CN115265412B - Method and device for testing meter-level optical spherical surface curvature radius - Google Patents
Method and device for testing meter-level optical spherical surface curvature radius Download PDFInfo
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Abstract
The invention relates to a method and a device for testing the radius of curvature of a meter-class optical spherical surface, which solve the problems of complex adjustment, large required space, high requirement on environment and incapability of simultaneously testing a plurality of elements in the prior art. The curvature radius of the optical sphere to be measured is obtained through the definition analysis of the acquired image. Firstly, analyzing an acquired image to obtain an image definition parameter, and analyzing defocus; and then finely adjusting the distance between the optical lens and the photosensitive surface, collecting the image again, analyzing the definition parameters of the image, further determining whether the optical lens is in an over-focus or under-focus state, namely determining whether the curvature radius of the optical spherical surface is larger or smaller than the curvature radius of the standard spherical surface, and finally determining the curvature radius of the optical spherical surface through the definition parameter value and the change condition. The testing device comprises a characteristic target object forming device, an optical lens, a camera, a bracket and an upper computer, wherein the characteristic target object forming device and the camera are positioned on the same side of the optical spherical surface to be tested.
Description
Technical field:
the invention belongs to the technical field of optical testing, and relates to a meter-scale optical spherical surface curvature radius testing method and device.
The background technology is as follows:
The radius of curvature is primarily used to describe the degree of change in curvature somewhere on the curve. In the optical field, the radius of curvature determines the focal length of the spherical element and is a critical factor affecting the imaging quality. At present, the optical spherical surface is widely applied to optical imaging systems and precision optical machinery and plays a very important role. In the optical spherical surface processing and manufacturing process, the optical spherical surface is continuously corrected and perfected according to the actually measured curvature radius, and powerful guarantee can be provided for the finished product to meet the design requirement. When the image transmission system is assembled and adjusted, the focal length and the focal position of the lens are determined according to the actual size of the curvature radius, so that the aberration is reduced, and the offset occurring in the assembling and adjusting process is analyzed. These require efficient and quick testing of the radius of curvature of the optical element.
At present, the measuring method of the curvature radius of the optical element is mainly divided into a contact type and a non-contact type. The contact type measuring method mainly comprises a sphere diameter measuring method, a Newton ring method, a profilometer method and the like, the risk of damaging the optical surface exists in the contact type measuring process, and in addition, for a large-curvature-radius element, particularly a small-caliber large-curvature-radius element, the contact type measuring error is large, and the applicability is poor. The non-contact method mainly comprises an auto-collimation method, a knife edge instrument method, an interferometer method and the like. The auto-collimation method tests the radius of curvature by testing the positions of the lens vertex and the center of curvature, and the instrument stroke must be larger than the radius of curvature of the optical element, so that if a large radius of curvature optical element needs to be tested, the instrument occupies a large space in order to ensure the stroke. The interferometer method and the knife edge method are complex to adjust and are influenced by environmental vibration. The patent 'bilateral dislocation differential confocal curvature radius measuring method' realizes differential confocal bipolar fixed focus measurement of a measured surface by sharpening bilateral dislocation differential subtraction of a confocal response characteristic curve in a confocal measuring light path system, and improves focus position capturing precision according to linear fitting of the differential confocal fixed focus curve so as to realize high-precision measurement of spherical curvature radius. The scheme has high requirements on the test environment although the precision is improved. The patent 'a spherical mirror curvature radius measuring method based on moire fringes' proposes to superimpose interference fringes of a measured element with interference fringes produced by an element with a known curvature, so as to calculate the curvature of the measured element. The disadvantage of this method is that the field of view is too dark and the readings are prone to error. The patent 'an online measuring method of the curvature radius of the plano-convex lens based on deep learning' adopts a deep learning method to construct nonlinear mapping between PSF images of the plano-convex lens and curvature radius errors, so as to realize the measurement of the curvature radius of the plano-convex lens. The patent 'a method and a device for accurately measuring the ultra-large curvature radius' determines the angle of moire fringes by processing moire fringe images, and further calculates the curvature radius of a measured element, so that the requirement on system adjustment precision is high. None of the above methods gives an example of testing multiple elements simultaneously.
The invention comprises the following steps:
The invention aims to provide a meter-level optical spherical curvature radius testing method and device, which solve the problems that the adjustment is complex, the space is required to be large, the environmental requirement is high, and a plurality of elements cannot be tested simultaneously in the prior art. The device has simple structure, small external dimension and low requirement on external environment; the curvature radius of the optical convex spherical surface can be tested, and the curvature radius of the optical concave spherical surface can be tested; multiple optical spherical surface curvature radiuses can be tested simultaneously, and the efficiency is high.
In order to achieve the above purpose, the invention adopts the following technical scheme:
a method for testing the radius of curvature of a meter-class optical spherical surface is characterized by comprising the following steps: the method comprises the following steps:
the preparation steps are as follows: clamping a standard optical spherical surface with a specific curvature radius on an optical spherical surface clamping seat to be tested, inputting the high curvature radius and the nominal center of the standard optical spherical surface, turning on a light source, adjusting an optical lens to a focusing state, acquiring a clear target object image, and analyzing the definition parameter 0 of the image;
Step one: the optical sphere to be measured is clamped on a clamping seat of the optical sphere to be measured, the curvature radius and the nominal center height of the optical sphere to be measured are input, the distance between the optical sphere to be measured and a target object image is adjusted according to the high deviation between the standard sphere and the center height of the optical sphere to be measured, a light source is turned on, and the target object image is acquired;
Step two: processing and analyzing the acquired target object image to obtain a definition parameter I;
Step three: and fine-tuning the distance between the optical lens and the photosensitive surface, collecting the image again, analyzing the definition parameter II of the image, comprehensively analyzing the definition parameters 0, the definition parameters I and the definition parameters II and the moving direction of the optical lens, and giving the curvature radius of the optical spherical surface to be measured.
In the step, the image acquired by the optical lens under the two different defocusing amounts is analyzed by acquiring the image of the object reflected by the optical spherical surface to be detected, and the numerical value and the change of the definition parameter of the image are analyzed.
Testing the plurality of optical spheres comprises the steps of: the optical spherical surfaces are placed on the circumference taking the optical axis of the optical lens as the center, the distances from the top point of each optical spherical surface to be detected to the main point of the optical lens are consistent, and in the preparation step, the standard optical spherical surfaces are placed at any positions of the circumference. After the preparation step is finished, each optical spherical surface is clamped, a plurality of tests are set, the optical axes of a plurality of spherical mirrors to be tested are parallel to the optical lens, the operation is carried out according to the test step, the simultaneous test of the curvature radius of a plurality of optical spherical surfaces is simultaneously realized,
The device for realizing the method for testing the radius of curvature of the meter-class optical spherical surface is characterized in that: the device comprises an optical spherical surface to be detected, wherein the optical spherical surface to be detected is arranged on a support, a camera, an optical lens with a focusing function and a feature object forming device are sequentially arranged above the optical spherical surface to be detected from top to bottom, the optical lens is connected with a focusing mechanism, the focusing mechanism is connected with an upper computer, the upper computer analyzes acquired images, the movement of the focusing mechanism is controlled according to analysis results, automatic focusing of the optical lens is achieved, meanwhile, the movement of the focusing mechanism is controlled, and the optical axis of the optical lens is parallel to the optical axis of the optical spherical surface to be detected.
The feature forming device comprises a hollow flat light source and a light-transmitting sheet with feature patterns, which are sequentially arranged from top to bottom.
The camera and the optical lens are of an integrated structure.
A light homogenizing plate is arranged between the hollow flat light source and the light-transmitting sheet with the characteristic patterns.
The light-transmitting sheet with the characteristic pattern is provided with the characteristic pattern which is stripes or a lattice.
The optical lens is an optical lens with manual or automatic focusing function.
Compared with the prior art, the invention has the following advantages and effects:
1. The optical spherical surface reflection of the target object passing through the specific curvature radius is compared with the optical spherical surface reflection to be detected, the image definition difference analysis of the optical spherical surface to be detected is obtained by imaging of the optical lens under the same condition, the target object pattern has texture characteristics, the manufacture is simple, and the image analysis algorithm is simple; the target object is reflected by the optical spherical surface to be detected, the optical lens in the system composition is imaged for the second time, long travel is not needed to determine the characteristic position of the optical spherical surface, the system structure is compact, and the system is particularly suitable for testing the optical spherical surface with the curvature radius exceeding 1 meter and the small caliber.
2. The invention does not need to use extra optical elements to form interference conditions, has simple structure, simple and convenient operation and low requirement on environment;
3. The invention can test the curvature radius of the optical convex mirror, the curvature radius of the optical concave mirror and a plurality of optical spherical surfaces simultaneously, and is particularly suitable for batch detection.
Description of the drawings:
FIG. 1 is a schematic diagram of a testing apparatus according to the present invention;
FIG. 2 illustrates several light transmissive sheet patterns according to the present invention;
FIG. 3 is a schematic layout diagram of a plurality of optical spheres tested simultaneously.
In the figure, a 1-camera, a 2-optical lens, a 3-hollow flat light source, a 4-light-transmitting sheet with characteristic patterns, a 5-optical spherical surface to be measured, a 6-optical spherical surface clamping seat to be measured, a 7-bracket, an 8-upper computer and a 9-focusing mechanism.
The specific embodiment is as follows:
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The invention relates to a method and a device for testing the radius of curvature of a meter-class optical spherical surface. The light source illuminates a pattern forming target object with a certain pattern, the pattern forming target object is reflected by an optical spherical surface to be tested, and an optical lens in the testing device is finally imaged on a photosensitive surface of the camera. The method comprises the steps of obtaining definition parameters of images through processing and analyzing images acquired by a camera, and determining defocus; and fine-tuning the distance between the optical lens and the photosensitive surface, collecting the image again, analyzing the definition parameters of the image, further determining whether the optical lens is in an over-focus or under-focus state, namely determining whether the curvature radius of the optical spherical surface is larger or smaller than the curvature radius of the standard spherical surface, and finally determining the curvature radius of the optical spherical surface through the definition parameter value and the change condition.
The method specifically comprises the following steps:
The preparation steps are as follows: clamping a standard optical spherical surface with a specific curvature radius on an optical spherical surface clamping seat 6 to be tested, inputting the high curvature radius and the high nominal center of the standard optical spherical surface, turning on a light source, adjusting an optical lens to a focusing state, acquiring a clear target object image, and analyzing the definition parameter 0 of the image;
Step one: clamping the optical sphere 5 to be tested on the optical sphere clamping seat 6 to be tested, inputting the curvature radius and the nominal center height of the optical sphere 5 to be tested, adjusting the distance between the optical sphere to be tested and the target object image according to the center height deviation of the standard spherical sphere and the optical sphere 5 to be tested, turning on a light source, and collecting the target object image;
Step two: processing and analyzing the acquired target object image to obtain a definition parameter I;
Step three: and fine-tuning the distance between the optical lens 2 and the photosensitive surface, collecting the image again, analyzing the definition parameter II of the image, comprehensively analyzing the definition parameters 0, the first and second and the moving direction of the optical lens 2, and giving the curvature radius of the optical spherical surface 5 to be measured.
In the above steps, the image collected by the optical lens 2 under the two different defocus amounts is analyzed by collecting the image of the object reflected by the optical sphere 5 to be measured, and the value and the change of the definition parameter of the image are analyzed;
The device for the meter-level optical spherical curvature radius testing method comprises an optical imaging assembly, a feature object forming device, a bracket 7, a focusing mechanism 9, an optical spherical clamping seat 6 to be tested and an upper computer 8. The feature object forming device and the optical imaging component are placed in the same direction of the optical spherical surface 5 to be measured, and the optical axis of the optical imaging component is parallel to the optical axis of the optical spherical surface to be measured. The optical imaging component consists of an optical lens 2 and a camera 1, wherein the optical lens 2 is connected with the camera 1, the position of the camera 1 is fixed, and the optical lens 2 has a manual or automatic focusing function. The characteristic object forming device consists of a hollow flat light source 3, a light homogenizing plate and a light-transmitting sheet 4 with characteristic patterns. The pattern on the light-transmitting sheet 4 with the characteristic pattern may be stripes, a lattice or other texture, the pattern being opaque. The distance from the feature object forming device to the optical sphere to be measured can be adjusted by a focusing mechanism. The testing device comprises a characteristic target object forming device, an optical lens, a camera, a support and an upper computer, wherein the characteristic target object forming device and the camera are positioned on the same side of an optical spherical surface to be tested, and the characteristic target object forming device comprises a hollow flat light source and a transparent membrane with a certain characteristic size pattern. The optical lens is connected with the camera and,
Examples:
Referring to fig. 1, a device for implementing the above-mentioned meter-scale optical spherical curvature radius test includes a camera 1, an optical lens 2, a feature object forming device, an optical spherical clamping seat 6 to be tested, a bracket 7, an upper computer 8 and a focusing mechanism 9. The camera 1 and the optical lens 2 can be designed into an integrated structure, the optical lens 2 has a focusing function, and the image surface can be adjusted to the photosensitive surface position of the camera 1 through manual or automatic focusing. The optical lens 2 is preferably connected with the focusing mechanism 9 in an automatic focusing mode, the upper computer 8 analyzes the acquired image, controls the focusing mechanism 9 to move according to the analysis result, realizes automatic focusing of the optical lens 2, and can control the focusing mechanism 9 to move so that the optical lens 2 has a certain defocus amount; the feature object forming device consists of a hollow flat light source 3 and a light-transmitting sheet 4 with feature patterns, wherein the light-transmitting sheet is arranged in the same direction of an optical spherical surface 5 to be detected with the camera 1 and the optical lens 2, and the optical axis of the optical lens 2 is parallel to the optical axis of the optical spherical surface 5 to be detected.
The invention also comprises a method for testing the radius of curvature of the meter-scale optical spherical surface, which comprises the following specific steps:
The preparation steps are as follows: and clamping the standard optical spherical surface with a specific curvature radius on the optical spherical surface clamping seat 6 to be tested. For example, an optical sphere with a curvature radius of plus 1-10m needs to be tested, and an optical convex sphere with a known curvature radius of about 5 meters can be selected as a standard optical sphere, such as an optical sphere mirror with a curvature radius of 5.06 m. Inputting standard optical spherical curvature radius and nominal center height, turning on a light source, adjusting an optical lens 2 to a focusing state, collecting a clear target object image, and analyzing to obtain a definition parameter 0 of the image represented by mean square error at the moment, wherein the definition parameter 0 is 56. At this time 56 is used as a comparison standard value, then the optical lens is not regulated any more, 4 optical spherical mirrors with known curvature radiuses in the test range, such as 2.46m,4.79m,6.01m and 8.54m are respectively replaced, images are acquired and corresponding definition parameters characterized by mean square error are analyzed, because the system focuses on the optical spherical mirror with the curvature radius of 5.06m, other elements are replaced, the images are required to be blurred, the larger the curvature radius difference is, the more blurred the images are, and the lower the definition parameter value is. And (3) adding the four groups of corresponding values with the curvature radius of 5.06m and the corresponding definition parameter value, drawing a curve corresponding to the definition parameter and the curvature radius, and performing curve fitting to obtain an expression for calculating the curvature radius by the definition parameter.
Step one: the system setting is kept unchanged, the optical sphere 5 to be measured is replaced on the optical sphere clamping seat 6 to be measured, the curvature radius and the nominal center height of the optical sphere 5 to be measured are input, and the distance between the optical sphere 5 to be measured and the target object image is adjusted according to the standard sphere and the center height deviation of the optical sphere 5 to be measured. The distance can be adjusted by adjusting the height of the light source, the height of the optical spherical clamping seat to be measured, the manual adjustment and the electric adjustment of the electric displacement table. If the center height of the optical sphere to be measured is higher than that of the standard optical sphere, in order to ensure the consistency of object distances, the distance between the optical sphere to be measured and the image of the target object is increased according to the difference value of the center heights of the optical sphere to be measured and the standard optical sphere. Turning on a light source to collect an image of a target object;
step two: processing and analyzing the acquired target object image to obtain a definition parameter represented by the mean square error of the image, wherein the definition parameter is 51; according to the expression, there are two possible radii of curvature 4.39m and 5.67m, depending on the extent to which they deviate from the sharpness parameter 0 value 56:
Step three: the distance between the optical lens 2 and the photosensitive surface is slightly increased, the image is acquired again, and the definition parameter II of the image is analyzed to be 52, so that the curvature radius to be measured is larger than the curvature of the standard optical mirror surface mirror, and the curvature radius of the optical spherical mirror to be measured for comprehensive analysis definition is 5.67m.
The plurality of optical spherical surfaces are tested without changing the whole structure of the system, as shown in fig. 3, the plurality of optical spherical surfaces are placed on the circumference taking the optical axis of the optical lens as the center, so that the distance from the vertex of each optical spherical surface to be tested to the principal point of the optical lens is consistent, namely, the distance from the feature object to each optical spherical surface to be tested is consistent, and the difference of the defocus amount of the optical lens due to different object distances is restrained. In the preparation step, the standard optical sphere can be placed at any position of this circumference. After the preparation step is finished, each optical spherical surface is clamped, a plurality of tests are set, the optical axes of a plurality of spherical mirrors to be tested are parallel to the optical lens, and the simultaneous test of the curvature radius of the plurality of optical spherical surfaces can be realized according to the operation of the test step, so that the method is particularly suitable for the test requirement of the curvature radius of the mass optical spherical surfaces in the production process.
The foregoing description is only illustrative of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention, and all changes that may be made in the equivalent structures described in the specification and drawings of the present invention are intended to be included in the scope of the invention.
Claims (9)
1. A method for testing the radius of curvature of a meter-class optical spherical surface is characterized by comprising the following steps: the method comprises the following steps:
the preparation steps are as follows: the standard optical spherical surface with a specific curvature radius is clamped on an optical spherical surface clamping seat (6) to be tested, the curvature radius of the standard optical spherical surface and the nominal center are input, a light source is turned on, an optical lens (2) is adjusted to be in a focusing state, a clear target object image is acquired, and a definition parameter 0 of the image is analyzed;
Step one: clamping an optical spherical surface (5) to be detected on a clamping seat (6) of the optical spherical surface to be detected, inputting the curvature radius and the nominal center height of the optical spherical surface (5) to be detected, adjusting the distance between the optical spherical surface (5) to be detected and a target object image according to the center height deviation of the standard spherical surface and the optical spherical surface (5) to be detected, turning on a light source, and collecting the target object image;
Step two: processing and analyzing the acquired target object image to obtain a definition parameter I;
Step three: and finely adjusting the distance between the optical lens (2) and the photosensitive surface, collecting the image again, analyzing the definition parameter II of the image, comprehensively analyzing the definition parameters 0, the first and second and the moving direction of the optical lens, and giving the curvature radius of the optical spherical surface to be measured.
2. The method for testing the radius of curvature of a meter-scale optical spherical surface according to claim 1, wherein the method comprises the following steps: in the step, images acquired by the optical lens (2) under different defocus amounts are analyzed by collecting images of the target object reflected by the optical spherical surface (5) to be detected, and the values and changes of the definition parameters of the images are analyzed.
3. The method for testing the radius of curvature of a meter-scale optical spherical surface according to claim 1, wherein the method comprises the following steps: testing the plurality of optical spheres comprises the steps of: the method comprises the steps of placing a plurality of optical spheres on a circumference taking the optical axis of an optical lens as the center, ensuring that the distances from the top point of each optical sphere to be tested to the principal point of the optical lens are consistent, placing a standard optical sphere at any position of the circumference in a preparation step, clamping each optical sphere after the preparation step is finished, setting a plurality of tests, enabling the optical axes of a plurality of spherical mirrors to be tested to be parallel to the optical lens, operating according to the test step, and simultaneously realizing simultaneous test of the curvature radiuses of the plurality of optical spheres.
4. An implementation device of the meter-class optical spherical curvature radius testing method according to claim 1, which is characterized in that: the device comprises an optical spherical surface (5) to be detected, which is arranged on a bracket (7), wherein a camera (1), an optical lens (2) with a focusing function and a feature object forming device are sequentially arranged above the optical spherical surface (5) to be detected from top to bottom, the optical lens (2) is connected with a focusing mechanism (9), the focusing mechanism (9) is connected with an upper computer (8), the upper computer (8) analyzes acquired images, the focusing mechanism (9) is controlled to move according to analysis results, automatic focusing of the optical lens (2) is achieved, meanwhile, the focusing mechanism (9) is controlled to move, and the optical axis of the optical lens (2) is parallel to the optical axis of the optical spherical surface (5) to be detected.
5. The meter-scale optical spherical radius of curvature testing device according to claim 4, wherein: the feature forming device comprises a hollow flat light source (3) and a light-transmitting sheet (4) with feature patterns, which are sequentially arranged from top to bottom.
6. The meter-scale optical spherical radius of curvature testing device according to claim 4 or 5, wherein: the camera (1) and the optical lens (2) are of an integrated structure.
7. The meter-scale optical spherical radius of curvature testing device according to claim 6, wherein: a light homogenizing plate is arranged between the hollow flat light source (3) and the light-transmitting sheet (4) with the characteristic patterns.
8. The meter-scale optical spherical radius of curvature testing device according to claim 7, wherein: the light-transmitting sheet (4) with the characteristic patterns is provided with the characteristic patterns which are stripes or dot matrixes.
9. The meter-scale optical spherical radius of curvature testing device according to claim 8, wherein: the optical lens (2) is an optical lens with manual or automatic focusing function.
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