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CN114031376B - A kind of preparation method of high hardness, fine grain ZTA system composite phase ceramic material - Google Patents

A kind of preparation method of high hardness, fine grain ZTA system composite phase ceramic material Download PDF

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CN114031376B
CN114031376B CN202111596534.1A CN202111596534A CN114031376B CN 114031376 B CN114031376 B CN 114031376B CN 202111596534 A CN202111596534 A CN 202111596534A CN 114031376 B CN114031376 B CN 114031376B
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yttria
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李俊国
钟心宇
罗国强
蔡其旺
沈强
涂溶
张联盟
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Wuhan University of Technology WUT
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Abstract

本发明公开了一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,经过备料、原料处理、混合球磨、粉体干燥、过筛排胶、成型等步骤,最后在放电等离子烧结炉中对坯体进行烧结,在特定的烧结流程中,以特定的温度和压力环境下,快速对坯体进行烧结,获得高硬度、细晶粒ZTA体系复相陶瓷材料。本发明的制备方法制备得到的高硬度、细晶粒ZTA体系复相陶瓷材料颗粒紧密排列,晶粒分布均匀细小,没有明显的缺陷,平均粒径最小为0.4μm,具有良好的硬度、断裂韧性和弯曲强度,可用于制作陶瓷劈刀等高精尖领域,而且生产工艺简单,容易实现批量化生产,应用前景广阔。The invention discloses a preparation method of a high-hardness, fine-grained ZTA system multiphase ceramic material. After the steps of material preparation, raw material treatment, mixing ball milling, powder drying, sieving and debinding, and molding, the preparation method is finally carried out in a discharge plasma sintering furnace. The green body is sintered in a specific sintering process, and the green body is quickly sintered under a specific temperature and pressure environment to obtain a high-hardness, fine-grained ZTA system multi-phase ceramic material. The high-hardness, fine-grain ZTA system composite ceramic material particles prepared by the preparation method of the present invention are closely arranged, the grain distribution is uniform and fine, there is no obvious defect, the average particle size is at least 0.4 μm, and it has good hardness and fracture toughness. and bending strength, it can be used in high-precision fields such as ceramic choppers, and the production process is simple, easy to achieve mass production, and has broad application prospects.

Description

一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法A kind of preparation method of high hardness, fine grain ZTA system composite phase ceramic material

技术领域technical field

本发明属于复相陶瓷材料制备技术领域,具体地说,涉及一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法。The invention belongs to the technical field of preparation of composite ceramic materials, and in particular relates to a preparation method of a high-hardness, fine-grain ZTA system composite ceramic material.

背景技术Background technique

在半导体封装行业中,大部分低成本的中档封装与内存芯片的堆叠等封装工艺都离不开陶瓷劈刀,陶瓷劈刀是封装工艺中最主要的消耗品工具,其工作环境通常为加热、加压和施加超声振动,这对劈刀材料性能要求极高。目前,氧化铝陶瓷因其硬度大、比重高、晶粒细小、外表光洁度高、尺寸精度高等一系列优点被认为是制作劈刀的绝佳材料。In the semiconductor packaging industry, most low-cost mid-range packaging and memory chip stacking and other packaging processes are inseparable from ceramic rivets. Ceramic rivets are the most important consumable tools in the packaging process. The working environment is usually heated, Pressurization and application of ultrasonic vibrations place extremely high demands on the material properties of the riving knife. At present, alumina ceramics are considered to be excellent materials for making riving knives because of a series of advantages such as high hardness, high specific gravity, fine grains, high surface finish, and high dimensional accuracy.

但是从氧化铝陶瓷材料自身性质来讲,氧化铝熔点较高,离子键较强,导致质点扩散系数减小,较高的烧结温度将导致晶粒长大、相互堆积连接成片,从而使材料力学性能降低,气密性变差。目前在IC封装过程中逐渐使用采用硬度比金线更硬的铜线,铜线比金线更加的经济,但使用铜作为焊线时,焊接时需要使用更大的超声波能量,在焊接时劈刀端面会受到较大的剪切应力,结晶粒子较易脱落,这对陶瓷的弯曲强度、耐磨性及硬度等力学性能提出了更高的要求。However, from the perspective of the properties of the alumina ceramic material itself, the melting point of alumina is relatively high, and the ionic bond is strong, resulting in a decrease in the particle diffusion coefficient. The mechanical properties are reduced and the air tightness is deteriorated. At present, copper wires with a hardness harder than gold wires are gradually used in the IC packaging process. Copper wires are more economical than gold wires. However, when copper is used as a welding wire, greater ultrasonic energy is required during welding, which will cause cracks during welding. The end face of the knife will be subjected to a large shear stress, and the crystal particles are easy to fall off, which puts forward higher requirements for the mechanical properties of the ceramic such as bending strength, wear resistance and hardness.

目前的ZTA陶瓷制备工艺是在Al2O3粉体中加入ZrO2粉体,通过机械混合后造粒成型、随后高温烧成以及后期加工所得。这种制备方法虽工艺简单、成本低,但始终存在ZrO2粉体在Al2O3基体中分散不均并且团聚的问题,烧后基体中第二相分布不均、部分的主晶相颗粒异常长大等问题降低ZTA复相陶瓷的性能,烧结温度过高与保温时间过长都会导致晶粒粗大,影响陶瓷的性能。专利申请号201811435382.5的发明专利将坯体在1400℃~1500℃下常压烧结,然后在保护气体的气氛中在1300℃~1400℃下热等静压烧结,得到氧化铝陶瓷,采用两步烧结的烧结工艺再进行长时间保温,烧结样品所需时间增加。专利申请号为201810622814.7的发明专利利用热等静压的烧结方式制备陶瓷并能达到一定的性能但其烧结时间也长达数个小时,烧结时间过长,耗能较大。The current preparation process of ZTA ceramics is to add ZrO 2 powder to Al 2 O 3 powder, mix mechanically, granulate and shape, then fire at high temperature and post-process. Although this preparation method is simple in process and low in cost, it always has the problem of uneven dispersion and agglomeration of ZrO 2 powder in the Al 2 O 3 matrix, uneven distribution of the second phase in the matrix after firing, and some main crystal phase particles Problems such as abnormal growth will reduce the performance of ZTA composite ceramics. Excessive sintering temperature and long holding time will lead to coarse grains and affect the performance of ceramics. The invention patent of the patent application number 201811435382.5 sinters the green body under normal pressure at 1400°C-1500°C, and then hot isostatic pressing sintering at 1300°C-1400°C in an atmosphere of protective gas to obtain alumina ceramics, which adopts two-step sintering If the sintering process is carried out for a long time, the time required for sintering the sample will increase. The invention patent with the patent application number 201810622814.7 uses hot isostatic pressing to prepare ceramics and can achieve certain performance, but the sintering time is as long as several hours, which is too long and consumes a lot of energy.

发明内容Contents of the invention

本发明的目的在于提供一种烧结时间短,具有较高的断裂韧性、较好的耐磨性及较高的硬度与抗弯强度的高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法。The purpose of the present invention is to provide a method for preparing a high-hardness, fine-grain ZTA system composite ceramic material with short sintering time, high fracture toughness, good wear resistance, high hardness and flexural strength .

为了解决上述技术问题,本发明采用以下技术方案:In order to solve the above technical problems, the present invention adopts the following technical solutions:

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)将氧化铝粉体和氧化钇稳定氧化锆(3Y-ZrO2)粉体分别进行水浸、离心与干燥,完成原料预处理;1) The alumina powder and the yttria-stabilized zirconia (3Y-ZrO 2 ) powder are respectively immersed in water, centrifuged and dried to complete the raw material pretreatment;

2)将步骤1)预处理后的氧化铝粉体和氧化钇稳定氧化锆粉体中加入分散剂后进行球磨,真空干燥、过筛排胶、定型,得到胚体;2) adding a dispersant to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1), and then ball milling, vacuum drying, sieving, debinding, and shaping to obtain an embryo body;

3)将步骤2)所得坯体放置到放电等离子烧结炉中进行烧结,烧结分为烧结前期、烧结中期与烧结后期,具体烧结工艺为:3) Place the green body obtained in step 2) into a spark plasma sintering furnace for sintering. The sintering is divided into early sintering, mid-sintering and late sintering. The specific sintering process is:

烧结前期:温度从室温升温至600~800℃,升温速率为50~150℃/min,烧结压力为0MPa;Early stage of sintering: the temperature is raised from room temperature to 600-800°C, the heating rate is 50-150°C/min, and the sintering pressure is 0MPa;

烧结中期:温度在烧结前期温度的基础上继续升温至1170~1200℃,升温速率为100~200℃/min,该升温过程中,烧结压力逐渐上升至20~40MPa,升温完成后保温3~5min,保温的同时逐渐增压直至烧结压力达到45~60MPa;Middle stage of sintering: The temperature continues to rise to 1170-1200°C on the basis of the temperature in the early stage of sintering, and the heating rate is 100-200°C/min. During this heating process, the sintering pressure gradually rises to 20-40MPa, and the temperature is kept for 3-5 minutes after the temperature rise is completed. , while keeping warm, pressurize gradually until the sintering pressure reaches 45-60MPa;

烧结后期:烧结中期的保温结束后,将温度在烧结中期温度的基础上升温至1300~1400℃,升温速率为50~100℃/min,保温3~5min,该过程中,继续维持压力与烧结中期的压力一致;Late sintering stage: after the heat preservation in the middle stage of sintering is completed, the temperature is raised to 1300-1400°C based on the temperature in the middle stage of sintering. Medium-term pressure consistent;

烧结后期的保温结束后,烧结完成,停止加热和加压,随炉降至室温,即得所述高硬度、细晶粒ZTA体系复相陶瓷材料。After the heat preservation in the later stage of sintering is completed, the sintering is completed, the heating and pressure are stopped, and the furnace is lowered to room temperature, and the high-hardness, fine-grain ZTA system composite ceramic material is obtained.

按上述方案,所述步骤1)中,氧化铝粉体和氧化钇稳定氧化锆粉体的质量比为(60~90):(10~40)。According to the above scheme, in the step 1), the mass ratio of the alumina powder to the yttria-stabilized zirconia powder is (60-90): (10-40).

按上述方案,所述步骤1)中,氧化铝粉体纯度为99.99%以上,粒径30~80nm;氧化钇稳定氧化锆粉体纯度为99.99%以上,粒径30~80nm。According to the above scheme, in the step 1), the purity of the alumina powder is above 99.99%, and the particle size is 30-80nm; the purity of the yttria-stabilized zirconia powder is above 99.99%, and the particle size is 30-80nm.

按上述方案,所述步骤1)中,所述水浸、离心与真空干燥预处理的三个步骤依序重复进行2~3次。According to the above scheme, in the step 1), the three steps of water immersion, centrifugation and vacuum drying pretreatment are repeated 2 to 3 times in sequence.

按上述方案,所述步骤1)中,预处理工艺为:According to the above scheme, in the described step 1), the pretreatment process is:

水浸:氧化铝粉或氧化钇稳定氧化锆粉中加入自身质量3~5倍的去离子水,在300~800r/min的磁力搅拌下,搅拌40~80min,完成水浸;Water immersion: add deionized water 3 to 5 times its own mass to alumina powder or yttria stabilized zirconia powder, and stir for 40 to 80 minutes under magnetic stirring at 300 to 800 r/min to complete water immersion;

离心:将完成水浸后的氧化铝粉或氧化钇稳定氧化锆粉进行离心,离心速率5000~7000r/min,离心时间20~60min,完成离心;Centrifugation: Centrifuge the alumina powder or yttria-stabilized zirconia powder after water immersion, the centrifugal rate is 5000-7000r/min, the centrifugation time is 20-60min, and the centrifugation is completed;

真空干燥:将离心后的氧化铝粉或氧化钇稳定氧化锆粉在100~120℃的温度下,干燥12~24小时,完成真空干燥,获得预处理后的原料氧化铝粉或氧化钇稳定氧化锆粉。Vacuum drying: Dry the centrifuged alumina powder or yttria-stabilized zirconia powder at a temperature of 100-120°C for 12-24 hours to complete the vacuum drying to obtain the pretreated raw material alumina powder or yttria-stabilized zirconia powder Zirconium powder.

按上述方案,所述步骤2)中,分散剂加入量为原料氧化铝粉体和氧化钇稳定氧化锆粉体总质量的0.01~0.2%。According to the above scheme, in the step 2), the amount of the dispersant added is 0.01-0.2% of the total mass of the raw alumina powder and the yttria-stabilized zirconia powder.

按上述方案,所述步骤2)中,分散剂为Isobam104(异丁烯和马来酸酐的共聚物)。According to the above scheme, in the step 2), the dispersant is Isobam104 (copolymer of isobutylene and maleic anhydride).

按上述方案,所述步骤2)中,According to the above scheme, in the step 2),

球磨:球磨时间为12~24h,球磨速率为150~300r/min,获得均匀粉体;Ball milling: The ball milling time is 12-24 hours, the ball milling rate is 150-300r/min, and uniform powder is obtained;

真空干燥:干燥时间为12~24h,干燥温度为60~100℃;Vacuum drying: The drying time is 12-24 hours, and the drying temperature is 60-100°C;

过筛排胶:采用150目筛,排胶环境为真空环境,排胶温度为400~500℃,排胶时间为2~4h。Screening and debinding: 150-mesh sieve is used, the degumming environment is a vacuum environment, the degumming temperature is 400-500°C, and the degumming time is 2-4 hours.

按上述方案,所述步骤2)中,还包括球磨过程中加入氧化铬粉体,即将预处理后的氧化铝粉体和氧化钇稳定氧化锆粉体中加入分散剂和氧化铬粉体后进行球磨。According to the above scheme, the step 2) also includes adding chromium oxide powder in the ball milling process, that is, after adding dispersant and chromium oxide powder to the pretreated alumina powder and yttria-stabilized zirconia powder. ball milling.

优选地,氧化铬粉体纯度为99.99%以上,粒径为30~50nm。Preferably, the purity of the chromium oxide powder is above 99.99%, and the particle size is 30-50 nm.

优选地,所述氧化铬粉体加入量为原料氧化铝粉体和氧化钇稳定氧化锆粉体总质量的1~20%;优选为1-10%。Preferably, the added amount of the chromium oxide powder is 1-20% of the total mass of the raw alumina powder and the yttria-stabilized zirconia powder; preferably 1-10%.

本发明提供一种ZTA体系复相陶瓷材料的制备方法,采用放电等离子烧结技术进行烧结,并设计烧结前期、中期和后期三级烧结工艺,不同阶段烧结设计不同的温度和压力;其中:The invention provides a method for preparing a ZTA system multi-phase ceramic material, adopting spark plasma sintering technology for sintering, and designing a three-stage sintering process in the early stage, middle stage and late stage of sintering, and designing different temperatures and pressures for different stages of sintering; wherein:

一方面放电等离子烧结技术(SPS)具有更高的热效率,可以实现样品的快速加热与冷却,因此能够有效抑制升温过程中晶粒的生长,同时可通过施加外部轴向压力辅助烧结过程,能够实现材料的快速密实化,降低可能的成份挥发、抑制不良相变的发生。在对非导电的ZTA原料SPS烧结时,虽然烧结过程中没有放电与等离子有力的实验佐证,但是通过烧结工艺的设计,同样可以实现快速烧结的目的,在远低于其他烧结方式的时间内得到与其他烧结方式相同甚至更高的性能的烧结体。On the one hand, spark plasma sintering (SPS) has higher thermal efficiency and can realize rapid heating and cooling of samples, so it can effectively inhibit the growth of grains during the heating process, and at the same time, it can assist the sintering process by applying external axial pressure, which can realize The rapid densification of materials reduces the possible volatilization of components and inhibits the occurrence of undesirable phase transitions. When sintering the non-conductive ZTA raw material SPS, although there is no strong experimental evidence for discharge and plasma in the sintering process, the design of the sintering process can also achieve the purpose of rapid sintering, which can be obtained in a time much lower than other sintering methods. A sintered body with the same or even higher performance than other sintering methods.

另一方面在不同烧结阶段设计不同的压力和温度:烧结前期控制较低的温度、升温速率和轴向压力,保证粉体内部残留的水与有机物尽可能全部排出,有利于提升烧结体致密度;烧结中期首先快速升温至预期温度,烧结体发生明显的体积收缩,同时提升压力有助于阻碍晶界的移动从而达到控制晶粒尺寸的目的;随后进行保温,保温有利于控制温差,保温时提升压力至所需最大值,使得氧化锆中的相转变更加充分,并在烧结体中保持一定的内应力;烧结后期降低升温速率,继续提升温度至预期最大值并进行保温,控制烧结体各部位的温度均匀,保证烧结体中心与边缘的晶粒尺寸不存在较大差异,有利于整体性能的提升,同时维持压力与烧结中期压力最大值一致,可以有效控制烧结后期晶粒尺寸。On the other hand, design different pressures and temperatures in different sintering stages: control the lower temperature, heating rate and axial pressure in the early stage of sintering to ensure that the residual water and organic matter inside the powder are discharged as much as possible, which is conducive to improving the density of the sintered body ;In the mid-sintering stage, the temperature is raised rapidly to the expected temperature first, and the volume of the sintered body shrinks significantly. At the same time, increasing the pressure helps to hinder the movement of the grain boundary so as to achieve the purpose of controlling the grain size; Increase the pressure to the required maximum value to make the phase transformation in zirconia more sufficient and maintain a certain internal stress in the sintered body; reduce the heating rate in the later stage of sintering, continue to increase the temperature to the expected maximum value and keep it warm, and control the sintered body. The uniform temperature of the part ensures that there is no large difference in the grain size between the center and the edge of the sintered body, which is conducive to the improvement of the overall performance. At the same time, the pressure is kept consistent with the maximum pressure in the middle stage of sintering, which can effectively control the grain size in the later stage of sintering.

本发明具有以下有益效果:The present invention has the following beneficial effects:

1.本发明提供一种ZTA体系复相陶瓷材料的制备方法,以氧化铝粉体和氧化钇稳定氧化锆粉体为主体原料,原料前处理后进行球磨,真空干燥、过筛排胶、定型,所得胚体采用放电等离子烧结技术进行烧结,并设计烧结前期、中期和后期三级烧结工艺,不同阶段配合不同的温度和压力,实现温度和压力分阶段提升,更有利于烧结过程;本发明通过设计合理的烧结工艺,制备得到ZTA体系复相陶瓷材料以氧化锆增韧氧化铝(ZTA)为基体,颗粒紧密排列,晶粒分布均匀细小,没有明显的缺陷,平均粒径最小为0.4μm,具有良好的硬度、断裂韧性和弯曲强度,可用于制作陶瓷劈刀等高精尖领域,而且生产工艺简单,烧结温度低,容易实现批量化生产,应用前景广阔。1. The present invention provides a method for preparing a ZTA system multiphase ceramic material, using alumina powder and yttria-stabilized zirconia powder as the main raw materials, ball milling the raw materials after pretreatment, vacuum drying, sieving, debinding, and shaping , the obtained green body is sintered by spark plasma sintering technology, and a three-stage sintering process is designed in the early stage, middle stage and late stage of sintering, and different stages are matched with different temperatures and pressures, so that the temperature and pressure can be increased in stages, which is more conducive to the sintering process; the present invention By designing a reasonable sintering process, the ZTA system composite ceramic material is prepared with zirconia toughened alumina (ZTA) as the matrix, the particles are closely arranged, the grain distribution is uniform and fine, there is no obvious defect, and the average particle size is at least 0.4μm , has good hardness, fracture toughness and bending strength, and can be used in high-precision fields such as ceramic choppers, and the production process is simple, the sintering temperature is low, and it is easy to realize mass production, with broad application prospects.

2.本发明烧结时间短,半个小时内即可完成整个烧结过程,同时烧结温度低,最高1350℃即可得到高质量陶瓷体,可有效提升效率,降低能耗和成本。2. The sintering time of the present invention is short, and the entire sintering process can be completed within half an hour. At the same time, the sintering temperature is low, and a high-quality ceramic body can be obtained at a maximum of 1350°C, which can effectively improve efficiency and reduce energy consumption and cost.

3.进一步地,在球磨过程中加入氧化铬,氧化铬事先与原料混合后辅助烧结,使ZTA组织更加均匀和细化,Cr2O3与Al2O3同为刚玉结构可形成置换固溶体,尺寸大的Cr3+离子取代Al3+离子引起的晶格畸变导致局部压应力阻碍了裂纹通过晶界的渗透,同时这种压应力也将阻碍晶粒长大,晶粒细化,材料强化性能进一步提升。3. Further, chromium oxide is added in the ball milling process, and the chromium oxide is mixed with the raw materials in advance to assist sintering, so that the ZTA structure is more uniform and refined, and Cr 2 O 3 and Al 2 O 3 are both corundum structures, which can form a replacement solid solution. The lattice distortion caused by the replacement of Al 3+ ions by large Cr 3+ ions leads to local compressive stress that hinders the penetration of cracks through grain boundaries. At the same time, this compressive stress will also hinder grain growth, grain refinement, and material strengthening. Performance has been further improved.

附图说明Description of drawings

图1为本发明对比例2与实施例3所制备产品的显微结构图,其中(a)对应为对比例2所制备产品,(b)对应为实施例3所制备产品。Fig. 1 is the microstructure view of the products prepared in Comparative Example 2 and Example 3 of the present invention, wherein (a) corresponds to the product prepared in Comparative Example 2, and (b) corresponds to the product prepared in Example 3.

图2为本发明实施例与对比例所采用烧结工艺温度压强曲线,其中(a)对应为烧结工艺1的温度压强曲线,(b)对应为烧结工艺2的温度压强曲线,(c)对应为烧结工艺3的温度压强曲线。Fig. 2 is the temperature-pressure curve of the sintering process adopted by the embodiment of the present invention and the comparative example, wherein (a) corresponds to the temperature-pressure curve of the sintering process 1, (b) corresponds to the temperature-pressure curve of the sintering process 2, and (c) corresponds to The temperature and pressure curve of sintering process 3.

图3为本发明实施例3所制备产品的XRD图谱。Fig. 3 is the XRD spectrum of the product prepared in Example 3 of the present invention.

图4为本发明实施例1-5所制备产品对应的Cr2O3的掺杂量处于不同浓度是的晶面对应衍射峰的放大图。FIG. 4 is an enlarged view of diffraction peaks corresponding to crystal planes corresponding to products prepared in Examples 1-5 of the present invention with different doping amounts of Cr 2 O 3 at different concentrations.

图5为本发明实施例1-5所制备产品对应的Cr2O3的掺杂量处于不同浓度的显微结构图处于不同浓度的显微结构图。Fig. 5 is a microstructural diagram of different concentrations of Cr 2 O 3 doping corresponding to products prepared in Examples 1-5 of the present invention.

具体实施方式Detailed ways

下面结合附图对本发明做详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings.

以下实施例中,添加剂为氧化铬粉体,分散剂为Isobam104(异丁烯和马来酸酐的共聚物),所述氧化铝粉体纯度为99.99%,粒径30~80nm;所述氧化钇稳定氧化锆(3Y-ZrO2)粉体纯度为99.99%以上,粒径30~80nm;所述氧化铬粉体纯度为99.99%以上,粒径为30~50nm。In the following examples, the additive is chromium oxide powder, the dispersant is Isobam104 (copolymer of isobutylene and maleic anhydride), the purity of the alumina powder is 99.99%, and the particle size is 30-80nm; the yttrium oxide is stably oxidized The purity of the zirconium (3Y-ZrO 2 ) powder is above 99.99%, and the particle size is 30-80nm; the purity of the chromium oxide powder is above 99.99%, and the particle size is 30-50nm.

实施例1Example 1

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)原料预处理1) Raw material pretreatment

按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆(3Y-ZrO2)粉体,将氧化铝粉体与氧化钇稳定氧化锆粉体分别进行水浸、离心与干燥,获得处理后的原料铝粉体与原料锆粉体;完成对主要原料的处理,其中:Weigh the alumina powder and yttria-stabilized zirconia (3Y-ZrO 2 ) powder according to the mass ratio of 4:1, respectively immerse the alumina powder and yttria-stabilized zirconia powder in water, centrifuge and dry to obtain The processed raw material aluminum powder and raw material zirconium powder; complete the processing of the main raw materials, wherein:

水浸步骤:将氧化铝粉和氧化钇稳定氧化锆粉分别放入到不同的烧杯中,加入各自质量比4倍的去离子水,在500r/min的磁力搅拌下,搅拌60min,完成水浸;水浸步骤主要对氧化铝粉和氧化钇稳定氧化锆粉进行清洗。Water immersion step: Put alumina powder and yttria stabilized zirconia powder into different beakers, add deionized water with a mass ratio of 4 times each, and stir for 60 minutes under 500r/min magnetic stirring to complete water immersion The water immersion step mainly cleans the alumina powder and the yttria-stabilized zirconia powder.

离心:将完成水浸后的氧化铝粉和氧化钇稳定氧化锆粉分别进行离心,离心速率6000r/min,离心时间30min,完成离心;对水浸后的原料中的水分完全祛除干净。Centrifugation: The alumina powder and yttria-stabilized zirconia powder after water immersion are centrifuged separately, the centrifugal speed is 6000r/min, the centrifugation time is 30min, and the centrifugation is completed; the water in the raw materials after water immersion is completely removed.

真空干燥:将离心后的氧化铝粉和氧化钇稳定氧化锆粉分别放入真空干燥箱中,在105℃的温度下,干燥24小时,完成真空干燥,获得原料铝粉体与原料锆粉体;干燥后的粉体能够满足后续实际使用的需求。Vacuum drying: Put the centrifuged alumina powder and yttria-stabilized zirconia powder into a vacuum drying oven respectively, and dry them for 24 hours at a temperature of 105°C to complete the vacuum drying to obtain raw aluminum powder and raw zirconium powder ; The dried powder can meet the needs of subsequent practical use.

上述水浸、离心与真空干燥三个步骤依序重复进行2次,重复两次,使原料中不含其他杂质,使原料更为纯净。The above three steps of water immersion, centrifugation and vacuum drying are repeated twice in sequence, and repeated twice to make the raw material free from other impurities and make the raw material more pure.

2)混合球磨2) Mixed ball mill

混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。Mixed ball milling: add dispersant to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttria-stabilized zirconia powder 0.2% of the total mass of the powder, and then put the mixed powder into a ball mill jar, add zirconia ball milling balls 3 times the mass of the mixed powder, and carry out ball milling. The ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型3) Drying, sieving, debinding and shaping

粉体干燥:将步骤2)球磨后的均匀粉体放置到干燥机中,干燥环境为真空,具体的,干燥机采用真空干燥机,干燥时间为24h,干燥温度为80℃,获得干燥粉体。Powder drying: put the uniform powder after ball milling in step 2) into a dryer, and the drying environment is vacuum. Specifically, the dryer adopts a vacuum dryer with a drying time of 24 hours and a drying temperature of 80°C to obtain a dry powder .

过筛排胶:将干燥粉体过筛,采用150目筛,将过筛后的干燥粉体放入坩埚中送入排胶炉中进行排胶,排胶环境为真空环境,排胶温度为475℃,排胶时间为3h。Screening and debinding: sieve the dry powder, use a 150-mesh sieve, put the sieved dry powder into a crucible and send it to a debinding furnace for debinding. The debinding environment is a vacuum environment, and the debinding temperature is 475°C, the debinding time is 3h.

定型:将排胶后的干燥粉体注入石墨模具中进行定型,获得定型在石墨模具中的坯体。Shaping: Inject the degummed dry powder into a graphite mold for shaping, and obtain a green body shaped in the graphite mould.

4)烧结4) Sintering

将步骤3)所得坯体放置到放电等离子烧结炉中,密封放电等离子烧结炉并抽真空,此时,放电等离子烧结炉内的温度为室温,环境为真空,开始进行烧结,烧结工艺分为烧结前期、烧结中期和烧结后期,烧结工艺命名为烧结工艺3,具体为:Place the green body obtained in step 3) into a discharge plasma sintering furnace, seal the discharge plasma sintering furnace and vacuumize it. At this time, the temperature in the discharge plasma sintering furnace is room temperature and the environment is vacuum, and sintering begins. The sintering process is divided into sintering The sintering process is named as sintering process 3 in the early stage, mid-sintering stage and post-sintering stage, specifically:

烧结前期:对放电等离子烧结炉进行加热,将放电等离子烧结炉的温度从室温升温至700℃,升温速率为100℃/min,该过程中,烧结压力为0Mpa。Early stage of sintering: heat the spark plasma sintering furnace, raise the temperature of the spark plasma sintering furnace from room temperature to 700°C, and the heating rate is 100°C/min. During this process, the sintering pressure is 0Mpa.

从室温升温至700℃,其升温速率不宜太快(100℃/min),在烧结前期坯体中残留的水与有机物都将以气体的形式排出,若是烧结升温速率过快则会导致水和有机物不能很好的汽化或者分解,随着继续升温这些气体将会残留在基体中,导致烧结体的致密程度下降,最终导致机械性能大幅下降,同时在烧结前期应当保持较低的轴向压力,在真空作用下坯体中的气体能够不断地排出,保持较低的轴向压力能够使得粉体内部的气体也能在烧结前期进行排出,若是在烧结前期就施加较大的压力,则粉体中心产生的气体会由于轴向压力造成的毛细通道堵塞而无法很好的排出。From room temperature to 700°C, the heating rate should not be too fast (100°C/min). The water and organic matter remaining in the green body in the early stage of sintering will be discharged in the form of gas. If the sintering heating rate is too fast, it will cause water and The organic matter cannot be vaporized or decomposed well. As the temperature continues to rise, these gases will remain in the matrix, resulting in a decrease in the compactness of the sintered body, which will eventually lead to a significant decline in mechanical properties. At the same time, a low axial pressure should be maintained in the early stage of sintering. The gas in the green body can be continuously discharged under the action of vacuum, and the gas inside the powder can also be discharged in the early stage of sintering by maintaining a low axial pressure. If a large pressure is applied in the early stage of sintering, the powder The gas generated in the center will not be able to escape well due to the blockage of the capillary channel caused by the axial pressure.

烧结中期:将放电等离子烧结炉的温度从700℃升温至1170℃,升温速率为150℃/min,该升温过程中,烧结压力逐渐上升至37.5MPa,升温完成后中温保温3min,中温保温的同时逐渐增压直至烧结压力达到50MPa。Mid-sintering stage: raise the temperature of the spark plasma sintering furnace from 700°C to 1170°C at a heating rate of 150°C/min. During the heating process, the sintering pressure gradually rises to 37.5MPa. Increase the pressure gradually until the sintering pressure reaches 50MPa.

从700℃升温至1170℃并且在1170℃进行3min保温,1170℃为3Y-ZrO2中单斜相(m-ZrO2)向四方相(t-ZrO2)转变的相变温度,在这温度下烧结体发生明显的体积收缩,此时的烧结速率提升为(150℃/min)升温至1170℃后保温3min是为了控制模具内外的温差,由于放电等离子烧结非导电粉体时主要是通过加热石墨模具对坯体进行升温,由于其升温速率很快,所以保持烧结区域温度的均匀非常重要,同时随着温度升高坯体中晶粒开始长大,此时压力由700℃的0MPa上升至37.5MPa(1.2T),处于该压力下有助于阻碍晶界的移动从而达到控制晶粒尺寸的目的,1170℃保温3min时压力从37.5MPa(1.2T)上升至烧结压力50MPa(1.6T),此时的保温与加压都将使得氧化锆中的相转变更加充分,并且使得在烧结体中保持一定的内应力。Raise the temperature from 700°C to 1170°C and hold at 1170°C for 3 minutes. 1170°C is the phase transition temperature from monoclinic phase (m-ZrO 2 ) to tetragonal phase (t-ZrO 2 ) in 3Y-ZrO 2 , at this temperature The lower sintered body has obvious volume shrinkage. At this time, the sintering rate is increased to (150°C/min) and the temperature is raised to 1170°C and then kept for 3 minutes. The graphite mold heats up the green body. Because of its fast heating rate, it is very important to keep the temperature uniform in the sintering area. At the same time, as the temperature rises, the grains in the green body begin to grow. At this time, the pressure rises from 0 MPa at 700°C to 37.5MPa (1.2T), at this pressure helps to hinder the movement of the grain boundary to achieve the purpose of controlling the grain size, the pressure rises from 37.5MPa (1.2T) to the sintering pressure of 50MPa (1.6T) when the temperature is kept at 1170°C for 3 minutes , the heat preservation and pressurization at this time will make the phase transformation in the zirconia more sufficient, and keep a certain internal stress in the sintered body.

烧结后期:中温保温结束后,将放电等离子烧结炉的温度从1170℃升温至1350℃,升温速率为60℃/min,高温保温3min,该过程中,烧结压力保持为50MPa。Later stage of sintering: After the medium temperature holding, the temperature of the spark plasma sintering furnace was raised from 1170°C to 1350°C at a heating rate of 60°C/min, and the high temperature was held for 3 minutes. During this process, the sintering pressure was kept at 50MPa.

1170℃升温至1350℃后保温3min,此时升温速率减慢(60℃/min),减慢升温速率与保温均是为了控制烧结体各部位的温度均匀,1350℃下若是升温太快将会导致烧结体中心与边缘的晶粒尺寸出现较大的差异,导致烧结体不同区域的性能也不同,最终使复相陶瓷的总体性能下降,温度升高晶粒继续长大,在1170℃就达到烧结压力50MPa(1.6T),在之后的升温与保温过程同时保持烧结压力,有效的控制烧结后期晶粒尺寸。Heat from 1170°C to 1350°C and keep warm for 3 minutes. At this time, the heating rate is slowed down (60°C/min). The purpose of slowing down the heating rate and keeping warm is to control the temperature uniformity of each part of the sintered body. As a result, there is a large difference in the grain size between the center and the edge of the sintered body, and the performance of different regions of the sintered body is also different, which eventually reduces the overall performance of the composite ceramics. The grains continue to grow as the temperature rises, reaching The sintering pressure is 50MPa (1.6T), and the sintering pressure is maintained at the same time during the subsequent heating and holding processes to effectively control the grain size in the later stage of sintering.

烧结完成,高温保温结束后,停止对放电等离子烧结炉的加热,并同时停止加压,随放电等离子烧结炉的炉温降温至室温后,取出成品,获得所述高硬度、细晶粒ZTA体系复相陶瓷材料。After the sintering is completed and the high-temperature insulation is completed, stop the heating of the discharge plasma sintering furnace and stop the pressure at the same time. After the furnace temperature of the discharge plasma sintering furnace cools down to room temperature, the finished product is taken out to obtain the high-hardness, fine-grained ZTA system Composite ceramic materials.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,具体结果见表1。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area Structural analysis, the specific results are shown in Table 1.

从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为1.53%,样品密度为4.24g/cm3,维氏硬度为18.27GPa,断裂韧性为5.32MPa.m1/2,抗弯强度为629.01MPa氧化铝平均晶粒尺寸为分布在0.64±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.30±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。It can be seen from Table 1 that the obtained high-hardness, fine-grained ZTA system composite ceramic material has a porosity of 1.53%, a sample density of 4.24g/cm 3 , a Vickers hardness of 18.27GPa, and a fracture toughness of 5.32MPa.m 1/2 , the flexural strength is 629.01MPa, the average grain size of alumina is distributed in the range of 0.64±0.1μm, and the average grain size of zirconia is distributed in the range of 0.30±0.1μm, the X-ray diffraction of ZTA composite ceramic material samples According to the test, it can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

实施例2Example 2

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂氧化铬粉体添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的1%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, and the added mass of the additive chromia powder is 1% of the total mass of the alumina powder and yttria-stabilized zirconia powder, then put the mixed powder into a ball mill jar, and add the mixed powder Three times the mass of zirconia ball milling balls were used for ball milling, the ball milling time was 12 hours, and the ball milling rate was 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:具体操作同实施例1。4) sintering: the specific operation is the same as in Example 1.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为1.17%,样品密度为4.26g/cm3,维氏硬度为18.30GPa,断裂韧性为5.64MPa.m1/2,抗弯强度为801.01MPa,氧化铝平均晶粒尺寸为分布在0.85±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.28±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the porosity of the high-hardness, fine-grained ZTA system composite ceramic material is 1.17%, the sample density is 4.26g/cm 3 , the Vickers hardness is 18.30GPa, and the fracture toughness is 5.64MPa.m 1/2 , the flexural strength is 801.01MPa, the average grain size of alumina is distributed within the range of 0.85±0.1μm, and the average grain size of zirconia is distributed within the range of 0.28±0.1μm. For ZTA composite ceramic material samples The X-ray diffraction test is carried out, and it can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

实施例3Example 3

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的5%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, the mass of the additive added is 5% of the total mass of the alumina powder and yttria stabilized zirconia powder, then the mixed powder is put into a ball mill jar, and 3 times the mass of the mixed powder is added Zirconia ball milling balls are used for ball milling, the ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:具体操作同实施例1。4) sintering: the specific operation is the same as in Example 1.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为0.48%,样品密度为4.25g/cm3,维氏硬度为20.18GPa,断裂韧性为6.37MPa.m1/2,抗弯强度为666.60MPa,氧化铝平均晶粒尺寸为分布在0.4±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.20±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相,本实施例制备的产品XRD图谱如图3所示。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the obtained high-hardness, fine-grained ZTA system composite ceramic material has a porosity of 0.48%, a sample density of 4.25g/cm 3 , a Vickers hardness of 20.18GPa, and a fracture toughness of 6.37MPa.m 1/2 , the flexural strength is 666.60MPa, the average grain size of alumina is distributed in the range of 0.4±0.1μm, and the average grain size of zirconia is distributed in the range of 0.20±0.1μm. For ZTA composite ceramic material samples Carrying out X-ray diffraction test, it can be seen from the XRD diffraction peaks that the zirconia in the sample is basically a tetragonal phase, and the XRD pattern of the product prepared in this embodiment is shown in Figure 3 .

实施例4Example 4

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的10%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, the mass of the additive added is 10% of the total mass of the alumina powder and yttria stabilized zirconia powder, then the mixed powder is put into a ball mill jar, and 3 times the mass of the mixed powder is added Zirconia ball milling balls are used for ball milling, the ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:具体操作同实施例1。4) sintering: the specific operation is the same as in Example 1.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为0.74%,样品密度为4.28g/cm3,维氏硬度为19.02GPa,断裂韧性为5.54MPa.m1/2,抗弯强度为795.84MPa,氧化铝平均晶粒尺寸为分布在0.58±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.24±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the obtained high-hardness, fine-grained ZTA system composite ceramic material has a porosity of 0.74%, a sample density of 4.28g/cm 3 , a Vickers hardness of 19.02GPa, and a fracture toughness of 5.54MPa.m 1/2 , the flexural strength is 795.84MPa, the average grain size of alumina is distributed within the range of 0.58±0.1μm, and the average grain size of zirconia is distributed within the range of 0.24±0.1μm. For ZTA composite ceramic material samples The X-ray diffraction test is carried out, and it can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

实施例5Example 5

提供一种高硬度、细晶粒ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A method for preparing a high-hardness, fine-grained ZTA system composite ceramic material is provided, comprising the following steps:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的20%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, the mass of the additive added is 20% of the total mass of the alumina powder and yttria stabilized zirconia powder, then the mixed powder is put into a ball mill jar, and 3 times the mass of the mixed powder is added Zirconia ball milling balls are used for ball milling, the ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:具体操作同实施例1。4) sintering: the specific operation is the same as in Example 1.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为0.50%,样品密度为4.29g/cm3,维氏硬度为18.53GPa,断裂韧性为4.79MPa.m1/2,抗弯强度为537.69MPa,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the obtained high-hardness, fine-grained ZTA system composite ceramic material has a porosity of 0.50%, a sample density of 4.29g/cm 3 , a Vickers hardness of 18.53GPa, and a fracture toughness of 4.79MPa.m 1/2 , and the flexural strength is 537.69MPa. The X-ray diffraction test is carried out on the ZTA composite ceramic material sample. It can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

对比例1Comparative example 1

提供一种ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A preparation method of a ZTA system composite ceramic material is provided, comprising the steps of:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆(3Y-ZrO2)粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia (3Y-ZrO 2 ) powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的5%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, the mass of the additive added is 5% of the total mass of the alumina powder and yttria stabilized zirconia powder, then the mixed powder is put into a ball mill jar, and 3 times the mass of the mixed powder is added Zirconia ball milling balls are used for ball milling, the ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:将步骤3)所得坯体放置到放电等离子烧结炉中,密封放电等离子烧结炉并抽真空,此时,放电等离子烧结炉内的温度为室温,环境为真空,开始进行烧结,烧结工艺命名为烧结工艺1。4) Sintering: Place the green body obtained in step 3) into a discharge plasma sintering furnace, seal the discharge plasma sintering furnace and vacuumize it. At this time, the temperature in the discharge plasma sintering furnace is room temperature and the environment is vacuum, and sintering starts. The process is named sintering process 1.

具体为:对放电等离子烧结炉进行加热,将放电等离子烧结炉的温度从室温升温至700℃,升温速率为100℃/min,然后升温至1350℃,升温速率为130℃/min,压力伴随着升温过程线性增加,升温1350℃时加压至烧结压力30MPa,最后保温、保压3min。Specifically: heat the spark plasma sintering furnace, raise the temperature of the spark plasma sintering furnace from room temperature to 700°C, the heating rate is 100°C/min, and then raise the temperature to 1350°C, the heating rate is 130°C/min, the pressure is accompanied by The heating process increases linearly. When the temperature rises to 1350°C, pressurize to a sintering pressure of 30MPa, and finally hold the heat for 3 minutes.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为1.17%,样品密度为4.20g/cm3,维氏硬度为20.04GPa,断裂韧性为5.93MPa.m1/2,抗弯强度为473.91MPa,氧化铝平均晶粒尺寸为分布在0.82±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.37±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the porosity of the obtained high-hardness, fine-grained ZTA system composite ceramic material is 1.17%, the sample density is 4.20g/cm 3 , the Vickers hardness is 20.04GPa, and the fracture toughness is 5.93MPa.m 1/2 , the flexural strength is 473.91MPa, the average grain size of alumina is distributed in the range of 0.82±0.1μm, and the average grain size of zirconia is distributed in the range of 0.37±0.1μm. For ZTA composite ceramic material samples The X-ray diffraction test is carried out, and it can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

对比例2Comparative example 2

提供一种ZTA体系复相陶瓷材料的制备方法,包括如下步骤:A preparation method of a ZTA system composite ceramic material is provided, comprising the steps of:

1)原料预处理:按质量比4:1称取氧化铝粉体与氧化钇稳定氧化锆粉体,预处理具体操作同实施例1。1) Raw material pretreatment: weigh alumina powder and yttria-stabilized zirconia powder according to the mass ratio of 4:1, and the specific operation of pretreatment is the same as that in Example 1.

2)混合球磨:将步骤1)预处理后的氧化铝粉体与氧化钇稳定氧化锆粉体中加入分散剂和添加剂混合成混合粉末,其中分散剂添加质量为原料氧化铝粉体与氧化钇稳定氧化锆粉体总质量的0.2%,添加剂添加质量为氧化铝粉体与氧化钇稳定氧化锆粉体总质量的5%,再将混合粉末放入球磨罐中,加入混合粉末3倍质量的氧化锆球磨球,进行球磨,球磨时间为12h,球磨速率为300r/min。获得均匀粉体。2) Mixing ball milling: add dispersant and additives to the pretreated alumina powder and yttria-stabilized zirconia powder in step 1) to form a mixed powder, wherein the added mass of dispersant is the raw material alumina powder and yttrium oxide 0.2% of the total mass of the stabilized zirconia powder, the mass of the additive added is 5% of the total mass of the alumina powder and yttria stabilized zirconia powder, then the mixed powder is put into a ball mill jar, and 3 times the mass of the mixed powder is added Zirconia ball milling balls are used for ball milling, the ball milling time is 12 hours, and the ball milling rate is 300r/min. Obtain a uniform powder.

3)干燥、过筛排胶和定型:具体操作同实施例1。3) Drying, sieving and debinding and shaping: the specific operation is the same as in Example 1.

4)烧结:将步骤3)所得坯体放置到放电等离子烧结炉中,密封放电等离子烧结炉并抽真空,此时,放电等离子烧结炉内的温度为室温,环境为真空,开始进行烧结,烧结工艺命名为烧结工艺2。4) Sintering: Place the green body obtained in step 3) into a discharge plasma sintering furnace, seal the discharge plasma sintering furnace and vacuumize it. At this time, the temperature in the discharge plasma sintering furnace is room temperature and the environment is vacuum, and sintering starts. The process is named sintering process 2.

具体为:对放电等离子烧结炉进行加热,将放电等离子烧结炉的温度从室温升温至700℃,升温速率为100℃/min,然后升温至1350℃,升温速率为130℃/min,压力伴随着升温过程线性增加,升温1350℃时加压至烧结压力50MPa,最后保温、保压3min。Specifically: heat the spark plasma sintering furnace, raise the temperature of the spark plasma sintering furnace from room temperature to 700°C, the heating rate is 100°C/min, and then raise the temperature to 1350°C, the heating rate is 130°C/min, the pressure is accompanied by The heating process increases linearly. When the temperature rises to 1350 ° C, the pressure is increased to 50 MPa for sintering pressure, and finally the heat preservation and pressure holding are carried out for 3 minutes.

将获得所述高硬度、细晶粒ZTA体系复相陶瓷材料表面进行清理抛光进行硬度测试,并进行切割取得矩形样品进行抗弯强度测试,XRD物相分析,对区域进行场发射扫描电镜显微结构分析,从表1可知所得该高硬度、细晶粒ZTA体系复相陶瓷材料孔隙率为1.07%,样品密度为4.25g/cm3,维氏硬度为18.32GPa,断裂韧性为4.73MPa.m1/2,抗弯强度为542.72MPa,氧化铝平均晶粒尺寸为分布在0.49±0.1μm范围内,氧化锆平均晶粒尺寸为分布在0.23±0.1μm范围内,对ZTA复相陶瓷材料样品进行X射线衍射测试,由XRD衍射峰可知,样品中氧化锆基本为四方相。Clean and polish the surface of the obtained high-hardness, fine-grained ZTA system composite ceramic material for hardness testing, and cut and obtain rectangular samples for flexural strength testing, XRD phase analysis, and field emission scanning electron microscopy for the area From the structural analysis, it can be seen from Table 1 that the porosity of the high-hardness, fine-grained ZTA system composite ceramic material is 1.07%, the sample density is 4.25g/cm 3 , the Vickers hardness is 18.32GPa, and the fracture toughness is 4.73MPa.m 1/2 , the flexural strength is 542.72MPa, the average grain size of alumina is distributed in the range of 0.49±0.1μm, and the average grain size of zirconia is distributed in the range of 0.23±0.1μm. For ZTA composite ceramic material samples The X-ray diffraction test is carried out, and it can be seen from the XRD diffraction peak that the zirconia in the sample is basically a tetragonal phase.

表1.实施例1-5和对比例1-2的性能测试数据Table 1. The performance test data of embodiment 1-5 and comparative example 1-2

Figure BDA0003431403260000111
Figure BDA0003431403260000111

在烧结前期对烧结速率与烧结压力的设计是提高复相陶瓷的致密程度的关键,在图1中可以清晰地比较出,烧结工艺2与烧结工艺3在ZTA-5Cr这个组分下的显微结构比较明显可以看出通过烧结工艺3烧结出的复相陶瓷表面气孔明显减少。从图2中可以看到,烧结工艺1、烧结工艺2与烧结工艺3三者温度压力曲线的变化。通过烧结工艺优化之后烧结体中气孔明显减少,合理的烧结工艺减小了复相陶瓷的晶粒尺寸,使得烧结样品颗粒排列紧密,提升了样品的弯曲强度和断裂韧性,同时样品也具有较高的硬度。The design of sintering rate and sintering pressure in the early stage of sintering is the key to improving the compactness of multiphase ceramics. It can be clearly compared in Figure 1 that the microstructure of sintering process 2 and sintering process 3 under the composition of ZTA-5Cr The structure is relatively obvious. It can be seen that the pores on the surface of the composite ceramics sintered by sintering process 3 are significantly reduced. It can be seen from Figure 2 that the temperature and pressure curves of sintering process 1, sintering process 2 and sintering process 3 change. After optimizing the sintering process, the pores in the sintered body are significantly reduced. The reasonable sintering process reduces the grain size of the composite ceramics, making the sintered sample particles tightly arranged, improving the bending strength and fracture toughness of the sample, and the sample also has higher hardness.

由实施例1-5可知,加入适量的氧化铬,有利于细化晶粒尺寸,提升硬度、断裂韧性和抗弯强度,其中,少量的氧化铬(1%)即可显著提升抗弯强度,但是随着氧化铬的继续增加,抗弯强度呈现先下降,后提升,再下降的趋势;而硬度、断裂韧性和晶粒尺寸随着氧化铬的增加,均呈现先增加后下降的趋势。通过表1中数据比较,可以明显看出当烧结压力增大时,样品的晶粒尺寸有一定程度下的减小。实施例1-5所制备产品对应的Cr2O3的掺杂量处于不同浓度时的晶面对应衍射峰如图4所示,Cr2O3的加入会与Al2O3发生固溶。实施例1-5所制备Cr2O3的掺杂量处于不同浓度的显微结构图如图5所示。From Examples 1-5, it can be seen that adding an appropriate amount of chromium oxide is beneficial to refine the grain size, improve hardness, fracture toughness and flexural strength, wherein a small amount of chromium oxide (1%) can significantly improve the flexural strength, However, as the chromium oxide continues to increase, the flexural strength first decreases, then increases, and then decreases; while the hardness, fracture toughness and grain size all increase first and then decrease with the increase of chromium oxide. By comparing the data in Table 1, it can be clearly seen that when the sintering pressure increases, the grain size of the sample decreases to a certain extent. The diffraction peaks corresponding to the crystal planes corresponding to the doping amount of Cr 2 O 3 in different concentrations of the products prepared in Examples 1-5 are shown in Figure 4, and the addition of Cr 2 O 3 will form a solid solution with Al 2 O 3 . Figure 5 shows the microstructure diagrams of the Cr 2 O 3 doping amounts prepared in Examples 1-5 at different concentrations.

以上内容是结合具体的优选实施方式对本发明所做的进一步详细说明,不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本发明的保护范围。The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be assumed that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deduction or replacement can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims (8)

1. A preparation method of a high-hardness and fine-grain ZTA complex-phase ceramic material is characterized by comprising the following steps of:
1) Respectively carrying out water leaching, centrifugation and drying on the alumina powder and the yttria-stabilized zirconia powder to complete raw material pretreatment;
2) Adding a dispersing agent and chromium oxide powder into the pretreated aluminum oxide powder and yttrium oxide stabilized zirconia powder in the step 1), ball-milling, vacuum drying, sieving, removing glue, and shaping to obtain a blank; wherein the addition amount of the chromic oxide powder is 1-10% of the total mass of the raw materials of the aluminum oxide powder and the yttrium oxide stabilized zirconia powder, and the grain diameter of the chromic oxide powder is 30-50nm;
3) Placing the green body obtained in the step 2) into a spark plasma sintering furnace for sintering, wherein the sintering comprises a sintering early stage, a sintering middle stage and a sintering late stage, and the specific sintering process comprises the following steps:
and (3) sintering earlier stage: the temperature is increased from room temperature to 600-800 ℃, the heating rate is 50-150 ℃/min, and the sintering pressure is 0MPa;
in the middle stage of sintering: the temperature is continuously increased to 1170-1200 ℃ on the basis of the temperature at the early stage of sintering, the temperature increase rate is 100-200 ℃/min, the sintering pressure is gradually increased to 20-40 MPa in the temperature increase process, the temperature is kept for 3-5 min after the temperature increase is finished, and the pressure is gradually increased while the temperature is kept until the sintering pressure reaches 45-60 MPa;
and (3) at the later stage of sintering: after the heat preservation in the middle sintering stage is finished, the temperature is heated to 1300-1400 ℃ on the basis of the temperature in the middle sintering stage, the heating rate is 50-100 ℃/min, the heat preservation is carried out for 3-5 min, and in the process, the pressure is continuously maintained to be consistent with the pressure in the middle sintering stage;
and after the heat preservation in the later sintering stage is finished, stopping heating and pressurizing, and cooling to room temperature along with the furnace to obtain the high-hardness fine-grain ZTA system complex-phase ceramic material.
2. The preparation method according to claim 1, wherein in the step 1), the mass ratio of the alumina powder to the yttria-stabilized zirconia powder is (60-90): (10 to 40).
3. The preparation method according to claim 1, wherein in the step 1), the purity of the alumina powder is more than 99.99%, and the particle size is 30-80 nm; the purity of the yttria-stabilized zirconia powder is more than 99.99 percent, and the particle size is 30-80 nm.
4. The preparation method according to claim 1, wherein in the step 1), the three steps of water immersion, centrifugation and vacuum drying pretreatment are sequentially repeated for 2 to 3 times.
5. The preparation method according to claim 1, wherein in the step 1), the pretreatment process is:
water leaching: adding deionized water with the mass of 3-5 times that of the alumina powder or yttria-stabilized zirconia powder into the alumina powder or yttria-stabilized zirconia powder, and stirring the mixture for 40-80 min under the magnetic stirring of 300-800 r/min to complete water leaching;
centrifuging: centrifuging the alumina powder or yttria-stabilized zirconia powder subjected to water leaching at the centrifugation rate of 5000-7000 r/min for 20-60 min to finish the centrifugation;
and (3) vacuum drying: drying the centrifuged alumina powder or yttria-stabilized zirconia powder at the temperature of 100-120 ℃ for 12-24 hours to complete vacuum drying, thereby obtaining the pretreated raw material alumina powder or yttria-stabilized zirconia powder.
6. The preparation method according to claim 1, wherein in the step 2), the amount of the dispersant added is 0.01 to 0.2% of the total mass of the raw materials of the alumina powder and the yttria-stabilized zirconia powder.
7. The method according to claim 1, wherein in the step 2),
ball milling: the ball milling time is 12-24 h, the ball milling speed is 150-300 r/min, and uniform powder is obtained;
and (3) vacuum drying: the drying time is 12-24 h, and the drying temperature is 60-100 ℃;
sieving and removing glue: adopting a 150-mesh sieve, wherein the glue discharging environment is a vacuum environment, the glue discharging temperature is 400-500 ℃, and the glue discharging time is 2-4 h.
8. The method according to claim 1, wherein the purity of the chromium oxide powder is 99.99% or more.
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