CN102166748A

CN102166748A - Automatic manipulator film feeding and taking device

Info

Publication number: CN102166748A
Application number: CN2010106137601A
Authority: CN
Inventors: 邢薇; 王肇志
Original assignee: Institute of Optics and Electronics of CAS
Current assignee: Institute of Optics and Electronics of CAS
Priority date: 2010-12-30
Filing date: 2010-12-30
Publication date: 2011-08-31

Abstract

The invention relates to an automatic manipulator film feeding and taking device which comprises two grapples, six hinges, two connecting rods, two grippers, a positioning shaft, a photoelectric switch, a main shaft, a shaft sleeve, a film clamp foot, a blocking piece and a computer, wherein the two grippers are connected with the shaft sleeve through a fifth hinge and a sixth hinge; one ends of the two connecting rods are respectively connected with the main shaft through a third hinge and a fourth hinge; the end surfaces of the two grapples are connected with the end surfaces of the sheet clamping feet, and the other ends of the two connecting rods are respectively connected with the middle parts of the two grapples through a first hinge and a second hinge; the positioning shaft is arranged on the shaft sleeve and operates together; the photoelectric switch is fixed on the shaft sleeve; the photoelectric switch positions the film feeding and taking positions of the shaft sleeve through the positioning baffle piece on the positioning shaft, the computer detects the position of the shaft sleeve through a feedback signal of the photoelectric switch, and controls the movement of the main shaft according to the position state of the shaft sleeve, so that the two grapples are opened and closed at specified positions, and the film feeding and taking are provided for exposure work.

Description

A kind of automatic manipulator film conveying and withdrawing device

Technical field

The present invention relates to a kind of automatic manipulator film conveying and withdrawing device, be applied in the electron beam exposure apparatus, the workpiece that also can be used in the industrial automation send fields such as getting transmission.

Background technology

The location that film conveying and withdrawing mechanism in the past adopts two unsteady slide plates and spring to realize each mode bit of manipulator is difficult to realize high-precision location; Use for a long time, because the wearing and tearing of mechanical part, the stress fatigue of spring etc. cause manipulator to the collision of sheet folder or grab less than phenomenons such as sheets easily.Problem such as low at above-mentioned manipulator positioning accuracy, that reliability is not high.

Summary of the invention

Technology of the present invention is dealt with problems and is: manipulator send before exposure after sheet and the exposure when getting sheet and handgrip opening with closed promptly and accurately can be finished the film conveying and withdrawing function reliably.

For realizing described purpose, the technical scheme that a kind of automatic manipulator film conveying and withdrawing of the present invention device solves technical problem is adopted is to be made up of first grapple, second grapple, first hinge, second hinge, the 3rd hinge, the 4th hinge, the 5th hinge, the 6th hinge, first connecting rod, second connecting rod, first handgrip, second handgrip, locating shaft, optoelectronic switch, main shaft, axle sleeve, sheet folder, sheet pinch and catch, and first handgrip links to each other with axle sleeve with the 6th hinge by the 5th hinge with second handgrip; One end of first connecting rod, second connecting rod links to each other with main shaft by the 3rd hinge, the 4th hinge respectively; The end face of first grapple and second grapple links to each other with the end face of sheet pinch, and the other end of first connecting rod, second connecting rod links to each other with the middle part of first grapple and second grapple by first hinge, second hinge again respectively; Locating shaft is installed on the axle sleeve and with axle sleeve and moves; Optoelectronic switch is fixed on the axle sleeve base estrade; By optoelectronic switch by the locating stop piece on the locating shaft to axle sleeve send sheet, the position of getting sheet positions, computer is surveyed the residing position of axle sleeve by the feedback signal of optoelectronic switch, and computer is controlled the motion of main shaft according to the residing location status of axle sleeve, make first grapple and second grapple position open and close, send sheet and get sheet for exposure machine exposure work provides in regulation.

In the such scheme, when the main shaft of manipulator is done when seesawing, main shaft promotes the motion before and after doing of first connecting rod, second connecting rod by first hinge and second hinge; Because first connecting rod, second connecting rod adopt hinge to be connected with first handgrip, second handgrip and main shaft, therefore, when main shaft moved forward and backward, first handgrip, second handgrip were done the push-and-pull campaign of first handgrip, second handgrip by first connecting rod and second connecting rod and are opened and closing motion.

Principle of the present invention is: opening with closure of film conveying and withdrawing hand grip links to each other with the rectilinear motion main shaft by hinge, and the cooperation of the actuating mechanism of the motion of rectilinear motion main shaft and manipulator part makes that the film conveying and withdrawing manipulator can be closed in place or open to finish the film conveying and withdrawing action.Assurance sheet folder can reliablely and stablely be sent into wafer-supporting platform.Motion has two guiding moving axis to guarantee the straight-line guidance precision of film conveying and withdrawing manipulator.By optoelectronic switch by the locating stop piece on the locating shaft, survey the residing position of manipulator, and feed back to computer, computer then carries out motion control according to the residing location status of manipulator to manipulator, make the position open and close of manipulator, finish the function of film conveying and withdrawing in regulation.

The invention has the beneficial effects as follows: innovative design of the present invention the reliable electron beam exposure apparatus of transmission sheet transmission sheet device, it also can be used on the general workpiece transfer device in addition, device of the present invention is in the exposure machine course of work, the silicon chip that manipulator can will expose as required automatically takes out from the silicon chip storehouse and is placed on the wafer-supporting platform, and the silicon chip that will expose automatically again after waiting to expose takes out from wafer-supporting platform and is put back into the silicon chip storehouse.So promptly reduced the site error that manually when troublesome operation of putting, being carried out when getting silicon chip and placement, produces, collision of when also having avoided manually-operated sheet having been pressed from both sides and the pollution that silicon chip is caused.Simultaneously, also overcome because the wearing and tearing of mechanical part, the stress fatigue of spring etc. cause manipulator to the collision of sheet folder or grab less than phenomenons such as sheets easily.Automatic manipulator film conveying and withdrawing device of the present invention, the precision of rectilinear motion height, volume is little, reliability, good stability, accurately positioning mechanical arm, reliable and stable pick-and-place sheet are finished the film conveying and withdrawing function, have also improved operating efficiency simultaneously, have guaranteed photoetching quality.

Description of drawings

Fig. 1 is a systematic schematic diagram of the present invention;

Fig. 2 is the locating shaft schematic diagram;

Fig. 3 is the optoelectronic switch schematic diagram.

The element explanation:

First grapple, 1, the second grapple 2,

First hinge, 3, the second hinges 4,

The 3rd hinge 5, the four hinges 6,

The 5th hinge 7, the six hinges 8,

First connecting rod 9, second connecting rod 10,

First handgrip, 11, the second handgrips 12,

Locating shaft 13, optoelectronic switch 14,

Main shaft 15, axle sleeve 16,

Sheet folder 17, sheet pinch 18,

Catch 19.

The specific embodiment

For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.

As shown in Figure 1, the embodiment of the invention is made up of first grapple 1, second grapple 2, first hinge 3, second hinge 4, the 3rd hinge 5, the 4th hinge 6, the 5th hinge 7, the 6th hinge 8, first connecting rod 9, second connecting rod 10, first handgrip 11, second handgrip 12, locating shaft 13, optoelectronic switch 14, main shaft 15, axle sleeve 16, sheet folder 17, sheet pinch 18, catch 19 and computer.

First handgrip 11, second handgrip 12 link to each other with axle sleeve 16 by the 5th hinge 7, the 6th hinge 8.One end of first connecting rod 9, second connecting rod 10 links to each other with main shaft 15 by the 3rd hinge 5, the 4th hinge 6 respectively; The end face of first grapple 1 and second grapple 2 links to each other with the end face of sheet pinch 18, and the other end of first connecting rod 9, second connecting rod 10 links to each other with the middle part of first grapple 1 and second grapple 2 by first hinge 3, second hinge 4 again respectively; Locating shaft 13 is installed on the axle sleeve 16, and with axle sleeve 16 operations, optoelectronic switch 14 is fixed on the base estrade of axle sleeve 16.By optoelectronic switch 14 by 19 pairs of axle sleeves 16 of the locating stop piece on the locating shaft 13 send sheet, the position of getting sheet positions, computer is surveyed axle sleeve 16 residing positions by the feedback signal of optoelectronic switch 14, computer is controlled the motion of main shaft 15 according to axle sleeve 16 residing location status, make first grapple 1 and second grapple 2 position open and close, finish the function of film conveying and withdrawing in regulation.When the needs manipulator takes out silicon chip from valut, main shaft 15 begins to travel forward from start bit with axle sleeve 16, when moving to when getting the sheet position, locate by the locating stop piece on the locating shaft 13 19 by optoelectronic switch 14, detect axle sleeve 16 residing positions, and feed back to computer, by computer control, make axle sleeve 16 stop to travel forward, main shaft 15 then continuation moves forward.At this moment, because axle sleeve 16 stop motion, therefore under the effect of hinge first hinge 3, second hinge 4, the 3rd hinge 5, the 4th hinge 6, the 5th hinge 7, the 6th hinge 8, the 15 proal whiles of main shaft, first connecting rod 9, second connecting rod 10 promote first handgrip 11, second handgrip 12, first grapple 1, second grapple 2 are opened, cross 18 stop motions afterwards of sheet pinch.Afterwards, axle sleeve 16 is motionless, main shaft 15 moves backward, simultaneously, at hinge first hinge 3, second hinge 4, the 3rd hinge 5, the 4th hinge 6, the 5th hinge 7, under the effect of the 6th hinge 8, first connecting rod 9, second connecting rod 10 pulls back first handgrip 11, second handgrip 12 makes first grapple 1 again, second grapple, 2 closures, first grapple 1, second grapple 2 catches on sheet pinch 18, at this moment, main shaft 15 hauls sheet folder 17 and does motion backward with axle sleeve 16, sheet folder 17 is taken out from valut, on slide holder, first grapple 1, second grapple 2 opens, put down sheet folder 17, get back to original position, finish the sheet task of getting.When exposure finishes when needing that sheet folder 17 sent back to valut, main shaft 15 is pushing away sheet folder 17 and is running to forward when sending the sheet position with axle sleeve 16 earlier, and by optoelectronic switch 14 location, axle sleeve 16 stops to travel forward, main shaft 15 is pushing away sheet folder 17 to be continued to move ahead, after sheet folder 17 was sent into valut, under the effect of hinge, first grapple 1, second grapple 2 opened, put down sheet folder 17, motion backward returns to original position again, finishes the sheet task of sending.The present invention is applied in the exposure machine course of work, and the silicon chip that manipulator can will expose as required automatically takes out from valut and is placed on the wafer-supporting platform, and the silicon chip that will expose automatically again after waiting to expose takes out from wafer-supporting platform and is put back into the valut.

Fig. 2 illustrates the structure of locating shaft, and catch 19 is installed on the locating shaft 13, and locating shaft 13 is installed on the axle sleeve 16, and with axle sleeve 16 operations, catch 19 is an opaque material, can block the light that is sent by emission photodiode 141.

Fig. 3 illustrates the structure of optoelectronic switch, and a slit 143 is arranged on the optoelectronic switch 14, and there are an emission photodiode 141 and a reception photodiode 142 in 143 the both sides in the slit.When not having shelter in the middle of the slit 143, receive photodiode 142 and can receive the optical signal that sends by emission photodiode 141, when in the middle of the slit 143 shelter being arranged, receive photodiode 142 and just do not receive the optical signal that sends by emission photodiode 141.Optoelectronic switch 14 is given computer with this signal feedback, and computer is then according to this signal that is detected, and judges whether axle sleeve 16 runs to send, get the sheet position.

During work, when not having catch 19 to pass through in the middle of the slit 143 of optoelectronic switch 14, computer may detect the photosignal that is provided by optoelectronic switch 14, and at this moment, axle sleeve 16 can continue operation; And when catch 19 passes through in the middle of the slit 143 of optoelectronic switch 14, because catch 19 works as light live, computer is then surveyed the photosignal that provides less than by optoelectronic switch 14, at this moment, illustrating that axle sleeve 16 has run to send, gets the sheet position, and it is out of service that computer will be controlled axle sleeve 16.

The above; only be the specific embodiment among the present invention; but protection scope of the present invention is not limited thereto; anyly be familiar with the people of this technology in the disclosed technical scope of the present invention; can understand conversion or the replacement expected; all should be encompassed in of the present invention comprising within the scope, therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims

1. automatic manipulator film conveying and withdrawing device, it is characterized in that: this device is by first grapple (1), second grapple (2), first hinge (3), second hinge (4), the 3rd hinge (5), the 4th hinge (6), the 5th hinge (7), the 6th hinge (8), first connecting rod (9), second connecting rod (10), first handgrip (11), second handgrip (12), locating shaft (13), optoelectronic switch (14), main shaft (15), axle sleeve (16), sheet folder (17), sheet pinch (18), catch (19) and computer are formed, and first handgrip (11) links to each other with axle sleeve (16) with the 6th hinge (8) by the 5th hinge (7) with second handgrip (12); One end of first connecting rod (9), second connecting rod (10) links to each other with main shaft (15) by the 3rd hinge (5), the 4th hinge (6) respectively; The end face of first grapple (1) and second grapple (2) links to each other with the end face of sheet pinch (18), and the other end of first connecting rod (9), second connecting rod (10) links to each other with the middle part of first grapple 1 and second grapple (2) by first hinge (3), second hinge (4) again respectively; (13 are installed in axle sleeve (16) goes up and moves with axle sleeve (16) locating shaft; Optoelectronic switch (14) is fixed on the base estrade of axle sleeve (16); By optoelectronic switch (14) by the locating stop piece (19) on the locating shaft (13) to axle sleeve (16) send sheet, the position of getting sheet positions, computer is surveyed the residing position of axle sleeve (16) by the feedback signal of optoelectronic switch (14), and computer is controlled the motion of main shaft (15) according to the residing location status of axle sleeve (16), make first grapple (1) and second grapple (2) position open and close, send sheet and get sheet for exposure machine exposure work provides in regulation.

2. automatic manipulator film conveying and withdrawing device according to claim 1, it is characterized in that: when the main shaft (15) of manipulator is done when seesawing, main shaft (15) promotes the motion before and after doing of first connecting rod (9), second connecting rod (10) by first hinge (3) and second hinge (4); Because first connecting rod (9), second connecting rod (10) adopt hinge to be connected with first handgrip (11), second handgrip (12) and main shaft (15), therefore, main shaft (15) is when moving forward and backward, and first handgrip (11), second handgrip (12) are done the push-and-pull campaign of first handgrip (11), second handgrip (12) by first connecting rod (9) and second connecting rod (10) and opened and closing motion.