CN114049328B - 一种高精度微曲面复光束光学检测方法和系统 - Google Patents
一种高精度微曲面复光束光学检测方法和系统 Download PDFInfo
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- CN114049328B CN114049328B CN202111355660.8A CN202111355660A CN114049328B CN 114049328 B CN114049328 B CN 114049328B CN 202111355660 A CN202111355660 A CN 202111355660A CN 114049328 B CN114049328 B CN 114049328B
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- 238000001514 detection method Methods 0.000 title claims abstract description 29
- 230000003287 optical effect Effects 0.000 title claims abstract description 24
- 239000013598 vector Substances 0.000 claims abstract description 140
- 238000000034 method Methods 0.000 claims abstract description 69
- 230000008569 process Effects 0.000 claims abstract description 28
- 238000007781 pre-processing Methods 0.000 claims abstract description 23
- 238000012545 processing Methods 0.000 claims abstract description 17
- 238000010586 diagram Methods 0.000 claims abstract description 13
- 238000004364 calculation method Methods 0.000 claims description 15
- 230000002159 abnormal effect Effects 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 8
- 230000017105 transposition Effects 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 12
- 238000004458 analytical method Methods 0.000 description 6
- 238000000691 measurement method Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000009499 grossing Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/20—Image enhancement or restoration using local operators
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T5/00—Image enhancement or restoration
- G06T5/70—Denoising; Smoothing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10028—Range image; Depth image; 3D point clouds
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20024—Filtering details
- G06T2207/20032—Median filtering
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
光束反射图像张数 | 4 | 6 | 12 | 15 | 18 |
误差(%) | 22.55 | 17.87 | 3.60 | 1.80 | 0.58 |
平均运行时间(s) | 10.11 | 10.20 | 10.57 | 10.72 | 10.86 |
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CN202111355660.8A CN114049328B (zh) | 2021-11-16 | 2021-11-16 | 一种高精度微曲面复光束光学检测方法和系统 |
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CN202111355660.8A CN114049328B (zh) | 2021-11-16 | 2021-11-16 | 一种高精度微曲面复光束光学检测方法和系统 |
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CN114049328A CN114049328A (zh) | 2022-02-15 |
CN114049328B true CN114049328B (zh) | 2024-10-15 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103453849A (zh) * | 2013-07-18 | 2013-12-18 | 黑龙江科技大学 | 多光学传感器协同的复杂曲面零件三维测量方法与系统 |
CN110940295A (zh) * | 2019-11-29 | 2020-03-31 | 北京理工大学 | 基于激光散斑极限约束投影的高反射物体测量方法及系统 |
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CN105807579B (zh) * | 2014-12-31 | 2018-10-16 | 上海微电子装备(集团)股份有限公司 | 一种硅片和基板预对准测量装置和方法 |
DE102017125184A1 (de) * | 2017-10-27 | 2019-05-02 | Valeo Schalter Und Sensoren Gmbh | Freiformspiegel für eine Sendeeinrichtung einer optischen Erfassungsvorrichtung, Sendeeinrichtung, optische Erfassungsvorrichtung, Kraftfahrzeug und Verfahren |
CN113240603A (zh) * | 2020-12-28 | 2021-08-10 | 武汉纺织大学 | 基于点云数据的三维人体测量系统和测量方法 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103453849A (zh) * | 2013-07-18 | 2013-12-18 | 黑龙江科技大学 | 多光学传感器协同的复杂曲面零件三维测量方法与系统 |
CN110940295A (zh) * | 2019-11-29 | 2020-03-31 | 北京理工大学 | 基于激光散斑极限约束投影的高反射物体测量方法及系统 |
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