CN114453697A

CN114453697A - Box body atmosphere-controllable eutectic device and use method

Info

Publication number: CN114453697A
Application number: CN202210091521.7A
Authority: CN
Inventors: 龙秀森; 刘耿烨; 刘建军
Original assignee: Guangzhou Anbo Communication Technology Co ltd
Current assignee: Guangzhou Anbo Communication Technology Co ltd
Priority date: 2022-01-26
Filing date: 2022-01-26
Publication date: 2022-05-10

Abstract

The invention relates to the technical field of semiconductor packaging, in particular to a box controlled atmosphere eutectic device which comprises a device main body, wherein the top of the device main body is fixedly connected with a nitrogen interface and a second vacuum equipment pipeline interface; a microscope support structure is arranged between the nitrogen interface and the second vacuum equipment pipeline interface, and a microscope is arranged at the front end of the microscope support structure; two sides of the device main body are symmetrically and movably connected with reserved windows and doors; the front end of the device main body is movably connected with a feeding window; the method of extracting the air in the box and filling nitrogen is utilized to avoid the oxidation of welding raw materials caused by the existence of air in the box, and meanwhile, the oxidized welding flux outside the box body can also be reduced by filling the hydrogen in the mixed gas, so that the eutectic chip product in the environment has the advantages of extremely low voidage, good wettability of the welding flux, bright color and no pollution, and the quality of the finished product is greatly improved.

Description

Box body atmosphere-controllable eutectic device and use method

Technical Field

The invention relates to the technical field of semiconductor packaging, in particular to a box body atmosphere-controllable eutectic device and a using method thereof.

Background

In the semiconductor electronic packaging and microwave communication industry, under the technical application background based on gallium arsenide and gallium nitride, particularly in high-frequency and high-power products, the quality of an assembly process mode of a core device chip is particularly important, and the gold-tin eutectic welding process technology is widely used for eutectic welding of power devices due to the characteristics of good weldability, no pollution, high heat conductivity and the like of gold-tin alloy. In the prior eutectic soldering technology, the eutectic soldering of chips is realized mainly by equipment modes such as a full-automatic dynamic eutectic machine, a vacuum eutectic furnace, a semi-automatic epoxy eutectic machine and the like.

The prior eutectic device with the box body capable of controlling the atmosphere mainly has the following defects: the utilization ratio of current device to middle-size and small-size enterprise is low, and can't carry out effectual control to gas in the box, can make material take place the oxidation in the welding process, can't ensure the eutectic quality of product.

Disclosure of Invention

The invention provides a box body controlled atmosphere eutectic device and a using method thereof, aiming at the problem that materials are possibly oxidized in the welding process due to the fact that effective control means cannot be adopted for gas in a box body in the prior art.

The technical scheme adopted by the invention for solving the technical problems is as follows: a box controlled atmosphere eutectic device comprises a device main body, wherein a power socket is arranged at the rear side of the device main body;

the top of the device main body is fixedly connected with a nitrogen interface and a second vacuum equipment pipeline interface;

a microscope support structure is arranged between the nitrogen interface and the second vacuum equipment pipeline interface, and a microscope is arranged at the front end of the microscope support structure;

two sides of the device main body are symmetrically and movably connected with reserved windows and doors;

the front end of the device main body is movably connected with a feeding window;

a power switch, a hot table temperature control button, a hot table setting temperature display screen, a hot table actual temperature display screen, an in-box air pressure display table and a power indicator are sequentially arranged at the front end of the device main body and at the bottom of the feeding window;

the inner side of the device main body is provided with a heating table.

Specifically, the nitrogen interface and the second vacuum equipment pipeline interface are communicated with the device main body.

The microscope support structure comprises a rodless cylinder, a slider is movably connected to the outer side of the rodless cylinder, a vertical rod is fixedly mounted on the outer wall of the top of the slider, a connecting block is fixedly connected to the outer wall of the vertical rod, an adjusting bolt is connected to the inner side of the connecting block and the corresponding position of the vertical rod in a threaded mode, a fixed block is fixedly connected to the outer wall of one side of the connecting block, and a sliding rod is movably connected to the inner side of the fixed block.

Specifically, a sliding groove is formed in the position, corresponding to the sliding rod, of the inner side of the fixing block.

Specifically, the rodless cylinder is fixedly mounted on the outer wall of the top of the device main body through a screw, and the microscope is fixedly mounted at the front end of the sliding rod.

Specifically, the outer wall of one side of the reserved window door and the outer wall of the front end of the feeding window are fixedly connected with handles.

Specifically, the device main part inboard still is provided with operating gloves, operating gloves is located hot bench top portion, and device main part front end and operating gloves relevant position have seted up sealed gloves operation mouth.

A method for using a crystal supply device with a box body in a controllable atmosphere comprises

S1, starting a hot table, adjusting the temperature, starting a light source of a microscope 2, and adjusting the focusing;

s2, putting the material to be operated, the soldering lug and the tool tweezers into the feeding window, and closing the window door;

s3, fixedly connecting the vacuum equipment and the nitrogen filling device with a nitrogen interface and a second vacuum equipment pipeline interface respectively, and ensuring the sealing property;

s3, starting a vacuumizing device, vacuumizing and filling nitrogen while starting gas filling when the vacuumizing device is vacuumized to a set air pressure, ensuring the air pressure balance through an air pressure display meter in the box, filling inert hydrogen-nitrogen mixed gas after the vacuumizing device is vacuumized, well ensuring that the welding materials in the box are not oxidized, and reducing the oxidized materials and the welding materials outside through the contained hydrogen;

s4, an operator sits in front of the box body, sleeves both hands from the operation openings of the sealing gloves, observes the two eyes close to the eyepieces of the microscope 2, performs chip eutectic operation, and places the shared chip products on a clip-shaped supporting platform;

s5, after the eutectic crystallization of the chips is finished, closing the vacuumizing equipment, opening the feeding window when the air pressure of the box body is the same as the outside air pressure, and taking out the eutectic semi-finished product from the window;

and S6, closing the nitrogen, the heat platform and the light source switch valve.

Specifically, the inert hydrogen-nitrogen mixed gas consists of 3% of hydrogen and 97% of nitrogen.

The invention has the beneficial effects that:

(1) according to the box body controlled atmosphere eutectic device and the using method, the method of extracting air in the box and filling nitrogen is utilized, the phenomenon that welding raw materials are oxidized due to the fact that air exists in the box is avoided, meanwhile, the oxidized welding flux outside the box body can be reduced through the hydrogen existing in the filled mixed gas, the eutectic chip product in the environment is extremely low in void ratio, good in welding flux wettability, bright in color and free of pollution, and the quality of finished products is greatly improved.

(2) According to the box body atmosphere-controllable eutectic device and the using method, the operation gloves are arranged, so that workers can operate flexibly, the cost is lower than that of a traditional full-automatic dynamic eutectic machine, a vacuum eutectic furnace, a semi-automatic epoxy eutectic machine and the like, and the box body atmosphere-controllable eutectic device is more suitable for small and medium-sized enterprises.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic view of an orthographic view of a eutectic device with a box body and a controllable atmosphere provided by the invention;

FIG. 2 is a schematic view of the internal structure of the device body according to the present invention;

fig. 3 is a schematic perspective view of fig. 2.

In the figure: 1. a device main body; 2. a microscope; 3. a nitrogen interface; 4. sealing the glove operation opening; 5. reserving a window and a door; 6. a feeding window; 7. a power switch; 8. a hot table temperature control button; 9. the hot bench is provided with a temperature display screen; 10. a hot table actual temperature display screen; 11. a display meter of the air pressure in the tank; 12. a power indicator light; 13. a second vacuum equipment pipe interface; 14. a microscope stand structure; 15. operating gloves; 16. a clip-shaped saddle; 17. heating the platform; 18. a power outlet; 19. a rodless cylinder; 20. a slider; 21. erecting a rod; 22. connecting blocks; 23. a fixed block; 24. a slide bar.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

Referring to fig. 1 and 2, the eutectic device with the controllable atmosphere of the box body comprises a device main body 1, wherein a power socket 18 is arranged at the rear side of the device main body 1; the top of the device main body 1 is fixedly connected with a nitrogen interface 3 and a second vacuum equipment pipeline interface 13; a microscope support structure 14 is arranged between the nitrogen interface 3 and the second vacuum equipment pipeline interface 13, and a microscope 2 is arranged at the front end of the microscope support structure 14; two sides of the device main body 1 are symmetrically and movably connected with reserved windows and doors 5; the front end of the device main body 1 is movably connected with a feeding window 6; a power switch 7, a hot table temperature control button 8, a hot table setting temperature display screen 9, a hot table actual temperature display screen 10, an in-box air pressure display meter 11 and a power indicator lamp 12 are sequentially arranged at the front end of the device main body 1 and at the bottom of the feeding window 6; a heating table 17 is arranged on the inner side of the device main body 1; the solder that will need the welding is put into device main part 1 through feed window 6, preheat hot platform 17 before the welding, rely on microscope 2 to operate the welding, and through hot platform temperature control button 8, hot platform sets up temperature display screen 9, hot platform actual temperature display screen 10 and incasement air pressure display table 11 adjust hot platform 17 respectively, rely on hot platform to set up temperature display screen 9 and hot platform actual temperature display screen 10 and observe the temperature of hot platform 17, the balanced condition of the air pressure in the case is known to incasement air pressure display table 11.

Referring to fig. 3, the nitrogen interface 3 and the second vacuum equipment pipe interface 13 are connected to the apparatus main body 1; the microscope support structure 14 comprises a rodless cylinder 19, a sliding block 20 is movably connected to the outer side of the rodless cylinder 19, an upright rod 21 is fixedly mounted on the outer wall of the top of the sliding block 20, a connecting block 22 is fixedly sleeved on the outer wall of the upright rod 21, an adjusting bolt is in threaded connection with the inner side of the connecting block 22 corresponding to the upright rod 21, a fixing block 23 is fixedly connected to the outer wall of one side of the connecting block 22, and a sliding rod 24 is movably connected to the inner side of the fixing block 23; the inner side of the fixed block 23 is provided with a sliding chute corresponding to the sliding rod 24; the rodless cylinder 19 is fixedly arranged on the outer wall of the top of the device main body 1 through a screw, and the microscope 2 is fixedly arranged at the front end of the sliding rod 24; the outer wall of one side of the reserved window door 5 and the outer wall of the front end of the feeding window 6 are fixedly connected with handles; still need adjust microscope 2's position before the welding, convenient follow-up work moves the left and right positions who adjusts microscope through slider 20 on rodless cylinder 19, because connecting block 22 can go up and down in pole setting 21, adjusts it to suitable position after, then fixes connecting block 22's position through adjusting bolt, slide bar 24 and fixed block 23's cooperation then adjusts microscope 2's front and back position, adjusts it to most suitable position and uses.

Referring to fig. 2, an operating glove 15 is further arranged on the inner side of the device main body 1, the operating glove 15 is positioned on the top of the heating table 17, and a sealing glove operating opening 4 is formed in the position, corresponding to the operating glove 15, of the front end of the device main body 1; the worker can easily perform the operation by manipulating the glove 15.

S1, starting a hot table 17, adjusting the temperature, starting a light source of a microscope 2, and adjusting the focusing;

s2, putting the materials to be operated, the soldering lug and the tool tweezers into the feeding window 6, and closing the window;

s3, fixedly connecting the vacuum equipment and the nitrogen filling device with the nitrogen interface 3 and the second vacuum equipment pipeline interface 13 respectively, and ensuring the sealing property;

s3, starting a vacuumizing device, vacuumizing and filling nitrogen while starting gas filling when the vacuumizing device is vacuumized to a set air pressure, ensuring the air pressure balance through an air pressure display meter 11 in the box, and filling inert hydrogen-nitrogen mixed gas after vacuumizing to well ensure that the solder in the box is not oxidized;

s4, an operator sits in front of the box body, sleeves both hands from the sealed glove operation opening 4, observes the eyes of the microscope 2 close to the ocular lens, performs chip eutectic operation, and places the well-combined chip product on the square-shaped supporting platform 16;

s5, after the eutectic crystallization of the chips is finished, closing the vacuumizing equipment, opening the feeding window 6 when the air pressure of the box body is the same as the outside air pressure, and taking out the semi-finished product subjected to eutectic crystallization from the window;

s6, closing the nitrogen, the heating table 17 and the light source switch valve.

The inert hydrogen-nitrogen mixed gas consists of 3 percent of hydrogen and 97 percent of nitrogen; the inert gas prevents the solder from being oxidized in the chamber, and the externally oxidized solder is reduced by the hydrogen contained therein.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the embodiments and descriptions given above are only illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which fall within the scope of the claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a controllable atmosphere eutectic device of box which characterized in that: comprises a device main body (1), wherein a power socket (18) is arranged at the rear side of the device main body (1);

the top of the device main body (1) is fixedly connected with a nitrogen interface (3) and a second vacuum equipment pipeline interface (13);

a microscope support structure (14) is arranged between the nitrogen interface (3) and the second vacuum equipment pipeline interface (13), and a microscope (2) is arranged at the front end of the microscope support structure (14);

two sides of the device main body (1) are symmetrically and movably connected with reserved windows and doors (5);

the front end of the device main body (1) is movably connected with a feeding window (6);

a power switch (7), a hot table temperature control button (8), a hot table setting temperature display screen (9), a hot table actual temperature display screen (10), an in-box air pressure display meter (11) and a power indicator lamp (12) are sequentially arranged at the front end of the device main body (1) and at the bottom of the feeding window (6);

the inner side of the device main body (1) is provided with a hot table (17).

2. A box controlled atmosphere eutectic device of claim 1, wherein: the nitrogen interface (3) and the second vacuum equipment pipeline interface (13) are communicated with the device main body (1).

3. A box controlled atmosphere eutectic device according to claim 2, characterized in that: microscope supporting structure (14) include rodless cylinder (19), rodless cylinder (19) outside swing joint has slider (20), slider (20) top outer wall fixed mounting has pole setting (21), the fixed cover of pole setting (21) lateral wall has connect connecting block (22), connecting block (22) inboard and the corresponding position threaded connection of pole setting (21) have adjusting bolt, connecting block (22) one side outer wall fixed connection has fixed block (23), fixed block (23) inboard swing joint has slide bar (24).

4. A box controlled atmosphere eutectic device of claim 3, characterized in that: the inner side of the fixed block (23) is provided with a sliding groove corresponding to the sliding rod (24).

5. A controlled atmosphere eutectic device of tank in claim 1 or 3, wherein: the rodless cylinder (19) is fixedly arranged on the outer wall of the top of the device main body (1) through a screw, and the microscope (2) is fixedly arranged at the front end of the sliding rod (24).

6. A box controlled atmosphere eutectic device of claim 1, wherein: the outer wall of one side of the reserved window door (5) and the outer wall of the front end of the feeding window (6) are fixedly connected with handles.

7. A box controlled atmosphere eutectic device of claim 1, wherein: the device is characterized in that operation gloves (15) are further arranged on the inner side of the device main body (1), the operation gloves (15) are located at the top of the hot table (17), and sealing glove operation openings are formed in the positions, corresponding to the operation gloves (15), of the front end of the device main body (1).

8. A use method of a box body controlled atmosphere crystal supply device is characterized in that: comprises that

S1, starting a hot table (17), adjusting the temperature, starting a light source of a microscope 2, and adjusting the temperature;

s2, putting the materials to be operated, the soldering lug and the tool tweezers into the feeding window (6), and closing the window door;

s3, fixedly connecting the vacuum equipment and the nitrogen filling device with the nitrogen interface (3) and a second vacuum equipment pipeline interface (13) respectively, and ensuring the sealing property;

s3, starting a vacuumizing device, vacuumizing while filling nitrogen when starting gas filling to work when vacuumizing to set air pressure, ensuring air pressure balance through an air pressure display meter (11) in the box, filling inert hydrogen-nitrogen mixed gas after vacuumizing, well ensuring that welding materials in the box are not oxidized, and reducing the oxidized materials and welding materials outside through the contained hydrogen, wherein the eutectic chip product has the advantages of extremely low void ratio, good welding material wettability, bright color and no pollution under the environment, and the quality of the finished product is greatly improved;

s4, an operator sits in front of the box body, sleeves both hands from the sealed glove operation opening (5), observes the eyes of the microscope 2 close to the eyepiece of the microscope, performs chip eutectic operation, and places the shared chip product on a clip-shaped supporting platform (16);

s5, after the eutectic crystallization of the chips is finished, closing the vacuumizing equipment, opening the feeding window (6) when the air pressure of the box body is the same as the outside air pressure, and taking out the eutectic semi-finished product from the window;

s6, closing the nitrogen, the heating table (17) and the light source switch valve.

9. The use method of the box body controlled atmosphere crystal supply device according to claim 8, wherein the inert mixed gas of hydrogen and nitrogen consists of 3% of hydrogen and 97% of nitrogen.