CN115598580A - Automatic switching calibration device and method for test station of discrete device semiconductor test system - Google Patents
Automatic switching calibration device and method for test station of discrete device semiconductor test system Download PDFInfo
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- CN115598580A CN115598580A CN202211589966.4A CN202211589966A CN115598580A CN 115598580 A CN115598580 A CN 115598580A CN 202211589966 A CN202211589966 A CN 202211589966A CN 115598580 A CN115598580 A CN 115598580A
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- 238000012360 testing method Methods 0.000 title claims abstract description 365
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
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- 238000001514 detection method Methods 0.000 claims description 19
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- 238000004519 manufacturing process Methods 0.000 abstract description 6
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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Abstract
The invention discloses an automatic switching calibration device and method for test stations of a discrete device semiconductor test system, which comprises an upper computer, test equipment, an intelligent switching box, a calibration box and a calibration instrument, wherein the upper computer sequentially controls the test stations connected with the test equipment to carry out calibration test; when the upper computer controls the firstiWhen the calibration test is carried out at each test station, the upper computer sends the test result to the next test stationiThe calibration test signals of each test station are sent to the intelligent switching box; the intelligent switching box sends according to the upper computeriThe calibration test signal of each test station isiThe output calibration signals of the test stations are switched and sent to the calibration box; the calibration instrument receives the first signal from the calibration cartridgeiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding back the calibration condition to the upper computer. The invention improves the utilization rate of equipment and the maintainability of a discrete device test system, and shortens the production period.
Description
Technical Field
The invention relates to a device and a method for automatically switching and calibrating multiple test stations of a semiconductor test system based on discrete devices, and belongs to the technical field of semiconductor test.
Background
After all separation device test equipment calibrations are a test station calibration in the existing market, other stations can not be continuously calibrated, as shown in fig. 1, the 1 st test station in host computer PC computer control test setting carries out calibration test, the output cable of the 1 st test station is respectively communicated with a calibration box, the calibration box sends the calibration test signal output by the 1 st test station to a calibration instrument for calibration, the calibration instrument feeds the calibration condition back to the host computer, and the calibration test work of the 1 st test station is completed. Then manually operating the output cable, respectively communicating the output cable of the 2 nd test station with the calibration box, and carrying out calibration test work of the 2 nd test station. After the 2 nd test station calibration test work is accomplished, the manual work switches over the output cable, with the output cable of 3 rd test station respectively with the calibration box intercommunication, analogizes to this, until the output cable of last test station respectively with the calibration box, accomplish the calibration test work of whole test station. Finally, the output cables of the last test station are respectively connected with the test boxes to complete the detection of the test stations, that is, the test station calibration method needs manual operation to replace another test station after the test of one test station is completed, and the calibration of one discrete device test device in one operation cannot be completed.
Disclosure of Invention
The invention aims to: in order to overcome the defects in the prior art, the invention provides an automatic switching calibration device and method for a discrete device semiconductor test system test station, which calibrate all test stations of a discrete device test device at one time.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
a test station automatic switching calibration device of a discrete device semiconductor test system comprises an upper computer, test equipment, an intelligent switching box, a calibration box and a calibration instrument, wherein the test equipment is provided with a plurality of test stations, and the test equipment is connected with the test equipmentiThe test station of the person is recorded asiA plurality of test stations, each of which is provided with a test station,i=1,2，…,N，Nthe number of test stations is as follows:
and the upper computer is used for sequentially controlling the test stations connected with the test equipment to carry out calibration test. When the upper computer controlsiWhen the test station carries out calibration test, the upper computer sends the test result to the second computeriThe calibration test signals of each test station are sent to the intelligent switching box.
The intelligent switching box is used for sending according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box.
The calibration instrument receives the first signal from the calibration cartridgeiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding back the calibration condition to the upper computer.
Preferably, the following components: the intelligent switching box comprises a PLC control panel and a switching matrix board card, and the switching matrix board card is provided withNA signal input terminal, the firstiA signal input terminal and the secondiThe output end of the calibration test signal of each test station is connected, and the output end of the switching matrix board card is connected with the calibration box. When the upper computer is set to be in an active switching mode, the upper computer sends the first signaliThe calibration test signal of each test station is sent to a PLC control panel which sends a test signal according to the second signal sent by an upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the firstiThe calibration test signal output terminal of each test station is connected to the second test signal output terminaliThe calibration test signals of the individual test stations are supplied to a calibration box.
Preferably: the intelligent switching box comprises a time calibration module which is used for setting the second timeiThe cut-off time of the test stationiThe time of the test station's switch-off is noted asiWhen the upper computer is set to be in a fixed time switching mode at the time of cutting off, the upper computer sends a test starting signal to the PLC control panel, and the PLC control panel is in the first stage according to the test starting signal sent by the upper computeriThe first time for switching off the matrix board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
Preferably: including detecting the box, it is connected with the output that switches the matrix integrated circuit board to detect the box. And the upper computer is used for sequentially controlling the test stations connected with the test equipment to perform detection test. When the upper computer controlsiWhen the test station carries out detection test, the upper computer sends the test result to the second computeriTest ofThe station detection test signal is sent to the intelligent switching box. The intelligent switching box is used for sending according to the upper computeriThe test signal of each test station is detectediThe output detection signals of the test stations are switched and sent to the calibration box.
Preferably: the calibration instrument is a calibration board card, and a plurality of different calibration modules are arranged on the calibration board card.
An automatic switching calibration method for a test station of a discrete device semiconductor test system comprises the following steps:
step 1, the upper computer controls the first stepiThe test station carries out calibration test, and the upper computer sends the test result to the second computeriThe calibration test signals of each test station are sent to the intelligent switching box.
Step 2, the intelligent switching box sends the second signal according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box.
Step 3, the calibration instrument receives the second time according to the calibration boxiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding the calibration condition back to the upper computer.
Preferably: when the upper computer is set to be in an active switching mode, the upper computer sends the second signaliThe calibration test signal of each test station is sent to the PLC control panel, and the PLC control panel sends the calibration test signal to the PLC control panel according to the upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the firstiThe calibration test signal output terminal of each test station is connected to the second test signal output terminaliThe calibration test signals of the individual test stations are supplied to a calibration box.
When the upper computer is set to be in a fixed time switching mode, the upper computer sends a test starting signal to the PLC control panel, and the PLC control panel starts the test according to the test starting signal sent by the upper computeriThe first time for switching off the matrix board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
Compared with the prior art, the invention has the following beneficial effects:
the invention sends the information according to the upper computer through the intelligent switching boxiThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box, so that all calibration operations can be completed by one-time operation of one discrete device test device (provided with a plurality of test stations), the utilization rate of the device and the maintainability of a discrete device test system are improved, the production period is shortened, and the labor cost is reduced.
Drawings
Fig. 1 is a schematic diagram of a conventional calibration.
FIG. 2 is a schematic diagram of an automatic switching calibration apparatus of a test station of a discrete device semiconductor test system according to the present invention.
Fig. 3 is a schematic structural diagram of the intelligent switching box.
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
The automatic test station switching and calibrating device for the discrete device semiconductor test system comprises an upper computer, test equipment, an intelligent switching box, a calibration box and a calibration instrument, wherein the test equipment is provided with a plurality of test stations, and the test equipment is connected with the test stationsiThe test station of the person is recorded asiA plurality of test stations, each of which is provided with a test station,i=1,2，…,N，Nthe number of test stations is as follows:
and the upper computer is used for sequentially controlling the test stations connected with the test equipment to carry out calibration test. When the upper computer controls the firstiWhen the test station carries out calibration test, the upper computer sends the test result to the second computeriThe calibration test signals of each test station are sent to the intelligent switching box.
The intelligent switching box is used for sending according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box. Designing and transmitting on intelligent switching boxAnd at the input port, different discrete device test systems only need to replace corresponding cables.
The calibration instrument receives the calibration data from the calibration cartridgeiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding the calibration condition back to the upper computer.
As shown in fig. 3, the intelligent switching box comprises a PLC control board and a switching matrix board card, and the switching matrix board card is provided with aNA signal input terminal ofiA signal input terminal and the secondiThe output end of the calibration test signal of each test station is connected, and the output end of the switching matrix board card is connected with the calibration box. Because the number of the test stations of different discrete device test systems is different, the discrete device test system with the largest number of test stations is selected to manufacture a fully-matched PCB (switching matrix board card), so that the number of the test stations is more than or equal to that of the input ends of the switching matrix board card. And for the problems of inconsistent output signals of the test station, inconsistent output voltage and current and integration of the output signals of the test station, grouping the input and output signals of the test station on a switching matrix board card of the intelligent switching box.
The upper computer has two operation modes, namely an active switching mode and a fixed time switching mode, and when the upper computer is set to the active switching mode, the upper computer sends the first operation modeiThe calibration test signal of each test station is sent to a PLC control panel which sends a test signal according to the second signal sent by an upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
The intelligent switching box comprises a time calibration module, and the time calibration module is used for setting the second timeiThe cut-off time of each test stationiThe cut-off time of each test station is recorded asiWhen the upper computer is set to be in a fixed time switching mode, the upper computer sends a test starting signal to the PLC control board, and the PLC control board starts to send the test starting signal according to the test starting signal sent by the upper computeriThe first cut-off time is to switch the matrix board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
The device is characterized by further comprising a detection box, wherein the detection box is connected with the output end of the switching matrix board card. And the upper computer is used for sequentially controlling the test stations connected with the test equipment to perform detection test. When the upper computer controls the firstiWhen the test station carries out detection test, the upper computer sends the test result to the second computeriThe detection test signal of each test station is sent to the intelligent switching box. The intelligent switching box is used for sending according to the upper computeriThe test signal of each test station is detectediThe output detection signals of the test stations are switched and sent to the calibration box.
The calibration instrument is a calibration board card, the calibration board card is expandable, a plurality of different calibration modules are arranged on the calibration board card, and different test stations are tested through different calibration modules.
An automatic switching calibration method for a test station of a discrete device semiconductor test system comprises the following steps:
step 1, the upper computer controls the second stepiThe test station carries out calibration test, and the upper computer sends the test result to the second computeriThe calibration test signals of each test station are sent to the intelligent switching box.
Step 2, the intelligent switching box sends the second signal according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the individual test stations are switched and sent to the calibration box.
When the upper computer is set to be in an active switching mode, the upper computer sends the second signaliThe calibration test signal of each test station is sent to the PLC control panel, and the PLC control panel sends the calibration test signal to the PLC control panel according to the upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the secondiThe calibration test signal output terminal of each test station is connected to the second test signal output terminaliThe calibration test signals of the individual test stations are supplied to a calibration box.
When the upper computer is set to be in a fixed time switching mode, the upper computer sends a test starting signal to the PLC control panel, and the PLC control panel starts the test according to the test starting signal sent by the upper computeriSwitching matrix of switching off timeIn the board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
Step 3, the calibration instrument receives the second time according to the calibration boxiOutput calibration signal of test stationiAnd (4) calibrating the test stations, and feeding back the calibration condition to the upper computer.
The invention can improve the production efficiency of the discrete device testing system, reduce the manpower requirement, improve the maintainability of the client to the discrete device testing system and reduce the condition that the operation can only be suspended without personnel. The invention can automatically judge the production and maintenance of the discrete device test system and then switch different test stations to finish calibration and detection. The design uses circuit boards to integrate control signals and output signals in different test stations into one circuit board. The time controller is used to control each testing station to switch in groups (the switching can be performed by judging switching or setting fixed time for switching at the PC side), and the method can be applied to the production of discrete device semiconductor testing equipment and the regular calibration and detection in an IC testing factory.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.
Claims (7)
1. The utility model provides a discrete device semiconductor test system test station automatic switch-over calibrating device which characterized in that: the intelligent switching device comprises an upper computer, a test device, an intelligent switching box, a calibration box and a calibration instrument, wherein the test device is provided with a plurality of test stations, and the test device is connected with the test stationiThe test station of the person is recorded asiA plurality of test stations, each of which is provided with a test station,i=1,2，…,N，Nthe number of test stations is as follows:
the upper computer is used for sequentially controlling the test stations connected with the test equipment to carry out calibration test; when the upper computer controls the firstiA test station for calibrationDuring testing, the upper computer sends the first signaliThe calibration test signal of each test station is sent to the intelligent switching box;
the intelligent switching box is used for sending according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box;
the calibration instrument receives the calibration data from the calibration cartridgeiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding the calibration condition back to the upper computer.
2. The discrete device semiconductor test system test station auto-switching calibration apparatus of claim 1, wherein: the intelligent switching box comprises a PLC control panel and a switching matrix board card, wherein the switching matrix board card is provided withNA signal input terminal ofiA signal input terminal and the firstiThe output end of a calibration test signal of each test station is connected, and the output end of the switching matrix board card is connected with the calibration box; when the upper computer is set to be in an active switching mode, the upper computer sends the first signaliThe calibration test signal of each test station is sent to a PLC control panel which sends a test signal according to the second signal sent by an upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the firstiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of the individual test stations are supplied to a calibration box.
3. The discrete device semiconductor test system test station auto-switching calibration apparatus of claim 2, wherein: the intelligent switching box comprises a time calibration module which is used for setting the second timeiThe cut-off time of each test stationiThe cut-off time of each test station is recorded asiWhen the upper computer is set to be in a fixed time switching mode, the upper computer sends a test starting signal to the PLC control board, and the PLC control board starts to send the test starting signal according to the test starting signal sent by the upper computeriThe first time for switching off the matrix board cardiA signal input terminal and the secondiCalibration test letter for a test stationThe signal output end is conducted, and then the first end is connectediThe calibration test signals of the individual test stations are supplied to a calibration box.
4. The discrete device semiconductor test system test station auto-switching calibration apparatus of claim 3, wherein: the device comprises a detection box, wherein the detection box is connected with the output end of a switching matrix board card; the upper computer is used for sequentially controlling the test stations connected with the test equipment to perform detection test; when the upper computer controlsiWhen the test station carries out detection test, the upper computer sends the test result to the second computeriThe detection test signal of each test station is sent to the intelligent switching box; the intelligent switching box is used for sending according to the upper computeriThe test signal of each test station is detectediThe output detection signals of the test stations are switched and sent to the calibration box.
5. The discrete device semiconductor test system test station auto-switching calibration apparatus of claim 4, wherein: the calibration instrument is a calibration board card, and a plurality of different calibration modules are arranged on the calibration board card.
6. An automatic switching calibration method for a test station of a discrete device semiconductor test system, which is characterized in that the automatic switching calibration device for the test station of the discrete device semiconductor test system of claim 1 is adopted, and comprises the following steps:
step 1, the upper computer controls the second stepiThe test station carries out calibration test, and the upper computer sends the test result to the second computeriThe calibration test signal of each test station is sent to the intelligent switching box;
step 2, the intelligent switching box sends the second signal according to the upper computeriThe calibration test signal of each test station will beiThe output calibration signals of the test stations are switched and sent to the calibration box;
step 3, the calibration instrument receives the second signal according to the calibration boxiOutput calibration signal pair of test stationiAnd (4) calibrating the test stations, and feeding the calibration condition back to the upper computer.
7. Root of herbaceous plantThe method of claim 6 for automatic switching calibration of test stations in a discrete device semiconductor test system, comprising: when the upper computer is set to be in an active switching mode, the upper computer sends the second signaliThe calibration test signal of each test station is sent to the PLC control panel, and the PLC control panel sends the calibration test signal to the PLC control panel according to the upper computeriThe calibration test signal of each test station is switched to the first test signal in the matrix board cardiA signal input terminal and the secondiThe calibration test signal output end of each test station is conducted, and then the first test station is connected with the second test stationiThe calibration test signals of each test station are transmitted to the calibration box;
when the upper computer is set to be in a fixed time switching mode, the upper computer sends a test starting signal to the PLC control panel, and the PLC control panel starts the test according to the test starting signal sent by the upper computeriThe first cut-off time is to switch the matrix board cardiA signal input terminal and the firstiThe calibration test signal output terminal of each test station is connected to the second test signal output terminaliThe calibration test signals of the individual test stations are supplied to a calibration box.
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Application publication date: 20230113 |