CN103552979B - A kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure - Google Patents
A kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure Download PDFInfo
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- CN103552979B CN103552979B CN201310565107.6A CN201310565107A CN103552979B CN 103552979 B CN103552979 B CN 103552979B CN 201310565107 A CN201310565107 A CN 201310565107A CN 103552979 B CN103552979 B CN 103552979B
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Abstract
The invention discloses a kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, comprise substrate, the electrostatic pull-down electrode be coated on substrate surface, anchor district, hang girder and bending brace summer.Described suspension girder is suspended on types of flexure by four Ge Mao districts and bending brace summer; Described hanging beam in suspension state (" up " state) transfer process, by the Ohmic heating to bending brace summer, makes suspension girder be subject to stretching action in drop-down state (" down " state), improves the effective rigidity hanging girder, enhances restoring force; The width beam design that longeron in described bending brace summer adopts double joint arranged side by side, makes suspension girder more stable, and is more conducive to hanging girder after heating and is returned to " up " state from " down " state.The invention also discloses and strengthen the specific works mode of restoring force, method is simple, facilitate feasible.
Description
Technical field
The present invention relates to the field of the reliability treatment technology in a kind of micro mechanical system (being called for short MEMS in literary composition) processing and use procedure.Specifically, a kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure is related to.
Background technology
MEMS is the abbreviation of MEMS (Micro-Electro-Mechanical Systems).MEMS mainly comprises micro mechanism, microsensor, micro actuator and corresponding treatment circuit etc.A lot of MEMS sensor and actuator all include movable structure, utilize the conversion between the motion realization electricity of movable structure, thermal and magnetic, machinery.Therefore the exercise performance of movable structure is the key point that MEMS normally works.
MEMS movable structure is much cantilever beam, clamped beam or their combination.For quiet electrically driven (operated) movable beam structure, usually by loading or release voltage, beam is changed between " up " state (suspension state) and " down " (drop-down state) state.In order to enable beam be pulled down to " down " state smoothly, often wish that when structural design the rigidity of beam is not too big, but be often not easily returned to " up " state after the little beam release voltage of rigidity.Therefore, be necessary to design a kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, make movable beam in drop-down " down " state and upspring between " up " state and can convert freely.
Summary of the invention
Technical problem to be solved by this invention is, provide a kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, this structure utilizes Ohmic heating to cause the thermal expansion of beam, reaches the object strengthening recovery capacity.Present invention also offers the specific works mode strengthening restoring force, structure is simple, easy to operate feasible simultaneously.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
A kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, comprise substrate, anchor district, be suspended on the suspension girder of types of flexure, be fixedly connected on the end face of substrate and be positioned at the drop-down metal electrode of electrostatic hanging middle part immediately below girder, this structure also comprises two bending brace summers, and this bending brace summer is by a crossbeam be connected with suspension girder ending vertical and be connected with this crossbeam and the longeron being parallel to two groups of double joints hanging girder arranged side by side forms; The end of described longeron be connected to be positioned at hang girder both sides anchor district on; In described bending brace summer, inner side rail is measure-alike wide beam, and outer side rail is measure-alike narrow beam.The width beam design adopting described double joint arranged side by side, makes hanging beam more stable, and is more conducive to hanging beam and is returned to " up " state from " down " after heating; The drop-down coated on metallic electrodes of described electrostatic has the dielectric layer be short-circuited when preventing hanging beam from contacting with pull-down electrode.
Above-mentioned heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, it is as follows that heat-electrostatic replys by force working method:
1), in work, when requiring that hanging girder is returned to " up " state by " down " state, disconnect the electrostatic hung between girder and pull-down electrode and connect, thus the electrostatic suction removed pull-down electrode and hang between girder.
2) while releasing electrostatic suction, electric current is passed to the bending brace summer at girder two ends.Longeron expanded by heating in bending brace summer, makes suspension girder be subject to the power stretched to two ends, improves the effective rigidity hanging girder, enhance the restoring force hanging girder.
3) longeron in bending support adopts the design of width beam, and interior survey beam is wide beam, and outer beams is narrow beam.Because the sectional area of width two beam is different, in same electrical pressure, the electric current flow through is different, and the temperature reached is also just different.Here, wide beam is higher than narrow beam temperature, can produce larger linear expansion.Thus it is tight to guarantee to bend the crossbeam in supporting, is more conducive to hanging girder and is returned to " up " state from " down " state.
4), after suspension girder is returned to " up " state, disconnects the electric current on bending beam, recover normal condition.
The present invention, in the structural design of MEMS movable beam, is adopted four-point supporting hanging beam version, is changed the effective rigidity of bending brace summer, meet strong recovery needs by Ohmic heating.For the movable beam in many MEMS devices, change back and forth between " up " state of being everlasting in work and " down " state.Little " up " state that is conducive to of the rigidity of beam is pulled down to " down " state, but often causes movable beam cannot successfully be returned to " up " state from " down " state.If in this stage, utilize Ohmic heating that beam is expanded tight, increase the effective rigidity of beam, then greatly can improve the recovery capacity of beam.So the structure that the present invention designs also coordinates corresponding working method, can meet the Low rigidity in drop-down stage, can realize again the high rigidity of recovery stage.This structure strengthens the simple to operate of restoring force, and to processing technology without extra demand.Therefore, structure provided by the invention and method practical.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is substrate surface schematic diagram in the present invention.
Have in figure: substrate 1, pull-down electrode 2, anchor district 31 ~ 34, suspension girder 4, bending brace summer 5 and 6(bend brace summer 5,6 respectively in two dotted line frames).
Detailed description of the invention
Below in conjunction with accompanying drawing, technical scheme of the present invention is described in detail.
As depicted in figs. 1 and 2, a kind of heat of the present invention-electrostatic reply type by force MEMS four-point supporting hanging beam structure, described structure comprises substrate 1, the pull-down electrode 2 for static excitation, anchor district 31 ~ 34, suspension girder 4, bending brace summer 5 and 6.Described suspension girder 4 passes through the bending brace summer 5 and 6 at four Ge Mao districts 31,32,33,34 and two ends, is suspended on the top of substrate 1.
As depicted in figs. 1 and 2, bend brace summer 5 to be made up of a crossbeam 51 and two groups of double joints longeron 52,53 and 54,55 arranged side by side.Wherein, longeron adopts the design of width beam, and 52 and 54 is narrow beam, and 53 and 55 is wide beam.The bending brace summer 6 of the other end and the symmetrical configuration of bending brace summer 5,62 and 64 is narrow beam, and 63 and 55 is wide beam.
Substrate 1 in described hanging beam structure is made with monocrystalline silicon.Hang girder 4, bending brace summer 5 is identical with the material of bending brace summer 6, can be polysilicon or the single crystal silicon beam of doping, also can be beams of metal.Pull-down electrode 2 is metal material (gold or aluminium), and metal surface deposits one deck film dielectric layer, can be SiO
2or SiN, be short-circuited when preventing hanging beam from contacting with pull-down electrode.
A kind of heat of the present invention-electrostatic reply type by force MEMS four-point supporting hanging beam structure adopts general MEMS processing technology to complete.
Above-mentioned heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, the specific works mode that its heat-electrostatic is replied by force is as follows:
1) in work, between suspension girder 4 and pull-down electrode 2, apply voltage, hanging girder 4 will be bent downwardly, until middle part contacts with pull-down electrode 2, make suspension girder 4 become " down " state from " up " state.
2), when requiring that hanging girder 4 is returned to " up " state by " down " state, disconnect the electrostatic hung between girder 4 and pull-down electrode 2 and connect, the electrostatic suction removed pull-down electrode 2 and hang between girder 4.Meanwhile, respectively between anchor district 31 and 33, and between anchor district 32 and 34, apply the voltage of formed objects, be about 10V or larger.Like this, the bending brace summer 5 and 6 at girder two ends has passed to the electric current of formed objects.
3) electric current flowed through in bending brace summer 5 and 6 causes longeron 52,53 and 54,55 and longeron 62,63 and 64,65 to be heated generation linear expansion, extends respectively to two ends.Make suspension girder 4 be subject to the power stretched to two ends, improve the effective rigidity hanging girder, enhance the restoring force hanging girder.
4) the width beam design that the longeron bent in brace summer adopts double joint arranged side by side, because the sectional area of width two beam is different, in same electrical pressure, the electric current flow through is different, and the temperature reached is also just different.Here, wide beam is higher than narrow beam temperature, can produce larger linear expansion.So wide beam 53,55 in bending brace summer beam 5 than narrow beam 52,54 stretch longer, equally, wide beam 63,65 also has longer stretching, extension than narrow beam 62,64.Like this, heating also makes crossbeam 51 and 61 tight while longeron 52,53,54,55 and 62,63,64,65 is stretched.
5) crossbeam 51 and 61 extending through tight state of above-mentioned longeron gives to hang the power that stretches to two ends of girder 4 one, make the semi-finals of suspension girder strong be returned to " up " state.
6), after suspension girder is returned to " up " state, disconnects the electric current on bending beam, recover normal condition.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (1)
1. heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure, comprise substrate (1), anchor district, be suspended on the suspension girder (4) of types of flexure, be fixedly connected on the end face of substrate (1) and be positioned at the drop-down metal electrode of electrostatic (2) hanging middle part immediately below girder (4), it is characterized in that: also comprise two bending brace summers (5, 6), two described bending brace summers (5, 6) crossbeam (51 be connected with suspension girder (4) ending vertical by respectively, 61) and with this crossbeam be connected and be parallel to two groups of double joints hanging girder (4) longeron (52 arranged side by side, 53, 54, 55, 62, 63, 64, 65) form, inner side rail is measure-alike wide beam, outer side rail is measure-alike narrow beam, the end of described longeron be connected to be positioned at hang girder (4) both sides anchor district (31,32,33,34) on, the drop-down metal electrode of described electrostatic (2) is coated with the dielectric layer be short-circuited when preventing hanging beam from contacting with pull-down electrode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310565107.6A CN103552979B (en) | 2013-11-14 | 2013-11-14 | A kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure |
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| CN201310565107.6A CN103552979B (en) | 2013-11-14 | 2013-11-14 | A kind of heat-electrostatic reply type by force MEMS four-point supporting hanging beam structure |
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| CN103552979A CN103552979A (en) | 2014-02-05 |
| CN103552979B true CN103552979B (en) | 2015-10-28 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104390777B (en) * | 2014-12-12 | 2016-11-30 | 东南大学 | A kind of electrothermal drive declines the test structure of Mechatronic Systems torsion beam fatigue strength |
| CN114047625B (en) * | 2021-09-29 | 2023-05-23 | 北京理工大学 | MEMS micro-mirror, electronic equipment and use method of MEMS micro-mirror |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6127765A (en) * | 1998-02-24 | 2000-10-03 | Tokyo Institute Of Technology | Micro-electromechanical device |
| US6307452B1 (en) * | 1999-09-16 | 2001-10-23 | Motorola, Inc. | Folded spring based micro electromechanical (MEM) RF switch |
| CN1942986A (en) * | 2005-01-21 | 2007-04-04 | 松下电器产业株式会社 | Electromechanical switch |
| CN102874735A (en) * | 2012-09-29 | 2013-01-16 | 姜利军 | Two-material micro-cantilever, electromagnetic radiation detector and detection method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005536014A (en) * | 2002-08-08 | 2005-11-24 | エックスコム ワイアレス インコーポレイテッド | Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6127765A (en) * | 1998-02-24 | 2000-10-03 | Tokyo Institute Of Technology | Micro-electromechanical device |
| US6307452B1 (en) * | 1999-09-16 | 2001-10-23 | Motorola, Inc. | Folded spring based micro electromechanical (MEM) RF switch |
| CN1942986A (en) * | 2005-01-21 | 2007-04-04 | 松下电器产业株式会社 | Electromechanical switch |
| CN102874735A (en) * | 2012-09-29 | 2013-01-16 | 姜利军 | Two-material micro-cantilever, electromagnetic radiation detector and detection method |
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