CN102681091A - Tunable optical delay line based on coupled optical waveguides - Google Patents
Tunable optical delay line based on coupled optical waveguides Download PDFInfo
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- CN102681091A CN102681091A CN2012101061018A CN201210106101A CN102681091A CN 102681091 A CN102681091 A CN 102681091A CN 2012101061018 A CN2012101061018 A CN 2012101061018A CN 201210106101 A CN201210106101 A CN 201210106101A CN 102681091 A CN102681091 A CN 102681091A
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Abstract
The invention discloses a tunable optical delay line based on coupled optical waveguides, which mainly comprises two optical waveguides which parallel or perpendicular to each other. When the two optical waveguides approach mutually and keep a distance of 0.3-0.8mum, the optical waveguides are coupled through the evanescent wave. The two optical waveguides have different dispersion curves, and the dispersion curves of the two optical waveguides intersect on the phase-matching wavelength node. When the two waveguides are mutually coupled, the group velocity of a coupling mould jumps rapidly at the intersection so that time is delayed. Due to the regulation of the thermo-optical effect, the optical signal can achieve the low distortion transmission and time delay adjustment effects in a wide range.
Description
Technical field
The present invention relates to a kind of tunable optical delay line, belong to silicon based photon and learn the field based on coupling optical waveguide.
Background technology
The silicon based photon device is a hot research in recent years, and many passive and active photonic devices are studied personnel and propose, and comprise buffer, wave filter, switch, modulator, detector and laser instrument etc.These discrete devices perhaps mix the integrated sheet glazing signal Processing that can be used for.The time-delay of light signal (or buffer memory) is the basic function during the time domain light signal is handled.Photon can not be stored, so the method that the light buffer memory is realized is that light signal is delayed time a period of time in light-conductive media, can from the velocity of propagation of the light that slows down with prolong transmission medium length amount aspect and consider.Propose two types at present and realize the light caching method: slower rays type and fiber delay time line style.For slower rays type light buffer structure, silicon-based micro ring resonator and photon crystal wave-guide are used widely.The chromatic dispersion of regulating respective waveguide or device is the effective way that reaches delay, and except little ring and photonic crystal, the coupling of waveguide also is the method for a kind of effective adjusting waveguide and dispersion.
The comprehensive slower rays type optical buffer type of having reported at aspects such as waveguiding structure and device principles, all need be expanded innovation, to satisfy the requirement of using.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned prior art; A kind of tunable optical delay line based on coupling optical waveguide is proposed; This coupling optical waveguide is made up of two optical waveguides with different dispersion characteristics; Coupling between two waveguides causes the chromatic dispersion of structure, and the group velocity of coupled modes has experienced saltus step fast at the wavelength node place of phase matching, produces time-delay.After adding thermode, through the adjusting of thermo-optic effect, light signal can reach the low distortion transmission and the adjustable effect of delaying time in a big way.The power of waveguide-coupled ability has determined the susceptibility that thermo-optic effect is regulated group velocity.
Technical solution of the present invention is following:
A kind of tunable optical delay line based on coupling optical waveguide, its characteristics are: this tunable optical delay line is made up of two parallel to each other or vertical optical waveguides, when two waveguides each other near the time to 0.3-0.8 μ m, be coupled mutually through evanescent wave.
Described two one optical waveguides are the optical waveguides with different dispersion curves, and dispersion curve intersects at the wavelength node place of phase matching.
Described two one optical waveguides are respectively the waveguide of a ridge silicon and gap waveguide, the waveguide of a ridge silicon and a ridge silicon nitride waveguides, waveguide of two ridge silicon or the waveguide of a ridge silicon and a photon crystal wave-guide.
Described two one optical waveguides intercouple, and the group velocity of coupled modes produces saltus step at the intersection point place.
Compared with prior art, the invention has the beneficial effects as follows that two waveguides intercouple, the group velocity of coupled modes has experienced saltus step fast at the intersection point place, produces time-delay.Through the adjusting of thermo-optic effect, light signal can reach the low distortion transmission and the adjustable effect of delaying time in a big way.
Description of drawings
Fig. 1 is the structural representation of two waveguides ((Si) waveguide of ridge silicon and slit silicon waveguide) level of first kind of embodiment among the present invention.
Fig. 2 is the effective refractive index figure of coupling optical waveguide.
Fig. 3 is the mode profile figure of symmetric mode in coupling optical waveguide that excites.
Fig. 4 is the structural representation of thermode.
Fig. 5 is the GVD figure of coupling optical waveguide.
Fig. 6 is the GVD figure and corresponding pulse delay figure under two kinds of patterns of coupling optical waveguide
Fig. 7 is two waveguides ((Si) waveguide of ridge silicon and the ridge silicon nitride (Si of second kind of embodiment among the present invention
3N
4) waveguide-coupled) structural representation of level coupling.
Fig. 8 is two waveguides ((Si) waveguide of ridge silicon and the ridge silicon nitride (Si of the third embodiment among the present invention
3N
4) waveguide-coupled) vertical coupled structural representation.
Fig. 9 is the structural representation of two waveguides (ridge silicon (Si) waveguide-coupled of two different sizes) level coupling of the 4th kind of embodiment among the present invention.
Figure 10 is the structural representation of two waveguides ((Si) waveguide of ridge silicon and photon crystal wave-guide coupling) level coupling of the 5th kind of embodiment among the present invention.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is done further elaboration, but do not limit protection scope of the present invention with this.
Fig. 1 is the structural representation of two waveguides ((Si) waveguide of ridge silicon and slit silicon waveguide) level of first kind of embodiment among the present invention.As shown in the figure, the tunable optical delay line is made up of a ridge silicon (Si) waveguide 1 and a gap waveguide 2 parallel to each other.When two waveguides each other near the time (approximately 0.3-0.8 μ m), intercouple through evanescent wave.This Coupled Passive Waveguide Structure can be supported symmetry and two kinds of coupling optical waveguide patterns of antisymmetry, and at the wavelength node place of phase matching, the group velocity of two kinds of coupled modess has experienced saltus step fast, produces bigger time-delay variable quantity.Fig. 2 is the effective refractive index figure corresponding to Fig. 1 coupling optical waveguide.Wherein, The sectional area of ridge silicon (Si) waveguide is 300 nm * 340 nm, and the sectional area of slit optical waveguide is 440 nm * 340 nm, and gap width is 20 nm; The spacing distance of two waveguides is 500 nm, and the refractive index of silicon and oxide layer materials is respectively 3.478 and 1.444.Can be known that by this figure in short wavelength range, symmetric mode approaches the ridge optical waveguide mould, anti symmetric mode approaches slit light wave guided mode; In long wavelength's scope, symmetric mode approaches slit light wave guided mode, and anti symmetric mode approaches the ridge optical waveguide mould.Shown in Figure 3 is under the different wavelengths situation, the mode profile figure of the symmetric mode that excites in coupling optical waveguide, and energy distribution situation and Fig. 2 match.The structure chromatic dispersion of coupling optical waveguide can excite two coupled waveguides of different coupled modess to compensate respectively through cascade, produces the effect of low chromatic dispersion.
Shown in Figure 4 is the structural representation of thermode.Deposit one deck monox (oxide) in ready-made waveguide at first, depositing metal tungsten (W) is as thermode then.Thermode is selected the material of high resistivity, such as tungsten (W), chromium (Cr), titanium nitride (TiN) etc.For compromise response speed and top metal to the absorption of light field, the thickness h of monox (oxide) needs moderate, is generally 0.5-1 μ m.The thickness of monox is too thick, can influence the response speed of device, and the thickness of monox is too thin can to influence the absorption of top metal to light field.The thickness h of oxide is selected 0.9 μ m in the present embodiment, and the width w of thermode selects 12.5 μ m.
Fig. 5 is the GVD figure corresponding to Fig. 1, when temperature raises phase matching wavelengths node location generation red shift.As shown in Figure 5, along with the rising of temperature, be carried in when light signal on the carrier wave of symmetric pattern, the time-delay of signal increases; Be carried in when light signal on the carrier wave of antisymmetric mode, the time-delay of signal reduces, thereby reaches the adjustable effect of amount of delay.The power of waveguide-coupled ability has determined the susceptibility that thermo-optic effect or electrooptical effect are regulated group velocity.
Fig. 6 is the GVD figure of coupling optical waveguide under two kinds of patterns and corresponding pulse delay figure corresponding to Fig. 1.Though group delay is very responsive to variation of temperature at the wavelength node place of phase matching, corresponding group delay chromatic dispersion is very big.The coupling optical waveguide Design of length is 10 cm, and shown in Fig. 6 (a) is the group delay chromatic dispersion of symmetric pattern in the coupling optical waveguide, and shown in Fig. 6 (b) is the transmission situation that Gauss pulse that a halfwidth is 10 ps is carried in symmetric pattern, when temperature increase 50
oThe time-delay that can obtain about 190 ps during C increases.Fig. 6 (c), shown in (d) is that an asymmetric mode is as carrier wave, when the temperature caused time-delay that raises reduces.Through thermo-optic effect, the amount of delay of this coupling optical waveguide is adjustable.Fig. 6 (e) is depicted as the dispersion curve that the length that excites different coupled modess respectively is two coupling optical waveguide cascades of 5 cm, and chromatic dispersion can be compensated through this method, thereby produces the effect of low chromatic dispersion, shown in Fig. 6 (f).Can know by Fig. 6 (a) with (b); The dispersion curve of two kinds of coupled modess is complementary; Therefore, like Fig. 6 (e) and (f), chromatic dispersion can excite two coupling optical waveguides of different coupled modess to compensate respectively through cascade; The light signal time-delay variable quantity of two coupled structures reduces, and produces the effect of low chromatic dispersion.
Fig. 7 is two waveguides of second kind of embodiment among the present invention, (Si) waveguide of ridge silicon and ridge silicon nitride (Si
3N
4) the horizontal coupled structure synoptic diagram of waveguide.This coupled waveguide can cause overall structure chromatic dispersion, is issued to the adjustable effect of time-delay in the adjusting of thermo-optic effect.Fig. 8 is two waveguides ((Si) waveguide of ridge silicon and the ridge silicon nitride (Si of the third embodiment among the present invention
3N
4) waveguide-coupled) vertical coupled structural representation.Fig. 9 is the structural representation of two waveguides (ridge silicon (Si) waveguide-coupled of two different sizes) level coupling of the 4th kind of embodiment among the present invention; The second order mode of the basic mode of small size silicon waveguide and the waveguide of large scale silicon intercouples, and can reach the adjustable effect of time-delay.Figure 10 can reach the adjustable effect of time-delay equally for the structural representation of two waveguides ((Si) waveguide of ridge silicon and photon crystal wave-guide coupling) level coupling of the 5th kind of embodiment among the present invention.
Claims (3)
1. tunable optical delay line based on coupling optical waveguide, its characteristics are: this tunable optical delay line is made up of two parallel to each other or vertical optical waveguides, when two waveguides each other near the time to 0.3-0.8 μ m, be coupled mutually through evanescent wave.
2. the tunable optical delay line based on coupling optical waveguide as claimed in claim 1 is characterized in that: described two one optical waveguides are the optical waveguides with different dispersion curves, and dispersion curve intersects at the wavelength node place of phase matching.
3. the tunable optical delay line based on coupling optical waveguide as claimed in claim 2; It is characterized in that: described two one optical waveguides are respectively the waveguide of a ridge silicon and gap waveguide, the waveguide of a ridge silicon and a ridge silicon nitride waveguides, waveguide of two ridge silicon or the waveguide of a ridge silicon and a photon crystal wave-guide.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104238010A (en) * | 2014-09-22 | 2014-12-24 | 电子科技大学 | Front end input waveguide structure of direction coupling optical waveguide detector |
| CN107204813A (en) * | 2017-07-28 | 2017-09-26 | 浙江九州量子信息技术股份有限公司 | A kind of phase code device based on silicon substrate integrated waveguide |
| CN107390317A (en) * | 2017-06-30 | 2017-11-24 | 清华大学 | A kind of Dispersion managed method and integrated light guide suitable for integrated light guide |
| CN111781676A (en) * | 2020-06-29 | 2020-10-16 | 南京大学 | Bragg waveguide grating modulator |
| CN114859466A (en) * | 2022-05-23 | 2022-08-05 | 中国科学技术大学 | Flat near-zero dispersion optical waveguide structure |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101296037A (en) * | 2008-06-05 | 2008-10-29 | 上海交通大学 | Apparatus and method for light-operated controlling light delay line based on silicon based micro-ring |
| CN102393550A (en) * | 2011-11-17 | 2012-03-28 | 中国科学院半导体研究所 | Dimming delay line for silica delay and manufacturing method thereof |
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2012
- 2012-04-12 CN CN2012101061018A patent/CN102681091A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101296037A (en) * | 2008-06-05 | 2008-10-29 | 上海交通大学 | Apparatus and method for light-operated controlling light delay line based on silicon based micro-ring |
| CN102393550A (en) * | 2011-11-17 | 2012-03-28 | 中国科学院半导体研究所 | Dimming delay line for silica delay and manufacturing method thereof |
Non-Patent Citations (1)
| Title |
|---|
| LINJIE ZHOU,JIANPING CHEN,XIAOMENG SUN,JINGYA XIE,HAIKE ZHU: "Optical signal processing using silicon resonance and slow-light structures", 《PROCEEDINGS OF SPIE》, vol. 8266, 28 February 2012 (2012-02-28) * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104238010A (en) * | 2014-09-22 | 2014-12-24 | 电子科技大学 | Front end input waveguide structure of direction coupling optical waveguide detector |
| CN104238010B (en) * | 2014-09-22 | 2017-12-01 | 电子科技大学 | A kind of front end input waveguide structure of direction coupling optical waveguide detector |
| CN107390317A (en) * | 2017-06-30 | 2017-11-24 | 清华大学 | A kind of Dispersion managed method and integrated light guide suitable for integrated light guide |
| CN107390317B (en) * | 2017-06-30 | 2019-09-20 | 清华大学 | A kind of Dispersion managed method and integrated light guide suitable for integrated light guide |
| CN107204813A (en) * | 2017-07-28 | 2017-09-26 | 浙江九州量子信息技术股份有限公司 | A kind of phase code device based on silicon substrate integrated waveguide |
| CN111781676A (en) * | 2020-06-29 | 2020-10-16 | 南京大学 | Bragg waveguide grating modulator |
| CN114859466A (en) * | 2022-05-23 | 2022-08-05 | 中国科学技术大学 | Flat near-zero dispersion optical waveguide structure |
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Application publication date: 20120919 |