CN102422121A - Vision inspection system and coordinate conversion method using same - Google Patents
Vision inspection system and coordinate conversion method using same Download PDFInfo
- Publication number
- CN102422121A CN102422121A CN2010800202164A CN201080020216A CN102422121A CN 102422121 A CN102422121 A CN 102422121A CN 2010800202164 A CN2010800202164 A CN 2010800202164A CN 201080020216 A CN201080020216 A CN 201080020216A CN 102422121 A CN102422121 A CN 102422121A
- Authority
- CN
- China
- Prior art keywords
- mark
- image
- axle
- error
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C11/00—Photogrammetry or videogrammetry, e.g. stereogrammetry; Photographic surveying
- G01C11/02—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures
- G01C11/025—Picture taking arrangements specially adapted for photogrammetry or photographic surveying, e.g. controlling overlapping of pictures by scanning the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/10—Measuring distances in line of sight; Optical rangefinders using a parallactic triangle with variable angles and a base of fixed length in the observation station, e.g. in the instrument
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/10—Measuring distances in line of sight; Optical rangefinders using a parallactic triangle with variable angles and a base of fixed length in the observation station, e.g. in the instrument
- G01C3/14—Measuring distances in line of sight; Optical rangefinders using a parallactic triangle with variable angles and a base of fixed length in the observation station, e.g. in the instrument with binocular observation at a single point, e.g. stereoscopic type
- G01C3/16—Measuring marks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Multimedia (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a vision inspection system and to a coordinate conversion method using same. The vision inspection system of the present invention comprises: a table which supports an object to be inspected; a stage which enables the table to linearly reciprocate in the Y-axis direction; a plurality of cameras spaced apart from each other along the X-axis direction to acquire images of the object to be inspected or of the table; a plurality of first marks spaced apart from each other at one end of the table along the X-axis direction and intersecting the Y-axis direction; ; and a plurality of second marks spaced apart from each other at one side of the table along the Y-axis direction from the leftmost first mark from among the first marks, and spaced apart from each other at the other side of the table along the Y-axis direction from the rightmost first mark from among the first marks. The vision inspection system of the present invention acquires images of the first marks and converts coordinate values of the acquired images into coordinate values of the stage, and acquires images of the second marks and converts coordinate values of the acquired images and coordinate values of the stage into absolute coordinate values based on the object to be inspected. The absolute coordinate values based on the object to be inspected are coordinate values in which the accuracy of the stage is corrected.
Description
Technical field
The coordinate transformation method that the present invention relates to a kind of vision detection system and utilize this system.More particularly, relate to a kind of utilization and be arranged on the reference mark on the worktable that is used to support body to be detected, generate for the vision detection system of the absolute coordinate of body to be detected and utilize the coordinate transformation method of this system.
Background technology
The vision detection system that detects the defective on the flat display apparatus such as style to be detected such as TFT-LCD, PDP, OEL through vision (video camera) comprises worktable, stand (stage) and video camera etc.Worktable is used to support body to be detected, and stand makes the worktable that body to be detected is installed on X axle or Y direction, carry out straight reciprocating motion for loading (loading), unloading (unloading), the location (positioning) of body to be detected.Video camera is used to obtain the image of body to be detected or worktable, and along with the panel of flat display apparatus maximizes gradually, in order to detect body to be detected, utilizes a plurality of video cameras.
Common vision detection system is with the accurate defective (defect) that detects body to be detected of micron unit; And generation is the absolute coordinate system of benchmark with body to be detected; And in this absolute coordinate system, indicate after the defective locations with coordinate figure, transmit positional information to the equipment of subsequent handling about defective.
In order to generate with body to be detected is the accurate absolute coordinate system of benchmark, need carry out the aligning operation of video camera, the degree of accuracy (accuracy) and the mensuration operation of precision (repeatabillity) repeatedly of stand.Aligning operation through video camera; Can compensate from the rotation angle of the image of each video camera acquisition, the addendum modification information such as (shift) on X axle, Y axle; Through stand degree of accuracy and the mensuration operation of precision repeatedly, can compensate the gap between the position that target feed position that desire transfers worktable and worktable reality transferred---transfer error or be used to represent the rotation error of worktable with respect to the rotation degree of X axle or Y axle.
But in the aligning operation of video camera, aim at a plurality of video cameras not only needs more time and efforts, and it also is very difficult accurate aligned with camera.And the aligning operation of video camera, in order to ensure the reliability and the reappearance that detect, need regularly be carried out owing to easy changes of many reasons such as vibrations, impact, deformation in the position of video camera therefore.
For the degree of accuracy of measuring stand and precision repeatedly, need with the system position adjacent on laser interferometer (laser interferometer) is set, and obtain data at each unit interval transfer bank, therefore need too many time and efforts.The degree of accuracy of stand reaches repeatedly precision also because therefore many former thereby easy changes such as vibrations, impact, deformation need regularly be measured, and still on the manufacturing line of body to be detected, can not stop detection line for a long time.
Summary of the invention
The present invention proposes in order to solve above-mentioned problem in the past, its objective is the coordinate transformation method that a kind of vision detection system is provided and utilizes this system.This vision detection system and utilize the coordinate transformation method of this system not utilize the compensation operation of the stand degree of accuracy etc. of extra external unit; Only utilize a plurality of reference marks of vision detection system itself; Carry out the detection operation of body to be detected; And carry out the degree of accuracy compensation operation of stand, to generate the absolute coordinate system of the body to be detected that the stand error is compensated.
To achieve these goals, the present invention provides a kind of vision detection system, and this system comprises: worktable is used to support body to be detected; Stand is used to make said worktable on Y direction, to carry out straight reciprocating motion; A plurality of video cameras are in order to obtain the image of said body to be detected or said worktable, along the X-direction configuration of being separated by.Said vision detection system is characterised in that, comprising: a plurality of first marks, and along the X-direction of intersecting with said Y axle, being separated by is configured in an end of said worktable; A plurality of second marks; Wherein a part first mark of the leftmost side from said a plurality of first marks begins; Along the configuration of being separated by of said Y direction, and first mark of another part rightmost side from said a plurality of first marks begins in a side of said worktable, at the opposite side of said worktable along the configuration of being separated by of said Y direction; After obtaining the image of said a plurality of first marks; Convert this image coordinate value to the gantry coordinates value, obtain the image of said a plurality of second marks after, it is the absolute coordinate of benchmark that this image coordinate value and gantry coordinates value are converted to body to be detected.Wherein, the absolute coordinate that is benchmark with said body to be detected is the coordinate figure that the degree of accuracy of said stand is compensated.
On the other hand, in order to realize purpose as stated, the present invention provides a kind of coordinate transformation method of vision detection system.This method is utilized said vision detection system, comprising: the image of first mark obtains step, is used to obtain the image of said a plurality of first marks; First conversion formula generates step, utilizes the mutual relationship of absolute gantry coordinates value of image coordinate value and said first mark of said first mark, generates first conversion formula that the image coordinate value is converted to the gantry coordinates value; The image of second mark obtains step, is used to obtain the image of said a plurality of second marks; The rotation error calculation procedure is utilized the mutual relationship of gantry coordinates value of image coordinate value and said second mark of said second mark, calculates the rotation error that is used for representing the angle that said worktable tilts with respect to said X axle at rectilinear motion; Transfer the Error Calculation step; Utilize the mutual relationship of gantry coordinates value of image coordinate value and said second mark of said second mark, calculate and be used to represent the target feed position of said worktable on said X axle or said Y axle and the handover error of the difference between the actual transmitting place; Second conversion formula generates step; Said first conversion formula is added and subtracted said rotation error and said handover error; Be used for image coordinate value and gantry coordinates value are converted to second conversion formula of absolute coordinate with generation, wherein said absolute coordinate is to be the coordinate figure of benchmark with body to be detected.
According to the present invention; Do not adopt outside extra determinator; Be arranged on second mark on the worktable and only utilize; Carry out the detection operation of body to be detected, and carry out the degree of accuracy compensation operation of stand, therefore can save the stand degree of accuracy and reach the needed time of mensuration and the energy of precision repeatedly.
And; According to the present invention; Even because vibrations, impact, deformation etc. are former thereby cause the change of detection system; Also can carry out the detection operation of body to be detected at any time, carry out stand degree of accuracy or the compensation operation of precision repeatedly simultaneously, therefore can save the needed funds of plant maintenance.
And, according to the present invention, need not to stop vision detection system and carry out stand degree of accuracy or the compensation operation of precision repeatedly, therefore can stably manage the detection line of vision detection system and body to be detected.
Description of drawings
Fig. 1 is the synoptic diagram of vision detection system one embodiment of the present invention.
Fig. 2 is the figure that shows worktable, a plurality of first mark, a plurality of second marks and a plurality of camera arrangement of vision detection system shown in Figure 1.
Fig. 3 is the worktable that briefly shows vision detection system shown in Figure 1 owing to the figure that transfers the state that error or rotation error twist.
Fig. 4 is the precedence diagram of the coordinate transformation method of vision detection system one embodiment of the present invention.
Symbol description
2: body to be detected
4: defective
100: vision detection system
120: worktable
130: stand
150: video camera
M1, M2 ..., M9: first mark
Ma, Mb, Mc, Md ...: second mark
Embodiment
Below, an embodiment of present invention will be described in detail with reference to the accompanying vision detection system and utilize the coordinate transformation method of this system.
Fig. 1 is the synoptic diagram of vision detection system one embodiment of the present invention.
As shown in Figure 1, an embodiment of vision detection system 100 of the present invention is used to check and the various defectives 4 of body 2 to be detected such as assay plate display panels that it possesses worktable 120, stand 130 and a plurality of video camera 150.
Said worktable 120 is used to support body 2 to be detected, is arranged on the upside of framework 110 movably along Y direction.Body 2 to be detected is fixed by the anchor clamps that are arranged on the worktable 120.On worktable 120, lay under the state of body 2 to be detected, worktable 120 moves along Y direction, to carry out the detection for body 2 to be detected.
Said stand 130 is used to make worktable 120 to move back and forth along Y direction, includes the linear motor that the rectilinear motion driving force is provided in the present embodiment; And be fixed on the top of framework 110 and be used to guide worktable 120 to carry out straight-line a pair of lm guides.Be used to realize that the straight-line linear motor of worktable 120 and the unitized construction of lm guides are known to those skilled in the art, therefore omit its detailed description.In addition, stand 130 also can be made up of the rotation motor that rotary driving force is provided, ball screw and a pair of lm guides.
In order to obtain the image of body 2 to be detected or worktable 120, be separated by along X-direction and dispose said a plurality of video camera 150.In the present embodiment, in order to detect the defective 4 of body to be detected and to obtain its image, utilize the high row scanning camera of resolution (Line Scan Camera) so that micron unit is accurate.Row scanning camera obtains image along a horizon scan line body 2 to be detected.A plurality of row scanning cameras according to separately field, the visual field (Field Of View) (FOV1, FOV2 ..., FOV8) cut apart the image that scans body 2 to be detected.
The operation of computing machine (not graphic) control stand 130 and said a plurality of video cameras 150.Computing machine utilizes image processing program to handle the image by video camera 150 inputs, and exports as the image of the body to be detected 2 that result obtained, a series of data such as testing result of defective 4 through output units such as displays.
On worktable 120, along X-direction be provided with a plurality of first marks (M1, M2 ..., M9), along Y direction be provided with a plurality of second marks (Ma, Mb, Mc, Md ...).A plurality of first marks (M1 ..., M9) along the direction of intersecting with the Y axle, for example along with the X-direction of Y axle quadrature, be separated by predetermined distance and separate configuration at an end of worktable 120.And, a part second mark (Ma, Mc, Me in a plurality of second marks ...) the first mark M1 of the leftmost side begins from a plurality of first marks, be separated by predetermined distance along Y direction and be configured in a side of worktable 120.Second mark (Mb, Md, the Mf of other part in a plurality of second marks ...) the first mark M9 of the rightmost side begins from a plurality of first marks, be separated by predetermined distance along Y direction and be configured in the opposite side of worktable.
A plurality of first marks (M1 ..., M9) in adjacent per two marks be configured in each row scanning camera field, the visual field (FOV1 ..., FOV8) lining, and field, the visual field (FOV1 ..., FOV8) in the distance of the adjacent overlapping regulation in per field, two visuals field.
Store in advance in the computing machine a plurality of first marks (M1 ..., M9) and a plurality of second mark (Ma, Mb ...) the gantry coordinates value; Through from a plurality of first marks of video camera 150 input (M1 ..., M9), a plurality of second mark (Ma, Mb ...) image calculate the image coordinate value; And the benchmark pixel of image is set at zero point; Calculate from zero point pixel be which pixel, to generate the image coordinate value on X axle and the Y axle.
Below, utilize to have the as above vision detection system 100 of structure, and, specify an embodiment of the coordinate transformation method of application vision detection system of the present invention referring to figs. 1 through Fig. 3.
Fig. 2 is the figure of the worktable that vision detection system shown in Figure 1 is shown, a plurality of first mark, a plurality of second marks and a plurality of camera arrangement; Fig. 3 is the worktable that briefly shows vision detection system shown in Figure 1 owing to the figure that transfers the state that error or rotation error twist, and Fig. 4 is a precedence diagram of using the coordinate transformation method of vision detection system one embodiment of the present invention.
Before the coordinate transformation method of the vision detection system that present embodiment is described, rotation error and handover error are defined as follows.
Under desirable state, because worktable 120 carries out straight reciprocating motion along the Y axle, therefore the pitch angle with respect to X axle or Y axle can not appear.But owing to making reasons such as tolerance or assembling tolerance, the phenomenon with respect to X axle or the inclination of Y axle can appear in worktable 120 when carrying out straight reciprocating motion, be rotation error with worktable 120 with respect to the viewpoint definition that the X axle tilts in this manual in fact.
And, in the straight reciprocating motion of stand 130, because the degree of accuracy (accuracy) of stand 130 or precision repeatedly can deviation occur between desirable target feed position and actual transmitting place.In this manual, the target feed position that utilizes stand 130 desirable worktable 120 when X axle or y-axis shift send worktable 120 and the difference of actual transmitting place are defined as the handover error.
Referring to figs. 1 through Fig. 4; The coordinate transformation method of the vision detection system of present embodiment is to utilize to be formed on a plurality of reference marks on the worktable; Generate the absolute coordinates of body to be detected, this method comprises: the image that the image of first mark obtains step S110, first conversion formula generation step S120, second mark obtains step S130, rotation error calculation procedure S140, transfers Error Calculation step S150 and second conversion formula generation step S160.
At first, with a plurality of first marks (M1 ..., M9) absolute gantry coordinates value and a plurality of second mark (Ma, Mb ...) absolute gantry coordinates value input computing machine and storage respectively.Optional position on the worktable 120 is made as initial point, and this initial point becomes absolute gantry coordinates value with each displacement difference that is marked on X axle, the Y axle.
Absolute in this manual gantry coordinates value is meant, do not comprise the rotation error of stand 130 or transfers the accurate coordinates of targets value of error, is that operating personnel grasp information in advance, and deposits the gantry coordinates value in the computing machine in.
Afterwards, obtain to utilize each video camera 150 in the step at the image of said first mark, obtain respectively a plurality of first marks (M1 ..., M9) image (S110).As shown in Figure 2; Adjacent two first mark M1 and M2, M2 and M3 are got in the field, the visual field of same video camera 151,152; Obtaining the image of the first mark M1 and M2, M2 and M3, and from the image of the first mark M1 and M2, M2 and M3, obtain the image coordinate value of first mark.
Generate in the step at said first conversion formula; Utilize first mark (M1 ..., M9) image coordinate value and first mark (M1 ..., M9) the relation of absolute gantry coordinates value, generate first conversion formula (S120) that the image coordinate value is converted to the gantry coordinates value.
In order to generate first conversion formula, at first utilize first mark (M1 ..., M9) absolute gantry coordinates value and the image coordinate value of first mark, calculate and be used for representing the resolution (S121) of stand at the feeding amount of each image pixel.X axle resolution ReX and Y axle resolution ReY are respectively by following formulate.
At this, ReX is an X axle resolution, and ReY is a Y axle resolution, M
1X is through the absolute gantry coordinates value of one of them first mark M1 on the X axle in a pair of first mark in the image of video camera 150 acquisitions, M
1Y is the absolute gantry coordinates value of one of them first mark M1 on the Y axle in a pair of first mark in the image, M
2X is the absolute gantry coordinates value of another first mark M2 on the X axle in a pair of first mark in the image, M
2Y is the absolute gantry coordinates value of another first mark M2 on the Y axle in a pair of first mark in the image, m
1X is the image coordinate value of one of them first mark M1 on the X axle in a pair of first mark in the image, m
1Y is the image coordinate value of one of them first mark M1 on the Y axle in a pair of first mark in the image, m
2X is the image coordinate value of another first mark M2 on the X axle in a pair of first mark in the image, m
2Y is that another first mark M2 in a pair of first mark in the image is at Y axle epigraph coordinate figure.
In above-mentioned paragraph; With the first mark M1, M2 in field, the visual field FOV1 of leftmost side video camera 151 is that example is illustrated, but equally also is applicable to the first mark M8, M9 in field, the visual field FOV8 of video camera 158 of the first mark M2, M3 and the rightmost side in field, the visual field FOV2 of second video camera 152 in left side.
Afterwards, utilize first mark (M1 ..., M9) absolute gantry coordinates value, first mark (M1 ..., M9) image coordinate value and resolution, calculate the degree of tilt of video camera 150 with respect to the X axle.The degree of tilt θ of 150 pairs of X axles of each video camera is expressed as following formula (S122).
Afterwards, utilize first mark (M1 ..., M9) absolute gantry coordinates value, first mark (M1 ..., M9) image coordinate value, resolution and degree of tilt, the gantry coordinates value (S123) of computed image initial point.Following formulate passes through each image origin of each video camera 150 acquisition at the gantry coordinates value OX on the X axle, the image origin gantry coordinates value OY on the Y axle.
OX＝M
1X-m
1x×ReX
OY＝M
1Y-m
1y×ReY-m
1x×ReX×tanθ
Afterwards, utilize first mark (M1 ..., M9) the gantry coordinates value of image coordinate value, resolution, degree of tilt and image origin, generate first conversion formula (S124) that the image coordinate value is converted to the gantry coordinates value.First conversion formula is expressed as following formula.
WX＝OX+wx×ReX
WY＝OY+wy×ReY+wx×ReX×tanθ
At this, WX is the gantry coordinates value on the X axle, and WY is the gantry coordinates value on the Y axle, and OX is the gantry coordinates value of image origin on the X axle, and OY is the gantry coordinates value of image origin on the Y axle, and wx is the image coordinate value on the X axle, and wy is a Y axle epigraph coordinate figure.
Obtain to utilize leftmost side video camera 151 and rightmost side video camera 158 in a plurality of video cameras 150 in the step at said second marking image, obtain respectively second mark (Ma, Mb ...) image (S130).As shown in Figure 3; Utilize leftmost side video camera; Acquisition in a plurality of second marks on an end of worktable 120 two second mark Ma of disposed adjacent, the image of Mc; Utilize rightmost side video camera 158, obtain two second mark Mb of disposed adjacent on the other end of worktable 120, the image of Md, and obtain the real image coordinate figure of second mark by the image of second mark.
In this manual, the real image coordinate figure is meant that comprising rotation error perhaps transfers error, and through the video camera 150 actual image coordinate values that record.
In said rotation error calculation procedure, utilize second mark (Ma, Mb ...) real image coordinate figure and second mark (Ma, Mb ...) the relation of actual table rack coordinate value, the rotation error of evaluation work platform 120 (S140).
In order to calculate rotation error; At first a plurality of second marks (Ma, Mb ...) in a flag settings adjacent with the first mark M1 of the leftmost side be mark a (Ma); The flag settings of configuration of in a plurality of second marks, being separated by from mark a along the X axle is mark b (Mb); The configuration of in a plurality of second marks, being separated by from mark a (Ma) along the Y axle; And a flag settings adjacent with mark a be mark c (Mc), a flag settings of the configuration of in a plurality of second marks, being separated by from mark c along the X axle be mark d (Md) (S141).In the present embodiment, it is identical that mark a (Ma) and the absolute gantry coordinates value of mark b (Mb) on the Y axle come down to, and mark c (Mc) in fact also is identical with the absolute gantry coordinates value of mark d (Md) on the Y axle.
Afterwards, obtain pitch angle ab (the Δ θ of the straight line of linkage flag a (Ma) and mark b (Mb) to the X axle
Ab) (S142).Pitch angle ab (Δ θ
Ab) computing formula following.
Δθ
ab＝sin
-1[(Ya′-Yb′)/((Xb-Xa)
2+(Yb-Ya)
2)
1/2]
At this; Ya ' is the actual table rack coordinate value of mark a (Ma) on the Y axle; Yb ' is the actual table rack coordinate value of mark b (Mb) on the Y axle, and Xa is the absolute gantry coordinates value of mark a (Ma) on the X axle, and Ya is the absolute gantry coordinates value of mark a (Ma) on the Y axle; Xb is the absolute gantry coordinates value of mark b (Mb) on the X axle, and Yb is the absolute gantry coordinates value of mark b (Mb) on the Y axle.
In this manual, actual table rack coordinate value is meant and contains rotation error or transfer the gantry coordinates value of error, is defined as the gantry coordinates value that actual coordinate value substitution first conversion formula of the actual image of measuring is obtained.
Therefore, Ya ' can be through obtaining real image coordinate figure substitution first conversion formula of mark a (Ma) on X axle, Y axle, and Yb ' can be through obtaining real image coordinate figure substitution first conversion formula of mark b (Mb) on X axle, Y axle.
Afterwards, obtain pitch angle cd (the Δ θ of the straight line of linkage flag c (Mc) and mark d (Md) to the X axle
Cd) (S143).Pitch angle cd (Δ θ
Cd) computing formula following.
Δθ
cd＝sin
-1[(Yc′-Yd′)/((Xd-Xc)
2+(Yc-Yd)
2)
1/2]
At this; Yc ' is the actual table rack coordinate value of mark c (Mc) on the Y axle; Yd ' is the actual table rack coordinate value of mark d (Md) on the Y axle, and Xc is the absolute gantry coordinates value of mark c (Mc) on the X axle, and Yc is the absolute gantry coordinates value of mark c (Mc) on the Y axle; Xd is the absolute gantry coordinates value of mark d (Md) on the X axle, and Yd is the absolute gantry coordinates value of mark d (Md) on the Y axle.
Therefore, Yc ' can be through obtaining real image coordinate figure substitution first conversion formula of mark c (Mc) on X axle, Y axle, and Yd ' can be through obtaining real image coordinate figure substitution first conversion formula of mark d (Md) on X axle, Y axle.
Afterwards, between mark a (Ma) and mark c (Mc), make that ab (Δ θ ab) cd to the pitch angle (Δ θ cd) produces linear change from the pitch angle, be used for the rotation error formula (S144) of the rotation error of evaluation work platform 120 with generation along the Y axle.The computing formula of rotation error (Δ θ (X)) is following.
Δθ(X)＝Δθ
ab+α(Δθ
cd-Δθ
ab)
At this, α is a rate variable, through formula α=(Y-Y
Top)/(Y-Y
Btm) try to achieve Y
TopThrough formula Y
Top=Ya '-Xtan Δ θ
AbTry to achieve Y
BtmThrough formula Y
Btm=Yc '-Xtan Δ θ
CdTry to achieve.
In said handover Error Calculation step, utilize second mark (Ma, Mb ...) absolute image coordinate value and second mark (Ma, Mb ...) the mutual relationship of actual table rack coordinate value, the handover error (S150) of evaluation work platform.
In this manual, absolute image coordinate value is meant the coordinate figure that absolute gantry coordinates value substitution first conversion formula is obtained, and is defined as the image coordinate value that does not comprise rotation error or transfer error.
In order to calculate the handover error, at first utilize actual table rack coordinate value, pitch angle ab (the Δ θ of absolute image coordinate value, mark a (Ma) or the mark b (Mb) of mark a (Ma) or mark b (Mb)
Ab), obtain and be used to represent promptly transfer error ab (S151) according to the mark a (Ma) of the variation of X axle and the handover error between the mark b (Mb).Utilize the absolute image coordinate value of mark a (Ma) and the actual table rack coordinate value of mark a (Ma) in the present embodiment.Handover error ab (Δ X on the X axle
Ab) and the Y axle on handover error ab (Δ Y
Ab) computing formula following.
ΔX
ab＝Xa′-(xa·ReX·cosΔθ
ab+ya·ReY·cosΔθ
ab)
ΔY
ab＝Ya′-(ya·ReY·cosΔθ
ab-xa·ReX·sinΔθ
ab)
At this, Xa ' is the actual table rack coordinate value of mark a (Ma) on the X axle, and xa is the absolute image coordinate value of mark a (Ma) on the X axle, and Ya ' is the actual table rack coordinate value of mark a (Ma) on the Y axle, and ya is the absolute image coordinate value of mark a (Ma) on the Y axle.Wherein said xa can be through obtaining absolute gantry coordinates value substitution first conversion formula of mark a (Ma) on X axle, Y axle, and said ya can be through obtaining absolute gantry coordinates value substitution first conversion formula of mark a (Ma) on X axle, Y axle.
Afterwards, utilize actual table rack coordinate value, pitch angle cd (the Δ θ of absolute image coordinate value, mark c (Mc) or the mark d (Md) of mark c (Mc) or mark d (Md)
Cd), obtain according to the mark c (Mc) of the variation on the X axle and the handover error between the mark d (Md) and promptly transfer error cd (S152).In the present embodiment, utilize the absolute image coordinate value of mark c (Mc) and the actual table rack coordinate value of mark c (Mc).Handover error cd (Δ X on the X axle
Cd) and the Y axle on handover error cd (Δ Y
Cd) computing formula following.
ΔX
cd＝Xc′-(xc·ReX·cosΔθ
cd+yc·ReY·cosΔθ
cd
ΔY
cd＝Yc′-(yc·ReY·cosΔθ
cd-xc·ReX·sinΔθ
cd
At this, Xc ' is the actual table rack coordinate value of mark c (Mc) on the X axle, and xc is the absolute image coordinate value of mark c (Mc) on the X axle, and Yc ' is the actual table rack coordinate value of mark c (Mc) on the Y axle, and yc is the absolute image coordinate value of mark c (Mc) on the Y axle.Wherein said xc can be through obtaining absolute gantry coordinates substitution first conversion formula of mark c (Mc) on X axle, Y axle, and said yc can be through obtaining absolute gantry coordinates substitution first conversion formula of mark c (Mc) on X axle, Y axle.
Afterwards, generation is transferred error term (S153) from transferring error ab linear change for the linearity of transferring error cd along the Y axle between mark a (Ma) and mark c (Mc).The X axis linear transfers error term and Y axis linear handover error term is used following formulate.
Δ X
Ab+ α (Δ X
Cd-Δ X
Ab) (the X axis linear is transferred error term)
Δ Y
Ab+ α (Δ Y
Cd-Δ Y
Ab) (the Y axis linear is transferred error term)
Afterwards, generate the camera angle compensation term (S154) of the difference at pitch angle between the compensation adjacent camera.X axle camera angle compensation term and Y axle camera angle compensation term are used following formulate.
-(OXn-OX1) (1-cos θ) (X axle camera angle compensation term)
-(OXn-OX1) sin θ (Y axle camera angle compensation term)
At this, OX1 is the X pillow block rack coordinate value through the image origin of 151 acquisitions of leftmost side video camera in a plurality of video cameras, and OXn is the X pillow block rack coordinate value through n the image origin that video camera obtained in left side in a plurality of video cameras.
Afterwards, generate plus-minus linear handover error term and camera angle compensation term and calculate the handover error formula (S155) of transferring error.The X axle is transferred error delta Xn and y-axis shift send the computing formula of error delta Yn following.
ΔXn＝ΔX
ab+α(ΔX
cd-ΔX
ab)-(OXn-OX1)(1-cosθ)
ΔYn＝ΔY
ab+α(ΔY
cd-ΔY
ab)-(OXn-OX1)·sinθ
Generate in the step at said second conversion formula; Through in first conversion formula plus-minus rotation error and transfer error and generate second conversion formula, said second conversion formula is with image coordinate value and the gantry coordinates value absolute coordinate (S160) that to convert to body 2 to be detected be benchmark.In this manual, the absolute coordinate that is benchmark with body 2 to be detected be defined as that handover error or rotation error through compensation stand 130 generate with the coordinate figure in the body 2 to be detected absolute coordinate system that is benchmark.The absolute coordinate that is benchmark with body 2 to be detected is expressed as the gantry coordinates value.Second conversion formula for X axle, Y axle is following.
NWX＝WX-wx·ReX·(1-cosΔθ)+ΔXn
NWY＝WY-wx·ReX·sinΔθ+ΔYn
At this, NWX is the absolute gantry coordinates value of body 2 to be detected on the X axle, and NWY is the absolute gantry coordinates value of body 2 to be detected on the Y axle.
Afterwards, during the zone that video camera 150 scannings are divided by mark c (Mc), mark d (Md), mark e (Me), mark f (Mf), also can carry out above-mentioned steps repeatedly, generating with body 2 to be detected is the absolute coordinate of benchmark.The result is, the whole zone to body 2 to be detected when transferring worktable 120 along Y direction generates absolute coordinate.
The vision detection system that aforesaid one embodiment of the invention are related and utilize the coordinate transformation method of this system; Do not adopt the external measurement device in addition; Be configured in second mark on the worktable and only utilize; Be directed against the detection operation of body to be detected, carry out the compensation operation of stand degree of accuracy simultaneously, the degree of accuracy that therefore can save stand reaches repeatedly precision and measures needed time and energy.
And; Even owing to reasons such as vibrations, impact, deformation cause detection system to change; Also can carry out the detection operation of body to be detected at any time, can also carry out the degree of accuracy or the compensation operation of precision repeatedly of stand simultaneously, therefore can save equipment and safeguard required funds.
And, do not stop degree of accuracy or the compensation operation of precision repeatedly that vision detection system also being carried out stand, therefore, can stably manage the detection line of vision detection system and body to be detected.
The present invention is not limited in the foregoing description and variation, and in the scope that claims are put down in writing, can be embodied as the embodiment of various ways.Under the situation that does not break away from the aim of the present invention that claims ask for protection, the flexible scope of those skilled in the art undoubtedly also belongs within protection scope of the present invention.
Claims (5)
1. vision detection system, comprising: worktable is used to support body to be detected; Stand is used to make said worktable on Y direction, to carry out straight reciprocating motion; A plurality of video cameras in order to obtain the image of said body to be detected or said worktable, along the X-direction configuration of being separated by, is characterized in that, comprising:
A plurality of first marks, along the X-direction of intersecting with said Y axle, being separated by is configured on the end of said worktable;
A plurality of second marks; First mark of wherein a part of second mark leftmost side from said a plurality of first marks begins; In a side of said worktable along the configuration of being separated by of said Y direction; And first mark of another part second mark rightmost side from said a plurality of first marks begins, at the opposite side of said worktable along the configuration of being separated by of said Y direction
Obtain the image of said a plurality of first marks, and convert the coordinate figure of this image to the gantry coordinates value; Obtain the image of said a plurality of second marks, and the coordinate figure of this image and gantry coordinates value are converted to body to be detected is the absolute coordinate of benchmark,
With the said body to be detected absolute coordinate that is benchmark is the coordinate figure that the degree of accuracy of said stand is compensated.
2. the coordinate transformation method of a vision detection system is characterized in that, this method is utilized vision detection system according to claim 1, and said method comprises:
The image of first mark obtains step, is used to obtain the image of said a plurality of first marks;
First conversion formula generates step, utilizes the mutual relationship of absolute gantry coordinates value of image coordinate value and said first mark of said first mark, generates first conversion formula that the image coordinate value is converted to the gantry coordinates value;
The image of second mark obtains step, is used to obtain the image of said a plurality of second marks;
The rotation error calculation procedure is utilized the mutual relationship of gantry coordinates value of image coordinate value and said second mark of said second mark, calculates to be used for representing that said worktable is in the rotation error of rectilinear motion with respect to the angle of inclination of said X axle;
Transfer the Error Calculation step; Utilize the mutual relationship of gantry coordinates value of image coordinate value and said second mark of said second mark, calculate the handover error that is used to represent said worktable difference between target feed position on said X axle or the said Y axle and actual transmitting place;
Second conversion formula generates step, said rotation error of plus-minus and said handover error on said first conversion formula, and being used for image coordinate value and gantry coordinates value are converted to body to be detected with generation is second conversion formula of the absolute coordinate of benchmark.
3. the coordinate transformation method of vision detection system according to claim 2 is characterized in that, said first conversion formula generates step and may further comprise the steps:
Utilize the absolute gantry coordinates value of said first mark and the image coordinate value of said first mark, calculate the resolution that is used for representing each image pixel stand feeding amount;
Utilize the image coordinate value and the said resolution of the absolute gantry coordinates value of said first mark, said first mark, calculate the degree of tilt of said video camera said X axle;
Utilize the image coordinate value of the absolute gantry coordinates value of said first mark, said first mark, said resolution and said degree of tilt, the gantry coordinates value of computed image initial point;
Utilize the gantry coordinates value of the image coordinate value of said first mark, said resolution, said degree of tilt and said image origin, generate first conversion formula that is used for the image coordinate value is converted to the gantry coordinates value,
Wherein said absolute gantry coordinates value is the preset coordinates value that does not comprise the rotation error of said stand or transfer error.
4. according to the coordinate transformation method of claim 2 or 3 described vision detection systems, it is characterized in that said rotation error calculation procedure may further comprise the steps:
One of them flag settings in said a plurality of second marks is mark a; The flag settings of configuration of in said a plurality of second marks, being separated by from said mark a along the X axle is mark b; The flag settings of configuration of in said a plurality of second marks, being separated by from said mark a along the Y axle is mark c, and a flag settings of the configuration of in said a plurality of second marks, being separated by from said mark c along the X axle is mark d;
Ask the pitch angle ab of the straight line of said mark a of connection and said mark b for said X axle;
Ask the pitch angle cd of the straight line of said mark c of connection and said mark d for said X axle;
Between said mark a and said mark c, the ab linear change is pitch angle cd from said pitch angle to make the pitch angle along said Y axle, is used to calculate the rotation error formula of the rotation error of said worktable with generation.
5. the coordinate transformation method of vision detection system according to claim 4 is characterized in that, said handover Error Calculation step comprises:
Ask the step of transferring error ab; Utilize actual table rack coordinate value, the said pitch angle ab of the absolute image coordinate value of said mark a or said mark b, said mark a or said mark b, obtain according to the said mark a of the variation on the X axle and the handover error between the said mark b;
Ask the step of transferring error cd; Utilize actual table rack coordinate value, the pitch angle cd of the absolute image coordinate value of said mark c or said mark d, said mark c or said mark d, obtain according to the said mark c of the variation on the X axle and the handover error between the said mark d;
The linear error term of transferring generates step, along the said Y axle linearity handover error term that between said mark a and said mark c, to generate from said handover error ab linear change be said handover error cd;
The camera angle compensation term generates step, and said camera angle compensation term is used to compensate poor between the pitch angle of adjacent camera;
Transfer error formula and generate step, said handover error formula calculates said handover error through said linear error term and the said camera angle compensation term transferred of plus-minus,
Wherein, Said image absolute value is the coordinate figure that said first conversion formula of said absolute gantry coordinates value substitution is obtained; It is the image coordinate value that does not comprise rotation error or transfer error; Said actual table rack coordinate value is the gantry coordinates value that comprises rotation error or transfer error, and said real image coordinate figure is the actual image coordinate value of measuring that comprises rotation error or transfer error.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2009-0039713 | 2009-05-07 | ||
| KR1020090039713A KR101128913B1 (en) | 2009-05-07 | 2009-05-07 | Vision inspection system and method for converting coordinates using the same |
| PCT/KR2010/002253 WO2010128759A2 (en) | 2009-05-07 | 2010-04-13 | Vision inspection system and coordinate conversion method using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102422121A true CN102422121A (en) | 2012-04-18 |
| CN102422121B CN102422121B (en) | 2014-06-18 |
Family
ID=43050594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080020216.4A Expired - Fee Related CN102422121B (en) | 2009-05-07 | 2010-04-13 | Vision inspection system and coordinate conversion method using same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5424144B2 (en) |
| KR (1) | KR101128913B1 (en) |
| CN (1) | CN102422121B (en) |
| TW (1) | TWI457534B (en) |
| WO (1) | WO2010128759A2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634246A (en) * | 2015-02-03 | 2015-05-20 | 李安澜 | Floating type stereo visual measuring system and measuring method for coordinates of object space |
| CN108489994A (en) * | 2018-03-30 | 2018-09-04 | 湖北工程学院 | Roll-to-roll polymer facial mask is examined and control method |
| CN110320496A (en) * | 2019-06-25 | 2019-10-11 | 清华大学 | A kind of indoor orientation method and device |
| CN111247389A (en) * | 2019-03-29 | 2020-06-05 | 深圳市大疆创新科技有限公司 | Data processing method and device for shooting equipment and image processing equipment |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5674149B2 (en) * | 2011-05-30 | 2015-02-25 | 新東工業株式会社 | Cumulative lead error measuring device and measuring method for ball screw shaft |
| CN102810058B (en) * | 2011-05-31 | 2016-02-03 | 鸿富锦精密工业（深圳）有限公司 | Measure programming coordinates system updating system and method |
| FI127560B (en) | 2015-06-24 | 2018-09-14 | Murata Manufacturing Co | Digital circuitry and method for calculating inclinometer angles |
| KR102257055B1 (en) | 2020-11-30 | 2021-05-28 | 이재준 | Smart vision alignment system and smart vision alignment method using thereof |
| KR20230126012A (en) * | 2022-02-22 | 2023-08-29 | 엘에스일렉트릭(주) | Method and apparatus for parameter calibration of affine transformation, and motion control system using the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1392950A (en) * | 2000-08-18 | 2003-01-22 | 学校法人中央大学 | Positional error evaluation method for mobile device and movement accuracy improving method based on evaluation result |
| CN1645044A (en) * | 2004-01-19 | 2005-07-27 | 株式会社三丰 | Method and device for determining a coordinate system for an object being measured |
| CN1696605A (en) * | 2004-05-14 | 2005-11-16 | 佳能株式会社 | Marker placement information estimating method and information processing device |
| CN1734232A (en) * | 2004-08-09 | 2006-02-15 | 株式会社三丰 | Reference coordinate calculating method, reference coordinate calculating program, recording medium thereof, reference plate and form measuring machine |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0807352A1 (en) * | 1995-01-31 | 1997-11-19 | Transcenic, Inc | Spatial referenced photography |
| JP2003197502A (en) * | 2001-12-26 | 2003-07-11 | Nikon Corp | Measuring method and exposing method, aligner, and method for manufacturing device |
| US20050175217A1 (en) * | 2004-02-05 | 2005-08-11 | Mueller Louis F. | Using target images to determine a location of a stage |
| JP2007034168A (en) * | 2005-07-29 | 2007-02-08 | Fujifilm Holdings Corp | Method and device for acquiring stage position change information |
| JP4261535B2 (en) * | 2005-09-28 | 2009-04-30 | アドバンスド・マスク・インスペクション・テクノロジー株式会社 | Alignment method and evaluation method in mask inspection apparatus |
| JP4884828B2 (en) * | 2006-05-01 | 2012-02-29 | 株式会社日本マイクロニクス | Processing device for display panel |
| JP2008083227A (en) | 2006-09-26 | 2008-04-10 | Fujifilm Corp | Device and method for measuring alignment mark position and drawing device |
| JP2009170559A (en) * | 2008-01-14 | 2009-07-30 | Canon Inc | Exposure device, and device manufacturing method |
| KR100863700B1 (en) | 2008-02-18 | 2008-10-15 | 에스엔유 프리시젼 주식회사 | Vision inspection system and method for inspecting workpiece using the same |
-
2009
- 2009-05-07 KR KR1020090039713A patent/KR101128913B1/en not_active IP Right Cessation
-
2010
- 2010-04-13 JP JP2012509722A patent/JP5424144B2/en not_active Expired - Fee Related
- 2010-04-13 WO PCT/KR2010/002253 patent/WO2010128759A2/en active Application Filing
- 2010-04-13 CN CN201080020216.4A patent/CN102422121B/en not_active Expired - Fee Related
- 2010-04-23 TW TW099112993A patent/TWI457534B/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1392950A (en) * | 2000-08-18 | 2003-01-22 | 学校法人中央大学 | Positional error evaluation method for mobile device and movement accuracy improving method based on evaluation result |
| CN1645044A (en) * | 2004-01-19 | 2005-07-27 | 株式会社三丰 | Method and device for determining a coordinate system for an object being measured |
| CN1696605A (en) * | 2004-05-14 | 2005-11-16 | 佳能株式会社 | Marker placement information estimating method and information processing device |
| CN1734232A (en) * | 2004-08-09 | 2006-02-15 | 株式会社三丰 | Reference coordinate calculating method, reference coordinate calculating program, recording medium thereof, reference plate and form measuring machine |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104634246A (en) * | 2015-02-03 | 2015-05-20 | 李安澜 | Floating type stereo visual measuring system and measuring method for coordinates of object space |
| CN104634246B (en) * | 2015-02-03 | 2017-04-12 | 李安澜 | Floating type stereo visual measuring system and measuring method for coordinates of object space |
| CN108489994A (en) * | 2018-03-30 | 2018-09-04 | 湖北工程学院 | Roll-to-roll polymer facial mask is examined and control method |
| CN111247389A (en) * | 2019-03-29 | 2020-06-05 | 深圳市大疆创新科技有限公司 | Data processing method and device for shooting equipment and image processing equipment |
| CN110320496A (en) * | 2019-06-25 | 2019-10-11 | 清华大学 | A kind of indoor orientation method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102422121B (en) | 2014-06-18 |
| JP5424144B2 (en) | 2014-02-26 |
| JP2012526278A (en) | 2012-10-25 |
| WO2010128759A3 (en) | 2011-01-20 |
| TW201107708A (en) | 2011-03-01 |
| TWI457534B (en) | 2014-10-21 |
| KR101128913B1 (en) | 2012-03-27 |
| WO2010128759A2 (en) | 2010-11-11 |
| KR20100120864A (en) | 2010-11-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102422121B (en) | Vision inspection system and coordinate conversion method using same | |
| CN104567690B (en) | A kind of laser beam field calibration method and device | |
| CN1246087A (en) | Device and method for calibrating robot | |
| US8037615B2 (en) | Process and device for determining the alignment of two rotatable machine parts, the alignment of two hollow cylindrical machine parts or for testing a component for straightness along a lengthwise side | |
| US8650767B2 (en) | Coordinates measuring head unit and coordinates measuring machine | |
| US6701268B2 (en) | Method for calibrating scanning probe and computer-readable medium therefor | |
| TW200949234A (en) | Optical inspection system, and an inspection method for inspecting objects in which the said system is used | |
| CN111982019B (en) | High-precision blade section contour detection method based on line-structured light sensor | |
| CN111862220B (en) | Correction method and device for UVW platform calibration, deviation correction method and alignment system | |
| CN109227551B (en) | Hand-eye coordinate conversion method for visual positioning robot | |
| US11152230B2 (en) | Device and method for bonding alignment | |
| TWI592252B (en) | Angular error correction device and method for machine tools | |
| CN102506736B (en) | Contactless online detection method for round billet deflection | |
| CN205785105U (en) | A kind of detector detecting plane | |
| JP5840909B2 (en) | Inspection apparatus and method | |
| CN112894490B (en) | Method for realizing perpendicularity error detection of numerical control machine tool based on rotating L-shaped array | |
| CN110666591A (en) | Numerical control machine tool straight error identification method based on combined surface type | |
| KR101094313B1 (en) | Calibration Method and Calibration Jig Between Robot TCP and LVS | |
| CN113465518B (en) | Method for eliminating mechanical error generated by installation of laser height measuring mechanism | |
| CN113639633B (en) | Clamp angular zero alignment method in multi-axis vision measurement device | |
| CN102873244B (en) | Bundled die forging press structure and method for controlling vertical coaxiality of bundled die forging press structure | |
| CN216770503U (en) | Device for monitoring centering deviation of ship power device | |
| JP2020128890A (en) | Tilted x-ray inspection method, tilted x-ray inspection apparatus and its accuracy evaluation method | |
| CN105841636B (en) | Optical axis and object plane measuring for verticality method based on parts moving linearly error compensation | |
| CN116592757A (en) | Two-dimensional precision compensation method of measurement system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140618 Termination date: 20170413 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |