CN114774845A - Surface treatment process for probe needle head - Google Patents
Surface treatment process for probe needle head Download PDFInfo
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- CN114774845A CN114774845A CN202210374272.2A CN202210374272A CN114774845A CN 114774845 A CN114774845 A CN 114774845A CN 202210374272 A CN202210374272 A CN 202210374272A CN 114774845 A CN114774845 A CN 114774845A
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- 239000000523 sample Substances 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000004381 surface treatment Methods 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 59
- 239000011248 coating agent Substances 0.000 claims abstract description 58
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 54
- 239000002113 nanodiamond Substances 0.000 claims abstract description 30
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 27
- 238000007747 plating Methods 0.000 claims abstract description 21
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000010931 gold Substances 0.000 claims abstract description 20
- 229910052737 gold Inorganic materials 0.000 claims abstract description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 36
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 30
- 239000007789 gas Substances 0.000 claims description 30
- 239000000956 alloy Substances 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 20
- 229910052786 argon Inorganic materials 0.000 claims description 18
- -1 argon ions Chemical class 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 238000001035 drying Methods 0.000 claims description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 14
- 230000004048 modification Effects 0.000 claims description 14
- 238000012986 modification Methods 0.000 claims description 14
- 239000004215 Carbon black (E152) Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 12
- 230000005684 electric field Effects 0.000 claims description 12
- 238000011049 filling Methods 0.000 claims description 12
- 229930195733 hydrocarbon Natural products 0.000 claims description 12
- 150000002430 hydrocarbons Chemical class 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 230000007704 transition Effects 0.000 claims description 12
- 150000002500 ions Chemical class 0.000 claims description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 238000010891 electric arc Methods 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000011068 loading method Methods 0.000 claims description 6
- 230000007935 neutral effect Effects 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 5
- 229910003481 amorphous carbon Inorganic materials 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a surface treatment process for a probe needle head, which is implemented according to the following steps: step 1, pretreating the surface of a needle head; step 2, plating a nano diamond coating on the surface of the needle head obtained in the step 1; step 3, plating a nickel coating on the nano diamond coating obtained in the step 2; and 4, plating a gold coating on the nickel coating obtained in the step 3. The surface treatment process for the probe head solves the problems that the probe head is easy to clamp and drop in the test process of the existing probe.
Description
Technical Field
The invention belongs to the technical field of probe processing technologies, and particularly relates to a surface treatment process for a probe head.
Background
With the upgrading of electronic products, the demand of consumer electronics is increasing significantly, the functional requirements for electronic products are becoming higher and higher, and the quality requirements for electronic test probes are also increasing nowadays.
Many probes in the current online test equipment can not meet the test requirement, and mainly because the probe needle head processing method has no smooth finish on the surface of a better treatment needle head, a blocking phenomenon exists in the test process, and meanwhile, the needle head falls off in the test process, so that the high standard of the test and the waste of frequent replacement of the test probe are seriously influenced.
Disclosure of Invention
The invention aims to provide a surface treatment process for a probe head, which solves the problems that the probe head is easy to clamp and drop in the test process of the existing probe.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: the method is implemented according to the following steps:
step 1, pretreating the surface of a needle head;
step 2, plating a nano diamond coating on the surface of the needle head obtained in the step 1;
step 3, plating a nickel coating on the nano diamond coating obtained in the step 2;
and 4, plating a gold coating on the nickel coating obtained in the step 3.
As a preferred embodiment of the present invention, in step 1, the pretreatment includes a polishing treatment.
As a preferred technical solution of the present invention, the step 2 specifically operates as follows:
step 2.1: ultrasonically cleaning and drying the needle head, then placing the needle head into a reaction furnace, vacuumizing the reaction furnace, and keeping the vacuum degree between 4.0 x 10 < -3 > Pa and 5.0 x 10 < -3 > Pa;
step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.0X 10-3Pa～4.5×10-3Starting an ion source with the working voltage of 2200V-2400V and the working time of 50 +/-10 min during Pa, bombarding the surface of the probe needle by the generated argon ions, and activating the surface of the needle;
step 2.3: closing argon, loading negative bias between the needle head and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head;
step 2.4: introducing nitrogen into the reaction furnace and maintainingStable degree of vacuum was maintained at 1.1X 10-2Pa～1.2×10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions flying to the surface of the needle to form the nano-diamond coating.
In a preferred embodiment of the present invention, in step 2, the thickness of the nanodiamond coating is 1 μm to 2 μm.
As a preferred technical solution of the present invention, the step 3 is specifically performed as follows:
step 3.1: cleaning and drying the needle head obtained in the step 2 by ultrasonic waves, placing the needle head in a reaction furnace, and vacuumizing the reaction furnace;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-base alloy is coated on the surface of the needle head under the acceleration action of the electric field.
As a preferred technical solution of the present invention, the step 4 is specifically performed as follows:
step 4.1: cleaning and drying the needle head obtained in the step 2 by ultrasonic waves, placing the needle head in a reaction furnace, and vacuumizing the reaction furnace;
and 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head main body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas on the target are ionized, and the evaporated gold-base alloy is coated on the surface of the needle head under the acceleration action of the electric field.
The invention has the beneficial effects that: the principle of the surface treatment process of the probe needle head is that the surface of the needle head is sequentially plated with the nano diamond coating, the nickel coating and the gold coating, so that the friction blockage problem is reduced, the hardness of a product is improved, the needle head is prevented from falling off, and the heat conductivity of the product is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of a probe tip obtained by a surface treatment process of a probe tip according to the present invention.
In the figure: 1. the needle head, 2. the nano diamond coating, 3. the nickel coating and 4. the gold coating.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, if there are first and second described only for the purpose of distinguishing technical features, it is not understood that relative importance is indicated or implied or that the number of indicated technical features or the precedence of the indicated technical features is implicitly indicated or implied.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
As shown in fig. 1, the surface treatment process of the probe needle head of the invention is implemented according to the following steps:
step 1, polishing the surface of a needle 1;
step 2, plating a nano diamond coating 2 on the surface of the needle 1 obtained in the step 1, and specifically performing the following operations:
step 2.1: the needle head 1 is cleaned by ultrasonic waves and dried, then is placed in a reaction furnace, and is vacuumized, and the vacuum degree is kept between 4.0 multiplied by 10 < -3 > Pa and 5.0 multiplied by 10 < -3 > Pa;
step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.0X 10-3Pa～4.5×10-3Starting an ion source under the working voltage of 2200V-2400V and the working time of 50 +/-10 min during Pa, bombarding the surface of the probe needle by the generated argon ions, and activating the surface of the needle;
step 2.3: closing argon, loading negative bias between the needle head 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head 1;
step 2.4: introducing nitrogen into the reaction furnace, and maintaining the stable vacuum degree of 1.1 × 10-2Pa～1.2×10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as a cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by the pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions which fly to the surface of the needle 1 to form a nano diamond coating 2;
step 3, plating a nickel coating 3 on the nano diamond coating 2 obtained in the step 2; the method specifically comprises the following steps:
step 3.1: ultrasonically cleaning and drying the needle head 1 obtained in the step (2), placing the needle head in a reaction furnace, and vacuumizing;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head 1 by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field;
step 4, plating a gold coating 4 on the nickel coating 3 obtained in the step 3, specifically performing the following steps:
step 4.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
and 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head main body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated gold-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field.
Diamond coatings (DLC) are metastable amorphous carbon films which are mainly composed of sp2 bonds and sp3 bonds and have disordered mixing, and are divided into hydrogen-containing amorphous carbon films (a-C: H) and hydrogen-free amorphous carbon films (a-C).
It should be noted that, a layer of nano-diamond coating 2 is directly added on the needle head 1, and the nano-diamond coating 2 can improve the hardness of the needle head 1 by 3-5 times, prolong the service life by more than 3 times, greatly improve the hardness and the wear resistance of the probe, and further prolong the service life of the probe.
The nano-diamond coating 2 is a nano-diamond like coating comprising nano-diamond like particles. Preferably, the thickness of the nanometer diamond-like carbon coating is 1-2 mu m. The hardness of the probe body 1 can be increased to more than 3000HV by adding a nano diamond-like carbon coating on the needle head 1, the outer surface of the probe body 1 is changed into bright black, and the friction coefficient is lower than 0.1.
Example 1
The invention relates to a surface treatment process for a probe needle head, which is implemented according to the following steps:
step 1, polishing the surface of a needle 1;
step 2, plating a nano diamond coating 2 on the surface of the needle 1 obtained in the step 1, and specifically performing the following operations:
step 2.1: the needle 1 is cleaned by ultrasonic wave, dried and then placed in a reaction furnace, and vacuumized, and the vacuum degree is kept at 4.0 x 10-3Pa；
Step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.0X 10-3Pa, turn on ion sourceThe working voltage of the ion source is 2200V, the working time is 40min, and then the generated argon ions bombard the surface of the probe needle head to activate the surface of the probe needle head;
step 2.3: closing argon, loading negative bias between the needle head 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head 1;
step 2.4: introducing nitrogen into the reaction furnace, and maintaining a stable vacuum degree of 1.1X 10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as a cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by the pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions which fly to the surface of the needle 1 to form a nano diamond coating 2;
step 3, plating a nickel coating 3 on the nano diamond coating 2 obtained in the step 2; the method specifically comprises the following steps:
step 3.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head 1 by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field;
step 4, plating a gold coating 4 on the nickel coating 3 obtained in the step 3, specifically performing the following steps:
step 4.1: ultrasonically cleaning and drying the needle head 1 obtained in the step (2), placing the needle head in a reaction furnace, and vacuumizing;
step 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head main body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated gold-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field.
Example 2
The invention relates to a surface treatment process for a probe needle head, which is implemented according to the following steps:
step 1, polishing the surface of a needle 1;
step 2, plating a nano diamond coating 2 on the surface of the needle 1 obtained in the step 1, and specifically performing the following operations:
step 2.1: ultrasonic cleaning and drying the needle 1, placing the needle in a reaction furnace, vacuumizing the reaction furnace, and keeping the vacuum degree at 4.5X 10-3Pa;
step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.2X 10-3Starting an ion source with the working voltage of 2300V and the working time of 50min during Pa, bombarding the surface of the probe needle by the generated argon ions, and activating the surface of the probe needle;
step 2.3: closing argon, loading negative bias between the needle head 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head 1;
step 2.4: introducing nitrogen into the reaction furnace, and maintaining the stable vacuum degree of 1.15 × 10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as a cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by the pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions which fly to the surface of the needle 1 to form a nano diamond coating 2;
step 3, plating a nickel coating 3 on the nano diamond coating 2 obtained in the step 2; the method specifically comprises the following steps:
step 3.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head 1 by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-based alloy is coated on the surface of the needle head 1 under the acceleration action of the electric field;
step 4, plating a gold coating 4 on the nickel coating 3 obtained in the step 3, specifically as follows:
step 4.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
and 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated gold-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field.
Example 3
The invention relates to a surface treatment process for a probe needle head, which is implemented according to the following steps:
step 1, polishing the surface of a needle 1;
step 2, plating a nano diamond coating 2 on the surface of the needle 1 obtained in the step 1, and specifically performing the following operations:
step 2.1: ultrasonic cleaning and drying the needle 1, placing the needle in a reaction furnace, vacuumizing the reaction furnace, and keeping the vacuum degree at 5.0 x 10-3Pa;
step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.5X 10-3Starting an ion source under the working voltage of 2400V and the working time of 60min during Pa, bombarding the surface of the probe needle head by the generated argon ions, and activating the surface of the needle head;
step 2.3: closing argon, loading negative bias between the needle head 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head 1;
step 2.4: introducing nitrogen into the reaction furnace, and maintaining the stable vacuum degree of 1.2X 10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as a cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by the pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions which fly to the surface of the needle 1 to form a nano diamond coating 2;
step 3, plating a nickel coating 3 on the nano diamond coating 2 obtained in the step 2; the method specifically comprises the following steps:
step 3.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head 1 by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field;
step 4, plating a gold coating 4 on the nickel coating 3 obtained in the step 3, specifically as follows:
step 4.1: ultrasonically cleaning and drying the needle head 1 obtained in the step 2, placing the needle head in a reaction furnace, and vacuumizing;
and 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head main body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated gold-based alloy is coated on the surface of the needle 1 under the acceleration action of the electric field.
Therefore, compared with the prior art, the surface treatment process for the probe needle head has the principle that the nano diamond coating, the nickel coating and the gold coating are sequentially plated on the surface of the needle head, so that the friction stuck problem is reduced, the hardness of a product is improved, the needle head is prevented from falling off, and the heat conductivity of the product is improved.
The foregoing description shows and describes several preferred embodiments of the invention, but as aforementioned, it is to be understood that the invention is not limited to the forms disclosed herein, and is not to be construed as excluding other embodiments, and that the invention is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (6)
1. A surface treatment process for a probe needle head is characterized by comprising the following steps:
step 1, pretreating the surface of a needle head;
step 2, plating a nano diamond coating on the surface of the needle head obtained in the step 1;
step 3, plating a nickel coating on the nano diamond coating obtained in the step 2;
and 4, plating a gold coating on the nickel coating obtained in the step 3.
2. The surface treatment process for a probe tip according to claim 1, wherein in the step 1, the pretreatment comprises a polishing treatment.
3. The surface treatment process for the probe needle head according to claim 2, wherein the step 2 is specifically performed as follows:
step 2.1: ultrasonically cleaning and drying the needle head, then placing the needle head in a reaction furnace, vacuumizing the reaction furnace, and keeping the vacuum degree between 4.0 x 10 < -3 > Pa and 5.0 x 10 < -3 > Pa;
step 2.2: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 4.0X 10-3Pa～4.5×10-3Starting an ion source under the working voltage of 2200V-2400V and the working time of 50 +/-10 min during Pa, bombarding the surface of the probe needle by the generated argon ions, and activating the surface of the needle;
step 2.3: closing argon, loading negative bias between the needle head and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the needle head;
step 2.4: introducing nitrogen into the reaction furnace, and maintaining a stable vacuum degree of 1.1X 10-2Pa～1.2×10-2Pa, depositing a titanium nitride transition layer on the surface of the needle head;
step 2.5: starting pulse arc discharge with graphite as cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions and high-energy neutral atoms of carbon formed by pulse discharge to collide with hydrocarbon gas molecules to generate new carbon ions flying to the surface of the needle to form the nano-diamond coating.
4. The surface treatment process for a probe tip according to claim 3, wherein in the step 2, the thickness of the nanodiamond coating is 1 to 2 μm.
5. The surface treatment process for the probe needle head according to claim 4, wherein the step 3 is specifically performed as follows:
step 3.1: cleaning and drying the needle head obtained in the step 2 by ultrasonic waves, placing the needle head in a reaction furnace, and vacuumizing the reaction furnace;
step 3.2: starting a power supply of the nickel-based alloy target, filling nitrogen, and performing plasma modification on the needle head by adopting radio frequency or intermediate frequency glow discharge;
step 3.3: the evaporated material and gas evaporated from the target are ionized, and the evaporated nickel-base alloy is coated on the surface of the needle under the acceleration action of the electric field.
6. The surface treatment process for the probe needle head according to claim 5, wherein the step 4 is specifically performed as follows:
step 4.1: cleaning and drying the needle head obtained in the step (2) by ultrasonic waves, placing the needle head in a reaction furnace, and vacuumizing;
and 4.2: starting a power supply of the gold-based alloy target, filling nitrogen, and performing plasma modification on the needle head body by adopting radio frequency or intermediate frequency glow discharge;
step 4.3: the evaporated material and gas on the target are ionized, and the evaporated gold-base alloy is coated on the surface of the needle head under the acceleration action of the electric field.
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| EP0477585A2 (en) * | 1990-09-27 | 1992-04-01 | General Electric Company | Diamond coated ultrasonic probe tips |
| JP2012021223A (en) * | 2010-07-14 | 2012-02-02 | Plasma Ion Assist Co Ltd | Plasma treatment apparatus and surface modifying method of contact probe |
| CN107587133A (en) * | 2017-09-06 | 2018-01-16 | 广东耐信镀膜科技有限公司 | A kind of tungsten tipped probe composite diamond coating and preparation method thereof |
| JP2018189396A (en) * | 2017-04-28 | 2018-11-29 | イビデン株式会社 | Probe and method for manufacturing the same |
| CN112481582A (en) * | 2020-12-22 | 2021-03-12 | 珠海拓优电子有限公司 | Nano-coating probe and preparation method thereof |
| CN214244588U (en) * | 2020-12-22 | 2021-09-21 | 珠海拓优电子有限公司 | Nano-coating probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0477585A2 (en) * | 1990-09-27 | 1992-04-01 | General Electric Company | Diamond coated ultrasonic probe tips |
| JP2012021223A (en) * | 2010-07-14 | 2012-02-02 | Plasma Ion Assist Co Ltd | Plasma treatment apparatus and surface modifying method of contact probe |
| JP2018189396A (en) * | 2017-04-28 | 2018-11-29 | イビデン株式会社 | Probe and method for manufacturing the same |
| CN107587133A (en) * | 2017-09-06 | 2018-01-16 | 广东耐信镀膜科技有限公司 | A kind of tungsten tipped probe composite diamond coating and preparation method thereof |
| CN112481582A (en) * | 2020-12-22 | 2021-03-12 | 珠海拓优电子有限公司 | Nano-coating probe and preparation method thereof |
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