CN102980870B - High-precision micro-flow infrared gas sensor and measurement method thereof - Google Patents
High-precision micro-flow infrared gas sensor and measurement method thereof Download PDFInfo
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- CN102980870B CN102980870B CN201210530268.7A CN201210530268A CN102980870B CN 102980870 B CN102980870 B CN 102980870B CN 201210530268 A CN201210530268 A CN 201210530268A CN 102980870 B CN102980870 B CN 102980870B
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- 238000000691 measurement method Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 238000012937 correction Methods 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims description 19
- 230000003321 amplification Effects 0.000 claims description 11
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 11
- 230000032683 aging Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000007774 longterm Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 54
- 230000003750 conditioning effect Effects 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 239000003344 environmental pollutant Substances 0.000 description 4
- 239000003546 flue gas Substances 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- 230000036962 time dependent Effects 0.000 description 4
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- 239000000356 contaminant Substances 0.000 description 1
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- 238000006477 desulfuration reaction Methods 0.000 description 1
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Abstract
The invention provides a high-precision micro-flow infrared gas sensor and a measurement method of the high-precision micro-flow infrared gas sensor. The high-precision micro-flow infrared gas sensor comprises an infrared light source system, a measuring gas chamber, an infrared semiconductor detector, a narrow-band light filter and a signal processing and output system, wherein a gas inlet and a gas outlet are formed on the same side of the measuring gas chamber, and the other side of the measuring gas chamber is provided with a channel; and the infrared semiconductor detector is arranged in the channel. The sensor measuring method comprises the following steps of: taking the infrared semiconductor detector as a reference channel, taking the micro-flow infrared detector as a measuring channel, correcting a measuring signal acquired through the measuring channel by a reference signal acquired through the reference channel, obtaining a correction signal, and performing processing operation to output a concentration value of the measuring gas by the signal processing and output system according to a reduction formula between the signal and gas concentration. The high-precision micro-flow infrared gas sensor is simple in structure and low in manufacturing cost, and the measuring precision and long-term stability of the micro-flow infrared gas sensor can be improved.
Description
Technical field
The present invention relates to miniflow infrared gas sensor field of measuring technique, particularly a kind of high precision miniflow infrared gas sensor and measuring method thereof.
Background technology
China's economy is rapidly developed in the last thirty years, and the air pollution problems inherent of bringing is thus day by day serious, for prevent air quality worsen, safeguard national healthy, better people's living environment and improve the quality of living, country has promulgated " The Law of the People's Republic of China on the Prevention and Control of Atmospheric Pollution ", corresponding atmosphere pollutants emission standards has also been formulated in country, place, and require stationary pollution source that flue gas discharge continuous monitoring system (CEMS) must be installed, implement the source of atmospheric pollution discharge pollutants total Amount Monitoring and control.
Along with country is for the reinforcement of pollutant emission control, and the widespread use of Novel desulphurization technology (as ammonia-process desulfurization technique etc.), generally all relatively low through the gaseous contaminant content of desulphurization denitration, therefore for SO
2low concentration testing requirement increasingly important.Taking Beijing's provincial standard " emission standard of air pollutants for boilers " as example, SO
2emission limit be 50mg/m
3, the emission limit of NO is 100mg/m
3, and the thermopile detector infrared analysis method of widespread use at present cannot meet lower range measurement requirement.In US Patent No. 5621213, disclose a kind of flue gas discharge continuous monitoring system, the measurement mechanism in this system utilizes traditional Non-Dispersive Infra-red (NDIR) absorption spectroscopy techniques to record the Gas Parameters in gas compartment, as SO
2, NO, NO
2concentration.But this gas concentration measuring method can not meet the requirement that low concentration is measured.
In order to discharge the pollutant levels in flue gas by Measurement accuracy, need to select high precision, highly sensitive detection method, as miniflow infrared technique is measured the SO in flue gas
2, the gas such as NO concentration, but miniflow infrared gas sensor in use, along with infrared light supply output spectrum intensity declines, the signal that sensor is surveyed can drift about to a certain extent, this will cause measurement result inaccurate.In US Patent No. 6320192B1, Horiba Ltd (Horiba) provides a kind of miniflow infrared gas detector, this detector is to use miniflow infrared technique to realize the measurement of low concentration, in US Patent No. 6166383, Siemens Company has developed a kind of Non-Dispersive Infra-red (NDIR) gas analyzer, and this analyser is also to use miniflow infrared technique to measure the gas concentration of low concentration.Technical scheme in these two patents can solve the measurement problem of lower range, but all cannot solve due to the infrared light supply output spectrum intensity sensor detection signal drifting problem causing that declines.
Therefore be badly in need of one and can solve in miniflow infrared gas sensor, due to the infrared light supply output spectrum intensity detector signal drifting problem causing that declines, thereby improve the device of miniflow infrared gas sensor measuring accuracy.
Summary of the invention
Problem and shortcoming that the present invention exists in order to overcome above-mentioned prior art, provide one more accurately, more simple miniflow infrared gas sensor apparatus and method.
Technical scheme of the present invention is:
A kind of high precision miniflow infrared gas sensor, comprise infrared light supply system, measure air chamber, infrared semiconductor detector, narrow band pass filter, miniflow detector, signal is processed and output system, infrared light supply system, miniflow detector lays respectively at the two ends of measuring air chamber, narrow band pass filter is being measured between air chamber and miniflow detector, measure on air chamber and gas access, the side that gas vent is relative is provided with a passage, infrared semiconductor detector is arranged in this passage, miniflow detector, infrared semiconductor detector processes with signal respectively and the signal pre-amplification circuit input end of output system is connected.
Infrared light supply system, narrow band pass filter, miniflow detector, signal process and output system is existing structure.
Described infrared semiconductor detector can be pyroelectric detector or thermopile detector.
Described signal is processed and output system comprises power module, signal pre-amplification circuit, signal conditioning circuit, microprocessor, keyboard and display screen, infrared semiconductor detector, miniflow detector are connected with the input end of signal pre-amplification circuit respectively, the output terminal of signal pre-amplification circuit is connected with the input end of signal conditioning circuit, the output terminal of signal conditioning circuit is connected with microprocessor is unidirectional, power module is connected with signal pre-amplification circuit, signal conditioning circuit and microprocessor respectively, and microprocessor is connected with keyboard, display screen respectively.
A measuring method for high precision miniflow infrared gas sensor, carry out according to the following steps:
A. the reference channel using infrared semiconductor detector as this high precision miniflow infrared gas sensor, its signal intensity is designated as reference signal R, measurement passage using miniflow detector as this high precision miniflow infrared gas sensor, its signal intensity is designated as measuring-signal T, by aging high precision miniflow infrared gas sensor 20 days, its reference signal was designated as reference signal reference value R
0;
B. use correction formula: signal correction value=measurement signal value × reference signal reference value/reference signal value, is designated as T ' by signal correction value, i.e. T '=T × R
0/ R;
C. signal is processed and output system is processed the concentration value of exporting measurement gas after computing according to the reduction formula of signal and gas concentration.
The invention has the beneficial effects as follows: this sensor construction is simple low cost of manufacture; Owing to having increased the reference channel of an infrared semiconductor detector as miniflow infrared gas sensor on air chamber measuring, be used for revising the measuring-signal of miniflow detector, can eliminate because of the infrared light supply output spectrum intensity long time drift bringing that declines, thereby improve measuring accuracy and the long-time stability of miniflow infrared gas sensor.
Brief description of the drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is that signal of the present invention is processed and output system connection diagram.
Fig. 3 is measuring-signal of the present invention and reference signal temporal evolution curve map.
Fig. 4 is measurement corrected signal of the present invention and reference signal temporal evolution curve map.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for illustrating the present invention, but are not used for limiting the scope of the invention.
Specific embodiment 1: gas to be measured is SO
2high precision miniflow infrared gas sensor and measuring method thereof,
(1) gas to be measured is SO
2the structure of high precision miniflow infrared gas sensor, as shown in Figure 1, gas to be measured is SO
2high precision miniflow infrared gas sensor, comprise infrared light supply system 1, measure air chamber 7, infrared semiconductor detector 6, narrow band pass filter 8, miniflow SO
2detector 4, signal are processed and output system, infrared light supply system 1, miniflow SO
2detector 4 lays respectively at the two ends of measuring air chamber 7, and narrow band pass filter 8 is positioned at measures air chamber 7 and miniflow SO
2between detector 4, measure on air chamber with gas access 2, a side that gas vent 3 is relative and be provided with a passage 5, infrared semiconductor detector 6 is installed in passage 5, miniflow SO
2detector 4, infrared semiconductor detector 6 process with signal respectively and the signal pre-amplification circuit input end of output system is connected.
Infrared light supply system, narrow band pass filter, miniflow detector, signal process and output system is existing structure.Infrared semiconductor detector is pyroelectric detector.
Described signal is processed and output system comprises power module, signal pre-amplification circuit, signal conditioning circuit, microprocessor, keyboard and display screen, infrared semiconductor detector, miniflow SO
2detector is connected with the input end of signal pre-amplification circuit respectively, the output terminal of signal pre-amplification circuit is connected with the input end of signal conditioning circuit, the output terminal of signal conditioning circuit is connected with microprocessor is unidirectional, power module is connected with signal pre-amplification circuit, signal conditioning circuit and microprocessor respectively, and microprocessor is connected with keyboard, display screen respectively.
(2) the infrared SO of high precision miniflow
2the measuring method of gas sensor
A. using pyroelectric detector 6 as the infrared SO of this high precision miniflow
2the reference channel of gas sensor, its signal intensity is designated as reference signal R, by miniflow SO
2detector 4 is as the infrared SO of this high precision miniflow
2the measurement passage of gas sensor, its signal intensity is designated as measuring-signal T, by the infrared SO of this high precision miniflow
2aging 20 days of gas sensor, its reference signal is designated as reference signal reference value R
0=3015; Meanwhile, to passing into successively 0,30,60,120 in sensor, the SO of 200ppm
2calibrating gas, demarcates, and obtains nominal data as shown in table 1.
Table 1
B. with " SO
2measurement signal value T " be independent variable, with " SO
2measure concentration value D " be dependent variable, carry out least square curve fitting, obtain calibration formula: D=0.00004381 × T
2-0.48967404 × T+1107.6.
C. every 30 days to the infrared SO of this high precision miniflow
2gas sensor is once tested, and passes into high-purity N when test
2calibrating gas 30 minutes, records SO
2measurement signal value T, SO
2measure concentration value D and SO
2reference signal value R, data are as shown in table 2, draw measuring-signal and reference signal curve map over time, and as shown in Figure 3, wherein solid line is the time dependent curve of measuring-signal, and dotted line is the time dependent curve of reference signal value.
Table 2
| TestDate | SO 2Measurement signal value T | SO 2Measure concentration value D | SO 2Reference signal value R |
| 2010.9.8 | 3150 | -0.1 | 3015 |
| 2010.10.8 | 3062 | 37.2 | 2932 |
| 2010.11.8 | 2998 | 64.2 | 2870 |
| 2010.12.8 | 2943 | 87.4 | 2821 |
| 2011.1.8 | 2910 | 101.4 | 2786 |
| 2011.2.8 | 2880 | 114.1 | 2755 |
| 2011.3.8 | 2857 | 123.8 | 2735 |
| 2011.4.8 | 2839 | 131.4 | 2717 |
| 2011.5.8 | 2826 | 136.9 | 2705 |
| 2011.6.8 | 2815 | 141.6 | 2696 |
| 2011.7.8 | 2807 | 145.0 | 2687 |
| 2011.8.8 | 2801 | 147.5 | 2681 |
D. use correction formula: signal correction value=measurement signal value × reference signal reference value/reference signal value, is designated as T ' by signal correction value, i.e. T '=T × R
0/ R;
As shown in table 3 through the revised data of this correction formula, then by SO
2signal correction value T ' is updated to calibration formula: D=0.00004381 × T
2-0.48967404 × T+1107.6 calculates SO
2revise concentration value D '.Draw SO
2signal correction value time history plot, as shown in Figure 4, wherein solid line is that signal correction is worth time dependent curve, dotted line is the time dependent curve of reference signal value.
Table 3
On February 8th, 2011, by 0,30,60,120, the SO of 200ppm
2calibrating gas passes into sensor, obtains revising front SO
2concentration readings D and SO
2concentration readings D ' after revising.Data recording is in table 4.
Table 4
On August 8th, 2011, by 0,30,60,120, the SO of 200ppm
2calibrating gas passes into sensor, obtains revising front SO
2concentration readings D and SO
2revise concentration value D '.Data recording is in table 5.
Table 5
E. signal processing and output system are according to signal and SO
2the reduction formula of gas concentration is processed the concentration value of exporting measurement gas after computing.
The described correction formula program that measuring-signal is revised is stored in the microprocessor of signal processing and output system.
By table 2, table 3 and Fig. 3, Fig. 4 can find out, as can be seen from the table, by increase a pyroelectric detector detection light source signal intensity in miniflow infrared gas sensor, be used for revising the signal of miniflow infrared sensor, be tending towards straight line through revised signal correction value, decline larger and revise previous measuring-signal curve, thereby illustrate that this miniflow infrared gas sensor can eliminate because of the infrared light supply output spectrum intensity long time drift bringing that declines, improve the measuring accuracy of miniflow infrared gas sensor.
Can find out from table 4, table 5, not carrying out before signal correction, SO
2measure concentration error larger, as on February 8th, 2011, when passing into the SO of 120ppm
2when calibrating gas, SO
2measuring concentration value D is 224.2ppm, and absolute error reaches 104.2ppm, and through the revised SO of correction formula of the present invention
2revising concentration value D ' is 119.5ppm, and absolute error only has 0.5ppm.
Therefore, by increase a pyroelectric detector detection light source signal intensity in miniflow infrared gas sensor, be used for revising the signal of miniflow infrared sensor, can eliminate because of the infrared light supply output spectrum intensity long time drift bringing that declines, improve the measuring accuracy of miniflow infrared gas sensor.
Specific embodiment 2: the high precision miniflow infrared gas sensor that gas to be measured is NO and measuring method thereof are in the time that gas to be measured is NO, microdetector in this high precision miniflow infrared gas sensor is the infrared NO detector of miniflow, its structure and measuring method, with embodiment 1, do not repeat them here.
Claims (1)
1. a high precision miniflow infrared gas sensor, comprise infrared light supply system, measure air chamber, infrared semiconductor detector, narrow band pass filter, miniflow infrared eye, signal is processed and output system, infrared light supply system, miniflow detector lays respectively at the two ends of measuring air chamber, narrow band pass filter is being measured between air chamber and miniflow detector, it is characterized in that measuring on air chamber and gas access, the side that gas vent is relative is provided with a passage, infrared semiconductor detector is arranged in this passage, miniflow detector, infrared semiconductor detector processes with signal respectively and the signal pre-amplification circuit input end of output system is connected, infrared semiconductor detector installation site is near miniflow infrared eye one end.
2. a kind of high precision miniflow infrared gas sensor according to claim 1, is characterized in that: described infrared semiconductor detector is pyroelectric detector or thermopile detector.
3. right to use requires a measuring method for the high precision miniflow infrared gas sensor described in 1, it is characterized in that comprising the following steps:
A. the reference channel using infrared semiconductor detector as this high precision miniflow infrared gas sensor, its signal intensity is designated as reference signal R, measurement passage using miniflow infrared eye as this high precision miniflow infrared gas sensor, its signal intensity is designated as measuring-signal T, by aging high precision miniflow infrared gas sensor 20 days, its reference signal was designated as reference signal reference value R
0;
B. use correction formula: signal correction value=measurement signal value × reference signal reference value/reference signal value, is designated as T ' by signal correction value, i.e. T '=T × R
0/ R;
C. signal is processed and output system is processed the concentration value of exporting measurement gas after computing according to the reduction formula of signal and gas concentration.
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| CN103364365A (en) * | 2013-07-05 | 2013-10-23 | 扬州大学 | WSN (Wireless Sensor Network) sensor node for natural gas content in air |
| CN107389585B (en) * | 2017-08-21 | 2019-11-15 | 湖北锐意自控系统有限公司 | A kind of gas analyzer and analysis method for gases |
| CN107389587A (en) * | 2017-09-04 | 2017-11-24 | 苏州诺联芯电子科技有限公司 | The non-dispersive infrared gas sensor and its detection method of Monitoring lower-cut can be reduced |
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| CN108489924A (en) * | 2018-03-13 | 2018-09-04 | 南京信息工程大学 | A kind of sensing probe and non-dispersive infrared gas sensor detecting system |
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| CN110987850A (en) * | 2019-11-27 | 2020-04-10 | 山东航天电子技术研究所 | Method for measuring small signal of sensor |
| CN112033925A (en) * | 2020-09-02 | 2020-12-04 | 湖北锐意自控系统有限公司 | Multi-component wide-range gas analyzer and gas analysis method |
| CN112730304B (en) * | 2020-12-18 | 2023-03-14 | 宁波舜宇红外技术有限公司 | Infrared gas alarm and gas concentration detection method |
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| EP0634644A1 (en) * | 1993-07-13 | 1995-01-18 | Mic Medical Instrument Corporation | Device for determining the 13CO2/12CO2 concentration ratio in a gas sample |
| DE19732470C2 (en) * | 1997-07-28 | 1999-11-18 | Siemens Ag | Non-dispersive infrared gas analyzer |
| DE19924544A1 (en) * | 1998-05-29 | 1999-12-02 | Horiba Ltd | Pyroelectric detector for use in an infrared gas analyzer or flow rate sensor |
| JP4666252B2 (en) * | 2005-05-31 | 2011-04-06 | 横河電機株式会社 | Hot wire flow sensor and infrared gas analyzer |
| DE102008009189B4 (en) * | 2008-02-15 | 2016-05-25 | Siemens Aktiengesellschaft | Non-dispersive infrared gas analyzer |
| CN102590126A (en) * | 2011-12-28 | 2012-07-18 | 武汉四方光电科技有限公司 | Long-life micro-flow infrared sulfur dioxide (SO2) sensor |
| CN102809546B (en) * | 2012-08-21 | 2015-04-22 | 南京埃森环境技术有限公司 | Low-concentration flue gas infra-red analyzer and detection method |
| CN203241090U (en) * | 2013-04-19 | 2013-10-16 | 西安鼎研科技有限责任公司 | Micro-flow detection component used for multi-component gas infrared micro-flow sensor |
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