CN114265165A - MEMS actuation system - Google Patents

Abstract

The invention discloses a multi-axis MEMS component. The multi-axis MEMS assembly includes a micro-electromechanical systems (MEMS) actuator configured to provide three-axis linear movement and an optoelectronic device connected to the MEMS actuator. Wherein the micro-electro-mechanical system (MEMS) actuator comprises: an in-plane MEMS actuator and an out-of-plane MEMS actuator; the in-plane MEMS actuator includes an electromagnetic actuator portion.

Description

MEMS actuation system

This application claims the benefit of U.S. provisional application No. 62/736,940 filed on 26.9.2018, the contents of which are incorporated herein by reference.

Technical Field

The present disclosure relates generally to actuators and, more particularly, to miniaturized MEMS actuators configured for use within camera packages.

Background

As is well known in the art, actuators may be used to convert electronic signals into mechanical motion. In many applications, such as portable devices, imaging-related devices, telecommunication assemblies, and medical instruments, it may be beneficial to fit micro-actuators within these applications, which are small in size, low in power, and limited in cost.

Microelectromechanical Systems (MEMS) technology in its most general form can be defined as a technology of miniaturized mechanical and electromechanical elements fabricated using micromachining technology. The critical dimensions of MEMS devices can vary from well below 1 micron to several millimeters. In general, MEMS actuators are more compact than conventional actuators, and they consume less power.

Disclosure of Invention

In one embodiment, there is provided a multi-axis MEMS assembly comprising: a micro-electro-mechanical system (MEMS) actuator configured to provide three-axis linear movement and an optoelectronic device coupled to the MEMS actuator. Wherein the micro-electro-mechanical system (MEMS) actuator comprises: an in-plane MEMS actuator and an out-of-plane MEMS actuator; the in-plane MEMS actuator includes an electromagnetic actuator portion.

One or more of the following features may be included. The optoelectronic device may be connected to one or more of: an in-plane MEMS actuator; and an out-of-plane MEMS actuator. The in-plane MEMS actuator may be an image stabilization actuator. The in-plane MEMS actuator may be configured to provide X-axis linear movement and Y-axis linear movement. The in-plane MEMS actuator may be further configured to provide Z-axis rotational movement. The out-of-plane MEMS actuator may be an autofocus actuator. The out-of-plane MEMS actuator may be configured to provide Z-axis linear movement. The electromagnetic actuator portion may include: at least one magnetic component. The at least one magnetic component may be configured to enable in-plane displacement of the optoelectronic device. The at least one magnetic component may comprise a plurality of magnetic components. The plurality of magnetic assemblies may be configured to enable x-axis and/or y-axis displacement of the optoelectronic device.

In another embodiment, there is provided a multi-axis MEMS assembly, comprising: a micro-electro-mechanical system (MEMS) actuator configured to provide three-axis linear movement, the MEMS actuator comprising: an in-plane MEMS actuator and an out-of-plane MEMS actuator comprising an electromagnetic actuator portion; an optoelectronic device connected to the micro-electromechanical system (MEMS) actuator.

One or more of the following features may be included. The electromagnetic actuator portion may include: at least one magnetic component configured to enable in-plane displacement of the optoelectronic device. The at least one magnetic component may comprise a plurality of magnetic components. The plurality of magnetic components may be configured to enable x-axis and/or y-axis displacement of the optoelectronic device.

In another embodiment, there is provided a multi-axis MEMS assembly, comprising: a micro-electro-mechanical system (MEMS) actuator configured to provide multi-axis linear movement, the MEMS actuator comprising: an in-plane MEMS actuator comprising an electromagnetic actuator portion; and an optoelectronic device connected to the micro-electromechanical system (MEMS) actuator.

One or more of the following features may be included. The electromagnetic actuator portion may include: at least one magnetic component configured to enable in-plane displacement of the optoelectronic device. The at least one magnetic component may comprise a plurality of magnetic components. The plurality of magnetic components may be configured to enable x-axis and/or y-axis displacement of the optoelectronic device. The plurality of magnetic assemblies may also be configured to provide Z-axis rotational movement.

The details of one or more implementations are set forth in the accompanying drawings and the description below. Other features and advantages will become apparent from the description, the drawings, and the claims.

Drawings

FIG. 1 is a perspective view of a MEMS package according to various embodiments of the present disclosure;

figure 2A is a schematic diagram of an in-plane MEMS actuator with optoelectronic devices according to various embodiments of the present disclosure;

figure 2B is a perspective view of an in-plane MEMS actuator with optoelectronic devices according to various embodiments of the present disclosure;

FIG. 3 is a schematic diagram of an in-plane MEMS actuator according to various embodiments of the present disclosure;

FIG. 4 is a schematic diagram of a comb drive sector according to various embodiments of the present disclosure;

FIG. 5 is a schematic view of a comb tooth pair according to various embodiments of the present disclosure;

FIG. 6 is a schematic view of fingers of the comb tooth pair of FIG. 5, according to various embodiments of the present disclosure;

7A-7C are schematic diagrams of one embodiment of an out-of-plane MEMS actuator, according to various embodiments of the present disclosure; and

FIG. 8 is a schematic diagram of a MEMS package according to various embodiments of the present disclosure;

9-10 are schematic diagrams of electromagnetic MEMS actuators according to various embodiments of the present disclosure; and

FIG. 11 is a detailed view of a motion stage of the electromagnetic MEMS actuator of FIGS. 9-10 according to various embodiments of the present disclosure;

FIG. 12 is a detailed view of an electromagnetic actuator portion of the electromagnetic MEMS actuator of FIGS. 9-10 according to various embodiments of the present disclosure; and

fig. 13 is a cross-sectional view of the electromagnetic MEMS actuator of fig. 9-10 in accordance with various embodiments of the present disclosure.

Like reference symbols in the various drawings indicate like elements.

Detailed Description

System overview:

referring to fig. 1, a MEMS package 10 is shown in accordance with various aspects of the present disclosure. In this example, the MEMS package 10 is shown to include a printed circuit board 12, a multi-axis MEMS component 14, drive circuitry 16, electronics 18, a flex circuit 20, and electrical connectors 22. The multi-axis MEMS component 14 may include a micro-electromechanical systems (MEMS) actuator 24 (configured to provide three-axis linear movement) and an optoelectronic device 26 coupled to the MEMS actuator 24.

As will be discussed in more detail below, examples of micro-electro-mechanical systems (MEMS) actuators 24 may include, but are not limited to, in-plane MEMS actuators, out-of-plane MEMS actuators, and combinations of in-plane/out-of-plane MEMS actuators. For example, if the micro-electromechanical system (MEMS) actuator 24 is an in-plane MEMS actuator, the in-plane MEMS actuator may include an electrostatic comb drive actuation system (as will be discussed in more detail below). Additionally, if the micro-electro-mechanical system (MEMS) actuator 24 is an out-of-plane MEMS actuator, the out-of-plane MEMS actuator may comprise a piezoelectric actuator or an electrostatic actuation system. Further, if the micro-electro-mechanical systems (MEMS) actuator 24 is a hybrid in-plane/out-of-plane MEMS actuator, the combined in-plane/out-of-plane MEMS actuator may include an electrostatic comb drive actuation system and a piezoelectric actuation system.

As will be discussed in more detail below, examples of the optoelectronic device 26 may include, but are not limited to, an image sensor, a holder assembly, a UV filter, and/or a lens assembly. Examples of electronic components 18 may include, but are not limited to, various electronic or semiconductor components and devices. The flexible circuit 20 and/or the connector 22 may be configured to electrically connect the MEMS package 10 to, for example, a smart phone or a digital camera (represented as superordinate item 28).

As will be discussed in more detail below, the micro-electromechanical system (MEMS) actuator 24 may be sized according to the recess of the printed circuit board 12 so that it may fit therein. The depth of this recess within the printed circuit board 12 may vary depending on the particular embodiment and the physical dimensions of the micro-electromechanical system (MEMS) actuator 24.

In some embodiments, some elements of the MEMS package 10 may be connected together using various epoxies/adhesives. For example, the outer frame of the micro-electromechanical system (MEMS) actuator 24 may include contact pads, which may correspond to similar contact pads on the printed circuit board 12.

Referring also to the multi-axis MEMS assembly 14 shown in fig. 2A, it may include an optoelectronic device 26 connected to a micro-electromechanical system (MEMS) actuator 24. As described above, examples of micro-electro-mechanical systems (MEMS) actuators 24 may include, but are not limited to, in-plane MEMS actuators, out-of-plane MEMS actuators, and combinations of in-plane/out-of-plane MEMS actuators.

When the micro-electro-mechanical system (MEMS) actuator 24 is configured to provide in-plane actuation functionality, it may include an outer frame 30, a plurality of conductive flexures 32, a MEMS actuation core 34 for attaching a load (e.g., a device), and an attached optoelectronic device 26. The optoelectronic device 26 may be connected to a micro-electromechanical system (MEMS) actuator core 34 of the MEMS actuator 24 by epoxy (or various other adhesives/materials and/or bonding methods).

Referring also to fig. 2B, the plurality of electrically conductive flexures 32 of the micro-electromechanical system (MEMS) actuator 24 may bend and yield upward to achieve a desired level of flexibility. In the illustrated embodiment, the plurality of electrically conductive flexures 32 may be attached at one end to a MEMS actuation core 34 (e.g., a moving portion of a micro-electromechanical system (MEMS) actuator 24) and at another end to an outer frame 30 (e.g., a fixed portion of the micro-electromechanical system (MEMS) actuator 24).

The plurality of electrically conductive flexures 32 may be electrically conductive wires that may extend above (e.g., an upper surface of) a plane of the micro-electromechanical systems (MEMS) actuator 24 and may electrically connect laterally separated elements of the micro-electromechanical systems (MEMS) actuator 24. For example, the plurality of electrically conductive flexures 32 may provide electrical signals from the optoelectronic device 26 and/or the MEMS actuation core 34 to the outer frame 30 of the microelectromechanical system (MEMS) actuator 24. As described above, the outer frame 30 of the micro-electromechanical systems (MEMS) actuator 24 may be secured to the circuit board 12 using an epoxy (or various other adhesive materials or devices).

Reference is also made to the top view of a micro-electromechanical system (MEMS) actuator 24 shown in fig. 3, in accordance with various embodiments of the present disclosure. The illustrated outer frame 30 includes (in this example) four frame assemblies (e.g., frame assembly 100A, frame assembly 100B, frame assembly 100C, frame assembly 100D) that are shown separated to illustrate further details.

The outer frame 30 of the micro-electro-mechanical system (MEMS) actuator 24 may include a plurality of contact pads (e.g., contact pads 102A on the frame assembly 100A, contact pads 102B on the frame assembly 100B, contact pads 102C on the frame assembly 100C, and contact pads 102D on the frame assembly 100D) that may be electrically connected to one end of the plurality of electrically conductive flexures 32. The provision of the bent-shaped conductive flexure 32 is for illustrative purposes only, and while one possible embodiment is illustrated, other configurations are possible and should be considered within the scope of the present disclosure.

The MEMS actuator core 34 may include a plurality of contact pads (e.g., contact pad 104A, contact pad 104B, contact pad 104C, contact pad 104D) that may be electrically connected to the other end of the plurality of conductive flexures 32. A portion of the contact pads (e.g., contact pad 104A, contact pad 104B, contact pad 104C, contact pad 104D) of the MEMS actuator core 34 may be electrically connected to the optoelectronic device 26 by wire bonding, silver paste, or eutectic sealing, thereby achieving an electrical connection of the optoelectronic device 26 to the outer frame 30.

The MEMS actuation core 34 may include one or more comb drive sectors (e.g., comb drive sector 106), which are actuation sectors disposed within a micro-electromechanical system (MEMS) actuator 24. Comb drive sectors (e.g., comb drive sectors 106) within the MEMS actuation core 34 can be disposed in the same plane and can be positioned orthogonal to each other to enable movement in two axes (e.g., X-axis and Y-axis). Thus, the substantially in-plane MEMS actuator (and in particular the MEMS actuation core 34) may be configured to provide both X-axis linear movement and Y-axis linear movement.

Although in this particular example, the MEMS actuator core 34 is shown to include four comb drive sectors, this is for illustration only and is not intended to limit the invention as other configurations are possible. For example, the number of comb drive sectors may be increased or decreased according to design criteria.

Although in this particular example, the four comb drive sectors are shown to be generally square in shape, this is for illustration only and is not intended to limit the invention as other configurations are possible. For example, the shape of the comb drive sectors may be varied to meet various design criteria.

Each comb drive sector (e.g., comb drive sector 106) within the MEMS actuation core 34 may include one or more moving portions and one or more fixed portions. As will be discussed in more detail below, the comb drive sectors (e.g., comb drive sectors 106) within the MEMS actuation core 34 may be connected to the perimeter 110 of the MEMS actuation core 34 (i.e., the portion of the MEMS actuation core 34 that includes the contact pads 104A, 104B, 104C, 104D) via a cantilever assembly (e.g., cantilever assembly 108), which is the portion of the MEMS actuation core 34 that may be connected to the optoelectronic device 26 to enable transfer of movement to the optoelectronic device 26.

Reference is also made to the top view of comb drive sector 106 shown in figure 4, in accordance with various embodiments of the present disclosure. Each comb drive sector (e.g., comb drive sector 106) can include one or more motion control cantilever assemblies (e.g., motion control cantilever assemblies 150A, 150B), a movable frame 152, a movable spine 154, a fixed frame 156, a fixed spine 158, and a cantilever assembly 108 configured to connect the movable frame 152 to the perimeter 110 of the MEMS actuation core 34, located outside of the comb drive sector 106. In this particular configuration, the motion control cantilever assemblies 150A, 150B may be configured to prevent Y-axis displacement between the moving frame 152/movable spine 154 and the fixed frame 156/fixed spine 158.

Comb drive sector 106 can include a movable member that includes a movable frame 152 and a plurality of movable ridges 154 that are generally orthogonal to movable frame 152. Comb drive sector 106 can also include a stationary member that includes a stationary frame 156 and a plurality of stationary ridges 158 that are generally orthogonal to stationary frame 156. The cantilever assembly 108 may be deformable in one direction (e.g., in response to Y-axis deflection loads) and rigid in another direction (e.g., in response to X-axis tension and compression loads), enabling the cantilever assembly 108 to absorb motion in the Y-axis but transmit motion in the X-axis.

Reference is also made to the detailed view of portion 160 of comb drive sector 106 shown in FIG. 5. The movable ridges 154A, 154B may include a plurality of discrete movable actuation fingers that are attached generally orthogonally to the movable ridges 154A, 154B. For example, the illustrated movable spine 154A includes movable actuation fingers 162A, and the illustrated movable spine 154B includes movable actuation fingers 162B.

Further, the fixed spine 158 may include a plurality of discrete fixed actuation fingers that are attached generally orthogonally to the fixed spine 158. For example, the illustrated fixed ridge 158 includes a fixed actuation finger 164A configured to engage and interact with a movable actuation finger 162A. Further, the illustrated fixed ridge 158 includes a fixed actuation finger 164B configured to engage and interact with a movable actuation finger 162B.

Accordingly, various numbers of actuation fingers may be associated with (i.e., connected to) the movable ridges (e.g., movable ridges 154A, 154B) and/or the fixed ridges (e.g., fixed ridge 158) of the comb drive sector 106. As described above, each comb drive sector (e.g., comb drive sector 106) can include two motion control cantilever assemblies 150A, 150B disposed separately on each side of comb drive sector 106. Each of the two motion control cantilever assemblies 150A, 150B may be configured to connect with the movable frame 152 and the fixed frame 156 because this configuration enables the movable actuation fingers 162A, 162B to be displaced in the X-axis (respectively) relative to the fixed actuation fingers 164A, 164B while preventing the movable actuation fingers 162A, 162B from being displaced in the Y-axis (respectively) and contacting the fixed actuation fingers 164A, 164B.

Although the illustrated actuation fingers 162A, 162B, 164A, 164B (or at least the central axes of the actuation fingers 162A, 162B, 164A, 164B) are generally parallel to each other and generally orthogonal to the respective ridges to which they are connected, this is for illustration only and is not intended to limit the invention as other configurations are possible. Further, in some embodiments, the actuation fingers 162A, 162B, 164A, 164B may have the same width throughout their length, and in other embodiments, the actuation fingers 162A, 162B, 164A, 164B may be tapered.

Further, in some embodiments, movable frame 152 may be displaced in the X-axis positive direction when a potential is applied between actuation finger 162A and actuation finger 164A, and movable frame 152 may be displaced in the X-axis negative direction when a potential is applied between actuation finger 162B and actuation finger 164B.

Reference is also made to the detailed view of portion 200 of comb drive sector 106 shown in fig. 6. The fixed ridge 158 may be generally parallel to the movable ridge 154B, wherein the actuating fingers 164B and the actuating fingers 162B may overlap within the region 202, wherein the width of the overlapping region 202 is typically in the range of 10-50 microns.

Although the overlap region 202 is described as being in the range of 10-50 microns, this is for illustration only and is not intended to limit the invention as other configurations are possible.

The overlap region 202 may represent a distance 204 between the actuation finger 162B and the actuation finger 164B, extending through by the end of the actuation finger 162B and overlapping the end of the actuation finger 164B. In some embodiments, actuation fingers 162B and actuation fingers 164B may be tapered such that their respective tips are narrower than their respective bases (i.e., where they attach to their ridges). As is known in the art, various tapers may be employed with respect to the actuating fingers 162B and 164B. In addition, the overlap of the actuation fingers 162B and 164B provided by the overlap region 202 may help ensure that there is sufficient initial actuation force when a potential is applied so that the MEMS actuation core 34 may move gradually and smoothly without any sudden jumps when changing the applied voltage. The heights of the actuation fingers 162B and 164B may be determined by various aspects of the MEMS fabrication process and various design criteria.

The lengths 206 of the actuation fingers 162B and the actuation fingers 164B, the size of the overlap region 202, the gaps between adjacent actuation fingers, and the taper angle of the actuation fingers incorporated into the various embodiments may be determined by various design criteria, application considerations, and manufacturability considerations, wherein these dimensions may be optimized to achieve the desired displacement with the available potential.

As shown in fig. 3 and described above, the MEMS actuation core 34 can include one or more comb drive sectors (e.g., comb drive sector 106), wherein the comb drive sectors (e.g., comb drive sector 106) within the MEMS actuation core 34 can be disposed in the same plane and can be positioned orthogonal to each other to enable movement in two axes (e.g., X-axis and Y-axis).

Specifically in this particular example, the illustrated MEMS actuation core 34 includes four comb drive sectors (e.g., comb drive sectors 106, 250, 252, 254). As described above, comb drive sector 106 is configured to effect movement along the X-axis while preventing movement along the Y-axis. Since comb drive sector 252 is similarly configured, comb drive sector 252 can effect movement along the X-axis while preventing movement along the Y-axis. Thus, if a signal providing positive X-axis movement is applied to comb drive sector 106 and a signal providing negative X-axis movement is applied to comb drive sector 252, actuator core 34 may be displaced in a clockwise direction. Conversely, if a signal providing a negative X-axis movement is applied to comb drive sector 106 and a signal providing a positive X-axis movement is applied to comb drive sector 252, actuator core 34 may be displaced in a counterclockwise direction.

In addition, comb drive sectors 250 and 254 (in this example) are both configured orthogonal to comb drive sectors 106 and 252. Thus, comb drive sectors 250 and 254 may be configured to effect movement along the Y axis while preventing movement along the X axis. Thus, if a signal providing positive Y-axis movement is applied to comb drive sector 250 and a signal providing negative Y-axis movement is applied to comb drive sector 254, the actuator core 34 may be displaced in a counterclockwise direction. Conversely, if a signal providing negative Y-axis movement is applied to comb drive sector 250 and a signal providing positive Y-axis movement is applied to comb drive sector 254, the actuator core 34 may be displaced in a clockwise direction.

Thus, the substantially in-plane MEMS actuator may be configured to provide Z-axis rotational movement (e.g., clockwise or counterclockwise) substantially (and specifically MEMS actuation core 34).

As described above, examples of micro-electro-mechanical systems (MEMS) actuators 24 may include, but are not limited to, in-plane MEMS actuators, out-of-plane MEMS actuators, and combined in-plane/out-of-plane MEMS actuators. For example and in the embodiment shown in fig. 1, the illustrated micro-electro-mechanical systems (MEMS) actuator 24 includes an in-plane MEMS actuator (e.g., in-plane MEMS actuator 256), an out-of-plane MEMS actuator (e.g., in-plane MEMS actuator 258), with fig. 3-6 illustrating one possible embodiment of the in-plane MEMS actuator 256. The optoelectronic device 26 may be connected with an in-plane MEMS actuator 256; and the in-plane MEMS actuator 256 may be coupled with the in-plane MEMS actuator 258.

Examples of in-plane MEMS actuators 256 may include, but are not limited to, image stabilization actuators. As is known in the art, image stabilization is a family of blur reduction techniques that are associated with motion of a camera or other imaging device during exposure. Typically, image stabilization compensates for translation and tilt (angular movement, equivalent to yaw and pitch) of the imaging device, but electronic image stabilization can also compensate for rotation. Image stabilization can be used in image stabilized binoculars and still in cameras, astronomical telescopes and smart phones. Still for cameras, camera shake may be a particular problem when the shutter is slow, or may be a particular problem with long focal length (tele or zoom) lenses. For video cameras, camera shake may cause inter-frame judder visible in recorded shots. In astronomy, the problem can be magnified to many variations in the atmosphere (which change the apparent position of the subject over time).

Examples of the out-of-plane MEMS actuator 258 may include, but are not limited to, an autofocus actuator. As is known in the art, autofocus systems may use sensors, control systems, and actuators to focus to an automatically (or manually) selected region. Autofocus methods may be distinguished by their type (e.g., active, passive, or hybrid). Autofocus systems may rely on one or more sensors to determine the correct focal distance, some of which may also rely on individual sensors while other autofocus systems may use an array of sensors.

One possible embodiment of an out-of-plane MEMS actuator 258 in various actuated/excited states is also shown with reference to fig. 7A-7C. The out-of-plane MEMS actuator 258 may include a frame 260 (which is configured to be stationary) and a moveable stage 262, wherein the out-of-plane MEMS actuator 258 may be configured to provide Z-axis linear movement. For example, the out-of-plane MEMS actuator 258 may include a multi-modal piezoelectric actuator that can selectively and controllably deform when an electrical charge is applied, wherein the polarity of the applied electrical charge can change the direction in which the multi-modal piezoelectric actuator (i.e., the out-of-plane MEMS actuator 258) deforms. Fig. 7A shows the out-of-plane MEMS actuator 258 in a natural position without an applied charge. Further, FIG. 7B shows the out-of-plane MEMS actuator 258 in an extended position (i.e., displaced in the direction of arrow 264) with a charge having a first polarity applied thereto, while FIG. 7C shows the out-of-plane MEMS actuator 258 in a retracted position (i.e., displaced in the direction of arrow 266) with a charge having an opposite polarity applied thereto.

As described above, the multi-modal piezoelectric actuator (i.e., out-of-plane MEMS actuator 258) may be deformed by the application of an electrical charge. To achieve this deformability, which allows Z-axis linear movement, the multi-modal piezoelectric actuator (i.e., out-of-plane MEMS actuator 258) may include a bending piezoelectric actuator.

As described above, the multi-modal piezoelectric actuator (i.e., out-of-plane MEMS actuator 258) may include a rigid frame member 260 (which is configured to be stationary) and a movable stage 262, which may be configured to be affixed to the in-plane MEMS. As described above, the optoelectronic device 26 may be connected to the in-plane MEMS actuator 256, and the in-plane MEMS actuator 256 may be connected to the out-of-plane MEMS actuator 258. Accordingly, when the out-of-plane MEMS actuator 258 is applied with a charge of a first polarity in the extended position (i.e., displaced in the direction of arrow 264) (as shown in fig. 7B), the optoelectronic device 26 can be displaced in the positive z-axis direction and toward the lens barrel assembly (e.g., lens barrel assembly 300, fig. 8). Or when the out-of-plane MEMS actuator 258 is applied with an opposite polarity charge in the retracted position (i.e., displaced in the direction of arrow 266) (as shown in fig. 7C), the optoelectronic device 26 can be displaced in the negative z-axis direction and away from the lens barrel assembly (e.g., lens barrel assembly 300, fig. 8). Accordingly, by displacing the photoelectric device 26 in the z-axis with respect to the lens barrel assembly (e.g., lens barrel assembly 300, fig. 8), an autofocus function can be achieved.

The multi-configuration piezoelectric actuator (i.e., out-of-plane MEMS actuator 258) may include at least one deformable piezoelectric portion (e.g., deformable piezoelectric portions 268, 270, 272, 274) configured to connect the movable stage 262 to the rigid frame assembly 260.

For example, in one particular embodiment, the multi-configuration piezoelectric actuator (i.e., the out-of-plane MEMS actuator 258) may include a rigid intermediate stage (e.g., rigid intermediate stages 276, 278). The first deformable piezoelectric portion (e.g., deformable piezoelectric portions 268, 270) can be configured to connect the rigid intermediate stage (e.g., rigid intermediate stages 276, 278) to the movable stage 262; and a second deformable piezoelectric portion (e.g., deformable piezoelectric portions 272, 274) may be configured to connect the rigid intermediate stage (e.g., rigid intermediate stages 276, 278) to the rigid frame assembly 260.

The Z-axis (i.e., out-of-plane) linear movement of the movable stage 262 of the out-of-plane MEMS actuator 258 may be due to deformation of the deformable piezoelectric portions (e.g., deformable piezoelectric portions 268, 270, 272, 274). The deformable piezoelectric portion may be formed of a piezoelectric material (e.g., PZT (lead zirconate titanate), zinc oxide, or other suitable material) that may be configured to deflect in response to an electrical signal. As is known in the art, a piezoelectric material is a special type of ceramic that expands or contracts when an electric field is applied, thereby generating motion and force.

Although the out-of-plane MEMS actuator 258 is described above as including a single movable stage (e.g., movable stage 262) that moves linearly in the Z-axis, this is for illustration only and is not intended to limit the invention, as other configurations are possible and are considered within the scope of the present disclosure. For example, the out-of-plane MEMS actuator 258 may be configured to include a plurality of movable stages. For example, if the rigid intermediate stages 276, 278 are configured to be separately controllable, additional degrees of freedom (e.g., dumping and/or tilting) may be achievable. For example and in such a configuration, displacing the intermediate stage 276 in an upward direction (i.e., in the direction of arrow 264) and displacing the intermediate stage 278 in a downward direction (i.e., in the direction of arrow 266) will cause the photovoltaic device 26 to rotate clockwise about the Y-axis; while displacing the intermediate stage 276 in a downward direction (i.e., in the direction of arrow 266) and displacing the intermediate stage 278 in an upward direction (i.e., in the direction of arrow 264) will cause the photovoltaic device 26 to rotate counterclockwise about the Y-axis. Additionally/alternatively, respective clockwise and counterclockwise rotation of the photovoltaic device 26 about the X-axis may be achieved via an additional/alternative intermediate stage.

An electromagnetic actuator:

although the in-plane MEMS actuator 256 is described above as being based on 100% MEMS, this is for illustrative purposes only and is not intended to limit the present invention, as other configurations are possible and are considered to be within the scope of the present disclosure. For example, as discussed below, the in-plane MEMS actuator 256 may be an electromagnetic actuator portion.

9-10, the in-plane MEMS actuator 256 may be configured as a "hybrid" actuator that may include an electromagnetic actuator portion (e.g., electromagnetic actuator portion 300) in addition to a MEMS "hybrid" portion (e.g., MEMS portion 302). The electromagnetic actuator portion 300 may include at least one magnetic component (e.g., magnetic components 304, 306, 308, 310). The number of magnetic components in the electromagnetic actuator portion 300 may vary according to various design criteria. For example, the number of magnetic assemblies in the electromagnetic actuator portion 300 may vary depending on the number of axes of linear movement required for the actuator in question.

As is known in the art, the strength of the magnetic field generated (and thus the strength of the magnetic force) may be varied by controlling the level of current applied to the magnetic assembly (e.g., magnetic assemblies 304, 306, 308, 310). Thus, by controlling such currents (e.g., intensity and/or direction), the amount of linear movement (e.g., relative to the x-axis and y-axis) as well as the amount of rotation (e.g., relative to the z-axis) may be controlled. When configured as such a "hybrid" actuator, the MEMS portion (e.g., MEMS actuator portion 302) of the "hybrid" actuator may be configured to provide general structural stability and integrity (e.g., by providing the functionality of various cantilever components, such as cantilever component 108) and electromagnetic fields.

As described above, the in-plane MEMS actuator 256 may be configured to provide one or more of X-axis linear movement, Y-axis linear movement, and Z-axis rotational movement. As described above, to achieve such movement via a purely MEMS-based actuator (e.g., as shown in fig. 3), four MEMS-based motion stages (e.g., comb drive sectors 106, 250, 252, 254) can be utilized, wherein drive sectors 250, 254 can be orthogonally positioned relative to drive sectors 106, 252.

To achieve such X-axis linear movement, Y-axis linear movement, and Z-axis rotational movement, various magnetic assemblies may be used, and thus, at least one magnetic assembly (e.g., one or more magnetic assemblies 304, 306, 308, 310) may be configured to displace the optoelectronic device 26 in-plane. For example, the electromagnetic actuator portion 300 may include four magnetic components (e.g., magnetic components 304, 306, 308, 310), wherein the magnetic components 306, 310 (and their respective poles) may be relatively orthogonal to the magnetic components 304,308 (and their respective poles). Thus, by controlling the current applied to the magnetic assembly (e.g., one or more of the magnetic assemblies 304, 306, 308, 310), the amount of linear movement (e.g., the amount of rotation relative to the x-axis and/or the y-axis and/or relative to the z-axis) can be controlled, thereby enabling linear displacement of the optoelectronic device 26 along the x-axis and/or the y-axis (and rotational displacement of the z-axis).

The MEMS portion 302 of the in-plane MEMS actuator 256 may include a plurality of motion stages (e.g., motion stages 312, 314, 316, 318) configured to interact with a plurality of magnetic components (e.g., magnetic components 304, 306, 308, 310) included in the electromagnetic actuator portion 300.

Specifically and in the embodiment of fig. 9-10, there is shown:

the motion stage 312 may be configured to interact with the magnetic assembly 304;

motion stage 314 may be configured to interact with magnetic assembly 306;

the motion stage 316 may be configured to interact with the magnetic assembly 308; and

the motion stage 318 may be configured to interact with the magnetic assembly 310.

Referring to the detailed view of the motion stage 312 of the MEMS portion 302 of the in-plane MEMS actuator 256 shown in FIG. 11, it is understood that this is for illustration only and may represent any motion stage.

The MEMS portion 302 of the in-plane MEMS actuator 256 may include: an electrical flexure (e.g., the electrically conductive flexure 32 of fig. 2A-2B); a motion control flexure (e.g., motion control cantilever assemblies 150A, 150B of fig. 4); a motion transfer flexure (e.g., the cantilever assembly 108 of FIG. 4); deposited (deposited) magnets having different polarization cross-sections (e.g., deposited magnetic structure 350); and (in this illustrative embodiment) a deposited or placed metal layer (e.g., deposited metal layer 352) positioned over the deposited or placed magnetic structure 350.

The polarized magnetic material/magnet (e.g., deposited magnetic structure 350) may be deposited (or glued) on each motion stage (e.g., motion stages 312, 314, 316, 318) of the MEMS portion 302 of the in-plane MEMS actuator 256. A layer of nickel/iron (e.g., a layer of deposited metal) 352 may be deposited (or glued) on the deposited magnetic structure 350, wherein each motion stage (e.g., motion stage 312 in this example) may include a deposited magnetic structure (e.g., deposited magnetic structure 350) that may be configured to have a different polarization to achieve the above-described movement along the X-axis, Y-axis, and/or Z-axis rotation.

Referring to fig. 12, a detailed view of the electromagnetic actuator portion 300 is shown, which (in the illustrated embodiment) is shown to include four magnetic assemblies (e.g., magnetic assemblies 304, 306, 308, 310). The electromagnetic actuator portion 300 may include a metal plate assembly 400 to which magnetic assemblies (e.g., magnetic assemblies 304, 306, 308, 310) are glued to the metal plate assembly 400. The magnetic component may be, for example, a winding coil or a printed coil. Coil winding wire (e.g., winding wire 402, 404, 406, 408) for magnetic components (e.g., magnetic components 304, 306, 308, 310, respectively) is electrically connected to printed circuit board 12.

Electromagnetic operation:

referring to FIG. 13, there is shown a cross-sectional view of an in-plane MEMS actuator 256, including an electromagnetic actuator portion 300 and a MEMS portion 302. The electromagnetic actuator portion 300 may include a metal plate assembly 400 and a plurality of magnetic assemblies (e.g., magnetic assembly 304 is shown therein). The MEMS portion 302 may include depositing a magnetic structure 350 and depositing a metal layer 352.

During operation of the in-plane MEMS actuator 256, the MEMS portion 302 generates a magnetic field 350 from the magnetic structure. Electrical current provided to the magnetic components (e.g., magnetic components 304, 306, 308, 310) of electromagnetic actuator portion 300 may generate magnetic field 450, which may interact with the magnetic material/magnet (e.g., deposited magnetic structure 350) in MEMS portion 302, resulting in the aforementioned X-axis movement, Y-axis movement, and/or Z-axis rotation of optoelectronic device 26 (due to magnetic components 304, 306, 308, 310 being securely held together by metal plate assembly 400).

Any heat generated by the magnetic components (e.g., magnetic components 304, 306, 308, 310) may be conducted downward (e.g., to the printed circuit board 12 through the metal plate assembly 400, which may act as a heat sink).

General purpose:

in general, various operations of the methods described herein may be implemented using, or may be attributed to, components or features of various systems and/or devices, as well as their respective components and subcomponents, described herein.

In some instances, the presence of expanded words and phrases such as "one or more," "at least," "but not limited to," or other like phrases is not to be construed as requiring or implying narrower instances in the absence of such expanded phrases.

In addition, the various embodiments set forth herein are described in terms of example block diagrams, flow charts and other illustrations. It will be apparent to those of ordinary skill in the art upon reading this document that the illustrated embodiments and their various alternatives can be practiced without limitation to the illustrated examples. For example, block diagrams and their accompanying description should not be construed as mandating a particular architecture or configuration.

While various embodiments of the present disclosure have been described above, it should be understood that they have been presented by way of example only, and not limitation, of the invention. Likewise, the various figures may depict example structures or other configurations for the present disclosure, as such is to aid in understanding the features and functions that may be included in the present disclosure. The present disclosure is not limited to the example structures or configurations shown, but rather, various alternative structures and configurations may be used to implement the desired features. Indeed, it will be apparent to one of ordinary skill in the art how to implement alternative functional, logical or physical partitions and configurations to achieve the desired features of the disclosure. Additionally, with regard to flow diagrams, operational descriptions, and method claims, the order in which the steps are presented herein should not be construed as an order in which the various embodiments are implemented to perform the recited functions in the same order, unless the context clearly dictates otherwise.

While the present disclosure has been described above in terms of various example embodiments and implementations, it should be appreciated that the various features, aspects, and functions described in one or more of the individual embodiments are not limited in applicability to the particular embodiment with which they are described, but instead may be applied, alone or in various combinations, to one or more of the other embodiments of the disclosure, whether or not such embodiments are described and whether or not such features are presented as being a part of a described embodiment. Thus, the breadth and scope of the present disclosure should not be limited by any of the above-described exemplary embodiments, and one of ordinary skill in the art will understand that various changes and modifications may be made to the foregoing description within the scope of the claims.

As will be appreciated by one skilled in the art, the present disclosure may be embodied as a method, system, or computer program product. Accordingly, the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment (including firmware, resident software, micro-code, etc.) or an embodiment combining software and hardware aspects that may all generally be referred to herein as a "circuit," module "or" system. Furthermore, the present disclosure may take the form of a computer program product on a computer-usable storage medium having computer-usable program code embodied in the medium.

Any suitable computer usable or computer readable medium may be utilized. The computer-usable or computer-readable medium may be, for example but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or a propagation medium. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a transmission media such as those supporting the Internet or an intranet, or a magnetic storage device, and the like. The computer-usable or computer-readable medium may also be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted, or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory. In the context of this document, a computer-usable or computer-readable medium may be any medium that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. The computer-usable medium may include a propagated data signal with the computer-usable program code embodied therewith, either in baseband or as part of a carrier wave. The computer usable program code may be transmitted using any appropriate medium, including but not limited to the Internet, wireline, optical fiber cable, RF, etc.

Computer program code for carrying out operations of the present disclosure may be written in an object oriented programming language such as Java, Smalltalk, C + +, or the like. However, the computer program code for carrying out operations of the present disclosure may also be written in conventional procedural programming languages, such as the "C" programming language or other programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer, partly on a remote computer or entirely on the remote computer or server. In the latter scenario, the remote computer may be connected to the user's computer through a local/wide area network/the Internet (e.g., network 18).

The present disclosure is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the disclosure. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer/special purpose computer/other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart and/or block diagram block or blocks.

The computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks.

The flowchart and block diagrams in the figures may illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems that perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used herein, the singular forms "a", "an" and "the" include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of all means or step plus function elements in the claims below are intended to include any structure, material, or act for performing the function in combination with other claimed elements as specifically claimed. The description of the present disclosure has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the disclosure in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the disclosure. The embodiments were chosen and described in order to best explain the principles of the disclosure and its practical applications, to thereby enable others skilled in the art to understand the disclosure for various embodiments with various modifications as are suited to the particular use contemplated.

A number of embodiments have been described. Having thus described the disclosure of the present application in detail and by reference to embodiments thereof, it will be apparent that modifications and variations are possible without departing from the scope of the disclosure defined in the appended claims.

Claims (20)

1. A multi-axis MEMS assembly comprising:

a micro-electro-mechanical system (MEMS) actuator configured to provide three-axis linear movement, the MEMS actuator comprising:

an in-plane MEMS actuator, and

an out-of-plane MEMS actuator; and

an optoelectronic device connected to the micro-electromechanical system (MEMS) actuator;

wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.

2. The multi-axis MEMS assembly of claim 1, wherein the optoelectronic device is connected to one or more of:

an in-plane MEMS actuator; and

an out-of-plane MEMS actuator.

3. The multi-axis MEMS assembly of claim 1, wherein the in-plane MEMS actuator is an image stabilization actuator.

4. The multi-axis MEMS assembly of claim 1, wherein the in-plane MEMS actuator is configured to provide X-axis linear movement and Y-axis linear movement.

5. The multi-axis MEMS assembly of claim 4, wherein the in-plane MEMS actuator is further configured to provide Z-axis rotational movement.

6. The multi-axis MEMS assembly of claim 1, wherein the out-of-plane MEMS actuator is an autofocus actuator.

7. The multi-axis MEMS assembly of claim 1, wherein the out-of-plane MEMS actuator is configured to provide Z-axis linear movement.

8. The multi-axis MEMS assembly of claim 1, wherein the electromagnetic actuator portion comprises: at least one magnetic component.

9. The multi-axis MEMS assembly of claim 8, wherein the at least one magnetic assembly is configured to enable in-plane displacement of the optoelectronic device.

10. The multi-axis MEMS assembly of claim 9, wherein the at least one magnetic assembly comprises a plurality of magnetic assemblies.

11. The multi-axis MEMS assembly of claim 10, wherein the plurality of magnetic assemblies are configured to enable x-axis and/or y-axis displacement of the optoelectronic device.

12. A multi-axis MEMS assembly comprising:

a micro-electro-mechanical system (MEMS) actuator configured to provide three-axis linear movement, the MEMS actuator comprising:

an in-plane MEMS actuator comprising an electromagnetic actuator portion, and

an out-of-plane MEMS actuator; and

an optoelectronic device connected to the micro-electromechanical system (MEMS) actuator.

13. The multi-axis MEMS assembly of claim 12, wherein the electromagnetic actuator portion comprises: at least one magnetic component configured to enable in-plane displacement of the optoelectronic device.

14. The multi-axis MEMS assembly of claim 13, wherein the at least one magnetic assembly comprises a plurality of magnetic assemblies.

15. The multi-axis MEMS assembly of claim 14, wherein the plurality of magnetic assemblies are configured to enable x-axis and/or y-axis displacement of the optoelectronic device.

16. A multi-axis MEMS assembly comprising:

a micro-electro-mechanical system (MEMS) actuator configured to provide three-axis linear movement, the MEMS actuator comprising:

an in-plane MEMS actuator comprising an electromagnetic actuator portion; and

an optoelectronic device connected to the micro-electromechanical system (MEMS) actuator.

17. The multi-axis MEMS assembly of claim 16 wherein the electromagnetic actuator portion comprises: at least one magnetic component configured to enable in-plane displacement of the optoelectronic device.

18. The multi-axis MEMS assembly of claim 17, wherein the at least one magnetic assembly comprises a plurality of magnetic assemblies.

19. The multi-axis MEMS assembly of claim 18, wherein the plurality of magnetic assemblies are configured to enable x-axis and/or y-axis displacement of the optoelectronic device.

20. The multi-axis MEMS assembly of claim 19, wherein the plurality of magnetic assemblies are further configured to provide Z-axis rotational movement.

Images