CN103753449B - Flexible hinge and floating frame matched clamping and positioning device for optical component - Google Patents
Flexible hinge and floating frame matched clamping and positioning device for optical component Download PDFInfo
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- CN103753449B CN103753449B CN201310744695.XA CN201310744695A CN103753449B CN 103753449 B CN103753449 B CN 103753449B CN 201310744695 A CN201310744695 A CN 201310744695A CN 103753449 B CN103753449 B CN 103753449B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/02—Assembly jigs
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Abstract
The invention discloses a flexible hinge and floating frame matched clamping and positioning device for an optical component. A flexible hinge and a floating frame are matched to be used for clamping and positioning the optical component, so that a large-caliber optical component is provided with the low-stress-strain reliable clamping capacity in the horizontal plane, moreover, the floating frame and two-dimensional large stroke are in flexible connection, so that the parallelism between the optical element surface and the work table plane is guaranteed. The flexible hinge is fixedly connected with a crystal frame, connection lugs are fixed on the crystal frame, positioning blocks are fixed in the crystal frame, and the optical component is disposed in the crystal frame integrally and positioned through the positioning blocks. Locking blocks are fixed in the crystal frame, first positioning screws are screwed in the locking blocks, and the optical component is pre-clamped and fixed between the first positioning screws and the positioning blocks. Compression blocks are fixedly connected with the crystal frame, and the optical component is compressed and fixed vertically through the compression blocks. Spherical hinge studs are fixedly connected with connection lugs and are in contact with air floating pads. The device is used for clamping and positioning of optical elements during micro-defect rapid searching and repairing.
Description
Technical field
The present invention relates to a kind of flexible hinge to match for the Set and Positioning of optical module with air supporting framework.
Background technology
In Ultra-precision Turning and light laser target practice process, optical element surface is because of fly cutting technique or the percussion being subject to light laser, easily produce the various forms of microdefect point such as micro-crack or ablation pit at optical element surface, the microdefect of optical element surface needs to remove as early as possible at the shaping initial stage, otherwise can grow up rapidly in light laser target practice process, thus cause optical element to destroy so that can not use, because optical element cost is extremely expensive, therefore great waste can be caused.Current proposition adopts micro-restorative procedure to delay serviceability and the service life of optical element, and obtains a large amount of feasibility Experiment checkings.Optical elements of large caliber surface microdefect is when carrying out the micro-reparation of precision, first optical element itself is needed to be fixed in a pallet, this pallet is fixed optical element with four limit method of clamping, the both ends of the surface up and down of pallet have structures such as organizing ball bearing, glue nail and compressing tablet more, and the pallet being provided with optical element is referred to as optical module.
In order to all effectively repair the microdefect of optical element surface different parts, needing that optical module level is arranged on one can realize in the air supporting framework of horizontal movement on a large scale, and need to carry out Set and Positioning to this optical module, then, when air supporting framework realizes grand movement, precise repairing can be carried out to the microdefect of optical element surface different parts.
Air supporting framework itself can not realize grand movement in horizontal plane, and it needs could realize under the drive of two-dimensional large-stroke linkage device.When realizing total travel motion on a large scale under the drive of air supporting framework in two-dimensional large-stroke linkage device, owing to needing to ensure that optical element surface and workbench surface have the very high depth of parallelism and two plan range substantially constants in total-travel mobile process, thus air supporting framework can not directly and two-dimensional large-stroke linkage device rigid attachment, otherwise, because of the foozle of two-dimensional large-stroke two shifting axle itself, rigging error and comprehensive superposition thereof, this error can be accumulated on air supporting framework, requirement when causing the position of optical element and attitude can not meet Repair gene thus.
For the problems referred to above, need to design a kind of air supporting framework optical module to low stress strain reliable retention, and need to design a kind of flexible coupling mechanism between air supporting framework and two-dimensional large-stroke linkage device, after this flexible coupling mechanism of use, air supporting framework can be made to have the deflection of several micron dimension on the surface at horizontal table, the depth of parallelism on strict guarantee optical element surface and workbench surface thus, and this meaning of the present invention just.
Summary of the invention
The object of this invention is to provide a kind of flexible hinge and coordinate device for optical module Set and Positioning with air supporting framework, with the reliable retention ability making large-aperture optical assembly have low stress strain in horizontal plane, and air supporting framework and two-dimensional large-stroke adopt flexible connected to ensure the depth of parallelism of optical element surface and table plane.
Air supporting framework designed by the present invention operates steadily, the flexible hinge designed has in vertical direction that rigidity is as far as possible low (Z-direction rigidity is 0.69N/mm), and rigidity is tried one's best greatly in the horizontal direction, and (X is 694.44N/mm to rigidity, Y-direction rigidity is 76.9N/mm) etc. feature, meet the requirement of optical element surface microdefect precise repairing with this.
For achieving the above object, the technical scheme taked is as follows in the present invention:
Flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework, described flexible hinge coordinates the device being used for optical module Set and Positioning to comprise air supporting framework, three floating cushions, three ball pivot studs and two groups of flexible hinges with air supporting framework, described air supporting framework comprises crystal frame, two compact heaps, two dog screws, one, two dog screws, two, two latch segments, two locating pieces and five engaging lugs;
Described crystal frame is horizontally disposed rectangle frame, and same any lateral surface of two groups of flexible hinges and crystal frame is affixed; Its excess-three lateral surface of crystal frame is fixed with five engaging lugs altogether, wherein two relative inner faces of crystal frame are respectively fixed with a locating piece, two locating pieces are respectively equipped with a locating surface, two locating surfaces are arranged in same vertical plane, it is inner that optical module entirety is placed on crystal frame, and located by two locating surfaces of described two locating pieces; In crystal frame, the same side of each locating piece is provided with a latch segment, two latch segments and crystal frame affixed, two latch segments are oppositely arranged, screw one is provided with the perpendicular direction of described locating surface in latch segment, dog screw one screws in the screw one of latch segment, and optical module is fixedly clamped in advance between two dog screws one and two locating pieces; The homonymy being positioned at each locating piece in crystal frame is provided with a compact heap, compact heap and crystal frame affixed, each compact heap is vertically provided with screw two, and dog screw two to screw in screw two and is resisted against on crystal frame, and optical module is vertically fixed by compact heap; Any three engaging lugs in three ball pivot studs and five engaging lugs are affixed, and the pommel of each ball pivot stud contacts with corresponding floating cushion upper surface ball-and-socket.
The present invention relative to the beneficial effect of prior art is:
(1) air supporting framework achieves reliable clamping, and compact conformation, function are complete, and largest deformation amount during air supporting frame work is better than 10 μm, meets optical element and repairs requirement.
(2) air supporting framework adopts three floating cushion supporting way, supporting way after the parameter optimization of floating cushion installation site is Class1 or type 3 structure, these two kinds of modes can make the deformation of air supporting framework Z-direction reach minimum, and floating cushion venting pressure parameter area is 0.2-0.4MPa.
(3) after flexible hinge structure parameter optimization, the rigidity in six-freedom degree direction obtains reasonable disposition, and its torsional rigidity, much smaller than the stiffness index of the 50N/ of single floating cushion own μm, makes the connection of air supporting framework and straight line units meet design requirement.
(4) in this contrive equipment, air supporting framework and two-dimensional large-stroke link and partly adopt flexible hinge connected mode, can realize the strain of good low stress to connect, this structural design effectively can ensure that air supporting framework and granite precision surface plate realize reliable grand movement.
(5) large-aperture optical assembly (size 430mm × 430mm) has the reliable retention ability of low stress strain in horizontal plane, and air supporting framework and two-dimensional large-stroke adopt flexible connected to ensure the depth of parallelism of optical element surface and table plane.
Accompanying drawing explanation
Fig. 1 is flexible hinge of the present invention coordinates for optical module Set and Positioning device front view with air supporting framework; Fig. 2 is the top view of Fig. 1; Fig. 3 is that enlarged drawing is looked on a left side of Fig. 2; Fig. 4 is the top view of flexible hinge; Fig. 5 is the A-A sectional view of Fig. 4; Fig. 6 is flexible hinge stereogram; Fig. 7 is the front view of hinge seat; Fig. 8 is Fig. 7 top view; Fig. 9 is the B-B sectional view of Fig. 7; Figure 10 is the stereogram of hinge seat; Figure 11 is the front view of crystal frame; Figure 12 is the top view of Figure 11; Figure 13 is that enlarged drawing is looked on a left side of Figure 11; Figure 14 is the stereogram of crystal frame; Figure 15 is the front view of latch segment; Figure 16 is the top view of Figure 15; Figure 17 is the left view of Figure 15; Figure 18 is the stereogram of latch segment; Figure 19 is the front view of compact heap; Figure 20 is the top view of Figure 19; Figure 21 is the left view of Figure 19; Figure 22 is the stereogram of compact heap; Figure 23 is the Four types arrangement form sketch feasible on air supporting framework of three floating cushions, wherein, Figure 23 a is three floating cushions, 1 arrangement form schematic diagrames by type on air supporting framework, and Figure 23 b is the Class1 arrangement form schematic diagram feasible on air supporting framework of three floating cushions; Figure 24 is the M place partial enlarged drawing of Fig. 1; Figure 25 is the N place partial enlarged drawing of Fig. 2; Figure 26 is the P place partial enlarged drawing of Fig. 3.
The component names mod sum label related in above-mentioned figure is as follows:
Crystal frame 1, optical module 2, flexible hinge 3, hinge seat 3-1, reed 3-2, hexagon thin nut 4, hexagon socket cap head screw 5, compact heap 6, boss 6-1, elongated slot 6-2, dog screw 27, dog screw 1, latch segment 9, floating cushion 11, ball pivot stud 13, locating piece 15, locating surface 15-1, engaging lug 20, two-dimensional large-stroke linkage device 30.
Detailed description of the invention
Detailed description of the invention one: composition graphs 1-Figure 22 and Figure 24-Figure 26 explanation, the flexible hinge of present embodiment coordinates the device being used for optical module Set and Positioning with air supporting framework, described flexible hinge coordinates the device being used for optical module Set and Positioning to comprise air supporting framework, three floating cushions, 11, three ball pivot studs 13 and two groups of flexible hinges 3 with air supporting framework, described air supporting framework comprises crystal frame 1, two compact heaps 6, two dog screws one 8, two dog screws 27, two latch segments 9, two locating pieces 15 and five engaging lugs 20;
Described crystal frame 1 is horizontally disposed rectangle frame (being the main part of whole device), same any lateral surface affixed (passing through screw bolt and nut) of two groups of flexible hinges 3 and crystal frame 1; Its excess-three lateral surface of crystal frame 1 is fixed with five engaging lugs 20 altogether, wherein two relative inner faces of crystal frame 1 are respectively fixed with a locating piece 15, two locating pieces 15 are respectively equipped with a locating surface 15-1, two locating surface 15-1 are arranged in same vertical plane, it is inner that optical module 2 entirety is placed on crystal frame 1, and located by two locating surface 15-1 of described two locating pieces 15; In crystal frame 1, the same side of each locating piece 15 is provided with a latch segment 9, two latch segments 9 and crystal frame 1 affixed (passing through screw), two latch segments 9 are oppositely arranged, screw one is provided with the described perpendicular direction of locating surface 15-1 in latch segment 9, dog screw 1 (for hexagon socket cap head screw) screws in the screw one of latch segment 9, and optical module 2 is fixedly clamped in advance between two dog screws 1 and two locating pieces 15; The homonymy being positioned at each locating piece 15 in crystal frame 1 is provided with a compact heap 6, compact heap 6 and crystal frame 1 affixed (passing through screw), each compact heap 6 is vertically provided with screw two, dog screw 27 (for high head milled screw) to screw in screw two and is resisted against on crystal frame 1, and optical module 2 is vertically fixed by compact heap 6; Any three engaging lugs 20 affixed (passing through nut) in three ball pivot studs 13 and five engaging lugs 20, the pommel of each ball pivot stud 13 contacts with corresponding floating cushion 11 upper surface ball-and-socket.Described air supporting framework is made up of duralumin, hard alumin ium alloy material (trade mark 2024).
The design and optimization of floating cushion and flexible hinge:
In air supporting framework, the arrangement mode of floating cushion and installation site are analyzed
Air supporting framework needs install floating cushion, being supported by floating cushion and make air supporting framework be suspended on horizontal operation platform, is very crucial problem about the quantity of floating cushion and the arrangement position on air supporting framework.In floating cushion quantity is chosen, first consider at 3 and determine a plane principle, each floating cushion and air supporting framework all adopt ball pivot (ball pivot stud 13) to be connected, the unnecessary free degree can not be brought into, and use total bearing capacity of three floating cushions to meet the demands, therefore determine that floating cushion quantity is three.In the arrangement of floating cushion position, emphasis considers that different arrangement form causes the deformation of air supporting framework Z-direction.Floating cushion venting pressure parameter area is 0.2-0.4MPa.
First arrangement form feasible on air supporting framework for three floating cushions 11 is divided into Four types, as shown in figure 23.
On setting crystal frame 1 be fixed with two groups of corresponding side frame L2 in flexible hinge 3 side and represent, right frame perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 represents with L1, left frame perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is L3, with A, B, C represent three floating cushion 11 strong points.
A) three floating cushion 11 strong point A, B, C lay respectively at the outside of air supporting framework three outer side frames, and namely strong point A is positioned at outside L1, and strong point B is positioned at outside L2, and strong point C is positioned at outside L3; Be called Class1; The i.e. structure of detailed description of the invention two restriction, as shown in fig. 23 a;
B) strong point A of two floating cushions 11, B is positioned at outside L1, and the strong point C of a residue floating cushion 11 is positioned at outside L2; Be called type 2; As shown in fig. 23b;
C) strong point A of two floating cushions 11, B is positioned at outside L1, and the strong point C of a residue floating cushion 11 is positioned at outside L3; Be called type 3; The i.e. structure of detailed description of the invention three restriction, as shown in Figure 23 c;
D) strong point A of two floating cushions 11, B is positioned at outside L2, and the strong point C of a residue floating cushion 11 is positioned at outside L3; Be called type 4, as shown in Figure 23 d.
Above four kinds of situations cover all three feasible gas bearing supporting arrangement forms.
Then parameterized finite element modeling is carried out to air supporting framework, to obtain the particular location parameter of three the floating cushion strong points A, B, C.Its Optimal Parameters is shown in Table 1; In the every type represented in table 1, preferred plan data in the strong point arrangement form of floating cushion 11.
Table 1
As can be seen from Table 1, Class1 and these two groups of floating cushion supporting way of type 3 meet supporting arrangement to require, need to keep away specific requirement, determination Selective type 1 of the present invention and these two kinds of floating cushions the best arrangement modes of type 3 such as barrier, structure be simple according to air supporting framework and optical element reparation.After floating cushion arrangement mode (Class1 and type 3) is finally determined, need the concrete installation site optimizing floating cushion again.Calculate through modeling Analysis, finally obtain the installation site of air supporting framework floating cushion under these two kinds of arrangement modes.
Through the installation site of its floating cushion 11 of finite element optimization, research finds to be a) and c) maximum support scheme, and the installation site finally determining floating cushion 11 is as shown in fig. 23 a and as shown in Figure 23 c.
The arrangement form of this Optimal Parameters design makes optical element fixture largest deformation amount occur in the left side of air supporting framework, and the largest deformation amount of two kinds of arrangement mounting means is better than 10 μm.Therefore, this Optimal Parameters is the quantity and the installation site that the invention provides floating cushion arrangement quantity.Its arrangement quantity is 3 floating cushions, and floating cushion installation site adopts Class1 or this scheme of type 3.
Detailed description of the invention two: described in present embodiment, the distribution mode of five engaging lugs 20 on its excess-three lateral surface described in crystal frame 1 is as follows: crystal frame 1 is connected with an engaging lug 20 with the lateral surface being fixed with corresponding side, two groups of flexible hinge 3 sides, each lateral surface perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is connected with two engaging lugs 20.In present embodiment, undocumented technical characteristic is identical with detailed description of the invention one.
Detailed description of the invention three: described in present embodiment, the distribution mode of five engaging lugs 20 on its excess-three lateral surface described in crystal frame 1 is as follows: a wherein lateral surface of two lateral surfaces perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is connected with two engaging lugs 20, another lateral surface of two lateral surfaces perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is connected with an engaging lug 20.In present embodiment, undocumented technical characteristic is identical with detailed description of the invention one.
Detailed description of the invention four: described in present embodiment, three ball pivot stud 13 distribution modes are as follows: engaging lug 20 fixing with the lateral surface being fixed with corresponding side, two groups of flexible hinge 3 sides on described crystal frame 1 is with wherein a ball pivot stud 13 is affixed; One in two engaging lugs 20 that each lateral surface perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is affixed affixed with in two ball pivot studs 13 of remainder.In present embodiment, undocumented technical characteristic is identical with detailed description of the invention two.
Detailed description of the invention five: described in present embodiment, three ball pivot stud 13 distribution modes are as follows: two engaging lugs 20 that a wherein lateral surface of two lateral surfaces perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is affixed are each affixed with a ball pivot stud 13, the engaging lug 20 that another lateral surface of two lateral surfaces perpendicular with being fixed with two groups of flexible hinge 3 sides on crystal frame 1 is affixed is affixed with a remaining ball pivot stud 13.In present embodiment, undocumented technical characteristic is identical with detailed description of the invention three.
Detailed description of the invention six: composition graphs illustrates, the often group flexible hinge 3 of present embodiment comprises two hinge seat 3-1 and two reed 3-2; Described two hinge seat 3-1 are set up in parallel, and are set side by side with two reed 3-2 between two hinge seat 3-1; Two hinge seat 3-1 and two reed 3-2 affixed (passing through screw and nut), the described same any lateral surface often organizing one of them hinge seat 3-1 of flexible hinge 3 and crystal frame 1 is affixed.In present embodiment, undocumented technical characteristic is identical with detailed description of the invention one.
Remaining next hinge seat 3-1 and the two-dimensional large-stroke linkage device 30 of often organizing flexible hinge 3 are affixed.
For the air supporting framework that floating cushion 11 supports, it reaches standing balance under the effect of self gravitation and floating cushion 11 thrust, when adopting flexible hinge 3 to connect when between air supporting framework with two-dimensional large-stroke linkage device 30, need flexible hinge 3 rigidity in the horizontal plane enough large, and rigidity is in vertical direction as far as possible low, to reduce the unbalance loading operating mode of air supporting framework.According to above-mentioned requirements and the restriction of air supporting framework size, the present invention devises double-reed flexible hinge, and the parameter of major part reed is: material 65Mn.
Flexible hinge 3 in the rigidity expression formula of sensitive direction is:
E-elasticity modulus of materials in formula; Unit Pa;
H-reed thickness; Unit mm;
L-hinge span, unit mm;
The width at half round cut and the narrowest place of openwork part, inner side outside t-reed 3-2, unit mm;
R-cutting radius of circle, unit mm.
Table 2 gives the reed 3-2 of flexible hinge 3 critical size relevant to its rigidity;
Table 2
Parameter in table 2 is substituted into formulae discovery and obtains following rigidity value K:
Finite element analysis software is used to analyze to rigidity each of flexible hinge 3.Whole free degree is retrained to flexible hinge 3 left side (side end face that namely flexible hinge 3 is affixed with described same any lateral surface of crystal frame 1), apart from flexible hinge 3 right side (another lateral surface that namely flexible hinge 3 is affixed with two-dimensional large-stroke linkage device 30) 5mm place, one node is being set, MPC184 buckstay unit is used to connect all nodes on described right side, X is applied respectively at the node arranged apart from 5mm place, flexible hinge 3 right side, Y, the power of the 1N of Z-direction and around X, Y, the torque of the 1N/m of Z, the load applied can be thought to be delivered to right side via buckstay unit completely, obtain six displacement cloud atlas, can as table 3 power/moment-shift value by displacement cloud atlas reading:
Table 3
The rigidity of respective direction can be calculated by the strain and displacement in each direction.The wherein sensitive direction of Y-direction i.e. flexible hinge 3, its rigidity is minimum, and close with calculated value, illustrates that theoretical formula is reliable.Compare Y-direction in the rigidity of Z-direction and improve two orders of magnitude, and X-direction improves 3 orders of magnitude especially.Except three mobile rigidity meet the demands, rigidity around X-axis in rotational stiffness is minimum, all the other two directional stiffness are all greater than around X-direction rigidity order of magnitude, in fact the depth of parallelism requirement of two flexible hinges 3 assemblings is relaxed at the Low rigidity around X-axis, flexible hinge 3 both ends of the surface are except having relative displacement along Z-direction at work, also allow the torsion around X-direction of certain angle, alleviate the problem of the framework free degree Planar Mechanisms simultaneously using two flexible hinges 3 to cause.
Coupling apparatus element precision, employing extremum method calculates, the maximum displacement that must produce in Z-direction (i.e. the Y-direction of flexible hinge 3 local coordinate system) is about 50 μm, its power produced is 0.035N, can ignore rigidity relative to single floating cushion 50N/ μm, optical element fixture can not be made to produce.So demonstrate the reasonability of flexible hinge 3 draw bail designed by the present invention.
Detailed description of the invention seven: composition graphs 1, Figure 19 to Figure 22 illustrate, described in present embodiment, one end of the lower surface of compact heap 6 is provided with boss 6-1, the boss 6-1 that described optical module 2 is provided with by compact heap 6 lower surface is vertically fixed, compact heap 6 is provided with elongated slot 6-2, the short transverse that elongated slot 6-2 runs through compact heap 6 is offered, hexagon socket cap head screw 5 penetrates in the elongated slot 6-2 of compact heap 6, compact heap 6 and crystal frame 1 by hexagon socket cap head screw 5 and hexagon thin nut 4 affixed.
Whole assembly Z-direction working depth is successfully controlled in 35mm, and the full-scale machining area of 500mm × 500mm is exposed to micromachined mechanism completely, with the micro-Repair gene of the precision realizing optical element surface different parts.Compact heap 6 utilizes lever principle, and the high head milled screw that turns clockwise can compress.Compact heap 6 can slide along groove 6-2, conveniently abdicates occlusion area and picks and places optical element pallet.
Analyze optical element pallet, when being referred to as optical module after this pallet holding optical components, this optical module full-size is 430mm × 430mm, belongs to sheet parts, and there is several ball bearing pallet upper and lower surface and side.The upper and lower surface of optical element pallet is Ultra-precision Turning surface, there is very little surface roughness and the depth of parallelism being better than 10 μm, because pallet surface roughness and the depth of parallelism are very high, this optical module can be directly installed on the air supporting framework of needs design, and it is clamped, thus under the drive of two-dimensional large-stroke linkage device 30, carry out the micro-reparation of precision of surperficial microdefect.
For the applying of clamping force, first answer analytical equipment operating condition.Optical element in whole testing process and process afterwards mainly by two kinds of power, the inertia force of the Milling Force of X, Y, Z-direction and X, Y-direction: owing to being micro-Milling Process, Milling Force Z-direction relative to optical element gravity can ignore; Inertia force drives the acceleration and deceleration of optical element movement to decide by linear electric motors.When optical element is in X, Y-direction motion, the inertia force that its acceleration and deceleration produce is balanced by the frictional force of main locating surface.X-axis peak acceleration is 3m/s
2; Y-axis peak acceleration is 5Gs, i.e. 49m/s
2, again because maximum output action power is 225N, therefore Y-axis reality can reach peak acceleration and is in this device:
225N/(16+5)kg＝10.7m/s
2
The maximum inertia force size that optical element pallet produces in X-direction acceleration and deceleration is:
(4.7+5.2)kg×3m/s
2＝29.7N
The maximum inertia force size that acceleration and deceleration produce in the Y direction is:
(4.7+5.2)kg×10.7m/s
2＝105.93N
The visible inertia force produced in the Y direction is larger.
Because the main locating surface of optical module is polished surface, surface roughness is lower, therefore selects its dynamic friction factor to be about 0.17.And frictional force is directly proportional to the size of main clamping force, if expect enough frictional force, then need to apply very large clamping force, this has brought additional stress into optical element pallet.Calculate herein and replace static friction factor to calculate by dynamic friction factor, obtaining required clamping force is:
N＝F
f/μ
Wherein, F
ffrictional force needed for expression and maximum inertia force balance, μ represents the dynamic friction factor of optical module and crystal frame contact position;
In X-direction, required clamping force is:
29.7/0.17＝174.7N
In Y-direction, required clamping force is:
105.93/0.17＝623.1N
Visible to make optical element pallet in the course of work fix relative to fixture, then the clamping force of 623.1N need be applied on optical element pallet surface.
Operation principle:
Large-aperture optical component level is positioned in air supporting framework, the locating surface of two locating pieces in optical module locating surface and crystal frame is close to, screws latch segment screw, optical module is clamped in the horizontal direction.Again by compact heap cunning above optical module handle, tighten high head milled screw, optical module be clamped in air supporting framework completely.Now, optical module completes localization and clamping.Then crystal frame flexible hinge is affixed by hexagon socket head cap screw in line slideway moving component, be three floating cushion air feed subsequently, constant pressure is at 0.45MPa, and each floating cushion supply gas pressure can be finely tuned by control valve.Now, crystal frame is suspended on granite precision surface plate, and air gap is 6 μm ~ 10 μm.Along with the movement of two straight line units, air supporting framework realizes the two-dimensional movement on platform.
Claims (8)
1. a flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework, it is characterized in that: described flexible hinge coordinates the device being used for optical module Set and Positioning to comprise air supporting framework with air supporting framework, three floating cushions (11), three ball pivot studs (13) and two groups of flexible hinges (3), described air supporting framework comprises crystal frame (1), two compact heaps (6), two dog screws one (8), two dog screws two (7), two latch segments (9), two locating pieces (15) and five engaging lugs (20),
Described crystal frame (1) is horizontally disposed rectangle frame, and two groups of flexible hinges (3) are affixed with same any lateral surface of crystal frame (1); Its excess-three lateral surface of crystal frame (1) is fixed with altogether five engaging lugs (20), wherein two relative inner faces of crystal frame (1) are respectively fixed with a locating piece (15), two locating pieces (15) are respectively equipped with a locating surface (15-1), two locating surfaces (15-1) are arranged in same vertical plane, it is inner that optical module (2) entirety is placed on crystal frame (1), and located by two locating surfaces (15-1) of described two locating pieces (15); In crystal frame (1), the same side of each locating piece (15) is provided with a latch segment (9), two latch segments (9) are affixed with crystal frame (1), two latch segments (9) are oppositely arranged, screw one is provided with described locating surface (15-1) perpendicular direction in latch segment (9), dog screw one (8) screws in the screw one of latch segment (9), and optical module (2) is fixedly clamped in advance between two dog screws one (8) and two locating pieces (15); The homonymy being positioned at each locating piece (15) in crystal frame (1) is provided with a compact heap (6), compact heap (6) is affixed with crystal frame (1), (6) are vertically provided with screw two to each compact heap, dog screw two (7) to screw in screw two and is resisted against on crystal frame (1), and optical module (2) is vertically fixed by compact heap (6); Three ball pivot studs (13) are affixed with any three engaging lugs (20) in five engaging lugs (20), and the pommel of each ball pivot stud (13) contacts with corresponding floating cushion (11) upper surface ball-and-socket.
2. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 1, it is characterized in that: the distribution mode of described five engaging lugs (20) on described its excess-three lateral surface of crystal frame (1) is as follows: crystal frame (1) is upper is connected with an engaging lug (20) with the lateral surface being fixed with corresponding side, two groups of flexible hinge (3) sides, crystal frame (1) each lateral surface that is upper and that be fixed with two groups of flexible hinge (3) sides perpendicular is connected with two engaging lugs (20).
3. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 1, it is characterized in that: the distribution mode of described five engaging lugs (20) on described its excess-three lateral surface of crystal frame (1) is as follows: a wherein lateral surface of upper two lateral surfaces perpendicular with being fixed with two groups of flexible hinge (3) sides of crystal frame (1) is connected with two engaging lugs (20), another lateral surface of upper two lateral surfaces perpendicular with being fixed with two groups of flexible hinge (3) sides of crystal frame (1) is connected with an engaging lug (20).
4. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 2, it is characterized in that: described three ball pivot stud (13) distribution modes are as follows: the engaging lug (20) that the upper lateral surface with being fixed with corresponding side, two groups of flexible hinge (3) sides of crystal frame (1) is fixed is with wherein a ball pivot stud (13) is affixed; One in two engaging lugs (20) that upper each lateral surface perpendicular with being fixed with two groups of flexible hinge (3) sides of crystal frame (1) is affixed affixed with in two ball pivot studs (13) of remainder.
5. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 3, it is characterized in that: described three ball pivot stud (13) distribution modes are as follows: two engaging lugs (20) that a wherein lateral surface of upper two lateral surfaces perpendicular with being fixed with two groups of flexible hinge (3) sides of crystal frame (1) is affixed are each affixed with a ball pivot stud (13), the engaging lug (20) that another lateral surface of upper two lateral surfaces perpendicular with being fixed with two groups of flexible hinge (3) sides of crystal frame (1) is affixed is affixed with a remaining ball pivot stud (13).
6. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 1, it is characterized in that: often organize flexible hinge (3) and comprise two hinge seats (3-1) and two reeds (3-2); Described two hinge seats (3-1) are set up in parallel, and are set side by side with two reeds (3-2) between two hinge seats (3-1); Two hinge seats (3-1) are affixed with two reeds (3-2), and one of them hinge seat (3-1) often organizing flexible hinge (3) is affixed with described same any lateral surface of crystal frame (1).
7. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 1, it is characterized in that: described air supporting framework is made up of duralumin, hard alumin ium alloy material.
8. flexible hinge coordinates the device being used for optical module Set and Positioning with air supporting framework according to claim 1, it is characterized in that: one end of the lower surface of described compact heap (6) is provided with boss (6-1), the boss (6-1) that described optical module (2) is provided with by compact heap (6) lower surface is vertically fixed, compact heap (6) is provided with elongated slot (6-2), the short transverse that elongated slot (6-2) runs through compact heap (6) is offered, hexagon socket cap head screw (5) penetrates in the elongated slot (6-2) of compact heap (6), compact heap (6) and crystal frame (1) by hexagon socket cap head screw (5) and hexagon thin nut (4) affixed.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310744695.XA CN103753449B (en) | 2013-12-30 | 2013-12-30 | Flexible hinge and floating frame matched clamping and positioning device for optical component |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310744695.XA CN103753449B (en) | 2013-12-30 | 2013-12-30 | Flexible hinge and floating frame matched clamping and positioning device for optical component |
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| CN103753449A CN103753449A (en) | 2014-04-30 |
| CN103753449B true CN103753449B (en) | 2015-05-27 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104062735B (en) * | 2014-06-05 | 2017-01-04 | 中国科学院西安光学精密机械研究所 | Clamping device and clamping method for large-aperture diffraction grating |
| CN107015336B (en) * | 2017-05-23 | 2023-07-18 | 中国工程物理研究院激光聚变研究中心 | Multifunctional clamping system for optical element with large diameter-thickness ratio |
| CN107193100B (en) * | 2017-07-18 | 2023-10-24 | 中国工程物理研究院总体工程研究所 | Moment clamping device for large-caliber optical element |
| CN109317996B (en) * | 2017-07-31 | 2023-09-08 | 田中金属加工（上海）有限公司 | Non-ferrous metal thin grid piece plane machining clamping module for machining center |
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| GB2353269A (en) * | 1999-08-20 | 2001-02-21 | Markem Tech Ltd | Method and apparatus for conveying lamina objects |
| CN2829982Y (en) * | 2005-04-01 | 2006-10-25 | 阳程科技股份有限公司 | Aligning device |
| CN202174526U (en) * | 2011-04-26 | 2012-03-28 | 竑腾科技股份有限公司 | Glass processing machine |
| CN103419183A (en) * | 2013-09-02 | 2013-12-04 | 康鼎(上海)自动化设备有限公司 | Horizontal universal floating assembly worktable |
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|---|---|---|---|---|
| GB2353269A (en) * | 1999-08-20 | 2001-02-21 | Markem Tech Ltd | Method and apparatus for conveying lamina objects |
| CN2829982Y (en) * | 2005-04-01 | 2006-10-25 | 阳程科技股份有限公司 | Aligning device |
| CN202174526U (en) * | 2011-04-26 | 2012-03-28 | 竑腾科技股份有限公司 | Glass processing machine |
| CN103419183A (en) * | 2013-09-02 | 2013-12-04 | 康鼎(上海)自动化设备有限公司 | Horizontal universal floating assembly worktable |
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