CN115183699B - Method and device for rapid relative measurement of radius of curvature with rear split pupil differential confocal - Google Patents
Method and device for rapid relative measurement of radius of curvature with rear split pupil differential confocal Download PDFInfo
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Abstract
本发明公开的一种后置分光瞳差动共焦曲率半径快速相对测量方法与装置，属于光学精密测量技术领域。本发明在同一批被测元件中挑选一个已知曲率半径R0的元件作为样板S0，并在其共焦位置进行扫描以获得差动共焦光强响应曲线及其线性段拟合方程；依次装卡被测件Sn，将采集的差动光强值映射到线性段拟合方程以实现Sn离焦量Δzn的无扫描快速测量；通过Δzn和R0计算得到被测元件的曲率半径Rn。本发明只需1次扫描和N次重复装卡即能够实现N件同批次球面元件曲率半径的快速高精度测量，相比于现有高精度曲率半径测量方法，本发明既能够保留差动共焦高精度测量的优势，又能够显著提高测量效率，提高大批量球面元件的加工效率和精度。
The invention discloses a post-divided-pupil differential confocal curvature radius rapid relative measurement method and device, belonging to the technical field of optical precision measurement. In the present invention, an element with a known curvature radius R 0 is selected from the same batch of tested elements as a sample S 0 , and scanned at its confocal position to obtain a differential confocal light intensity response curve and its linear segment fitting equation; Card the measured part S n , map the collected differential light intensity value to the linear segment fitting equation to realize the non-scanning fast measurement of the S n defocus amount Δz n ; calculate the curvature of the measured component through Δz n and R 0 Radius R n . The invention only needs one scan and N times of repeated clamping to realize the rapid and high-precision measurement of the curvature radius of N pieces of spherical elements in the same batch. Compared with the existing high-precision curvature radius measurement method, the present invention can not only retain the differential The advantages of confocal high-precision measurement can significantly improve measurement efficiency and improve the processing efficiency and accuracy of large-scale spherical components.
Description
技术领域technical field
本发明涉及后置分光瞳差动共焦曲率半径快速相对测量方法与装置，属于光学精密测量技术领域。The invention relates to a rapid relative measurement method and device for the radius of curvature of the post-divided pupil differential confocal, and belongs to the technical field of optical precision measurement.
背景技术Background technique
球面光学元件被大量应用于医学检测、数码相机等光学系统中，因此球面光学元件具有极大的需求量和生产量。球面光学元件曲率半径的精度直接决定了光学系统的性能，因此，其检测精度在光学测量领域具有重大意义。Spherical optical elements are widely used in optical systems such as medical detection and digital cameras, so spherical optical elements have a huge demand and production volume. The accuracy of the radius of curvature of spherical optical elements directly determines the performance of the optical system, therefore, its detection accuracy is of great significance in the field of optical measurement.
目前，曲率半径的测量方法可以分为接触式与非接触式两种：At present, the measurement methods of the radius of curvature can be divided into two types: contact and non-contact:
常见的接触式测量方法包括样板法、球径仪法、三坐标法，激光跟踪法等。样板法与球径仪法操作简便，测量速度快。然而样板法受样板自身精度和被测镜之间应力变化影响，其测量精度不高且受测量人员主观因素影响；而球径仪法测量精度仅为30ppm，且该方法测量精度随曲率半径值增大而降低。三坐标法是通过对被测球面进行扫描，得到最佳拟合球作为曲率半径的测量结果，其测量精度为20ppm。然而该方法不适用小曲率半径测量，且测量效率低。激光跟踪法通过测量一个激光跟踪球的半径，计算得到待测球的曲率半径，其相对测量精度为18ppm，该方法仅适用于大口径的球面元件测量，且测量流程较为繁琐。上述接触式测量方法都具有易划伤被测样品表面的固有缺陷。Common contact measurement methods include template method, spherometer method, three-coordinate method, laser tracking method, etc. The template method and the spherometer method are easy to operate and fast in measurement speed. However, the template method is affected by the accuracy of the template itself and the stress change between the measured mirrors, and its measurement accuracy is not high and is affected by the subjective factors of the measurer; while the measurement accuracy of the spherometer method is only 30ppm, and the measurement accuracy of this method varies with the value of the radius of curvature. increase and decrease. The three-coordinate method scans the measured spherical surface to obtain the best fitting sphere as the measurement result of the radius of curvature, and its measurement accuracy is 20ppm. However, this method is not suitable for small curvature radius measurement, and the measurement efficiency is low. The laser tracking method calculates the radius of curvature of the ball to be measured by measuring the radius of a laser tracking ball, and its relative measurement accuracy is 18ppm. This method is only suitable for the measurement of large-diameter spherical components, and the measurement process is relatively cumbersome. The above-mentioned contact measurement methods all have the inherent defect of easily scratching the surface of the sample to be tested.
非接触式测量方法主要包括几何光学法和干涉测量法。几何光学法包括刀口阴影法、自准直法等。其中，刀口阴影法测曲率半径值，操作简便，但是测量精度不高，仅50ppm。自准直法仅适用于大口径元件曲率半径测量，其测量5m以上曲率半径时精度为500ppm。对于干涉测量法，是目前广为应用的高精度测量方法。经典的干涉法利用相位测量干涉仪分别对被测球面的猫眼位置和共焦位置进行定焦，进而得到待测曲率半径，测量精度可达10ppm。在此基础上，Jan.K等人提出了基于波长调谐移相的绝对干涉测量快速检测方法，其测量精度为10ppm。然而干涉法存在姿态调整过程较为繁琐，装卡后需较长时间稳定干涉条纹等问题，此外干涉条纹极易受到气流、温度、震动等环境因素环境干扰，因而该方法的效率不高。Non-contact measurement methods mainly include geometric optics and interferometry. Geometric optics methods include knife-edge shadow method, autocollimation method, etc. Among them, the knife-edge shadow method is used to measure the radius of curvature, which is easy to operate, but the measurement accuracy is not high, only 50ppm. The self-collimation method is only suitable for the measurement of the radius of curvature of large-diameter components, and its accuracy is 500ppm when measuring the radius of curvature above 5m. For interferometry, it is a high-precision measurement method widely used at present. The classic interferometry uses a phase measurement interferometer to focus on the cat's eye position and the confocal position of the measured spherical surface respectively, and then obtain the radius of curvature to be measured, and the measurement accuracy can reach 10ppm. On this basis, Jan.K et al. proposed a fast detection method based on wavelength-tuned phase-shifting absolute interferometry with a measurement accuracy of 10ppm. However, the interferometric method has problems such as a cumbersome attitude adjustment process, and it takes a long time to stabilize the interference fringes after the card is installed. In addition, the interference fringes are easily disturbed by environmental factors such as airflow, temperature, vibration, etc., so the efficiency of this method is not high.
本发明人课题组于2010年提出了激光差动共焦曲率半径测量方法，该方法利用利用差动共焦光强响应曲线的绝对零点精确对应测量光束焦点这一特性来对被测表面的猫眼位置和共焦位置分别定焦，进而得到待测曲率半径。该方法精度可达5ppm，但是仍需要对猫眼位置与共焦位置两点进行扫描定焦，还需要进行较为繁琐的姿态调整过程。因此该方法效率有待进一步提高。In 2010, the inventor's research group proposed a laser differential confocal radius of curvature measurement method. This method uses the characteristic that the absolute zero point of the differential confocal light intensity response curve accurately corresponds to the focus of the measurement beam to measure the cat's eye position and The confocal positions are respectively fixed in focus, and then the radius of curvature to be measured is obtained. The accuracy of this method can reach 5ppm, but it still needs to scan the two points of the cat's eye position and the confocal position to fix the focus, and also needs to carry out a relatively cumbersome attitude adjustment process. Therefore, the efficiency of this method needs to be further improved.
发明内容Contents of the invention
为了解决批量球面元件曲率半径高精度测试效率低的问题，本发明的主要目的是提供一种后置分光瞳差动共焦曲率半径快速相对测量方法与装置，利用后置分光瞳差动精准定焦，将曲率半径的绝对测量过程，转变为基于样板的相对测量，既能够保留差动共焦高精度测量的优势，又能够显著提高测量效率，进而实现高效、快速、便捷地检测球面元件的曲率半径，实现大批量球面元件的高效率、高精度加工检测。In order to solve the problem of low efficiency of high-precision testing of the radius of curvature of spherical components in batches, the main purpose of the present invention is to provide a method and device for rapid relative measurement of the radius of curvature of the post-divided pupil differential confocal. Focusing, the absolute measurement process of the radius of curvature is transformed into a relative measurement based on the template, which can not only retain the advantages of differential confocal high-precision measurement, but also significantly improve the measurement efficiency, and then realize efficient, fast and convenient detection of spherical components The radius of curvature realizes high-efficiency and high-precision processing and testing of large quantities of spherical components.
本发明的目的是通过下述技术方案实现的。The purpose of the present invention is achieved through the following technical solutions.
本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法，可以实现球面元件曲率半径的快速高精度测量，具体步骤如下：The rapid relative measurement method for the radius of curvature of the post-divided pupil differential confocal disclosed by the present invention can realize the rapid and high-precision measurement of the radius of curvature of the spherical element, and the specific steps are as follows:
步骤一：在批量元件中选定与被测镜同批次的样板S0，样板的元件参数的名义值和N个同批次被测镜S1-SN相同。Step 1: Select the sample S 0 of the same batch as the mirror under test in the batch of components, and the nominal value of the component parameters of the sample is the same as that of N mirrors under test S 1 -S N of the same batch.
所述元件参数包括曲率半径、口径、表面反射率。The element parameters include curvature radius, aperture, and surface reflectivity.
步骤二：利用后置分光瞳差动共焦定焦系统在S0共焦位置附近进行扫描，对采集到的光强信号进行差动处理得到差动共焦曲线，对该曲线的线性段进行线性拟合得到拟合直线ldiff(z)，根据ldiff(z)零点的轴向位置坐标将S0精确位于共焦位置，实现被测元件的精准定焦。Step 2: Use the post-divided pupil differential confocal fixed-focus system to scan near the S 0 confocal position, perform differential processing on the collected light intensity signals to obtain a differential confocal curve, and perform a linear segment of the curve The fitting line l diff (z) is obtained by linear fitting, and S 0 is precisely located at the confocal position according to the axial position coordinate of the zero point of l diff (z), so as to realize precise focusing of the measured component.
步骤三：从立式卡具上取下S0并依次装卡被测镜Sn，n＝1～N，该过程通过被测镜自身重力保证Sn的重复空间定位。利用后置分光瞳差动共焦定焦系统采集装卡Sn后的差动光强值，并将其映射到ldiff(z)进而得到离焦量Δzn，保证批量元件的快速测量。Step 3: Remove S 0 from the vertical fixture and mount the mirror under test S n sequentially, n=1~N. This process ensures the repeated spatial positioning of S n through the gravity of the mirror under test. The differential light intensity value after mounting S n is collected by the post-divided pupil differential confocal fixed-focus system, and is mapped to l diff (z) to obtain the defocus amount Δz n to ensure rapid measurement of batch components.
步骤四：利用换算关系，由标定样板曲率半径R0和离焦量Δzn计算被测曲率半径Rn，既能够保留差动共焦高精度测量的优势，又能够显著提高测量效率，进而实现高效、快速、便捷地检测球面元件的曲率半径。Step 4: Using the conversion relationship, calculate the measured curvature radius R n from the calibration sample curvature radius R 0 and the defocus amount Δz n , which can not only retain the advantages of differential confocal high-precision measurement, but also significantly improve the measurement efficiency, and then realize Efficient, fast and convenient detection of the radius of curvature of spherical elements.
作为优选，步骤四实现方法为：利用如下公式所示的换算关系，由标定样板曲率半径R0和离焦量Δzn计算被测曲率半径Rn。Preferably, step 4 is realized by using the conversion relationship shown in the following formula to calculate the measured radius of curvature R n from the radius of curvature R 0 of the calibration template and the amount of defocus Δz n .
其中，R0为标定样板S0的曲率半径，Rn为被测样品的曲率半径，Δzn代表标定样板球心O0和被测样品球心On之间的轴向偏移量，DF为支撑夹具的装卡直径。保留差动共焦高精度测量的优势，显著提高了测量效率。Among them, R 0 is the radius of curvature of the calibration sample S 0 , R n is the radius of curvature of the measured sample, Δz n represents the axial offset between the calibration sample sphere center O 0 and the measured sample sphere center O n , D F is the mounting diameter of the supporting fixture. The advantages of differential confocal high-precision measurement are retained, and the measurement efficiency is significantly improved.
作为优选，步骤四实现方法为：利用如下公式所示的换算关系，由标定样板曲率半径R0和离焦量Δzn计算被测曲率半径Rn，既能够保留差动共焦高精度测量的优势，又能够显著提高测量效率，进而实现高效、快速、便捷地检测球面元件的曲率半径。Preferably, the implementation method of step 4 is: use the conversion relationship shown in the following formula to calculate the measured curvature radius R n from the calibration sample curvature radius R 0 and the defocus amount Δz n , which can retain the high-precision differential confocal measurement Advantages, and can significantly improve the measurement efficiency, and then realize the efficient, fast and convenient detection of the radius of curvature of the spherical element.
其中，R0为标定样板S0的曲率半径，Rn为被测样品的曲率半径，Δzn代表标定样板球心O0和被测样品球心On之间的轴向偏移量，DF为支撑夹具的装卡直径。Among them, R 0 is the radius of curvature of the calibration sample S 0 , R n is the radius of curvature of the measured sample, Δz n represents the axial offset between the calibration sample sphere center O 0 and the measured sample sphere center O n , D F is the mounting diameter of the supporting fixture.
本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法，采用后置分光瞳差动共焦探测技术得到差动共焦曲线，通过被测元件反射的测量光经过D形光阑和显微物镜，成像在CCD探测面。根据探测得到的椭圆形光斑，在光轴位置的圆形探测区域即虚拟针孔共焦两侧对称地设置虚拟针孔前焦vph1、后焦vph2。将虚拟针孔内的灰度值积分作为探测光强，通过探测两个虚拟针孔的轴向光强响应并作差动处理，得到差动共焦响应曲线，被测件差动光强值Idiff(Δzn)表示为：The post-divided-pupil differential confocal curvature radius rapid relative measurement method disclosed by the present invention adopts the post-divided-pupil differential confocal detection technology to obtain the differential confocal curve, and the measurement light reflected by the measured element passes through the D-shaped diaphragm And the microscope objective lens, imaging on the CCD detection surface. According to the detected elliptical spot, the virtual pinhole front focus vph1 and the back focus vph2 are symmetrically set on both sides of the circular detection area at the optical axis position, that is, the virtual pinhole confocal. The gray value integral in the virtual pinhole is used as the detection light intensity, and the differential confocal response curve is obtained by detecting the axial light intensity response of the two virtual pinholes and performing differential processing, and the differential light intensity value of the tested part I diff (Δz n ) is expressed as:
Idiff(Δzn)＝Ivph2(Δzn)-Ivph1(Δzn)I diff (Δz n )＝I vph2 (Δz n )-I vph1 (Δz n )
其中，Ivph1(Δzn)表示为虚拟针孔前焦vph1处的光强值、Ivph2(Δzn)为虚拟针孔前焦vph2处的光强值。通过线性拟合获得高斜率、长线性范围的拟合直线，以此保证曲率半径测量精度和测量范围。Among them, I vph1 (Δz n ) is the light intensity value at the virtual pinhole front focus vph1, and I vph2 (Δz n ) is the light intensity value at the virtual pinhole front focus vph2. The fitting straight line with high slope and long linear range is obtained through linear fitting, so as to ensure the measurement accuracy and measurement range of the radius of curvature.
本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法，通过阈值设定Its，判断离焦量是否处于线性响应区间内。将样板S0扫描处理得到的虚拟针孔的光强响应Ivph1、Ivph2进行求和，得到光强响应和Isum：The post-divided-pupil differential confocal curvature radius rapid relative measurement method disclosed by the present invention judges whether the defocus amount is within the linear response range by setting the threshold value It s . Sum the light intensity responses I vph1 and I vph2 of the virtual pinhole obtained by the scanning process of the sample S 0 to obtain the light intensity response and I sum :
Isum＝Ivph1+Ivph2 I sum ＝I vph1 +I vph2
其中，Ivph1表示为虚拟针孔前焦vph1处的光强值、Ivph2为虚拟针孔前焦vph2处的光强值。Wherein, I vph1 represents the light intensity value at the virtual pinhole front focus vph1, and I vph2 represents the light intensity value at the virtual pinhole front focus vph2.
当被测件Sn采集的单点光强响应和Isumn>Its时，判定该差动光强值处于线性响应区间内，即被测件未超量程，能够进行下一步测量；当被测件Sn采集的单点光强响应和Isumn<Its时，判定该差动光强值处于线性响应区间外，即被测件超量程，此时返回无法测量该被测件的信息。因此根据Isum是否大于Its来实现超量程判断。When the single-point light intensity response and Isumn >I ts collected by the measured part Sn , it is determined that the differential light intensity value is in the linear response range, that is, the measured part is not out of range, and the next step of measurement can be carried out; when the measured When the single-point light intensity response collected by the test piece S n and I sumn <I ts , it is determined that the differential light intensity value is outside the linear response range, that is, the measured piece is out of range, and the information that the measured piece cannot be measured is returned at this time . Therefore, the over-range judgment is realized according to whether I sum is greater than It s .
本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法，采用立式环形装卡结构保证样板和各个被测件能依靠自身重力实现快速稳定装卡，并保证同批次球面元件装卡后，其球面上相同矢高所对应的纬线(即球面元件与环形卡具的接触线)可重复定位在相同的空间位置。对于凹球面测量，环形卡具的外圆与被测球面接触；对于凸球面测量，环形卡具的内圆与被测球面接触。The post-divided-pupil differential confocal radius of curvature rapid relative measurement method disclosed by the present invention adopts a vertical annular clamping structure to ensure that the sample plate and each tested piece can be fast and stable clamped by their own gravity, and ensure that the same batch of spherical components After clamping, the latitude corresponding to the same sagittal height on the spherical surface (that is, the contact line between the spherical element and the ring fixture) can be repeatedly positioned at the same spatial position. For concave spherical surface measurement, the outer circle of the ring fixture is in contact with the measured spherical surface; for convex spherical surface measurement, the inner circle of the annular fixture is in contact with the measured spherical surface.
本发明还公开一种后置分光瞳差动共焦曲率半径快速相对测量装置，用于实现所述后置分光瞳差动共焦曲率半径快速相对测量方法。所述后置分光瞳差动共焦曲率半径快速相对测量装置包括后置分光瞳差动共焦模块、运动控制与监测模块和姿态调整模块。其中，后置分光瞳差动共焦模块使用D形光阑将CCD探测面上的光斑设置为虚拟针孔位置，将其轴向光强响应作差动处理，实现对被测元件的精准定焦。后置分光瞳差动共焦模块包括点光源、准直镜、反射镜、会聚镜、D形光阑、显微物镜和光电探测器CCD。The invention also discloses a device for rapidly relative measurement of the radius of curvature of the differential confocal rear split pupil, which is used to realize the rapid relative measurement method of the differential confocal curvature radius of the rear split pupil. The rapid relative measurement device for the rear split pupil differential confocal curvature radius includes a rear split pupil differential confocal module, a motion control and monitoring module, and an attitude adjustment module. Among them, the post-divided pupil differential confocal module uses a D-shaped diaphragm to set the light spot on the CCD detection surface as a virtual pinhole position, and performs differential processing on its axial light intensity response to achieve precise positioning of the tested component. coke. The rear split pupil differential confocal module includes a point light source, a collimating mirror, a reflecting mirror, a converging mirror, a D-shaped diaphragm, a microscope objective lens and a photodetector CCD.
运动控制模块使用伺服电机驱动丝杠带动高精度气浮导套沿光轴方向运动，同时使用光栅尺实时监测位置信息，完成扫描和位置数据采集。运动控制模块包括伺服电机、丝杠、高精度气浮导套、高精度气浮导轨、光栅尺。姿态调整模块使用二维调整架调整标准会聚镜和被测镜的空间位置，使其中心与光轴重合，将曲率半径的绝对测量过程，转变为基于样板的相对测量。姿态调整过程利用环形夹具，将被测件快速而精确地定位于特定样板的共焦位置处。姿态调整模块包括二维调整架、环形夹具。The motion control module uses the servo motor to drive the lead screw to drive the high-precision air bearing guide bush to move along the optical axis, and uses the grating ruler to monitor the position information in real time to complete the scanning and position data collection. The motion control module includes servo motors, lead screws, high-precision air bearing guide bushes, high-precision air bearing guide rails, and grating scales. The attitude adjustment module uses a two-dimensional adjustment frame to adjust the spatial position of the standard converging mirror and the mirror under test so that their centers coincide with the optical axis, transforming the absolute measurement process of the radius of curvature into a relative measurement based on the template. The attitude adjustment process uses a ring fixture to quickly and precisely position the DUT at the confocal position of a specific template. The attitude adjustment module includes a two-dimensional adjustment frame and a ring fixture.
有益效果：Beneficial effect:
1.本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法与装置，通过在一个已知曲率半径的球面元件的共焦位置处进行扫描，通过差动共焦扫描获得其线性段的拟合方程；然后装卡被测球面元件，采集单点差动光强，并将其映射到线性段拟合方程中，实现被测元件离焦量的快速无扫描测量，解决目前球面光学元件曲率半径的测量方法难以满足大批量、高速度的测量需求的问题。1. The post-pupil differential confocal radius of curvature rapid relative measurement method and device disclosed in the present invention, by scanning at the confocal position of a spherical element with a known curvature radius, obtains its linearity through differential confocal scanning segment fitting equation; then install the tested spherical component, collect the single-point differential light intensity, and map it to the linear segment fitting equation, realize the fast non-scanning measurement of the defocus of the measured component, and solve the current problem of spherical optics The measurement method of the radius of curvature of the component is difficult to meet the large-volume, high-speed measurement requirements.
2.本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法与装置，通过离焦量和标准球面元件曲率半径计算得到被测曲率半径。本发明将曲率半径的绝对测量过程，转变为基于样板的相对测量。本发明既能够保留差动共焦高精度测量的优势，又显著提高测量效率，提高大批量球面元件的加工效率和精度。2. The post-divided pupil differential confocal curvature radius rapid relative measurement method and device disclosed in the present invention can obtain the measured curvature radius by calculating the defocus amount and the curvature radius of the standard spherical element. The invention transforms the absolute measurement process of the curvature radius into the relative measurement based on the template. The invention can not only retain the advantages of differential confocal high-precision measurement, but also significantly improve the measurement efficiency, and improve the processing efficiency and precision of a large number of spherical elements.
3.本发明公开的后置分光瞳差动共焦曲率半径快速相对测量方法与装置，采用立式环形装卡结构保证样板和各个被测件能依靠自身重力实现快速稳定装卡，并保证同批次球面元件装卡后，其球面上相同矢高所对应的纬线(即球面元件与环形卡具的接触线)能够重复定位在相同的空间位置，只需一次扫描测量和N次单次装卡测量即能够实现N件球面元件曲率半径的快速、高精度、非接触检测。本发明能够解决目前光学元件的生产制造效率低的问题，满足大规模加工和装配过程中的检测需求，提高曲率半径的检测效率。3. The post-divided pupil differential confocal radius of curvature rapid relative measurement method and device disclosed in the present invention adopts a vertical annular clamping structure to ensure that the sample plate and each tested piece can be fast and stable clamped by their own gravity, and ensure that the same After batches of spherical elements are clamped, the latitude corresponding to the same sagittal height on the spherical surface (that is, the contact line between the spherical element and the ring fixture) can be repeatedly positioned at the same spatial position, requiring only one scan measurement and N times of single clamping The measurement can realize the rapid, high-precision and non-contact detection of the radius of curvature of N pieces of spherical elements. The invention can solve the problem of low manufacturing efficiency of the current optical elements, meet the detection requirements in the large-scale processing and assembly process, and improve the detection efficiency of the radius of curvature.
附图说明Description of drawings
图1是本发明后置分光瞳差动共焦曲率半径快速相对测量流程图；Fig. 1 is the flow chart of fast relative measurement of the radius of curvature of the rear split pupil differential confocal of the present invention;
图2是本发明基于后置分光瞳差动共焦探测原理图；Fig. 2 is the schematic diagram of the present invention based on the rear split pupil differential confocal detection;
图3是本发明实施例1的针对凹球面的曲率半径相对测量几何模型图；Fig. 3 is the relative measurement geometric model diagram of the radius of curvature for the concave spherical surface according to Embodiment 1 of the present invention;
图4是本发明实施例2的针对凸球面的曲率半径相对测量几何模型图；Fig. 4 is the relative measurement geometric model diagram of the radius of curvature of the convex spherical surface according to Embodiment 2 of the present invention;
图5是本发明实施例1的针对凹球面的后置分光瞳差动共焦曲率半径快速相对测量方法与装置图；Fig. 5 is a diagram of the rapid relative measurement method and device for the post-divided pupil differential confocal curvature radius of the concave spherical surface according to Embodiment 1 of the present invention;
图6是本发明实施例2的针对凸球面的后置分光瞳差动共焦曲率半径快速相对测量方法与装置图；Fig. 6 is a diagram of the rapid relative measurement method and device for the post-divided pupil differential confocal radius of curvature of the convex spherical surface according to Embodiment 2 of the present invention;
其中：1-点光源、2-偏振分光镜、3-准直镜、4-反射镜、5-D形光阑、6-显微物镜、7-光学探测器CCD、8-调整架、9-会聚镜、10-夹具、11-电机、12-丝杠、13-光栅读数头、14-气浮导套、15-气浮导轨、16-光栅尺、17-样板S0、18-被测元件Sn、19-虚拟针孔前焦vph1、20-虚拟针孔后焦vph2、21-前焦光强Ivph1、22-后焦光强Iph2、23-差动共焦光强曲线、24-拟合直线ldiff(z)、25-离焦量Δz、26-差动共焦单点光强值Idiff(Δz)。Among them: 1-point light source, 2-polarization beam splitter, 3-collimator, 4-mirror, 5-D-shaped diaphragm, 6-microscopic objective lens, 7-optical detector CCD, 8-adjustment frame, 9 -Converging mirror, 10-fixture, 11-motor, 12-lead screw, 13-grating reading head, 14-air bearing guide sleeve, 15-air bearing guide rail, 16-grating scale, 17-model S 0 , 18-bench Measuring element S n , 19-virtual pinhole front focus vph1, 20-virtual pinhole back focus vph2, 21-front focus light intensity I vph1 , 22-back focus light intensity I ph2 , 23-differential confocal light intensity curve, 24-fitting line l diff (z), 25- defocus amount Δz, 26- differential confocal single point light intensity value I diff (Δz).
具体实施方式Detailed ways
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
实施例1Example 1
如图5所示，后置分光瞳差动共焦曲率半径快速相对测量方法与装置，包括后置分光瞳差动共焦模块、运动控制与监测模块和姿态调整模块。其中，后置分光瞳差动共焦模块使用D形光阑5将CCD探测面7上的光斑设置为虚拟针孔位置，将其轴向光强响应作差动处理，实现对被测元件的精准定焦。后置分光瞳差动共焦模块包括点光源1、准直镜3、反射镜4、会聚镜9、D形光阑5、显微物镜6和光电探测器CCD7。As shown in Fig. 5, the rapid relative measurement method and device for the radius of curvature of the rear split pupil differential confocal includes a rear split pupil differential confocal module, a motion control and monitoring module, and an attitude adjustment module. Among them, the rear split pupil differential confocal module uses the D-shaped diaphragm 5 to set the light spot on the CCD detection surface 7 as a virtual pinhole position, and performs differential processing on its axial light intensity response to realize the detection of the component under test. Precise focus. The post-divided pupil differential confocal module includes a point light source 1, a collimating mirror 3, a reflecting mirror 4, a converging mirror 9, a D-shaped diaphragm 5, a microscopic objective lens 6 and a photodetector CCD7.
运动控制模块使用伺服电机驱动丝杠12带动高精度气浮导套14沿光轴方向运动，同时使用光栅尺16实时监测位置信息，完成扫描和位置数据采集。运动控制模块包括伺服电机11、丝杠12、高精度气浮导套14、高精度气浮导轨15、光栅尺16。姿态调整模块使用二维调整架8调整标准会聚镜9和被测镜18的空间位置，使其中心与光轴重合，将曲率半径的绝对测量过程，转变为基于样板的相对测量。姿态调整过程利用环形夹具10，将被测件快速而精确地定位于特定样板的共焦位置处。姿态调整模块包括二维调整架8、环形夹具10。The motion control module uses the servo motor to drive the lead screw 12 to drive the high-precision air bearing guide sleeve 14 to move along the optical axis, and uses the grating ruler 16 to monitor the position information in real time to complete scanning and position data collection. The motion control module includes a servo motor 11, a lead screw 12, a high-precision air-floating guide sleeve 14, a high-precision air-floating guide rail 15, and a grating ruler 16. The attitude adjustment module uses the two-dimensional adjustment frame 8 to adjust the spatial positions of the standard converging mirror 9 and the measured mirror 18 so that their centers coincide with the optical axis, and transform the absolute measurement process of the radius of curvature into a relative measurement based on the template. The posture adjustment process utilizes the ring fixture 10 to quickly and accurately position the DUT at the confocal position of a specific template. The attitude adjustment module includes a two-dimensional adjustment frame 8 and a ring fixture 10 .
当使用该装置进行批量元件曲率半径测量时，采用后置分光瞳差动共焦探测技术得到差动共焦曲线，如图2所示，通过被测元件反射的测量光经过D形光阑5和显微物镜6，成像在CCD7探测面。探测到的椭圆形光斑，在光轴位置设置圆形探测区域，在共焦两侧对称地设置虚拟针孔19前焦vph1、虚拟针孔20后焦vph2。将虚拟针孔内的灰度值积分作为探测光强，通过探测两个虚拟针孔的轴向光强响应并作差动处理，得到差动共焦响应曲线23，通过线性拟合获得高斜率、长线性范围的拟合直线，以此保证曲率半径测量精度和测量范围。When using this device to measure the radius of curvature of components in batches, the differential confocal curve is obtained by using the rear split pupil differential confocal detection technology. As shown in Figure 2, the measurement light reflected by the measured components passes through the D-shaped diaphragm 5 And the microscope objective lens 6, imaging on the CCD7 detection surface. For the detected elliptical spot, a circular detection area is set at the position of the optical axis, and a virtual pinhole 19 front focus vph1 and a virtual pinhole 20 back focus vph2 are symmetrically set on both sides of the confocal. The gray value integral in the virtual pinhole is used as the detection light intensity, and the differential confocal response curve 23 is obtained by detecting the axial light intensity response of the two virtual pinholes and performing differential processing, and the high slope is obtained by linear fitting , Fitting straight line with a long linear range, so as to ensure the measurement accuracy and measurement range of the radius of curvature.
后置分光瞳差动共焦曲率半径快速相对测量方法与装置，采用立式环形装卡10结构保证样板和各个被测件能依靠自身重力实现快速稳定装卡，并保证同批次球面元件装卡后，其球面上相同矢高所对应的纬线(即球面元件与环形卡具的接触线)可重复定位在相同的空间位置。如图5和图6所示，本装置可针对凹、凸球面进行测量。对于凹球面测量，环形卡具的外圆与被测球面接触，如图3所示；对于凸球面测量，环形卡具的内圆与被测球面接触，如图4所示。The post-divided pupil differential confocal rapid relative measurement method and device for the radius of curvature adopts a vertical ring clamping 10 structure to ensure that the sample and each tested piece can be quickly and stably clamped by their own gravity, and that the same batch of spherical components can be loaded After clamping, the latitude lines corresponding to the same sagittal height on the spherical surface (that is, the contact line between the spherical element and the ring fixture) can be repeatedly positioned at the same spatial position. As shown in Figure 5 and Figure 6, the device can measure concave and convex spherical surfaces. For concave spherical surface measurement, the outer circle of the ring fixture is in contact with the measured spherical surface, as shown in Figure 3; for convex spherical surface measurement, the inner circle of the annular fixture is in contact with the measured spherical surface, as shown in Figure 4.
利用本装置将标定样板和待测元件分别置于同一卡具上，由于二者曲率半径具有微小差异，其球心位置会在光轴方向偏移Δzn的离焦量，进而根据离焦量Δzn得到待测曲率半径。Use this device to place the calibration template and the component under test on the same fixture respectively. Due to the slight difference in the radius of curvature between the two, the position of the center of the sphere will be shifted by the defocus amount of Δz n in the direction of the optical axis, and then according to the defocus amount Δz n gets the radius of curvature to be measured.
针对凹球面的测量步骤如下：The measurement steps for a concave spherical surface are as follows:
步骤一：在批量元件中选定与被测镜同批次的样板17，样板的元件参数的名义值和N个同批次被测镜18相同。所述元件参数包括曲率半径、口径、表面反射率。Step 1: Select a template 17 of the same batch as the mirror under test from the batch of components, and the nominal value of the component parameter of the template is the same as that of N mirrors under test 18 of the same batch. The element parameters include curvature radius, aperture, and surface reflectivity.
步骤二：利用后置分光瞳差动共焦定焦系统在样板17共焦位置附近进行扫描，对采集到的光强信号进行差动处理得到差动共焦曲线23，对该曲线的线性段进行线性拟合得到拟合直线24，根据24零点的轴向位置坐标将样板17精确位于共焦位置，实现被测元件的精准定焦。Step 2: Use the post-divided pupil differential confocal fixed-focus system to scan near the confocal position of the template 17, and perform differential processing on the collected light intensity signals to obtain the differential confocal curve 23, and the linear segment of the curve The fitting line 24 is obtained by performing linear fitting, and the template 17 is accurately positioned at the confocal position according to the axial position coordinates of the zero point of the 24, so as to realize accurate focusing of the measured component.
步骤三：从立式卡具上取下样板17并依次装卡被测镜18，该过程通过被测镜自身重力保证被测镜18的重复空间定位。对于凹球面测量，环形卡具的外圆与被测球面接触。利用后置分光瞳差动共焦定焦系统采集装卡被测镜18后的差动光强值，并将其映射到拟合直线24进而得到离焦量25，如图3所示。Step 3: Remove the sample plate 17 from the vertical fixture and clamp the mirror under test 18 sequentially. In this process, the repeated spatial positioning of the mirror under test 18 is ensured by the gravity of the mirror under test. For concave spherical surface measurement, the outer circle of the ring fixture is in contact with the measured spherical surface. The differential light intensity value after mounting the mirror under test 18 is collected by the post-divided pupil differential confocal fixed-focus system, and is mapped to the fitting line 24 to obtain the defocus amount 25, as shown in FIG. 3 .
步骤四：根据DF的测量值为29.980mm，由标定样板曲率半径R0＝-39.1042mm和离焦量Δz1＝0.0097mm，利用公式，计算得到R1＝-39.0963mm，为被测元件凹球面的曲率半径。Step 4: According to the measured value of D F 29.980mm, from the calibration sample curvature radius R 0 =-39.1042mm and defocus Δz 1 =0.0097mm, use According to the formula, R 1 =-39.0963mm is calculated, which is the radius of curvature of the concave spherical surface of the tested element.
实施例2Example 2
如图6所示，后置分光瞳差动共焦曲率半径快速相对测量方法与装置，针对凸球面的曲率半径的测量与图5相似。As shown in FIG. 6 , the method and device for rapid relative measurement of the curvature radius of the rear split pupil differential confocal are similar to those in FIG. 5 for the measurement of the curvature radius of the convex spherical surface.
针对凸球面的测量步骤如下：The measurement steps for a convex spherical surface are as follows:
步骤一：在批量元件中选定与被测镜同批次的样板17，样板的元件参数的名义值和N个同批次被测镜18相同。所述元件参数包括曲率半径、口径、表面反射率。Step 1: Select a template 17 of the same batch as the mirror under test from the batch of components, and the nominal value of the component parameter of the template is the same as that of N mirrors under test 18 of the same batch. The element parameters include curvature radius, aperture, and surface reflectivity.
步骤二：利用后置分光瞳差动共焦定焦系统在样板17共焦位置附近进行扫描，对采集到的光强信号进行差动处理得到差动共焦曲线23，对该曲线的线性段进行线性拟合得到拟合直线24，根据24零点的轴向位置坐标将样板17精确位于共焦位置。Step 2: Use the post-divided pupil differential confocal fixed-focus system to scan near the confocal position of the template 17, and perform differential processing on the collected light intensity signals to obtain the differential confocal curve 23, and the linear segment of the curve Linear fitting is performed to obtain a fitting straight line 24 , and the template 17 is accurately located at the confocal position according to the axial position coordinates of the zero point of 24 .
步骤三：从立式卡具上取下样板17并依次装卡被测镜18，该过程通过被测镜自身重力保证被测镜18的重复空间定位。对于凸球面测量，环形卡具的内圆与被测球面接触。利用后置分光瞳差动共焦定焦系统采集装卡被测镜18后的差动光强值，并将其映射到拟合直线24进而得到离焦量25，如图4所示。Step 3: Remove the sample plate 17 from the vertical fixture and clamp the mirror under test 18 sequentially. In this process, the repeated spatial positioning of the mirror under test 18 is ensured by the gravity of the mirror under test. For convex spherical measurement, the inner circle of the ring fixture is in contact with the measured spherical surface. The differential light intensity value after mounting the mirror under test 18 is collected by the post-divided pupil differential confocal fixed-focus system, and is mapped to the fitting line 24 to obtain the defocus amount 25, as shown in FIG. 4 .
步骤四：根据DF的测量值为29.986mm，由标定样板曲率半径R0＝39.1mm和离焦量Δz2＝0.0303mm，利用公式，得到R2＝39.10644mm，为被测元件凸球面的曲率半径。Step 4: According to the measured value of D F 29.986mm, from the calibration sample curvature radius R 0 =39.1mm and defocus Δz 2 =0.0303mm, use According to the formula, R 2 =39.10644mm is obtained, which is the radius of curvature of the convex spherical surface of the tested component.
以上结合附图对本发明的具体实施方式作了说明，但这些说明不能被理解为限制了本发明的范围，本发明的保护范围由随附的权利要求书限定，任何在本发明权利要求基础上的改动都是本发明的保护范围。The specific embodiment of the present invention has been described above in conjunction with the accompanying drawings, but these descriptions can not be interpreted as limiting the scope of the present invention, the scope of protection of the present invention is defined by the appended claims, any claims on the basis of the present invention All modifications are within the protection scope of the present invention.
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