CN103175677B - A kind of ultraviolet multiparameter calibration device - Google Patents
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Abstract
本发明涉及紫外光参数校准技术领域，具体的讲是一种紫外多参数校准装置，旋转平台内置于所述真空仓内，单色仪与真空仓相连接，紫外探测器通过单色仪测量真空仓内的紫外光源的辐射，或者紫外光源通过单色仪向真空仓提供紫外光源的辐射；标准紫外光源，待校准光源，标准紫外探测器，待校准探测器，紫外成像器和紫外成像参数校准系统均置于所述旋转平台之上，所述旋转平台根据控制信号沿着所述旋转平台的圆心旋转，其中，所述紫外成像器和紫外成像参数校准系统处于同一光路。通过上述实施例，能够在一个共用校准装置上实现紫外光源光谱辐射度校准、紫外探测器光谱响应度和紫外成像器参数的校准，节省了试验成本，提高了试验效率。
The present invention relates to the technical field of ultraviolet light parameter calibration, in particular to an ultraviolet multi-parameter calibration device, a rotating platform is built in the vacuum chamber, a monochromator is connected with the vacuum chamber, and an ultraviolet detector measures the vacuum through the monochromator The radiation of the ultraviolet light source in the chamber, or the ultraviolet light source provides the radiation of the ultraviolet light source to the vacuum chamber through the monochromator; the standard ultraviolet light source, the light source to be calibrated, the standard ultraviolet detector, the detector to be calibrated, the ultraviolet imager and the ultraviolet imaging parameter calibration The systems are all placed on the rotating platform, and the rotating platform rotates along the center of the rotating platform according to the control signal, wherein the ultraviolet imager and the ultraviolet imaging parameter calibration system are in the same optical path. Through the above embodiments, the calibration of the spectral radiance of the ultraviolet light source, the spectral responsivity of the ultraviolet detector and the parameters of the ultraviolet imager can be realized on a common calibration device, which saves the test cost and improves the test efficiency.
Description
技术领域technical field
本发明涉及紫外光参数校准技术领域，具体的讲是一种紫外多参数校准装置。The invention relates to the technical field of ultraviolet light parameter calibration, in particular to an ultraviolet multi-parameter calibration device.
背景技术Background technique
紫外波段按照能否在大气中进行传播，广义上分为真空紫外波段(10nm～200nm)和非真空紫外波段(200nm～400nm)。紫外波段的辐射特性不同于可见光和红外波段，它在空间探测领域具有不可替代的优势，随着探月工程、深空探测计划、以及火星探测等计划的相续发展，受到越来越多的关注。因此对紫外波段的辐射特性的测量十分必要。The ultraviolet band can be broadly divided into vacuum ultraviolet band (10nm~200nm) and non-vacuum ultraviolet band (200nm~400nm) according to whether it can propagate in the atmosphere. The radiation characteristics of the ultraviolet band are different from those of visible light and infrared bands. It has irreplaceable advantages in the field of space exploration. With the continuous development of lunar exploration projects, deep space exploration programs, and Mars exploration programs, more and more focus on. Therefore, it is very necessary to measure the radiation characteristics in the ultraviolet band.
紫外光源、紫外探测器和紫外成像器的参数快速准确校准一直是计量校准领域的难题。现阶段，在进行紫外光源光谱辐射度校准、紫外探测器光谱响应度和紫外成像器参数校准过程中，至少使用三套校准装置分别对紫外光源、紫外探测器和紫外成像仪进行参数校准，操作系统复杂，庞大、灵活性较差，从合理利用有限空间、接口灵活、多参数共同测量和可扩展性以及有效利用有限资金的角度思考，急需一套紫外多参数共同校准装置，具有较强的适用性。The rapid and accurate calibration of the parameters of the UV light source, UV detector and UV imager has always been a difficult problem in the field of metrology and calibration. At this stage, in the process of calibrating the spectral radiance of the ultraviolet light source, the spectral responsivity of the ultraviolet detector and the parameter calibration of the ultraviolet imager, at least three sets of calibration devices are used to calibrate the parameters of the ultraviolet light source, ultraviolet detector and ultraviolet imager respectively. The system is complex, huge, and poor in flexibility. From the perspective of rational use of limited space, flexible interface, multi-parameter common measurement and scalability, and effective use of limited funds, a set of ultraviolet multi-parameter common calibration device is urgently needed, which has a strong applicability.
发明内容Contents of the invention
为了解决现有技术进行紫外光参数校准需要多套设备造成校准试验成本高，并且试验效率低的问题，提供了一种紫外多参数校准装置可以以一台设备进行紫外多参数校准。In order to solve the problems of high calibration test cost and low test efficiency caused by the need for multiple sets of equipment for ultraviolet light parameter calibration in the prior art, an ultraviolet multi-parameter calibration device is provided, which can perform ultraviolet multi-parameter calibration with one device.
本发明实施例提供了一种紫外多参数校准装置，An embodiment of the present invention provides an ultraviolet multi-parameter calibration device,
旋转平台内置于所述真空仓内，单色仪与真空仓相连接，紫外探测器通过单色仪测量真空仓内的紫外光源的辐射，或者紫外光源通过单色仪向真空仓提供紫外光源的辐射；The rotating platform is built in the vacuum chamber, the monochromator is connected with the vacuum chamber, and the ultraviolet detector measures the radiation of the ultraviolet light source in the vacuum chamber through the monochromator, or the ultraviolet light source provides the ultraviolet light source to the vacuum chamber through the monochromator. radiation;
标准紫外光源，待校准光源，标准紫外探测器，待校准探测器，紫外成像器和紫外成像参数校准系统均置于所述旋转平台之上，所述旋转平台根据控制信号沿着所述旋转平台的圆心旋转，其中，所述紫外成像器和紫外成像参数校准系统处于同一光路。The standard ultraviolet light source, the light source to be calibrated, the standard ultraviolet detector, the detector to be calibrated, the ultraviolet imager and the ultraviolet imaging parameter calibration system are all placed on the rotating platform, and the rotating platform moves along the rotating platform according to the control signal The center of the circle is rotated, wherein the ultraviolet imager and the ultraviolet imaging parameter calibration system are in the same optical path.
根据本发明实施例所述的一种紫外多参数校准装置的一个进一步的方面，所述旋转平台与标准紫外光源，待校准光源，标准紫外探测器，待校准探测器，紫外成像器和紫外成像参数校准系统的连接接口均具有旋转电机和平移电机，通过所述旋转电机和平移电机调节所述标准紫外光源，待校准光源，标准紫外探测器，待校准探测器，紫外成像器和紫外成像参数校准系统的位置和空间姿态。According to a further aspect of an ultraviolet multi-parameter calibration device described in an embodiment of the present invention, the rotating platform is connected with a standard ultraviolet light source, a light source to be calibrated, a standard ultraviolet detector, a detector to be calibrated, an ultraviolet imager and an ultraviolet imaging The connection interface of the parameter calibration system has a rotating motor and a translation motor, through which the standard ultraviolet light source, the light source to be calibrated, the standard ultraviolet detector, the detector to be calibrated, the ultraviolet imager and the ultraviolet imaging parameters are adjusted Calibrate the system's position and attitude in space.
根据本发明实施例所述的一种紫外多参数校准装置的再一个进一步的方面，还包括计算机，当进行光源光谱辐射度校准时，所述紫外探测器与所述单色仪相连接，所述旋转平台进行旋转承载着所述标准紫外光源位于光路中，所述标准紫外光源发射出辐射，该标准紫外光源的辐射经过所述单色仪分光后被所述紫外探测器获取，将该标准紫外光源的光谱响应数据发送给计算机；According to a further aspect of the ultraviolet multi-parameter calibration device described in the embodiment of the present invention, it also includes a computer. When calibrating the spectral radiance of the light source, the ultraviolet detector is connected to the monochromator, so The rotating platform rotates and carries the standard ultraviolet light source in the optical path. The standard ultraviolet light source emits radiation, and the radiation of the standard ultraviolet light source is captured by the ultraviolet detector after being split by the monochromator. The spectral response data of the ultraviolet light source is sent to the computer;
所述旋转平台进行旋转承载着所述待校准光源位于光路中，所述待校准光源发射出辐射，该待校准光源的辐射经过所述单色仪分光后被所述紫外探测器获取，将该待校准光源的光谱响应数据发送给计算机。The rotating platform rotates and carries the light source to be calibrated in the optical path, the light source to be calibrated emits radiation, and the radiation of the light source to be calibrated is captured by the ultraviolet detector after being spectroscopically split by the monochromator. The spectral response data of the light source to be calibrated is sent to the computer.
根据本发明实施例所述的一种紫外多参数校准装置的另一个进一步的方面，还包括计算机，当进行紫外探测器光谱响应度校准时，所述紫外光源与所述单色仪相连接，所述旋转平台进行旋转承载着所述标准紫外探测器位于光路中，所述紫外光源发射出的辐射经过单色仪分光后由所述标准紫外探测器接收，所述标准紫外探测器将该紫外光源辐射的光谱响应数据发送给计算机；According to another further aspect of the ultraviolet multi-parameter calibration device described in the embodiment of the present invention, it also includes a computer. When calibrating the spectral responsivity of the ultraviolet detector, the ultraviolet light source is connected to the monochromator, The rotating platform rotates and carries the standard ultraviolet detector in the optical path. The radiation emitted by the ultraviolet light source is received by the standard ultraviolet detector after being split by the monochromator, and the standard ultraviolet detector puts the ultraviolet The spectral response data of the light source radiation is sent to the computer;
所述旋转平台进行旋转承载着所述待校准探测器位于光路中，所述紫外光源发射出的辐射经过单色仪分光后由所述待校准探测器接收，所述待校准探测器将该紫外光源辐射的光谱响应数据发送给计算机。The rotating platform rotates and carries the detector to be calibrated in the optical path, the radiation emitted by the ultraviolet light source is received by the detector to be calibrated after being spectroscopically split by the monochromator, and the detector to be calibrated puts the ultraviolet The spectral response data of the light source radiation is sent to the computer.
根据本发明实施例所述的一种紫外多参数校准装置的另一个进一步的方面，还包括计算机，当进行紫外成像参数校准时，所述紫外光源与所述单色仪相连接，所述旋转平台进行旋转承载着所述紫外成像器和紫外成像参数校准系统处于光路中，所述紫外光源发射出的辐射经过单色仪分光后转换为一定带宽的紫外光谱辐射，该一定带宽的紫外光谱辐射成为所述紫外成像参数校准系统的紫外光源，所述紫外成像参数校准系统投射出紫外标准图像，所述紫外成像器对所述标准图像进行接收和探测，并将探测数据发送给所述计算机。According to another further aspect of the ultraviolet multi-parameter calibration device described in the embodiment of the present invention, it also includes a computer. When performing ultraviolet imaging parameter calibration, the ultraviolet light source is connected with the monochromator, and the rotating The platform rotates and carries the ultraviolet imager and the ultraviolet imaging parameter calibration system in the optical path. The radiation emitted by the ultraviolet light source is converted into ultraviolet spectral radiation with a certain bandwidth after being spectroscopically split by the monochromator. The ultraviolet spectral radiation with a certain bandwidth It becomes the ultraviolet light source of the ultraviolet imaging parameter calibration system, and the ultraviolet imaging parameter calibration system projects an ultraviolet standard image, and the ultraviolet imager receives and detects the standard image, and sends the detection data to the computer.
根据本发明实施例所述的一种紫外多参数校准装置的另一个进一步的方面，所述计算机用于数据计算和比较操作。According to another further aspect of the ultraviolet multi-parameter calibration device described in the embodiment of the present invention, the computer is used for data calculation and comparison operations.
根据本发明实施例所述的一种紫外多参数校准装置的另一个进一步的方面，所述单色仪与所述真空仓采用法兰连接。According to another further aspect of the ultraviolet multi-parameter calibration device described in the embodiment of the present invention, the monochromator is connected to the vacuum chamber by a flange.
根据本发明实施例所述的一种紫外多参数校准装置的另一个进一步的方面，所述真空仓控制在1×10-1pa～1×10-5pa之间，仓体积控制在0.5m3～10m3之间。According to another further aspect of an ultraviolet multi-parameter calibration device described in an embodiment of the present invention, the vacuum chamber is controlled between 1×10 -1 Pa and 1×10 -5 Pa, and the chamber volume is controlled at 0.5m 3 to 10m3 .
通过上述实施例，能够在一个共用校准装置上实现紫外光源光谱辐射度校准、紫外探测器光谱响应度和紫外成像器参数的校准，节省了试验成本，提高了试验效率。Through the above embodiments, the calibration of the spectral radiance of the ultraviolet light source, the spectral responsivity of the ultraviolet detector and the parameters of the ultraviolet imager can be realized on a common calibration device, which saves the test cost and improves the test efficiency.
附图说明Description of drawings
结合以下附图阅读对实施例的详细描述，本发明的上述特征和优点，以及额外的特征和优点，将会更加清楚。The above-mentioned features and advantages, as well as additional features and advantages of the present invention, will become more apparent when reading the detailed description of the embodiments in conjunction with the following drawings.
图1给出了根据本发明的一个实施例一种紫外多参数校准装置的结构示意图；Fig. 1 has provided the structural representation of a kind of ultraviolet multi-parameter calibration device according to an embodiment of the present invention;
图2所示为本发明实施例紫外多参数校准装置在进行紫外光源光谱辐射度校准的结构示意图；Fig. 2 is a schematic diagram showing the structure of an ultraviolet multi-parameter calibration device of an embodiment of the present invention performing spectral radiance calibration of an ultraviolet light source;
图3所示为本发明实施例紫外多参数校准装置在进行紫外探测器光谱响应度校准的结构示意图；Fig. 3 is a schematic diagram showing the structure of the ultraviolet multi-parameter calibration device of the embodiment of the present invention performing the calibration of the spectral responsivity of the ultraviolet detector;
图4所示为本发明实施例紫外多参数校准装置在进行紫外成像参数校准的结构示意图。FIG. 4 is a schematic structural diagram of an ultraviolet multi-parameter calibration device of an embodiment of the present invention performing ultraviolet imaging parameter calibration.
具体实施方式detailed description
下面的描述可以使任何本领域技术人员利用本发明。具体实施例和应用中所提供的描述信息仅为示例。这里所描述的实施例的各种延伸和组合对于本领域的技术人员是显而易见的，在不脱离本发明的实质和范围的情况下，本发明定义的一般原则可以应用到其他实施例和应用中。因此，本发明不只限于所示的实施例，本发明涵盖与本文所示原理和特征相一致的最大范围。The following description will enable any person skilled in the art to utilize the present invention. The descriptions provided in the specific embodiments and applications are examples only. Various extensions and combinations of the embodiments described herein will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the invention . Thus, the present invention is not limited to the embodiments shown, but the present invention covers the widest scope consistent with the principles and features shown herein.
图1给出了根据本发明的一个实施例一种紫外多参数校准装置的结构示意图。FIG. 1 shows a schematic structural diagram of an ultraviolet multi-parameter calibration device according to an embodiment of the present invention.
包括真空仓101，旋转平台102，标准紫外光源103，待校准光源104，标准紫外探测器105，待校准探测器106，紫外成像器107，紫外成像参数校准系统108，单色仪109，还包括紫外探测器110或者紫外光源111。It includes a vacuum chamber 101, a rotating platform 102, a standard ultraviolet light source 103, a light source to be calibrated 104, a standard ultraviolet detector 105, a detector to be calibrated 106, an ultraviolet imager 107, an ultraviolet imaging parameter calibration system 108, and a monochromator 109. An ultraviolet detector 110 or an ultraviolet light source 111 .
所述旋转平台102内置于所述真空仓101内，所述单色仪109与所述真空仓101相连接，所述紫外探测器110通过所述单色仪109测量所述真空仓101内的紫外光源的辐射，或者所述紫外光源111通过所述单色仪109向所述真空仓101提供紫外光源的辐射。The rotary platform 102 is built in the vacuum chamber 101, the monochromator 109 is connected with the vacuum chamber 101, and the ultraviolet detector 110 measures the temperature in the vacuum chamber 101 through the monochromator 109. The radiation of the ultraviolet light source, or the ultraviolet light source 111 provides the radiation of the ultraviolet light source to the vacuum chamber 101 through the monochromator 109 .
所述标准紫外光源103，待校准光源104，标准紫外探测器105，待校准探测器106，紫外成像器107和紫外成像参数校准系统108均置于所述旋转平台102之上，所述旋转平台102根据控制信号沿着所述旋转平台102的圆心旋转，其中，所述紫外成像器107和紫外成像参数校准系统108处于同一光路。The standard ultraviolet light source 103, the light source 104 to be calibrated, the standard ultraviolet detector 105, the detector 106 to be calibrated, the ultraviolet imager 107 and the ultraviolet imaging parameter calibration system 108 are all placed on the rotating platform 102, and the rotating platform 102 rotates along the center of the rotating platform 102 according to the control signal, wherein the ultraviolet imager 107 and the ultraviolet imaging parameter calibration system 108 are in the same optical path.
作为本发明的一个实施例，所述旋转平台102与标准紫外光源103，待校准光源104，标准紫外探测器105，待校准探测器106，紫外成像器107和紫外成像参数校准系统108的连接接口均具有旋转电机和平移电机，可以调节所述标准紫外光源103，待校准光源104，标准紫外探测器105，待校准探测器106，紫外成像器107和紫外成像参数校准系统108的位置和空间姿态。As an embodiment of the present invention, the connection interface between the rotating platform 102 and the standard ultraviolet light source 103, the light source to be calibrated 104, the standard ultraviolet detector 105, the detector to be calibrated 106, the ultraviolet imager 107 and the ultraviolet imaging parameter calibration system 108 Both have a rotating motor and a translation motor, which can adjust the position and spatial attitude of the standard ultraviolet light source 103, the light source to be calibrated 104, the standard ultraviolet detector 105, the detector to be calibrated 106, the ultraviolet imager 107 and the ultraviolet imaging parameter calibration system 108 .
作为本发明的一个实施例，还包括计算机，当进行光源光谱辐射度校准时，所述紫外探测器110与所述单色仪109相连接，所述旋转平台102进行旋转承载着所述标准紫外光源103位于光路中，所述标准紫外光源103发射出辐射，该标准紫外光源的辐射经过所述单色仪109分光后被所述紫外探测器110获取，将该标准紫外光源的光谱响应数据发送给计算机；As an embodiment of the present invention, it also includes a computer. When calibrating the spectral radiance of the light source, the ultraviolet detector 110 is connected with the monochromator 109, and the rotating platform 102 is rotated to carry the standard ultraviolet The light source 103 is located in the optical path, and the standard ultraviolet light source 103 emits radiation, and the radiation of the standard ultraviolet light source is obtained by the ultraviolet detector 110 after being separated by the monochromator 109, and the spectral response data of the standard ultraviolet light source is sent to the computer;
所述旋转平台102进行旋转承载着所述待校准光源104位于光路中，所述待校准光源104发射出辐射，该待校准光源的辐射经过所述单色仪109分光后被所述紫外探测器110获取，将该待校准光源的光谱响应数据发送给计算机。The rotating platform 102 rotates and carries the light source to be calibrated 104 in the optical path, the light source to be calibrated 104 emits radiation, and the radiation of the light source to be calibrated is split by the monochromator 109 and then detected by the ultraviolet detector 110 Acquire and send the spectral response data of the light source to be calibrated to the computer.
作为本发明的一个实施例，还包括计算机，当进行紫外探测器光谱响应度校准时，所述紫外光源111与所述单色仪109相连接，所述旋转平台102进行旋转承载着所述标准紫外探测器105位于光路中，所述紫外光源111发射出的辐射经过单色仪109分光后由所述标准紫外探测器105接收，所述标准紫外探测器105将该紫外光源111辐射的光谱响应数据发送给计算机；As an embodiment of the present invention, a computer is also included. When calibrating the spectral responsivity of the ultraviolet detector, the ultraviolet light source 111 is connected to the monochromator 109, and the rotating platform 102 rotates to carry the standard The ultraviolet detector 105 is located in the light path, and the radiation emitted by the ultraviolet light source 111 is received by the standard ultraviolet detector 105 after being split by the monochromator 109, and the spectral response of the ultraviolet light source 111 radiated by the standard ultraviolet detector 105 is send data to computer;
所述旋转平台102进行旋转承载着所述待校准探测器106位于光路中，所述紫外光源111发射出的辐射经过单色仪109分光后由所述待校准探测器106接收，所述待校准探测器106将该紫外光源111辐射的光谱响应数据发送给计算机。The rotating platform 102 rotates and carries the detector to be calibrated 106 in the optical path, the radiation emitted by the ultraviolet light source 111 is received by the detector to be calibrated 106 after being split by the monochromator 109, and the detector to be calibrated is received by the detector 106 to be calibrated The detector 106 sends the spectral response data radiated by the ultraviolet light source 111 to the computer.
作为本发明的一个实施例，还包括计算机，当进行紫外成像参数校准时，所述紫外光源111与所述单色仪109相连接，所述旋转平台102进行旋转承载着所述紫外成像器107和紫外成像参数校准系统108处于光路中，所述紫外光源111发射出的辐射经过单色仪109分光后转换为一定带宽的紫外光谱辐射，该一定带宽的紫外光谱辐射成为所述紫外成像参数校准系统108的紫外光源，所述紫外成像参数校准系统108投射出紫外标准图像，所述紫外成像器107对所述标准图像进行接收和探测，并将探测数据发送给所述计算机。As an embodiment of the present invention, a computer is also included. When calibrating ultraviolet imaging parameters, the ultraviolet light source 111 is connected to the monochromator 109, and the rotating platform 102 is rotated to carry the ultraviolet imager 107 And the ultraviolet imaging parameter calibration system 108 is in the optical path, the radiation emitted by the ultraviolet light source 111 is converted into ultraviolet spectral radiation with a certain bandwidth after being split by the monochromator 109, and the ultraviolet spectral radiation with a certain bandwidth becomes the calibration parameter of the ultraviolet imaging parameter. The ultraviolet light source of the system 108, the ultraviolet imaging parameter calibration system 108 projects an ultraviolet standard image, the ultraviolet imager 107 receives and detects the standard image, and sends the detection data to the computer.
所述计算机用于数据计算和比较等操作。The computer is used for operations such as data calculation and comparison.
作为本发明的一个实施例，所述单色仪109与所述真空仓101采用法兰连接。As an embodiment of the present invention, the monochromator 109 is connected to the vacuum chamber 101 by a flange.
作为本发明的一个实施例，所述真空仓101控制在1×10-1pa～1×10-5pa之间，仓体积控制在0.5m3～10m3之间。As an embodiment of the present invention, the vacuum chamber 101 is controlled between 1×10 -1 Pa and 1×10 -5 Pa, and the volume of the chamber is controlled between 0.5m 3 and 10m 3 .
通过上述实施例，能够在一个共用校准装置上实现紫外光源光谱辐射度校准、紫外探测器光谱响应度和紫外成像器参数的校准，节省了试验成本，提高了试验效率。Through the above embodiments, the calibration of the spectral radiance of the ultraviolet light source, the spectral responsivity of the ultraviolet detector and the parameters of the ultraviolet imager can be realized on a common calibration device, which saves the test cost and improves the test efficiency.
如图2所示为本发明实施例紫外多参数校准装置在进行紫外光源光谱辐射度校准的结构示意图。FIG. 2 is a schematic structural diagram of an ultraviolet multi-parameter calibration device in an embodiment of the present invention performing spectral radiance calibration of an ultraviolet light source.
包括真空仓201，旋转平台202，标准紫外光源203，待校准光源204，单色仪205，紫外探测器206，标准紫外探测器207，待校准探测器208，紫外成像器209，紫外成像参数校准系统210。Including vacuum chamber 201, rotating platform 202, standard ultraviolet light source 203, light source to be calibrated 204, monochromator 205, ultraviolet detector 206, standard ultraviolet detector 207, detector to be calibrated 208, ultraviolet imager 209, ultraviolet imaging parameter calibration System 210.
所述单色仪205通过法兰的方式与所述真空仓201相连接，所述紫外探测器206与所述单色仪205相连接，接收通过所述单色仪205的紫外光源辐射。The monochromator 205 is connected to the vacuum chamber 201 through a flange, and the ultraviolet detector 206 is connected to the monochromator 205 to receive the radiation of the ultraviolet light source passing through the monochromator 205 .
所述标准紫外光源203和待校准光源204与所述旋转平台202的连接部位具有电机，所述标准紫外光源203和待校准光源204可以旋转和位移，用以调节校准时的光路误差。The connection between the standard ultraviolet light source 203 and the light source to be calibrated 204 and the rotating platform 202 has a motor, and the standard ultraviolet light source 203 and the light source to be calibrated 204 can be rotated and displaced to adjust the optical path error during calibration.
其中所述真空仓主要包括真空仓仓体、机械泵、罗茨泵和分子泵、水循环系统和液氮加注系统，仓体内还有照明灯、测温传感器、平台等，真空仓作用是在真空紫外测量光路中构成真空环境，以避免真空紫外辐射在大气中被吸收，同时屏蔽可见与红外杂散光，保持系统校准时处于一个较为恒定的低温真空冷环境中。仓体真空度可以控制在1×10-1pa至1×10-5pa之间，仓体积控制在0.5m3～10m3之间。The vacuum chamber mainly includes a vacuum chamber body, a mechanical pump, a Roots pump and a molecular pump, a water circulation system and a liquid nitrogen filling system. There are also lighting lamps, temperature measuring sensors, platforms, etc. in the chamber body. The function of the vacuum chamber is to A vacuum environment is formed in the vacuum ultraviolet measurement optical path to prevent vacuum ultraviolet radiation from being absorbed in the atmosphere, shield visible and infrared stray light at the same time, and keep the system in a relatively constant low-temperature vacuum cold environment during calibration. The vacuum degree of the chamber can be controlled between 1×10 -1 Pa and 1×10 -5 Pa, and the chamber volume can be controlled between 0.5m 3 and 10m 3 .
所述旋转平台202包括一个电动转动台台体和相应的电机驱动控制机构，在旋转平台上安装相应的可以调整空间姿态和位置的转接端口，通过转接端口可以放置相应的标准紫外光源203，待校准光源204，在紫外光源光谱辐射度校准中，可以实现标准光源5和待校准光源4之间的切换。The rotary platform 202 includes an electric rotary table body and a corresponding motor-driven control mechanism, and a corresponding transfer port that can adjust the spatial posture and position is installed on the rotary platform, and a corresponding standard ultraviolet light source 203 can be placed through the transfer port , the light source to be calibrated 204, in the ultraviolet light source spectral radiance calibration, switching between the standard light source 5 and the light source to be calibrated 4 can be realized.
所述单色仪205包括紫外单色仪真空仓和紫外光栅，所述紫外单色仪真空仓内安装有紫外光栅、光栅驱动机构和相关电气接口，比如电机驱动电源接口、位置传感器信号接口等。所述单色仪205焦距：200mm，光谱分辨率：0.1nm，波长准确度：0.1nm，f/#4.5，光谱范围30nm～500nm。所述紫外光栅为一IV型凹面全息光栅，可以在30nm～200nm波长范围内工作，光栅刻线在1200G/mm。光栅转动机构选择正弦机构，可以实现光栅的高精度转动控制。所述单色仪205可以进行双向使用，一端与真空仓连接，另一端可以与紫外探测器206相连接，进行紫外光源光谱辐射度校准。The monochromator 205 includes a UV monochromator vacuum chamber and a UV grating, and the UV monochromator vacuum chamber is equipped with a UV grating, a grating drive mechanism and related electrical interfaces, such as a motor drive power interface, a position sensor signal interface, etc. . The monochromator 205 has a focal length of 200 mm, a spectral resolution of 0.1 nm, a wavelength accuracy of 0.1 nm, f/#4.5, and a spectral range of 30 nm to 500 nm. The ultraviolet grating is a type IV concave holographic grating, which can work in the wavelength range of 30nm-200nm, and the grating line is 1200G/mm. The grating rotation mechanism chooses a sinusoidal mechanism, which can realize high-precision rotation control of the grating. The monochromator 205 can be used bidirectionally, one end is connected to the vacuum chamber, and the other end can be connected to the ultraviolet detector 206 to perform spectral radiance calibration of the ultraviolet light source.
所述标准紫外光源203为紫外氘灯或卤钨灯，该标准光源经过一级计量机构进行数据传递，可以进行待校准光源的光谱辐射度校准。The standard ultraviolet light source 203 is an ultraviolet deuterium lamp or a halogen tungsten lamp, and the standard light source is transmitted through a primary metering mechanism to perform spectral radiance calibration of the light source to be calibrated.
在进行紫外光源光谱辐射度校准时，首先，标准紫外光源203随着旋转平台202的旋转置于光路中，所述标准紫外光源203的紫外光源辐射经过单色仪205分光后由紫外探测器206接收信号，将光谱响应数据发送给与其连接的计算机。然后，通过旋转平台202进行旋转，实现标准紫外光源203和待校准光源204的切换，此时待校准光源204置于光路中，所述待校准光源204的紫外光源辐射经过单色仪205分光后由紫外探测器206接收，将此时的光谱响应数据发送给与其相连接计算机。最后，由计算机将两组数据进行比较运算，实现光源光谱辐射度的量值传递。When calibrating the spectral radiance of the ultraviolet light source, at first, the standard ultraviolet light source 203 is placed in the optical path along with the rotation of the rotary platform 202, and the ultraviolet light source radiation of the standard ultraviolet light source 203 is split by the ultraviolet detector 206 after being split by the monochromator 205 Receives the signal and sends spectral response data to a computer connected to it. Then, the rotating platform 202 is rotated to realize the switching between the standard ultraviolet light source 203 and the light source 204 to be calibrated. At this time, the light source 204 to be calibrated is placed in the optical path, and the radiation of the ultraviolet light source of the light source 204 to be calibrated passes through the monochromator 205 after spectroscopic It is received by the ultraviolet detector 206, and the spectral response data at this time is sent to the computer connected to it. Finally, the computer compares the two sets of data to realize the value transfer of the spectral radiance of the light source.
如图3所示为本发明实施例紫外多参数校准装置在进行紫外探测器光谱响应度校准的结构示意图。FIG. 3 is a schematic structural diagram of an ultraviolet multi-parameter calibration device in an embodiment of the present invention performing spectral responsivity calibration of an ultraviolet detector.
包括真空仓301，旋转平台302，标准紫外探测器303，待校准探测器304，单色仪305，紫外光源306，标准紫外光源307，待校准光源308，紫外成像器309，紫外成像参数校准系统310。Including vacuum chamber 301, rotating platform 302, standard ultraviolet detector 303, detector to be calibrated 304, monochromator 305, ultraviolet light source 306, standard ultraviolet light source 307, light source to be calibrated 308, ultraviolet imager 309, ultraviolet imaging parameter calibration system 310.
所述单色仪305通过法兰的方式与所述真空仓301相连接，所述紫外光源306与所述单色仪305相连接，通过所述单色仪305向所述真空301仓内的探测器输出紫外光源辐射。Described monochromator 305 is connected with described vacuum chamber 301 by the mode of flange, and described ultraviolet light source 306 is connected with described monochromator 305, through described monochromator 305 to described vacuum 301 chambers The detector outputs ultraviolet light source radiation.
其中真空仓301、单色仪305和旋转平台302均与图2中的实施例相同，在本实施例中不再赘述。The vacuum chamber 301 , the monochromator 305 and the rotating platform 302 are all the same as those in the embodiment in FIG. 2 , and will not be repeated in this embodiment.
在进行紫外光源光谱辐射度校准时，首先，标准紫外探测器303随着旋转平台302的旋转置于光路中，紫外光源306的紫外光辐射经过单色仪305分光后由标准紫外探测器303接收，所述标准紫外探测器303将光谱响应数据发送给计算机。然后，通过旋转平台302进行旋转，实现标准紫外探测器303和待校准探测器304的切换，此时待校准探测器304置于光路中，紫外光源306的紫外光辐射经过单色仪305分光后由所述待校准探测器304接收，并将此时的光谱响应数据发送给计算机。最后，所述计算机将两组数据进行比较运算，实现紫外探测器光谱响应度的量值传递。When calibrating the spectral radiance of the ultraviolet light source, first, the standard ultraviolet detector 303 is placed in the optical path along with the rotation of the rotating platform 302, and the ultraviolet radiation of the ultraviolet light source 306 is received by the standard ultraviolet detector 303 after being split by the monochromator 305 , the standard ultraviolet detector 303 sends the spectral response data to the computer. Then, the rotating platform 302 is rotated to realize the switch between the standard ultraviolet detector 303 and the detector to be calibrated 304. At this time, the detector to be calibrated 304 is placed in the optical path, and the ultraviolet radiation of the ultraviolet light source 306 passes through the monochromator 305 after spectroscopic It is received by the detector to be calibrated 304, and the spectral response data at this time is sent to the computer. Finally, the computer compares the two sets of data to realize the value transfer of the spectral responsivity of the ultraviolet detector.
如图4所示为本发明实施例紫外多参数校准装置在进行紫外成像参数校准的结构示意图。FIG. 4 is a schematic structural diagram of an ultraviolet multi-parameter calibration device of an embodiment of the present invention performing ultraviolet imaging parameter calibration.
包括真空仓401，旋转平台402，紫外成像器403，紫外成像参数校准系统404，单色仪405，紫外光源406，标准紫外光源407，待校准光源408，标准紫外探测器409，待校准探测器410。Including vacuum chamber 401, rotating platform 402, ultraviolet imager 403, ultraviolet imaging parameter calibration system 404, monochromator 405, ultraviolet light source 406, standard ultraviolet light source 407, light source to be calibrated 408, standard ultraviolet detector 409, detector to be calibrated 410.
所述单色仪405通过法兰的方式与所述真空仓401相连接，所述紫外光源406与所述单色仪405相连接，通过所述单色仪405向所述真空401仓内的探测器输出紫外光源辐射，所述紫外光源406的紫外逛辐射经过单色仪405分光后，输出一定带宽的紫外光谱辐射，为紫外成像参数校准系统404提供紫外光源。Described monochromator 405 is connected with described vacuum chamber 401 by the mode of flange, and described ultraviolet light source 406 is connected with described monochromator 405, through described monochromator 405 to described vacuum 401 chambers The detector outputs the radiation of the ultraviolet light source, and the ultraviolet radiation of the ultraviolet light source 406 is split by the monochromator 405 , and outputs ultraviolet spectrum radiation with a certain bandwidth to provide the ultraviolet light source for the ultraviolet imaging parameter calibration system 404 .
其中真空仓401、单色仪405和旋转平台402均与图2中的实施例相同，在本实施例中不再赘述。The vacuum chamber 401 , the monochromator 405 and the rotating platform 402 are all the same as those in the embodiment in FIG. 2 , and will not be repeated in this embodiment.
所述紫外成像参数校准系统404投射出无穷远的紫外标准图像，所述紫外成像器403对标准图像进行探测和接收，所述紫外成像器403将接收到的紫外标准图像发送给计算机，所述计算机对紫外标准图像进行分析，可以对紫外成像器403的主要参数进行校准，比如：畸变、空间分辨率、视场角、灵敏度、线性、动态范围、响应度等。可以实现紫外成像器的参数校准和量值传递。The ultraviolet imaging parameter calibration system 404 projects an infinite ultraviolet standard image, the ultraviolet imager 403 detects and receives the standard image, and the ultraviolet imager 403 sends the received ultraviolet standard image to the computer, and the ultraviolet imager 403 sends the received ultraviolet standard image to the computer. The computer analyzes the ultraviolet standard image, and can calibrate the main parameters of the ultraviolet imager 403, such as: distortion, spatial resolution, field of view, sensitivity, linearity, dynamic range, responsivity, etc. The parameter calibration and value transfer of the UV imager can be realized.
通过上述实施例，能够在一个共用校准装置上实现紫外光源光谱辐射度校准、紫外探测器光谱响应度和紫外成像器参数的校准，节省了试验成本，提高了试验效率。Through the above embodiments, the calibration of the spectral radiance of the ultraviolet light source, the spectral responsivity of the ultraviolet detector and the parameters of the ultraviolet imager can be realized on a common calibration device, which saves the test cost and improves the test efficiency.
在相关领域中的技术人员将会认识到，本发明的实施例有许多可能的修改和组合，虽然形式略有不同，仍采用相同的基本机制和方法。为了解释的目的，前述描述参考了几个特定的实施例。然而，上述的说明性讨论不旨在穷举或限制本文所发明的精确形式。前文所示，许多修改和变化是可能的。所选和所描述的实施例，用以解释本发明的原理及其实际应用，用以使本领域技术人员能够最好地利用本发明和各个实施例的针对特定应用的修改、变形。Those skilled in the relevant art will recognize that there are many possible modifications and combinations of the embodiments of the invention, albeit in slightly different forms, still employing the same basic mechanisms and methods. The foregoing description, for purposes of explanation, has referred to a few specific embodiments. However, the illustrative discussions above are not intended to be exhaustive or to limit the precise forms of the inventions herein. As indicated above, many modifications and variations are possible. The embodiments were chosen and described to explain the principles of the invention and its practical application, and to enable those skilled in the art to best utilize the invention and various modifications and variations of the embodiments for specific applications.
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