CN102139459A - Cutter servo compensation driving device for micronano cutting - Google Patents
Cutter servo compensation driving device for micronano cutting Download PDFInfo
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- CN102139459A CN102139459A CN 201110082311 CN201110082311A CN102139459A CN 102139459 A CN102139459 A CN 102139459A CN 201110082311 CN201110082311 CN 201110082311 CN 201110082311 A CN201110082311 A CN 201110082311A CN 102139459 A CN102139459 A CN 102139459A
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Abstract
The invention discloses a cutter servo compensation driving device for micronano cutting and aims to provide the cutter servo compensation driving device for the micronano cutting with high positioning precision, high repeated positioning precision, high response speed and high stability. The device comprises a base, wherein a rectangular groove is formed on the base; a piezoelectric pile is arranged in the rectangular groove in an interference mode and serves as a driving component; a sensor fixing base is adhered to the upper surface of the base; a precise capacitance contact type displacement sensor is arranged in the sensor fixing base in a clearance mode; a connecting device is arranged at the rear end of the base and is integrated with the base; a tool rest is connected with the base through three groups of parallel plate type thin wall flexible hinges; a stop dog is arranged at the upper end of the tool rest and is integrated with the tool rest; and a cutter is arranged in a cutter groove at the bottom of the tool rest through a cutter fastening bolt. By the device, a cutting cutter can be precisely positioned and driven; and requirements of micronano cutting on the cutter driving device are met.
Description
Technical field
The present invention relates to a kind of ultra precision cutting processing unit (plant), particularly a kind of cutter servo compensation drive unit that is used for the micro/nano level machining belongs to mechanical precision cutting processing technique field.
Technical background
In recent years, along with the fast development of subjects such as ultra precision cutting processing, precision optics, semiconductor, data storage, microelectric technique, biomedicine, people have more and more higher requirement to the Ultraprecision Machining and the equipment of micro/nano level precision.At present, engine lathe slide carriage or the numerically controlled lathe knife rest that is used for machining generally adopts driven by motor ball-screw or manual fine thread to realize the location and the driving of cutter.The defective of above-mentioned cutter driving device is: because limited self structure and the accuracy of manufacture and the kind of drive, have that physical dimension is excessive, positioning accuracy and shortcoming such as repetitive positioning accuracy is low, transmission is not steady, can not well realize the needs of micro/nano level machining, machining accuracy and surface quality that this has seriously restricted component of machine and the symmetrical aspherics curved surface of revolution etc. have seriously hindered the development of manufacturing level.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide that a kind of positioning accuracy and repetitive positioning accuracy height, response speed are fast, the cutter servo compensation drive unit that is used for the micro/nano level machining of good stability.This device can be realized accurate straight line location and motion output function, cooperates the machine tool rotary knife rest can realize that also as movement locus be sine curve, trapezoidal, triangle or array of structures isoline, curvilinear motion.This device adopts piezoelectric stack to realize that as driving element the precision of knife rest drives, and adopts the capacitive touch displacement transducer to realize the tool displacement real-time signal acquisition as signal detection component.
Operation principle of the present invention is when Tool in Cutting is worked, capacitive touch displacement transducer 6 is by contacting the displacement signal of gathering cutter in real time with block 9, displacement signal drives piezoelectric stack 3 by control system processing output voltage signal and exports displacement accurately, control the precision of cutter on the cutting depth direction with this, can make the minimum theoretical cutting depth of the displacement resolution of cutter 10, realize micro/nano level precision cutting processing much smaller than Metal Cutting Machine Tool.
The present invention is achieved by following technical proposals, and accompanying drawings is as follows:
A kind of cutter servo compensation drive unit that is used for the micro/nano level machining, mainly by pedestal, knife rest, cutter, driving element and signal detection component are formed, described driving element is a piezoelectric stack 3, signal detection component is accurate capacitive touch displacement transducer 6, piezoelectric stack 3 interference fit are installed in the rectangular channel that has on the pedestal 1, and by the pre-tightening mechanism pretension, be fixed with sensor fixed pedestal 7 on the pedestal 1, accurate capacitive touch displacement transducer 6 matched in clearance are installed in the sensor fixed pedestal 7, and it is fixing by sensor trip bolt 8, its front end contact probe head contacts with the block 9 of knife rest 2 ends all the time, pedestal 1 tail end is a jockey 11, knife rest 2 is by first, two, three parallel-plate-type thin shelf flexible hinges 12,13,14 are connected with pedestal 1, and cutter 10 is installed in the cutter groove of knife rest 2 by cutter trip bolt 15.
Described sensor fixed pedestal 7 is connected by bonding mode and pedestal 1 or is same integral body with pedestal 1, and described jockey 11, first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, block 9 and knife rest 2 are same integral body with pedestal 1.
Described pre-pressing structure adopts self-locking pretension wedge 4, and its pretightning force is provided by pretension screw 5, and piezoelectric stack 3 is carried out forward pretension and oppositely self-locking.
Process by the Wire EDM mode for first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, block 9, knife rest 2 and the sensor fixed pedestal 7 of same integral body with pedestal 1; The accurate straight-line displacement of slight curves distortion output takes place to blade 10 in first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 under the driving force effect of piezoelectric stack 3, when the driving force of piezoelectric stack 3 is cancelled, get back to initial position.
Said accurate driver element piezoelectric stack 3 is the accurate actuation element of controllable type, when piezoelectric stack 3 is applied voltage, can realize the accurate controlled rectilinear motion of knife rest 2 along the x direction.Utilize the precision driving effect of piezoelectric stack 3, the minimum cutting depth that the moving displacement resolution ratio of blade 10 can be reached much smaller than Metal Cutting Machine Tool, thereby realize the surperficial turning of micro/nano level, utilize the quick response effect of piezoelectric stack 3 and the voltage-output displacement relation of substantially linear, can realize the precision control of cutting depth.
The invention has the beneficial effects as follows: (1) picks up the accurate output of cutter actual displacement and piezoelectric stack straight-line displacement by accurate capacitive touch displacement transducer, can be far smaller than the micro cutting of the desired cut degree of depth that stock-removing machine can reach and cutting process is carried out the Real-time Error compensation surface to be machined, thereby can realize reducing largely workpiece surface roughness, improve the positioning accuracy of tooling system.(2) circular cutter holder of cooperation stock-removing machine, also can realize the simple harmonic quantity of cutter, intermittently, the characteristics of motion of form such as continuous, finish that precision optical machinery parts, the symmetrical aspheric surface of revolution etc. are complex-curved and sinusoidal, the ultraprecise processing and the cutter compensation of the surface of the work of shapes such as rectangle, triangle or array of structures.(3) simple in structure, dynamic property is good, cost is low.
Description of drawings
Fig. 1 is the vertical view that is used for the cutter servo compensation drive unit of micro/nano level machining;
Fig. 2 is the stereogram that is used for the cutter servo compensation drive unit of micro/nano level machining;
Fig. 3 is the front view that is used for the cutter servo compensation drive unit of micro/nano level machining;
Fig. 4 is the cutter servo compensation driving device structure schematic diagram that is used for the micro/nano level machining;
Fig. 5 is the state diagram of parallel-plate-type thin shelf flexible hinge structural principle, wherein a) be the distortion before state, b) be the distortion after state.
Among the figure: 1. pedestal 2. knife rests 3. piezoelectric stacks 4. self-locking pretension wedges 5. piezoelectric stack trip bolts 6. accurate capacitive touch displacement transducer 7. sensor fixed pedestals 8. sensor trip bolts 9. blocks 10. cutters 11. jockeys 12. first parallel-plate-type thin shelf flexible hinges 13. second parallel-plate-type thin shelf flexible hinges 14. the 3rd parallel-plate-type thin shelf flexible hinge 15. blade trip bolts
The specific embodiment
Below in conjunction with the accompanying drawing example content of the present invention is further described.
Consult Fig. 1-4, this device comprises the knife rest 2 that is connected with pedestal 1 by first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14, and knife rest 2 upper ends are block 9, and block 9 and knife rest 2 are same integral body; Cutter 10 is installed in the cutter groove of knife rest 2 bottoms by cutter trip bolt 15; Pedestal 1 top has rectangular channel, the driving element of piezoelectric stack 3 as this device installed in interference in rectangular channel, piezoelectric stack 3 carries out pretension by self-locking pretension wedge 4 and piezoelectric stack trip bolt 5, piezoelectric stack 3 and pedestal 1 and self-locking pretension wedge 4 equal interference fit; Pedestal 1 upper surface is bonded with sensor fixed pedestal 7, at sensor fixed pedestal 7 internal clearances accurate capacitive touch displacement transducer 6 is installed, accurate capacitive touch displacement transducer 6 is as the signal detection component of this device, accurate capacitive touch displacement transducer 6 is fixing by sensor trip bolt 8, and its front end contact probe head contacts with block 9 all the time; Pedestal 1 rear end is a jockey 11, is used for the fixing of this device and platen or turret.
Fig. 5 is the state diagram of parallel-plate-type thin shelf flexible hinge structural principle, first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 is under the driving force effect of piezoelectric stack 3, small flexural deformation can take place, thereby export accurate straight-line displacement, δ=F/K among Fig. 5, K is the bending stiffness of flexible hinge, and δ is the little distortion of flexible hinge, and F is for being added in the free-ended external force of flexible hinge.
Knife rest 2 is under the driving force power effect of piezoelectric stack 3, can realize along x direction Precision Linear Moving, and, cooperate piezoelectric stack 3 controlled displacements outputs can realize the precision positioning of cutter by accurate capacitive touch displacement transducer 6 real-time cutter 10 displacement informations of gathering.Cutter 10 and cutter trip bolt 15 are supporting formula interchangeable elements, can be according to the cutter or the dissimilar molding cutter that require to change different angles and material under the actual cut condition.
The concrete course of work is as follows:
This device is fixed on platen or the circular cutter holder by the jockey 11 of pedestal 1 rear end, and during original state, piezoelectric stack 3 no powers are undertaken carrying out forward pretension and oppositely self-locking along the y direction by 5 pairs of piezoelectric stacks of piezoelectric stack trip bolt 3; The front end elasticity probe of accurate capacitive touch sensor 6 contacts with block 9; When piezoelectric stack 3 energising elongations, strain takes place and promotes knife rest 2 and make Precision Linear Moving along the x direction in first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 under piezoelectric stack 3 effect, the displacement of piezoelectric stack 3 outputs is acted on the cutter 10; When piezoelectric stack 3 outage retraction, first, second and third parallel-plate-type thin shelf flexible hinge 12,13,14 drives knife rest 2 and gets back to initial position under himself reverse reverting power effect.Energising carry-out bit at piezoelectric stack 3 moves past in the journey, accurate contact capacitance sensor 6 is gathered the displacement signal of block 9 in real time, the error computing is carried out by control system in displacement signal of being gathered and target location, and error amount changed, computing and amplification, final control system output voltage control signal drives piezoelectric stack 3 and exports displacement accurately, utilize the precision driving effect of piezoelectric stack 3, can make the Motion Resolution rate of the moving displacement resolution ratio of cutter 10 far above the stock-removing machine feed system, thereby realize the surperficial turning of micro/nano level, utilize the quick response effect of displacement drive of piezoelectric stack 3 and the voltage-output displacement relation of substantially linear, can realize the elaborate servo control of cutting-in.
When given input signal was sine wave signal, the waveform voltage signal that drives piezoelectric stack 3 was sinusoidal wave, and correspondingly cutter 10 is the past complex line of simple harmonic motion along the movement locus of x direction; When given input signal was square-wave signal, the waveform voltage signal that drives piezoelectric stack 3 was a square wave, and correspondingly cutter 10 is the past complex line of intermittent movement rule along the movement locus of x direction; When given input signal was triangular signal, the waveform voltage signal that drives piezoelectric stack 3 was a triangular wave, and correspondingly cutter 10 is the past complex line of continuous motion rule along the movement locus of x direction; When given input signal is dot matrix, linear array and face battle array signal, also can realize the machining of parts end face micro-nano structure array.To the control of the input voltage waveform of accurate driver element piezoelectric stack 3, cooperate lathe brick tower knife rest, cutter 10 can realize that also as movement locus be sine curve, trapezoidal or triangle isoline, curvilinear motion.
Claims (5)
1. cutter servo compensation drive unit that is used for the micro/nano level machining, mainly by pedestal, knife rest, cutter, driving element and signal detection component are formed, it is characterized in that, described driving element is piezoelectric stack (3), signal detection component is an accurate capacitive touch displacement transducer (6), piezoelectric stack (3) interference fit is installed in the rectangular channel that has on the pedestal (1), and by the pre-tightening mechanism pretension, be fixed with sensor fixed pedestal (7) on the pedestal (1), accurate capacitive touch displacement transducer (6) matched in clearance is installed in the sensor fixed pedestal (7), and it is fixing by sensor trip bolt (8), its front end contact probe head contacts with the block (9) of knife rest (2) end all the time, pedestal (1) tail end is jockey (11), knife rest (2) is by first, two, three parallel-plate-type thin shelf flexible hinges (12,13,14) be connected with pedestal (1), cutter (10) is installed in the cutter groove of knife rest (2) by cutter trip bolt (15).
2. a kind of cutter servo compensation drive unit that is used for the micro/nano level machining according to claim 1, it is characterized in that, described sensor fixed pedestal (7) is connected by bonding mode and pedestal (1) or is same integral body with pedestal (1), and described jockey (11), first, second and third parallel-plate-type thin shelf flexible hinge (12,13,14), block (9) and knife rest (2) are same integral body with pedestal (1).
3. a kind of cutter servo compensation drive unit that is used for the micro/nano level machining according to claim 1, it is characterized in that, described pre-pressing structure adopts self-locking pretension wedge (4), its pretightning force is provided by pretension screw (5), and piezoelectric stack (3) is carried out forward pretension and oppositely self-locking.
4. a kind of cutter servo compensation drive unit that is used for the micro/nano level machining according to claim 1, it is characterized in that, process by the Wire EDM mode for first, second and third parallel-plate-type thin shelf flexible hinge (12,13,14), block (9), knife rest (2) and the sensor fixed pedestal (7) of same integral body with pedestal (1); First, second and third parallel-plate-type thin shelf flexible hinge (12,13,14) is under the driving force effect of piezoelectric stack (3), the accurate straight-line displacement of slight curves distortion output takes place to blade (10), when the driving force of piezoelectric stack (3) is cancelled, get back to initial position.
5. a kind of cutter servo compensation drive unit that is used for the micro/nano level machining according to claim 1, it is characterized in that, said accurate driver element piezoelectric stack (3) is the accurate actuation element of controllable type, by when applying voltage, realizing the accurate controlled rectilinear motion of knife rest (2) along the x direction to piezoelectric stack (3).
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| CN 201110082311 CN102139459A (en) | 2011-04-02 | 2011-04-02 | Cutter servo compensation driving device for micronano cutting |
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| CN 201110082311 CN102139459A (en) | 2011-04-02 | 2011-04-02 | Cutter servo compensation driving device for micronano cutting |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102528522A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Fast tool servo device with adjustable rigidity |
| CN102825490A (en) * | 2012-07-19 | 2012-12-19 | 广东工业大学 | Frequency-adjustable rapid servo cutter feeding device based on flexible hinge amplification mechanism |
| CN103273358A (en) * | 2013-04-09 | 2013-09-04 | 广东工业大学 | Fast tool servo with flexible hinge capable of being detached and replaced |
| CN106002489A (en) * | 2016-07-07 | 2016-10-12 | 上海师范大学 | Automatic compensation device and method for eliminating cutting chatter of numerical control machine tool |
| CN109434142A (en) * | 2018-12-29 | 2019-03-08 | 苏州大学 | A kind of fast servo tool |
| CN111318438A (en) * | 2019-06-03 | 2020-06-23 | 北京建筑大学 | Piezoelectric stack type high-frequency excitation system |
| CN111975412A (en) * | 2020-08-26 | 2020-11-24 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
| CN112247685A (en) * | 2020-09-16 | 2021-01-22 | 燕山大学 | Micro-feeding tool rest and tool polishing device |
| CN115338644A (en) * | 2022-07-25 | 2022-11-15 | 山东大学 | Axial symmetry grinding and ultra-fast turning integrated device for weak-rigidity rod |
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| CN101028702A (en) * | 2007-01-12 | 2007-09-05 | 东华大学 | Microfeeding system for precisive grinding |
| CN101157183A (en) * | 2007-11-15 | 2008-04-09 | 赵宏伟 | Accurate servo drive device of turning cutting tool with two freedoms |
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| CN101028702A (en) * | 2007-01-12 | 2007-09-05 | 东华大学 | Microfeeding system for precisive grinding |
| CN101157183A (en) * | 2007-11-15 | 2008-04-09 | 赵宏伟 | Accurate servo drive device of turning cutting tool with two freedoms |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528522A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Fast tool servo device with adjustable rigidity |
| CN102528522B (en) * | 2012-03-05 | 2014-02-12 | 广东工业大学 | Fast tool servo device with adjustable rigidity |
| CN102825490A (en) * | 2012-07-19 | 2012-12-19 | 广东工业大学 | Frequency-adjustable rapid servo cutter feeding device based on flexible hinge amplification mechanism |
| CN102825490B (en) * | 2012-07-19 | 2015-04-22 | 广东工业大学 | Frequency-adjustable rapid servo cutter feeding device based on flexible hinge amplification mechanism |
| CN103273358A (en) * | 2013-04-09 | 2013-09-04 | 广东工业大学 | Fast tool servo with flexible hinge capable of being detached and replaced |
| CN103273358B (en) * | 2013-04-09 | 2015-12-30 | 广东工业大学 | The fast tool servo device that a kind of flexible hinge is detachably changed |
| CN106002489A (en) * | 2016-07-07 | 2016-10-12 | 上海师范大学 | Automatic compensation device and method for eliminating cutting chatter of numerical control machine tool |
| CN106002489B (en) * | 2016-07-07 | 2018-05-22 | 上海师范大学 | A kind of autocompensation installation and method for eliminating numerical control machine tool cutting flutter |
| CN109434142A (en) * | 2018-12-29 | 2019-03-08 | 苏州大学 | A kind of fast servo tool |
| CN111318438A (en) * | 2019-06-03 | 2020-06-23 | 北京建筑大学 | Piezoelectric stack type high-frequency excitation system |
| CN111975412A (en) * | 2020-08-26 | 2020-11-24 | 山东理工大学 | Measuring and compensating device for one-way machining force of cutting machining |
| CN112247685A (en) * | 2020-09-16 | 2021-01-22 | 燕山大学 | Micro-feeding tool rest and tool polishing device |
| CN115338644A (en) * | 2022-07-25 | 2022-11-15 | 山东大学 | Axial symmetry grinding and ultra-fast turning integrated device for weak-rigidity rod |
| CN115338644B (en) * | 2022-07-25 | 2024-02-02 | 山东大学 | Axisymmetric grinding and ultrafast turning integrated device for weak rigid rod |
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Application publication date: 20110803 |