CN103900470B - Micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling - Google Patents
Micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling Download PDFInfo
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- CN103900470B CN103900470B CN201410118924.1A CN201410118924A CN103900470B CN 103900470 B CN103900470 B CN 103900470B CN 201410118924 A CN201410118924 A CN 201410118924A CN 103900470 B CN103900470 B CN 103900470B
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Abstract
The invention provides a micro-measuring-force aiming sensor based on three-optical-fiber ball-sharing coupling and belongs to the technology of manufacturing and measurement of precise instruments. The sensor comprise a laser, a beam expanding and collimating mirror, an optical fiber coupling lens, a guide tube, a microscope objective b, a CCD camera b, a microscope objective a, a CCD camera a, a computer and a probe, wherein the probe is composed of an incidence optical fiber, a coupler, an emergent optical fiber a and an emergent optical fiber b. The coupler is used as a contact of the probe. A light beam is guided into the coupler through the incident optical fiber and then guided out through the emergent optical fiber a and the emergent optical fiber b, the light beam which is guided out enters the CCD camera a and the CCD camera b via the microscope objective a and the microscope objective b, and the central positions of energy of light spots formed by two emergent light beams respectively on the CCD cameras can be obtained through an image processing technology. The aiming condition on space of the sensor can be obtained according to the one-to-one corresponding relation between the central positions of energy of the light spots on the CCD cameras and the spatial positions of contact detected points of the sensor. The sensor is large in detectable depth-diameter ratio and has the three-dimension detection ability.
Description
Technical field
The invention belongs to precision instrument manufacture and measurement technology, particularly to a kind of micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber.
Background technology
Along with the development of aerospace industry, auto industry, electronics industry and sophisticated industry etc., for the demand sharp increase of accurate micro-member.Due to by space scale and the restriction of micro-member capture-effect to be measured and measure contact force and affected, the accurate measurement of micro-member size becomes difficult to achieve, fathoming of the most small inner chamber component is difficult to improve, and these become " bottleneck " of restriction industry development already.In order to realize less dimensional measurement, increase and fathom, most widely used way is exactly that the inner chamber using elongated probe to go deep into micro-member detects, and measures the small inside dimension on different depth by the way of aiming at sender.Therefore, the accurate measurement of micro-member size at present mainly combines the aiming signal sending type detection system with very thin probe based on coordinate measuring machine, development comparative maturity due to measurement of coordinates machine technology, can provide accurate three-dimensional space motion, therefore the detection mode of aiming triggering type probe becomes the key of micro-member size detection system design.
At present, the Main Means of micro-member dimensional measurement includes following several method:
1. graduate professor H.Schwenke of German federal physical technique et al. proposes a kind of low-light pearl scattering imaging method, it is achieved that the two-dimensional detection to probe probe location information.The method utilizes single fiber as probe measuring staff, low-light pearl is glued or soldered into measuring staff end, make light be coupled into inside of optical fibre and travel to be formed on low-light pearl scattering, receive scattered light with an area array CCD and form sensitive signal, it is achieved that micro-power contact type measurement.Professor H.Schwenke et al. had expanded this method later, a bonding low-light pearl on measuring staff, adding the road imaging optical path to this low-light pearl, this makes this detection system be provided with three-dimensional detection ability, and the standard deviation obtained during measurement standard ball is 0.2 μm simultaneously.According to relevant report, the method can realize measuring the aperture of Φ 151 μm, fathoms as 1mm.This method is during measuring deep hole, owing to low-light pearl scattering angle is bigger, along with the increase fathomed, the quality of low-light pearl scattering imaging facula is gradually lowered owing to scattering light is blocked by hole wall, cause image blur, reduce certainty of measurement, therefore cannot realize the high-acruracy survey of big aspect ratio.
2. China Harbin Institute of Technology Tan Jiubin professor and doctor Cui Jiwen et al. propose a kind of probe structure coupled based on double optical fiber, two optical fiber are connected by end welding ball, welding ball is as gauge head, a piece relatively long optical fibers introduces light, an other relatively short-range missile goes out light, overcome the limitation that low-light pearl scattering method fathoms, it is possible to achieve diameter is not more than the fine sight when micro deep-hole of 50: 1 is measured not less than 0.01mm, aspect ratio.This method is only capable of realizing the detection of two-dimensional position information at present, does not possess three-dimensional detection ability.
3. USA National Institute of Standard and Technology employs single fiber measuring staff and combines the probe of low-light pearl gauge head, in the two-dimensional direction optical fiber measuring staff imaging is amplified about 35 times by optical design, differentiate with 2 area array CCDs and receive optical fiber measuring staff imaging on two-dimensional directional, then the image received is carried out contour detecting, thus monitor the minute movement during measuring of optical fiber measuring staff, and then realize trigger-type measurement, the theoretical resolution of this detection system can reach 4nm, the probe measuring head diameter of detection system is Φ 75 μm, experiment measures the aperture of Φ 129 μm, its expanded uncertainty estimated value has reached 70nm (k=2), measurement power is μ N magnitude.This method detection resolving power is high, and certainty of measurement is high, and the gauge head of use is prone to miniaturization, can measure the micropore of bigger aspect ratio.The limitation of the method is the image-generating unit micrometric displacement amplification relatively low (only 35 times) to optical fiber measuring staff, resolving power must be improved further by image algorithm, the two-dimensional micro-displacement of detection optical fiber measuring staff must use two set imaging systems, cause system structure more complicated, measurement data amount of calculation is bigger, these factors cause the resolving power of detection system to be difficult to further improving, and the real-time of detection system is poor, and system constitutes more complicated；And the method the most only has two-dimensional detection ability.
4. China Harbin Institute of Technology Tan Jiubin professor and Wang Fei et al. propose the measuring method of a kind of one-dimensional micro-focus collimation based on single fiber probe measuring staff, the method utilizes the super large curvature of single fiber probe measuring staff and the construction features of micro-cylindrical lens to set up the one-dimensional micro-focus collimation imaging optical path of point source, by measuring position and the width of fringe of the center of energy of imaging bright fringes, thus obtain the two dimensional displacement quantity information of optical fiber probe measuring staff, if this device is configured as follows: optical fiber probe measuring staff radius is 10 μm, its refractive index n=1.7, image distance l '=300mm, photelectric receiver pixel dimension is 7 μm, utilize image algorithm can differentiate the change of 0.1 pixel, its theoretical resolution is up to 0.03nm.The width of fringe of the method imaging bright fringes is difficult to measure, and simultaneously when two-dimension displacement is measured, there is the coupled problem of the coupled problem in image-forming information, the i.e. position of the center of energy of imaging bright fringes and width of fringe.Subsequently, Cui Jiwen et al. proposes again a kind of micro measurement method based on orthogonal two-dimensional micro-focus collimation, the problem this method solving two-dimensional signal coupling, but the method can only realize two dimension micro-scale measurement, does not possess three-dimensional measurement ability.
5. what Union Bank of Switzerland metering office have developed that a novel coordinate measuring machine is devoted to structural features nano-precision can the measurement of trace.This measuring machine have employed the novel touch probe of flexure hinge structure based on stamp identification principle, and this design can reduce moving mass and guarantee omnidirectional soft, is a probe with three-D space structure detectivity.The measurement power of this sensing arrangement is less than 0.5mN, supports removable probe simultaneously, and the diameter minimum of probe gauge head is to Φ 100 μm.Detection system combines the platform of a high position precision developed by Philips CFT, and the positional precision of platform is 20nm.The standard deviation of this measurement systematic survey repeatability reaches 5nm, and the uncertainty of measurement result is 50nm.This kind of method complex structural designs, requiring that measuring staff has higher rigidity and hardness simultaneously, be otherwise difficult to effective displacement sensing, this makes measuring staff structure be difficult to further miniaturization, measuring aspect ratio to be restricted, the resolving power of detection system is difficult to improve further simultaneously.
In sum, in current microsize and coordinates detection method, owing to the probe of optical fiber fabrication has that probe size is little, it is little to measure contact force, measures aspect ratio is big, certainty of measurement is high feature and obtain extensive concern, utilize the minute sized accurate measurement that its distinctive optical characteristics and mechanical property have been accomplished in several ways on certain depth.The problem that existing measurement means is primarily present has:
1. detection system fathom limited.The low-light pearl scattering imaging method of Germany PTB is masked the impact of effect, it is difficult to realizes the lifting fathomed, reduces system detection accuracy simultaneously.
2. the displacement resolving power of detection system is difficult to improve further.The primary amplification of existing detection system is relatively low, result in its overall amplification relatively low, it is difficult to realize the further raising of its displacement resolving power.The optical beam path enlargement ratio of the optics measuring staff of the detection method that USA National Institute of Standard and Technology uses only has 35 times, and relatively low primary enlargement ratio result in its displacement resolving power to be difficult to improve further.
3. detection system poor real, it is difficult to realize accurate on-line measurement.The detection method that USA National Institute of Standard and Technology uses must use two-way area array CCD to receive signal pattern, more complicated image algorithm must be used could to realize the monitoring of the high resolution to optical fiber measuring staff displacement, this causes measurement system to need data volume to be processed to be greatly increased, reduce the real-time performance of detection system, it is difficult to during realizing small inner chamber size and two-dimensional coordinate measurement, aim at sender and the synchronicity opening, only measuring.
4. three-D displacement direction finding capability is not enough.The probe structure coupled based on double optical fiber and micro measurement method based on orthogonal two-dimensional micro-focus collimation that Harbin Institute of Technology proposes the most do not have three-dimensional detection ability, can only realize the two-dimensional measurement of minute yardstick, it is impossible to meet the needs of current minute yardstick three-dimensional measurement.
Summary of the invention
In place of it is an object of the invention to overcome micro-member dimension measurement method the deficiencies in the prior art, a kind of micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber being applicable to big aspect ratio micro-member dimensional measurement is provided, by bonder and microcobjective, the sensor probe small tactile displacement amount in micropore is changed into ccd image and catches the lateral displacement amount of system, image centroid location algorithm realize high-precision three-dimensional aiming when hole wall is measured.
nullThe technical scheme is that a kind of micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber includes laser instrument、Beam-expanding collimation mirror、Fiber coupling lens、Conduit、Probe、Microcobjective a、CCD camera a and computer，CCD camera a is connected by data wire with computer，Probe is placed in micropore to be measured，Described probe includes incident optical、Bonder and outgoing optical fiber a，Bonder is connected with incident optical and outgoing optical fiber a respectively as the contact of probe，The light beam that laser instrument sends enters incident optical after beam-expanding collimation mirror and fiber coupling lens，Light beam is derived by outgoing optical fiber a after incident optical imports bonder，Derive light beam and enter CCD camera a through microcobjective a，Described probe also includes outgoing optical fiber b，Described outgoing optical fiber b is connected with bonder，And the end of outgoing optical fiber b is 80-100 ° of bending，Light beam is derived by outgoing optical fiber b after incident optical imports bonder，Derive light beam and enter CCD camera b through microcobjective b，CCD camera b is connected by data wire with computer.
The invention have the advantage that
1. the outgoing optical fiber a in sensor and outgoing optical fiber b all can produce response for axially active force and vertical direction of principal axis active force, and mutually decouple between active force, thus three-dimensional space position acquisition of signal can be realized, i.e. this sensor has the three-dimensional detection ability of mutually decoupling.
2. this sensor can change the measurement resolution of sensor by changing microcobjective a, the amplification of microcobjective b, the cost-effective requirement with satisfied different occasions.
3. optical detection signal only transmits at inside of optical fibre, is not affected by minute yardstick component capture-effect, and the maximum aspect ratio of measurement, up to 40: 1, meets big aspect ratio micro structure measurement requirement.
Accompanying drawing explanation
Fig. 1 is micro measuring force aiming sensor structural representation based on the ball coupling altogether of three optical fiber.
In figure: 1, laser instrument, 2, beam-expanding collimation mirror, 3, fiber coupling lens, 4, conduit, 5, micropore to be measured, 6, incident optical, 7, bonder, 8, outgoing optical fiber a, 9, outgoing optical fiber b, 10, probe, 11, microcobjective b, 12, CCD camera b, 13, microcobjective a, 14, CCD camera a, 15, computer.
Detailed description of the invention
Below in conjunction with the accompanying drawings the embodiment of the present invention is described in further detail.
nullA kind of micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber includes laser instrument 1、Beam-expanding collimation mirror 2、Fiber coupling lens 3、Conduit 4、Probe 10、Microcobjective a13、CCD camera a14 and computer 15，CCD camera a14 is connected by data wire with computer 15，Probe 10 is placed in micropore 5 to be measured，Described probe 10 includes incident optical 6、Bonder 7 and outgoing optical fiber a8，Bonder 7 is connected with incident optical 6 and outgoing optical fiber a8 respectively as the contact of probe 10，The light beam that laser instrument 1 sends enters incident optical 6 after beam-expanding collimation mirror 2 and fiber coupling lens 3，Light beam is derived by outgoing optical fiber a8 after incident optical 6 imports bonder 7，Derive light beam and enter CCD camera a14 through microcobjective a13，Described probe 10 also includes outgoing optical fiber b9，Described outgoing optical fiber b9 is connected with bonder 7，And the end of outgoing optical fiber b9 is 80-100 ° of bending，Light beam is derived by outgoing optical fiber b9 after incident optical 6 imports bonder 7，Derive light beam and enter CCD camera b12 through microcobjective b11，CCD camera b12 is connected by data wire with computer 15.
The end bend angle of described outgoing optical fiber b9 is preferably 90 °.
Conduit 4 is utilized to be bent by incident optical 6 to provide image capturing space, it is also possible to not use conduit 4, and directly bent by incident optical 6 by thermal finalization method, in order to provide image capturing space.Utilize thermal finalization method by end bend 80-100 ° of outgoing optical fiber b9, so as the active force that perception is axially, coordinating with outgoing optical fiber a8 thus realize three-dimensional detection ability, wherein when the end bend angle of outgoing optical fiber b9 is 90 °, it has the highest sensitivity axially.
The work process of the present invention is as follows:
Open laser instrument 1 half an hour in advance, make the beamstability that laser instrument 1 sends.Adjust the relative position between fiber coupling lens 3 and incident optical 6 and attitude, it is ensured that maximum light energy enters incident optical 6.Adjust outgoing optical fiber a8 and microcobjective a13, relative position between outgoing optical fiber b9 and microcobjective b11 and attitude, ensure that the outgoing end face of the outgoing optical fiber a8 outgoing end face relative to microcobjective a13, outgoing optical fiber b9 is object in paraxial region relative to microcobjective b11, to improve image quality.Probe 10 is stretched into micropore 5 to be measured internal, and be allowed to produce relative displacement with micropore 5 to be measured, when bonder 7 contacts with micropore 5 hole wall to be measured, by microcobjective a13, the probe 10 small tactile displacement amount in micropore 5 to be measured is changed into CCD camera a14 by microcobjective b11, the lateral displacement amount of CCD camera b12 image capture system, i.e. by CCD camera a14, probe 10 is detected to the tactile displacement amount with Y-direction at X, by CCD camera b12, probe 10 is detected in the tactile displacement amount of Z-direction, finally realized high-precision three-dimensional when hole wall is measured by image centroid location algorithm to aim at.
Claims (2)
1. a micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber, described sensor includes laser instrument
(1), beam-expanding collimation mirror (2), fiber coupling lens (3), conduit (4), probe (10), micro-
Object lens a (13), CCD camera a (14) and computer (15), data wire is by CCD camera a (14)
Connecting with computer (15), probe (10) is placed in micropore to be measured (5), described probe (10)
Including incident optical (6), bonder (7) and outgoing optical fiber a (8), bonder (7) is as probe
(10) contact is connected with incident optical (6) and outgoing optical fiber a (8) respectively, and laser instrument (1) is sent out
The light beam gone out enters incident optical (6), light after beam-expanding collimation mirror (2) and fiber coupling lens (3)
Restraint and derived by outgoing optical fiber a (8) after incident optical (6) imports bonder (7), derive light beam warp
Microcobjective a (13) enters CCD camera a (14), it is characterised in that: described probe (10) is also
Including outgoing optical fiber b (9), described outgoing optical fiber b (9) is connected with bonder (7), and emergent light
The end of fine b (9) is 80-100 ° of bending, and light beam imports bonder (7) through incident optical (6)
After by outgoing optical fiber b (9) derive, derive light beam through microcobjective b (11) enter CCD camera b
(12), CCD camera b (12) is connected by data wire with computer (15).
Micro measuring force aiming sensor based on the ball coupling altogether of three optical fiber the most according to claim 1, its feature
It is: the end bend angle of described outgoing optical fiber b (9) is preferably 90 °.
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| CN1204046A (en) * | 1998-06-30 | 1999-01-06 | 天津大学 | Optical contact measuring method and miniature three-dimensional measuring head using the same |
| JP3726028B2 (en) * | 2001-03-30 | 2005-12-14 | 住友重機械工業株式会社 | 3D shape measuring device |
| JP2003004433A (en) * | 2001-06-21 | 2003-01-08 | Sankyo Seiki Mfg Co Ltd | Method and apparatus for measuring minute inside diameter |
| CN1329709C (en) * | 2005-05-27 | 2007-08-01 | 哈尔滨工业大学 | Double optical fiber coupling contact type micro measuring force aiming sensor |
| CN1329711C (en) * | 2005-09-14 | 2007-08-01 | 哈尔滨工业大学 | Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling |
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