CN102082387B - Multi-layer air flow cooled output mirror device of laser - Google Patents
Multi-layer air flow cooled output mirror device of laser Download PDFInfo
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- CN102082387B CN102082387B CN2010106136100A CN201010613610A CN102082387B CN 102082387 B CN102082387 B CN 102082387B CN 2010106136100 A CN2010106136100 A CN 2010106136100A CN 201010613610 A CN201010613610 A CN 201010613610A CN 102082387 B CN102082387 B CN 102082387B
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Abstract
The invention discloses a multi-layer air flow cooled output mirror device of a laser, which belongs to the field of high-power pulsed gas lasers. The device comprises a plurality of output mirrors, a plurality of ring gaskets and a mounting seat, wherein the thicknesses of the output mirrors are the same; a reflecting film is plated on a part of one surface of one output mirror; an anti-reflection film is plated on the other surface of the reflecting film; anti-reflection films are plated on the two surfaces of the other output mirrors; the output mirrors are coaxially arranged in parallel; the output mirror on which the reflecting film is plated is arranged on a working cavity side of the laser; the surface on which the reflecting film is plated faces a concave completely reflecting mirror of an optical resonant cavity; the output mirrors on the two surfaces of which the anti-reflection films are plated are sequentially arranged and the outmost sides of the output mirrors contact the atmosphere; every two of the plurality of output mirrors are separated by the ring gaskets; the contact faces between the ring gaskets and the output mirrors are sealed; the sealed output mirrors are fixed on the working cavity of the laser through the mounting seat; and sealed circulating cooling air flow is formed in a sealed space between two output mirrors. The multi-layer air flow cooled output mirror device reduces the degree of the damage of laser to an output mirror material body and prolongs the service life period of the output mirror material body.
Description
Technical field
The present invention relates to the high power pulse gas laser, particularly relate to the outgoing mirror structure of the pulsed gas laser of average power more than thousands of watts.
Background technology
The majority of gas laser is (like CO
2, CO, N
2, quasi-molecule etc.) operation principle be: adopt the discharge excitation mode to make gas working dielectric generation population inversion; Produce spontaneous radiation and stimulated radiation; And the optical resonator of certain version is set in the excitation region both sides, stimulated radiation can repeated oscillation be amplified form laser orientation output.Optical resonator generally is made up of two speculums; The high power pulse gas laser adopts " flat-recessed " optical stabilization chamber more; Wherein one is that material is the concave spherical surface completely reflecting mirror of Cu, and another piece is that material is that the planar section speculum of ZnSe promptly is a laser output mirror.Generally, laser output mirror also is a potted component in airtight laser work chamber.The laser work chamber is operated under the vacuum state mostly, and before charging into working gas, must be evacuated down to below a few handkerchief pressure, so that foreign gas content is few.Like this, outerplanar just exists the pressure reduction that equals an atmospheric pressure basically in the laser output window, so it must possess bigger thickness and to bear pressure plastic deformation even damage does not take place.Common design principle is that the thickness of outgoing mirror needs greater than 1/10th of its outside dimension, for example: if the external diameter 90mm of an outgoing mirror, its thickness should be taken as 9～10mm.
Found such problem in the research at present; When the power output of pulsed gas laser reached more than thousands of watts, laser output mirror obvious impairment occurred or damages phenomenon, along with the increase of power; Outgoing mirror shortens useful life greatly, and this has a strong impact on its practical applications.With high power pulse CO
2Laser is an example, and when laser output average power surpassed 7kW, continuous emission excimer laser a few minutes, phenomenon promptly appearred damaging to its ZnSe outgoing mirror in inboard reflectance coating in the chamber.A special example is: at pulse CO
2During laser works, its outgoing mirror inner side plane has received the pollution of discharge sputter and gaseous impurity, and when launching 5 minutes continuously with the 10kW average power, phenomenon appears bursting in this outgoing mirror.
The damage of laser output mirror has plated film damage and two kinds of situation of material body damage; The type of damage also can be divided into the energy damage and power damages two kinds; The mechanism of action of energy damage is that the instantaneous heat of laser is impacted, and the mechanism of action of power damage is the heat history of laser.Result of study shows that the damage of outgoing mirror plated film mainly is the energy damage, and this is from the continuous CO of equal average power level
2But the situation that the laser outgoing mirror plated film long period uses can contrast out (continuous CO
2Laser output procedure free of discontinuities and energy are steady); Damage to the outgoing mirror material body then mainly is the power damage, the basic and continuous CO of this respect
2Laser character is identical.For addressing this problem; People adopt improve the outgoing mirror coating quality, to the outgoing mirror inner side plane blow antifouling cooling, the outgoing mirror mounting base carried out way such as water flowing cooling; These are necessarily alleviated the damage phenomenon of outgoing mirror plated film; But the effect to reducing the damage of outgoing mirror bulk material is not obvious, and main cause is that the conductive coefficient of ZnSe is very little, and the outside speed of transmitting of heat that is accumulated in the material core is too slow.Since after the damage of outgoing mirror plated film can be removed through polishing again plated film reuse, and the material body damage causes phenomenon such as outgoing mirror cracks, fragmentation and can't reuse again, becomes problem demanding prompt solution so avoid the outgoing mirror material body to damage.
Summary of the invention
Make the core heat be difficult to spread out of as early as possible because of outgoing mirror is thicker to cause material body to produce the problem of damage in order to solve, the present invention provides a kind of multilayer air-flow cooling laser device outgoing mirror device.
The technical scheme that technical solution problem of the present invention is adopted is following:
Multilayer air-flow cooling laser device outgoing mirror device comprises polylith outgoing mirror, a plurality of air ring and a mount pad; The thickness of every outgoing mirror is identical, and the one side of an outgoing mirror is coated with the partial reflection film, and another side is coated with anti-reflection film, and the two sides of all the other outgoing mirrors all is coated with anti-reflection film; The polylith outgoing mirror is coaxial and laterally arranges; The outgoing mirror that is coated with the partial reflection film places laser works chamber side; And the one side that is coated with the partial reflection film is relative with the concave surface completely reflecting mirror of laser optical resonant cavity; The contact-making surface of this outgoing mirror and laser works cavity sealing simultaneously, the outgoing mirror that all the other two sides all are coated with anti-reflection film is arranged in order, outermost contact atmosphere; Be separated by in twos through air ring respectively between the polylith outgoing mirror, and the sealing of the contact-making surface of air ring and outgoing mirror, the combination of polylith outgoing mirror is fixed on the laser works cavity through mount pad.
Above-mentioned air ring radially is being provided with two relative through holes; Mount pad radially also is being provided with relative through hole, and corresponding successively vertically with the through hole of said air ring.
Be provided with the sealing and circulating cooling blast in the confined space between above-mentioned per two outgoing mirrors; And form a plurality of closed conduits arranged side by side through through hole external pipe relative on the mount pad; Being filled with gas in the pipeline and being provided with makes gas form the driving blower fan that sealing and circulating flows; Pipeline is externally connected to vacuum pump and pressure-display device, in case of necessity, also can in pipeline, be provided with heat exchanger.
Beneficial effect of the present invention is following:
1), change the thin outgoing mirror of polylith into, makes the heat of material core can spread out of as early as possible, reduced the temperature difference in the core and the outside, thereby reduced the thermal deformation of outgoing mirror owing to will have a thicker outgoing mirror now;
2), owing between per two outgoing mirrors, set up the sealing and circulating cooling blast; Strengthened cooling effect to outgoing mirror; This has reduced the degree of injury of laser to the outgoing mirror material body to a great extent; Improved the cycle in useful life of outgoing mirror material body greatly, also the damage of outgoing mirror plated film has been played simultaneously and slowed down effect;
3), because two side planes of the air ring that between per two outgoing mirrors, is provided with have high parallel accuracy, make to have high parallel accuracy between the polylith outgoing mirror, thereby can not exert an influence the transmission direction of laser.
Description of drawings
Fig. 1 is the double-layer air-flow cooling laser device outgoing mirror device sketch map of one embodiment of the invention.
Among the figure: 1, mount pad, 1-1, mount pad first through hole, 1-2, mount pad second through hole, 2, outside outgoing mirror, 3, inboard outgoing mirror, 4, air ring, 4-1, air ring first through hole, 4-2, air ring second through hole, 5, the laser works cavity.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is explained further details.
The double-layer air-flow cooling laser device outgoing mirror device that constitutes with two outgoing mirrors is that example is explained the present invention as follows:
Double-layer air-flow cooling laser device outgoing mirror device is an outgoing mirror that has laser now to be changed into by two outgoing mirrors constitute; The external diameter of two outgoing mirrors is identical with former outgoing mirror; Thickness equates and equals 1/2nd of a former outgoing mirror thickness; For example, suppose that a former outgoing mirror thickness is 10mm, then the thickness of two outgoing mirrors all is 5mm.An one side in two outgoing mirrors is plated the partial reflection film, and another side plating anti-reflection film is also claimed antireflective film; Anti-reflection film is all plated on another piece outgoing mirror two sides.Two outgoing mirrors are coaxial and laterally arrange during installation; An outgoing mirror that is coated with the partial reflection film is placed near laser works chamber side; And the one side that will be coated with the partial reflection film is towards the inboard; Promptly the concave surface completely reflecting mirror with the laser optical resonant cavity is relative, and takes encapsulating method (as sealing with rubber seal) so that the laser works chamber keeps air-tight state with laser works cavity contact-making surface; Another piece outgoing mirror is placed on the contact atmospheric side.The air ring that adopts a metal material to process between two outgoing mirrors is separated by; Air ring radially is being provided with two relative through holes; Its two side plane has high parallel accuracy; Can make the high parallel accuracy of maintenance between two outgoing mirrors, and all take encapsulating method (as sealing), make the space that forms between two outgoing mirrors also can remain on air-tight state with rubber seal with two outgoing mirror contact-making surfaces.Two outgoing mirrors and air ring are fixed on the laser works cavity through a mount pad.
Double-layer air-flow cooling laser device outgoing mirror device is except that keeping the original technique method as eyeglass inner side plane (promptly leaning on laser works chamber side) being applied air blowing (the hybrid working gas that promptly prepares) antifouling cooling and mount pad being added the water flowing cooling; Increased a technical method again; Promptly the space that forms between two outgoing mirrors is applied mobile refrigerating gas; Through certain pipeline draw bail this gas channel is remained under the air-tight state; Outside vacuum pump and the pressure-display device of connecting of pipeline; Add in the pipeline drive blower fan make gas form sealing and circulating flow (promptly with the laser work chamber in gas-circulating system identical), also can in pipeline, add heat exchanger in case of necessity.During use, adopt clean gas (like high pure nitrogen) that closed conduit is cleaned up earlier, adopt vacuum pump to be evacuated to 0.5 atmospheric pressure (being 0.05MPa) then, when emission laser, start the driving blower fan internal gas is circulated.
Resist inside and outside interplanar and be 1 atmospheric pressure (being 0.1MPa) to the maximum because the existing laser window that adopts an outgoing mirror must have bigger thickness; The laser heat that makes the material core absorb is difficult to spread out of fast; Cause the core and the outside to have very big temperature difference, thereby make material be easy to deform or damage.Know that as people the thickness of material is thin more, it is just short more that the heat of core passes to the time in the outside, Here it is the chamber wall of all heat exchangers and the very thin reason that fin thickness is all done as far as possible.Therefore; The double-layer air-flow cooling laser device outgoing mirror device of present embodiment is to change a former thicker outgoing mirror into two thin outgoing mirrors; Purpose is exactly to make the heat of material core spread out of as early as possible, and reduces the temperature difference in the core and the outside, and between two outgoing mirrors, has set up the sealing and circulating cooling blast; Further strengthened cooling effect to outgoing mirror; This has reduced the degree of injury of laser to the outgoing mirror material body to a great extent, has improved the cycle in useful life of outgoing mirror material body greatly, also the damage of outgoing mirror plated film has been played simultaneously and has been slowed down effect.Because the thickness of a former outgoing mirror can be resisted 1 atmospheric pressure; And the outgoing mirror of its 1/2nd thickness can not be resisted this pressure; So present embodiment becomes airtight with the airpath design between two outgoing mirrors, in use it is charged into 0.5 atmospheric gas, like this; The maximum pressure that every outgoing mirror bore just can not surpass 0.5 atmospheric pressure; Then the eyeglass of two 1/2nd thickness respectively bears 0.5 atmospheric pressure, and the state that bears 1 atmospheric pressure with a former eyeglass is identical, can satisfy instructions for use fully.Adopt high pure nitrogen can ignore to the influence of laser output power (or energy) as coolant.Air ring between two outgoing mirrors has high parallel accuracy because of two side planes, can make two outgoing mirrors have high parallel accuracy, thereby can not exert an influence to the transmission direction of laser.
As shown in Figure 1, double-layer air-flow cooling laser device outgoing mirror device is made up of mount pad 1, outside outgoing mirror 2, inboard outgoing mirror 3 and air ring 4.Mount pad 1 is processed by metal material, radially is processed with relative mount pad first through hole 1-1 and the mount pad second through hole 1-2, also is processed with the through hole that mounting screw uses and the internal and external channel of turnover cooling water at circumference.Outside outgoing mirror 2 is that two block of material are the circular flat mirror of ZnSe with inboard outgoing mirror 3, and external diameter is identical with the existing external diameter of an outgoing mirror that uses of laser, and thickness respectively is 1/2nd of former outgoing mirror.Two side planes of outside outgoing mirror 2 all are coated with anti-reflection film, and a side plane of inboard outgoing mirror 3 is coated with the partial reflection film, and the opposite side plane is coated with anti-reflection film.Air ring 4 is the air rings that metal material is processed; Two side planes have high parallel accuracy, and promptly parallel accuracy is less than 2 rads, and are processed with the annular groove that can adorn rubber seal in the correct radial position; Radially be processed with relative air ring first through hole 4-1 and the air ring second through hole 4-2; And the air ring first through hole 4-1 communicates with the mount pad first through hole 1-1, and the air ring second through hole 4-2 communicates with the mount pad second through hole 1-2.Laser works cavity 5 is processed with the annular groove that can adorn rubber seal at the correct position with inboard outgoing mirror 3 contact-making surfaces.
The installation of each part relation is as shown in Figure 1 in the double-layer air-flow cooling laser device outgoing mirror device: inboard outgoing mirror 3 abuts against on the laser works cavity 5; Its surface that is coated with the partial reflection film is towards the working chamber side; In the annular groove of laser works cavity 5 rubber seal is housed, makes to form between inboard outgoing mirror 3 and the laser works cavity 5 to be tightly connected; Laser works cavity 5 is provided with blowning installation; When laser works, can the working gas that mix directly be blown on the chamber inner surface of inboard outgoing mirror 3 (stable for making laser power, be provided with and fill method for exhausting, can replenish new gas in real time during emission laser; Combustion gas; Keep the stable of operating air pressure, this air blowing method unites two into one with additional new gas and combines), inboard outgoing mirror 3 is played antifouling cooling effect.Air ring 4 is arranged between inboard outgoing mirror 3 and the outside outgoing mirror 2, in the annular groove of 4 liang of side planes of air ring rubber seal is housed all, make between inboard outgoing mirror 3 and the outside outgoing mirror 2 and form air-tight state.Adopt mount pad 1 that inboard outgoing mirror 3, air ring 4 and outside outgoing mirror 2 are fastened on the laser works chamber 5, and it is radially aligned the radially air vent hole position on air vent hole and the air ring 4, make runner unobstructed.Radially air vent hole and on the mount pad 1 is arranged with blower fan, heat exchanger, vacuum pump and the pipeline of pressure display instrument and links to each other; Form the sealing and circulating pipeline; Adopt pure nitrogen that closed conduit is cleaned up during use earlier, adopt vacuum pump to be evacuated to 0.05MPa pressure then, during laser works; Start the driving blower fan gas circulation is flowed, inboard outgoing mirror 3 is all played cooling effect with outside outgoing mirror 2.Also be provided with the cooling duct on the mount pad 1, link to each other, pass through boiler water circulation during laser works inboard outgoing mirror 3 and 2 auxiliary cooling effects of outside outgoing mirror with an outside water circulation pipe.
The present invention is that example is explained technical scheme of the present invention with double-layer air-flow cooling outgoing mirror device, is limited to two-layerly but have more than, and also can form three layers or sandwich construction form more.With three layers is example; The thickness of every outgoing mirror will be 1/3rd of a former outgoing mirror; Can form two confined gas circulation canals; Passage the blowing pressure near the laser works chamber is 1/3rd atmospheric pressure (0.33MPa), is 2/3rds atmospheric pressure (0.66MPa) near the passage the blowing pressure of atmospheric side, and other technical characterictic is with double-deck identical.For adopting double-deck outgoing mirror under the also thicker situation of lens thickness, just can consider to adopt three layers even the structure of multilayer more, will damage and play good effect reducing the outgoing mirror material body.
Claims (3)
1. multilayer air-flow cooling laser device outgoing mirror device is characterized in that, this device comprises polylith outgoing mirror, a plurality of air ring and a mount pad; The thickness of every outgoing mirror is identical, and the one side of an outgoing mirror is coated with the partial reflection film, and another side is coated with anti-reflection film, and the two sides of all the other outgoing mirrors all is coated with anti-reflection film; The polylith outgoing mirror is coaxial and laterally arranges; The outgoing mirror that is coated with the partial reflection film places laser works chamber side; And the one side that is coated with the partial reflection film is relative with the concave surface completely reflecting mirror of laser optical resonant cavity; This is coated with the contact-making surface sealing of the outgoing mirror and the laser works cavity of partial reflection film simultaneously, and the outgoing mirror that remaining two sides all is coated with anti-reflection film is arranged in order, outermost contact atmosphere; Be separated by in twos through air ring respectively between the polylith outgoing mirror, and the sealing of the contact-making surface of air ring and outgoing mirror, the combination of polylith outgoing mirror is fixed on the laser works cavity through mount pad; Be provided with the sealing and circulating cooling blast in the confined space between per two outgoing mirrors of being separated by in twos.
2. multilayer air-flow cooling laser device outgoing mirror device as claimed in claim 1 is characterized in that said air ring radially is being provided with two relative through holes.
3. according to claim 1 or claim 2 multilayer air-flow cooling laser device outgoing mirror device is characterized in that said mount pad radially is being provided with relative through hole, and corresponding successively vertically with the through hole of said air ring.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106136100A CN102082387B (en) | 2010-12-30 | 2010-12-30 | Multi-layer air flow cooled output mirror device of laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106136100A CN102082387B (en) | 2010-12-30 | 2010-12-30 | Multi-layer air flow cooled output mirror device of laser |
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| CN102082387A CN102082387A (en) | 2011-06-01 |
| CN102082387B true CN102082387B (en) | 2012-06-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102664341B (en) * | 2012-05-10 | 2013-07-03 | 中国科学院长春光学精密机械与物理研究所 | Non-stable cavity type output cavity mirror mounting structure without transverse fulcrum bar |
| CN105071197B (en) * | 2015-08-14 | 2018-12-21 | 中国科学院理化技术研究所 | Device for preventing laser thin film optical device from being damaged |
| CN108957767B (en) * | 2018-07-16 | 2021-03-09 | 湖北三江航天红林探控有限公司 | High-power light energy cut-off device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4606620A (en) * | 1985-10-10 | 1986-08-19 | Shibuya Kogyo Co., Ltd. | Device for cooling reflecting mirror |
| US5416791A (en) * | 1992-10-28 | 1995-05-16 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator |
| CN101431209A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Blowing device for optical cavity output window of high power gas laser |
-
2010
- 2010-12-30 CN CN2010106136100A patent/CN102082387B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4606620A (en) * | 1985-10-10 | 1986-08-19 | Shibuya Kogyo Co., Ltd. | Device for cooling reflecting mirror |
| US5416791A (en) * | 1992-10-28 | 1995-05-16 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator |
| CN101431209A (en) * | 2008-12-08 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Blowing device for optical cavity output window of high power gas laser |
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