CN115598390B - Multi-branch coaxial broadband radio frequency probe - Google Patents
Multi-branch coaxial broadband radio frequency probe Download PDFInfo
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- CN115598390B CN115598390B CN202211507219.1A CN202211507219A CN115598390B CN 115598390 B CN115598390 B CN 115598390B CN 202211507219 A CN202211507219 A CN 202211507219A CN 115598390 B CN115598390 B CN 115598390B
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- 239000000523 sample Substances 0.000 title claims abstract description 179
- -1 polytetrafluoroethylene Polymers 0.000 claims description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 9
- 238000013461 design Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 18
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 abstract description 4
- 125000006850 spacer group Chemical group 0.000 description 12
- 238000012360 testing method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000004513 sizing Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B17/00—Monitoring; Testing
- H04B17/10—Monitoring; Testing of transmitters
- H04B17/15—Performance testing
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B17/00—Monitoring; Testing
- H04B17/20—Monitoring; Testing of receivers
- H04B17/29—Performance testing
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L43/00—Arrangements for monitoring or testing data switching networks
- H04L43/12—Network monitoring probes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
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Abstract
The invention relates to a multi-branch coaxial broadband radio frequency probe which comprises a shell, a probe, a gasket and a multi-branch coaxial body, wherein a shaping groove is formed in the shell and used for fixing the multi-branch coaxial body, the probe and the gasket, the probe is sheet-shaped and provided with a slot for adjusting impedance matching, one end of the probe is connected with the multi-branch coaxial body, the other end of the probe is exposed for detection, and the gasket is arranged on the probe and used for fixing the probe. The probe is connected with the multi-branch coaxial body through the coplanar waveguide, the impedance matching (S11\S22) at 0-70Ghz is lower than-20 dB, the transmission loss (S12\S21) is higher than-1 dB, the probe is provided with a preset groove for adjusting the impedance matching, the gasket is not only used for fixing the probe, but also used for reducing the transmission loss of electromagnetic signals through adjusting the preset length, the preset width and the preset thickness of the gasket and matching with the probe.
Description
Technical Field
The invention relates to the technical field of electromagnetic wave transmission and electronic detection, in particular to a multi-branch coaxial broadband radio frequency probe.
Background
With the development of scientific technology, the semiconductor industry is long and will continue to occupy an important place in the national comprehensive competitive power and the daily life of residents, wherein the digital product processor chip and the radio frequency device chip are important products. In the production and manufacturing links of chips, the on-chip test of the wafers and the chip test of the radio frequency devices are carried out through the radio frequency probes, the radio frequency characteristic parameters of the wafers and the radio frequency devices are extracted to detect the quality and the debugging performance of the chips, and the method is an important link for shortening the research and development production period and rapidly analyzing and positioning problems.
The working bandwidth of the rf probe for performing wafer level testing needs to have high accuracy, low loss, and high repeatability. The current RF probe in 300 Mhz-300 Ghz frequency range is designed and produced for global use mainly by German GGB industry company and Cascade company in U.S.A. However, its high price increases the production costs of the enterprise due to the lack of options; the loss of the product is not reduced to the extreme extent within the range of 50-67 Ghz.
Disclosure of Invention
In view of the above, it is necessary to provide a multi-branch coaxial broadband radio frequency probe, which can effectively reduce transmission loss and save cost by a multi-branch and slot structure at a specific position.
The utility model provides a coaxial broadband radio frequency probe of many branches, includes shell, probe, gasket and the coaxial body of many branches, be equipped with the design groove in the shell for fixed the coaxial body of many branches, probe and the gasket, the probe is the slice, has offered the fluting that is used for adjusting impedance match, probe one end with the coaxial body of many branches is connected, and the other end exposes and is used for surveying, the gasket is located be used for fixing on the probe.
Further, the probe comprises three probe pieces arranged side by side, wherein an S signal line probe piece is arranged in the middle, G signal line probe pieces are arranged on two sides of the S signal line probe piece, the G signal line probe piece is grounded through the shell, the S signal line probe piece is connected with the multi-branch coaxial body and used for conducting electromagnetic signals, a preset distance is reserved between the S signal line probe piece and the G signal line probe pieces on two sides, the edges of the G signal line probe piece are respectively L19, L16, L18, L17, L9, L11, L12, L13, L14, L15, W16, W17 and W9, L19 is 0.85mm, L16 is 3.38mm, L18 is 0.33mm, L17 is 1.86mm, L9 is 1.78mm, L11 is 0.4mm, L12 is 0.11mm plus or minus 0.05mm, L13 is 0.38mm, L14 is 0.25 plus or minus 0.05mm, L13 is 0.15, W17 plus or minus 0.02mm, and W17 plus or minus 0.02mm is 0.5 mm; the sides of the S signal line probe sheet are respectively L16, W10 and W13, wherein L16 is 3.38mm, W10 is 0.14mm and W13 is 0.02mm; the thickness h1 of the G signal line probe sheet and the S signal line probe sheet is 0.16mm.
Further, each G signal line probe sheet is provided with a G signal needle tip, each S signal line probe sheet is provided with an S signal needle tip, and the upper surface and the lower surface of each S signal needle tip of each G signal needle tip are respectively in the same horizontal plane.
Further, the two G signal needle points are provided with G signal tip faces at the forefront ends, the S signal needle points are provided with S signal wire tip faces at the forefront ends, and the distance W14 between the centers of the G signal tip faces and the centers of the S signal wire tip faces is 0.15mm.
Further, the notch is set up at two G signal line probe piece afterbody, two G signal line probe piece afterbody is facing the terminal surface of S signal line probe piece has been seted up the sink groove, two G signal line probe piece corresponds to be facing the terminal surface of S signal line probe piece has been seted up the notch, the notch is close to the afterbody of S signal line probe piece, G signal line probe is kept away from S signal line probe piece terminal surface edge is equipped with the tilting part, two each groove that G signal line probe piece probe shape size and offered is the same, and is bilateral symmetry and locate S signal line probe piece both sides.
Further, the notch side is L14, W17 is 0.12+ -0.02 mm, L14 is 0.25+ -0.05 mm, the notch is acute angle type, the side is L11, L19, L11 is 0.4mm, L19 is 0.85mm, the sink side is L12, W9, L12 is 0.11+ -0.05 mm, W9 is 0.045+ -0.01 mm, the notch is 0.38mm apart from the sink.
Further, the gasket is a square gasket and is provided with two gaskets which are respectively clamped on the upper side and the lower side of the probe, the gasket is provided with a preset width, a preset length and a preset thickness, and the gasket and the notch are used for jointly adjusting the impedance matching of the probe.
Further, the gasket is polytetrafluoroethylene, the dielectric constant of the gasket is 2.1, the edges of the gasket are W11, L10 and h2, the W11 is 1.80mm, the L10 is 1.25mm and the h2 is 1.1mm.
Further, the multi-branch coaxial body is provided with four sections of combination modes adopting a tapered gradual change structure, the multi-branch coaxial body is provided with an input port, the input port is 1.85mm in diameter, the multi-branch coaxial body is divided into a first shaft body, a second shaft body, a third shaft body and a fourth shaft body, the lengths of the first shaft body, the second shaft body, the third shaft body and the fourth shaft body are h6, h7, h8 and h9 respectively, h6 is 4.4mm, h7 is 4.4mm, h8 is 4mm, and h9 is 2.18mm.
Further, the joint of the third shaft body and the fourth shaft body is fixed by a polytetrafluoroethylene sleeve, so that the multi-branch coaxial body is always kept at a preset position.
According to the multi-branch coaxial broadband radio frequency probe, the gasket and the multi-branch coaxial are arranged in the shaping groove of the shell, the probe is connected with the multi-branch coaxial through the coplanar waveguide, impedance matching (S11\S22) of 0-70Ghz is lower than-20 dB, transmission loss (S12\S21) is greater than-1 dB, the probe is provided with the preset groove for adjusting the impedance matching, the gasket is not only used for fixing the probe, but also used for reducing electromagnetic signal transmission loss through adjusting the preset length, the preset width and the preset thickness of the gasket and matching with the probe.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the figures in the following description are only some embodiments of the invention, from which other figures can be obtained without inventive effort for a person skilled in the art. In the drawings:
fig. 1 is a schematic structural diagram of a multi-branch coaxial broadband radio frequency probe according to the present invention.
Fig. 2 is a schematic view of the structure of the present invention with the housing removed.
Fig. 3 is a schematic view of the structure of the present invention with the housing and gasket removed.
Fig. 4 is a schematic illustration of the multi-stub coaxial broadband radio frequency probe sizing of the present invention.
FIG. 5 is a schematic illustration of another angular dimensioning of a multi-knuckle coaxial broadband radio frequency probe in accordance with the present invention.
Fig. 6 is a schematic top-down sizing of a multi-stub coaxial broadband radio frequency probe of the present invention.
FIG. 7 is a schematic illustration of the sizing of a probe of the present invention.
Fig. 8 is the effect of the size of the multi-stub coaxial body L12 of the present invention on high frequencies.
Fig. 9 is the effect of the size of the multi-knuckle coaxial body R3 of the invention on high frequency.
Fig. 10 is the effect of the size of the multi-knuckle coaxial body R5 of the invention on high frequency.
Fig. 11 shows the variation of parameters of the S signal line probe chip according to the present invention with frequency.
Wherein,,
a broadband radio frequency probe with more than 100 branches and joints coaxial bodies;
20 a housing;
30 probes: 31S signal line probe sheet, 32G signal line probe sheet, 33 slot, 34 notch, 35 incline part, 36 sink groove;
a 40 gasket;
50 multi-branch coaxial body: 51 input port, 52 sleeve, 53 first shaft, 54 second shaft, 55 third shaft, 56 fourth shaft.
Detailed Description
It is to be understood that the terminology used herein, the specific structural and functional details disclosed are merely representative for the purpose of describing particular embodiments, but that the invention may be embodied in many alternate forms and should not be construed as limited to only the embodiments set forth herein.
The present invention will be described in detail with reference to specific embodiments and drawings.
Referring to fig. 1, 2 and 3, a multi-branch coaxial broadband radio frequency probe 100 provided by an embodiment of the invention includes a housing 20, a probe 30, a spacer 40 and a multi-branch coaxial body 50, a shaping groove is disposed in the housing 20 for fixing the multi-branch coaxial body 50, the probe 30 and the spacer 40, the probe 30 is sheet-shaped, a slot for adjusting impedance matching is formed, one end of the probe 30 is connected with the multi-branch coaxial body 50, the other end is exposed for detection, and the spacer 40 is disposed on the probe 30 for fixing the probe 30. The housing 20 is preferably a brass housing, the probe 30 is preferably a metal probe, the operating frequency range of the probe 30 is 0-70Ghz, the impedance matching is < -20dB, the gasket 40 is not only used for fixing the probe 30, but also used for reducing the transmission loss of electromagnetic signals by adjusting the preset length, the preset width and the preset thickness of the gasket 40 to be matched with the probe 30.
Preferably, referring to fig. 3, 6 and 7, the probe 30 includes three probe 30 pieces arranged side by side, an S signal line probe piece 31 in the middle, G signal line probe pieces 32 on two sides of the S signal line probe piece 31, the G signal line probe piece 32 being grounded through the housing 20, the S signal line probe piece 31 being connected to the multi-branch coaxial body 50 for conducting electromagnetic signals, the S signal line probe piece 31 being spaced from the G signal line probe piece 32 on two sides by a predetermined distance, edges of the G signal line probe piece 32 being L19, L16, L18, L17, L9, L11, L12, L13, L14, L15, W16, W17, W9, L19 being 0.85mm, L16 being 3.38mm, L18 being 0.33mm, L17 being 1.86mm, L9 being 1.78mm, L11 being 0.4mm, L12 being 0.11±0.05mm, L17±0.17, W17, W9, L11 being 0.15mm, L15 mm, L15±0.15mm, L15 mm, L16±0.15mm, W17 mm 0.15mm, 0.0.0.0.05 mm; the sides of the S signal line probe sheet 31 are L16, W10 and W13 respectively, wherein L16 is 3.38mm, W10 is 0.14mm and W13 is 0.02mm; the thickness h1 of the G signal line probe sheet 32 and the S signal line probe sheet 31 is 0.16mm. The predetermined distance between the S signal wire probe piece 31 and the G signal wire probe piece 32 on both sides is 0.085mm, and the impedance matching can be significantly affected by adjusting the distance between the S signal wire metal probe piece 31 and the G signal wire metal probe pieces 32 and the size of the probe pieces, and the impedance matching effect of the width of the S signal wire metal probe piece 31 is significantly affected by the frequency of 50Ghz or more.
Preferably, each of the G signal line probe pieces 32 has a G signal pin tip, and the S signal line probe piece 31 has an S signal pin tip, and the G signal pin tip and the upper and lower surfaces of the S signal pin tip are respectively on the same horizontal plane. The G signal pin tip and the S signal pin tip are both used for contacting a test Pad.
Preferably, the two G signal pin tips have a foremost G signal tip face, the S signal pin tip has a foremost S signal line tip face, and a distance W14 between a center of the G signal tip face and a center of the S signal line tip face is 0.15mm. The contact distance between the S signal line probe sheet 31 and the transmission line to be tested affects the impedance matching of high frequency.
Preferably, the tail portions of the two G signal wire probe pieces 32 are provided with a notch 33, the tail portions of the two G signal wire probe pieces 32 face the end face of the S signal wire probe piece 31 and are provided with a sinking groove 36, the two G signal wire probe pieces 32 are correspondingly provided with notches 34 facing the end face of the S signal wire probe piece 31, the notches 34 are close to the tail portions of the S signal wire probe pieces 31, the edges of the end faces of the G signal wire probe pieces 30 away from the S signal wire probe pieces 31 are provided with inclined portions 35, and the shapes and the sizes of the two G signal wire probe pieces 32 are the same and the grooves formed in the same are symmetrically arranged on two sides of the S signal wire probe pieces 31. The sinking grooves 36 on both sides are located at the tail end of the G signal line probe sheet 32 to adjust the bandwidth and transmission loss, the slots 33 prevent the S signal line probe sheet 31 from being grounded, and the notch 34 is connected with the pad 40 to adjust the impedance matching of the sheet metal probe 30.
Preferably, the notch 34 is L14 and W17, the W17 is 0.12±0.02mm, the L14 is 0.25±0.05mm, the notch 33 is an acute angle, the notch is L11 and L19, the L11 is 0.4mm, the L19 is 0.85mm, the sink 36 is L12 and W9, the L12 is 0.11±0.05mm, and the W9 is 0.045±0.01mm, and the notch 34 is 360.38mm from the sink. The predetermined size of the slot is effective to reduce transmission loss.
Preferably, referring to fig. 2, the spacer 40 is a square spacer and has two pieces, which are respectively clamped on the upper and lower sides of the probe 30, the spacer 40 has a predetermined width, a predetermined length and a predetermined thickness, and the spacer 40 and the notch 34 jointly adjust the impedance matching of the probe 30. The transmission loss can be adjusted by adjusting the thickness of the spacer 40, and the impedance matching can be adjusted by adjusting the length and width of the fixed spacer 40.
Preferably, referring to fig. 7, the spacer 40 is polytetrafluoroethylene, the dielectric constant of the spacer 40 is 2.1, the sides of the spacer 40 are W11, L10 and h2, the W11 is 1.80mm, the L10 is 1.25mm and the h2 is 1.1mm. The polytetrafluoroethylene gasket 40 is resistant to high temperature, the transmission loss of the probe 30 is related to the dielectric constant of the gasket 40 material, the transmission loss can be effectively reduced by adopting the dielectric constant of 2.1, and the transmission loss can be more effectively reduced by combining the preset length, the preset width and the preset thickness of polytetrafluoroethylene.
Preferably, referring to fig. 4 and 5, the multi-branch coaxial body 50 has four sections of combination modes adopting a tapered gradual change structure, the multi-branch coaxial body 50 has an input port 51, the input port 51 is an input port 51 with a diameter of 1.85mm, the multi-branch coaxial body 50 is divided into a first shaft body 53, a second shaft body 54, a third shaft body 55 and a fourth shaft body 56, the lengths of the first shaft body 53, the second shaft body 54, the third shaft body 55 and the fourth shaft body 56 are h6, h7, h8 and h9 respectively, the h6 is 4mm, the h7 is 4.4mm, the h8 is 4mm and the h9 is 2.18mm. The radii of the multi-branch coaxial bodies 50 are different, the bandwidth of the high frequency band is adjusted by adjusting the length and the axial core radius of each section of the multi-branch coaxial bodies 50, the multi-branch coaxial bodies 50 are obliquely arranged relative to the probes 30, and the fourth shaft body 56 and the S signal line probe sheet 31 form an included angle of 150 degrees to be welded and fixed.
Preferably, referring to fig. 2 and 3, the connection between the third shaft body 55 and the fourth shaft body 56 is fixed by a polytetrafluoroethylene sleeve 52, so that the multi-branch coaxial body 50 is always kept at a predetermined position. The polytetrafluoroethylene sleeve 52 is effective to adjust the impedance match.
The multi-branch coaxial broadband radio frequency probe 100 is characterized in that the probe 30, the gasket 40 and the multi-branch coaxial body 50 are arranged in the shaping groove of the housing 20, the tail parts of the two G signal wire probe pieces 32 are respectively provided with a notch 33 with a preset size, so that impedance matching can be improved, the grounding of the S signal wire probe piece 31 can be prevented, the bandwidth and transmission loss of the sink grooves 36 arranged on the two G signal wire probe pieces 32 can be regulated, the gasket 40 can be used for fixing the probe 30, impedance matching can be regulated by regulating the preset length and the preset width of the gasket 40 and matching with the notch 34 in the middle section of the G signal wire probe piece 32, the electromagnetic signal transmission loss is reduced by regulating the preset thickness of the gasket 40, and the interval between the S signal wire probe piece 31 and the G signal wire probe pieces 32 at two sides can obviously influence the impedance matching; the multi-branch coaxial body 50 has four sections and adopts a combination mode of a tapered gradual change structure, the bandwidth of a high frequency band is adjusted by adjusting the length and the axial core radius of each section of the shaft body, the S signal line probe sheet 31 is fixedly connected with the multi-branch coaxial body 50 through a coplanar waveguide, the impedance matching (S11\S22) at 0-70Ghz can be realized to be lower than-20 dB, the transmission loss (S12\S21) is larger than-1 dB, the transmission function and the detection function are good, the loss in the transmission process is effectively reduced, the structure is simple, and the investment cost is effectively reduced.
The above impedance matching and transmission loss of the multi-branch coaxial broadband radio frequency probe 100 are further described in conjunction with the experiment:
specific dimensions of the multi-stub coaxial broadband radio frequency probe are shown in the following table.
Units: millimeter (mm)
Referring to fig. 4, 5, 6, 7, 8, 9, 10 and 11, there are shown S parameter curves measured by the size of the multi-branch coaxial broadband radio frequency probe 100, the probe 30 and the pad 40 versus HFSS simulation software, and it can be seen from the figure that the working range frequency band (s11\s22 < -10 dB) of the broadband millimeter wave radio frequency probe 30 is about 0Ghz-69.91Ghz, and the average insertion loss (|s21|\|s12|) in the passband is about 0.6 dB. From the graph, it can be seen that the effects of the main parameters of L12 decrease, R3 increase, R5 increase, etc. are combined to obtain the final performance graph of fig. 11.
As shown by the test results, the broadband radio frequency probe 30 provided by the invention widens the chip test frequency band to 0Ghz-69.91Ghz, and has excellent performance.
The above description of the invention in connection with specific alternative embodiments is further detailed and it is not intended that the invention be limited to the specific embodiments disclosed. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (10)
1. The utility model provides a coaxial broadband radio frequency probe of many branches, its characterized in that, includes shell, probe, gasket and the coaxial body of many branches, be equipped with the design groove in the shell for fixed the coaxial body of many branches, probe and the gasket, the probe is the slice, the fluting that is used for adjusting impedance match is seted up to the probe, probe one end with the coaxial body of many branches is connected, and the other end exposes and is used for surveying, the gasket is located be used for fixing on the probe the coaxial body of many branches has four sections and adopts the axle body that the tapering gradual change structure combines.
2. The multi-branch coaxial broadband radio frequency probe according to claim 1, wherein the probe comprises three probe pieces arranged side by side, an S signal line probe piece is arranged in the middle, G signal line probe pieces are arranged at two sides of the S signal line probe piece, the G signal line probe piece is grounded through the shell, the S signal line probe piece is connected with the multi-branch coaxial body and used for conducting electromagnetic signals, a preset distance is reserved between the S signal line probe piece and the G signal line probe piece at two sides, and edges of the G signal line probe piece are respectively L19, L16, L18, L17, L9, L11, L12, L13, L14, L15, W16, W17 and W9, wherein L19 is 0.85mm, L16 is 3.38mm, L18 is 0.33mm, L17 is 1.86mm, L9 is 1.78mm, L11 is 0.4mm, L12 is 0.11mm, L13 + -0.05, L13 is 0.38mm, L11 + -0.25 mm, L11 + -0.15 mm, L12 mm, L15.0.01 mm and W15 mm 0.0.0.02 mm; the sides of the S signal line probe sheet are respectively L16, W10 and W13, wherein L16 is 3.38mm, W10 is 0.14mm and W13 is 0.02mm; the thickness h1 of the G signal line probe sheet and the S signal line probe sheet is 0.16mm.
3. The multi-branch coaxial broadband radio frequency probe according to claim 2, wherein each G signal line probe sheet is provided with a G signal needle tip, each S signal line probe sheet is provided with an S signal needle tip, and the upper surface and the lower surface of each S signal needle tip of each G signal needle tip are respectively on the same horizontal plane.
4. The multi-branch coaxial broadband radio frequency probe according to claim 3, wherein two G signal needle tips have a foremost G signal tip face, the S signal needle tip has a foremost S signal line tip face, and a center of the G signal tip face is spaced from a center of the S signal line tip face by a distance W14 of 0.15mm.
5. The multi-branch coaxial broadband radio frequency probe according to claim 4, wherein the tail parts of the two G signal line probe pieces are provided with grooves, the tail parts of the two G signal line probe pieces face the end face of the S signal line probe piece and are provided with sinking grooves, the two G signal line probe pieces are correspondingly provided with notches on the end face facing the S signal line probe piece, the notches are close to the tail parts of the S signal line probe pieces, the edges of the end faces of the G signal line probe pieces, which are far away from the S signal line probe pieces, are provided with inclined parts, and the grooves formed by the two G signal line probe pieces are identical in shape and size and are symmetrically arranged on two sides of the S signal line probe pieces.
6. The multi-branch coaxial broadband radio frequency probe according to claim 5, wherein the notch edge is L14 and W17, the W17 is 0.12±0.02mm, the L14 is 0.25±0.05mm, the notch is acute-angled, the edge is L11 and L19, the L11 is 0.4mm, the L19 is 0.85mm, the sink edge is L12 and W9, the L12 is 0.11±0.05mm, the W9 is 0.045±0.01mm, and the notch is 0.38mm from the sink.
7. The multi-branch coaxial broadband radio frequency probe according to claim 6, wherein the gasket is a square gasket and has two gaskets, the gaskets are respectively clamped on the upper side and the lower side of the probe, the gaskets have a preset width, a preset length and a preset thickness, and the gasket and the notch are used for jointly adjusting the impedance matching of the probe.
8. The multi-branch coaxial broadband radio frequency probe according to claim 7, wherein the gasket is polytetrafluoroethylene, the dielectric constant of the gasket is 2.1, the edges of the gasket are W11, L10 and h2, the W11 is 1.80mm, the L10 is 1.25mm and the h2 is 1.1mm.
9. The multi-branch coaxial broadband radio frequency probe according to claim 8, wherein the multi-branch coaxial has four sections of combination modes adopting a tapered gradual change structure, the multi-branch coaxial has an input port, the input port is an input port with the diameter of 1.85mm, the multi-branch coaxial is divided into a first shaft body, a second shaft body, a third shaft body and a fourth shaft body, the lengths of the first shaft body, the second shaft body, the third shaft body and the fourth shaft body are h6, h7, h8 and h9 respectively, the h6 is 4mm, the h7 is 4.4mm, the h8 is 4mm and the h9 is 2.18mm.
10. The multi-branch coaxial broadband radio frequency probe according to claim 9, wherein the joint of the third shaft body and the fourth shaft body is fixed by a polytetrafluoroethylene sleeve, so that the multi-branch coaxial body is always kept at a preset position.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6281690B1 (en) * | 1996-07-19 | 2001-08-28 | Lockheed Martin Corporation | Coaxial radio frequency test probe |
| US6242930B1 (en) * | 1997-11-21 | 2001-06-05 | Nec Corporation | High-frequency probe capable of adjusting characteristic impedance in end part and having the end part detachable |
| US6844738B2 (en) * | 2001-12-10 | 2005-01-18 | Intel Corporation | Coaxial radio frequency adapter and method |
| CN104241824B (en) * | 2014-09-12 | 2017-04-05 | 华南理工大学 | A kind of universal combined reader antenna |
| TWI586967B (en) * | 2015-10-27 | 2017-06-11 | Mpi Corp | Probe module |
| CN105489974A (en) * | 2015-12-16 | 2016-04-13 | 中国电子科技集团公司第四十一研究所 | Ultra wide band coaxial coupling probe structure based on high-order elliptic function curve |
| CN107394328B (en) * | 2017-06-20 | 2019-08-13 | 北京理工大学 | A kind of D wave band waveguide to planar circuit transition device |
| US20200116759A1 (en) * | 2018-10-11 | 2020-04-16 | Xcerra Corporation | Test probe assembly for high frequency device characterization |
| CN113960338B (en) * | 2021-10-08 | 2022-08-16 | 西安交通大学 | Micro-coaxial radio frequency probe based on multi-material additive manufacturing process |
| CN114113718A (en) * | 2021-11-30 | 2022-03-01 | 昆山德普福电子科技有限公司 | Radio frequency probe material belt for semiconductor test |
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