The high sensitivity optical system of DOAS analyser
Technical field
The present invention relates to a kind of optics and spectroscopy technology utilized gas concentration is carried out the high sensitivity optical system of the DOAS analyser of on-line measurement, the physical channel that this optical system is transmitted as gas concentration information is the core component of total system.
Background technology
The boiler smoke of industrial smoke, particularly fuel-burning power plant contains a large amount of SO
2, NO
X, NH
3Etc. multiple harmful constituent, must carry out could qualified discharge after the purified treatment such as desulfurization, denitration.Flue gas discharge continuous monitoring system (CEMS, Continuous Emission Monitoring System) is meant the important watch-dog of the desulfurization of conduction factory, denitrating system operation with closed ring, is again the important monitoring equipment of fume emission simultaneously.Along with the continuous propelling of China's energy-saving and emission-reduction work, SO in the gaseous contaminant
2, NO
X, NH
3Deng concentration of emission more and more lower; Especially when low concentration is measured; The absorption meeting of steam causes very big measuring error to infrared absorption spectrum measurement, and the water vapor absorption increase that can cause system corrosion to bring standby redundancy, and is difficult to above-mentioned polycomponent is measured simultaneously.Therefore traditional direct extraction cryochem that is applicable to low humidity, high-sulfur based on infrared absorption spectroscopies no longer is fit to present high humidity, the operating mode of low-sulfur.Success and application widely in the direct measurement of atmospheric trace gas concentration monitor and pollution source smoke emissioning concentration, have been obtained as more representational difference absorption spectrum in the direct method of measurement (Differential Optical Absorption Spectroscopy, following abbreviation DOAS).
For for the flue gas concentration analyser of DOAS technology, optical system is a nucleus module wherein, and performances such as the sensitivity of optical system, signal to noise ratio (S/N ratio) are to improve the sensitivity of DOAS analyser and the key of measuring accuracy.At present; Utilize the single detector timesharing to obtain in the DOAS analyser with reference to light intensity and transmitted light intensity, optical system adopts semi-transparent semi-reflecting design proposal mostly, or on this basis at lens surface plating ultraviolet anti-reflection film; No matter be reference light or transmitted light; All need twice through same semi-transparent semi-reflecting lens, the light that light source sends has only 1/4th energy can get into photodetector in theory at most, causes capacity usage ratio low; In addition, chromatic aberration correction is not considered in optical design mostly, for energy type but not for the imaging-type system; When the broadband light beam passes through this optical system, will lose quite a few energy once more, especially under the higher or extremely low situation of the more weak or tested concentration of component of radiant light intensity of light source; The signal to noise ratio (S/N ratio) that gets into photo detector signal obviously reduces; Cause the sensitivity and the measuring accuracy of DOAS analyser low excessively, must change light source again, cause the serviceable life of light source shorter.
Summary of the invention
The object of the present invention is to provide a kind of high sensitivity optical system that is used for the DOAS analyser of detected gas component concentration; Can increase substantially the capacity usage ratio of light source; Under the same intensity of light source; The luminous energy that gets into photodetector is multiplied, and improves the measurement signal to noise ratio (S/N ratio) of instrument, prolongs the serviceable life of light source.
The high sensitivity optical system of DOAS analyser of the present invention; Comprise light source, collimation lens set, spectroscope, transmitted light catoptron, focus lens group, reference light catoptron, optical fiber, fiber spectrometer and shifting board, said collimation lens set and focus lens group are made up of large and small two lens that keep at a certain distance away respectively; Collimation lens set and the vertical each other setting of focus lens group, it is optical axes crosspoint that the optical axis of the two intersects in big lens one side; Said light source and transmitted light catoptron lay respectively on the optical axis of collimation lens set both sides, and wherein the transmitted light catoptron is positioned at the position beyond the said optical axes crosspoint; Said optical fiber one end is positioned on the lenslet one sidelight axle of focus lens group, and the other end links to each other with fiber spectrometer; Said reference light catoptron is positioned at position outside the said optical axes crosspoint of big lens one side of focus lens group optical axis; Said spectroscope is the rectangle quartz glass that is coated with reflectance coating; It is tilting on rectangular angular bisector of the two optical axis intersection institute of collimation lens set and focus lens group sides adjacent, and promptly spectroscope is simultaneously on the light path with half incident beam of 45 jiaos of tilting half outgoing beam and focus lens group in collimation lens set; Said shifting board switchably keeps off on the light path of second half incident beam of second half outgoing beam of collimation lens set or focus lens group.
Large and small each lens in said collimation lens set and the focus lens group are compound and fixedly form with spacer ring by the calcium fluoride lens of fused quartz lens and ultraviolet level.
Said spectroscope is a single face plating reflectance coating, and the one side that is coated with reflectance coating is towards collimation lens set, and the one side of not plating reflectance coating is towards focus lens group.
The edge that said spectroscope is in collimation lens set optical axis and focus lens group optical axis intersection place is processed into 45 chamferings, and fillet surface is towards reference light catoptron direction.
Said transmitted light catoptron and reference light catoptron are corner cube prism.
Technique effect of the present invention is following:
1, the light beam that spectroscopical set-up mode sends light source in this optical system has half to get into reference path; Second half has got into the measurement light path; Under the identical condition of light source intensity; Improved luminous energy greatly, the sensitivity of DOAS analyser is improved through optical system.The reflected light spectral composition difference that spectroscope single face plating reflectance coating can avoid traditional double-sided coating to cause because of difference.
2, according to system signal noise ratio be the principle of ratio of the root mean square of useful light intensity signal and noise; Under integral time and average time the same terms, system signal noise ratio depends on light intensity, and the luminous energy of this optical system is improved; Signal to noise ratio (S/N ratio) is high, and the measuring accuracy of system also improves.
3, compare with common system, adopt the DOAS analyser of this optical system to have higher signal to noise ratio (S/N ratio), under identical radiation of light source condition, stronger through the luminous energy of this optical system.Under identical measuring accuracy requires, the longer service life of this optical system light source.
4, be that collimation lens set or focus lens group have all adopted quartz lens and the compound structure of calcium fluoride lens in the light path system; Thereby when having eliminated the broadband light beam to a great extent through same material because the aberration problem that the refractive index difference causes; The energy loss of bringing because of aberration in the time of further reducing the broadband light beam through optical system, the sensitivity that improves system.
Description of drawings
Fig. 1 is an optical system light path design diagram of the present invention.
Fig. 2 is the perspective view of corner cube prism.
Fig. 3 is the bare engine module cut-open view based on the DOAS analyser of optical system of the present invention.
Among the figure, 1, the light source luminescent point; 2, bulb glass wall, 3, collimation lens set; 4, spectroscope; 5, reference light catoptron; 6, transmitted light catoptron; 7, focus lens group; 8, optical fiber; 9, fiber spectrometer; 10, baffle plate, 11, the collimation lens set optical axis, 12, the focus lens group optical axis, 13, corner cube prism, 13-1, rounded bottom surface, 13-2, right angle face; 14, chimney, 15, probe, 15-1, gas sampling hole, A, baffle plate are in measures the light path position, and B, baffle plate are in the reference path position, O, optical axes crosspoint.
Embodiment
Fig. 1 is the light path synoptic diagram of optical system embodiment of the present invention, and light source 1 is a deuterium lamp.
Like Fig. 1, the optical axis 11 of collimation lens set 3 intersects vertically into optical axes crosspoint O with the optical axis 12 of focus lens group 7.Collimation lens set 3 is formed by large and small two lens with the coaxial assembling of a determining deviation with focus lens group 7, but large and small two lens distance of two lens combination are inequality.Each lens in above-mentioned two lens combination are compound and be fixed into one through spacer ring by the calcium fluoride biconvex lens curved surface kissing of the JGS1 fused quartz meniscus lens of same diameter and ultraviolet level; Spectroscope 4 is substrate and single face plating reflectance coating with certain thickness quartz glass.As shown in Figure 1, spectroscope 4 is positioned at the sides adjacent of collimation lens set 3 and focus lens group 7, and on collimation lens set optical axis 11 and focus lens group optical axis 12 intersect vertically the right angle bisector that forms; Be that spectroscope 4 is tilting on the light path of half outgoing beam of lens combination 3 and crossing with it also half incident beam of adjacent focus lens group 7 with 45 jiaos simultaneously.Spectroscope 4 single faces are coated with reflectance coating, and the one side of plating reflectance coating is towards collimation lens set 3, and the one side of not plating reflectance coating is towards focus lens group 7.The edge that spectroscope 4 is in collimation lens set optical axis 11 and focus lens group optical axis 12 intersections becomes 45 chamferings, and fillet surface is towards the direction of reference light catoptron 5.Shifting board 10 is driven by rotary magnet, can come back rotation by 45 jiaos around optical axes crosspoint O, alternately as the light barrier of second half light beam of second half light beam of collimation lens set and focus lens group, and switching position between the two.
Fig. 3 is the sectional structure chart of the bare engine module embodiment in the DOAS analyser.
In the present embodiment, the optimal parameter that system adopts is following:
The size of deuterium lamp light source 1 luminous point is 0.5mm, and bulb walls 2 thickness are 1mm, and the radiation of light source wavelength band is 185~400nm.Light source 1 luminous point is 53mm apart from the centre distance of first lens of collimation lens set 3.Two lens of collimation lens set 3 are that the optics spacer ring of 23.4mm is assemblied in the two in the aluminium lens barrel through blackout through spacing.In the collimation lens set 3, being respectively 55.78mm and 33.70mm, outside diameter near the lens of light source 1 one sides by spherical radius is that 26mm, center thickness are that the ultraviolet level calcium fluoride biconvex lens that the curved month quartzy lens of 3.5mm are 33.70mm with spherical radius and have an identical outside diameter utilizes curve form to be combined with each other.In the collimation lens set 3 near the lens of spectroscope 4 one sides by spherical radius be respectively ultraviolet level calcium fluoride biconvex lens that 29.31mm and 77.09mm, center thickness 8mm, outside diameter are 32mm and spherical radius be respectively 29.31 and 144.29mm, center thickness be that 4mm and curved month quartzy lens with same diameter utilize the present situation of curved surface to be combined with each other.Focus lens group 7 has identical structure with collimation lens set 3, and the parameter of both optical mirror slips is identical, and unique difference is that the former is spaced apart 23.08mm at the distance of optics spacer ring.The nearest centre distance of the focus point of focus lens group 7 and focus lens group 7 lens is 53.98mm.
Spectroscope 4 is that a rectangle is quartzy dull and stereotyped in the native system, wherein long for 39mm, wide be 23mm, the thick 4mm of being.In order to eliminate reference spectra and the structural difference of absorption spectrum that causes owing to the spectroscope plated film as far as possible, spectroscope 4 is in face of the side single face plating reflectance coating of light source.The lower limb of spectroscope 4 becomes 45 chamferings, and fillet surface overlaps with the optical axis 11 of collimation lens set 3.In the corner cube prism (see figure 2) of light reflection mirror 5, disc 13-1 diameter is 25.4mm as a reference, highly is 19.05mm, and the beam deflection angle is 180, and material is JGS1.In corner cube prism 13 (see figure 2)s as transmitted light catoptron 6, the disc 13-1 diameter of prism is 50.8mm, highly is 38.1mm, and beam deflection angle and material are identical with reference light catoptron 5.Catoptron 6 is contained in the probe 15, and probe 15 is provided with tested gas sampling hole 15-1.Optical fiber 8 is for the height of core diameter 600 m passes through UV fiber, and the optical fiber two ends are the SMA905 modular connection.
Explain that below in conjunction with Fig. 1~Fig. 3 this optical system uses in the flue gas composition measurement of concetration.
Like Fig. 3, will pop one's head in before measuring and 15 radially insert in the chimney from the measuring port of chimney 14, flue gas from chimney 14 through the time also pass through from 15 the gas sampling hole 15-1 of popping one's head in simultaneously, be full of flue gas in 15 the gas sampling zone of popping one's head in.
Send the parallel beam that diameter is 30mm through collimation lens set 3, this parallel beam is divided into measuring light and reference light two light beams behind spectroscope 4.
1. measuring beam
See Fig. 1 and Fig. 2, measuring beam is to be the half-cylindrical parallel beam of right-hand part of 30mm from the diameter that collimation lens set 3 penetrates.When baffle plate 10 rotates to the B state; Semi-cylindrical measuring beam passes from the tested flue gas of popping one's head in 15 by the original optical path direction; Be incident to transmitted light catoptron 6 then, transmitted light catoptron 6 is corner cube prisms as shown in Figure 2, and it is made up of rounded bottom surface 13-1 and three right angle face 13-2; The axis of symmetry of this corner cube prism 6 (being the transmitted light catoptron, down together) overlaps with the optical axis 11 of collimation lens set 3.Measuring beam is after three right angle face total reflections of transmitted light catoptron 6 inside; Promptly reverse (along the left side of the optical axis among Fig. 1 11) is incident upon spectroscope 4 (not plating a side of reflectance coating); Then by after the reflection of reflectance coating that its another side plated, become 45 jiaos of ejaculations, promptly become and be 90 parallel beam with the incident light direction and get into the first half of focus lens group 7 left along spectroscope 4 normals; Be focused the back and get into the silica fibre 8 that passes through ultraviolet; Conduction through optical fiber 8 gets into spectrometer 9 again, and the light signal that spectrometer will be loaded with flue gas concentration is converted into electric signal, sends into the computing machine that flue gas concentration measuring software is housed through becoming digital quantity after a series of processing again.
2. reference beam
Reference beam is that half-cylindrical parallel beam incides spectroscope 4 (this face is coated with reflectance coating) from the left side of the diameter 30mm of collimation lens set 3 ejaculations; After spectroscope 4 reflections; Light is incident to first disc (not having flue gas in the reference beam range) of the corner cube prism of reference light catoptron 5; Rotate under the A condition situation at baffle plate 10; Half-cylindrical reference beam behind this corner cube prism inner full-reflection from second disc of reference light catoptron 5 along being incident to focus lens group 7 left with focus lens group 7 optical axises 12 parallel directions; Parallel rays gets into the silica fibre 8 that passes through ultraviolet after lens combination 7 focuses on, the reference light that will not comprise any measurand concentration information through optical fiber 8 is sent into spectrometer 9.Utilizing this reference light and measuring light can carry out flue gas concentration calculates.
Be provided with baffle plate 10 in the light path of this optical system; Under the rotary magnet of computer instruction control drives; Switch between position A and the position B that baffle plate 10 can be in Fig. 1; Make reference light and measuring light alternation, realize utilizing 9 pairs of reference lighies of fiber spectrometer and measuring light to carry out timesharing and measure.
In this optical system, the light that light source 1 sends has been divided into two-way: the one tunnel for directly getting into the reference light intensity that photodetector 9 obtains without tested gas; Another Lu Weixian gets into the measurement light intensity that photodetector 9 obtains again through tested gas (promptly from pop one's head in 15 through), uses subsequently to carry out based on the mathematical model of Lambert-Beer law that certain constituent concentration calculates in the flue gas (tested gas).