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CN114355464A - Miniaturized integral terahertz transmitting and receiving probe structure - Google Patents

Miniaturized integral terahertz transmitting and receiving probe structure Download PDF

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Publication number
CN114355464A
CN114355464A CN202110878251.XA CN202110878251A CN114355464A CN 114355464 A CN114355464 A CN 114355464A CN 202110878251 A CN202110878251 A CN 202110878251A CN 114355464 A CN114355464 A CN 114355464A
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CN
China
Prior art keywords
photoconductive antenna
axis parabolic
metal reflector
transmitting
receiving
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Pending
Application number
CN202110878251.XA
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Chinese (zh)
Inventor
刘伟
刘德峰
王彪
于淼
高云端
刘长栋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Ruisai Chang Cheng Aeronautical M & C Technology Co ltd
AVIC Intelligent Measurement Co Ltd
China Aviation Industry Corp of Beijing Institute of Measurement and Control Technology
Original Assignee
Beijing Ruisai Chang Cheng Aeronautical M & C Technology Co ltd
AVIC Intelligent Measurement Co Ltd
China Aviation Industry Corp of Beijing Institute of Measurement and Control Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Beijing Ruisai Chang Cheng Aeronautical M & C Technology Co ltd, AVIC Intelligent Measurement Co Ltd, China Aviation Industry Corp of Beijing Institute of Measurement and Control Technology filed Critical Beijing Ruisai Chang Cheng Aeronautical M & C Technology Co ltd
Priority to CN202110878251.XA priority Critical patent/CN114355464A/en
Publication of CN114355464A publication Critical patent/CN114355464A/en
Pending legal-status Critical Current

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Abstract

The invention belongs to the technical field of terahertz, and particularly relates to a miniaturized integrated terahertz transmitting and receiving probe structure. The probe structure comprises a front panel, a rear panel, a photoconductive antenna, a fixed support, an off-axis parabolic metal reflector group, a fixed plate, a bottom plate and a protective shell. The angle of the photoconductive antenna is adjusted and fixed by the fixing support, the angle of the off-axis parabolic metal reflector is adjusted and fixed by the fixing plate, and the transmission, collimation, convergence and reception of terahertz radiation are realized by adjusting the photoconductive antenna and the off-axis parabolic metal reflector group. The probe carries out folding processing on the conventional planar optical path structure, reduces the volume of the terahertz transmitting and receiving module, and is compact in structure, convenient to carry, fix and use.

Description

Miniaturized integral terahertz transmitting and receiving probe structure
Technical Field
The invention belongs to the technical field of terahertz, and particularly relates to a miniaturized integrated terahertz transmitting and receiving probe structure.
Background
Terahertz radiation (THz) generally refers to electromagnetic waves in the frequency range of 0.1-10THz, and the band thereof is located between millimeter waves and infrared waves, and is in the far infrared band. Terahertz radiation occupies a very special position in an electromagnetic spectrum, and is a transition region from a macroscopic classical theory to a microscopic quantum theory and a transition region from electronics to photonics. Compared with electromagnetic waves of other wave bands, the terahertz wave has good penetrating power on most dielectric substances and nonpolar substances, and can carry out nondestructive detection on the substances; the terahertz coherence is good, the electric field information of an object can be directly measured by using a coherent measurement technology, and the optical parameters can be obtained by simple data processing; in addition, terahertz waves also have excellent characteristics such as low energy, good transient, large bandwidth, and the like.
The terahertz time-domain spectroscopy system is a main instrument for applying terahertz waves to the field of nondestructive testing at present, and comprises a femtosecond laser, a delay line, a data acquisition system, a terahertz transmitting and receiving module and the like. Because the space of an actual use scene is limited, the volume of the terahertz transmitting and receiving module determines the actual use effect of the terahertz time-domain spectroscopy system, which means that the volume of the terahertz transmitting and receiving module must be as small as possible, and the conventional terahertz transmitting and receiving module mostly adopts a planar optical path structure, has a large volume and is not beneficial to practical application.
Disclosure of Invention
The purpose of the invention is as follows: the utility model provides a miniaturized integral type terahertz is transmission and reception probe structure now to reduce terahertz transmission and reception module's volume under the prerequisite that keeps the function unchangeable, solve present terahertz transmission and reception module now and be unfavorable for practical application's problem because of the volume is great.
The technical scheme is as follows:
in a first aspect, a miniaturized integrated terahertz transmitting and receiving probe structure is provided, which includes: the terahertz radiation detector comprises a front panel 1, a rear panel 2, a fixed support 3, a transmitting photoconductive antenna 4, a receiving photoconductive antenna 5, an upper fixed plate 6, a lower fixed plate 7, an off-axis paraboloidal metal reflector group 8, a bottom plate 9 and a protective shell 10, wherein the front panel 1, the rear panel 2, the bottom plate 9 and the protective shell 10 form an external framework of a probe structure, the front panel 1 is processed with a square opening for allowing terahertz radiation to pass through, the off-axis paraboloidal metal reflector group 8 is fixed on the bottom plate 9 and the protective shell 10 through the upper fixed plate 6 and the lower fixed plate 7, the fixed support 3 is arranged on the bottom plate 9 and is positioned behind the off-axis paraboloidal metal reflector group 8, the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 are fixed on the fixed support 3 and are used for realizing the adjustment and fixation of the angles of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 in the horizontal direction and the vertical direction and the adjustment of the distance to the off-axis paraboloidal metal reflector group 8, the rear panel 2 is provided with a circular opening for fixing an optical fiber, a power line and a signal line.
Furthermore, the fixing support 3 comprises two L-shaped plates and two C-shaped clamps, the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 are respectively arranged in the two C-shaped clamps, a plurality of threaded holes are formed above the C-shaped clamps, a plurality of adjusting screws penetrate through the threaded holes to adjust and fix the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 in the front-back direction, kidney-shaped holes are formed in the side faces of the L-shaped plates, and screws penetrate through the kidney-shaped holes and the threaded holes to adjust and fix the height and the rotation angle of the C-shaped clamps in the vertical direction.
Further, the bottom plate 9 is connected with the L-shaped plate of the fixing support 3 through screws to adjust and fix the rotation angle of the fixing support 3 in the horizontal direction.
Further, the polarization directions of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 coincide.
Further, the lower fixing plate 7 is fixed on the bottom plate 9 through screws, the upper fixing plate 6 is fixed on the protective shell 10 through screws, each fixing plate comprises a plurality of hollow structures corresponding to the back screw holes of the two off-axis parabolic metal reflectors, and the adjustment and the fixation of the rotation angle of the off-axis parabolic metal reflectors are realized by adjusting the positions of screws in the hollow structures.
Further, the off-axis parabolic metal reflector group 8 comprises a first off-axis parabolic metal reflector 11 and a second off-axis parabolic metal reflector 12 corresponding to the transmitting photoconductive antenna 4, and a third off-axis parabolic metal reflector 13 and a fourth off-axis parabolic metal reflector 14 corresponding to the receiving photoconductive antenna 5, wherein the first off-axis parabolic metal reflector 11 parallels and collimates the terahertz radiation emitted by the transmitting photoconductive antenna 4; the collimated terahertz radiation reaches the second off-axis parabolic metal reflector 12 for convergence, the converged terahertz radiation is reflected by an object, then reaches the third off-axis parabolic metal reflector 13, is collimated by the third off-axis parabolic metal reflector 13, then reaches the fourth off-axis parabolic metal reflector 14, and finally is converged by the fourth off-axis parabolic metal reflector 14 to reach the receiving photoconductive antenna 5.
Further, the transmission angles of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 are 12.5 °.
Further, the distance from the center of the first off-axis parabolic metal reflector 11 to the center 4 of the transmitting photoconductive antenna is its focal length value, and the distance from the center of the fourth off-axis parabolic metal reflector 14 to the center 5 of the receiving photoconductive antenna is its focal length value.
Has the advantages that:
the planar light path is folded by designing a mechanical structure, the size of the terahertz transmitting and receiving module is reduced on the premise of keeping the function unchanged, and the problem that the existing terahertz transmitting and receiving module is not beneficial to practical application due to large size is solved.
Drawings
FIG. 1 is a general view of a probe according to an embodiment of the invention;
FIG. 2 is a schematic planar light path diagram of an off-axis parabolic metal mirror array;
FIG. 3 is a front view of a probe according to an embodiment of the invention;
the optical waveguide module comprises a front panel 1, a rear panel 2, a fixed support 3, a transmitting photoconductive antenna 4, a receiving photoconductive antenna 5, an upper fixed plate 6, a lower fixed plate 7, an off-axis paraboloid metal reflector group 8, a bottom plate 9, a protective shell 10, a first off-axis paraboloid metal reflector 11, a second off-axis paraboloid metal reflector 12, a third off-axis paraboloid metal reflector 13 and a fourth off-axis paraboloid metal reflector 14.
Detailed Description
The invention discloses a miniaturized integrated terahertz transmitting and receiving probe structure, which is a probe device suitable for a fiber coupling type terahertz time-domain spectroscopy system (THz-TDS). The probe structure comprises a front panel, a rear panel, a photoconductive antenna, a fixed support, an off-axis paraboloid metal reflector group, a fixed plate, a bottom plate, a protective shell and the like. The fixed bolster possesses angle modulation and fixed function to the photoelectric conducting antenna, and the fixed plate possesses angle modulation and fixed function to off-axis parabolic metal reflector. The terahertz radiation is transmitted, collimated, converged and received by adjusting the photoconductive antenna and the off-axis paraboloid metal reflector group. The probe carries out folding processing on the conventional planar optical path structure, reduces the volume of the terahertz transmitting and receiving module, has a compact structure, is convenient to carry, fix and use, is an important component of an optical fiber coupling type terahertz time-domain spectroscopy system, and is a key development direction of the terahertz time-domain spectroscopy technology toward practicality.
The technical solution of the present invention is further explained with reference to the drawings and the detailed description.
A miniaturized integrated terahertz transmitting and receiving probe structure is used for achieving transmitting, collimating, converging and receiving of terahertz radiation. As shown in fig. 1 to 3, the probe comprises: the terahertz radiation detector comprises a front panel 1, wherein a square opening is processed on the front panel 1 and used for protecting an off-axis paraboloid metal reflector group 8 on the premise of not shielding terahertz radiation; the rear panel 2 is provided with a circular opening for fixing an optical fiber, a power line and a signal line; the fixed support 3 is used for adjusting and fixing the angles of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 in the horizontal direction and the vertical direction, and can also adjust the distance from the antennas to the off-axis paraboloid metal reflector group 8 so as to adapt to different types of antennas; the terahertz radiation detector comprises a transmitting photoconductive antenna 4 and a receiving photoconductive antenna 5 which are used for transmitting and receiving terahertz radiation; each of the upper fixing plate 6 and the lower fixing plate 7 comprises 6 hollowed-out structures corresponding to the back screw holes of the two off-axis parabolic metal reflectors, and the rotation angle of the off-axis parabolic metal reflector group can be adjusted and fixed by adjusting the positions of screws in the hollowed-out structures; the terahertz radiation detector comprises an off-axis paraboloidal metal reflector group 8, wherein the off-axis paraboloidal metal reflector group 8 is used for realizing collimation and convergence of terahertz radiation, the off-axis paraboloidal metal reflector group 8 comprises 4 off-axis paraboloidal metal reflectors, and a first off-axis paraboloidal metal reflector 11 is used for paralleling and collimating terahertz radiation emitted by the transmitting photoconductive antenna 4; the collimated terahertz radiation reaches the second off-axis parabolic metal reflector 12 for convergence, the converged terahertz radiation is reflected by an object, then reaches the third off-axis parabolic metal reflector 13, is collimated by the third off-axis parabolic metal reflector 13, then reaches the fourth off-axis parabolic metal reflector 14, and finally is converged by the fourth off-axis parabolic metal reflector 14 to reach the receiving photoconductive antenna 5.
The sizes and focal lengths of the first off-axis parabolic metal reflector 11, the second off-axis parabolic metal reflector 12, the third off-axis parabolic metal reflector 13 and the fourth off-axis parabolic metal reflector 14 can be selected according to the requirements of an actual system, wherein the focal lengths of the first off-axis parabolic metal reflector 11 and the fourth off-axis parabolic metal reflector 14 must be equal, the focal lengths of the second off-axis parabolic metal reflector 12 and the third off-axis parabolic metal reflector 13 must be equal, and the off-axis parabolic metal reflectors 12 and 13 are symmetrically distributed relative to the central axis of the upper fixing plate 6. The distances from the centers of the first off-axis parabolic metal reflector 11 and the fourth off-axis parabolic metal reflector 14 to the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 are about the focal length value thereof respectively; the distance from the center of the off-axis parabolic metal reflector 11 to the center of the off-axis parabolic metal reflector 12 is equal to (the femtosecond laser optical path of the terahertz time-domain spectrometer detection circuit-the femtosecond laser optical path of the time-domain spectrometer pumping circuit-the sum of the focal lengths of all the off-axis parabolic metal reflectors)/2; a bottom plate 9, wherein the bottom plate 9 is used for fixing the whole probe structure; a protective case 10, said protective case 10 being used to protect the entire probe structure.
The fixing support 3 comprises an L-shaped plate and a C-shaped clamp, the C-shaped clamp adjusts and fixes the front and back directions of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 by adjusting 3 screws, the L-shaped plate adjusts and fixes the height and the rotation angle of the C-shaped clamp (including the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5) in the vertical direction by adjusting 1 long screw hole and 1 screw, and the bottom plate adjusts and fixes the rotation angle of the fixing support 3 (including the L-shaped plate, the C-shaped clamp, the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5) in the horizontal direction by adjusting 1 screw.
The polarization directions of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 must be kept identical.
The lower fixing plate 7 is fixed on the bottom plate 9 through screws, and the upper fixing plate 6 is fixed on the protective shell 10 through screws. Each fixing plate comprises 6 hollow structures corresponding to the back screw holes of the two off-axis parabolic metal reflectors, and the rotation angles of the off-axis parabolic metal reflectors can be adjusted and fixed by adjusting the positions of screws in the hollow structures.
The sizes and focal lengths of the first off-axis parabolic metal reflector 11, the second off-axis parabolic metal reflector 12, the third off-axis parabolic metal reflector 13 and the fourth off-axis parabolic metal reflector 14 can be selected according to the requirements of an actual system. The specific idea is as follows: the emission angle of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 is 12.5 degrees, when the distance from the center of the transmitting photoconductive antenna and the receiving photoconductive antenna is s, the diameter of a light spot of terahertz radiation is tan (12.5 degrees) multiplied by s multiplied by 2, the sizes of the first off-axis parabolic metal reflector 11 and the fourth off-axis parabolic metal reflector 14 are selected to be 1 inch through analyzing the size of the light spot and the size requirement of a probe, and the focal length is 50.4 mm; according to the requirement of the distance between an actual measured object and a probe, the sizes of the second off-axis parabolic metal reflector 12 and the third off-axis parabolic metal reflector 13 are selected to be 1 inch, the focal length is 100.8mm, the off-axis parabolic metal reflectors 12 and 13 are symmetrically distributed relative to the central axis of the upper fixing plate 6, and meanwhile, in order to reduce the loss of the mirror surface to terahertz radiation, gold coating is selected to be plated on the surfaces of all the off-axis parabolic metal reflectors.
The distance from the center of the off-axis paraboloidal metal reflector 11 to the center 4 of the transmitting photoconductive antenna is about the focal length value, and the distance from the center of the off-axis paraboloidal metal reflector 14 to the center 5 of the receiving photoconductive antenna is also about the focal length value.
The distance from the center of the off-axis parabolic metal reflector 11 to the center of the off-axis parabolic metal reflector 12 is equal to (the distance between the detection path femtosecond laser optical path of the terahertz time-domain spectrometer and the pump path femtosecond laser optical path of the time-domain spectrometer and the sum of the focal lengths of all off-axis parabolic metal reflectors)/2, and the distance from the center of the off-axis parabolic metal reflector 13 to the center of the off-axis parabolic metal reflector 14 is the same as that described above.
Through designing mechanical structure, carry out "folding" to plane light path in the past, under the prerequisite of guaranteeing the unchangeable function, reduced the volume of light path structure, more be favorable to practical application.
The fixing brackets 3 are fixed on the bottom plate 9 through screws, then the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 are respectively fixed on the two fixing brackets 3 through screws, and the screws on the fixing brackets 3 are adjusted to keep the alignment of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 in the horizontal direction and the vertical direction. Determining the positions of an upper fixing plate 6 and a lower fixing plate 7 according to the heights of the transmitting photoconductive antenna 4 and the receiving photoconductive antenna 5 and the calculated distance between the off-axis parabolic metal reflectors 11 to 12, fixing the positions, adjusting the rotation angle of the off-axis parabolic metal reflector group 8 through screws of the upper fixing plate 6 and the lower fixing plate 7, wherein the distance between the first off-axis parabolic metal reflector 11 and the fourth off-axis parabolic metal reflector 14 to the transmitting photoconductive antenna 4 or the receiving photoconductive antenna 5 is about the focal length value of the first off-axis parabolic metal reflector 11 and the fourth off-axis parabolic metal reflector 14, and fixing the off-axis parabolic metal reflector group 8 after the adjustment is finished; and finally, assembling the front panel 1, the rear panel 2, the bottom plate 9, the protective shell 10 and the like to complete the probe construction.
Compared with the prior art, the invention has the following advantages:
1. compared with the terahertz transmitting and receiving module formed by the conventional planar optical path structure, the probe provided by the invention has the advantages of compact structure, small volume and easiness in carrying, fixing and using.
2. An engineering method for reducing the volume of an optical path by using a mechanical structure to perform 'folding' on a plane-symmetric optical path structure is provided.

Claims (8)

1. The utility model provides a miniaturized integral type terahertz is transmitted and is received probe structure which characterized in that includes: the terahertz radiation detector comprises a front panel (1), a rear panel (2), a fixed support (3), a transmitting photoconductive antenna (4), a receiving photoconductive antenna (5), an upper fixed plate (6), a lower fixed plate (7), an off-axis paraboloidal metal reflector group (8), a bottom plate (9) and a protective shell (10), wherein the front panel (1), the rear panel (2), the bottom plate (9) and the protective shell (10) form an external framework of a probe structure, the front panel (1) is processed with a square opening for allowing terahertz radiation to pass through, the off-axis paraboloidal metal reflector group (8) is fixed on the bottom plate (9) and the protective shell (10) through the upper fixed plate (6) and the lower fixed plate (7), the fixed support (3) is arranged on the bottom plate (9) and is positioned behind the off-axis paraboloidal metal reflector group (8), the transmitting photoconductive antenna (4) and the receiving photoconductive antenna (5) are fixed on the fixed support (3), the rear panel (2) is provided with a circular opening for fixing optical fibers, power lines and signal lines, and is used for adjusting and fixing angles of a transmitting photoconductive antenna (4) and a receiving photoconductive antenna (5) in the horizontal direction and the vertical direction and adjusting the distance between the rear panel and an off-axis parabolic metal reflector group (8).
2. The probe structure according to claim 1, wherein the fixing support (3) comprises two L-shaped plates and two C-shaped clamps, the transmitting photoconductive antenna (4) and the receiving photoconductive antenna (5) are respectively arranged in the two C-shaped clamps, a plurality of threaded holes are arranged above the C-shaped clamps, a plurality of adjusting screws penetrate through the threaded holes to realize adjustment and fixation of the transmitting photoconductive antenna (4) and the receiving photoconductive antenna (5) in the front-back direction, waist-shaped holes are arranged on the side surfaces of the L-shaped plates, and screws penetrate through the waist-shaped holes and the threaded holes to realize adjustment and fixation of the height and the rotation angle of the C-shaped clamps in the vertical direction.
3. The probe structure according to claim 1, characterized in that the bottom plate (9) is connected with the L-shaped plate of the fixing bracket (3) through screws to adjust and fix the rotation angle of the fixing bracket (3) in the horizontal direction.
4. Probe structure according to claim 1, wherein the transmitting photoconductive antenna (4) and the receiving photoconductive antenna (5) have a uniform polarization direction.
5. The probe structure of claim 1, wherein the lower fixing plate (7) is fixed on the bottom plate (9) through screws, the upper fixing plate (6) is fixed on the protective shell (10) through screws, each fixing plate comprises a plurality of hollowed-out structures corresponding to the back screw holes of the two off-axis parabolic metal reflectors, and the rotation angle of the off-axis parabolic metal reflectors can be adjusted and fixed by adjusting the positions of the screws in the hollowed-out structures.
6. The probe structure according to claim 1, characterized in that the set of off-axis parabolic metal reflectors (8) comprises a first (11) and a second (12) off-axis parabolic metal reflector corresponding to the transmitting photoconductive antenna (4) and a third (13) and a fourth (14) off-axis parabolic metal reflector corresponding to the receiving photoconductive antenna (5), the first off-axis parabolic metal reflector (11) collimating the terahertz radiation emitted by the transmitting photoconductive antenna (4); the collimated terahertz radiation reaches the second off-axis parabolic metal reflector (12) to be converged, the converged terahertz radiation is reflected by an object and then reaches the third off-axis parabolic metal reflector (13), is collimated by the third off-axis parabolic metal reflector (13) and then reaches the fourth off-axis parabolic metal reflector (14), and finally is converged by the fourth off-axis parabolic metal reflector (14) and reaches the receiving photoconductive antenna (5).
7. Probe structure according to claim 1, wherein the transmitting photoconductive antenna (4) and the receiving photoconductive antenna (5) have an emission angle of 12.5 °.
8. Probe structure according to claim 6, wherein the distance from the center of the first off-axis parabolic metal mirror (11) to the center (4) of the transmitting photoconductive antenna is its focal length value and the distance from the center of the fourth off-axis parabolic metal mirror (14) to the center (5) of the receiving photoconductive antenna is its focal length value.
CN202110878251.XA 2021-07-30 2021-07-30 Miniaturized integral terahertz transmitting and receiving probe structure Pending CN114355464A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090314944A1 (en) * 2008-01-24 2009-12-24 Michael John Evans Terahertz investigative system and method
CN201662531U (en) * 2010-01-14 2010-12-01 首都师范大学 Small-sized Terahertz time-domain spectrograph
CN105738314A (en) * 2016-01-12 2016-07-06 浙江大学 Portable terahertz spectrum detection device and detection method
CN207751869U (en) * 2017-12-07 2018-08-21 深圳市华讯方舟太赫兹科技有限公司 A kind of device measured for terahertz time-domain spectroscopy
CN110145045A (en) * 2017-10-21 2019-08-20 山东建筑大学 A kind of limit energy-dissipation structure and its construction method
CN111337430A (en) * 2020-03-13 2020-06-26 华太极光光电技术有限公司 Transmission type terahertz probe adjusting device and positioning method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090314944A1 (en) * 2008-01-24 2009-12-24 Michael John Evans Terahertz investigative system and method
CN201662531U (en) * 2010-01-14 2010-12-01 首都师范大学 Small-sized Terahertz time-domain spectrograph
CN105738314A (en) * 2016-01-12 2016-07-06 浙江大学 Portable terahertz spectrum detection device and detection method
CN110145045A (en) * 2017-10-21 2019-08-20 山东建筑大学 A kind of limit energy-dissipation structure and its construction method
CN207751869U (en) * 2017-12-07 2018-08-21 深圳市华讯方舟太赫兹科技有限公司 A kind of device measured for terahertz time-domain spectroscopy
CN111337430A (en) * 2020-03-13 2020-06-26 华太极光光电技术有限公司 Transmission type terahertz probe adjusting device and positioning method

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