CN103276371B - The diffuser of CVD equipment, refrigerating unit and method of cooling - Google Patents
The diffuser of CVD equipment, refrigerating unit and method of cooling Download PDFInfo
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- CN103276371B CN103276371B CN201310098934.9A CN201310098934A CN103276371B CN 103276371 B CN103276371 B CN 103276371B CN 201310098934 A CN201310098934 A CN 201310098934A CN 103276371 B CN103276371 B CN 103276371B
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Abstract
The present invention relates to a kind of diffuser of CVD equipment, for refrigerating unit and the method for cooling of this diffuser.Wherein said refrigerating unit is provided with main body and base plate, and main body comprises the first cooling tank and the second cooling tank, the first cooling tank also comprise separate first enter tank and the first effluent trough.Cooling fluid enter first enter tank after flow into the second cooling tank by the first opening in spacer portion, then the water that enters along the cooling channel in base plate from the second cooling tank flow to water outlet place, then after the second cooling tank flows into the first effluent trough, derives refrigerating unit by the second opening in spacer portion.The present invention effectively can solve cooling fluid in the inconsistent problem of cooling channel different positions flow velocity, and due to the first shock absorption entering tank and the first effluent trough, cooling fluid can be made can to flow into more equably or flow out the second cooling tank, thus avoid the cooling fluid of local location too concentrated, contribute to homogeneity when improving cooling diffuser surface temperature.
Description
Technical field
The present invention relates to CVD system, particularly relate to the diffuser in CVD system, the refrigerating unit in this diffuser and the method for cooling of this diffuser.
Background technology
CVD(ChemicalVaporDeposition, chemical vapour deposition), refer to reactive material process at substrate surface generation chemical reaction film former under gaseous condition, CVD equipment is exactly the equipment realizing chemical vapour deposition at substrate surface.
MOCVD(metal organic chemical vapor deposition) equipment is as the typical CVD equipment of one, the growth of substrate (such as Sapphire Substrate sheet) wafer surface can be provided in and be used for luminous crystalline structure such as GaN(gan) time required temperature, pressure, the conditions such as chemical gas component.
The reaction chamber of vacuum is provided with in MOCVD device, pallet is provided with in reaction chamber, by diffuser (such as spray header), reactant gases is introduced in reaction chamber, and chemical reaction is carried out on the surface being transported to the multiple substrate wafers be placed on pallet, thus grow specific crystalline structure such as GaN structure.
Fig. 1 discloses in existing MOCVD device, a kind of part-structure 1720 of the spray header containing cooling structure, this spray header comprises a cooling water channel 1840, this cooling water channel 1840 is positioned at the space that the upper surface 1750 of this part-structure 1720 and lower surface 1755 limit, water coolant is from a vertical pipeline 1880(input channel) flow into spray header water-in after, directly flow along cooling water channel 1840 in this space, pass through spray header water outlet again from another vertical pipeline 1880(output channel) flow out, thus play the effect taking away heat and chilling spray head.
In order to play preferably cooling performance in the program, intentionally cooling channel being designed to the curve shape spiraled, taking away more heat by the contact range expanding cooling water channel.But water coolant is by behind input channel inflow cooling channel, by the impact in this path, cooling channel, the flow resistance of whole cooling water channel is larger, different positions in cooling channel of the flow velocity of water coolant is also inconsistent, thus cause the surface temperature of spray header different piece to there is certain otherness, such as make near water-in temperature lower, higher near outlet temperature.And spray header surface temperature is inconsistent, consistence during subsequent growth crystalline structure will be affected.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of diffuser of CVD equipment, for refrigerating unit and the method for cooling of this diffuser, can improve the homogeneity of diffuser surface temperature.
The first string of the embodiment of the present invention is to provide a kind of refrigerating unit, and described refrigerating unit comprises main body, and described body interior is provided with respectively for the first cooling tank and second cooling tank of cooling fluid circulation, and the first cooling tank is connected with the second cooling tank;
Wherein, described first cooling tank is directed into the cooling fluid of refrigerating unit in order to receive, and cooling fluid is directed into the second cooling tank, described second cooling tank in order to export to the first cooling tank by cooling fluid after cooling fluid circulation, and described first cooling tank is further in order to derive cooling fluid from refrigerating unit.
Described first cooling tank comprises first and enters tank and the first effluent trough; First enters tank and the first effluent trough is cut off mutually by water proof portion, enters the direct circulation between tank and the first effluent trough to stop cooling fluid first;
Described first enter tank and the first effluent trough respectively by spacer portion and described second cooling tank spaced; Described spacer portion is provided with multiple first opening, realizes first and enters being communicated with of tank and the second cooling tank, enters water in order to cooling fluid to be entered in tank to be directed at from first in the second cooling tank;
Described spacer portion is provided with multiple second opening, realizes being communicated with, in order to cooling fluid to be directed in the first effluent trough from the water outlet in the second cooling tank of the first effluent trough and the second cooling tank.
Described refrigerating unit can further include the base plate be connected with main body, the cooling channel for cooling fluid circulation is provided with in described base plate, the cooling fluid entrance of described cooling channel is connected with described second cooling tank respectively with cooling liquid outlet, in order to cooling fluid is directed at water outlet place in the second cooling tank from the water that enters in the second cooling tank.
Preferably, described base plate is roughly in the form of annular discs, and described main body is centered around described floor peripheral and roughly in the form of a ring.
Preferably, described first cooling tank is endless groove, and described second cooling tank is endless groove.
In various embodiments, described first cooling tank is positioned at the top of the second cooling tank; Or described first cooling tank and the second cooling tank distribute according to concentric circular fashion in the horizontal direction.
Described spacer portion is annular baffle, and described first opening is the perforate or the fluting that run through dividing plate, and described second opening is the perforate or the fluting that run through dividing plate.
Preferably, described cooling channel comprises multiple pipeline arranged in parallel, and each pipeline includes a cooling fluid entrance and a cooling liquid outlet.
Described refrigerating unit also comprises entrance connection section and outlet connections, and wherein entrance connection section and first enters tank and is connected, and enters tank in order to cooling fluid is imported first; Described outlet connections is connected with the first effluent trough, in order to cooling fluid to be derived from the first effluent trough.
In certain embodiments, described entrance connection section is provided with one or more water inlet, and each water inlet is connected to a water inlet pipe; Described outlet connections is provided with one or more water outlet, and each water outlet is connected to a rising pipe.
Described water proof portion is the bulge-structure arranged in spacer portion, and this bulge-structure is used for entering tank and the blocking-up of the first effluent trough by first of described first cooling tank; Or this bulge-structure is used for entering tank and the blocking-up of the first effluent trough by first of described first cooling tank, and blocks in entering between water place and water outlet place of described second cooling tank.
Preferably, described water proof portion has two at least.
Second scheme of the embodiment of the present invention is to provide a kind of diffuser for CVD equipment, it comprises the refrigerating unit that above-mentioned any one embodiment describes, multiple reactant gases transfer passage is also provided with, to export through the cooled reactant gases of described refrigerating unit in described diffuser.
3rd scheme of the embodiment of the present invention is to provide a kind of MOCVD device, comprise reaction chamber, be arranged in the pallet of reaction chamber, be positioned at well heater below pallet, rotating shaft that driving tray rotates, and the diffuser be positioned at above pallet, described diffuser comprises the refrigerating unit as above-mentioned any one embodiment describes, multiple reactant gases transfer passage is also provided with in described diffuser, multiple described reactant gases transfer passage runs through the base plate in described refrigerating unit, is delivered in reaction chamber will carry out cooled reactant gases through apparatus for supercooling.
4th scheme of the embodiment of the present invention is to provide a kind of method cooling diffuser in CVD equipment, refrigerating unit is provided with in described diffuser, also be provided with respectively for the first cooling tank and second cooling tank of cooling fluid circulation in this refrigerating unit, wherein the first cooling tank is connected with the second cooling tank, and described method comprises the steps:
Cooling fluid is imported the first cooling tank;
Cooling fluid in first cooling tank is directed into the second cooling tank;
The cooling fluid being directed into the second cooling tank is exported to the first cooling tank again;
The cooling fluid exporting to the first cooling tank is derived further from refrigerating unit.
In certain embodiments, described first cooling tank comprise cut off mutually by spacer portion first enter tank and the first effluent trough; Described spacer portion is provided with multiple first opening and multiple second opening;
Described step cooling fluid in first cooling tank being imported the second cooling tank specifically comprises: the cooling fluid entered first in tank imports the second cooling tank by multiple described first opening;
The described step cooling fluid being directed into the second cooling tank being exported to the first cooling tank specifically comprises: the cooling fluid being directed into the second cooling tank is exported to the first effluent trough by multiple described second opening.
In certain embodiments, refrigerating unit base plate is provided with in described diffuser, described refrigerating unit base plate interior is provided with cooling channel, the cooling fluid entrance of described cooling channel is connected with the different sites of described second cooling tank respectively with cooling liquid outlet, before the step cooling fluid being directed into the second cooling tank being exported to the first effluent trough, further comprising the steps of:
The cooling fluid be directed in the second cooling tank is imported cooling channel;
The cooling fluid imported in cooling channel is directed into the second cooling tank.
Preferably, described cooling channel comprises multiple cooling duct arranged in parallel, and each cooling duct includes a cooling fluid entrance and a cooling liquid outlet;
Described step cooling fluid in importing second cooling tank being imported cooling channel specifically comprises: the cooling fluid entrance in the ingress of the second cooling tank, the cooling fluid in importing second cooling tank being imported multiple cooling duct arranged in parallel;
The described step cooling fluid be directed in cooling channel being exported to the second cooling tank specifically comprises; The cooling fluid be directed in multiple cooling duct arranged in parallel is exported to the exit of the second cooling tank from the cooling liquid outlet of described multiple cooling duct.
Preferred described CVD equipment is MOCVD device.
Compared with prior art, refrigerating unit of the present invention has the following advantages:
Refrigerating unit in the embodiment of the present invention comprises main body, multiple cooling tank structure is employed in main body, cooling fluid is before importing the second cooling tank from the first cooling tank, first have passed through and once cushion, and can arrive equably in the second cooling tank, similar, when cooling fluid exports to the first cooling tank from the second cooling tank, also once can cushion, and the first cooling tank can be arrived equably, then be flowed out by the first cooling tank.Embodiments of the invention avoid in prior art large near the current of import, and the even problem of slow the produced inhomogeneous cooling of the flow rate of water flow away from import, therefore can not form the disadvantageous effect that local superheating even gasifies.The present embodiment, by being applied in the diffuser of CVD equipment by above-mentioned refrigerating unit and method, effectively can improve homogeneity during cooling diffuser surface temperature.
Accompanying drawing explanation
Fig. 1 is the part-structure schematic diagram of a kind of spray header containing cooling structure in existing MOCVD device;
Fig. 2 is the one-piece construction schematic diagram of refrigerating unit in one embodiment of the invention;
Fig. 3 is the sectional view of refrigerating unit shown in Fig. 2 of the present invention;
Fig. 4 is the partial enlarged drawing of refrigerating unit shown in Fig. 3 in A1 part;
Fig. 5 is the partial enlarged drawing of refrigerating unit shown in Fig. 3 in A2 part;
Fig. 6 be in Fig. 4 direction shown in dotted line by refrigerating unit cut after vertical view;
Fig. 7 is the sectional view of base plate in refrigerating unit shown in Fig. 2 of the present invention;
Fig. 8 is the part-structure schematic diagram of refrigerating unit in another embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the diffuser in CVD equipment provided by the invention is described, for the refrigerating unit of this diffuser, and the preferred embodiment of the method for cooling of this diffuser.
In one embodiment, refrigerating unit comprises main body 50, main body 50 inside is provided with respectively for the first cooling tank 520 and the second cooling tank 560 of cooling fluid circulation, first cooling tank 520 is connected with the second cooling tank 560, first cooling tank 520 is in order to receive cooling fluid, and cooling fluid is directed into the second cooling tank 560, second cooling tank 560 in order to cooling fluid is exported to the first cooling tank 520, first cooling tank 520 further in order to cooling fluid to be derived from refrigerating unit after cooling fluid circulation.
Further, the first cooling tank 520 comprises first and enters tank 530 and the first effluent trough 540; First enters tank 530 and the first effluent trough 540 is cut off mutually by water proof portion 536, enters the direct circulation between tank 530 and the first effluent trough 540 to stop cooling fluid first;
First enter tank 530 and the first effluent trough 540 respectively by spacer portion 535 and the second cooling tank 560 spaced; Spacer portion 535 is provided with multiple first opening 532, realizes first and enters being communicated with of tank 530 and the second cooling tank 560, enters water in order to cooling fluid to be entered in tank 530 to be directed at from first in the second cooling tank 560; Spacer portion 535 is also provided with multiple second opening 534, realizes being communicated with, in order to cooling fluid to be directed in the first effluent trough 540 from the water outlet in the second cooling tank 560 of the first effluent trough 540 and the second cooling tank 560.
Further, refrigerating unit also comprises the base plate 55 be connected with main body 50, the cooling channel 552 for cooling fluid circulation is provided with in base plate 55, the cooling fluid entrance of cooling channel 552 is connected with described second cooling tank 560 respectively with cooling liquid outlet, in order to cooling fluid is directed at water outlet place in the second cooling tank 560 from the water that enters in the second cooling tank 560.
In refrigerating unit 5 one-piece construction schematic diagram as shown in Figure 2, refrigerating unit 5 be provided with inner be communicated with for coolant flow main body 50(or claim body) and base plate 55, wherein base plate 55 is roughly in the form of annular discs, and main body 50 is centered around base plate 55 periphery and is roughly circular.The main body 50 of refrigerating unit 5 is respectively equipped with entrance connection section 115 and outlet connections 125, such as can make entrance connection section 115 and outlet connections 125 positioned opposite in main body 50.Cooling fluid (such as water coolant, cooling wet goods medium) enters the main body 50 of refrigerating unit 5 by the water inlet 110 on entrance connection section 115, in main body 50 and base plate 55 after flowing, flow out from the water outlet 120 outlet connections 125 again, play the effect taking away diffuser heat.
Not limiting the shape of water inlet, water outlet in the present embodiment, can be circular open or channel-shaped opening etc.In addition, in various embodiments, entrance connection section 115 can arrange one or more water inlet, each water inlet is connected to a water inlet pipe; Outlet connections 125 can arrange one or more water outlet, and each water outlet is connected to a rising pipe, to realize the flowing of cooling fluid better, improves cooling performance.
Coordinate see shown in Fig. 3 ~ Fig. 5, wherein Fig. 3 is the sectional view of refrigerating unit 5, and Fig. 4 is the partial enlarged drawing of A1 part in Fig. 3, and Fig. 5 is the partial enlarged drawing of A2 part in Fig. 3.Be provided with the first cooling tank 520 and the second cooling tank 560 in the main body 50 of refrigerating unit 5, in the present embodiment, the first cooling tank 520 is positioned at the top of the second cooling tank 560, and both are mutually isolated by spacer portion 535.In the present embodiment, the first cooling tank 520 is ring groove or circular channel, and the second cooling tank 560 is also ring groove or circular channel.
Wherein the first cooling tank 520 comprise further mutually isolated open first enter tank 530 and the first effluent trough 540.As shown in Figure 4, in spacer portion 535, contiguous first enters tank 530 place and is provided with multiple first opening 532, enters being communicated with between tank 530 with the second cooling tank 560 to realize first.Similar, as shown in Figure 5, in spacer portion 535, contiguous first effluent trough 540 place is provided with multiple second opening 534, to realize the connection between the first effluent trough 540 and the second cooling tank 560.First, second opening can be specifically the various structure such as perforate, fluting, the size of opening and distribution density etc. thereof can be arranged as required flexibly, and such as a kind of possibility is that the first opening 532 of setting in spacer portion 535 or the second opening 534 are evenly arranged.
Fig. 6 is the vertical view in Fig. 4 after the incision of direction shown in dotted line.Spacer portion 535 is a toroidal membrane, spacer portion 535 is provided with protruding water proof portion 536, above-mentioned first enter tank 530 and the first effluent trough 540 in order to be cut off by the first cooling tank 520 to be formed, thus cooling fluid can be blocked in position, water proof portion directly enter between tank 530 and the first effluent trough 540 to circulate first.Such as, can be water proof portion 536 is arranged in the roughly line direction projection along the second cooling tank 560 towards the first cooling tank 520 form partition, the water proof portion 536 in the present embodiment be a kind of structures arranged in vertical direction projection.
The water proof portion 536 that two are oppositely arranged is had in the present embodiment.Preferably, in the horizontal direction, the line in two water proof portions 536, mutually vertical with the line of outlet connections 125 with entrance connection section 115, first enters tank 530 and the first effluent trough 540 roughly in semi-circular.It may be noted that, in possibility, water proof portion also can be more, such as 4, further, these 4 water proof portions are symmetrical relative to the line of entrance connection section 115 and outlet connections 125, such first enter tank 530 and the first effluent trough 540 roughly curved.
The cooling channel 552 of connection second cooling tank 560 is provided with in the base plate 55 of refrigerating unit 5, base plate 55 is run through along the direction being parallel to base plate 55 upper surface (or lower surface) in cooling channel 552, the entrance of cooling channel 552 is communicated to the position (or being weighed into water place) of neighboring entry connection section 115 in the second cooling tank 560, and outlet is then communicated to the position (or weighing up water place) of contiguous outlet connections 125 in the second cooling tank 560.
Figure 7 shows that base plate 55 sectional view in the present embodiment, cooling channel 552 wherein comprises multiple pipeline arranged in parallel, the water resistance in water route is reduced, larger flow velocity can be realized under lower hydraulic pressure, make the flow velocity entering water place and water outlet place in the second cooling tank 560 more consistent, this scheme can effectively avoid occurring in cooling channel the air that big area is deposited further, also refrigerating unit Local cooling flow velocity can be avoided excessively slow, cause inhomogeneous cooling, thus the effect of Homogeneous cooling diffuser can be played.
In the present embodiment, second cooling tank 560 is a ring groove or circular channel, cooling fluid is except being mainly back to except the second cooling tank 560 along cooling channel 552, and some directly may flow to contiguous outlet connections 125 place from neighboring entry connection section 115 along the circumferential direction of the second cooling tank 560.As the optional scheme of one, two parts that the cooling fluid that also can be isolated into second cooling tank 560 cannot directly circulate, such as increase in water proof portion 536 and reverse projection (namely water proof portion 536 extends in the reverse direction further) is set, in the present embodiment, water proof portion 536 also comprises the projection to downward-extension from dividing plate 535, second cooling tank 560 is cut off, thus ensures that cooling fluid can only flow to water outlet place by cooling channel 552 from the water that enters in the second cooling tank 560.
Concrete process of cooling is as follows, and after cooling fluid flows into main body 50 by entrance connection section 115, flow in the first cooling tank 520 through entering pipeline 118 first enters tank 530.Due to the partition effect in water proof portion 536, the first opening 532 that cooling fluid can only enter between tank 530 and the second cooling tank 560 by first enters in the second cooling tank 560 below spacer portion 535.Preferably, can be cooling fluid can be entered equably in the second cooling tank 560, enter water place.Then, the water place that enters that cooling fluid leaves the second cooling tank 560 enters into base plate 55 cooling channel 552(preferably, and cooling channel 552 is one group of pipeline arranged in parallel), and water outlet place of the second cooling tank 560 is again flow back into along cooling channel 552.Flowed in the first effluent trough 540 above spacer portion 535 by the second opening 534 between the first effluent trough 540 and the second cooling tank 560.Preferably, can be make cooling fluid from the second cooling tank 560, flow to the first effluent trough 540 equably.Equally due to the partition effect in water proof portion 536, cooling fluid can not flow directly into first of the first cooling tank 520 and enter tank 530, after cooling fluid enters outlet connections 125 from the first effluent trough 540 by the outflow conduit 128 of main body 50 afterwards, final flow out refrigerating unit 5 thus take away the heat of diffuser.
The refrigerating unit 5 of said structure of the present invention, effectively can solve cooling fluid in the inconsistent problem of cooling channel 552 different positions flow velocity, and due to the first shock absorption entering tank 530 and the first effluent trough 540, cooling fluid can be made can to flow into or flow out the second cooling tank 560 more equably, thus avoid the cooling fluid of local location too concentrated, improve homogeneity during cooling diffuser surface temperature.
Further, owing to adopting multiple cooling duct arranged in parallel as cooling channel 552 in base plate 55, the water resistance in water route is reduced, larger flow velocity can be realized under lower hydraulic pressure, make the flow velocity entering water place and water outlet place in the second cooling tank 560 more consistent, improve the even results of cooling
embodiment 2
In above-described embodiment, the first cooling tank 520 and the second cooling tank 560 are (see Fig. 4 or Fig. 5) of distributing up and down.In the optional scheme of another kind as shown in Figure 8, the first cooling tank 520 ' and the second cooling tank 560 ' are inside and outside distributions diametrically, and namely according to concentric circular fashion distribution, the first cooling tank 520 ' is in outer ring, and the second cooling tank 560 ' is at inner ring.The part-structure of refrigerating unit 5 when the second embodiment is only disclosed in Fig. 8.
Cooling fluid flows into after first in the first cooling tank 520 ' enter tank 530 ' by entrance connection section 115 ', the second cooling tank 560 ' (in Fig. 8, water proof portion is not shown) is entered by the first the first opening 532 ' entered between tank 530 ' and the second cooling tank 560 ' in described spacer portion 535 ', due to the first shock absorption entering tank 530 ', cooling fluid can enter in the second cooling tank 560 ' equably, water outlet place is flow to from the water that enters in the second cooling tank 560 ' again via one group of cooling channel 552 ' arranged in parallel, then the first effluent trough 540 ' in the first cooling tank 520 ' is entered equably by the second opening 534 ' in the spacer portion 535 ' between the first effluent trough 540 ' and the second cooling tank 560 ', refrigerating unit is flowed out by outlet connections 125 ' (being the position carrying out with entrance connection section 115 ' and outlet connections 125 ' being connected shown in arrow in Fig. 8).
Also provide a kind of for the diffuser in CVD equipment in the present invention, in this diffuser, be provided with the refrigerating unit described by above-mentioned any one embodiment.In a kind of enforcement structure of example, the base plate of refrigerating unit is avoided the position of wherein cooling channel, offer multiple reactant gases transfer passage running through this base plate, such as ventilating pit.Different according to the technique using CVD equipment to carry out, these reactant gases transfer passages can be used to conveying same reactant gases, or are used for several different types of reactant gases of conveying in the reaction chamber of CVD equipment.Carry the various pipelines of heat-eliminating medium to be mutual seal isolation in reactant gases transfer passage and refrigerating unit, further, if gas delivery channels is ventilating pit, these ventilating pits not only run through base plate, are also uniformly distributed on base plate.Reactant gases, in the process of carrying via reactant gases transfer passage, can implement cooling, to control the temperature of reactant gases by the cooling fluid flowed through in refrigerating unit.When specific implementation, diffuser can be spray header or other forms; In the present invention, this is all not construed as limiting.
Present invention also offers a kind of CVD equipment of the diffuser including above-mentioned band refrigerating unit.Such as a kind of MOCVD device, comprising reaction chamber, be arranged in reaction chamber pallet, be positioned at well heater below pallet, rotating shaft that driving tray rotates, and be positioned at the above-mentioned diffuser above pallet.The entrance of reactant gases transport pipe on this diffuser, and the water inlet pipe of entrance connection section on wherein said refrigerating unit or connected cooling fluid, and the rising pipe of outlet connections or connected cooling fluid, be communicated to the outside of reaction chamber respectively.At least two kinds of different reactant gasess, be delivered in reaction chamber after being cooled by refrigerating unit during diffuser, in pallet above substrate wafer near there is chemical reaction, thus generate corresponding crystalline structure being positioned over the substrate wafer surface on pallet.
Embodiments of the invention are also for being provided with the diffuser of above-mentioned refrigerating unit in CVD equipment, provide a kind of method of cooling, this method of cooling mainly comprises the steps:
S1, cooling fluid is imported the first cooling tank 520;
S2, the cooling fluid in the first cooling tank 520 is directed into the second cooling tank 560;
S3, the cooling fluid being directed into the second cooling tank 560 is exported to the first cooling tank 520 again;
S4, the cooling fluid exporting to the first cooling tank 520 to be derived from refrigerating unit.
In one embodiment, the first cooling tank 520 comprise cut off mutually by spacer portion 535 first enter tank 530 and the first effluent trough 540, spacer portion 535 is provided with multiple first opening 532 and multiple second opening 534.Step S2 specifically can comprise: the cooling fluid entered first in tank 530 imports the second cooling tank 560 by multiple described first opening 532; Step S3 specifically can comprise: the cooling fluid being directed into the second cooling tank 560 is exported to the first effluent trough 540 by multiple described second opening 534.
In another embodiment, cooling channel 552 is also provided with in the base plate 55 of refrigerating unit, the cooling fluid entrance of cooling channel 552 is connected with the different sites of cooling liquid outlet respectively with the second cooling tank 560, before the step cooling fluid being directed into the second cooling tank 560 being exported to the first effluent trough 540, can also comprise the following steps: the cooling fluid be directed in the second cooling tank 560 is imported cooling channel 552; And the cooling fluid imported in cooling channel 552 is directed into the second cooling tank 560.
In still another embodiment, cooling channel 552 comprises multiple cooling duct arranged in parallel, and each cooling duct includes a cooling fluid entrance and a cooling liquid outlet; Then the cooling fluid be directed in the second cooling tank 560 is imported cooling channel 552 specifically can comprise: the cooling fluid entrance in the ingress of the second cooling tank 560, the cooling fluid in importing second cooling tank 560 being imported multiple cooling duct arranged in parallel; And the step cooling fluid be poured in cooling channel 552 being exported to the second cooling tank 560 specifically can comprise: the exit cooling fluid be directed in multiple cooling duct arranged in parallel being exported to the second cooling tank 560 from the cooling liquid outlet of described multiple cooling duct.
The present embodiment, by above-mentioned refrigerating unit and method being applied in the diffuser of CVD equipment such as MOCVD device, effectively can improve homogeneity during cooling diffuser surface temperature.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention, other schemes based on same principle also belong to scope.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (18)
1. a refrigerating unit, it is characterized in that, described refrigerating unit comprises main body (50), and described main body (50) inside is provided with respectively for the first cooling tank (520) and second cooling tank (560) of cooling fluid circulation, and the first cooling tank (520) is connected with the second cooling tank (560);
Wherein, described first cooling tank (520) is directed into the cooling fluid of refrigerating unit in order to receive, and cooling fluid is directed into the second cooling tank (560), described second cooling tank (560) in order to export to the first cooling tank (520) by cooling fluid after cooling fluid circulation, and described first cooling tank (520) is further in order to derive cooling fluid from refrigerating unit;
Described first cooling tank (520) comprises first and enters tank (530) and the first effluent trough (540); First enters tank (530) and the first effluent trough (540) is cut off mutually by water proof portion (536), enters the direct circulation between tank (530) and the first effluent trough (540) to stop cooling fluid first;
Described first enter tank (530) and the first effluent trough (540) respectively by spacer portion (535) and described second cooling tank (560) spaced; Described spacer portion (535) is provided with multiple first opening (532), realizes first and enters being communicated with of tank (530) and the second cooling tank (560), enters water in order to cooling fluid to be entered in tank (530) to be directed at from first in the second cooling tank (560);
Described spacer portion (535) is provided with multiple second opening (534), realizes being communicated with, in order to cooling fluid to be directed in the first effluent trough (540) from the water outlet in the second cooling tank (560) of the first effluent trough (540) and the second cooling tank (560).
2. refrigerating unit as claimed in claim 1, it is characterized in that, described refrigerating unit also comprises the base plate (55) be connected with main body (50), the cooling channel (552) for cooling fluid circulation is provided with in described base plate (55), the cooling fluid entrance of described cooling channel (552) is connected with described second cooling tank (560) respectively with cooling liquid outlet, in order to cooling fluid is directed at water outlet place in the second cooling tank (560) from the water that enters in the second cooling tank (560).
3. refrigerating unit as claimed in claim 2, it is characterized in that, described base plate (55) is roughly in the form of annular discs, and described main body (50) is centered around described base plate (55) periphery and roughly in the form of a ring.
4. refrigerating unit as claimed in claim 1, it is characterized in that, described first cooling tank (520) is endless groove, and described second cooling tank (560) is endless groove.
5. refrigerating unit as claimed in claim 4, it is characterized in that, described first cooling tank (520) is positioned at the top of the second cooling tank (560); Or described first cooling tank (520) and the second cooling tank (560) distribute according to concentric circular fashion in the horizontal direction.
6. the refrigerating unit as described in claim 1 or 4 or 5, is characterized in that, described spacer portion (535) is annular baffle, and described first opening (532) is for running through perforate or the fluting of dividing plate, and described second opening (534) is for running through perforate or the fluting of dividing plate.
7. refrigerating unit as claimed in claim 2, it is characterized in that, described cooling channel (552) comprise multiple pipeline arranged in parallel, and each pipeline includes a cooling fluid entrance and a cooling liquid outlet.
8. refrigerating unit as claimed in claim 1, it is characterized in that, described refrigerating unit also comprises entrance connection section (115) and outlet connections (125), and wherein entrance connection section (115) and first enters tank (530) and is connected, and enters tank (530) in order to cooling fluid is imported first; Described outlet connections (125) is connected with the first effluent trough (540), in order to cooling fluid to be derived from the first effluent trough (540).
9. refrigerating unit as claimed in claim 8, it is characterized in that, described entrance connection section (115) is provided with one or more water inlet, and each water inlet is connected to a water inlet pipe; Described outlet connections (125) is provided with one or more water outlet, and each water outlet is connected to a rising pipe.
10. refrigerating unit as claimed in claim 1, it is characterized in that, described water proof portion (536) is at the upper bulge-structure arranged of spacer portion (535), and this bulge-structure is used for entering tank (530) and the first effluent trough (540) blocking-up by first of described first cooling tank (520); Or this bulge-structure is used for entering tank (530) and the first effluent trough (540) blocking-up by first of described first cooling tank (520), and blocks in entering between water place and water outlet place of described second cooling tank (560).
11. refrigerating units as described in claim 1 or 10, it is characterized in that, described water proof portion (536) has two at least.
12. 1 kinds of diffusers for CVD equipment, it is characterized in that, comprise as the refrigerating unit in claim 1-11 as described in any one, in described diffuser, be also provided with multiple reactant gases transfer passage, to export through the cooled reactant gases of described refrigerating unit.
13. 1 kinds of MOCVD device, comprise reaction chamber, be arranged in the pallet of reaction chamber, be positioned at well heater below pallet, rotating shaft that driving tray rotates, and the diffuser be positioned at above pallet, it is characterized in that, described diffuser comprises as the refrigerating unit in claim 1-11 as described in any one, also be provided with multiple reactant gases transfer passage in described diffuser, be delivered in reaction chamber so that cooled reactant gases will be carried out through apparatus for supercooling.
14. 1 kinds of methods cooling diffuser in CVD equipment, it is characterized in that, refrigerating unit is provided with in described diffuser, also be provided with respectively for the first cooling tank (520) and second cooling tank (560) of cooling fluid circulation in this refrigerating unit, wherein the first cooling tank (520) is connected with the second cooling tank (560), and described method comprises the steps:
Cooling fluid is imported the first cooling tank (520);
Cooling fluid in first cooling tank (520) is directed into the second cooling tank (560);
The cooling fluid being directed into the second cooling tank (560) is exported to the first cooling tank (520) again;
The cooling fluid exporting to the first cooling tank (520) is derived from refrigerating unit.
15. methods as claimed in claim 14, is characterized in that, described first cooling tank (520) comprise cut off mutually by spacer portion (535) first enter tank (530) and the first effluent trough (540); Described spacer portion (535) is provided with multiple first opening (532) and multiple second opening (534);
Described step cooling fluid in first cooling tank (520) being imported the second cooling tank (560) specifically comprises: the cooling fluid entered first in tank (530) imports the second cooling tank (560) by multiple described first opening (532);
The described step cooling fluid being directed into the second cooling tank (560) being exported to the first cooling tank (520) specifically comprises: the cooling fluid being directed into the second cooling tank (560) is exported to the first effluent trough (540) by multiple described second opening (534).
16. methods as described in claims 14 or 15, it is characterized in that, refrigerating unit base plate (55) is provided with in described diffuser, described refrigerating unit base plate (55) inside is provided with cooling channel (552), the cooling fluid entrance of described cooling channel (552) is connected with the different sites of described second cooling tank (560) respectively with cooling liquid outlet, before the cooling fluid being directed into the second cooling tank (560) is exported to the step of the first effluent trough (540), further comprising the steps of:
The cooling fluid that will be directed in the second cooling tank (560) imports cooling channel (552);
The cooling fluid imported in cooling channel (552) is directed into the second cooling tank (560).
17. methods as claimed in claim 16, it is characterized in that, described cooling channel (552) comprise multiple cooling duct arranged in parallel, and each cooling duct includes a cooling fluid entrance and a cooling liquid outlet;
Described step cooling fluid in importing second cooling tank (560) being imported cooling channel (552) specifically comprises: the cooling fluid entrance in the ingress of the second cooling tank (560), the cooling fluid in importing second cooling tank (560) being imported multiple cooling duct arranged in parallel;
The described step cooling fluid be directed in cooling channel (552) being exported to the second cooling tank (560) specifically comprises; The cooling fluid be directed in multiple cooling duct arranged in parallel is exported to the exit of the second cooling tank (560) from the cooling liquid outlet of described multiple cooling duct.
18. methods as claimed in claim 14, it is characterized in that, described CVD equipment is MOCVD device.
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| CN106011789B (en) * | 2015-03-26 | 2018-08-10 | 中晟光电设备（上海）股份有限公司 | MOCVD systems and its reaction gas conveying device |
| CN107252877A (en) * | 2017-08-09 | 2017-10-17 | 佛山市南海奔达模具有限公司 | Mould multiple spot cooling body and its hub mold of application |
| CN113793793B (en) * | 2021-09-15 | 2023-04-07 | 江苏先锋精密科技股份有限公司 | Liner with cooling structure for etching machine and processing method thereof |
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| CN102345112A (en) * | 2011-09-22 | 2012-02-08 | 中微半导体设备(上海)有限公司 | Semiconductor processing device and gas spray head cooling plate thereof |
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| US6635117B1 (en) * | 2000-04-26 | 2003-10-21 | Axcelis Technologies, Inc. | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system |
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| CN102345112A (en) * | 2011-09-22 | 2012-02-08 | 中微半导体设备(上海)有限公司 | Semiconductor processing device and gas spray head cooling plate thereof |
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Address after: 201203 B District, 168 Hua Tuo Road, Zhangjiang hi tech park, Shanghai, Pudong New Area, 3 Patentee after: Zhongsheng photoelectric equipment (Shanghai) Limited by Share Ltd Address before: 201203 Shanghai Guo Shou Jing Road, Zhangjiang High Tech Park of Pudong New Area No. 351 Building No. 2 room 614 Patentee before: Zhongsheng photoelectric equipment (Shanghai) Co., Ltd. |