CN103884704B - Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum and device - Google Patents
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum and device Download PDFInfo
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- CN103884704B CN103884704B CN201410086366.5A CN201410086366A CN103884704B CN 103884704 B CN103884704 B CN 103884704B CN 201410086366 A CN201410086366 A CN 201410086366A CN 103884704 B CN103884704 B CN 103884704B
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Abstract
The present invention relates to a kind of light splitting pupil confocal laser Brillouin's method for measuring Raman spectrum and device, belong to microspectrum technical field of imaging.This device includes producing the light-source system of excitation beam, measuring object lens, illumination iris, collection pupil, dichroic light-dividing device, spectroscope, Raman spectroscopic detection device, Brillouin spectrum detection device, light splitting pupil confocal laser detection device, three-dimensional scanner, displacement transducer and data processing unit；Building light splitting pupil confocal micro imaging system by the Rayleigh scattering light utilizing confocal Raman spectra to abandon in detecting and realize the high-resolution imaging of sample three-dimensional geometry position, the Brillouin scattering abandoned in being detected by detection confocal Raman spectra obtains material fundamental property and multiple cross effect realizes material stress, elastic parameter, density etc. and measures；Confocal Raman spectra Detection Techniques and confocal Brillouin spectrum Detection Techniques are utilized to have complementary advantages, it is achieved the composite measurement of the many performance parameters of material and decoupling.
Description
Technical field
The invention belongs to microspectrum technical field of imaging, confocal microscopy is tied mutually with spectrographic detection technology
Close, relate to a kind of light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum and device, can be used for sample
The multispectral how performance parameter combined test of microcell and high-resolution imaging.
Technical background
When light is by medium, insulating particles are acted on by light wave, transit to another amount from a quantum state
Sub-state, and simultaneously give off scattered wave, different energy level transition modes create respectively Rayleigh scattering, instead this
Lentor scattering and stokes scattering, be divided into light scattering according to lambda1-wavelength knots modification degree: auspicious
Profit scattering (Rayleigh), Raman scattering (Raman) and Brillouin scattering (Brillouin).
In Rayleigh scattering, light is less with acoustic branch phonon positive energy exchange, and energy variation is less than 10-5cm-1, background of cloth
In the scattering of deep pool, light is less with acoustic branch phonon positive energy exchange, Brillouin frequency shifts 0.01～2cm-1, can quantitative change
Change 10-5cm-1～1cm-1.In Raman scattering, light is big with the energy of optical phonon exchange, Raman scattering frequency
Shifting is 10～5000cm-1, Raman scattering energy variation is more than 1cm-1。
Raman spectrum is the scattering spectrum being vibrated by intramolecule and causing, and different material has its respective spy
Levying Raman spectrum i.e. " dactylogram ", this project is by the frequency of raman scattering spectrum recorded, intensity, linear
And polarization state change, obtain the composition of material, micro structure and internal motion information etc., then realize
Material composition, stress, temperature, the measurement of foreign body.
Brillouin scattering spectrum is by photic thermal excitation acoustics acoustical phonon, then by light wave and the acoustics in medium
A kind of scattering spectrum that phonon occurs to interact and produces, Brillouin (Brillouin) scattering is with photon for visiting
Pin, can measure the multiple elementary excitation such as phonon, spin wave in condensed state matter, its energy spectrum between Raman and
Between Rayleigh scattering (0.01～1.0cm-1), it is research material fundamental property (elasticity, magnetic, phase transformation) and many
The important means of kind of cross effect (piezoelectricity, magnetic bullet, photoelastic etc.).This technology is wide by developed countries such as America and Europes
General use is in the basic and applied research of condensed state material.In recent years, Brillouin scattering research is also integrated
Ferroelectricity and the birth of spintronics and development are made that significant contribution.
Brillouin scattering spectrum is light wave and the acoustical phonon in medium interacts (density fluctuation density
Fluctuation) and a kind of scattering spectrum of producing is by the elastic vibration (outer vibration and rotate) of molecule, by surveying
Obtain Brillouin scattering spectral information and just can record material fundamental property in microfabrication (elasticity, magnetic, phase transformation)
And multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.), then realize material stress, elastic parameter, density
Deng measurement.
In many performance parameters are measured, can be different with surveyed parameter because of material of being measured and monitored the growth of standing timber, raman scattering spectrum detects
Technology and Brillouin scattering spectrum Detection Techniques have the chief, can form mutual supplement with each other's advantages by reasonably design.
In terms of the laminar analysis measurement of fine structure, confocal Raman spectra Detection Techniques certainty of measurement is high, but can only survey
The internal information of bright and partially transparent sample.Thus utilize Raman scattering and Brillouin scattering spectrum be realize micro-
The key that the many performance parameters of fine texture material are measured.
At present, commercial confocal laser Raman spectrum test instrunment mainly has Britain RENISHAW etc. to produce.
The principle of conventional confocal Raman spectroscopic detection instrument is as it is shown in figure 1, light-source system sends excitation beam through polarization
After spectroscope, quarter-wave plate and focusing objective len, focus on sample, inspire and be loaded with sample light
The Raman diffused light of spectral property；Move sample by 3 D scanning system, make corresponding sample different
The Raman diffused light in region reflects again by quarter-wave plate and by polarization spectroscope, and the first condenser lens will
The light of polarization spectroscope reflection is assembled, and utilizes and is positioned at the first pin hole spectral detector below and records and be loaded with
The raman scattering spectrum of sample spectral information.
But existing confocal Raman microscopy exists following not enough:
(1) detection time is long, and system drifting is big.Owing to confocal Raman spectra signal is the most weak, carry out collection of illustrative plates one-tenth
As time detector need to carry out long-term integration (often reaching a few hours), optical system and the drift of sample workbench,
Often can cause sample out of focus, then reduce the spatial resolving power of confocal Raman spectra detection；
(2) sample veiling glare is relatively strong, have impact on the signal to noise ratio of Raman spectroscopic detection instrument.Existing confocal draw
Graceful spectrographic detection instrument, owing to have employed back-reflection sample detection mode and incident excitation light path and scattered light
Detection light path is total to the mode of light path completely, and it certainly will exist the deficiency that sample interference of stray light is big, limits existing
There is the confocal microscope spectroscopic probing capabilities to height scattering sample；
(3) many performance parameters measurement capability is urgently improved.Existing confocal Raman spectra Detection Techniques, abandon
Rayleigh Scattering Spectra containing abundant sample message and Brillouin scattering spectrum so that it is material elasticity and
The character test aspects such as piezoelectricity are limited.
Generally the 10 of the Reyleith scanttering light beam intensity that raman spectrum strength is reflection of sample scattering-3～10-6Times, and show
Some confocal Raman spectra detection instruments all detect the faint Raman spectrum and abandoning of sample scattering and are better than Raman and dissipate
Penetrate Rayleigh light beam and Brillouin's light beam of light.Thus, utilize the Reyleith scanttering light abandoned in existing spectrum investigating system
Shu Jinhang aided detection is to improve existing confocal Raman spectra Detection Techniques spatial resolution, by recording background of cloth
The information such as deep pool scattering spectrum frequency displacement, intensity, linear change, obtain material fundamental property (elastic, magnetic
Property, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.), then realize material stress, elastic ginseng
Number, density etc. measure the new way being multispectral high-resolution imaging with detection.
Summary of the invention
It is an object of the invention to as overcoming the deficiencies in the prior art, propose light splitting pupil confocal laser Brillouin-Raman
Spectral measurement method and device.Built by the Rayleigh scattering light utilizing confocal Raman spectra to abandon in detecting and divide
Pupil confocal micro imaging system realizes the high-resolution imaging of sample three-dimensional geometry position, and utilizes light splitting pupil
" extreme point " this characteristic the most corresponding with its focus of confocal microscopic imaging device controls spectral detector essence
The Raman spectral information that really capture object lens focal spot excites, and then realize sample microcell geometric position and light
The high-space resolution detection of the detected with high accuracy of spectrum information i.e. " collection of illustrative plates unification ", reaches resolution capability and range simultaneously
Effectively taking into account of scope；The Brillouin scattering abandoned in being detected by detection confocal Raman spectra obtains thing
Matter fundamental property (elasticity, magnetic, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.), then
Realize material stress, elastic parameter, density etc. to measure；Utilize confocal Raman spectra Detection Techniques and confocal cloth
In the complementary feature of deep pool spectrographic detection technical advantage, what design Raman spectrum and Brillouin spectrum detected simultaneously is total to
Burnt spectrographic detection scheme, it is achieved the composite measurement of the many performance parameters of material and decoupling.The present invention can detect bag
Include the scattering spectrum such as fluorescence, Compton scattering light.
It is an object of the invention to be achieved through the following technical solutions.
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum, comprises the following steps:
Step one, measure object lens pupil plane on place illumination iris and collect pupil；Light-source system sends
Excitation beam, after excitation beam transmission illumination pupil, focuses on sample, inspires and be loaded with detected sample
The Raman diffused light of product spectral characteristic, Brillouin scattering and Rayleigh scattering light；Raman diffused light, Rayleigh
Light and Brillouin scattering arrive dichroic optical system after collecting pupil；Dichroic optical system is by Raman
Scattered light carries out lossless separation with other two kinds of scattered lights；
Step 2, through dichroic optical system reflection Reyleith scanttering light and Brillouin scattering enter beam splitting system divide
Light, Reyleith scanttering light and the Brillouin scattering entrance light splitting pupil confocal laser detection system through beam splitting system transmission:
Light splitting pupil confocal laser detection system utilizes detector lateral shift can make the axle of light splitting pupil confocal microscope system
The characteristic of phase shift is produced, it is achieved the detection to sample microcell geometric position, specifically to resonse characteristic
Process is: detailed process is: the detection light obtaining the light splitting pupil confocal laser detection system receiving Reyleith scanttering light
Speckle processes, and obtains search coverage, records the corresponding I (u) of intensity loudness of the reflection concavo-convex change of sample,
Carrying out the three dimension scale tomography detection of high-space resolution, wherein, u is axial normalization optical coordinate.
Step 3, through beam splitting system reflection Reyleith scanttering light and Brillouin scattering enter Brillouin spectrum detection system
System, meanwhile, through the Raman diffused light entrance Raman spectroscopic detection system of dichroic optical system transmission,
" extreme point " of light splitting pupil confocal laser response curve and measurement objective focus positions this characteristic the most corresponding,
The spectral information exciting hot spot focal position is accurately captured, it is achieved high-space resolution by searching " extreme point "
Spectrographic detection.Sample can be followed the tracks of precisely in real time during measurement and focus, by meter
Calculation machine processing system control 3 D scanning system attitude with ensure sample during whole measurement all the time
It is in focal position, can suppress because the factor such as ambient temperature and vibration causes sample out of focus and the mistake that produces
Difference, improves certainty of measurement.
When the spectral signal only docking the Raman spectroscopic detection system acquisition receiving Raman diffused light processes,
System can carry out Raman spectroscopic detection；
When the spectral signal only obtained the Brillouin spectrum detection system receiving Brillouin scattering processes
Time, system can carry out Brillouin spectrum detection；
When the detection hot spot only obtained the light splitting pupil confocal laser detection system receiving Reyleith scanttering light processes
Time, it is possible to carry out the three dimension scale tomography detection of high spatial resolution；
When the light splitting pupil confocal laser detection system receiving Reyleith scanttering light is obtained signal, receives Raman diffused light
Spectral signal and the Brillouin spectrum detection of reception Brillouin scattering that Raman spectroscopic detection system obtains are
When the spectral signal that system obtains processes, system can carry out the microcell collection of illustrative plates tomography of high-space resolution,
I.e. realize the many performance parameters light splitting pupil confocal laser spectral measurement to sample " collection of illustrative plates unification " and high spatial
Resolution imaging.
Particularly, in the methods of the invention, described illumination iris and collect pupil can be circular, D-shaped or
Other shapes of person.
In the methods of the invention, described excitation beam can be the polarized beams such as line polarisation, rotatory polarization；Also may be used
To be the structure light beam generated by pupil filtering technology.Polarized light is combined with pupil filtering technology can compress survey
Amount focused spot size, improves the transverse resolution of system, it is achieved super-resolution detects.
In the methods of the invention, it is also possible to detection includes fluorescence, Compton scattering scattering of light spectrum.
In the methods of the invention, the survey that can realize different NA values is only processed by computer system software
The coupling of amount object lens, and debug without again system being carried out any hardware.
Light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device, including produce excitation beam light-source system,
Measure object lens, illumination iris, collection pupil, dichroic light-dividing device, beam splitting system, Raman spectroscopic detection
Device, Brillouin spectrum detection device, light splitting pupil confocal laser detection device, three-dimensional scanner, displacement
Sensor and data processing unit；
Wherein, the pupil plane measuring object lens placed illumination iris and collect pupil, illumination iris and measurement
Object lens are sequentially located in the excitation beam exit direction of light-source system, and illumination iris is coaxial with excitation beam；Two
After color beam splitting system is positioned at collection pupil；Raman spectroscopic detection system is positioned at the saturating of dichroic optical system
Penetrate on direction；Beam splitting system is positioned on the reflection direction of dichroic optical system；Brillouin spectrum detection system
It is positioned on the reflection direction of beam splitting system；Light splitting pupil confocal laser detection system is positioned at the transmission side of beam splitting system
Upwards；Sample is fixed on the object stage of three-dimensional scanner；
Data processing unit includes division focal spot detection module, extreme value computing module and data fusion module；Its
In, division focal spot detection module and extreme value computing module are used for processing the hot spot that image capturing system detects,
Obtain light splitting pupil confocal laser response curve, thus obtain the positional information of sample；Data fusion module
For merging positional information and spectral information, complete three-dimensionalreconstruction and the Spectrum Data Fusion of sample；Three
Person's incidence relation is: the Aili spot that image capturing system is collected by division focal spot detection module carries out splitting also
Detection, the signal that obtains enters extreme value computing module to carry out after extreme value asks for, obtaining light splitting pupil confocal laser and ringing
Curve is answered to enter data fusion module；
Computer processing system is connected with displacement transducer, three-dimensional scanner, data fusion module；Figure
As acquisition system is connected with division focal spot detection module.Data fusion module and the first detector, the second spy
Survey device is connected；
Control three-dimensional scanner by computer processing system and move sample, make zones of different Reyleith scanttering light
And to should the Raman diffused light of region sample, Brillouin scattering by measure object lens and collect light
Pupil.
In apparatus of the present invention, oversubscription can be realized by adding radial polarisation optical generator with iris filter
Distinguish spectrographic detection.Including being positioned at the radial polarisation optical generator and the first pupil being sequentially placed before illumination iris
Wave filter, and the second iris filter between beam splitting system and the 3rd condenser lens.
In apparatus of the present invention, spectrum investigating system can be common spectrum investigating system.Depend on including along light path
First condenser lens of secondary placement, test surface are positioned at the first spectral detector of the first condenser lens focal position, position
The first detector after spectral detector, and be sequentially placed along light path second condenser lens, test surface
It is positioned at the second spectral detector of second condenser lens focal position, and after being positioned at the second spectral detector
Second detector；Can also is that confocal spectroscopic detection system, including the first condenser lens being sequentially placed along light path,
It is positioned at the first pin hole of the first condenser lens focal position, is positioned at the spectral detector 1 after the first pin hole, be positioned at
The first detector after one spectral detector, and be sequentially placed along light path second condenser lens, be positioned at
Second pin hole of two condenser lens focal positions, it is positioned at the second spectral detector after the second pin hole, is positioned at second
The second detector after spectral detector.The veiling glare outside focus can be effectively filtered out, improve spectrum and visit
The signal to noise ratio surveyed.
In apparatus of the present invention, can be by increasing beam modulation system between light-source system and illumination iris.
Including the 4th condenser lens being sequentially placed along light path, the 3rd pin hole being positioned at the 4th condenser lens focal point and
Focus is positioned at the 5th condenser lens at the 3rd pin hole, adjusts for the excitation beam sending light-source system
System, to obtain more high spatial resolution and more preferable stimulation effect.
In apparatus of the present invention, can be that (i.e. reflective light intensity is much larger than thoroughly than little beam splitting system for selection transflection
Penetrate light intensity), while ensureing light splitting pupil confocal laser detection system light intensity, improve the utilization of Brillouin scattering
Rate.
In apparatus of the present invention, fiber-optic transfer exciting light and scattering spectrum can be passed through, including with illumination iris
Coaxial collimating lens, it is positioned at the first fibre-optic terminus of collimating lens focal point, will by the first optical patchcord
First fibre-optic terminus is connected with laser instrument；It is positioned at the second fibre-optic terminus of the first condenser lens focal point, by
Second fibre-optic terminus is connected by two optical patchcords with the first spectral detector；It is positioned at second condenser lens focal point
3rd fibre-optic terminus, is connected the 3rd fibre-optic terminus with the second spectral detector by the 3rd optical patchcord.With
Realize modularity dismounting, select function and large scale to measure flexibly.
In apparatus of the present invention, image capturing system can be amplified detect by increasing image enhancement system
Aili spot.The 3rd condenser lens and the 3rd confocal image of condenser lens including being sequentially placed along light path are put
Big system and be positioned at the image capturing system of image enhancement system focal point, to improve light splitting pupil confocal laser
The acquisition precision of detection system.
Beneficial effect
The inventive method, contrast prior art has a following innovative point:
1, light splitting pupil confocal laser microtechnique and spectrographic detection technology are organically combined by the present invention, have merged point
The high accuracy Objective rallying point position tracking ability of pupil confocal laser microtechnique, utilizes light splitting pupil to swash
The characteristic that " extreme point " of the confocal response curve of light is the most corresponding with object lens focused spot, can enter sample
Row track and localization real-time, accurate, overcomes conventional confocal spectrographic detection technology capture focus spectroscopic capabilities poor
Shortcoming, this is one of innovative point being different from existing spectrographic detection technology；
2, due to the fact that the detection light path of employing oblique incidence, anti-scattering ability is strong, overcomes existing confocal
Micro-imaging technique cannot suppress what focal plane scattered light disturbed to lack, and improves the signal to noise ratio of spectrographic detection.This is
Be different from existing spectrographic detection technology innovative point two；
3, the raman scattering spectrum and Brillouin that contain different information can be dissipated by the present invention by appropriate design
Penetrate spectrum to detect simultaneously, formed and have complementary advantages, it is achieved that the height to material composition Yu basic physical property
Resolved detection, it is simple to the integration test of many performance parameters, this is the innovation being different from existing spectrographic detection technology
The three of point；
4, owing to using monochromatic light road division focal spot detection to realize the imaging of geometric position, it the most significantly simplifies biography
The light channel structure of system confocal microscope system, remains again confocal laser system and original light splitting pupil confocal system
Advantage, is only processed by software exchange and just can realize the light splitting micro-detection of pupil confocal laser, confocal laser Raman
The detection of spectrographic detection, confocal laser Brillouin spectrum, the integration test of the many performance parameters of light splitting pupil confocal laser
Select freely and hand-off process etc. various modes.This is the innovative point being different from existing Raman spectroscopic detection technology
Four；
The inventive method has a characteristic that
1, light splitting pupil confocal laser microscopic system is structurally and functionally being blended with spectrum imaging system, both
The tomography of sample microcell geometric parameter can be realized, the spectrographic detection of sample microcell can be realized again, i.e. simultaneously
Realize the multiple imaging patterns such as minute yardstick tomography, collection of illustrative plates tomography and spectrum test；
2, effectively taking into account of range ability and resolution capability can be realized, by be arranged on focal spot taken two micro-
The parameter of zonule, to mate the sample of different reflectivity, range of application is expanded；
3, the present invention can be by before to light splitting pupil differential confocal detection system and Brillouin spectrum detection system
Beam splitting system select suitable transflection ratio, to maximally utilize light intensity；
4, the present invention can by introducing the tightly focused technology that radial polarisation light combines with iris filter,
Realize the test of super-resolution multi-spectrum synthesis.
Accompanying drawing explanation
Fig. 1 is confocal Raman spectra formation method schematic diagram；
Fig. 2 is light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum schematic diagram of the present invention；
Fig. 3 is D-shaped light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum schematic diagram；
Fig. 4 is light splitting pupil confocal laser Brillouin of the present invention-Raman spectrum super-resolution measuring method signal
Figure；
Fig. 5 is light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram of the present invention；
Fig. 6 is the light splitting pupil confocal laser Brillouin-Raman light with confocal spectroscopic detection system of the present invention
Spectrometry device schematic diagram；
Fig. 7 is that the light splitting pupil confocal laser Brillouin-Raman spectrum with beam modulation system of the present invention is surveyed
Amount device schematic diagram；
Fig. 8 is that optical fibre transmission type light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device of the present invention shows
It is intended to；
Fig. 9 be of the present invention have detection focal spot amplification system light splitting pupil confocal laser Brillouin-Raman spectrum
Measurement apparatus schematic diagram；
Figure 10 be of the present invention point of super-resolution light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum with
Device embodiment schematic diagram；
Figure 11 is that the light splitting pupil of light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum of the present invention is total to
Burnt response curve and Raman spectrum response curve schematic diagram.
Wherein, 1-light-source system, 2-measure object lens, 3-illumination iris, 4-collect pupil, 5-sample,
6-dichroic optical system, 7-Raman spectroscopic detection system, 8-the first condenser lens, 9-the first spectral detector,
10-the first detector, 11-beam splitting system, 12-Brillouin spectrum detection system, 13-second condenser lens, 14-
Second spectral detector, 15-the second detector, 16 light splitting pupil confocal laser detection systems, 17-the 3rd condenser lens,
18 image capturing systems, 19-search coverage, 20-radial polarisation optical generator, 21-the first iris filter,
22-the second iris filter, 23-3 D scanning system, 24-displacement transducer, 25-data processing unit, 26-
Division focal spot detection module, 27-extreme value computing module, 28-data fusion module, 29-computer processing system,
30-light splitting pupil confocal laser response curve, 31-Raman spectrum response curve, 32-Brillouin spectrum response Qu Qu
Line, 33-the first pin hole, 34-the second pin hole, 35-beam modulation system, 36-the 4th condenser lens, 37-the 3rd pin
Hole, 38-the 5th condenser lens, 39-collimating lens, 40-the first fibre-optic terminus, 41-the first optical patchcord, 42-
Second fibre-optic terminus, 43-the second optical patchcord, 44-the 3rd fibre-optic terminus, 45-the 3rd optical patchcord, 46-figure
As amplification system, 47-polarization spectroscope, 48-quarter-wave plate, 49-focusing objective len
Detailed description of the invention
With embodiment, the present invention is described in further detail below in conjunction with the accompanying drawings.
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum, comprises the following steps:
As it is shown on figure 3, first, the pupil plane measuring object lens 2 is placed illumination iris 3 and collects pupil 4；
Light-source system 1 sends excitation beam, after the excitation beam illumination iris 3 through measurement object lens 2, focuses on
On sample 5, inspire Raman diffused light and the Brillouin scattering being loaded with sample 5 spectral characteristic
Light, and reflect Reyleith scanttering light；Raman diffused light, Brillouin scattering and Reyleith scanttering light are through measuring the receipts of object lens 2
Collection pupil 4 arrives dichroic optical system 6；Raman diffused light is entered by dichroic optical system 6 with other spectrum
The lossless separation of row；Brillouin scattering and Reyleith scanttering light entrance beam splitting system through dichroic optical system 6 reflection
11；Reyleith scanttering light and Brillouin scattering entrance light splitting pupil confocal laser detection system through beam splitting system 11 transmission
16；Light splitting pupil confocal laser detection system 16 utilizes detector lateral shift can make light splitting pupil confocal microscopy system
The axial response characteristic curve of system produces the characteristic of phase shift, it is achieved the spy to sample 5 microcell geometric position
Survey；Brillouin scattering and Reyleith scanttering light entrance Brillouin spectrum detection system 12 through beam splitting system 11 reflection
Carry out spectrographic detection；Meanwhile, the Raman diffused light through dichroic optical system 6 transmission enters Raman light
Spectrum detection system 7 carries out spectrographic detection.Sample 5 can be by strengthening Raman spectrum nanoparticle etc.
Raman enhancement techniques processes, to improve the intensity of Raman diffused light.
Control three-dimensional scanner 23 by computer processing system 29 and move sample 5, make zones of different
Reyleith scanttering light and to should the Raman diffused light of region sample 5, Brillouin scattering by measure object lens and
Collect pupil.
When the raman spectral signal obtaining Raman spectroscopic detection system 7 processes, system can be carried out
Raman spectroscopic detection；When the Brillouin light spectrum signal obtaining Brillouin spectrum detection system 12 processes,
System can carry out Brillouin spectrum detection；When the signal obtaining light splitting pupil confocal laser detection system 16 enters
When row processes, carry out high spatial resolution tomography；When light splitting pupil confocal laser detection system 16 is obtained
Signal, Raman spectroscopic detection system 7 obtain raman spectral signal and Brillouin spectrum detection system 12 obtain
When the Brillouin light spectrum signal obtained processes simultaneously, system can carry out the microcell collection of illustrative plates of high spatial resolution
Tomography, the integration test to many performance parameters of sample.
Particularly, can by circular illumination iris 3 and collect pupil 4 replace with other shapes (such as D-shaped,
Form the test of D-shaped light splitting pupil confocal laser Raman spectrum, as shown in Figure 3).
Particularly, excitation beam can be the polarized beams such as line polarisation, rotatory polarization；Can also is that and filtered by pupil
The structure light beam that wave technology generates, polarized light is combined with pupil filtering technology and can compress measurement focal beam spot chi
Very little, improve the transverse resolution of system, as shown in Figure 4.
Light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device, as it is shown in figure 5, include producing exciting light
The light-source system 1 of bundle, measurement object lens 2, dichroic optical system 6, Raman spectroscopic detection system 7, light splitting
Pupil confocal laser detection system 16,3 D scanning system 23, displacement transducer 23, data processing unit 25
With computer processing system 29.
Wherein, the pupil plane measuring object lens 2 placed illumination iris 3 and collect pupil 4.Wherein, illumination
Pupil 3 and measurement object lens 2 are sequentially located in the excitation beam exit direction of light-source system 1, illumination iris 3
Coaxial with excitation beam；After dichroic optical system 6 is positioned at collection pupil 4；Beam splitting system 11 is positioned at two
On the reflection direction of color beam splitting system 6.
Raman spectroscopic detection system 7 is positioned in the transmission direction of dichroic optical system 6；Raman spectroscopic detection
System 7 includes the first condenser lens the 8, first spectral detector 9 and the first detector 10.Wherein, the first light
The test surface of spectrum detector 9 is positioned at the focal point of the first condenser lens 8, and the first detector 10 is positioned at the first spectrum
After detector 9.
Brillouin spectrum detection system 12 is positioned at Brillouin spectrum detection system on the reflection direction of beam splitting system 11
System 12 includes second condenser lens the 13, second spectral detector 14 and the second detector 15.Wherein the second spectrum
The test surface of detector 14 is positioned at the focal point of second condenser lens 13, and the second detector 15 is positioned at the second spectrum
After detector 14.
Light splitting pupil confocal laser detection system 16 is positioned in the transmission direction of beam splitting system 11；Light splitting pupil laser
Confocal detection system 16 includes the 3rd condenser lens 17 and image capturing system 18, wherein, image capturing system
The test surface of 18 is positioned at the focal point of the 3rd condenser lens 17.
Data processing unit 25 includes division focal spot detection module 26, extreme value computing module 27 and data fusion
Module 28；Wherein, division focal spot detection module 26 and extreme value computing module 27 are used for processing image acquisition system
The hot spot that system 18 detects, obtains light splitting pupil confocal laser response curve 30, thus obtains sample 5
Positional information；Data fusion module 28 is used for merging positional information I (u, vM), Raman spectral information I (λr) and cloth
In deep pool spectral information I (λB), complete three-dimensionalreconstruction and Spectrum Data Fusion I (x, y, z, the λ of sample 5r,λB)。
Three's incidence relation is: the Aili spot that image capturing system 18 collects is entered by division focal spot detection module 26
Row segmentation also detects, and the signal obtained enters extreme value computing module 27 to carry out after extreme value asks for, obtaining light splitting pupil
Confocal laser response curve 30 enters data fusion module 28.
Computer processing system 29 and displacement transducer 24,3 D scanning system 23, data fusion module 28
It is connected.Image capturing system 18 is connected with division focal spot detection module 26.Data fusion module 28 with
First detector 10 is connected with the second detector 15.
Control 3 D scanning system 23 by computer processing system 29 and move sample 5, make zones of different
Reyleith scanttering light and to should the Raman diffused light of region sample 5 by measuring object lens 2 and collecting pupil 4.
As shown in Figure 6, the first pin hole 33 is laid in the focal position at the first condenser lens 8 and second condenser lens 13
With the second pin hole 34, thus constitute and there is the light splitting pupil confocal laser multi-spectrum synthesis of confocal spectroscopic detection system
Test device.
As it is shown in fig. 7, lay beam modulation system 35 between light-source system 1 and illumination iris 3；Light beam
Modulating system 35 includes the 4th condenser lens 36 being sequentially placed along light path, is positioned at the 4th condenser lens 36 focal point
The 3rd pin hole 37 and focus be positioned at the 5th condenser lens 38 at the 3rd pin hole 37, constitute and there is light beam
The light splitting pupil confocal laser multi-spectrum synthesis test device of modulating system.
As shown in Figure 8, fiber-optic transfer exciting light and scattering spectrum can be passed through, including same with illumination iris 3
The collimating lens 39 of axle, it is positioned at the first fibre-optic terminus 40 of collimating lens 39 focal point, by the first optical fiber
First fibre-optic terminus 40 is connected by wire jumper 41 with laser instrument 1；It is positioned at the second of the first condenser lens 8 focal point
Fibre-optic terminus 42, by the second optical patchcord 43 by the second fibre-optic terminus 42 and the first spectral detector 9 phase
Even；It is positioned at the 3rd fibre-optic terminus 44 of second condenser lens 13 focal point, by the 3rd optical patchcord 45 by
Three fibre-optic terminuss 44 are connected 14 with the second spectral detector.To realize modularity dismounting, select flexibly function with
And large scale detection measurement.
As it is shown in figure 9, in light splitting pupil confocal laser detection system 16, increase image enhancement system 46, energy
Enough amplify the Aili spot that image capturing system 18 detects, thus improve light splitting pupil confocal laser detection device
Acquisition precision；It is sequentially placed the 3rd condenser lens 17, image enhancement system 46 and image capturing system along light path
18, wherein, image enhancement system 46 and the confocal point of the 3rd condenser lens 17, image capturing system 18 is positioned at figure
Focal point as amplification system 46.
Embodiment
In the present embodiment, dichroic optical system 6 is Notch Filter, and the first spectral detector 9 is Raman
Spectral detector, beam splitting system 11 is spectroscope, and the second spectral detector 14 is Brillouin spectrum detector,
Image capturing system 18 is CCD, and 3 D scanning system 23 is 3-D scanning workbench, image enhancement system
46 is enlarging objective.
As shown in Figure 10, light splitting pupil confocal laser Brillouin-Raman spectrum super-resolution measuring method, its test
Step is as follows:
First, the pupil plane measuring object lens 2 placed illumination iris 3 and collect pupil 4.By laser instrument structure
The light-source system 1 become sends the exciting light that can inspire sample 5 Raman spectrum, and exciting light gathers through the 4th
Light microscopic 36 enters the 3rd pin hole 37 after assembling becomes point source, then is positioned at the 5th of the 3rd pin hole 37 the through focus
After condenser lens 38 collimator and extender, form parallel excitation beam.Excitation beam is once sent out through radial polarisation light
After raw device 20 and the first iris filter 21, transmission illumination pupil 3, measurement object lens 2, focus on sample
On 5, return inspire be loaded with the Raman diffused light of sample 5 spectral characteristic, Brillouin scattering and auspicious
Profit light.
Then, control 3-D scanning workbench 23 by computer processing system 29 and move sample 5, make
Zones of different Reyleith scanttering light and to should region sample 5 Raman diffused light by measure object lens 2 and collect
Pupil 4, Raman diffused light is carried out lossless separation with other spectrum by dichroic optical system 6.
Through Reyleith scanttering light and the Brillouin scattering entrance spectroscope 11 of dichroic optical system 6 reflection, through light splitting
The Brillouin scattering of mirror 11 transmission and Reyleith scanttering light enter light splitting pupil laser after the second iris filter 22
Confocal detection system 16, enters enlarging objective 46, the hot spot after being exaggerated after the 3rd condenser lens 17 is assembled
Being detected by CCD18, the hot spot that CCD18 detects enters division focal spot detection module 26, at detection focal spot
Centrally disposed tiny area search coverage 19, the response recording this region is I (u)；Extreme value computing module 27
The signal obtained is carried out extreme value ask for, obtain the extreme point of light splitting pupil confocal laser response curve 30；Light splitting
" extreme point " of pupil confocal laser response curve 30 is the most corresponding with the focused spot of excitation beam, by response
" extreme point " of curve 30 obtains the elevation information of sample surfaces, the position of bound site displacement sensor 24 feedback
Signal reconstruct goes out the three-dimensional surface shape of sample 5.
Brillouin scattering and Reyleith scanttering light entrance Brillouin spectrum detection system 12, warp through spectroscope 11 reflection
Brillouin spectrum detector 14 and thereafter is entered after the second pin hole 34 on second converging lenses 13 and focus thereof
The second detector 15, record Brillouin scattering spectrum response curve I (λB) 32, wherein λBFor sample 5
Stimulated luminescence excites the wavelength of sent Brillouin scattering.
Simultaneously the Raman diffused light through dichroic optical system 6 transmission enters Raman spectroscopic detection system 7, through the
After the first pin hole 33 on one condenser lens 8 and focus thereof enter Raman spectroscopy detector 9 with and subsequent first
Detector 10, records the raman scattering spectrum response curve I (λ being loaded with sample 5 spectral informationr) 31, its
Middle λrWavelength by sample 5 the inspired Raman diffused light of stimulated luminescence；
Owing to this device have employed radial polarisation light tightly focused technology, if to the signal of search coverage
Reason, obtains light splitting pupil confocal laser response I (u), then by its extreme point, accurately capture excites Jiao of hot spot
Point position, system can carry out the three dimension scale tomography of super-resolution.
If the spectral response curve I (λ that the Raman spectroscopic detection system 7 of Raman diffused light obtains is received in dockingr) 31 enter
When row processes, system can carry out Raman spectroscopic detection.
If the spectral response that the Brillouin spectrum detection system 12 receiving Brillouin scattering and Reyleith scanttering light is obtained
Curve I (λB) 32 when processing, system can carry out Brillouin spectrum detection.
If the light splitting pupil confocal laser response that the light splitting pupil confocal laser detection system 16 receiving Reyleith scanttering light is obtained
Raman spectral signal I (the λ that I (u), Raman spectroscopic detection system 7 obtainr) and Brillouin spectrum detection system 12
The Brillouin light spectrum signal I (λ obtainedB) when processing, system can carry out the microcell of superspace resolution simultaneously
Collection of illustrative plates tomography, i.e. realizes the superspace resolution of sample 5 geometric position information and multispectral information
Many performance parameters Effect on Detecting.
As shown in Figure 10, light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device includes producing exciting light
The light-source system 1 of bundle, measurement object lens 2, illumination iris 3, collection pupil 4, Notch Filter6, Raman light
Spectrum detection system 7, spectroscope 11, Brillouin spectrum detection system 12, light splitting pupil confocal laser detection system
16, radial polarisation optical generator the 20, first iris filter the 21, second iris filter 22,3-D scanning
Workbench 23, displacement transducer 24 and data processing unit 25；Wherein, at the pupil measuring object lens 2
Place illumination iris 3 on face and collect pupil 4；Radial polarisation optical generator the 20, first iris filter 21
It is placed on the beam exit direction of light-source system 1 with illumination iris 3, radial polarisation optical generator 20,
One iris filter 21, illumination iris 3 are coaxial with excitation beam, and Notch Filter6 is placed on collection pupil 4
Afterwards, Raman spectroscopic detection system 7 is placed in the transmission direction of Notch Filter6, and spectroscope 11 is positioned at
On the reflection direction of Notch Filter6.Brillouin spectrum detection system 12 is placed on the reflection side of spectroscope 11
Upwards, light splitting pupil confocal laser detection system 16 on the reflection direction of spectroscope 11, data processing unit
25 are used for melting merging treatment Raman spectroscopic detection system 7, Brillouin spectrum detection system 12, light splitting pupil laser
The data that confocal detection system 16 and displacement transducer 24 collect；In Raman spectroscopic detection system 7 first
The focal point of condenser lens 8 is placed the first pin hole 33 and is filtered veiling glare, to improve Raman spectroscopic detection letter
Make an uproar ratio；In Brillouin spectrum detection system 12, the focal point of second condenser lens 13 places the second pin hole 34 to miscellaneous
Astigmatism filters, to improve the signal to noise ratio of Brillouin spectrum detection；Light-source system 1 is by including that the 4th gathers
Light microscopic 36, the 3rd pin hole 37 being positioned at the 4th condenser lens 36 focal point and focus are positioned at the 3rd pin hole 37
The excitation beam that light-source system 1 is sent by the beam modulation system 35 that the 5th condenser lens 38 at place is constituted is carried out
Modulation, to ensure the quality of excitation beam；3rd condenser lens 17 in light splitting pupil confocal laser detection system 16
Picture on focal plane is amplified into CCD18 by enlarging objective 46, in order to detector carries out division focal spot
Detection, improves detection accuracy.
Above in association with accompanying drawing, the detailed description of the invention of the present invention is described, but these explanations do not make sense
For limiting the scope of the present invention, protection scope of the present invention is limited by appended claims, Ren He
The change carried out on the basis of the claims in the present invention is all protection scope of the present invention.
Claims (9)
1. light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum, it is characterised in that comprise the following steps:
Step one, places illumination iris (3) on the pupil plane measuring object lens (2) and collects pupil (4)；Light-source system (1) sends excitation beam, after the excitation beam illumination iris (3) through measurement object lens (2), focus on sample (5), inspire Raman diffused light and the Brillouin scattering being loaded with sample (5) spectral characteristic, and reflect Reyleith scanttering light；Raman diffused light, Brillouin scattering and Reyleith scanttering light arrive dichroic optical system (6) through the collection pupil (4) measuring object lens (2)；Raman diffused light is carried out lossless separation with other spectrum by dichroic optical system (6)；
Step 2, the Brillouin scattering reflected through dichroic optical system (6) and Reyleith scanttering light enter beam splitting system (11)；Reyleith scanttering light and Brillouin scattering entrance light splitting pupil confocal laser detection system (16) through beam splitting system (11) transmission；Light splitting pupil confocal laser detection system (16) utilizes detector lateral shift that the axial response characteristic curve of light splitting pupil confocal microscope system can be made to produce the characteristic of phase shift, it is achieved the detection to sample (5) microcell geometric position；The Brillouin scattering reflected through beam splitting system (11) and Reyleith scanttering light enter Brillouin spectrum detection system (12) and carry out spectrographic detection；Meanwhile, the Raman diffused light through dichroic optical system (6) transmission enters in Raman spectroscopic detection system (7) and carries out spectrographic detection；
Step 3, enter light splitting pupil confocal laser detection system (16) through the Reyleith scanttering light of beam splitting system (11) transmission and Brillouin scattering；Light splitting pupil confocal laser detection system (16) utilizes detector lateral shift that the axial response characteristic curve of light splitting pupil confocal microscope system can be made to produce the characteristic of phase shift, it is achieved the detection to sample microcell geometric position；Detailed process is: the detection hot spot obtaining light splitting pupil confocal laser detection system (16) processes, obtain search coverage, record intensity response I (u) of the reflection concavo-convex change of sample, the three dimension scale tomography detection of high-space resolution can be carried out, wherein, u is axial normalization optical coordinate；
When the raman spectral signal obtaining Raman spectroscopic detection system (7) processes, it is possible to carry out Raman spectroscopic detection；When the Brillouin light spectrum signal obtaining Brillouin spectrum detection system (12) processes, it is possible to carry out Brillouin spectrum detection；When the signal obtaining light splitting pupil confocal laser detection system (16) processes, carry out high spatial resolution tomography；When the raman spectral signal that the signal obtaining light splitting pupil confocal laser detection system (16), Raman spectroscopic detection system (7) obtain and the Brillouin light spectrum signal that Brillouin spectrum detection system (12) obtains process simultaneously, the microcell collection of illustrative plates tomography of high spatial resolution can be carried out, many performance parameters of sample are carried out integration test.
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum the most according to claim 1, it is characterised in that: illumination iris (3) and collection pupil (4) they are circular, D-shaped or other shapes.
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum the most according to claim 1, it is characterised in that: excitation beam is line polarisation, rotatory polarization；Or the structure light beam generated by pupil filtering technology, polarized light is combined with pupil filtering technology can compress measurement focused spot size, improves transverse resolution.
Light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum the most according to claim 1, it is characterised in that: the method can detect and include fluorescence or Compton scattering spectrum.
5. light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device, it is characterised in that: include producing the light-source system (1) of excitation beam, measuring object lens (2), dichroic optical system (6), Raman spectroscopic detection system (7), light splitting pupil confocal laser detection system (16), 3 D scanning system (23), displacement transducer (24), data processing unit (25)；
Wherein, the pupil plane measuring object lens (2) placed illumination iris (3) and collect pupil (4)；Wherein, illumination iris (3) and measurement object lens (2) are sequentially located in the excitation beam exit direction of light-source system (1), and illumination iris (3) is coaxial with excitation beam；Sample (5) is fixed on the object stage of 3 D scanning system (23)；
After dichroic optical system (6) is positioned at collection pupil (4)；Raman spectroscopic detection system (7) is positioned in the transmission direction of dichroic optical system (6)；Raman spectroscopic detection system (7) includes the first condenser lens (8), the first spectral detector (9) and the first detector (10)；Wherein, the test surface of the first spectral detector (9) is positioned at the focal point of the first condenser lens (8), after the first detector (10) is positioned at the first spectral detector (9)；
Beam splitting system (11) is positioned on the reflection direction of dichroic optical system (6)；Brillouin spectrum detection system (12) is positioned on the reflection direction of beam splitting system (11), and Brillouin spectrum detection system (12) includes second condenser lens (13), the second spectral detector (14) and the second detector (15)；Wherein the test surface of the second spectral detector (14) is positioned at the focal point of second condenser lens (13), after the second detector (15) is positioned at the second spectral detector (14)；
Light splitting pupil confocal laser detection system (16) is positioned in the transmission direction of beam splitting system (11)；Light splitting pupil confocal laser detection system (16) includes the 3rd condenser lens (17) and image capturing system (18), wherein, the test surface of image capturing system (18) is positioned at the focal point of the 3rd condenser lens (17)；
Data processing unit (25) includes division focal spot detection module (26), extreme value computing module (27) and data fusion module (28)；Wherein, division focal spot detection module (26) and extreme value computing module (27) are used for processing the hot spot that image capturing system (18) detects, obtain light splitting pupil confocal laser response curve (30), thus obtain the positional information of sample (5)；Data fusion module (28) is used for merging positional information I (u), Raman spectral information I (λr) and Brillouin light spectrum information I (λB), complete three-dimensionalreconstruction and Spectrum Data Fusion I (x, y, z, the λ of sample (5)r,λB)；Three's incidence relation is: the Aili spot that image capturing system (18) collects is split and detects by division focal spot detection module (26), the signal that obtains enters extreme value computing module (27) to carry out after extreme value asks for, obtaining light splitting pupil confocal laser response curve (30) and entering data fusion module (28)；
Computer processing system (29) is connected with 3 D scanning system (23), displacement transducer (24), data fusion module (28)；Image capturing system (18) is connected with division focal spot detection module (26)；Data fusion module (28) is connected with the first detector (10) and the second detector (15).
6. light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device as claimed in claim 5, it is characterized in that, the first pin hole (33) is laid in the focal position of the first condenser lens (8), and after the first spectral detector (9) is positioned at the first pin hole (33)；The second pin hole (34) is laid in the focal position of second condenser lens (13), and second after spectral detector (14) is positioned at the second pin hole (34), to filter the veiling glare beyond focus, improve the signal to noise ratio of detection system.
7. light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device as claimed in claim 5, it is characterised in that lay beam modulation system (35) between light-source system (1) and illumination iris (3)；Beam modulation system (35) includes that the 4th condenser lens (36), the 3rd pin hole (37) being positioned at the 4th condenser lens (36) focal point and the focus that are sequentially placed along light path are positioned at the 5th condenser lens (38) at the 3rd pin hole (37) place, to obtain more preferable excitation beam and stimulation effect.
8. light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device as claimed in claim 5, it is characterized in that, by fiber-optic transfer exciting light and scattering spectrum, including the collimating lens (39) coaxial with illumination iris (3), the first fibre-optic terminus (40) of being positioned at collimating lens (39) focal point, by the first optical patchcord (41), the first fibre-optic terminus (40) are connected with light-source system (1)；It is positioned at second fibre-optic terminus (42) of the first condenser lens (8) focal point, by the second optical patchcord (43), the second fibre-optic terminus (42) is connected with the first spectral detector (9)；It is positioned at the 3rd fibre-optic terminus (44) of second condenser lens (13) focal point, by the 3rd optical patchcord (45), the 3rd fibre-optic terminus (44) is connected with the second spectral detector (14), facilitate implementation modularity dismounting, select function and large scale detection to measure flexibly.
9. light splitting pupil confocal laser Brillouin-raman spectroscopy measurement device as claimed in claim 5, it is characterized in that, light splitting pupil confocal laser detection system (16) includes the 3rd condenser lens (17) and image capturing system (18), wherein, the test surface of image capturing system (18) is positioned at the focal point of the 3rd condenser lens (17)；Also include image enhancement system (46), image enhancement system (46) and the 3rd confocal point of condenser lens (17), image capturing system (18) is positioned at the focal point of image enhancement system (46), to improve the acquisition precision of light splitting pupil confocal laser detection system.
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