CN102141735A - Silicon chip edge protection device and application method thereof - Google Patents
Silicon chip edge protection device and application method thereof Download PDFInfo
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- CN102141735A CN102141735A CN 201010102423 CN201010102423A CN102141735A CN 102141735 A CN102141735 A CN 102141735A CN 201010102423 CN201010102423 CN 201010102423 CN 201010102423 A CN201010102423 A CN 201010102423A CN 102141735 A CN102141735 A CN 102141735A
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- 230000004224 protection Effects 0.000 title claims abstract description 81
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 43
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- 238000006073 displacement reaction Methods 0.000 claims description 7
- 210000004907 gland Anatomy 0.000 claims description 6
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- 230000003139 buffering effect Effects 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims 1
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- 238000006243 chemical reaction Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 9
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- 239000004065 semiconductor Substances 0.000 description 2
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Abstract
The invention discloses a silicon chip edge protection device and an application method thereof. A cylinder, one end of which is arranged on a fixed disc and the other end of which is arranged on a three-eccentric cam disc, horizontally stretches and swings to drive the three-eccentric cam disc arranged on the fixed disc to perform circular motion; by a method of converting a linear motion into a plurality of equal synchronous radial motions in a vector conversion form, the linear swing is converted into the circular motion; the three-eccentric cam disc drives eccentric grooves on the cam disc to perform circular motion around respective circle center, so that a circular motion is converted a plurality of synchronous eccentric motions; the three-eccentric cam disc drives cams in the eccentric grooves to perform radial motion, so that the plurality of synchronous eccentric motions are converted into synchronous radial motions; and cam followers drive protection claws to perform radial motion, and the protection claws grip or lay down protection rings, so that exchange of the protection rings or other articles is realized. The device has high precision, good reliability, high repeated precision, simple structure, low need of power source and high synchronism.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to a kind of silicon chip edge protective device and application process thereof.
Background technology
Lithographic equipment is mainly used in the manufacturing of integrated circuit (IC) or other microdevices.By lithographic equipment, mask pattern can be imaged on the wafer that is coated with photoresist, for example semiconductor or LCD plate.Lithographic equipment exposes by projection objective, the mask graph of design is transferred on the photoresist, and as the core parts of lithographic equipment, the silicon chip edge protective device has significant effects to the defencive function of realizing silicon chip edge in the negative adhesive process exposure process.
In order to obtain imaging effect, photoresist is coated on the silicon chip, can produce a kind of photochromics of etch pattern after the exposure, also claim photoresist (abbreviation resist) or light-sensitive emulsion, also there is the area to claim photoresistance or photoresist, can be divided into positive photoetching rubber (positive glue) and negative photoresist (negative glue) two classes, the photoresist that exposed portion is developed the agent dissolving is called positive photoetching rubber, and the photoresist that non-exposed portion is developed the liquid dissolving is called negative photoresist.The silicon chip edge protective device is exactly a kind of device that produces for negative glue photoetching process.
Known negative glue photoetching method is the independent cover product on the photoetching production line, rather than is integrated on the litho machine.Doing like this to increase the manufacturing of the product time, has improved the purchase cost and the makers' expense of equipment simultaneously.Independent edge-protected machine can make the precision of silicon chip edge protective device reduce greatly, can produce very high useless sheet rate like this.Efficiency ratio is lower.Therefore, how to provide a kind of more economic and high efficiency silicon chip edge protective device to become a big problem of industry research.
Summary of the invention
A kind of silicon chip edge protective device provided by the invention and application process thereof; finish a plurality of radially simultaneous forces by a power source; make a kind of straight-line displacement be converted into a plurality of five equilibrium radial displacements; thereby realize the exchange of protection ring, precision height, good reliability; the repeatable accuracy height; simple in structure, need power source few, the synchronism height.
In order to achieve the above object, the invention provides a kind of silicon chip edge protective device, comprise:
Shaft collar;
Three offset cam dishes, it is installed on the shaft collar, has some eccentric groves that are evenly distributed on this three offset cams dish; Described three offset cam dishes are annulus, and described eccentric grove is groove or non-groove, and its center geometric locus is by D1D2, D2D3, D3D4 three parts are formed, and in each centrode curve one section has certain amount of bias with three offset cam disk center, and the centrode curvilinear equation is:
Wherein, it is the center of circle that r1 is expressed as with O (0,0), and radius is the D1D2 circular arc of r1;
It is the center of circle that r2 is expressed as with O (0,0), and radius is the D3D4 circular arc of r1;
R is expressed as that (a2 b2) is the center of circle, and radius is the circular arc of r with o2;
θ
oBe ∠ XOO2;
θ is ∠ XOD3;
Every geometric locus and other geometric locus all evenly distribute with the center of offset cam dish;
Cylinder mechanism, the one head is installed on the shaft collar, and the other end is installed on the three offset cam dishes; Described cylinder mechanism adopt pneumatic cylinder as motive power or hydraulic cylinder as motive power;
Cam Follower, its correspondence are arranged in the eccentric grove of three offset cam dishes;
The protection pawl, it is installed on the Cam Follower, and is embedded in the shaft collar, and this protection pawl has overload protection function to protection ring, and the protection pawl is to fixedly folding fixation;
Protection ring, its be installed in shaft collar under;
Bearing holder (housing, cover), it is installed on the shaft collar, and three offset cam dishes are that sliding axle is made circular motion with the face of cylinder of bearing holder (housing, cover);
Steel ball, it is arranged on the bearing holder (housing, cover), forms a sliding pair between bearing holder (housing, cover) and three offset cam dishes, plays vibration damping and reduces rubbing action, and three offset cam dishes can be floated from shaft collar, and friction force reduces, high-efficient operation;
Described silicon chip edge protective device also comprises:
Register pin, it is installed on the shaft collar;
The spring protection pin passes spring and is installed on the register pin, and the protection pawl was played buffering and carried protective effect;
Ball screw is installed on the protection pawl termination, and this ball screw is done radial motion with the protection pawl respectively, and protection ring is played Self-centering Action, and along with ball screw moves to the protection ring center simultaneously, the protection ring of the script off-centre that makes revert to the center;
Described silicon chip edge protective device also comprises:
Interior hexagonal flush end holding screw, inflatable body, proximity transducer, silicon chip edge cover sheet parts, cross recessed countersunk head sscrew, slotted screw, X be to adjustment seat, sides nut, first steel ball, cover plate, pressing plate, second steel ball, plug screw, briquetting, gland; Screw;
Interior hexagonal flush end holding screw is installed in X on adjustment seat, regulate X to displacement; Whether proximity transducer is installed on the shaft collar, be used for measuring protection ring and contact with the silicon chip edge protection fully; Cross recessed countersunk head sscrew passes X and is installed on the shaft collar to adjustment seat, is used for fixing X to adjustment seat; Slotted screw passes bearing holder (housing, cover) and is connected with shaft collar; Sides nut is installed on the ball screw; Plug screw is installed in stationary shaft bearing sleeve on the shaft collar; Silicon chip edge cover sheet parts are installed on the shaft collar, and inflatable body is installed on the shaft collar, and first steel ball is put into cover plate, and cover plate is put into the pressing plate screw-driving, and second steel ball is put into briquetting, and briquetting is used screw-driving after putting into gland.
After the cylinder mechanism ventilation, cylinder mechanism drives three offset cam dishes and moves in a circle, and three offset cam dribbling moving cam followers are done radial motion, and Cam Follower drives the protection pawl and does radial motion together, and protection ring is picked up or put down, and realizes the exchange of protection ring.
The present invention also provides a kind of silicon chip edge device application process, comprises following steps:
Step 1, the horizontal telescopic oscillating of cylinder drive three offset cam dishes and carry out circular motion, thereby the straight line swing is converted into circular motion;
Eccentric grove on step 2, the three offset cam dribbling moving cam dishes moves in a circle around the center of circle separately, and a circular motion is converted into a plurality of synchronous eccentric motions;
Cam Follower in step 3, the moving eccentric grove of three offset cam dribblings is done radial motion, and a plurality of synchronous eccentric motions are converted into synchronous radial motion;
Step 4, Cam Follower drive the protection pawl and do radial motion;
Step 5, protection pawl are picked up protection ring or put down, and realize the exchange of protection ring.
The present invention can be used on the silicon chip edge protective device aspect of litho machine and the object extraction aspect of other industries; cylinder is placed on the shaft collar; drive three offset cam dishes during the flexible and oscillating motion of cylinder and rotate, this moment, vector was converted into axially-movable by the straight line swing.The Cam Follower that three offset cam dishes drive respectively in the eccentric grove is done radial motion, and this moment, vector was converted into radial motion by axially-movable.Cam Follower drives the protection pawl respectively and does radial motion.Originally can invent realization and finish a plurality of radially simultaneous forces, also realize making a kind of straight-line displacement to be converted into a plurality of five equilibrium radial displacements, thereby realize the exchange of protection ring or other objects by a power source.Precision height of the present invention, good reliability, the repeatable accuracy height, simple in structure, need power source few, the synchronism height.
Description of drawings
Fig. 1 is a silicon chip edge protective device physical construction front view;
Fig. 2 is a silicon chip edge protective device physical construction vertical view;
Fig. 3 is the synoptic diagram that the silicon chip edge protective device is converted into the straight line swing circular motion;
Fig. 4 is the synoptic diagram that the silicon chip edge protective device is converted into a circular motion a plurality of synchronous eccentric motions;
Fig. 5 is the synoptic diagram that the silicon chip edge protective device is converted into a plurality of synchronous eccentric motions synchronous radial motion.
Embodiment
Following according to Fig. 1～Fig. 5, specify preferred embodiment of the present invention:
As depicted in figs. 1 and 2, be a kind of silicon chip edge protective device, comprise:
Shaft collar 8;
Three offset cam dishes 9, it is installed on the shaft collar 8, has three eccentric groves that are evenly distributed on this three offset cams dish 9;
Cylinder mechanism 1, one head are installed on the shaft collar 8, and the other end is installed on the three offset cam dishes 9;
Three Cam Followers 14, it is separately positioned in three eccentric groves of three offset cam dishes 9;
Three protection pawls 18, it is installed in respectively on three Cam Followers 14, and is embedded in the shaft collar 8;
Protection ring 2, its be installed in shaft collar 8 under, and the protection 18 pairs of pawls fixedly fold fixation;
Described silicon chip edge protective device also comprises:
Interior hexagonal flush end holding screw 3, inflatable body 4, proximity transducer 5, silicon chip edge cover sheet parts 6, cross recessed countersunk head sscrew 7, steel ball 10, bearing holder (housing, cover) 11, slotted screw 13, X is to adjustment seat 12, register pin 15, sides nut 16, ball screw 17, spring 19, spring protection pin 20, the first steel balls 21, cover plate 22, pressing plate 23, the second steel balls 24, plug screw 25, briquetting 26, gland 27; Screw 28;
Interior hexagonal flush end holding screw 3 is installed in X on adjustment seat 12, regulate X to displacement; Whether three proximity transducers 5 are installed on the shaft collar 8, be used for measuring protection ring 2 and contact with the silicon chip edge protection fully; Two cross recessed countersunk head sscrews 7 pass X and are installed on the shaft collar 8 to adjustment seat 12, are used for fixing X to adjustment seat 12; Slotted screw 13 passes bearing holder (housing, cover) 11 and is connected with shaft collar 8; Sides nut 16 is installed on the ball screw 17, and ball screw 17 is installed on protection pawl 18 terminations, and tightens with screw thread, and totally three groups of ball screws 17 play fixedly protection ring centering effect; Bearing holder (housing, cover) 11 is installed on the shaft collar 8, and plug screw 25 is installed in stationary shaft bearing sleeve 11 on the shaft collar 8; Steel ball 10 is placed on the bearing holder (housing, cover) 11; register pin 15 is installed on the shaft collar 8; spring protection pin 20 passes spring 19 and is installed on the register pin 15; silicon chip edge cover sheet parts 6 are installed on the shaft collar 8; inflatable body 4 is installed on the shaft collar 8, and first steel ball 21 is put into cover plate 22, and cover plate 22 is put into pressing plate 23 usefulness screws 28 and tightened; second steel ball 24 is put into briquetting 26, and briquetting 26 is put into gland 27 backs and tightened with screw 28.
As shown in Figure 3, after cylinder mechanism 1 ventilation, the guide rod of cylinder moves to the B2 position from the B1 position, or moves to the B1 position from the B2 position.At this moment, cylinder mechanism 1 drives 9 motions of three offset cam dishes.Three offset cam dishes 9 are that sliding axle is made circular motion with the face of cylinder of bearing holder (housing, cover) 11.Steel ball 10 forms a sliding pair between bearing holder (housing, cover) 11 and three offset cam dishes 9, play vibration damping and reduce rubbing action, and three offset cam dishes 9 can be floated from shaft collar 8, and friction force reduces, high-efficient operation.
Three offset cam dishes 9 drive three Cam Followers 14 and do radial motion.Cam Follower 14 drives protection pawl 18 and moves together.18 of 19 pairs three protections of spring pawls that are through on the spring protection pin 20 are crossed buffering and are carried protective effect, and 18 pairs of protection rings 2 of three protection pawls have overload protection function.Three ball screws 17 are done radial motion with three protection pawls 18 respectively, to 2 Self-centering Action of protection ring.Along with three ball screws 17 move to the protection ring center simultaneously, the protection ring of the script off-centre that makes revert to the center.
Three offset cam dishes 9 are annulus, the centrode curve of eccentric grove is made up of a part or three parts, in each centrode curve one section has certain amount of bias with three offset cam disk center, and the centrode curve can be that multiple curvilinear equation fits and forms.Every geometric locus and other geometric locus all evenly distribute with the center of offset cam dish.Each eccentric grove of three offset cam dishes can be groove or non-groove.
Cylinder mechanism 1 can be for pneumatic cylinder as motive power or hydraulic cylinder as motive power.
The present invention also provides a kind of silicon chip edge device application process, comprises following steps:
Step 1, the horizontal telescopic oscillating of cylinder drive three offset cam dishes and carry out circular motion, thereby the straight line swing is converted into circular motion (as shown in Figure 3);
Cylinder mechanism 1 elongates or shortens motion, and does the low-angle rotation around the C axle, and the flexible back of cylinder length is changed into L2 by L1.Cylinder mechanism 1 can be with three offset cam dishes 9 to make circular motion, and three offset cam dishes 9 are made circular motion around shaft collar 8, and movement locus is that B1 is to B2;
Initial position angle according to cylinder mechanism 1
Final position angle with cylinder mechanism 1
Obtain the work pivot angle of cylinder mechanism 1
Wherein, d is an AC length, and r is the length of AB1 and AB2, and L1 is the former length of cylinder, and L2 is the length after the stretching out of cylinder;
Eccentric grove on step 2, the three offset cam dribbling moving cam dishes moves in a circle around the center of circle separately, and a circular motion is converted into a plurality of synchronous eccentric motions (as shown in Figure 4);
Cylinder mechanism 1 drives three offset cam dishes 9 and moves to the D4 position from the D1 position.
Three eccentric grove centers of circle on the three offset cam dishes 9 with respect to the coordinate of rectangular coordinate initial point be respectively o1 (a1, b1), o2 (a2, b2), o3 (a3, b3).Each eccentric grove is made up of three sections circular arcs, is being with three offset cam dishes 9 when cylinder mechanism 1 as pivot angle to be
Circular motion the time, three eccentric groves also can move in a circle around center of circle O (0,0).
Because the D2 of each eccentric grove in three eccentric groves＜-the D3 arc groove is to be the center of circle with o1, o2, o3 respectively, is eccentric with respect to center of circle O.When the offset cam dish rotates, D2＜-D3 circular motion track is exactly the curve of gradually opening with respect to center of circle O, and equation of locus is:
And D1＜-the D2 arc groove is to be the center of circle with O, radius is the arc groove of r1, and when the offset cam dish rotates, D1＜-the D2 arc groove is to be the arc track curve of center of circle motion with O, equation of locus is:
ρ＝r1，(117°≤θ≤122°)
And D3＜-the D4 arc groove is to be the center of circle with O, radius is the arc groove of r1.When the offset cam dish rotates, D3＜-the D4 arc groove is to be the arc track curve of center of circle motion with O, equation of locus is:
ρ＝r2，(149°≤θ≤154°)
Whole D1＜-track of D4 arc groove motion is exactly to be that the circular arc in the center of circle---〉is gradually opened with O---and the complex curve of circular arc.Because of three arc grooves are arranged on the offset cam dish, when the offset cam dish moves, just have three arc groove movement locus:
Wherein, it is the center of circle that r1 is expressed as with O (0,0), and radius is the D1D2 circular arc of r1;
It is the center of circle that r2 is expressed as with O (0,0), and radius is the D3D4 circular arc of r1;
R is expressed as that (a2 b2) is the center of circle, and radius is the circular arc of r with o2;
θ
oBe ∠ XOO2;
θ is ∠ XOD3;
Three or more eccentric grove by three offset cam dishes 9 can make a circular motion be converted into a plurality of synchronous eccentric motions;
Cam Follower in step 3, the moving eccentric grove of three offset cam dribblings is done radial motion, and a plurality of synchronous eccentric motions are converted into synchronous radial motion (as shown in Figure 5);
Know the arbitrfary point equation of locus of eccentric grove, just known the track of each eccentric grove, promptly as can be known, cylinder mechanism 1 work pivot angle
Rotate how many times, Cam Follower 14 is the changing value of ρ to the distance of center of circle O, Cam Follower 14 and rectangular coordinate system X to angle be ∠ D40X, suppose that angle ∠ D40X is θ 1, simultaneously as can be known at any time coordinate of three Cam Followers 14 (x1, y1), (x2, y2), (x3, y3);
x1＝ρcos(θ1)，y1＝ρsin(θ1)；
x2＝ρcos(θ1+120°)，y2＝ρsin(θ1+120°)；
x3＝ρcos(θ1+240°)，y3＝ρsin(θ1+240°)；
When calculate first coordinate (x1, in the time of y1), θ=θ 1, ρ presses
When calculate second coordinate (x2, in the time of y2), θ=(θ 1+120 °), ρ presses
When calculate the 3rd coordinate (x3, y3), θ=(θ 1+240 °), ρ presses
The rectangular equation of crossing known circle at 3 is:
Therefore three Cam Followers 14 are done synchronous radial motion as can be known.
Step 4, Cam Follower drive the protection pawl and do radial motion;
Step 5, protection pawl are picked up protection ring or put down, and realize the exchange of protection ring or workpiece.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (8)
1. a silicon chip edge protective device is characterized in that, this device comprises:
Shaft collar (8);
Three offset cam dishes (9), it is installed on the shaft collar (8), has some eccentric groves that are evenly distributed on this three offset cams dish (9);
Cylinder mechanism (1), one head are installed on the shaft collar (8), and the other end is installed on the three offset cam dishes (9);
Cam Follower (14), its correspondence are arranged in the eccentric grove of three offset cam dishes (9);
Protection ring (2), its be installed in shaft collar (8) under;
Protection pawl (18), it is installed on the Cam Follower (14), and is embedded in the shaft collar (8), and this protection pawl (18) has overload protection function to protection ring (2), and protection pawl (18) is to fixedly folding fixation;
Bearing holder (housing, cover) (11), it is installed on the shaft collar (8), and three offset cam dishes (9) are that sliding axle is made circular motion with the face of cylinder of bearing holder (housing, cover) (11);
Steel ball (10), it is arranged on the bearing holder (housing, cover) (11), forms a sliding pair between bearing holder (housing, cover) (11) and three offset cam dishes (9), and three offset cam dishes (9) can be floated from shaft collar;
After cylinder mechanism (1) ventilation; cylinder mechanism (1) drives three offset cam dishes (9) and moves in a circle; three offset cam dishes (9) drive Cam Follower (14) and do radial motion; Cam Follower (14) drives protection pawl (18) and does radial motion together; protection ring (2) is picked up or put down, realize the exchange of protection ring.
2. silicon chip edge protective device as claimed in claim 1 is characterized in that, described three offset cam dishes (9) are annulus.
3. silicon chip edge protective device as claimed in claim 2; it is characterized in that; described eccentric grove is groove or non-groove; its center geometric locus is by D1D2; D2D3; D3D4 three parts are formed, and in each centrode curve one section has amount of bias with three offset cam dish (9) centers, and the centrode curvilinear equation is:
Wherein, it is the center of circle that r 1 is expressed as with 0 (0,0), and radius is the D1D2 circular arc of r1;
It is the center of circle that r2 is expressed as with 0 (0,0), and radius is the D3D4 circular arc of r 1;
R is expressed as that (a2 b2) is the center of circle, and radius is the circular arc of r with o2;
θ
oBe ∠ XOO2;
θ is ∠ XOD3;
Every geometric locus and other geometric locus all evenly distribute with the center of offset cam dish (9).
4. silicon chip edge protective device as claimed in claim 1 is characterized in that, described cylinder mechanism (1) adopt pneumatic cylinder as motive power or hydraulic cylinder as motive power.
5. silicon chip edge protective device as claimed in claim 1 is characterized in that, described silicon chip edge protective device also comprises:
Register pin (15), it is installed on the shaft collar (8);
Spring protection pin (20) passes spring (19) and is installed on the register pin (15), and protection pawl (18) was played buffering and carried protective effect;
Ball screw (17); it is installed in the cephalic par of protection pawl (18); this ball screw (17) is done radial motion with protection pawl (18); protection ring (2) is played Self-centering Action; along with ball screw (17) moves to protection ring (2) center, make eccentric originally protection ring (2) revert to the center.
6. silicon chip edge protective device as claimed in claim 5 is characterized in that, described silicon chip edge protective device also comprises:
Interior hexagonal flush end holding screw (3), inflatable body (4), proximity transducer (5), silicon chip edge cover sheet parts (6), cross recessed countersunk head sscrew (7), slotted screw (13), X is to adjustment seat (12), sides nut (16), first steel ball (21), cover plate (22), pressing plate (23), second steel ball (24), plug screw (25), briquetting (26), gland (27), screw (28);
Interior hexagonal flush end holding screw (3) is installed in X on adjustment seat (12), regulate X to displacement; Whether proximity transducer (5) is installed on the shaft collar (8), be used for measuring protection ring (2) and contact with the silicon chip edge protection fully; Cross recessed countersunk head sscrew (7) passes X and is installed on the shaft collar (8) to adjustment seat (12), is used for fixing X to adjustment seat (12); Slotted screw (13) passes bearing holder (housing, cover) (11) and is connected with shaft collar (8); Sides nut (16) is installed on the ball screw (17); Plug screw (25) is installed in shaft collar (8) the stationary shaft bearing sleeve (11) that comes up; silicon chip edge cover sheet parts (6) are installed on the shaft collar (8); inflatable body (4) is installed on the shaft collar (8); first steel ball (21) is put into cover plate (22); cover plate (22) is put into pressing plate (23) and is tightened with screw (28); second steel ball (24) is put into briquetting (26), and briquetting (26) is put into gland (27) back and tightened with screw (28).
7. the application process of a silicon chip edge device as claimed in claim 1 is characterized in that, makes a kind of rectilinear motion be converted into the method for the synchronous radial motion of a plurality of five equilibriums by the vector transition form, and the method includes the steps of:
Step 1, the horizontal telescopic oscillating of cylinder drive three offset cam dishes and carry out circular motion, thereby the straight line swing is converted into circular motion;
Eccentric grove on step 2, the three offset cam dribbling moving cam dishes moves in a circle around the center of circle separately, and a circular motion is converted into a plurality of synchronous eccentric motions;
Cam Follower in step 3, the moving eccentric grove of three offset cam dribblings is done radial motion, and a plurality of synchronous eccentric motions are converted into synchronous radial motion;
Step 4, Cam Follower drive the protection pawl and do radial motion;
Step 5, protection pawl are picked up protection ring or put down, and realize the exchange of protection ring.
8. silicon chip edge device application process as claimed in claim 7 is characterized in that, comprises following steps:
Step 1, the horizontal telescopic oscillating of cylinder drive three offset cam dishes and carry out circular motion, thereby the straight line swing is converted into circular motion;
Cylinder mechanism (1) elongates or shortens motion, and does the low-angle rotation around turning axle, and the flexible back of cylinder length is changed into L2 by L1, and cylinder mechanism (1) is being with three offset cam dishes (9) to make circular motion around shaft collar (8);
Initial position angle according to cylinder mechanism (1)
And the final position angle of cylinder mechanism (1)
Obtain the work pivot angle of cylinder mechanism (1)
Wherein, d is the length of the center of circle A of shaft collar (8) to cylinder mechanism (1) turning axle, and r is the length of the center of circle A of shaft collar (8) to the flexible end of cylinder mechanism (1), and L1 is the former length of cylinder, and L2 is the length after the stretching out of cylinder;
Eccentric grove on step 2, the three offset cam dribbling moving cam dishes moves in a circle around the center of circle separately, and a circular motion is converted into a plurality of synchronous eccentric motions;
Cylinder mechanism (1) drives three offset cam dishes (9) and moves to the D4 position from the D1 position;
Three eccentric grove centers of circle on the three offset cam dishes (9) with respect to the coordinate of rectangular coordinate initial point be respectively o1 (a1, b1), o2 (a2, b2), (a 3, b3) for o3, each eccentric grove is made up of three sections circular arcs, is being with three offset cam dishes (9) when cylinder mechanism (1) as pivot angle to be
Circular motion the time, three eccentric groves also can move in a circle around center of circle O (0,0);
Because the D2 of three eccentric groves＜-the D3 arc groove is respectively with o1, o2, o 3 are the center of circle, are eccentric with respect to center of circle O, and when the offset cam dish rotates, D2＜-D3 circular motion track is the curve of gradually opening with respect to center of circle O, equation of locus is:
And D1＜-the D2 arc groove is to be the center of circle with O, radius is the arc groove of r1, and when the offset cam dish rotates, D1＜-the D2 arc groove is to be the arc track curve of center of circle motion with O, equation of locus is:
ρ＝r1，(117°≤θ≤122°)
And D3＜-the D4 arc groove is to be the center of circle with O, radius is the arc groove of r 1, and when the offset cam dish rotates, D3＜-the D4 arc groove is to be the arc track curve of center of circle motion with O, equation of locus is:
ρ＝r2，(149°≤θ≤154°)
Whole D1＜-track of D4 arc groove motion is exactly to be that the circular arc in the center of circle--〉is gradually opened with O--and the complex curve of circular arc, because of three arc grooves are arranged on the offset cam dish, when the offset cam dish moves, just have three arc groove movement locus:
Wherein, it is the center of circle that r1 is expressed as with O (0,0), and radius is the D1D2 circular arc of r 1;
It is the center of circle that r2 is expressed as with O (0,0), and radius is the D3D4 circular arc of r1;
R is expressed as that (a2 b2) is the center of circle, and radius is the circular arc of r with o2;
θ
oBe ∠ XOO2;
θ is ∠ XOD3;
Three or more eccentric grove by three offset cam dishes (9) can make a circular motion be converted into a plurality of synchronous eccentric motions;
Cam Follower in step 3, the moving eccentric grove of three offset cam dribblings is done radial motion, and a plurality of synchronous eccentric motions are converted into synchronous radial motion;
Know the arbitrfary point equation of locus of eccentric grove, just known the track of each eccentric grove, promptly as can be known, cylinder mechanism (1) work pivot angle
Rotate how many times, Cam Follower (14) is the changing value of ρ to the distance of center of circle O, Cam Follower (14) and rectangular coordinate system X to angle be ∠ D40X, suppose that angle ∠ D40X is θ 1, simultaneously as can be known at any time coordinate of three Cam Followers (14) (x1, y1), (x2, y2), (x 3, y3);
x1＝ρcos(θ1)，y1＝ρs?i?n(θ1)；
x2＝ρcos(θ1+120°)，y2＝ρs?in(θ1+120°)；
x?3＝ρcos(θ1+240°)，y?3＝ρsin(θ1+240°)；
When calculate first coordinate (x1, in the time of y1), θ=θ 1, ρ presses
When calculate second coordinate (x2, in the time of y2), θ=(θ 1+120 °), ρ presses
When calculating the 3rd coordinate (x3, y 3), θ=(θ 1+240 °), ρ presses
The rectangular equation of crossing known circle at 3 is:
Therefore three Cam Followers 14 are done synchronous radial motion as can be known;
Step 4, Cam Follower drive the protection pawl and do radial motion;
Step 5, protection pawl are picked up protection ring or put down, and realize the exchange of protection ring.
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |