CN103105365A - Photoacoustic spectroscopy telemetering method and device based on micro quartz tuning fork optoacoustic effect - Google Patents
Photoacoustic spectroscopy telemetering method and device based on micro quartz tuning fork optoacoustic effect Download PDFInfo
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Abstract
The invention discloses a photoacoustic spectroscopy telemetering method and device based on a micro quartz tuning fork optoacoustic effect. The method comprises the following steps of: modulating continuous light of which the wavelength changes continuously into light of which the light intensity changes according to a certain frequency, and irradiating the light of which the light intensity changes to an object to be tested; collecting light reflected by the object to be tested by a concave mirror, and irradiating the collected light to a micro quartz tuning fork, wherein the amplitude of the micro quartz tuning fork changes along with the wavelength of incident light waves; and irradiating an arm of the micro quartz tuning fork by another beam of laser, wherein the light spot position of the reflected laser beam moves along with the vibration of the micro quartz tuning fork, the reflected light is irradiated to a light spot position detector after the light path of the reflected light is lengthened through a folded path, the amplitude size of the micro quartz tuning fork can be obtained by detecting the movement of the light spot, and the absorption spectrum of the tested object can be obtained by continuously changing the output wavelength of a variable wavelength laser. The method does not need sample preparation and pre-concentration processes or a photoacoustic cell, and can be used for directly and remotely measuring objects in an open environment.
Description
Technical field
The invention belongs to the optoacoustic spectroscopy field, relate to a kind of optoacoustic spectroscopy method of telemetering and device based on quartzy microphony fork optoacoustic effect.
Background technology
Optoacoustic spectroscopy (photoacoustic spectroscopy) is a kind of spectral technique that grows up based on optoacoustic effect.Photoacoustic spectroscopy be the size that object absorbs luminous energy, can measure the strong and opaque article of light scattering that traditional spectrographic technique is difficult to measure, and no matter sample be that crystal, powder, colloid etc. all can be measured, have the advantages such as highly sensitive, applied widely.At physics, chemistry, chemical industry, geology, biology, the aspects such as medical science have wide practical use.
Find by literature search, existing photoacoustic spectroscopy method is mainly divided two classes, and a class is sampled to sample, sample is introduced in sample cell measured.First bravely waiting as Liu of Xinan Science and Technology Univ. adopts photoacoustic cell and microphone combination that the methane gas photoacoustic signal is detected in Chinese patent CN1928531 " method of detecting methane gas concentration with opto-acoustic spectroscopic method ".Electric Power Research Institute of Shandong Electric Power Corp. cloud jade is newly at Chinese patent CN102721645A " portable S
F 6Gas analyte optoacoustic spectroscopy pick-up unit and detection method " in adopt microphone that the photoacoustic signal of γ-ray emission in photoacoustic cell is detected.The Gao Xiaoming of Anhui Inst. of Optics and Fine Mechanics, Chinese Academy of Sciences etc. use acoustic resonance cavity and quartz tuning-fork combination that the optoacoustic spectroscopy of gas is measured in Chinese patent CN101813621A " based on the quartz tuning fork strengthened optoacoustic spectroscopy gas sensing device of acoustic resonance cavity ".Said method all needs testee is sampled, be introduced in sample cell and can measure, complicated operation, be difficult to satisfy requirement quick, online, that detect under open environment, and microphonic signal to noise ratio (S/N ratio) is low, is difficult to realize that measured object and measurement mechanism have the spectrum remote measurement of certain distance.So be difficult to use in the detection of the occasion dangerous goods such as airport.
Equations of The Second Kind is to use the piezoelectric property of quartz crystal directly to obtain electric signal.Such as Charles W Van.Neste etc. has been enumerated in US Patent No. 7924423B2 " Reverse photoacoustic standoff spectroscopy " photoacoustic signal has been detected normally used pick-up unit, such as microphone, semi-girder, film, MEMS device etc.Examples uses quartz tuning-fork that voice signal is surveyed, and quartz tuning-fork is vibration-generating under the photoacoustic signal effect, produces piezoelectric signal, and this signal is the contain material spectral information.AnatoliyA.Kosterev etc. are at US Patent No. 7245380B2, use quartz tuning-fork that the testee photoacoustic signal is detected in " Quartz-enh ancedphotoacoustic spectroscopy ", and utilize the piezoelectric property of quartz crystal directly to obtain electric signal.Use the piezoelectric property of quartz crystal directly to obtain electric signal conveniently succinctly, it is not high enough that still existence detects sensitivity, and temperature affects on piezoelectric modulus shortcomings such as causing greatly the measurement result deviation.Be difficult to use in the detection of the occasion dangerous goods such as airport.
Summary of the invention
The problem that the present invention solves is to provide a kind of optoacoustic spectroscopy method of telemetering and device based on quartzy microphony fork optoacoustic effect, does not need sample preparation and pre-concentration process, does not need photoacoustic cell, can directly measure article at a distance under open environment.
The present invention is achieved through the following technical solutions:
A kind of optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect comprises following operation:
1) continuous light that wavelength is continuously changed is modulated to the light that light intensity changes by certain frequency, and the frequency that light intensity changes is consistent with the resonant frequency of quartzy microphony fork, then this illumination is mapped on object under test;
2) light reflects on object under test, utilizes concave mirror to collect the reflected light of object under test, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork, and quartzy microphony fork produces resonance; Because testee is different to the degree of absorption of different wave length ripple, the variation of the amplitude lambda1-wavelength of quartzy microphony fork and changing;
3) the second bundle illumination is mapped on quartzy microphony fork, light beam will reflect on quartzy microphony fork, and the light spot position of folded light beam can move along with the vibration of quartzy microphony fork; In the second bundle reflection of light light path, folded optical path is set, folded optical path enlarges light path, and the light spot position mobile range is enlarged;
4) outlet at folded optical path utilizes light spot position sensor that light spot position is surveyed, the light spot position signal is become electric signal by opto-electronic conversion, and the gained electric signal is processed, obtain the corresponding amplitude of variation of quartzy microphony fork and lambda1-wavelength, and then obtain the absorption spectrum of object under test.
Described absorption spectrum according to object under test just can be told the kind of object under test, and whether judge object under test is dangerous goods.
Described light all is the laser by the laser instrument emission.
Described the light spot position signal is become electric signal by opto-electronic conversion is to complete with light spot position sensor, and light spot position sensor is according to the corresponding electric signal of variation output of light spot position, and electric signal is amplified with amplifier.
Being operating as of the absorption spectrum of acquisition object under test:
The light that variable wavelength laser sends shines object under test, and determinand is known from experience now in various degree the absorption of different wave length wave table; Object under test is strong to the light wave degree of absorption of a certain wavelength, causes shining the light intensity decreasing of quartzy microphony fork after concave mirror is collected, and result reduces quartzy microphony fork amplitude, otherwise, quartzy microphony fork amplitude is increased;
Change the outgoing wavelength that shines the object under test glazing, obtain the rule of quartzy microphony fork amplitude wavelength variations, in the little place of amplitude, object under test is strong to Optical Absorption, the place that amplitude is large, object under test to Optical Absorption a little less than, obtain accordingly the absorption spectrum of material.
The size dimension of the quartzy microphony fork of described MEMS is grade, and under vacuum environment, its quality factor q reaches 90000～100000, in the time of in air because the damping action quality factor q can decrease to some degree.
A kind of optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect comprises Wavelength variable Laser emission and intensity modulation unit, quartzy microphony fork focusing unit, quartzy microphony fork amplitude probe unit and detecting signal unit;
Wavelength variable Laser emission and intensity modulation unit are to the object under test emission wavelength continuously changes, the light intensity change frequency is consistent with the resonant frequency of quartzy microphony fork light;
Quartzy microphony fork focusing unit is collected the reflected light of object under test, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork;
Quartzy microphony fork amplitude probe unit is mapped to the second bundle illumination on quartzy microphony fork, and enlarges the catoptrical light path of quartzy microphony fork, obtains reacting the light spot position mobile range signal of quartzy microphony fork amplitude;
Detecting signal unit through opto-electronic conversion, obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength with light spot position mobile range signal, and then obtains the absorption spectrum of object under test.
Described Wavelength variable Laser emission and intensity modulation unit comprise: wavelength variable laser, light intensity modulator, and laser instrument and light intensity modulator control interface, the continuous light that light intensity modulator sends wavelength variable laser is modulated to the laser that light intensity changes by certain frequency;
Described quartzy microphony fork focusing unit comprises: concave mirror and quartzy microphony fork, and the reflected light of concave mirror reflecting and collecting object under test, and reflected light is focused on quartzy microphony fork;
Quartzy microphony fork amplitude probe unit comprises: microphony fork vibration detecting laser instrument, folded optical path and light spot position sensor, microphony fork vibration detecting laser instrument is mapped to the second bundle illumination on quartzy microphony fork, folded optical path is arranged on quartzy microphony fork reflection the second bundle reflection of light light path, light spot position sensor is arranged on the exit of folded optical path, detects light spot position mobile range signal;
Detecting signal unit comprises: amplifier, wave filter and detecting unit, light spot position sensor is converted to electric signal with light spot position mobile range signal, electric signal is sent to amplifier, wave filter, after amplification, filtering, detecting unit obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength, and then obtains the absorption spectrum of object under test.
Described quartzy microphony fork is the quartzy microphony fork of MEMS.
Compared with prior art, the present invention has following useful technique effect:
The optoacoustic spectroscopy method of telemetering and device based on quartzy microphony fork optoacoustic effect provided by the invention do not need sample preparation and pre-concentration process, do not need photoacoustic cell, can directly measure article at a distance under open environment:
The continuous light that wavelength is continuously changed is modulated to the light that light intensity changes by certain frequency, and the frequency that light intensity changes is consistent with the resonant frequency of quartzy microphony fork, then this illumination is mapped on object under test; Shine on quartzy microphony fork after utilizing concave mirror to collect the light of testee reflection, because the light intensity change frequency is consistent with the resonant frequency of quartzy microphony fork, quartzy microphony is pitched and will be resonated.testee is different to the degree of absorption of different wave length ripple, so the amplitude of quartzy microphony fork will change with incident light wave length, simultaneously, utilize another bundle Ear Mucosa Treated by He Ne Laser Irradiation to the arm of quartzy microphony fork, this Shu Guang will reflect on quartzy microphony fork, the light spot position of the laser beam of reflection will move along with the vibration of microphony fork, reflected light passes through folded optical path again and (works to enlarge light path, the light spot position mobile range is enlarged) shine on the light spot position detector after longer optical path, by detecting the movement of luminous point, just can obtain the size of quartzy microphony fork amplitude, can know that testee is strong and weak to the absorption of this wavelength light wave, the output wavelength that constantly changes variable wavelength laser just can obtain the absorption spectrum of testee.
Further, adopt the quartzy microphony of the MEMS that utilizes the MEMS processes to pitch to measure.Because the quartzy microphony fork of MEMS has very high quality factor q, and adopt the small tuning fork structure of MEMS fine process processing, can make catoptrical energy density very high, so can increase substantially sensitivity and the antijamming capability of this device.
The volume of the quartzy microphony fork of MEMS is very little, can improve catoptrical luminous energy density and detection sensitivity, the quartzy microphony fork of MEMS has very high resonance quality factor simultaneously, can improve antijamming capability, has the advantages that detection sensitivity is high, antijamming capability is strong.
The present invention utilizes " resonance characteristics of the quartzy microphony fork of MEMS " to survey optoacoustic, can effectively improve the signal to noise ratio (S/N ratio) of detection, and the quartzy microphony fork of MEMS volume is small, luminous energy density is high, in conjunction with having adopted optical means, the amplitude of the quartzy microphony fork of MEMS is surveyed, so device has very high sensitivity, can realize the remote measurement of optoacoustic spectroscopy.
The present invention utilizes " resonance characteristics of the quartzy microphony fork of MEMS " to survey photoacoustic signal, is obtained the optoacoustic spectroscopy of testee by the amplitude of quartzy microphony fork corresponding to each wavelength of variable wavelength laser.The antijamming capability of device is significantly improved, can also realize the remote measurement of optoacoustic spectroscopy.Due to the signal to noise ratio (snr) of detection system and the square root (Q of resonance quality factor
1/2) be directly proportional, and the resonance quality factor q of the quartzy microphony fork of MEMS is higher more than 1000 times than " the resonance photoacoustic cell " that existing photoacoustic spectroscopy adopts, so method of the present invention is compared with traditional optoacoustic spectroscopy method, the signal to noise ratio (S/N ratio) of detection can be effectively improved, and the optoacoustic spectroscopy remote measurement of open space can be realized.
The invention is not restricted to only be used for the hazardous material detection of the occasions such as airport, also can be used for the multiple fields such as environmental monitoring and food safety detection.
Description of drawings
Fig. 1 is measurement procedure figure of the present invention;
Fig. 2 is that structure of the present invention forms schematic diagram;
Fig. 3 is the schematic diagram of quartzy microphony fork amplitude.
Embodiment
The present invention is described in further detail below in conjunction with specific embodiment, and the explanation of the invention is not limited.
Referring to Fig. 1, a kind of optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect comprises following operation:
1) continuous light that wavelength is continuously changed is modulated to the light that light intensity changes by certain frequency, and the frequency that light intensity changes is consistent with the resonant frequency of quartzy microphony fork, then this illumination is mapped on object under test;
2) light reflects on object under test, utilizes concave mirror to collect the reflected light of object under test, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork, and quartzy microphony fork produces resonance; Because testee is different to the degree of absorption of different wave length ripple, the variation of the amplitude lambda1-wavelength of quartzy microphony fork and changing;
3) the second bundle illumination is mapped on quartzy microphony fork, light beam will reflect on quartzy microphony fork, and the light spot position of folded light beam can move along with the vibration of quartzy microphony fork; In the second bundle reflection of light light path, folded optical path is set, folded optical path enlarges light path, and the light spot position mobile range is enlarged;
4) outlet at folded optical path utilizes sensor that light spot position is surveyed, and the light spot position signal is become electric signal by opto-electronic conversion, obtain quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength, and then obtain the absorption spectrum of object under test.
Whether further, just can tell the kind of object under test according to the absorption spectrum of object under test, judging object under test is dangerous goods.
Concrete, step 1), the described light of step 3) all are the laser by the laser instrument emission.
Because material is different to the different wave length degree of absorption, so the light intensity of being collected by concave mirror can be along with wavelength variations, light intensity changes and then causes the amplitude of quartzy microphony fork to change.During quartzy microphony fork yoke generation micro breadth oscillation, will cause the detection laser beam reflective surface to rotate, thereby the outgoing detection laser is deflected, reflection lasering beam can the deflection with the vibration of quartzy microphony fork.Emergent light is surveyed with light spot position sensor in a distance, just the deflection of quartzy microphony fork yoke is converted to the movement of luminous point.The light spot position sensor output signal is relevant in the position of light spot position sensor with luminous point.Output signal has namely represented light spot position, can extrapolate the tuning fork amplitude by light spot position, for the light spot position signal is processed, be converted into the electric signal of being convenient to process and amplify, so come the variation of exploring spot position with light spot position sensor, according to the corresponding electric signal of variation output of light spot position, and electric signal is amplified with amplifier.
Further, referring to Fig. 3, the method that obtains the absorption spectrum of object under test is:
The light that variable wavelength laser sends shines test substance, and determinand is known from experience now in various degree the absorption of different wave length wave table; Object under test is strong to the light wave degree of absorption of a certain wavelength, causes shining the light intensity decreasing of quartzy microphony fork after concave mirror is collected, and result reduces quartzy microphony fork amplitude, otherwise, quartzy microphony fork amplitude is increased;
Shine the outgoing wavelength of object under test glazing in change, obtain the rule of quartzy microphony fork amplitude wavelength variations, in the little place of amplitude, object under test is strong to Optical Absorption, the place that amplitude is large, object under test to Optical Absorption a little less than, obtain accordingly the absorption spectrum of material.
Described quartzy microphony fork is to adopt the processing of MEMS fine process and the quartzy small tuning fork that obtains.The volume of the quartzy microphony fork of MEMS is very little, can improve catoptrical luminous energy density and detection sensitivity, the quartzy microphony fork of MEMS has very high resonance quality factor simultaneously, can improve antijamming capability, has the advantages that detection sensitivity is high, antijamming capability is strong.
Referring to Fig. 2, a kind of optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect comprises Wavelength variable Laser emission and intensity modulation unit, quartzy microphony fork focusing unit, quartzy microphony fork amplitude probe unit and detecting signal unit;
Wavelength variable Laser emission and intensity modulation unit are to the object under test emission wavelength continuously changes, the light intensity change frequency is consistent with the resonant frequency of quartzy microphony fork light;
Quartzy microphony fork focusing unit is collected the reflected light of being treated the thing reflection, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork;
Quartzy microphony fork amplitude probe unit is mapped to the second bundle illumination on quartzy microphony fork, and enlarges the reflection light path of quartzy microphony fork, obtains reacting the light spot position mobile range signal of quartzy microphony fork amplitude;
Detecting signal unit through opto-electronic conversion, obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength with light spot position mobile range signal, thereby obtains the absorption spectrum of object under test.
Described Wavelength variable Laser emission and intensity modulation unit comprise: (wavelength variable laser constantly changes wavelength to wavelength variable laser under computer control, wavelength 300nm is adjustable to 1200nm), (frequency 0 is accurately adjustable to 50KHz for light intensity modulator, but intense adjustment until quartzy microphony fork resonate), and laser instrument and light intensity modulator control interface, the continuous light that light intensity modulator sends wavelength variable laser is modulated to the laser that light intensity changes by certain frequency;
Described quartzy microphony fork focusing unit comprises: concave mirror and quartzy microphony fork, and the concave mirror reflecting and collecting is treated the reflected light of thing reflection, and reflected light is focused on quartzy microphony fork;
Illumination after modulation is mapped on testee, light beam reflects on testee, collect the reflected light of testee with concave mirror, and reflected light is gathered on a quartzy microphony fork, quartzy microphony fork will produce optoacoustic effect, the frequency that changes due to light intensity is consistent with the resonant frequency of quartzy microphony fork, and quartzy microphony fork will produce resonance.Because testee is different to the different wave length degree of absorption, so the light intensity that shines on the quartzy microphony fork of MEMS can change along with the degree of absorption difference of measured object, the change of light intensity can cause the amplitude of the quartzy microphony fork of MEMS to change.
Quartzy microphony fork amplitude probe unit comprises: microphony fork vibration detecting laser instrument, folded optical path and light spot position sensor, microphony fork vibration detecting laser instrument is mapped to the second bundle illumination on quartzy microphony fork, folded optical path is arranged on quartzy microphony fork reflection the second bundle reflection of light light path, light spot position sensor is arranged on the exit of folded optical path, detects light spot position mobile range signal;
Another bundle Ear Mucosa Treated by He Ne Laser Irradiation is to quartzy microphony fork, laser beam will reflect on quartzy microphony fork, the light spot position of reflection lasering beam will move along with the vibration of quartzy microphony fork, and folded optical path works to enlarge light path, and the light spot position mobile range is enlarged.
Detecting signal unit comprises: amplifier, wave filter and detecting unit, light spot position sensor is converted to electric signal with light spot position mobile range signal, electric signal is sent to amplifier, wave filter, after amplification, filtering, detecting unit obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength, thereby obtains the absorption spectrum of object under test; The concrete curve that obtains quartzy microphony fork amplitude wavelength variations, curve just can obtain the absorption spectrum of testee thus.
Described quartzy microphony fork is the quartzy microphony fork of MEMS.The size dimension of the quartzy microphony fork of concrete described MEMS is grade, and under vacuum environment, its quality factor q reaches 90000～100000; Can decrease to some degree due to the damping action quality factor q in the time of in air.
Be more than example of the present invention, concrete form is not limited to this example, and the concrete structure of the quartzy microphony fork of MEMS can change to some extent, and the intensity modulation method can adopt multi-form to the demand of light modulated according to further part.
Claims (10)
1. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect, is characterized in that, comprises following operation:
1) continuous light that wavelength is continuously changed is modulated to the light that light intensity changes by certain frequency, and the frequency that light intensity changes is consistent with the resonant frequency of quartzy microphony fork, then this illumination is mapped on object under test;
2) light reflects on object under test, utilizes concave mirror to collect the reflected light of object under test, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork, and quartzy microphony fork produces resonance; Because testee is different to the degree of absorption of different wave length ripple, the variation of the amplitude lambda1-wavelength of quartzy microphony fork and changing;
3) the second bundle illumination is mapped on quartzy microphony fork, light beam will reflect on quartzy microphony fork, and the light spot position of folded light beam can move along with the vibration of quartzy microphony fork; In the second bundle reflection of light light path, folded optical path is set, folded optical path enlarges light path, and the light spot position mobile range is enlarged;
4) outlet at folded optical path utilizes light spot position sensor that light spot position is surveyed, the light spot position signal is become electric signal by opto-electronic conversion, and the gained electric signal is processed, obtain the corresponding amplitude of variation of quartzy microphony fork and lambda1-wavelength, and then obtain the absorption spectrum of object under test.
2. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect as claimed in claim 1, is characterized in that, whether just can tell the kind of object under test according to the absorption spectrum of object under test, judging object under test is dangerous goods.
3. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect as claimed in claim 1, is characterized in that, step 1), the described light of step 3) all are the laser by the laser instrument emission.
4. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect as claimed in claim 1, it is characterized in that, it is described that the light spot position signal is become electric signal by opto-electronic conversion is to complete with light spot position sensor, light spot position sensor is exported corresponding electric signal according to the variation of light spot position, and electric signal is amplified with amplifier.
5. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect as claimed in claim 1, is characterized in that, obtains being operating as of absorption spectrum of object under test:
The light that variable wavelength laser sends shines object under test, and determinand is known from experience now in various degree the absorption of different wave length wave table; Object under test is strong to the light wave degree of absorption of a certain wavelength, causes shining the light intensity decreasing of quartzy microphony fork after concave mirror is collected, and result reduces quartzy microphony fork amplitude, otherwise, quartzy microphony fork amplitude is increased;
Change the outgoing wavelength that shines the object under test glazing, obtain the rule of quartzy microphony fork amplitude wavelength variations, in the little place of amplitude, object under test is strong to Optical Absorption, the place that amplitude is large, object under test to Optical Absorption a little less than, obtain accordingly the absorption spectrum of material.
6. the optoacoustic spectroscopy method of telemetering based on quartzy microphony fork optoacoustic effect as claimed in claim 1, is characterized in that, described quartzy microphony fork is to adopt the processing of MEMS fine process and the quartzy small tuning fork that obtains.
7. the optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect, is characterized in that, comprises Wavelength variable Laser emission and intensity modulation unit, quartzy microphony fork focusing unit, quartzy microphony fork amplitude probe unit and detecting signal unit;
Wavelength variable Laser emission and intensity modulation unit are to the object under test emission wavelength continuously changes, the light intensity change frequency is consistent with the resonant frequency of quartzy microphony fork light;
Quartzy microphony fork focusing unit is collected the reflected light of object under test, and reflected light is focused on quartzy microphony fork, produces optoacoustic effect in quartzy microphony fork;
Quartzy microphony fork amplitude probe unit is mapped to the second bundle illumination on quartzy microphony fork, and enlarges the catoptrical light path of quartzy microphony fork, obtains reacting the light spot position mobile range signal of quartzy microphony fork amplitude;
Detecting signal unit through opto-electronic conversion, obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength with light spot position mobile range signal, thereby obtains the absorption spectrum of object under test.
8. the optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect as claimed in claim 7, it is characterized in that, described Wavelength variable Laser emission and intensity modulation unit comprise: wavelength variable laser, light intensity modulator, and laser instrument and photomodulator control interface, the continuous light that light intensity modulator sends wavelength variable laser is modulated to the laser that light intensity changes by certain frequency;
Described quartzy microphony fork focusing unit comprises: concave mirror and quartzy microphony fork, and the reflected light of concave mirror reflecting and collecting object under test, and reflected light is focused on quartzy microphony fork;
Quartzy microphony fork amplitude probe unit comprises: microphony fork vibration detecting laser instrument, folded optical path and light spot position sensor, microphony fork vibration detecting laser instrument is mapped to the second bundle illumination on quartzy microphony fork, folded optical path is arranged on quartzy microphony fork reflection the second bundle reflection of light light path, light spot position sensor is arranged on the exit of folded optical path, detects light spot position mobile range signal;
Detecting signal unit comprises: amplifier, wave filter and detecting unit, light spot position sensor is converted to electric signal with light spot position mobile range signal, electric signal is sent to amplifier, wave filter, after amplification, filtering, detecting unit obtains quartzy microphony fork with the corresponding amplitude of the variation of lambda1-wavelength, and then obtains the absorption spectrum of object under test.
9. the optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect as claimed in claim 8, is characterized in that, described quartzy microphony fork is the quartzy microphony fork of MEMS.
10. the optoacoustic spectroscopy telemetering device based on quartzy microphony fork optoacoustic effect as claimed in claim 9, is characterized in that, the size dimension of the quartzy microphony fork of described MEMS is grade, and under vacuum environment, its quality factor q reaches 90000～100000.
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| CN104655587A (en) * | 2015-02-14 | 2015-05-27 | 合肥知常光电科技有限公司 | Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS |
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| CN109946266A (en) * | 2019-03-18 | 2019-06-28 | 哈尔滨工业大学 | A kind of device and method improving quartzy photothermal spectroscopy gas concentration detection sensitivity |
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| CN108225203A (en) * | 2017-11-29 | 2018-06-29 | 全球能源互联网研究院有限公司 | A kind of MEMS sensor of bidimensional physical quantity parallel detection |
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| CN109946266A (en) * | 2019-03-18 | 2019-06-28 | 哈尔滨工业大学 | A kind of device and method improving quartzy photothermal spectroscopy gas concentration detection sensitivity |
| CN109946266B (en) * | 2019-03-18 | 2021-07-23 | 哈尔滨工业大学 | Device and method for improving gas concentration detection sensitivity of quartz photothermal spectrum |
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