CN115183657A - Device and method for non-contact measurement of surface shape error of flat plate by combining level meter with air-flotation bridge plate - Google Patents
Device and method for non-contact measurement of surface shape error of flat plate by combining level meter with air-flotation bridge plate Download PDFInfo
- Publication number
- CN115183657A CN115183657A CN202210816527.6A CN202210816527A CN115183657A CN 115183657 A CN115183657 A CN 115183657A CN 202210816527 A CN202210816527 A CN 202210816527A CN 115183657 A CN115183657 A CN 115183657A
- Authority
- CN
- China
- Prior art keywords
- air
- bridge plate
- block
- fixed
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000005259 measurement Methods 0.000 title claims abstract description 24
- 238000005188 flotation Methods 0.000 title claims description 4
- 238000001514 detection method Methods 0.000 claims description 9
- 238000011156 evaluation Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 239000004579 marble Substances 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Abstract
The invention relates to a device and a method for non-contact measurement of a flat surface shape by combining a level meter with an air-floating bridge plate, wherein the adjustable air-floating bridge plate is used as an auxiliary tool of the level meter to measure the flat surface shape error; firstly, inputting fixed air pressure to an air floatation bridge plate to enable a working surface of an air floatation module to output stable high-pressure airflow to float on a measured surface, then driving the air floatation bridge plate to linearly move on the measured surface by adopting a scale positioning device to realize non-contact measurement, and finally recording a reading value of a level gauge on the bridge plate to analyze the surface shape error of the measured surface; the method can move the measuring axis along the reference mark line all the time in the implementation process, and has good contact ratio and span positioning precision; the air bearing surface is in no contact with and has no friction with the measured surface in a working state, so that the surface can be effectively protected from colliding and wearing, the fatigue strength of an operator is greatly reduced, and the influence of environmental factors on the measurement result is reduced.
Description
Technical Field
The invention belongs to the field of detection, and particularly relates to a device and a method for non-contact measurement of a flat plate surface shape error by combining a level meter with an air-floating bridge plate.
Background
The marble slab has excellent surface shape precision and is often used as a reference surface for precision detection and adjustment, and in order to ensure the detection and adjustment precision, the slab surface shape precision needs to be calibrated before use; the method for measuring the flatness of the flat plate is more, wherein the gradienter pitch method has the characteristics of simple structure, high precision and the like and is widely applied to evaluation of flat plate plane errors; the detection method comprises the steps of segmenting the surface of a flat plate to be detected, fixing a precision level meter on a bridge plate, sequentially placing the bridge plate on a mark line of the surface to be detected, contacting the surface to be detected through a bridge plate measuring surface or a bus to obtain the front and back span inclination angle of the level meter, and evaluating the flatness error according to methods such as diagonal lines, three far points and the like through data processing. The disadvantages of the above method mainly include the following points:
(1) When the bridge plate measuring span surface or the bus is in contact with the measured surface, the bridge plate is easy to collide and wear, the precision of the bridge plate measuring span surface or the bus is reduced, and the flatness measuring accuracy is influenced;
(2) In order to ensure the accuracy and repeatability of the flatness detection data of the flat plate, personnel need to place the bridge plate on the surface to be detected for multiple times for repeated measurement, so that the fatigue strength of the personnel to be detected is high, the measurement result is easily influenced by factors such as environmental temperature, vibration and the like, and measurement errors are introduced;
(3) The span of the bridge plate placed by personnel often has large dispersity due to inconsistent contact degree, so that the positioning precision and repeatability of the measured span are poor, and the surface shape fitting precision is directly influenced.
Disclosure of Invention
The invention aims to solve the defects of the measuring method and provides a device and a method for measuring the surface shape error of a flat plate in a non-contact way by combining a level meter with an air-floating bridge plate. The invention adopts an air-float bridge plate as a measuring bridge of a level meter; the air-floating bridge plate can adjust the air-floating surface to measure the span according to the measured section, and the air-floating block outputs stable air flow by inputting high-pressure air flow into the air-floating module, and a gap layer with uniform size is formed between the measured surface, and the gap layer formed between the air-floating surface and the measured surface is measured at both ends, and the air-floating bridge plate is driven to float on the measured surface by utilizing the scale positioning device and linearly moves along the reference mark line to realize non-contact measurement.
In order to achieve the purpose, the invention provides the following technical scheme:
a device for non-contact measurement of plane surface shape error of a level gauge combined with an air-floating bridge plate, the device comprises: an air-floating bridge plate and a scale positioning device;
the air floatation bridge plate comprises a bridge plate frame, an air floatation module and a connecting seat; the bridge plate frame comprises a fixed stop block, an adjusting mechanism, a fixed guide rail, a fixed groove and a base plate; the air floatation module comprises a fixed air floatation block, an adjustable air floatation block, a connecting seat and a locking screw;
in the bridge plate frame: the fixed stop block is used for fixing a level gauge, the adjusting mechanism is used for micro-adjusting the posture of the level gauge, the fixed guide rail is arranged at the center of the base plate and serves as a sliding guide rail of the connecting seat, the two fixed grooves are respectively arranged at two sides of the fixed guide rail and used for sliding support and locking of the connecting seat, and the base plate serves as a reference surface of the air floatation bridge plate and is used for assembling and installing parts of the device and providing proper load force;
in the air flotation module: the fixed air floating block and the adjustable air floating block are used for outputting stable high-pressure airflow on the surface of the measured flat plate; the lower end face of the connecting seat is connected with the adjustable air floating block, and the connecting seat is arranged on the fixed guide rail and the fixed groove and used for adjusting the air floating span; the locking screw is used for locking and fixing the connecting seat after span adjustment;
the scale positioning device comprises a scale, a fixed block and a driving block; when the air floatation bridge plate linear movement device is used, the lower surface of a ruler body of the ruler is tightly attached to the surface of a measured flat plate, the upper surface of the ruler is longitudinally provided with a standard scribed line for positioning when the span is adjusted, the upper surface of the ruler is transversely provided with a central line as a datum line, two fixing blocks are arranged at two ends of the ruler body and used for fixing the ruler, the lower end of a driving block is connected with the ruler, the upper end of the driving block is connected with the bottom of the air floatation bridge plate through a mechanical positioning groove, the air floatation bridge plate is controlled to move linearly through the driving block, when the air floatation bridge plate moves linearly, traction force is only applied to the air floatation bridge plate along the measuring direction, and the rest directions are free of stress.
The invention also provides another technical scheme:
a method for non-contact measurement of plate surface shape error using the device, the method comprising the steps of:
the method comprises the following steps: selecting an air floating block;
the shape and the size of the air floating block are determined according to the shape and the size of a measured flat plate;
step two: assembling an air floating bridge plate;
step three: calibrating an air floatation bridge plate;
the fixed air floating blocks are calibrated to be parallel to the inner side transverse opposite surfaces of the adjustable air floating blocks, the outer side longitudinal opposite surfaces of the adjustable air floating blocks are parallel, and all the air floating blocks are coplanar;
step four: assembling a scale positioning device;
step five: measuring the surface shape of the flat plate by using an air-floating bridge plate;
firstly, segmenting the surface of a measured flat plate according to a pitch method, then adjusting the measuring span of the air-floating bridge plate according to a pitch line segment, sequentially driving the air-floating bridge plate through a scale positioning device to carry out non-contact measurement according to a diagonal line, a long line and a short line, and finally obtaining the detection data of a level meter and calculating and analyzing the flatness error according to an evaluation rule.
Further, in the first step, when the flat plate to be measured is a rectangular flat plate, the rectangular air floating block is selected, and when the flat plate to be measured is a circular flat plate, the circular arc air floating block is selected.
Further, the assembly and connection mode of the air-floating bridge plate is as follows: the method comprises the steps of connecting a fixed stop block to the upper end face of an adjusting mechanism and installing the fixed stop block on the front upper surface of a base plate, installing a fixed guide rail in the center area of the rear upper surface of the base plate, installing the center of the upper end of a connecting seat on the fixed guide rail, installing supporting plates on two sides of the connecting seat in the centers of two fixed grooves respectively, penetrating the lower end of the connecting seat through the base plate to be connected with the upper end of an adjustable air floatation block, installing three locking screws at the upper end of the connecting seat, and installing the fixed air floatation block at the front lower end of the base plate to complete combined connection.
Furthermore, the number of the fixed air floating blocks and the number of the adjustable air floating blocks are two respectively.
Further, the assembly connection mode of the scale positioning device is as follows: the lower surface of the scale is tightly attached to the surface of the measured flat plate, the fixed blocks are arranged on two sides of the scale body, the upper end of the scale body is connected with the lower end of the driving block, and the upper end of the driving block is connected with the bottom of the air floatation bridge plate to complete combined connection.
Compared with the prior art, the invention has the advantages that:
(1) In the invention, the air-floating bridge plate can float on the measured surface to realize non-contact measurement, thereby effectively protecting the measuring surface from being collided and scratched with the measured surface and reducing the fatigue strength of the detecting personnel and the measuring error caused by environmental factors;
(2) The method is convenient and stable in actual operation and high in detection efficiency.
(3) The bridge plate is driven to move by the scale positioning device, so that the bridge plate has good span placement positioning precision and repeatability, and the measurement precision is improved.
Drawings
FIG. 1 is a schematic flow chart of a level gauge combined with an air-floating bridge plate for non-contact measurement of a flat plate surface shape error according to the present invention;
FIG. 2 is a schematic view of a device for non-contact measurement of the surface shape error of a flat plate by combining a level gauge with an air-floating bridge plate according to the invention; wherein: the device comprises a bridge plate frame 1, an air floatation module 2, a scale positioning device 3 and a digital display level meter 4; 110 is a fixed stop block, 120 is an adjusting mechanism, 130 is a fixed guide rail, 140 is a fixed groove, and 150 is a substrate; 210 is a fixed air floating block, 220 is an adjustable air floating block, 230 is a connecting seat, and 240 is a locking screw; 310 is a scale, 320 is a fixed block, and 330 is a driving block;
FIG. 3 is a schematic diagram of the air-floating bridge plate for measuring surface shape error by pitch method according to the flat plate detection specification.
Detailed Description
In order to facilitate a better understanding of the method according to the invention, the various aspects of the invention will be described in detail below with reference to the accompanying drawings and examples.
The implementation process comprises the following steps: in this example, the surface shape error of a marble slab of 2m × 1.5m is measured by the method of the present invention.
The implementation steps are as follows:
the method comprises the following steps: air bearing block selection
According to the size and the shape of the flat plate, 4 rectangular porous medium air floating blocks with the external shapes of 30mm multiplied by 15mm are selected, wherein the size of each air floating working surface is 25mm multiplied by 10mm, the flatness of the working surface is 0.2 mu m, and the air floating height under load is 5 mu m.
Step two: combination of air-float bridge plate
As shown in fig. 2, the air-floating bridge plate includes two major parts, namely a bridge plate frame 1 and an air-floating module 2; the bridge plate rack 1 comprises a fixed stop block 110, an adjusting mechanism 120, a fixed guide rail 130, a fixed groove 140 and a base plate 150; the air floatation module 2 comprises a fixed air floatation block 210, an adjustable air floatation block 220, a connecting seat 230 and a locking screw 240;
(1) In the bridge plate frame 1: the fixed stopper 110 is used for fixing the level, the adjusting mechanism 120 is used for micro-adjusting the attitude of the level, the fixed guide rail 130 is installed at the center of the base plate 150 as a sliding guide rail of the connecting seat 230, the two fixed grooves 140 are respectively installed at the two sides of the fixed guide rail for sliding support and locking of the connecting seat 230, and the base plate 150 is used as a datum plane of the air floating bridge plate for combined installation of all parts and providing proper load force;
(2) In the air flotation module 2: the two fixed air floating blocks 210 and the two adjustable air floating blocks 220 are respectively connected with the bottoms of the front section and the rear section of the substrate 150 and used for outputting stable high-pressure air flow on the surface to be detected; the lower end surface of the connecting base 230 is connected with an adjustable air floating block 220 which is arranged on the fixed guide rail 130 and the fixed groove 140 and used for adjusting the air floating span; the locking screw 240 serves as a locking fixture for the coupling socket 230;
wherein, the combined connection mode of the air-floating bridge plate is as follows: connecting the fixed stopper 110 to the upper end surface of the adjusting mechanism 120 and mounting the fixed stopper on the front upper surface of the base plate 150, mounting the fixed guide rail 130 in the central region of the rear upper surface of the base plate 150, mounting the fixed guide rail 130 on the fixed guide rail 130 by using the center of the upper end of the connecting seat 230, mounting the support plates at two sides in the center of the fixed groove 140, connecting the lower end of the fixed stopper through the base plate 150 with the upper ends of the two adjustable air floating blocks 220, mounting three locking screws 240 on the upper end of the connecting seat 230, and mounting the two fixed air floating blocks 210 at the lower end of the front section of the base plate to complete combination connection;
step three: air-float bridge plate calibration
Calibrating the measuring surface center lines of the fixed air floating block 210 and the adjustable air floating block 220 to be parallel in the X and Y directions, and coplanar with the air floating blocks at four positions;
step four: scale positioning device assembly
In the scale positioning device 3: comprises a scale 310, a fixed block 320 and a driving block 330; the lower surface of the ruler body 310 is tightly attached to the measured surface, the upper surface is longitudinally provided with a standard scribed line for position location when the span is adjusted, the transverse direction is provided with a central axis as a reference line, two fixing blocks 320 are arranged at two positions at two ends of the ruler body for fixing the ruler, the lower end of a driving block 330 is connected with the ruler, a clamping groove at the upper end is connected with the bottom of an air floatation bridge plate, when the air floatation bridge plate is controlled to move linearly by the driving block, traction force is only applied to the air floatation bridge plate along the measuring direction, and no force is applied to the rest directions;
wherein, scale positioner built-up connection mode does: the lower surface of a scale 310 is tightly attached to the measured surface, fixing blocks 320 are arranged on two sides of the scale body, the upper end of the scale body is connected with the lower end of a driving block 330, and the upper end of the driving block 330 is connected with the bottom of an air floating bridge plate to complete combination connection;
step five: measuring flat surface shape using air-floating bridge plate
Firstly, the surface of a marble slab needs to be cleaned before measurement, whether the bottom of the marble slab is stably supported and has no environmental influence factors such as a vibration source and a local heat source is confirmed, then, according to the requirement of a slab pitch measurement method, sections are divided on the measured surface according to the outline dimension of the marble slab to form rectangular grid distribution measurement points, and the grid distribution measurement points are shown as diagonal lines a in figure 3 1 ～a 2 Long line a 3 ～a 7 Short line a 8 ～a 12 Forming 25 measuring sequence points, debugging the scale positioning device according to the measuring sequence and the length, sequentially placing and overlapping on the surface of the marble slab to be measured, installing a level gauge above the air floatation bridge plate, installing the bottom of the air floatation bridge plate on a sliding block of the scale positioning device, supplying air to the air floatation module, floating the air floatation module on the surface of the marble slab to be measured, and driving the air to float through a driving blockThe floating bridge plate moves to each measuring point distributed on the grid, and records the reading value of the level meter,
and performing base plane conversion according to the minimum condition evaluation result by using a planeness evaluation criterion according to the grid distribution measuring point data acquired on the surface of the marble slab, and acquiring the difference between the maximum value and the minimum value in the slab data through a triangle evaluation criterion, wherein the difference is the planeness error of the surface of the marble slab.
The invention has not been described in detail and is within the skill of the art.
The above description is only a part of the embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention.
Claims (6)
1. A device for non-contact measurement of plane surface shape error of a level gauge combined with an air-floating bridge plate is characterized by comprising: an air-floating bridge plate and a scale positioning device;
the air floatation bridge plate comprises a bridge plate frame, an air floatation module and a connecting seat; the bridge plate frame comprises a fixed stop block, an adjusting mechanism, a fixed guide rail, a fixed groove and a base plate; the air floatation module comprises a fixed air floatation block, an adjustable air floatation block, a connecting seat and a locking screw;
in the bridge plate frame: the fixed stop block is used for fixing a level gauge, the adjusting mechanism is used for micro-adjusting the posture of the level gauge, the fixed guide rail is arranged at the center of the base plate and serves as a sliding guide rail of the connecting seat, the two fixed grooves are respectively arranged at two sides of the fixed guide rail and used for sliding support and locking of the connecting seat, and the base plate serves as a reference surface of the air floatation bridge plate and is used for assembling and installing parts of the device and providing proper load force;
in the air flotation module: the fixed air floating block and the adjustable air floating block are used for outputting stable high-pressure airflow on the surface of the measured flat plate; the lower end surface of the connecting seat is connected with the adjustable air floating block, and the connecting seat is arranged on the fixed guide rail and the fixed groove and used for adjusting the air floating span; the locking screw is used for locking and fixing the connecting seat after span adjustment;
the scale positioning device comprises a scale, a fixed block and a driving block; when the air floatation bridge plate linear movement device is used, the lower surface of a ruler body of the ruler is tightly attached to the surface of a measured flat plate, the upper surface of the ruler is longitudinally provided with a standard scribed line for positioning when the span is adjusted, the upper surface of the ruler is transversely provided with a central axis as a datum line, two fixing blocks are arranged at two ends of the ruler body and used for fixing the ruler, the lower end of a driving block is connected with the ruler, the upper end of the driving block is connected with the bottom of the air floatation bridge plate through a mechanical positioning groove, the air floatation bridge plate is controlled to move linearly through the driving block, when the air floatation bridge plate moves linearly, traction force is only applied to the air floatation bridge plate along the measuring direction, and the rest directions are free of stress.
2. A method for non-contact measurement of plate profile errors using the apparatus of claim 1, comprising the steps of:
the method comprises the following steps: selecting air floating blocks as fixed air floating blocks and adjustable air floating blocks;
the shape and the size of the air floating block are determined according to the shape and the size of the measured flat plate;
step two: assembling an air floating bridge plate;
step three: calibrating an air floatation bridge plate;
the fixed air floating blocks are calibrated to be parallel to the inner side transverse opposite surfaces of the adjustable air floating blocks, the outer side longitudinal opposite surfaces are parallel, and all the air floating blocks are coplanar;
step four: assembling a scale positioning device;
step five: measuring the surface shape of the flat plate by using an air floating bridge plate;
the method comprises the steps of firstly segmenting the surface of a measured flat plate according to a pitch method, then adjusting the measurement span of an air floating bridge plate according to a pitch line segment, sequentially driving the air floating bridge plate through a scale positioning device to carry out non-contact measurement according to a diagonal line, a long line and a short line, finally obtaining detection data of a level meter and calculating and analyzing a flatness error according to an evaluation rule.
3. The method according to claim 2, wherein in the first step, when the measured flat plate is a rectangular flat plate, the rectangular air floating block is selected, and when the measured flat plate is a circular flat plate, the circular arc air floating block is selected.
4. The method of claim 2,
the assembly connection mode of the air floatation bridge plate is as follows: the method comprises the steps of connecting a fixed stop block to the upper end face of an adjusting mechanism and installing the fixed stop block on the front upper surface of a substrate, installing a fixed guide rail in the central region of the rear upper surface of the substrate, installing the center of the upper end of a connecting seat on the fixed guide rail, installing supporting plates on two sides of the connecting seat in the centers of two fixing grooves respectively, penetrating the lower end of the connecting seat through the substrate to be connected with the upper end of an adjustable air floatation block, installing three locking screws on the upper end of the connecting seat, and installing the fixed air floatation block at the front lower end of the substrate to complete combined connection.
5. The method of claim 3,
the number of the fixed air floating blocks and the number of the adjustable air floating blocks are two respectively.
6. The method of claim 2,
the assembling and connecting mode of the scale positioning device is as follows: the lower surface of the scale is tightly attached to the surface of a measured flat plate, fixing blocks are arranged on two sides of the scale body, the upper end of the scale body is connected with the lower end of the driving block, and finally the upper end of the driving block is connected with the bottom of the air-floating bridge plate to complete combined connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210816527.6A CN115183657B (en) | 2022-07-12 | 2022-07-12 | Device and method for measuring surface shape error of flat plate in non-contact mode by combining level gauge with air-bearing bridge plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210816527.6A CN115183657B (en) | 2022-07-12 | 2022-07-12 | Device and method for measuring surface shape error of flat plate in non-contact mode by combining level gauge with air-bearing bridge plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115183657A true CN115183657A (en) | 2022-10-14 |
| CN115183657B CN115183657B (en) | 2024-10-15 |
Family
ID=83518161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210816527.6A Active CN115183657B (en) | 2022-07-12 | 2022-07-12 | Device and method for measuring surface shape error of flat plate in non-contact mode by combining level gauge with air-bearing bridge plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115183657B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002039057A (en) * | 2000-07-28 | 2002-02-06 | Silver Kk | Electromagnetic pump |
| WO2012033211A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| CN102607383A (en) * | 2011-12-15 | 2012-07-25 | 上海卫星工程研究所 | High-precision flatness measurement bridge plate device |
| CN102980492A (en) * | 2012-11-19 | 2013-03-20 | 哈尔滨工业大学 | Sphericity measuring device for large-size air floating ball of triaxial air floating platform and measuring method thereof |
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN111023971A (en) * | 2019-12-19 | 2020-04-17 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN114562970A (en) * | 2022-02-21 | 2022-05-31 | 上海野齿仪器科技有限公司 | Large-scale air-float type length measuring machine |
-
2022
- 2022-07-12 CN CN202210816527.6A patent/CN115183657B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002039057A (en) * | 2000-07-28 | 2002-02-06 | Silver Kk | Electromagnetic pump |
| WO2012033211A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| CN102607383A (en) * | 2011-12-15 | 2012-07-25 | 上海卫星工程研究所 | High-precision flatness measurement bridge plate device |
| CN102980492A (en) * | 2012-11-19 | 2013-03-20 | 哈尔滨工业大学 | Sphericity measuring device for large-size air floating ball of triaxial air floating platform and measuring method thereof |
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN111023971A (en) * | 2019-12-19 | 2020-04-17 | 中国科学院光电技术研究所 | Method for non-contact measurement of surface shape of large-aperture optical element based on laser tracker |
| CN114562970A (en) * | 2022-02-21 | 2022-05-31 | 上海野齿仪器科技有限公司 | Large-scale air-float type length measuring machine |
Non-Patent Citations (2)
| Title |
|---|
| QIU, M 等: "Design and optimization of surface profilometer based on coplanar guide rail", 《AOPC 2017: OPTOELECTRONICS AND MICRO/NANO-OPTICS》, 7 March 2018 (2018-03-07) * |
| 张霞峰 等: "气浮测量装置精密大理石平台的研磨方法", 《机械》, 25 October 2016 (2016-10-25), pages 55 - 58 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115183657B (en) | 2024-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112033796B (en) | Testing tool and testing method for bending mechanical property of honeycomb sandwich structure | |
| CN110954019B (en) | Large-inclination-angle free-form surface measuring method and device based on reference plane comparison measurement | |
| CN110440679B (en) | Device and method for detecting taper of conical bolt | |
| CN115183657B (en) | Device and method for measuring surface shape error of flat plate in non-contact mode by combining level gauge with air-bearing bridge plate | |
| CN211291316U (en) | Marine straightness measuring device | |
| CN202002606U (en) | Sheet metal part planeness measuring device | |
| CN218698994U (en) | Mechanical arm calibration and motion precision detection assembly | |
| JP2008096114A (en) | Measuring apparatus | |
| CN112304282B (en) | Method for mounting and measuring rails of centrifugal machine | |
| CN114111511A (en) | Three-dimensional concrete structure crack monitoring devices | |
| CN218002408U (en) | Calibrating device for internal diameter dial indicator | |
| CN215261517U (en) | Rod piece side shape and position checking fixture | |
| CN102535275B (en) | Calibrating device for standard frame of rail plate | |
| CN117330250A (en) | Cantilever deflection measuring device and method applied to rigid suspension | |
| CN112902908B (en) | Surface precision calibrating device and method for air-floatation guide rail of granite working table | |
| CN210464285U (en) | System for detecting space size of special-shaped part | |
| CN110631447B (en) | System and method for detecting space dimension of special-shaped part | |
| CN109870096B (en) | In-situ nondestructive measurement device and characterization method for surface roughness of substrate | |
| CN212567307U (en) | Detection apparatus for square lens asymmetry in flat panel display system | |
| CN219714329U (en) | Alignment precision detector | |
| CN211926748U (en) | Concrete work deformation measuring device | |
| CN221802862U (en) | Spliced lathe bed measuring tool | |
| CN220708364U (en) | Flatness detection device | |
| CN115077404B (en) | Laser measuring instrument calibration system, installation and debugging method and calibration method | |
| CN217818418U (en) | Portable flatness and clearance measuring caliper |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |