controls each optical channel to emit complex-color light beams at intervals of one or more optical channels at the same time, and the object to be detected is detected in a multi-point scanning mode;
or the spatial light modulator controls each optical channel to simultaneously emit a multi-color light beam, and the detected object is detected in a line scanning mode;
or the spatial light modulator divides all the light channels into a plurality of areas, so that some areas detect the detected object in a multi-point scanning mode, and other areas detect the detected object in a line scanning mode.
The beneficial effects that technical scheme that this application provided brought include:
compared with a traditional coaxial spectrum confocal system, the spectrum confocal three-dimensional detection system is provided with a multiple-color light source unit, the multiple-color light source unit comprises a plurality of light channels arranged in an array, multiple-color light sources for inputting multiple-color light beams into the light channels, and a spatial light modulator for controlling the light channels to be simultaneously or partially led into the multiple-color light beams. Because the spatial light modulator can control the simultaneous or partial input of the multiple-color light beams to each light channel, multiple working modes are provided, and the application requirements of users on different SNR and detection time can be met.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a three-dimensional microstructure detection system based on spectral confocal in the background art;
FIG. 2 is a schematic diagram of a surface structure and a spectrum of an object to be measured in the background art;
FIG. 3 is a schematic diagram of a high signal-to-noise ratio spectral confocal three-dimensional detection system according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of several optical channels according to an embodiment of the present application.
Reference numerals:
1. a light source of a compound color light; 2. a first lens group; 3. a beam splitter; 4. a second lens group; 5. a test object; 6. an objective table; 7. a third lens group; 8. a slit; 9. an imaging spectrometer; 10. a camera; 11. a spatial light modulator; 12. an optical channel.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present application based on the embodiments herein.
The embodiment of the application provides a high signal-to-noise ratio spectrum confocal three-dimensional detection system and a high signal-to-noise ratio spectrum confocal three-dimensional detection method, which can solve the problem that a spectrum confocal system is not available in the related technology, and can provide a plurality of working modes so as to meet the requirements of different occasions.
Referring to fig. 3 and 4, a first aspect of an embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system, including:
a multiple color light source unit including a plurality of light channels 12 arranged in an array, a multiple color light source that inputs multiple color light beams to the plurality of light channels 12, and a spatial light modulator 11 that controls simultaneous or partial input of the multiple color light beams to each light channel 12. The complex-color light source unit and the measured object 5 are coaxial, a first lens group 2, a spectroscope 3 and a second lens group 4 are sequentially arranged between the complex-color light source unit and the measured object 5, and a third lens group 7, a slit 8, an imaging spectrometer 9 and a camera 10 are sequentially arranged on the right side of the spectroscope 3. The bottom of the object 5 is provided with an object stage 6 for supporting and positioning the object 5, and the object stage 6 is provided with an X-axis linear module or a Y-axis linear module for adjusting the object 5 to move along the X-axis direction or the Y-axis direction.
The first lens group 2, the beam splitter 3 and the second lens group 4 together focus light of different wavelengths modulated by the spatial light modulator 11 at different heights of the object 5 to be measured. The first lens group 2 and the second lens group 4 are used for axially dispersing the multi-color light beam and focusing the dispersed light rays with different wavelengths onto different heights on the surface of the measured object 5. A beam splitter 3 for transmitting a part of the light of the complex color light beam and outputting a transmitted light beam; the spectroscope 3 is arranged in front of the multi-color light source and is used for receiving the multi-color light beam emitted by the multi-color light source and transmitting part of light rays in the multi-color light beam.
The third lens group 7 focuses the light reflected by the object 5 after being reflected by the spectroscope and enters the slit 8 for spatial filtering. The slit 8 is positioned at the entrance of the imaging spectrometer 9, the position of the slit 8 is conjugate with the position of the complex-color light source, and the slit is used for receiving the reflected light beam transmitted by the third lens group 7 and filtering out the reflected light beam in a specific wavelength range; wherein the specific wavelength range is the wavelength range of the light focused on the surface of the object 5. The light emitted from the third lens group 7 is filtered through a slit 8, so that the reflected light with a wavelength focused on the surface of the object 5 can pass through the slit 8, and the reflected light with a defocused wavelength on the surface of the object 5 can be filtered by the slit 8.
The multiple color light source unit of the embodiment of the present application is provided with a plurality of light channels 12 arranged in an array, multiple color light beams transmitted in each light channel 12 do not interfere with each other, multiple color light sources for inputting multiple color light beams to the plurality of light channels 12, and a spatial light modulator 11 for controlling simultaneous or partial input of multiple color light beams to each light channel 12. The spatial light modulator 11 can control the simultaneous or partial input of the multiple color light beams to each light channel 12, so as to organically integrate the point scanning mode and the line scanning mode, improve the SNR of the system, and meet the application requirements on different SNR and detection time through different working modes.
In some alternative embodiments: referring to fig. 3 and fig. 4, the embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system, where an optical channel 12 of the spectral confocal three-dimensional detection system is formed by a plurality of array optical fibers arrayed in sequence, each optical fiber of the array optical fibers forms an optical channel 12 for transmitting a multiple color light beam, and a spatial light modulator 11 controls a plurality of optical fibers to emit the multiple color light beam simultaneously or partially.
Alternatively, the plurality of optical channels 12 are array optical waveguides, the array optical waveguides are provided with the plurality of optical channels 12 for transmitting the multiple color light beams, and the spatial light modulator 11 controls the plurality of optical channels 12 of the array optical waveguides to emit the multiple color light beams simultaneously or partially. The light emitting surface of each light channel 12 of the array optical waveguide is rectangular structure so as to facilitate the splicing of two adjacent detected areas of the detected object 5. The slit 8 at the entrance of the imaging spectrometer 9 is an array optical fiber or an array optical waveguide, and each light channel 12 of the array optical fiber or the array optical waveguide is conjugated with each light emitting channel in the light complex color light source one by one.
In fig. 2 (b), the scanning width direction is defined as the lateral direction in which there are m columns of pixels, and the spectrum shown in fig. 2 is divided into n longitudinal regions (where n=m/bin, bin is a positive integer) in the scanning direction, and each of the longitudinal regions is regarded as one channel, each channel has an intensity distribution similar to that shown in fig. 2 (c). The ratio of the peak value of spectral line intensity and background noise in each channel is the signal to noise ratio.
In some alternative embodiments: referring to fig. 3 and 4, the embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system, where a spatial light modulator 11 of the spectral confocal three-dimensional detection system controls each optical channel 12 to sequentially emit multiple-color light beams one by one, so as to detect an object 5 to be detected in a point-by-point scanning manner. This mode can avoid crosstalk of stray light between adjacent optical channels 12, effectively improving SNR in the corresponding channels. The working mode has longer detection time, but meets the application scene with higher requirements on the detection SNR.
Alternatively, the spatial light modulator 11 controls each optical channel to emit a light beam of a multiple color at the same time every interval of one or more optical channels, and detects the object 5 in a multi-point scanning manner. The operation mode can shorten the detection time, avoid stray light crosstalk of the adjacent optical channels 12 to a certain extent, improve the SNR in the corresponding channels to a certain extent, and sacrifice the resolution in the scanning width direction. The working mode compromises the detection time and the detection SNR, and meets the application scene with requirements on both.
The spatial light modulator 11 controls whether or not detection of each point on the scanning width is required as needed when each light channel emits a light beam of a multiple color at the same time every interval of one or more light channels. If it is not necessary to detect every point on the scan width, it is possible to control each optical channel to scan the next line in the same or different scan mode after emitting the multiple color light beams at the same time every interval of one or more optical channels.
If each point on the scan width needs to be detected, time-sharing detection can be performed herein, for example, there are n optical channels in total, for each scan line, the odd-numbered optical channels are controlled to emit the multiple-color light beams at time t1, and the even-numbered optical channels are controlled to emit the multiple-color light beams at time t2, so that each point on each scan line is detected, and for the next scan line, the same scan pattern can be performed.
Of course, different scanning lines can also be scanned by using different light channels, for example, a first scanning line is used for emitting a multi-color light beam by using an odd light channel, and a second scanning line is used for emitting a multi-color light beam by using an even light channel, so that the scanning time is saved, and the omission of information of some points to be detected on the object to be detected can be avoided.
Alternatively, the spatial light modulator 11 may divide all the optical channels 12 into a plurality of areas, so that some of the areas detect the object 5 in a multi-point scanning manner, while other areas detect the object 5 in a line scanning manner. The dot scanning mode and the line scanning mode are organically integrated, so that different requirements of users are met.
In some alternative embodiments: referring to fig. 3 and 4, the embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system, where a plurality of optical channels 12 of the spectral confocal three-dimensional detection system are array microlenses, the array microlenses are provided with a plurality of optical channels 12 for transmitting multiple color light beams, and the spatial light modulator 11 controls the plurality of optical channels 12 of the array microlenses to emit the multiple color light beams simultaneously or partially. When the light emitting surface of each light channel 12 of the array microlens is rectangular, it is convenient to splice two adjacent regions to be measured of the object 5.
By the above-mentioned spectral confocal three-dimensional detection system, the spatial light modulator 11 can flexibly control the time for inputting the multiple-color light beam into each light channel 12, so that multiple working modes can be provided, and the corresponding working mode can be flexibly selected according to the requirements on signal-to-noise ratio and detection time.
Referring to fig. 3 and 4, a second aspect of the embodiments of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection method, where the method uses a high signal-to-noise ratio spectral confocal three-dimensional detection system according to any one of the embodiments, and the method includes:
in step 1, a multi-color light beam is emitted from a multi-color light source, and the spatial light modulator 11 controls to input the multi-color light beam to each light channel 12 simultaneously or partially so as to form a line scanning light beam or a spot scanning light beam on the object 5.
And 2, forming parallel light beams by the multi-color light beams after passing through the first lens group 2, enabling partial light beams after passing through the spectroscope 3 to enter the second lens group 4, and converging light waves with different wavelengths on different positions on an optical axis after passing through the second lens group 4 to generate axial dispersion.
And 3, collecting the light beam reflected by the measured object 5 by the second lens group 4, reflecting by the spectroscope 3 and focusing by the third lens group 7, finally entering the slit 8 for spatial filtering and light splitting by the imaging spectrometer 9, imaging on the photosensitive surface of the camera 10 and recording, and obtaining the height difference of the detection area of the measured object 5 by resolving the difference of the wavelength corresponding to the recorded spectrum intensity peak value.
In some alternative embodiments: referring to fig. 3 and 4, an embodiment of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection method, where a multi-color light source unit of the method is composed of a plurality of light channels 12 arranged in an array, a multi-color light source for inputting multi-color light beams to the plurality of light channels 12, and a spatial light modulator 11 for controlling simultaneous or partial input of multi-color light beams to each light channel 12. The multiple color light source unit has several operation modes under the control of the spatial light modulator 11:
operation mode one: the spatial light modulator 11 controls each light channel 12 to sequentially emit light beams of multiple colors one by one, and detects the object 5 in a point-by-point scanning manner. This mode can avoid crosstalk of stray light between adjacent optical channels 12, effectively improving SNR in the corresponding channels. The working mode has longer detection time, but meets the application scene with higher requirements on the detection SNR.
And a second working mode: the spatial light modulator 11 controls each optical channel to emit a light beam of a multiple color at the same time every interval of one or more optical channels, and detects the object 5 in a multi-point scanning manner. The operation mode can shorten the detection time, avoid stray light crosstalk of the adjacent optical channels 12 to a certain extent, improve the SNR in the corresponding channels to a certain extent, and sacrifice the resolution in the scanning width direction. The working mode compromises the detection time and the detection SNR, and meets the application scene with requirements on both.
And a third working mode: the spatial light modulator 11 controls each optical channel 12 to simultaneously emit a light beam of multiple colors, and detects the object 5 in a line scanning manner. The mode of operation is such that each optical channel 12 of the array fiber, array optical waveguide or array microlens simultaneously emits a multiple color beam. The working mode can meet the application scene with higher requirements on detection time.
And a fourth working mode: the spatial light modulator 11 divides all the optical channels 12 into a plurality of areas, so that some of the areas detect the object 5 in a multi-point scanning manner, while other areas detect the object 5 in a line scanning manner. The working mode meets the application scene with higher SNR requirements on certain areas of the sample.
Principle of operation
The embodiment of the application provides a high signal-to-noise ratio spectral confocal three-dimensional detection system and a method, wherein the spectral confocal three-dimensional detection system is provided with a multi-color light source unit, the multi-color light source unit comprises a plurality of light channels 12 which are arrayed, a multi-color light source for inputting multi-color light beams to the plurality of light channels 12, and a spatial light modulator 11 for controlling the simultaneous or partial input of the multi-color light beams to each light channel 12; the complex-color light source unit and the measured object 5 are coaxial, a first lens group 2, a spectroscope 3 and a second lens group 4 are sequentially arranged between the complex-color light source unit and the measured object 5, and a third lens group 7, a slit 8, an imaging spectrometer 9 and a camera 10 are sequentially arranged on the right side of the spectroscope 3.
Thus, the multi-color light source unit of the present application is provided with a plurality of light channels 12 arranged in an array, a multi-color light source that inputs multi-color light beams to the plurality of light channels 12, and a spatial light modulator 11 that controls simultaneous or partial input of multi-color light beams to each light channel 12. The spatial light modulator 11 can control the simultaneous or partial input of the multiple color light beams to each light channel 12, so as to organically integrate the point scanning mode and the line scanning mode, improve the SNR of the system, and meet the application requirements on different SNR and detection time through different working modes.
In the description of the present application, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of description of the present application and simplification of the description, and are not indicative or implying that the apparatus or element in question must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present application. Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
It should be noted that in this application, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing is merely a specific embodiment of the application to enable one skilled in the art to understand or practice the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A high signal-to-noise ratio spectral confocal three-dimensional detection system, comprising:
the multi-color light source unit comprises a plurality of light channels (12) which are arrayed, a multi-color light source for inputting multi-color light beams to the light channels (12), and a spatial light modulator (11) for controlling each light channel (12) to emit the multi-color light beams simultaneously or partially;
a first lens group (2), a spectroscope (3) and a second lens group (4) are sequentially arranged between the multi-color light source unit and the measured object (5), the multi-color light source unit, the first lens group (2) and the second lens group (4) are coaxial, and the first lens group (2), the spectroscope (3) and the second lens group (4) jointly enable light with different wavelengths modulated by the spatial light modulator (11) to be focused at different heights of the measured object (5);
a third lens group (7), a slit (8), an imaging spectrometer (9) and a camera (10) are sequentially arranged on the right side of the spectroscope (3), and the third lens group (7) focuses the light reflected by the measured object (5) after being reflected by the spectroscope (3) and then enters the slit (8) for spatial filtering;
the spatial light modulator (11) controls each optical channel (12) to sequentially emit multiple-color light beams one by one, and detects the detected object (5) in a point-by-point scanning mode;
or the spatial light modulator (11) controls each optical channel (12) to emit a multi-color light beam at the same time at each interval of one or more optical channels (12), and detects the detected object (5) in a multi-point scanning mode;
or the spatial light modulator (11) divides all the light channels (12) into a plurality of areas, so that some areas detect the detected object (5) in a multi-point scanning mode, and other areas detect the detected object (5) in a line scanning mode;
to meet the application requirements of different signal-to-noise ratios and detection times.
2. A high signal-to-noise ratio spectral confocal three-dimensional detection system according to claim 1, wherein:
the optical channels (12) are formed by a plurality of array optical fibers which are arrayed in sequence, each optical fiber of the array optical fibers forms an optical channel (12) for transmitting a multi-color light beam, and the spatial light modulator (11) controls the plurality of optical fibers to emit the multi-color light beam simultaneously or partially;
or, the light channels (12) are array light waveguides, the array light waveguides are provided with a plurality of light channels (12) for transmitting complex-color light beams, and the spatial light modulator (11) controls
Several optical channels (12) of the array optical waveguide emit light beams of multiple colors simultaneously or partially.
3. A high signal-to-noise ratio spectral confocal three-dimensional detection system according to claim 1 or 2, wherein:
the slit (8) at the entrance of the imaging spectrometer (9) is an array optical fiber or an array optical waveguide, and each optical channel of the array optical fiber or the array optical waveguide is conjugated with each light-emitting channel in the multiple-color light source unit one by one.
4. A high signal-to-noise ratio spectral confocal three-dimensional detection system according to claim 1, wherein:
the plurality of light channels (12) are array micro lenses, the array micro lenses are provided with a plurality of light channels (12) for transmitting complex-color light beams, and the spatial light modulator (11) controls the array micro lenses
Several light channels (12) of the lens emit light beams of multiple colors simultaneously or partially.
5. A high signal-to-noise ratio spectrum confocal three-dimensional detection method is characterized in that
A method of using a high signal-to-noise ratio spectroscopic confocal three-dimensional detection system of any one of claims 1 to 4, said method comprising:
the light source emits a multi-color light beam, and the spatial light modulator (11) controls each light channel (12) to emit the multi-color light beam simultaneously or partially so as to form a line scanning light beam or a point scanning light beam;
the compound color light beam passes through the first lens group (2) to form a parallel light beam, part of the light beam passes through the spectroscope (3) to enter the second lens group (4), and different waves pass through the second lens group (4)
The long light beam is converged at different positions on the optical axis to generate axial chromatic dispersion;
the light beam reflected by the object to be measured (5) is collected by the second lens group (4), reflected by the spectroscope (3) and focused by the third lens group (7), finally is subjected to spatial filtering through the slit (8) and light splitting by the imaging spectrometer (9), imaged and recorded on the photosensitive surface of the camera (10), and the height difference of the detection area of the object to be measured (5) is obtained by resolving and recording the wavelength difference corresponding to each spectrum intensity peak value.
6. The high signal-to-noise ratio spectral confocal three-dimensional detection method according to claim 5, wherein:
the spatial light modulator (11) controls each light channel (12) to sequentially emit light beams of multiple colors one by one, and detects the object (5) to be detected in a point-by-point scanning mode.
7. The high signal-to-noise ratio spectral confocal three-dimensional detection method according to claim 5, wherein:
the spatial light modulator (11) controls each optical channel (12) to emit a multi-color light beam at the same time at each interval of one or more optical channels (12), and detects the detected object (5) in a multi-point scanning mode;
or the spatial light modulator (11) controls each optical channel (12) to simultaneously emit a multi-color light beam, and detects the detected object (5) in a line scanning mode;
or the spatial light modulator (11) divides all the light channels (12) into a plurality of areas, so that some areas detect the detected object (5) in a multi-point scanning mode, and other areas detect the detected object (5) in a line scanning mode.
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