CN103727778B - Vertical oxidizing furnace process door cooling method and device used in wet oxidation process - Google Patents
Vertical oxidizing furnace process door cooling method and device used in wet oxidation process Download PDFInfo
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- CN103727778B CN103727778B CN201410009302.5A CN201410009302A CN103727778B CN 103727778 B CN103727778 B CN 103727778B CN 201410009302 A CN201410009302 A CN 201410009302A CN 103727778 B CN103727778 B CN 103727778B
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Abstract
The invention discloses a vertical oxidizing furnace process door cooling method and device used in a wet oxidation process. According to the method and device, the wet oxidation process is divided into a high temperature interval, a middle temperature interval and a low temperature interval based on the requirement of a wet oxidation process result according to different main process temperatures, a control module of the device is used for setting process doors with different flow ranges from large to small and the circulating cooling water flow of the bottom of a furnace body according to the three different temperature intervals, the flows of circulating cooling water pipelines of the process doors are adjusted through a flow controller according to a detected temperature value of a thermocouple in the process, so that the process result is guaranteed, and sealing parts of the process doors are not damaged. The method and device are simple in operation, cost is not increased, and equipment is well maintained.
Description
Technical field
The present invention relates to a kind of cooling means and cooling device of semiconductor vertical oxidation art and craft door, more specifically, a kind of cooling means that vertical oxidation furnace art and craft door takes cooling water flow differentiation to control in wet oxygen technique and corresponding cooling controller is related to.
Background technology
What the gas delivery system of semiconductor vertical oxidation adopted is top air inlet, the gas supply of lower exhaust, discharge mode.Wherein, gas exhaust piping is positioned at boiler tube bottom, close to art and craft door.
Refer to Fig. 1 and Fig. 2, Fig. 1 is slide glass in a kind of semiconductor vertical oxidation and sealing mechanism structural representation; Fig. 2 is the art and craft door sealing mechanism top view in Fig. 1.As shown in Figure 1, in technique, in order to ensure good thermal field, on the top of art and craft door, heat-preserving container 4 is housed.The effect one of heat-preserving container is that two is to prevent hyperthermia radiation from causing damage to art and craft door and neighbouring each components and parts in order to prevent scattering and disappearing of furnace interior heat.Quartz boat 6 is equipped with on heat-preserving container top, is used for carrying technique sheet (silicon chip) 5.
Meanwhile, in order to realize the sealing of art and craft door better, material art and craft door aqueous cold plate 3 is equipped with as shown in Figure 2 is the O-ring seal 7 of macromolecular material, and the magnetic fluid 1 of magnetic suspension liquid is equipped with in inside as shown in Figure 1.These two parts have certain resistance to extreme temperature, and temperature is too high all can cause damage to parts.Therefore, as shown in Figure 1, during design, bottom art and craft door and process duct, be all provided with cooling water pipeline 2, the recirculated cooling water of firm discharge during technique, can be passed into.
In the wet oxygen technique that oxidation furnace carries out, main course of reaction is:
H
2+O
2→H
20
Si+H
2O→SiO
2+H
2
In course of reaction, steam that is unnecessary or that have neither part nor lot in reaction can be discharged from gas exhaust piping with air-flow.But, if gas exhaust piping is neighbouring, established technology door place temperature is lower, just may causes water vapor accumulation, produce the globule.If the globule produces too much, fall in boat process after technique terminates, the globule will flow down from art and craft door, easily cause art and craft door subjacent cable and each component damage; In addition on the one hand, if technological temperature is higher, art and craft door place temperature is too high, just may cause art and craft door sealing each parts thermal radiation and damage.
In wet oxygen technique, the cooling of existing vertical oxidation furnace art and craft door, the mode being the recirculated cooling water passing into firm discharge is carried out.Technological temperature due to wet oxygen technique comprises high, medium and low different temperature range, and the circulating cooling water system of firm discharge is difficult to be suitable for the difference of the cooling effect that the difference variation under larger thermograde is brought.Often in the high-temperature technology stage, art and craft door, because can not get good cooling, causes the seal member on art and craft door be subject to violent heat radiation and damage; And in the low temperature process stage, art and craft door is cooled excessively, cause water vapour to condense in a large number, the globule of generation flows down from art and craft door, easily causes art and craft door subjacent cable and each component damage.
In existing production, in order to improve the cooling performance of art and craft door in wet oxygen technique, from the angle of adjusting process door environment temperature, there are the following two kinds of methods of adopting:
One is change heat-preserving container thermal capacitance, and heat-preserving container bottom temp can change with thermal capacitance change;
Two is change technological temperature.
The defect of above-mentioned two kinds of methods is: change heat-preserving container thermal capacitance, need to carry out hardware modifications, heat-preserving container belongs to quartzy material, and general heat-preserving container is integral type structure, can not break, and processing cost is larger again; And technological temperature is fixed according to Production requirement, arbitrarily can not change, adjusting process temperature, last production capacity will certainly be had influence on.
Summary of the invention
The object of the invention is to the above-mentioned defect overcoming prior art existence, a kind of cooling means that vertical oxidation furnace art and craft door takes cooling water flow differentiation to control in wet oxygen technique and device are provided, under the condition not changing device hardware, by suitable adjusting process door place cooling water flow, change the temperature of art and craft door, under the condition of resistance to warm spot being no more than O-ring seal and magnetic fluid, water at low temperature devaporation can be avoided to produce the globule, meanwhile, high temperature heat radiation also can be avoided to cause damage to art and craft door hermetic devices.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of cooling means for art and craft door in vertical oxidation wet oxygen technique, wet oxygen manufacturing process is controlled by process control system, described art and craft door is equipped with seal member, described art and craft door and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple and cooling water pipeline, described cooling water pipeline is equipped with flow controller, it is characterized in that, comprise the following steps:
According to described thermocouple temperature detection result, control the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable; Wherein, when wet oxygen technological temperature is low, turn down cooling water flow, during wet oxygen technological temperature height, heighten cooling water flow.
Further, the step that described control described flow controller adjustment circulating cooling water flow size and described temperature results is just suitable, specifically comprises:
Step one: according to the requirement of wet oxygen process results, different according to main technological temperature, wet oxygen technique is divided into the temperature range that high temperature, middle temperature, low temperature three are different;
Step 2: the temperature range different according to described high temperature, middle temperature, low temperature three, has the art and craft door of different flow scope and the circulating cooling water flow of bottom of furnace body cooling water pipeline by large and little when setting high temperature, middle temperature, low temperature wet oxygen technological temperature;
Step 3: open recirculated cooling water pipeline flow controller, the cooling water pipeline to art and craft door and bottom of furnace body passes into the recirculated cooling water set in range of flow;
Step 4: open process control system, according to the related process parameters processing procedure such as temperature, time, gas flow of setting, carries out technique;
Step 5: when carrying out technique, detect by the temperature of thermocouple to art and craft door and bottom of furnace body, and according to the height of detected temperatures, adjusted the size of flow in high temperature, middle temperature, low temperature wet oxygen technological temperature interval respective cycle cooling water flow weight range by flow controller.
Further, in step one, the interval of described high temperature wet oxygen technological temperature is 801 ~ 1000 DEG C, and in described, the interval of warm and humid oxygen technological temperature is 601 ~ 800 DEG C, and the interval of described low temperature wet oxygen technological temperature is 400 ~ 600 DEG C.
Further, the inflow temperature of described recirculated cooling water is 20 ~ 25 DEG C.
Further, in step 2, circulating cooling water flow during described high temperature wet oxygen technological temperature is 2 ~ 3L/min; Circulating cooling water flow in described during warm and humid oxygen technological temperature is 1 ~ 2L/min; Circulating cooling water flow during described low temperature wet oxygen technological temperature is 0.1 ~ 1L/min.
Further, in step 5, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit.
Further, in step 5, also comprise: when thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit of low temperature wet oxygen technological temperature interval setting flow.
Present invention also offers a kind of device for the cooling means of art and craft door in vertical oxidation wet oxygen technique, described art and craft door and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple and cooling water pipeline, described cooling water pipeline is equipped with flow controller, it is characterized in that, also comprise control module, be electrically connected with the flow controller that temperature detection thermocouple and cooling water pipeline are installed respectively;
Wherein, described control module comprises switch unit, and it is according to described thermocouple temperature detection result, controls the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable;
Wherein, when wet oxygen technological temperature is low, turn down cooling water flow, during wet oxygen technological temperature height, heighten cooling water flow.
Further, described control module is also provided with alarm unit, for judging that the detected value of art and craft door and bottom of furnace body temperature exceeds the bound threshold value of control temperature, and is adjusted the flow of respective cycle cooling water by switch unit; Wherein, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit; When thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit of low temperature wet oxygen technological temperature interval setting flow.
As can be seen from technique scheme, the present invention is by being divided into high temperature by wet oxygen technological temperature, middle temperature, the temperature range that low temperature three is different, the control module of device sets the circulating cooling water flow of corresponding different range accordingly, and in process according to the temperature detection value of thermocouple, the size of adjusting process door recirculated cooling water pipeline flow is carried out by flow controller, the needs of different wet oxygen technique can be met, water at low temperature devaporation is avoided to produce the globule, also high temperature heat radiation can be avoided to cause damage to art and craft door seal member, reach the effect not only ensureing process results but also do not damage art and craft door seal member.Both simply, do not increase cost again, vertical oxidation furnace equipment serves good maintenance effect for cooling means of the present invention and device operation.
Accompanying drawing explanation
Fig. 1 is slide glass in a kind of semiconductor vertical oxidation and sealing mechanism structural representation;
Fig. 2 is the art and craft door sealing mechanism top view in Fig. 1;
Fig. 3 is control principle block diagram of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Embodiment one:
First, the device structure of a kind of semiconductor vertical oxidation that the present invention uses is introduced.
In the present embodiment, refer to Fig. 1 and Fig. 2, Fig. 1 is slide glass in a kind of semiconductor vertical oxidation and sealing mechanism structural representation; Fig. 2 is the art and craft door sealing mechanism top view in Fig. 1.
As shown in Figure 1, in technique, in order to ensure good thermal field, on the top of art and craft door, heat-preserving container 4 is housed.The effect one of heat-preserving container is that two is to prevent hyperthermia radiation from causing damage to art and craft door and neighbouring each components and parts in order to prevent scattering and disappearing of furnace interior heat.Quartz boat 6 is equipped with on heat-preserving container top, is used for carrying technique sheet (silicon chip) 5.
Meanwhile, in order to realize the sealing of art and craft door better, material art and craft door aqueous cold plate 3 is equipped with as shown in Figure 2 is the O-ring seal 7 of macromolecular material, and the magnetic fluid 1 of magnetic suspension liquid is equipped with in inside as shown in Figure 1.These two parts have certain resistance to extreme temperature, and temperature is too high all can cause damage to parts.Therefore, as shown in Figure 1, during design, bottom art and craft door and process duct, be all provided with cooling water pipeline 2, recirculated cooling water can be passed into during technique and cool.
Introduce the particular content of cooling means of the present invention below.
A kind of cooling means for art and craft door in vertical oxidation wet oxygen technique as depicted in figs. 1 and 2 of the present invention, wet oxygen manufacturing process is controlled by process control system, described art and craft door is equipped with seal member, described art and craft door and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple and cooling water pipeline, described cooling water pipeline is equipped with flow controller, and comprises the following steps:
According to described thermocouple temperature detection result, control the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable; Wherein, when wet oxygen technological temperature is low, turn down cooling water flow, during wet oxygen technological temperature height, heighten cooling water flow.
The step that described control described flow controller adjustment circulating cooling water flow size and described temperature results is just suitable, specifically comprises:
Step one: according to the requirement of wet oxygen process results, different according to main technological temperature, wet oxygen technique is divided into the temperature range that high temperature, middle temperature, low temperature three are different;
Step 2: the temperature range different according to described high temperature, middle temperature, low temperature three, has the art and craft door of different flow scope and the circulating cooling water flow of bottom of furnace body cooling water pipeline by large and little when setting high temperature, middle temperature, low temperature wet oxygen technological temperature;
Step 3: open recirculated cooling water pipeline flow controller, the cooling water pipeline to art and craft door and bottom of furnace body passes into the recirculated cooling water set in range of flow;
Step 4: open process control system, according to the related process parameters processing procedure such as temperature, time, gas flow of setting, carries out technique;
Step 5: when carrying out technique, detect by the temperature of thermocouple to art and craft door and bottom of furnace body, and according to the height of detected temperatures, adjusted the size of flow in high temperature, middle temperature, low temperature wet oxygen technological temperature interval respective cycle cooling water flow weight range by flow controller.
In step one, the interval of described high temperature wet oxygen technological temperature is 801 ~ 1000 DEG C, and in described, the interval of warm and humid oxygen technological temperature is 601 ~ 800 DEG C, and the interval of described low temperature wet oxygen technological temperature is 400 ~ 600 DEG C.
The inflow temperature controlling described recirculated cooling water is 20 ~ 25 DEG C.
In step 2, circulating cooling water flow during described high temperature wet oxygen technological temperature is 2 ~ 3L/min; Circulating cooling water flow in described during warm and humid oxygen technological temperature is 1 ~ 2L/min; Circulating cooling water flow during described low temperature wet oxygen technological temperature is 0.1 ~ 1L/min.
In the present embodiment, to set as stated above and to control related process parameters as follows:
(1) wet oxygen technological temperature is 900 ~ 1000 DEG C;
(2) main technical process is: 900 DEG C of wet oxygen techniques carry out 30 ~ 60min, H2:O2=6SLM:4.5SLM; 900 DEG C are warming up to 1000 DEG C of wet oxygen techniques and carry out 20 ~ 30min, H2:O2=6SLM:4.5SLM; 1000 DEG C of wet oxygen techniques carry out 60 ~ 120min, H2:O2=6SLM:4.5SLM; Under 1000 DEG C of conditions, N2 purges 30 ~ 60min, N2 flow is 10SLM;
(3) art and craft door and bottom of furnace body circulating cooling water flow are 2 ~ 3L/min.
Refer to Fig. 3, Fig. 3 is control principle block diagram of the present invention.As shown in the figure, when controlling to start, the temperature range different according to described high temperature, middle temperature, low temperature three, has the art and craft door of different flow scope and the circulating cooling water flow of bottom of furnace body cooling water pipeline by large and little when setting high temperature, middle temperature, low temperature wet oxygen technological temperature.Then, open recirculated cooling water pipeline flow controller, the cooling water pipeline to art and craft door and bottom of furnace body passes into the recirculated cooling water set in range of flow.In this process, detect by the temperature of thermocouple to art and craft door and bottom of furnace body, and according to the height of detected temperatures, adjusted the size of flow in high temperature, middle temperature, low temperature wet oxygen technological temperature interval respective cycle cooling water flow weight range by flow controller.
Refer to Fig. 3, in technique, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit.Be 6 ~ 9L/min in the present embodiment.
And, when thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit of low temperature wet oxygen technological temperature interval setting flow.Be 0.1L/min in the present embodiment.
The present invention is used for the device of the cooling means of art and craft door in vertical oxidation wet oxygen technique, art and craft door in FIG and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple (omitting in figure) and cooling water pipeline 2, and described cooling water pipeline is equipped with flow controller (omitting in figure).Device also comprises control module (omitting in figure), is electrically connected respectively with the flow controller that temperature detection thermocouple and cooling water pipeline are installed.Wherein, described control module comprises switch unit, and it is according to described thermocouple temperature detection result, controls the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable; Further, turn down cooling water flow when wet oxygen technological temperature is low, during wet oxygen technological temperature height, heighten cooling water flow.
Described control module is also provided with alarm unit, for judging that the detected value of art and craft door and bottom of furnace body temperature exceeds the bound threshold value of control temperature, and is adjusted the flow of respective cycle cooling water by switch unit; Wherein, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times (being 6 ~ 9L/min in the present embodiment) of its flow higher limit; When thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit (being 0.1L/min in the present embodiment) of low temperature wet oxygen technological temperature interval setting flow.
Embodiment two:
In the present embodiment, the method and apparatus in embodiment one is adopted to set and to control related process parameters as follows:
(1) wet oxygen technological temperature is 700 ~ 800 DEG C;
(2) main technical process is: 700 DEG C of wet oxygen techniques carry out 30 ~ 60min, H2:O2=6SLM:4.5SLM; 700 DEG C are warming up to 800 DEG C of wet oxygen techniques and carry out 20 ~ 30min, H2:O2=6SLM:4.5SLM; 800 DEG C of wet oxygen techniques carry out 60 ~ 120min, H2:O2=6SLM:4.5SLM; Under 800 DEG C of conditions, N2 purges 30 ~ 60min, N2 flow is 10SLM;
(3) art and craft door and bottom of furnace body circulating cooling water flow are 1 ~ 2L/min.
In technique, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, be that 4 ~ 6L/min passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit.
And, when thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the low temperature wet oxygen technological temperature interval setting lower limit of flow and 0.1L/min.
Other are identical with embodiment one, and this example repeats no more.
Embodiment three:
In the present embodiment, the method and apparatus in embodiment one is adopted to set and to control related process parameters as follows:
(1) wet oxygen technological temperature is 400 ~ 500 DEG C;
(2) main technical process is: 400 DEG C of wet oxygen techniques carry out 30 ~ 60min, H2:O2=6SLM:4.5SLM; 400 DEG C are warming up to 500 DEG C of wet oxygen techniques and carry out 20 ~ 30min, H2:O2=6SLM:4.5SLM; 500 DEG C of wet oxygen techniques carry out 60 ~ 120min, H2:O2=6SLM:4.5SLM; Under 500 DEG C of conditions, N2 purges 30 ~ 60min, N2 flow is 10SLM;
(3) art and craft door and bottom of furnace body circulating cooling water flow are 0.1 ~ 1L/min;
In technique, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, be that 2 ~ 3L/min passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit.
And, when thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the low temperature wet oxygen technological temperature interval setting lower limit of flow and 0.1L/min.
Other are identical with embodiment one, and this example repeats no more.
It should be noted that; above-describedly be only the preferred embodiments of the present invention; described embodiment is also not used to limit scope of patent protection of the present invention, and the equivalent structure that therefore every utilization description of the present invention and accompanying drawing content are done changes, and in like manner all should be included in protection scope of the present invention.
Claims (7)
1. the cooling means for art and craft door in vertical oxidation wet oxygen technique, wet oxygen manufacturing process is controlled by process control system, described art and craft door is equipped with seal member, described art and craft door and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple and cooling water pipeline, described cooling water pipeline is equipped with flow controller, it is characterized in that, comprise the following steps:
According to described thermocouple temperature detection result, control the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable; Wherein, when wet oxygen technological temperature is low, turn down cooling water flow, during wet oxygen technological temperature height, heighten cooling water flow;
The step that described control described flow controller adjustment circulating cooling water flow size and described temperature results is just suitable, specifically comprises:
Step one: according to the requirement of wet oxygen process results, different according to main technological temperature, wet oxygen technique is divided into the temperature range that high temperature, middle temperature, low temperature three are different;
Step 2: the temperature range different according to described high temperature, middle temperature, low temperature three, has the art and craft door of different flow scope and the circulating cooling water flow of bottom of furnace body cooling water pipeline by large and little when setting high temperature, middle temperature, low temperature wet oxygen technological temperature;
Step 3: open recirculated cooling water pipeline flow controller, the cooling water pipeline to art and craft door and bottom of furnace body passes into the recirculated cooling water set in range of flow;
Step 4: open process control system, according to the related process parameters processing procedure such as temperature, time, gas flow of setting, carries out technique;
Step 5: when carrying out technique, detect by the temperature of thermocouple to art and craft door and bottom of furnace body, and according to the height of detected temperatures, adjusted the size of flow in high temperature, middle temperature, low temperature wet oxygen technological temperature interval respective cycle cooling water flow weight range by flow controller.
2. cooling means as claimed in claim 1, it is characterized in that, in step one, the interval of described high temperature wet oxygen technological temperature is 801 ~ 1000 DEG C, in described, the interval of warm and humid oxygen technological temperature is 601 ~ 800 DEG C, and the interval of described low temperature wet oxygen technological temperature is 400 ~ 600 DEG C.
3. cooling means as claimed in claim 1, it is characterized in that, the inflow temperature of described recirculated cooling water is 20 ~ 25 DEG C.
4. cooling means as claimed in claim 1, it is characterized in that, in step 2, circulating cooling water flow during described high temperature wet oxygen technological temperature is 2 ~ 3L/min; Circulating cooling water flow in described during warm and humid oxygen technological temperature is 1 ~ 2L/min; Circulating cooling water flow during described low temperature wet oxygen technological temperature is 0.1 ~ 1L/min.
5. cooling means as claimed in claim 1, it is characterized in that, in step 5, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit.
6. cooling means as claimed in claim 1, it is characterized in that, in step 5, also comprise: when thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in described low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit of low temperature wet oxygen technological temperature interval setting flow.
7. the device for the cooling means of art and craft door in vertical oxidation wet oxygen technique, described art and craft door and oxidation furnace bottom of furnace body are equipped with temperature detection thermocouple and cooling water pipeline, described cooling water pipeline is equipped with flow controller, it is characterized in that, also comprise control module, be electrically connected with the flow controller that temperature detection thermocouple and cooling water pipeline are installed respectively;
Wherein, described control module comprises switch unit, and it is according to described thermocouple temperature detection result, controls the adjustment of described flow controller circulating cooling water flow size and described temperature results just suitable;
Wherein, when wet oxygen technological temperature is low, turn down cooling water flow, during wet oxygen technological temperature height, heighten cooling water flow;
Described control module is also provided with alarm unit, for judging that the detected value of art and craft door and bottom of furnace body temperature exceeds the bound threshold value of control temperature, and is adjusted the flow of respective cycle cooling water by switch unit; Wherein, if the detected temperatures result of thermocouple to art and craft door and bottom of furnace body exceedes the resistance to extreme temperature temperature of art and craft door seal member, and circulating cooling water flow has reached upper the prescribing a time limit of corresponding wet oxygen technological temperature interval setting flow, passes into recirculated cooling water by 2 ~ 3 times of its flow higher limit; When thermocouple to the detected temperatures result of art and craft door and bottom of furnace body for be in low temperature wet oxygen technological temperature interval time, judge previous cycle cooling water flow whether lower than the lowest threshold of circulating cooling water flow, if so, recirculated cooling water is passed into by the lower limit of low temperature wet oxygen technological temperature interval setting flow.
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| CN112833662B (en) * | 2021-01-19 | 2024-01-05 | 北京北方华创微电子装备有限公司 | Temperature adjusting device and semiconductor processing equipment |
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| JP2012080080A (en) * | 2010-09-07 | 2012-04-19 | Tokyo Electron Ltd | Vertical heat treatment apparatus and control method therefor |
| TW201350777A (en) * | 2010-12-03 | 2013-12-16 | Tangteck Equipment Inc | Diffsion furnace device |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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