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CN115116975A - 功率半导体器件封装结构 - Google Patents

功率半导体器件封装结构 Download PDF

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CN115116975A
CN115116975A CN202110296194.4A CN202110296194A CN115116975A CN 115116975 A CN115116975 A CN 115116975A CN 202110296194 A CN202110296194 A CN 202110296194A CN 115116975 A CN115116975 A CN 115116975A
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田伟
廖兵
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Suzhou Dajing Semiconductor Co ltd
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Abstract

本发明公开一种功率半导体器件封装结构,包括:位于环氧封装体内的IGBT芯片、续流二极管、第一导电基板、第二导电基板以及栅极引脚、发射极引脚,位于所述IGBT芯片下表面的集电区与第一导电基板电连接,位于所述IGBT芯片上表面的栅极区、发射区与栅极引脚、发射极引脚均通过金属导线电连接;栅极引脚、发射极引脚各自靠近第一导电基板的一端沿左右两侧分别延伸有左延伸部、右延伸部,所述绝缘垫与第二导电基板和第一导电基板各自接触的上表面、下表面均间隔地设置有若干个凸点。本发明功率半导体器件封装结构既提高了器件立体的整体结构强度,也能防止水汽进入器件内部,改善了电接触性能,提高了器件整体的可靠性。

Description

功率半导体器件封装结构
技术领域
本发明涉及半导体器件技术领域,尤其涉及一种功率半导体器件封装结构。
背景技术
绝 缘 栅 双 极 型 功 率 管(IGBT)是 由双极型三极管和金属氧化物半导体场效应 管(MOSFET)组成的复合全控型电压驱动式电力电子器件,兼有 MOSFET 的高输入阻抗和晶体管的低导通压降两方面的优点。晶体管的饱和压降低,载流密度大,但驱动电流较大;MOSFET 的驱动功率很小,开关速度快,但导通压降大,载流密度小。IGBT 综 合了以上两种器件的优点,驱动功率小,且饱和压降低,非常适合应用于直流电压为 1500V 的高压变流系统,如交流电机、变频器、开关电源、照明电路、牵引传动等领域。但是,现有IGBT功率半导体器件可靠性仍有待改善。
发明内容
本发明的目的是提供一种功率半导体器件封装结构,该功率半导体器件封装结构既提高了器件立体的整体结构强度,也能防止水汽进入器件内部,改善了电接触性能,提高了器件整体的可靠性。
为达到上述目的,本发明采用的技术方案是:一种功率半导体器件封装结构,包括:位于环氧封装体内的IGBT芯片、续流二极管、第一导电基板、第二导电基板以及栅极引脚、发射极引脚,所述第二导电基板与第一导电基板之间设置有一绝缘垫,所述第一导电基板下端面延伸有一集电极引脚,所述第二导电基板下端面延伸有一阴极引脚,所述栅极引脚、发射极引脚、集电极引脚和阴极引脚各自下端从环氧封装体同侧延伸出;
位于所述IGBT芯片下表面的集电区与第一导电基板电连接,位于所述IGBT芯片上表面的栅极区、发射区与栅极引脚、发射极引脚均通过金属导线电连接,所述续流二极管的阳极通过金属导线连接到集电极引脚,所述续流二极管的阴极与第二导电基板电连接;
所述栅极引脚、发射极引脚各自靠近第一导电基板的一端沿左右两侧分别延伸有左延伸部、右延伸部,所述栅极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第一小通孔,所述发射极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第二小通孔;
所述绝缘垫与第二导电基板和第一导电基板各自接触的上表面、下表面均间隔地设置有若干个凸点,所述绝缘垫上表面、下表面与第二导电基板和第一导电基板均通过焊膏层连接。
上述技术方案中进一步改进的方案如下:
1. 上述方案中,所述栅极引脚位于左延伸部、右延伸部上各自的第一小通孔沿着引脚方向呈对称设置。
2. 上述方案中,所述发射极引脚位于左延伸部、右延伸部上各自的第二小通孔沿着引脚方向呈对称设置。
3. 上述方案中,所述绝缘垫为陶瓷绝缘片。
4. 上述方案中,所述IGBT芯片、续流二极管设置于第一导电基板的下半部区域。
由于上述技术方案的运用,本发明与现有技术相比具有下列优点:
1、本发明MOS功率器件,其栅极引脚、发射极引脚各自靠近第一导电基板的一端沿左右两侧分别延伸有左延伸部、右延伸部,所述栅极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第一小通孔,所述发射极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第二小通孔,既提高了器件立体的整体结构强度,也能防止水汽进入器件内部,从而延长了器件的使用寿命。
2、本发明MOS功率器件,其绝缘垫与第二导电基板和第一导电基板各自接触的上表面、下表面均间隔地设置有若干个凸点,所述绝缘垫上表面、下表面与第二导电基板和第一导电基板均通过焊膏层连接,在将第二导电基板与第一导电基板电气隔离的同时,提高了结合力且有效避免了第二导电基板的翘曲,从而改善了电接触性能,提高了器件整体的可靠性。
附图说明
附图1为本发明功率半导体器件封装结构的结构示意图;
附图2为附图1中沿A-A的剖面结构示意图;
附图3为附图2中A处局部放大结构示意图;。
以上附图中:1、环氧封装体;2、IGBT芯片;201、集电区;202、栅极区;203、发射区;3、续流二极管;4、第一导电基板;5、第二导电基板;6、栅极引脚;7、发射极引脚;8、绝缘垫;9、集电极引脚;10、阴极引脚;11、金属导线;12、左延伸部;13、右延伸部;14、第一小通孔;15、第二小通孔;16、凸点;17、焊膏层。
具体实施方式
在本专利的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制;术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指示或暗示相对重要性;此外,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本专利的具体含义。
下面结合实施例对本发明作进一步描述:
实施例1:一种功率半导体器件封装结构,包括:位于环氧封装体1内的IGBT芯片2、续流二极管3、第一导电基板4、第二导电基板5以及栅极引脚6、发射极引脚7,所述第二导电基板5与第一导电基板4之间设置有一绝缘垫8,所述第一导电基板4下端面延伸有一集电极引脚9,所述第二导电基板5下端面延伸有一阴极引脚10,所述栅极引脚6、发射极引脚7、集电极引脚9和阴极引脚10各自下端从环氧封装体1同侧延伸出;
位于所述IGBT芯片2下表面的集电区201与第一导电基板4电连接,位于所述IGBT芯片2上表面的栅极区202、发射区203与栅极引脚6、发射极引脚7均通过金属导线11电连接,所述续流二极管3的阳极通过金属导线11连接到集电极引脚9,所述续流二极管3的阴极与第二导电基板5电连接;
所述栅极引脚6、发射极引脚7各自靠近第一导电基板4的一端沿左右两侧分别延伸有左延伸部12、右延伸部13,所述栅极引脚6的左延伸部12、右延伸部13以及位于环氧封装体1内的区域分别开有第一小通孔14,所述发射极引脚7的左延伸部12、右延伸部13以及位于环氧封装体1内的区域分别开有第二小通孔15;
所述绝缘垫8与第二导电基板5和第一导电基板4各自接触的上表面、下表面均间隔地设置有若干个凸点16,所述绝缘垫8上表面、下表面与第二导电基板5和第一导电基板均通过焊膏层17连接。
上述栅极引脚6位于左延伸部12、右延伸部13上各自的第一小通孔14沿着引脚方向呈对称设置。
上述发射极引脚7位于左延伸部12、右延伸部13上各自的第二小通孔15沿着引脚方向呈对称设置。
实施例2:一种功率半导体器件封装结构,包括:位于环氧封装体1内的IGBT芯片2、续流二极管3、第一导电基板4、第二导电基板5以及栅极引脚6、发射极引脚7,所述第二导电基板5与第一导电基板4之间设置有一绝缘垫8,所述第一导电基板4下端面延伸有一集电极引脚9,所述第二导电基板5下端面延伸有一阴极引脚10,所述栅极引脚6、发射极引脚7、集电极引脚9和阴极引脚10各自下端从环氧封装体1同侧延伸出;
位于所述IGBT芯片2下表面的集电区201与第一导电基板4电连接,位于所述IGBT芯片2上表面的栅极区202、发射区203与栅极引脚6、发射极引脚7均通过金属导线11电连接,所述续流二极管3的阳极通过金属导线11连接到集电极引脚9,所述续流二极管3的阴极与第二导电基板5电连接;
所述栅极引脚6、发射极引脚7各自靠近第一导电基板4的一端沿左右两侧分别延伸有左延伸部12、右延伸部13,所述栅极引脚6的左延伸部12、右延伸部13以及位于环氧封装体1内的区域分别开有第一小通孔14,所述发射极引脚7的左延伸部12、右延伸部13以及位于环氧封装体1内的区域分别开有第二小通孔15;
所述绝缘垫8与第二导电基板5和第一导电基板4各自接触的上表面、下表面均间隔地设置有若干个凸点16,所述绝缘垫8上表面、下表面与第二导电基板5和第一导电基板均通过焊膏层17连接。
上述栅极引脚6位于左延伸部12、右延伸部13上各自的第一小通孔14沿着引脚方向呈对称设置。
上述发射极引脚7位于左延伸部12、右延伸部13上各自的第二小通孔15沿着引脚方向呈对称设置。
上述绝缘垫8为陶瓷绝缘片。
上述IGBT芯片2、续流二极管3设置于第一导电基板4的下半部区域。
采用上述功率半导体器件封装结构时,其栅极引脚、发射极引脚各自靠近第一导电基板的一端沿左右两侧分别延伸有左延伸部、右延伸部,所述栅极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第一小通孔,所述发射极引脚的左延伸部、右延伸部以及位于环氧封装体内的区域分别开有第二小通孔,既提高了器件立体的整体结构强度,也能防止水汽进入器件内部,从而延长了器件的使用寿命;还有,其绝缘垫与第二导电基板和第一导电基板各自接触的上表面、下表面均间隔地设置有若干个凸点,所述绝缘垫上表面、下表面与第二导电基板和第一导电基板均通过焊膏层连接,在将第二导电基板与第一导电基板电气隔离的同时,提高了结合力且有效避免了第二导电基板的翘曲,从而改善了电接触性能,提高了器件整体的可靠性。
上述实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。

Claims (5)

1.一种功率半导体器件封装结构,其特征在于:包括:位于环氧封装体(1)内的IGBT芯片(2)、续流二极管(3)、第一导电基板(4)、第二导电基板(5)以及栅极引脚(6)、发射极引脚(7),所述第二导电基板(5)与第一导电基板(4)之间设置有一绝缘垫(8),所述第一导电基板(4)下端面延伸有一集电极引脚(9),所述第二导电基板(5)下端面延伸有一阴极引脚(10),所述栅极引脚(6)、发射极引脚(7)、集电极引脚(9)和阴极引脚(10)各自下端从环氧封装体(1)同侧延伸出;
位于所述IGBT芯片(2)下表面的集电区(201)与第一导电基板(4)电连接,位于所述IGBT芯片(2)上表面的栅极区(202)、发射区(203)与栅极引脚(6)、发射极引脚(7)均通过金属导线(11)电连接,所述续流二极管(3)的阳极通过金属导线(11)连接到集电极引脚(9),所述续流二极管(3)的阴极与第二导电基板(5)电连接;
所述栅极引脚(6)、发射极引脚(7)各自靠近第一导电基板(4)的一端沿左右两侧分别延伸有左延伸部(12)、右延伸部(13),所述栅极引脚(6)的左延伸部(12)、右延伸部(13)以及位于环氧封装体(1)内的区域分别开有第一小通孔(14),所述发射极引脚(7)的左延伸部(12)、右延伸部(13)以及位于环氧封装体(1)内的区域分别开有第二小通孔(15);
所述绝缘垫(8)与第二导电基板(5)和第一导电基板(4)各自接触的上表面、下表面均间隔地设置有若干个凸点(16),所述绝缘垫(8)上表面、下表面与第二导电基板(5)和第一导电基板均通过焊膏层(17)连接。
2.根据权利要求1所述的功率半导体器件封装结构,其特征在于:所述栅极引脚(6)位于左延伸部(12)、右延伸部(13)上各自的第一小通孔(14)沿着引脚方向呈对称设置。
3.根据权利要求1所述的功率半导体器件封装结构,其特征在于:所述发射极引脚(7)位于左延伸部(12)、右延伸部(13)上各自的第二小通孔(15)沿着引脚方向呈对称设置。
4.根据权利要求1所述的功率半导体器件封装结构,其特征在于:所述绝缘垫(8)为陶瓷绝缘片。
5.根据权利要求1所述的功率半导体器件封装结构,其特征在于:所述IGBT芯片(2)、续流二极管(3)设置于第一导电基板(4)的下半部区域。
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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1231635A1 (en) * 2001-02-09 2002-08-14 STMicroelectronics S.r.l. Method for manufacturing an electronic power device and a diode in a same package
US20070108574A1 (en) * 2005-08-11 2007-05-17 In-Ku Kang Chip stack package and manufacturing method thereof
CN101026102A (zh) * 2006-01-24 2007-08-29 三星电子株式会社 使用防翘曲绝缘材料的层叠芯片封装及其制造方法
US20090115042A1 (en) * 2004-06-04 2009-05-07 Zycube Co., Ltd. Semiconductor device having three-dimensional stacked structure and method of fabricating the same
CN102130116A (zh) * 2010-11-15 2011-07-20 深圳市威怡电气有限公司 一种应用于升压转换器的功率模块
CN102130266A (zh) * 2010-01-20 2011-07-20 旭丽电子(广州)有限公司 封装结构及发光二极管封装结构
US20110260322A1 (en) * 2010-04-27 2011-10-27 International Rectifier Corporation "Semiconductor on semiconductor substrate multi-chip-scale package"
CN111081662A (zh) * 2019-12-30 2020-04-28 珠海零边界集成电路有限公司 一种芯片模块、电子模组及制备方法
CN212136442U (zh) * 2020-06-28 2020-12-11 苏州秦绿电子科技有限公司 高浪涌双向瞬态电压抑制半导体器件

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1231635A1 (en) * 2001-02-09 2002-08-14 STMicroelectronics S.r.l. Method for manufacturing an electronic power device and a diode in a same package
US20090115042A1 (en) * 2004-06-04 2009-05-07 Zycube Co., Ltd. Semiconductor device having three-dimensional stacked structure and method of fabricating the same
US20070108574A1 (en) * 2005-08-11 2007-05-17 In-Ku Kang Chip stack package and manufacturing method thereof
CN101026102A (zh) * 2006-01-24 2007-08-29 三星电子株式会社 使用防翘曲绝缘材料的层叠芯片封装及其制造方法
CN102130266A (zh) * 2010-01-20 2011-07-20 旭丽电子(广州)有限公司 封装结构及发光二极管封装结构
US20110260322A1 (en) * 2010-04-27 2011-10-27 International Rectifier Corporation "Semiconductor on semiconductor substrate multi-chip-scale package"
CN102130116A (zh) * 2010-11-15 2011-07-20 深圳市威怡电气有限公司 一种应用于升压转换器的功率模块
CN111081662A (zh) * 2019-12-30 2020-04-28 珠海零边界集成电路有限公司 一种芯片模块、电子模组及制备方法
CN212136442U (zh) * 2020-06-28 2020-12-11 苏州秦绿电子科技有限公司 高浪涌双向瞬态电压抑制半导体器件

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
TAKAHASHI M. ET AL.: "RC-IGBT module with new conpact package for industrial", 《FUJI ELECTROIC REVIEW》, vol. 60, no. 4, 30 December 2014 (2014-12-30), pages 219 - 223 *
黄嘉晔;王轶滢;叶树梅;戴梅;: "化合物半导体发展现状分析", 功能材料与器件学报, no. 03, 30 June 2020 (2020-06-30), pages 37 - 43 *

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