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CN103335824A - Detection method of outfield wave front aberration of large-aperture space optical system - Google Patents

Detection method of outfield wave front aberration of large-aperture space optical system Download PDF

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Publication number
CN103335824A
CN103335824A CN2013102804154A CN201310280415A CN103335824A CN 103335824 A CN103335824 A CN 103335824A CN 2013102804154 A CN2013102804154 A CN 2013102804154A CN 201310280415 A CN201310280415 A CN 201310280415A CN 103335824 A CN103335824 A CN 103335824A
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optical system
small
aperture
directional light
wave front
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CN103335824B (en
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闫锋
张学军
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

The invention discloses a measuring method of an outfield wave front aberration of a large-aperture space optical system, and belongs to the technical field of advanced optical system manufacturing. The measuring method aims at solving the problem that the existing detection means cannot meet a measuring requirement of the outfield wave front aberration of the large-aperture space optical system. The measuring method comprises the steps that 1, a measuring condition is initialized, a four-dimensional adjustment rack and a small-aperture parallel light generator are placed in appropriate positions at the front of a to-be-measured optical system, the small-aperture parallel light generator is turned to a specified viewing field by auxiliary equipment, x-direction and y-direction rotating devices are locked dead, an optical parameter of the to-be-measured optical system, an aperture of small-aperture parallel light and the number of subapertures required by measuring are input to a control computer, and the control computer generates an initial position and a motion locus of the small-aperture parallel light generator according to an initial parameter; 2, a wave front slope is measured; and 3, the wave front aberration is fit. A wave surface slop can be measured point by point in a time-sharing manner, and a large-aperture parallel light tube is not required, so that the difficulty of the outfield wave front aberration of the system is reduced.

Description

Large-caliber space optical system outfield wave front aberration detection method
Technical field
The present invention relates to optical system wave front aberration detection method, based on the Hartmann principle heavy caliber space system wave front aberration is detected, solved the difficult problem that this type of optical system outfield wave front aberration is rechecked, belong to optical system advanced manufacturing technology field.
Background technology
Space Optical System is the core of all kinds of remote observations, remote sensing of the earth equipment, and its quality is the deciding factor of equipment imaging capability, observation level.Along with the rapid growth of demand and the continuous progress of correlation technique, this type of optical system bore and focal length constantly increase, the also corresponding increase of complete machine image quality detection difficulty.Especially system break away from laboratory conditions, under condition of external field (assembling test, field work etc.), more need to have reliable, effective technical means detection system wave front aberration, guarantee its requirement that touches the mark.The present invention will pay close attention to the field testing of this type of heavy caliber space system wave front aberration.
Existing space optical system outfield wave front aberration detection method, be by parallel light tube simulation infinite distance target (target is generally asterism, resolving power test target etc.), make optical system to target imaging and by the gained treatment of picture being asked for the wave front aberration of system under test (SUT).The essential condition that adopts this detection method is to build the parallel light tube (bore is twice in system under test (SUT) at least greater than system under test (SUT), focal length) that is complementary with tested optical system bore, focal length.Along with Space Optical System bore, focal length constantly increase, under condition of external field, build the heavy caliber that satisfy to measure requires, the difficulty of long-focus parallel light tube also increases considerably.When system's bore reaches the 2m magnitude and even when bigger, even also be difficult to build the parallel light tube that meets the demands under laboratory condition, and realizes in next being difficult to more of condition of external field.Therefore, existing detection means can't satisfy the outfield wave-front optical aberration measurement requirement of (super large) bore Space Optical System greatly.
The Hartmann method is a kind of by measuring corrugated each point slope and then according to the measuring method of slope inverting wave front aberration.
Summary of the invention
In order to solve the problem that outfield wave-front optical aberration measurement that existing detection means can't satisfy the large-caliber space optical system requires, the present invention is by using the Hartmann measuring principle, a kind of easy large-caliber space optical system outfield wave-front optical aberration measurement method is proposed, because slope of wave surface can pointwise, timesharing is measured, need not to use the heavy caliber parallel light tube, reduced the difficulty of this type systematic outfield wave front aberration.
Large-caliber space optical system outfield wave front aberration detection method comprises three steps:
Step 1: the measuring condition initialization a) is placed on four-dimensional adjustment rack 1 and small-bore directional light generating means 2 appropriate location before the tested optical system 3; Make small-bore directional light generating means 2 point to the visual field of appointments by utility appliance, and locked x, y direction wheelwork; B) with optical parametric, the small-bore directional light bore of tested optical system 3 and measure required sub-aperture number input control computing machine 5; Area behind the sub-aperture stitching need cover the whole of system under test (SUT) monoscopic clear aperature, and adjacent sub-aperture overlapping area is determined by sampling density; C) according to initial parameter, control computing machine 5 generates initial position and the movement locus of small-bore directional light generating means 2; The trend of movement locus is preestablished by control computing machine 5, but course length is by the clear aperture of tested optical system 3 and measure required sub-aperture number and determine; Simultaneously, control computing machine 5 also generates two two-dimentional empty matrix with the sampling density identical dimensional in order to storage of measurement data, and the element in each matrix is corresponding one by one with parked position in small-bore directional light generating means 2 movement locus; D) the small-bore directional light generating means 2 of control computing machine 5 controls moves to the measurement initial position;
Step 2: wavefront slope is measured, and small-bore directional light generating means 2 is adjusted to opening; The directional light that sends finally is converged onto on the imageing sensor 4 through tested optical system 3, and what received on the imageing sensor 4 this moment is a shaped laser spot; Control computing machine 5 control chart image-position sensors 4 record these shaped laser spots, and deposit it in buffer memory; Calculate the x, y coordinate of this point-like facula mass center position by centroid algorithm again and it is stored as and depart from element corresponding with the position of small-bore directional light generating means 2 in the matrix; After finishing this operation, control computing machine 5 is controlled small-bore directional light generating means 2 according to the movement locus that generates in the step 1 and is moved to the next position, carries out same hot spot record, data and handles and storage operation; By that analogy, small-bore directional light generating means 2 travels through the clear aperture of whole tested optical system 3 tested visual fields according to its movement locus, and carry out the hot spot record at each parked position, data are handled and storage operation; After measure finishing, two that can obtain characterizing tested optical system 3 emergent pupil corrugated x direction slopes and y direction slope are departed from matrix;
Step 3: the wave front aberration match can calculate tested optical system 3 emergent pupil corrugated x direction slope matrixes and y direction slope matrix according to the focal length that departs from matrix and tested optical system 3 that generates in the step 2; Be input with the slope matrix, adopt ripe corrugated fitting algorithm, match obtains the emergent pupil corrugated of tested optical system 3.Remove the tilt component among the result in the fit procedure.
The invention has the beneficial effects as follows:
1) the present invention is based on the measurement that the Hartmann principle has realized large-caliber space optical system wave front aberration: by the slope of pointwise, timesharing measurement wavefront each point, ask for system's wave front aberration according to the slope information that records.In measuring process, need not to use the heavy caliber parallel light tube, reduced difficulty and the cost of this type systematic outfield wave-front optical aberration measurement.
2) measuring method based on the large-caliber space optical system wave front aberration of Hartmann principle that proposes of the present invention, the size in control survey aperture, number flexibly satisfy the demand that different accuracy, different levels are measured.
3) measuring method based on the large-caliber space optical system wave front aberration of Hartmann principle that proposes of the present invention laboratory that is equally applicable to this type systematic is detected.Reach optical system more than the 2m for bore, even it is also extremely difficult, expensive to build the parallel light tube that is used for its wave front aberration detection, is complementary therewith in the laboratory, the wave front aberration detection method that the present invention proposes can realize the laboratory detection of this type systematic equally under the condition of not building the heavy caliber parallel light tube.
Description of drawings
Fig. 1 is the light channel structure figure of large-caliber space optical system outfield wave-front optical aberration measurement.
Fig. 2 is small-bore directional light generating means and four-dimensional adjusting gear front elevational schematic thereof.
Fig. 3 respectively measures the aperture at the distribution schematic diagram at system under test (SUT) clear aperture place.
Fig. 4 measures aperture mobile alignment synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further details.
As shown in Figure 1, large-caliber space optical system outfield wave front aberration detects light path, small-bore directional light generating means 2 is installed on the four-dimensional numerical control adjustment rack 1, as shown in Figure 2, can rotate at x, y direction translational and around x, y direction, and in the scope of x, y direction translational more than or equal to tested optical system monoscopic clear aperature; The motion of four-dimensional numerical control adjustment rack 1 is by 5 controls of control computing machine, and x, y direction wheelwork can be locked; Fix with tested optical system 3; Tested optical system imageing sensor 4 is fixed in tested optical system 3 inside, and image acquisition is by 5 controls of control computing machine.
The present invention is based on the large-caliber space optical system outfield wave front aberration detection method of Hartmann detection principle, concrete steps are as follows:
Step 1: measuring condition initialization.
A) four-dimensional adjustment rack 1 and small-bore directional light generating means 2 are placed on appropriate location before the tested optical system 3; Make small-bore directional light generating means 2 point to the visual field of appointments by utility appliance (as transit, laser tracker etc.), and locked x, y direction wheelwork.
B) with the optical parametric (comprising focal length, F number, clear aperture) of tested optical system 3, small-bore directional light bore (with respect to the clear aperture of whole tested optical system 3, think that this " small-bore directional light bore " is " sub-aperture "), measure required sub-aperture number initial parameters such as (being sampling density, as 64 * 64,128 * 128) input control computing machine 5.
As shown in Figure 3, the area behind the sub-aperture stitching need cover the whole of system under test (SUT) monoscopic clear aperature, and adjacent sub-aperture overlapping area is determined by sampling density.
C) according to initial parameter, control computing machine 5 generates initial position and the movement locus of small-bore directional light generating means 2, as shown in Figure 4.
The trend of movement locus (" Z " type route from upper left to the bottom right) is stipulated in advance by control computing machine 5, but course length (or density, i.e. spacing of adjacent two sections horizontal trajectorys) is by the clear aperture of tested optical system 3 and measure required sub-aperture number and determine.Simultaneously, control computing machine 5 also generate two with the two-dimentional empty matrix of sampling density identical dimensional (below be called " departing from matrix ") in order to storage of measurement data, the element in each matrix is corresponding one by one with parked position in small-bore directional light generating means 2 movement locus.
D) the small-bore directional light generating means 2 of control computing machine 5 controls moves to the measurement initial position.So far, the measuring condition initialization step is finished.
Step 2: wavefront slope is measured.
Small-bore directional light generating means 2 is adjusted to opening.The directional light that sends finally is converged onto on the imageing sensor 4 through tested optical system 3, and what received on the imageing sensor 4 this moment is a shaped laser spot.Control computing machine 5 control chart image-position sensors 4 record these shaped laser spots, and deposit it in buffer memory; Calculate the x, y coordinate of this point-like facula mass center position by centroid algorithm again and it is stored as and depart from element corresponding with the position of small-bore directional light generating means 2 in the matrix.After finishing this operation, control computing machine 5 is controlled small-bore directional light generating means 2 according to the movement locus that generates in the step 1 and is moved to the next position, carries out same hot spot record, data and handles and storage operation.By that analogy, small-bore directional light generating means 2 travels through the clear aperture of whole tested optical system 3 tested visual fields according to its movement locus, and carry out the hot spot record at each parked position, data are handled and storage operation.After measure finishing, two that can obtain characterizing tested optical system 3 emergent pupil corrugated x direction slopes and y direction slope are departed from matrix.
Step 3: wave front aberration match.
Can calculate tested optical system 3 emergent pupil corrugated x direction slope matrixes and y direction slope matrix according to the focal length that departs from matrix and tested optical system 3 that generates in the step 2.Be input with the slope matrix, adopt ripe corrugated fitting algorithm, just can match obtain the emergent pupil corrugated of tested optical system 3.Owing in slope calculations matrix process, do not consider the position of ideal image point, so need to remove the tilt component among the result in the fit procedure.

Claims (2)

1. large-caliber space optical system outfield wave front aberration detection method is characterized in that, comprises three steps:
Step 1: the measuring condition initialization, it is preceding a) four-dimensional adjustment rack (1) and small-bore directional light generating means (2) to be placed on tested optical system (3); Make small-bore directional light generating means (2) point to the visual field of tested optical system (3) by utility appliance, and locked x, y direction wheelwork; B) with optical parametric, the small-bore directional light bore of tested optical system (3) and measure required sub-aperture number input control computing machine (5); Area behind the sub-aperture stitching need cover the whole of tested optical system (3) monoscopic clear aperature, and adjacent sub-aperture overlapping area is determined by sampling density; C) according to initial parameter, control computing machine (5) generates initial position and the movement locus of small-bore directional light generating means (2); The trend of movement locus is preestablished by control computing machine (5), but course length is by the clear aperture of tested optical system (3) and measure required sub-aperture number and determine; Simultaneously, control computing machine (5) also generates two two-dimentional empty matrix with the sampling density identical dimensional, and in order to storage of measurement data, the element in each matrix is corresponding one by one with parked position in small-bore directional light generating means (2) movement locus; D) control computing machine (5) the small-bore directional light generating means of control (2) moves to the measurement initial position;
Step 2: wavefront slope is measured, and small-bore directional light generating means (2) is adjusted to opening; The directional light that sends finally is converged onto on the imageing sensor (4) through tested optical system (3), and what receive on imageing sensor this moment (4) is a shaped laser spot; Control computing machine (5) control chart image-position sensor (4) records this shaped laser spot, and deposits it in buffer memory; Calculate x, the y coordinate of this point-like facula mass center position again by centroid algorithm, and it is stored as departs from element corresponding with the position of small-bore directional light generating means (2) in the matrix; After finishing this operation, control computing machine (5) is controlled small-bore directional light generating means (2) according to the movement locus that generates in the step 1 and is moved to the next position, carries out same hot spot record, data and handles and storage operation; By that analogy, small-bore directional light generating means (2) travels through the clear aperture of the tested visual field of whole tested optical system (3) according to its movement locus, and carry out the hot spot record at each parked position, data are handled and storage operation; After measure finishing, two that can obtain characterizing tested optical system (3) emergent pupil corrugated x direction slope and y direction slope are departed from matrix;
Step 3: the wave front aberration match can calculate tested optical system (3) emergent pupil corrugated x direction slope matrix and y direction slope matrix according to the focal length that departs from matrix and tested optical system (3) that generates in the step 2; Be input with the slope matrix, adopt ripe corrugated fitting algorithm, match obtains the emergent pupil corrugated of tested optical system (3).
2. large-caliber space optical according to claim 1 system outfield wave front aberration detection method is removed the tilt component among the result in the described fit procedure of step 3.
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CN104075882A (en) * 2014-07-01 2014-10-01 中国科学院长春光学精密机械与物理研究所 Wave-front optical dither analyzing method suitable for large-caliber photoelectric detecting system
CN104296655A (en) * 2014-09-26 2015-01-21 中国科学院光电研究院 Calibration method of image rotation formula initial angle of laser tracker
CN104075882B (en) * 2014-07-01 2016-11-30 中国科学院长春光学精密机械与物理研究所 It is applicable to the wavefront optics jitter analysis method of heavy caliber Photodetection system
CN108106816A (en) * 2017-11-22 2018-06-01 中国科学院长春光学精密机械与物理研究所 Detect the method and system of large-caliber space optical system wave front aberration
CN108195566A (en) * 2018-01-03 2018-06-22 苏州维纳仪器有限责任公司 The method for detecting arbitrary wavelength arbitrary shape bore optical system transmission wavefront
CN110361163A (en) * 2019-06-14 2019-10-22 中科院南京天文仪器有限公司 The device and method of parallel light tube suspension Scanning Detction heavy-caliber optical system
CN111258081A (en) * 2020-02-25 2020-06-09 中国科学院长春光学精密机械与物理研究所 Optical system installation and adjustment method and device based on optical fiber interconnection
CN112146850A (en) * 2020-09-22 2020-12-29 航天科工微电子系统研究院有限公司 Device and method for detecting wave aberration of large-aperture telescope system
CN112556997A (en) * 2020-11-30 2021-03-26 中国科学院长春光学精密机械与物理研究所 Large-aperture optical system detection method, device, equipment and storage medium
CN112558318A (en) * 2020-11-30 2021-03-26 中国科学院长春光学精密机械与物理研究所 Auxiliary adjusting method for large-caliber optical element
CN112903256A (en) * 2021-02-25 2021-06-04 北京空间机电研究所 In-orbit imaging performance evaluation method for remote sensing satellite optical system
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JP2011049369A (en) * 2009-08-27 2011-03-10 Nikon Corp Optical characteristic measuring device and calibration method of the same, and exposure method and exposure device
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CN104075882B (en) * 2014-07-01 2016-11-30 中国科学院长春光学精密机械与物理研究所 It is applicable to the wavefront optics jitter analysis method of heavy caliber Photodetection system
CN104075882A (en) * 2014-07-01 2014-10-01 中国科学院长春光学精密机械与物理研究所 Wave-front optical dither analyzing method suitable for large-caliber photoelectric detecting system
CN104296655A (en) * 2014-09-26 2015-01-21 中国科学院光电研究院 Calibration method of image rotation formula initial angle of laser tracker
CN108106816A (en) * 2017-11-22 2018-06-01 中国科学院长春光学精密机械与物理研究所 Detect the method and system of large-caliber space optical system wave front aberration
CN108195566A (en) * 2018-01-03 2018-06-22 苏州维纳仪器有限责任公司 The method for detecting arbitrary wavelength arbitrary shape bore optical system transmission wavefront
CN110361163B (en) * 2019-06-14 2021-06-04 中科院南京天文仪器有限公司 Device and method for detecting large-caliber optical system by parallel light tube suspension scanning
CN110361163A (en) * 2019-06-14 2019-10-22 中科院南京天文仪器有限公司 The device and method of parallel light tube suspension Scanning Detction heavy-caliber optical system
CN111258081A (en) * 2020-02-25 2020-06-09 中国科学院长春光学精密机械与物理研究所 Optical system installation and adjustment method and device based on optical fiber interconnection
CN112146850A (en) * 2020-09-22 2020-12-29 航天科工微电子系统研究院有限公司 Device and method for detecting wave aberration of large-aperture telescope system
CN112556997A (en) * 2020-11-30 2021-03-26 中国科学院长春光学精密机械与物理研究所 Large-aperture optical system detection method, device, equipment and storage medium
CN112558318A (en) * 2020-11-30 2021-03-26 中国科学院长春光学精密机械与物理研究所 Auxiliary adjusting method for large-caliber optical element
CN112556997B (en) * 2020-11-30 2021-10-08 中国科学院长春光学精密机械与物理研究所 Large-aperture optical system detection method, device, equipment and storage medium
CN112903256A (en) * 2021-02-25 2021-06-04 北京空间机电研究所 In-orbit imaging performance evaluation method for remote sensing satellite optical system
CN112903256B (en) * 2021-02-25 2022-07-29 北京空间机电研究所 In-orbit imaging performance evaluation method for remote sensing satellite optical system
CN115016116A (en) * 2022-05-30 2022-09-06 中国科学院西安光学精密机械研究所 Device and method for adjusting large-caliber optical system
CN115016116B (en) * 2022-05-30 2023-09-01 中国科学院西安光学精密机械研究所 Method for installing and adjusting large-caliber optical system

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